KR20100060307A - Tunable microfluidic chip for particle focusing and sorting using flexible film substrate - Google Patents

Abstract

PURPOSE: A microfluid chip for arranging and separating particles using a flexible film substrate is provided to form uneven electric field inside the microchannel and to shorten device manufacturing time. CONSTITUTION: A microfluid chip for arranging and separating particles using a flexible film comprises: a power supply device applying voltage; a first electrode which is electrically connected to one end of the power supply device and from which driving voltage is applied from the power supply device; a first substrate attached to the first electrode; a second electrode which is electrically connected to the other end of the power supply device; a second substrate attached to the second electrode; and microfluid flow path between the first and second electrodes. The first and second electrodes are formed of gold, silver, aluminum, copper, platinum, or ITO.

Description

Tunable Microfluidic Chip for Particle Focusing and Sorting Using Flexible Film Substrate}

The present invention relates to a microfluidic chip for aligning and separating particles, and to allow a non-uniform electric field to be formed inside the microfluidic flow path so as to drive fine particles and the like by an electrodynamic principle, and to the electric field inside the microfluidic flow path. It relates to a microfluidic chip for alignment and separation of particles that can be controlled.

With the development of nanotechnology, researches are being actively conducted to manufacture microelectronic devices for micromaterial detection and driving using microfabrication technology and to apply them in biological, chemical, and medical fields.

In such microelectronic devices, electrokinetics such as electrophoresis, dielectrophoresis, and AC electro-osmosis are used to precisely drive or isolate microparticles, proteins, cells, and bacteria. The principle of can be used mainly.

Dielectric behavior is a phenomenon in which a dielectric material is polarized by an electromagnetic induction phenomenon in a non-uniform electric field and is moved by force. The nature of the electrophoresis may vary depending on the type of fluid, the type of microparticles and molecules, and the frequency of the AC voltage signal. On the basis of the above electrophoresis, a method for aligning / transfering microparticles in three dimensions by fabricating a circular electrode to align / transfer microparticles (J. Microelectromech. Syst. 14; 480, 2005) has been published. There is a bar.

However, when using the above method, there is a problem that an expensive and complicated process must be accompanied in order to pattern the microelectrode of a complicated structure.

In addition, the above method has a problem in that it is unsuitable for the development of a portable flow cytometer due to the complicated structure and expensive device characteristics.

In addition, when the target material or the application field is changed, there is a problem in that the driving characteristics of the electrodynamic material cannot be adjusted by fluidly adjusting the electrode gap and the electric field.

The present invention has been made in order to solve the above problems, to enable the formation of a non-uniform electric field inside the microfluidic flow path to drive the fine particles by the electrodynamic principle, by using the bending characteristics of the film An object of the present invention is to provide a microfluidic chip for aligning and separating particles using a flexible film substrate capable of controlling an electric field inside the microfluidic channel.

In order to achieve the object as described above, the microfluidic chip for aligning and separating particles using the flexible film substrate according to the present invention is a power supply for applying a voltage, and is electrically connected to one end of the power supply device. A first electrode receiving a driving voltage from the first electrode; a first substrate attached to the first electrode; and opposite to the first electrode, electrically connected to the other end of the power supply device, and applying a reference voltage from the power supply device. A receiving second electrode, a second substrate facing the first substrate, attached to the second electrode, and formed between the first electrode and the second electrode, and including a microfluidic flow path on which the sample is located; The first substrate and the second substrate are film substrates formed of a flexible material. When the first and second substrates are bent, the first electrode and the second substrate are attached to the first substrate. A second electrode attached to also be bent.

The power supply device may be a DC voltage source or an AC voltage source.

The first electrode may be formed of one of gold, silver, aluminum, copper, platinum, and ITO.

The second electrode may be formed of one of gold, silver, aluminum, copper, platinum, and ITO.

The first substrate and the second substrate may be a film substrate formed of a polyester resin or a polyethylene resin.

The sample located in the microfluidic channel may include one or more of polymeric microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, cells, microparticles bound to molecules, and other bioparticles.

When a voltage is applied to the first electrode and the second electrode, an electric field may be formed in the microfluidic flow path.

The sample exposed to the electric field is moved in a specific direction by the electrodynamic principle, the electrodynamic principle may be one of electrophoresis, dielectric and electroosmotic.

When the distance between the first electrode and the second electrode is far, the strength of the electric field in the microfluidic flow path becomes weak, and when the distance between the first electrode and the second electrode is close, the strength of the electric field in the microfluidic flow path may become stronger. have.

The microstructure may further include a microstructure positioned between the first electrode and the second electrode to separate the first electrode and the second electrode.

In addition, the microfluidic chip for aligning and separating particles using the flexible film substrate according to the present invention in order to achieve the above object is a power supply for applying a voltage, and is electrically connected to one end of the power supply device, A first electrode receiving a driving voltage from a power supply device, a first substrate attached to the first electrode, and opposed to the first electrode, electrically connected to the other end of the power supply device, and a reference voltage from the power supply device; A microfluidic flow path formed between the first electrode and the second electrode, the second electrode applied to the second electrode, the second substrate facing the first substrate, and attached to the second electrode; And a fine structure spaced apart from the first electrode and the second electrode, and a substrate adjusting device for modifying the shape of the first substrate and the second substrate, wherein the first substrate and the second substrate are bent. The film substrate is formed of a material that can be formed, and when the first substrate and the second substrate are bent by the substrate adjusting device, the first electrode attached to the first substrate and the second electrode attached to the second substrate are also bent. Can lose.

