KR20100045685A - Tunable microelectronic device for electric field modulation - Google Patents

Abstract

PURPOSE: A microelectronic device capable of electric field modulation is provided to drive and detect micro-particles under various electrode sizes, intervals, and electric field gradient without a new device. CONSTITUTION: A microelectronic device capable of electric field modulation comprises a power supply(10), a first electrode(20), a second electrode(30), and one or more polymers. The first electrode is electrically connected to one end of the power supply to receive a reference voltage from the power supply. The second electrode is electrically connected to the other end of the power supply to receive a driving voltage from the power supply. The polymers, that are variable, are placed between the first and second electrodes.

Description

Microelectronic Device with Adjustable Electrode Spacing {Tunable Microelectronic Device for Electric Field Modulation}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microelectronic device capable of adjusting electrode spacing, and to a microelectronic device capable of controlling the intensity of an electric field by freely adjusting a distance between two electrodes spaced apart using a polymer deformable by external force.

With the development of nanotechnology, researches are being actively conducted to manufacture microelectronic devices for micromaterial detection and driving using microfabrication technology and to apply them to biological, chemical, and medical fields.

These microelectronic devices are based on the principles of electrokinetics such as electrophoresis, dielectrophoresis and electro-osmosis to precisely drive or isolate microparticles, proteins, cells, and bacteria. Is mainly available.

Dielectric behavior here is a phenomenon in which a dielectric is polarized by electromagnetic induction in a non-uniform electric field and is moved by force. The nature of the electrophoresis may vary depending on the type of fluid, the type of microparticles and molecules, and the frequency of the AC voltage signal.

Herein, electroosmotic means that ions in the fluid form a thin electric double layer on the surface of the electrode and the liquid in a non-uniform electric field, and under the influence of a tangential electric field formed by voltage This is a phenomenon in which the fluid moves in the strong direction along the electric field. The flow characteristics of the electroosmosis depend on various physical and chemical properties such as the type of voltage signal, frequency, type of material and medium, size and amount of charge.

In general, by controlling the magnitude of the applied voltage directly, it is possible to control the magnitude of the electric field in the microelectronic device, thereby controlling the forces acting on the microparticles. In practice, however, not only the voltage applied to the electrode but also the size, shape, and electrode spacing of the electrode have a great influence on the movement of the fine particles.

For example, in the case of dielectric electrophoresis, the microparticles move under the uneven electric field as they are polarized, and the force and permanent dipole due to the polarization phenomenon such as dipole and quadrupole of dielectric material The magnitude of the force by the permanent dipole is affected not only by the magnitude of the voltage or the particle, but also by the size and shape of the electrode. The degree of influence of these factors will also depend on the fixed temperature, voltage and electric field size. [T. B. Jones, IEE Proc.-Nanobiotechnol. 150 (2), pp. 39-46 (2003)]

In addition to the electrical action as described above, the physical force caused by the interaction between the particle and the surface of the electrode is closely related to the size and physical properties of the electrode and the particle. For example, optoelectronic tweezers, which drive microparticles by forming an electric field by irradiating light onto a photoconductive layer located on an electrode, generally have two parallel electrode structures, where the microparticles Is caused to interact with the electrode surface by the element of the vertical force. At this time, the microparticles and the electrode surface are strongly bonded by the electrostatic attraction, this element of force is a major obstacle to the photoelectric drive of the microparticles. According to the results, particle motion disturbance caused by this interaction is closely related to the particle size and electrode spacing. Hyundoo Hwang et al., Appl. Phys. Lett. 92, 024108 (2008)]

As described above, in order to practically apply the microelectronic device, a process of optimizing the size of the electrode or the distance between the electrodes is required. For this, electrodes having different spacings and shapes must be manufactured and subjected to several experiments using the same. . Such repeated device fabrication has a problem that causes excessive production cost and waste of time.

In addition, when the target material or application field is different, it is not possible to flexibly adjust the electrode gap and the electric field. As a result, the microelectronic device having a fixed electrode size and spacing has a problem in that its application target is limited.

The present invention has been made to solve the above problems, by using a polymer that can be deformed by an external force to be able to freely control the distance between the two electrodes spaced apart by the electrode can be adjusted to control the strength of the electric field The purpose is to provide a microelectronic device.

In order to achieve the object described above, the electronic device capable of adjusting the electrode spacing according to the present invention includes a power supply unit for applying a voltage, a power supply unit electrically connected to one end of the power supply unit, and receiving a reference voltage from the power supply unit. A first electrode, a second electrode electrically connected to the other end of the power supply device and receiving a driving voltage from the power supply device, and one or more polymers positioned between the first electrode and the second electrode and capable of deforming the shape; It may include.