The microfluidic flow path may further include a sample injection hole so as to inject and collect the sample.

In addition, the microfluidic chip for aligning and separating particles using the flexible film substrate according to the present invention in order to achieve the above object is a power supply for applying a voltage, and is electrically connected to one end of the power supply device, A first electrode receiving a driving voltage from a power supply device, a first substrate attached to the first electrode, and opposed to the first electrode, electrically connected to the other end of the power supply device, and a reference voltage from the power supply device; A microfluidic flow path formed between the first electrode and the second electrode, the second electrode which is applied to the second electrode, which is opposite to the first substrate, and is attached to the second electrode; The first substrate may be a film substrate formed of a flexible material. When the first substrate is bent, the first electrode attached to the first substrate may also be bent.

The power supply device may be a DC voltage source or an AC voltage source.

The first electrode may be formed of one of gold, silver, aluminum, copper, platinum, and ITO.

The second electrode may be formed of one of gold, silver, aluminum, copper, platinum, and ITO.

The first substrate may be a film substrate formed of a polyester resin or polyethylene resin.

The second substrate may be formed of one of glass, silicon, and plastic.

The sample located in the microfluidic channel may include one or more of polymeric microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, cells, microparticles bound to molecules, and other bioparticles.

When a voltage is applied to the first electrode and the second electrode, an electric field may be formed in the microfluidic flow path.

The sample exposed to the electric field is moved in a specific direction by the electrodynamic principle, the electrodynamic principle may be one of electrophoresis, dielectric and electroosmotic.

When the distance between the first electrode and the second electrode is far, the strength of the electric field in the microfluidic flow path becomes weak, and when the distance between the first electrode and the second electrode is close, the strength of the electric field in the microfluidic flow path may become stronger. have.

The microstructure may further include a microstructure positioned between the first electrode and the second electrode to separate the first electrode and the second electrode.

In addition, the microfluidic chip for aligning and separating particles using the flexible film substrate according to the present invention in order to achieve the above object is a power supply for applying a voltage, and is electrically connected to one end of the power supply device, A first electrode receiving a driving voltage from a power supply device, a first substrate attached to the first electrode, and opposed to the first electrode, electrically connected to the other end of the power supply device, and a reference voltage from the power supply device; A microfluidic flow path formed between the first electrode and the second electrode, the second electrode which is applied to the second electrode, which is opposite to the first substrate, and is attached to the second electrode; The second substrate may be a film substrate formed of a bendable material. When the second substrate is bent, the second electrode attached to the second substrate may also be bent.

The power supply device may be a DC voltage source or an AC voltage source.

The first electrode may be formed of one of gold, silver, aluminum, copper, platinum, and ITO.

The second electrode may be formed of one of gold, silver, aluminum, copper, platinum, and ITO.

The first substrate may be formed of one of glass, silicon, and plastic.

The second substrate may be a film substrate formed of polyester resin or polyethylene resin.

The sample located in the microfluidic channel may include one or more of polymeric microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, cells, microparticles bound to molecules, and other bioparticles.

When a voltage is applied to the first electrode and the second electrode, an electric field may be formed in the microfluidic flow path.

The sample exposed to the electric field is moved in a specific direction by the electrodynamic principle, the electrodynamic principle may be one of electrophoresis, dielectric and electroosmotic.

When the distance between the first electrode and the second electrode is far, the strength of the electric field in the microfluidic flow path becomes weak, and when the distance between the first electrode and the second electrode is close, the strength of the electric field in the microfluidic flow path may become stronger. have.

The microstructure may further include a microstructure positioned between the first electrode and the second electrode to separate the first electrode and the second electrode.

As described above, according to the microfluidic chip for aligning and separating particles using the flexible film substrate according to the present invention, the microfluidic chip is formed by the electrodynamic principle by forming a non-uniform electric field inside the microchannel formed by the film without complicated microprocessing. There is an effect that allows the particles to be aligned or separated. Accordingly, the time required to manufacture the device can be significantly shortened, and the cost can be greatly reduced.

In addition, there is an advantage in the integration to develop a portable device due to the simple device structure.

In addition, there is no need to fabricate a fine electrode structure, and does not require complex driving, so there is an effect that can be employed as a portable device for fine particle alignment and separation.

In addition, by allowing the film to be bent into a specific shape, the electric field can be freely adjusted, various kinds of particles can be applied, and the electrodynamic force magnitude can be adjusted and desired to align and separate the fine particles. The efficiency can be adjusted.

In this way, the present invention can be applied to the field of lab-on-a-chip, which performs various medical, biological, and chemical field experiments on a chip using electrokinetic principles and flow cytometry using cell alignment and analysis.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention; First, it should be noted that the same components or parts in the drawings represent the same reference numerals as much as possible. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the gist of the present invention.

1A and 1B are schematic views of a microfluidic chip for aligning and separating particles using a flexible film substrate according to a first embodiment of the present invention.

1A and 1B, the microfluidic chip 100 for aligning and separating particles using the flexible film substrate according to the first embodiment of the present invention includes a power supply device 110, a first electrode 120, The second electrode 130, the first substrate 140, the second substrate 150, the microfluidic flow path 160, the sample 170, and the microstructure 180 may be included.

The power supply 110 applies a voltage to the microfluidic chip 100 for aligning and separating particles using the flexible film substrate according to the first embodiment of the present invention.

An AC voltage source or a DC voltage source may be used as the power supply device 110. When an AC voltage source is used, a frequency, a voltage magnitude, a shape of an signal, and an offset voltage may be adjusted.

The first electrode 120 is electrically connected to one end of the power supply 110 and receives a driving voltage from the power supply.

The first electrode 120 may be formed of one of gold, silver, aluminum, copper, platinum, and indium tin oxide (ITO). However, the first electrode 120 may be transparent so that the inside of the device may be observed through the first electrode 120. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The second electrode 130 is electrically connected to the other end of the power supply 110 and receives a reference voltage from the power supply.

Of course, the second electrode 130 is disposed to face the first electrode 120 as shown in FIGS. 1A and 1B.

The second electrode 130 may be formed of one of gold, silver, aluminum, copper, platinum, and indium tin oxide (ITO). However, the second electrode 130 may be transparent to observe the inside of the device through the second electrode 130. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The first substrate 140 may be attached to the bottom surface of the first electrode 120.

The first substrate 140 is a film substrate which is formed to be bent, and is preferably formed of a polyester resin or a polyethylene resin.

When the first substrate 140 is bent as described above, the first electrode 120 attached to the first substrate 140 may also be bent like the first substrate 140. The first substrate 140 may be curved to be convex downward as shown in FIG. 1A or may be bent upwardly convex as shown in FIG. 1B.

The second substrate 150 may be attached to an upper surface of the second electrode 130.

Of course, the second substrate 150 is disposed to face the first substrate 140 as shown in FIGS. 1A and 1B.

The second substrate 150 is a film substrate which is formed to be bent. Accordingly, the second substrate 150 is preferably formed of a polyester resin or a polyethylene resin.

When the second substrate 150 is bent as described above, the second electrode 130 attached to the second substrate 150 may also be bent like the second substrate 150. The second substrate 150 may be bent to have a convex upward shape as shown in FIG. 1A or may be bent at a convex downward shape as shown in FIG. 1B.

The microfluidic chip 100 for aligning and separating particles using the flexible film substrate according to the first embodiment of the present invention is a substrate control apparatus for modifying the shape of the first substrate 140 and the second substrate 150. (Not shown).

The substrate adjusting device (not shown) may change the shape of the first and second substrates 140 and 150 so that the first and second substrates 140 and 150 may be bent. Any device may be used as the back side, and the type, shape, or number of the substrate adjusting device (not shown) is not limited thereto.

The microfluidic flow path 160 is formed between the first electrode 120 and the second electrode 130, and the sample 170 is positioned.

The sample 170 may include various materials such as polymer microparticles, metal nanoparticles, semiconductor nanoparticles, biomolecules such as proteins and DNA, and microparticles in which molecules are bound.

In particular, the sample 170 is prepared such that these substances are present in various liquid droplets, such as distilled water, cell culture medium, PBS buffer, and the like to cause the movement of the substances within the liquid droplets present in the microfluidic flow path 160. do.

On the other hand, when a voltage is applied to the first electrode 120 and the second electrode 130 from the power supply device 110, the microfluid formed between the first electrode 120 and the second electrode 130 An electric field is formed in the flow path 160, and the sample 170 exposed to the electric field is moved by an electrokinetic principle. Here, the moving direction of the sample 170 is determined by the characteristics of the voltage signal humanized from the sample 170 and the power supply 110.

The electrokinetic principle may include electrophoresis, dielectric electrophoresis and electroosmotic.

Electrophoresis is a phenomenon in which fine particles having positive and negative charges are moved by a coulomb force in an electric field. That is, the particles with the positive charge move to the negative electrode, and the particles with the negative charge move to the positive electrode. The movement characteristics of the particles by electrophoresis may vary depending on the amount of charge, the size of the particles, the electrical, chemical, physical properties of the medium, or the strength of the electric field.

Dielectrophoresis (DEP) is a phenomenon in which a dielectric exhibits an electric dipole due to electromagnetic induction and moves under a force in a non-uniform electric field. The movement of these particles is determined by the difference in permittivity between the particles and the liquid around them, and the size of the particles (proportional to the cube of the radius) and the magnitude of the electric field gradient (proportional to the gradient of the square of the electric field). This will affect the speed of movement.

The dielectrophoresis includes negative dielectrophoresis in which fine particles move in a direction in which the electric field is weak, and positive dielectrophoresis in which fine particles move in a direction in which the electric field is strong. The nature of the electrophoresis may vary depending on the type of fluid, the type of microparticles and molecules, and the frequency of the AC voltage signal.

The electroosmosis includes AC electro-osmosis (ACEO), induced-charge electro-osmosis (ICEO), Faradaically-coupled electro-osmosis (FCEO), and the like.

AC electro-osmosis (ACEO) is a non-uniform electric field in which ions in the fluid form a thin electric double layer on the surface of the electrode and the liquid interface, and a tangent electric field formed by voltage. This is a phenomenon in which fluid moves along an electrode surface due to the influence of a tangential electric field.

This electroosmotic phenomenon causes the electric field to flow in the strong direction, leading to rapid concentration of materials. The concentration characteristics of the electroosmosis depend on various physical and chemical properties such as the frequency of the AC voltage signal and the type, size, and charge amount of the material or medium.

The induced-charge electro-osmosis (ICEO) is an electroosmotic flow generated on the surface of the microparticles by electric charges induced by the microparticles in the electric field, and assembled by pushing the microparticles located near the electrode surface to the wall. There is a characteristic to let. This phenomenon can cause the microparticles to self-assemble (aggregate) with a crystal structure (crystal structure).

Faradaically-coupled electro-osmosis (FCEO) is an electroosmotic flow generated by an electric field of a horizontal component generated on the surface of an electrode because the Faraday reaction at the electrode cannot be ignored in a low frequency region. There is a characteristic that generates the upward flow of the particles to rise above the fine particles located close to the electrode.

The microstructure 180 is spaced apart between the first electrode 120 and the second electrode 130, so that the microfluidic flow path 160 is disposed between the first electrode 120 and the second electrode 130. To be formed.

The microstructure 180 is generally referred to as a spacer, and the microstructure 180 may use a photoresist such as SU-8 or a polymer such as polydimethylsiloxane (PDMS).

As described above, the microfluidic chip 100 for aligning and separating particles using the flexible film substrate according to the first embodiment of the present invention may be formed as the first substrate 140 and the second substrate 150 are bent. The first electrode 120 attached to the first substrate 140 and the second electrode 130 attached to the second substrate 150 may also be bent.

Accordingly, the height of the microfluidic flow path 160 formed between the first electrode 120 and the second electrode 130, that is, the distance between the first electrode 120 and the second electrode 130 may be varied. It can be adjusted.

More specifically, as shown in FIG. 1A, when the first substrate 140 and the second substrate 150 are bent such that the distance between the first electrode 120 and the second electrode 130 is farther away, the microfluidics The height of the flow path 160 is increased and the strength of the electric field formed in the microfluidic flow path 160 is weakened.

In addition, as shown in FIG. 1B, when the first substrate 140 and the second substrate 150 are bent to close the distance between the first electrode 120 and the second electrode 130, the microfluidic flow path The height of the 160 is lowered, and the strength of the electric field formed in the microfluidic flow path 160 becomes stronger.

At this time, if the height of the microstructure 180 is constant, the microfluidic flow path 160 is bent in the center portion as shown in FIGS. 1A and 1B of the first embodiment, and in the case of FIG. The electric field strength is weaker than the other parts, and in the case of FIG. 1B, the electric field strength of the center part is stronger than the other parts.

As described above, the intensity of the electric field formed in the microfluidic flow path 160 may be adjusted, thereby adjusting the alignment and separation characteristics of the sample 170 located in the microfluidic flow path 160.

2A and 2B are schematic diagrams of a microfluidic chip for aligning and separating particles using a flexible film substrate according to a second embodiment of the present invention.

As shown in FIGS. 2A and 2B, the microfluidic chip 200 for aligning and separating particles using the flexible film substrate according to the second embodiment of the present invention includes a power supply 210, a first electrode 220, The second electrode 230, the first substrate 240, the second substrate 250, the microfluidic flow path 260, the sample 270, and the microstructure 280 may be included.

The power supply device 210 applies a voltage to the microfluidic chip 200 for aligning and separating particles using the flexible film substrate according to the second embodiment of the present invention.

An AC voltage source or a DC voltage source may be used as the power supply device 210. When an AC voltage source is used, a frequency, a magnitude of a voltage, a shape of a signal, and an offset voltage may be adjusted.

The first electrode 220 is electrically connected to one end of the power supply device 210 and receives a driving voltage from the power supply device.

The first electrode 220 may be formed of one of gold, silver, aluminum, copper, platinum, and indium tin oxide (ITO). However, the first electrode 220 may be transparent in order to observe the inside of the device through the first electrode 220. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The second electrode 230 is electrically connected to the other end of the power supply 210 and receives a reference voltage from the power supply.

 Of course, the second electrode 230 is disposed to face the first electrode 220 as illustrated in FIGS. 2A and 2B.

The second electrode 230 may be formed of one of gold, silver, aluminum, copper, platinum, and indium tin oxide (ITO). However, the second electrode 230 may be transparent so that the inside of the device may be observed through the second electrode 230. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The first substrate 240 may be attached to the bottom surface of the first electrode 220.

The first substrate 240 is a film substrate which is formed to be bent, and therefore, preferably, the first substrate 240 is formed of a polyester resin or a polyethylene resin.

When the first substrate 240 is bent as described above, the first electrode 220 attached to the first substrate 240 may also be bent like the first substrate 240. The first substrate 240 may be curved to be convex downward as shown in FIG. 2A or may be bent upwardly convex as shown in FIG. 2B.

The second substrate 250 may be attached to an upper surface of the second electrode 230.

Of course, the second substrate 250 is disposed to face the first substrate 240 as shown in FIGS. 2A and 2B.

In the present embodiment, unlike the case of the first embodiment, the second substrate 250 is not bent. When the second substrate 250 does not need to be bent, it may be formed of glass or silicon, or may be formed of plastic such as polymethyl methacrylate (PMMA).

That is, unlike the first substrate 240 that can be bent, the second substrate 250 is not bent by being formed of glass, silicon, polymethyl methacrylate (PMMA), or the like. Accordingly, the second electrode 230 attached to the second substrate 250 is also not bent.

The microfluidic chip 200 for aligning and separating particles using the flexible film substrate according to the second embodiment of the present invention may include a substrate control device (not shown) to modify the shape of the first substrate 240. Can be.

The substrate adjusting device (not shown) may be any device as long as the device can deform the shape of the first substrate so that the first substrate 240 is bent, wherein the substrate adjusting device (not shown) It does not limit the kind, shape or number.

The microfluidic flow path 260 is formed between the first electrode 220 and the second electrode 230, and the sample 270 is positioned.

The sample 270 may include various materials such as polymer microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, biomolecules, and the like.

In particular, the sample 270 is manufactured so that these substances are present in various liquid droplets such as distilled water, cell culture medium, PBS buffer, and the like, and the movement of the substances occurs within the liquid droplets present in the microfluidic channel 260. do.

On the other hand, when a voltage is applied from the power supply device 210 to the first electrode 220 and the second electrode 230, the microfluid formed between the first electrode 220 and the second electrode 230 An electric field is formed in the flow path 260, and the sample 270 exposed to the electric field is moved by an electrokinetic principle. The movement direction of the sample 270 is determined by the characteristics of the voltage signal humanized from the sample 270 and the power supply 210.

Since the electrokinetic principle has been described above, the description is omitted here.

The microstructure 280 is spaced apart between the first electrode 220 and the second electrode 230, so that the microfluidic flow path 260 is spaced between the first electrode 220 and the second electrode 230. To be formed.

The microstructure 280 is generally referred to as a spacer, and as the microstructure 280, a photoresist such as SU-8 or a polymer such as polydimethylsiloxane (PDMS) may be used.

As described above, the microfluidic chip 200 for aligning and separating particles using the flexible film substrate according to the second embodiment of the present invention may be formed on the first substrate 240 as the first substrate 240 is bent. The attached first electrode 220 may also be bent.

Accordingly, the height of the microfluidic flow path 260 formed between the first electrode 220 and the second electrode 230, that is, the distance between the first electrode 220 and the second electrode 230 may be varied. It can be adjusted.

In more detail, as shown in FIG. 2A, when the first substrate 240 is bent such that the distance between the first electrode 220 and the second electrode 230 is far, the height of the microfluidic flow path 260 is increased. It becomes high, the strength of the electric field formed in the microfluidic flow path 260 is weakened.

In addition, as shown in FIG. 2B, when the first substrate 240 is bent such that the distance between the first electrode 220 and the second electrode 230 is close, the height of the microfluidic flow path 260 is low. The strength of the electric field formed in the microfluidic flow path 260 is increased.

At this time, if the height of the microstructure 280 is constant, the microfluidic flow path 260 is bent in the center portion as shown in FIGS. 2A and 2B of the second embodiment, and in the case of FIG. The electric field strength is weaker than other parts, and in the case of FIG. 2B, the electric field strength of the center part is stronger than the other parts.

As described above, the intensity of the electric field formed in the microfluidic flow path 260 may be adjusted, thereby adjusting the alignment and separation characteristics of the sample 270 located in the microfluidic flow path 260.

3A and 3B are schematic views of microfluidic chips for aligning and separating particles using a flexible film substrate according to a third embodiment of the present invention.

3A and 3B, the microfluidic chip 300 for aligning and separating particles using the flexible film substrate according to the third embodiment of the present invention includes a power supply device 310, a first electrode 320, The second electrode 330, the first substrate 340, the second substrate 350, the microfluidic flow path 360, the sample 370, and the microstructure 380 may be included.

The power supply device 310 applies a voltage to the microfluidic chip 300 for aligning and separating particles using the flexible film substrate according to the third embodiment of the present invention.

An AC voltage source or a DC voltage source may be used as the power supply device 310, and when an AC voltage source is used, frequency, voltage magnitude, shape of a signal, and offset voltage may be adjusted.

The first electrode 320 is electrically connected to one end of the power supply device 310 and receives a driving voltage from the power supply device.

The first electrode 320 may be formed of one of gold, silver, aluminum, copper, platinum, and indium tin oxide (ITO). However, the first electrode 320 may be transparent so that the inside of the device may be observed through the first electrode 320. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The second electrode 330 is electrically connected to the other end of the power supply device 310 and receives a reference voltage from the power supply device.

  Of course, the second electrode 330 is disposed to face the first electrode 320 as shown in FIGS. 3A and 3B.

The second electrode 330 may be formed of one of gold, silver, aluminum, copper, platinum, and indium tin oxide (ITO). However, the second electrode 330 may be transparent to observe the inside of the device through the second electrode 330. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The first substrate 340 may be attached to the bottom surface of the first electrode 320.

In the present embodiment, unlike the first and second embodiments, the first substrate 340 is not bent. If the first substrate 340 does not need to be bent, it may be formed of glass or silicon, or may be formed of plastic such as polymethyl methacrylate (PMMA).

That is, unlike the second substrate 350 that can be bent, the first substrate 340 is not bent by being formed of glass, silicon, polymethyl methacrylate (PMMA), or the like. Accordingly, the first electrode 320 attached to the first substrate 340 is also not bent.

The second substrate 350 may be attached to an upper surface of the second electrode 330.

Of course, the second substrate 350 is disposed to face the first substrate 340 as shown in FIGS. 3A and 3B.

The second substrate 350 is a film substrate which is formed to be bent. Accordingly, the second substrate 350 may be formed of a polyester resin or a polyethylene resin.

When the second substrate 350 is bent as described above, the second electrode 330 attached to the second substrate 350 may also be bent like the second substrate 350. The second substrate 350 may be curved to be convex upward as shown in FIG. 3A, or may be curved to be convex downward as shown in FIG. 3B.

The microfluidic chip 300 for aligning and separating particles using the flexible film substrate according to the third embodiment of the present invention may include a substrate control device (not shown) to modify the shape of the second substrate 350. Can be.

The substrate adjusting device (not shown) may be any device as long as the device can deform the shape of the second substrate 350 so that the second substrate 350 is bent. It does not limit the kind, shape or number of si).

The microfluidic flow path 360 is formed between the first electrode 320 and the second electrode 330, and the sample 370 is positioned.

The sample 370 may include various materials such as polymer microparticles, metal nanoparticles, semiconductor nanoparticles, biomolecules such as proteins and DNA, and microparticles in which molecules are bound.

In particular, the sample 370 is manufactured such that these substances are present in various liquid droplets such as distilled water, cell culture medium, PBS buffer, and the like, and the movement of the substances occurs within the liquid droplets present in the microfluidic flow path 360. do.

On the other hand, when a voltage is applied to the first electrode 320 and the second electrode 330 from the power supply device 310, the microfluid formed between the first electrode 320 and the second electrode 330 An electric field is formed in the flow path 360, and the sample 370 exposed to the electric field is moved by an electrokinetic principle. The movement direction of the sample 370 is determined by the characteristics of the voltage signal humanized from the sample 370 and the power supply 310.

Since the electrokinetic principle has been described above, the description is omitted here.

The microstructure 380 is spaced apart from the first electrode 320 and the second electrode 330, so that the microfluidic flow path 360 is disposed between the first electrode 320 and the second electrode 330. To be formed.

The microstructure 380 is generally referred to as a spacer, and as the microstructure 380, a photoresist such as SU-8 or a polymer such as polydimethylsiloxane (PDMS) may be used.

As described above, the microfluidic chip 300 for aligning and separating particles using the flexible film substrate according to the third embodiment of the present invention may be formed on the second substrate 350 as the second substrate 350 is bent. The attached second electrode 330 may also be bent.

Accordingly, the height of the microfluidic flow path 360 formed between the first electrode 320 and the second electrode 330, that is, the distance between the first electrode 320 and the second electrode 330 may be varied. It can be adjusted.

More specifically, as shown in FIG. 3A, when the second substrate 350 is bent such that the distance between the first electrode 320 and the second electrode 330 is farther away, the height of the microfluidic flow path 360 is increased. It becomes high, the strength of the electric field formed in the microfluidic flow path 360 is weakened.

In addition, as shown in FIG. 3B, when the second substrate 350 is bent such that the distance between the first electrode 320 and the second electrode 330 is close, the height of the microfluidic flow path 360 is low. The strength of the electric field formed in the microfluidic flow path 360 is increased.

At this time, if the height of the microstructure 380 is constant, the microfluidic flow path 360 is bent in the center portion as shown in FIGS. 3A and 3B of the third embodiment, and in the case of FIG. The electric field strength is weaker than other parts, and in the case of FIG. 3B, the electric field strength of the center part is stronger than the other parts.

As described above, the intensity of the electric field formed in the microfluidic flow path 360 may be controlled, and thus, the alignment and separation characteristics of the sample 370 located in the microfluidic flow path 360 may be adjusted.

4a and 4b is a process chart for manufacturing a microfluidic chip for alignment and separation of particles using a flexible film substrate according to the present invention.

However, the method of manufacturing the microfluidic chip for aligning and separating particles using the flexible film substrate according to the present invention may be performed by various methods as well as the methods shown in the description of FIGS. 4A and 4B.

Figure 4a is a method using a photosensitive material, a method of forming a microfluidic channel between the two films by using UV lithography (lithography).

First, a thin coating of a material through which gas can pass, such as PDMS, on a glass, and then a NOA prepolymer such as NOA is placed thereon and a film with a spacer of a specific height thereon. Raise the electrode. At this time, the material coated on the wafer can pass the gas well, so that the photosensitive material in contact with the wafer does not harden even when irradiated with UV. Therefore, when the film electrode is removed from the substrate after UV irradiation using a mask of a specific pattern, a structure of a specific pattern is formed on the film electrode, and the surface that has been in contact with the substrate is less hard. maintain.

Next, after washing away the portion not irradiated with UV on the film electrode, another film electrode is attached on the film electrode on which the structure is formed. In this case, the two film electrodes must face each other with conductive portions.

Finally, the final device is irradiated with UV and hardened to bond more firmly. Then, a sample containing fine particles is injected and a voltage is applied.

When the device is manufactured by the above method, the time required for manufacturing the device is very short, the cost is very low, and the durability of the device is improved.

Figure 4b is a method using a polymer such as PDMS is a method of forming a microfluidic channel between the two films by using micro molding (micro molding).

First, a master for molding is manufactured using a method such as UV lithography. At this time, a photosensitive material such as SU-8 may be used on the silicon substrate. After the master is produced, the solid body is poured and the film is placed on it, and then pressed with a strong force up and down so that the master and the film contact each other. When the polymer is hardened in the state and the film is removed, a structure formed of the polymer is formed with the electrode portion of the film exposed. If another film electrode is adhere | attached on it, an element can be completed finally.

When fabricating a device in this way, it is possible to repeatedly mass-produce the same shape of a device from one master, and the cost is very low.

5A and 5B are diagrams showing simulation results showing changes in an electric field formed in the microfluidic chip 300 for aligning and separating particles using the flexible film substrate according to the third embodiment of the present invention.

Here, representatively, the simulation results are shown only for the third embodiment of the present invention. However, in the case of the first embodiment and the second embodiment, the prediction results can be sufficiently predicted from the simulation results of the third embodiment.

In the simulation condition, a 10 V voltage of 100 kHz was applied between the first electrode 320 and the second electrode 330, and the sample in which the electric field was formed was assumed to be distilled water.

5A illustrates a case where the second substrate 350 is convexly curved upward, and a portion of the microfluidic flow path 360 is formed higher than another portion.

According to the simulation result, since the strength of the electric field is weaker than that of the other part of the center of the microfluidic flow path 360, the microparticles 370a affected by the negative electrophoresis of the microfluidic flow path 360 are formed. Moving to the center portion, it was found that the fine particles (370b) affected by the positive dielectrophoresis will move in the opposite direction.

5B illustrates a case where the second substrate 350 is convexly curved downward, and the center portion of the microfluidic flow path 360 is formed lower than the other portions.

According to the simulation result, since the strength of the electric field is stronger than that of the other part of the center of the microfluidic flow path 360, the microparticles 370b affected by the positive dielectrophoresis are formed in the microfluidic flow path 360. Moving to the center portion, it was found that the fine particles (370a) affected by the negative electrophoresis move in the opposite direction.

Alignment and separation characteristics and efficiency of the fine particles as described above can be freely controlled by controlling the degree of bending the film substrate with an external force.

As described above with reference to the drawings illustrating a microfluidic chip for alignment and separation of particles using the flexible film substrate according to the present invention, the present invention is not limited by the embodiments and drawings disclosed herein, Of course, various modifications may be made by those skilled in the art within the scope of the technical idea of the present invention.

1A and 1B are schematic views of a microfluidic chip for aligning and separating particles using a flexible film substrate according to a first embodiment of the present invention.

2A and 2B are schematic diagrams of a microfluidic chip for aligning and separating particles using a flexible film substrate according to a second embodiment of the present invention.

3A and 3B are schematic views of microfluidic chips for aligning and separating particles using a flexible film substrate according to a third embodiment of the present invention.

4a and 4b is a process chart for manufacturing a microfluidic chip for the alignment and separation of particles using a flexible film substrate according to the present invention.

5A and 5B are diagrams showing simulation results showing changes in an electric field formed inside a microfluidic chip for aligning and separating particles using a flexible film substrate according to a third embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

100: microfluidic chip for alignment and separation of particles using a flexible film substrate according to the first embodiment of the present invention

110: power supply device 120: first electrode

130: second electrode 140: first substrate

150: second substrate 160: microfluidic flow path

170: sample 180: microstructure

200: microfluidic chip for alignment and separation of particles using a flexible film substrate according to a second embodiment of the present invention

300: a microfluidic chip for aligning and separating particles using the flexible film substrate according to the third embodiment of the present invention

Claims (34)

A power supply for applying a voltage; A first electrode electrically connected to one end of the power supply device and receiving a driving voltage from the power supply device; A first substrate attached to the first electrode; A second electrode facing the first electrode, electrically connected to the other end of the power supply device, and receiving a reference voltage from the power supply device; A second substrate facing the first substrate and attached to the second electrode; And A microfluidic flow channel formed between the first electrode and the second electrode and having a sample; Including, The first substrate and the second substrate are film substrates formed of a bendable material. When the first and second substrates are bent, the first and second substrates are attached to the first electrode and the second substrate. Microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that the second electrode is also bent. The method according to claim 1, The power supply device is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that the DC voltage source or AC voltage source. The method according to claim 1, The first electrode is a microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that formed of one of gold, silver, aluminum, copper, platinum and ITO. The method according to claim 1, The second electrode is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that formed of one of gold, silver, aluminum, copper, platinum and ITO. The method according to claim 1, The first substrate and the second substrate is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that the film substrate formed of a polyester resin or polyethylene resin. The method according to claim 1, The sample located in the microfluidic flow path may include at least one of polymer microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, cells, microparticles bound to molecules, and other bioparticles. Microfluidic chip for sorting and separating particles using a substrate. The method according to claim 1, The microfluidic chip for aligning and separating particles using a flexible film substrate, wherein an electric field is formed in the microfluidic flow path when voltage is applied to the first electrode and the second electrode. The method of claim 7, The sample exposed to the electric field is moved in a specific direction by an electrodynamic principle, the electrokinetic principle is one of electrophoresis, dielectric electrophoresis and electroosmotic fine for aligning and separating particles using a flexible film substrate Fluid chip. The method of claim 7, When the distance between the first electrode and the second electrode increases, the intensity of the electric field in the microfluidic flow path becomes weak, and when the distance between the first electrode and the second electrode approaches, the intensity of the electric field in the microfluidic flow path becomes stronger. Microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that. The method according to claim 1, The microfluidic chip for aligning and separating particles using a flexible film substrate, further comprising a microstructure positioned between the first electrode and the second electrode to separate the first electrode and the second electrode. A power supply for applying a voltage; A first electrode electrically connected to one end of the power supply device and receiving a driving voltage from the power supply device; A first substrate attached to the first electrode; A second electrode facing the first electrode, electrically connected to the other end of the power supply device, and receiving a reference voltage from the power supply device; A second substrate facing the first substrate and attached to the second electrode; A microfluidic flow channel formed between the first electrode and the second electrode and having a sample; A microstructure disposed between the first electrode and the second electrode to space the first electrode and the second electrode; And A substrate adjusting device for modifying shapes of the first substrate and the second substrate; Including; The first substrate and the second substrate are film substrates formed of a flexible material, and the first electrode and the second substrate attached to the first substrate when the first substrate and the second substrate are bent by the substrate adjusting device and the A microfluidic chip for aligning and separating particles using a flexible film substrate, wherein the second electrode attached to the second substrate is also bent. The method according to claim 11, Microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that it further comprises a sample injection hole to inject and extract the sample into the microfluidic flow path. A power supply for applying a voltage; A first electrode electrically connected to one end of the power supply device and receiving a driving voltage from the power supply device; A first substrate attached to the first electrode; A second electrode facing the first electrode, electrically connected to the other end of the power supply device, and receiving a reference voltage from the power supply device; A second substrate facing the first substrate and attached to the second electrode; And A microfluidic flow channel formed between the first electrode and the second electrode and having a sample; Including; The first substrate is a film substrate formed of a material which can be bent, and when the first substrate is bent, the first electrode attached to the first substrate is also bent. For microfluidic chips. 14. The method of claim 13, The power supply device is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that the DC voltage source or AC voltage source. 14. The method of claim 13, The first electrode is a microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that formed of one of gold, silver, aluminum, copper, platinum and ITO. 14. The method of claim 13, The second electrode is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that formed of one of gold, silver, aluminum, copper, platinum and ITO. 14. The method of claim 13, The first substrate is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that the film substrate formed of a polyester resin or polyethylene resin. 14. The method of claim 13, The second substrate is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that formed of one of glass, silicon and plastics. 14. The method of claim 13, The sample located in the microfluidic flow path may include at least one of polymer microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, cells, microparticles bound to molecules, and other bioparticles. Microfluidic chip for sorting and separating particles using a substrate. 14. The method of claim 13, The microfluidic chip for aligning and separating particles using a flexible film substrate, wherein an electric field is formed in the microfluidic flow path when voltage is applied to the first electrode and the second electrode. The method of claim 20, The sample exposed to the electric field is moved in a specific direction by an electrodynamic principle, the electrokinetic principle is one of electrophoresis, dielectric electrophoresis and electroosmotic fine for aligning and separating particles using a flexible film substrate Fluid chip. The method of claim 20, When the distance between the first electrode and the second electrode increases, the intensity of the electric field in the microfluidic flow path becomes weak, and when the distance between the first electrode and the second electrode approaches, the intensity of the electric field in the microfluidic flow path becomes stronger. Microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that. 14. The method of claim 13, The microfluidic chip for aligning and separating particles using a flexible film substrate, further comprising a microstructure positioned between the first electrode and the second electrode to separate the first electrode and the second electrode. A power supply for applying a voltage; A first electrode electrically connected to one end of the power supply device and receiving a driving voltage from the power supply device; A first substrate attached to the first electrode; A second electrode facing the first electrode, electrically connected to the other end of the power supply device, and receiving a reference voltage from the power supply device; A second substrate facing the first substrate and attached to the second electrode; And A microfluidic flow channel formed between the first electrode and the second electrode and having a sample; Including; The second substrate is a film substrate formed of a flexible material, and when the second substrate is bent, the second electrode attached to the second substrate is also bent. For microfluidic chips. 27. The method of claim 24, The power supply device is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that the DC voltage source or AC voltage source. 27. The method of claim 24, The first electrode is a microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that formed of one of gold, silver, aluminum, copper, platinum and ITO. 27. The method of claim 24, The second electrode is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that formed of one of gold, silver, aluminum, copper, platinum and ITO. 27. The method of claim 24, The first substrate is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that formed of one of glass, silicon and plastics. 27. The method of claim 24, The second substrate is a microfluidic chip for aligning and separating particles using a flexible film substrate, characterized in that the film substrate formed of a polyester resin or polyethylene resin. 27. The method of claim 24, The sample located in the microfluidic flow path is flexible, characterized in that it comprises at least one of polymeric microparticles, metal nanoparticles, semiconductor nanoparticles, proteins, DNA, cells, microparticles combined with molecules, and other bioparticles. Microfluidic chip for sorting and separating particles using a film substrate. 27. The method of claim 24, The microfluidic chip for aligning and separating particles using a flexible film substrate, wherein an electric field is formed in the microfluidic flow path when voltage is applied to the first electrode and the second electrode. The method according to claim 31, The sample exposed to the electric field is moved in a specific direction by an electrodynamic principle, the electrokinetic principle is one of electrophoresis, dielectric electrophoresis and electroosmotic fine for aligning and separating particles using a flexible film substrate Fluid chip. The method according to claim 31, When the distance between the first electrode and the second electrode increases, the intensity of the electric field in the microfluidic flow path becomes weak, and when the distance between the first electrode and the second electrode approaches, the intensity of the electric field in the microfluidic flow path becomes stronger. Microfluidic chip for alignment and separation of particles using a flexible film substrate, characterized in that. 27. The method of claim 24, The microfluidic chip for aligning and separating particles using a flexible film substrate, further comprising a microstructure positioned between the first electrode and the second electrode to separate the first electrode and the second electrode.

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