The power supply device may be an AC voltage source or a DC voltage source.

The first electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO.

The second electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO.

The polymer may be formed in the shape of a microfluidic flow path through which the fluid can pass.

The polymer may be formed of PDMS or rubber.

When the height of the polymer is lowered, the distance between the first electrode and the second electrode may be closer, and the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field may be increased.

As the height of the polymer increases, the distance between the first electrode and the second electrode may increase, and the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field may decrease.

The sample exposed to the electric field formed between the first electrode and the second electrode may move in a direction determined by an electrodynamic principle.

 The electrokinetic principle may be one of electrophoresis, electrophoresis and electroosmosis.

When the height of the polymer is lowered, the distance between the first electrode and the second electrode is closer, and the electrodynamic force applied to the sample can be increased.

As the height of the polymer increases, the distance between the first electrode and the second electrode increases, and the electrodynamic force applied to the sample may decrease.

The microelectronic device may further include a distance adjusting device for inducing deformation of the polymer shape.

In addition, in order to achieve the object as described above, the electronic device capable of adjusting the electrode spacing according to the present invention is a power supply device for applying a voltage, and is electrically connected to one end of the power supply device and applies a reference voltage from the power supply device. A first electrode receiving the substrate, a substrate facing the first electrode, a second electrode formed on an upper surface of the substrate and electrically connected to the other end of the power supply, and receiving a driving voltage from the power supply device; It may comprise one or more polymers located between the electrode and the substrate and capable of deformation of the shape.

The power supply device may be an AC voltage source or a DC voltage source.

The first electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO.

The substrate may be formed of one of glass, silicon, silicon oxide, plastic, and PCB.

The second electrode may be patterned on the substrate, and the second electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO.

The second electrode may be formed by a method of depositing and patterning the upper surface of the substrate by sputtering or nanoimprinting.

The polymer may be formed in the shape of a microfluidic flow path through which the fluid can pass.

The polymer may be formed of PDMS or rubber.

When the height of the polymer is lowered, the distance between the first electrode and the second electrode may be shorter, and the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field may be increased.

As the height of the polymer increases, the distance between the first electrode and the second electrode may increase, and the magnitude of the electric field and the gradient of the electric field formed between the first electrode and the second electrode may be reduced.

The sample exposed to the electric field formed between the first electrode and the second electrode may move in a direction determined by an electrodynamic principle.

 The electrokinetic principle may be one of electrophoresis, electrophoresis and electroosmosis.

As the height of the polymer decreases, the distance between the first electrode and the second electrode may be closer and the electrodynamic force applied to the sample may be increased.

As the height of the polymer increases, the distance between the first electrode and the second electrode may increase and the electrodynamic force applied to the sample may decrease.

The microelectronic device may further include a distance adjusting device for inducing deformation of the polymer shape.

In addition, in order to achieve the object as described above, the electronic device capable of adjusting the electrode spacing according to the present invention includes a power supply device for applying power, a polymer formed in the form of a substrate having a length larger than the left and right widths, and capable of deforming the shape; A first electrode formed on an upper surface of the polymer and electrically connected to one end of the power supply and receiving a reference voltage, and spaced apart from the first electrode on an upper surface of the polymer and electrically connected to the other end of the power supply; It may include a second electrode connected to receive the driving voltage.

The power supply device may be an AC voltage source or a DC voltage source.

The first electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO.

The second electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO.

The polymer may be formed of PDMS or rubber.

When the area of the polymer is reduced, the distance between the first electrode and the second electrode may be closer, and the magnitude of the electric field and the gradient of the electric field formed between the first electrode and the second electrode may be increased.

When the area of the polymer is increased in the horizontal direction, the distance between the first electrode and the second electrode may be increased, and the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field may be reduced.

The sample exposed to the electric field formed between the first electrode and the second electrode may move in a direction determined by an electrodynamic principle.

The electrokinetic principle may be one of electrophoresis, electrophoresis and electroosmosis.

As the height of the polymer decreases, the distance between the first electrode and the second electrode may be closer and the electrodynamic force applied to the sample may be increased.

As the height of the polymer increases, the distance between the first electrode and the second electrode may increase and the electrodynamic force applied to the sample may decrease.

The microelectronic device may further include a distance adjusting device for inducing deformation of the polymer shape.

As described above, according to the microelectronic device capable of adjusting the electrode spacing according to the present invention, it is possible to freely adjust the distance between two spaced apart electrodes by using a polymer deformable by an external force, thereby enabling to flexibly adjust the strength of the electric field. It works.

In addition, by utilizing the microelectronic device according to the present invention, it is possible to drive and detect the microparticles under various electrode sizes, intervals and electric field gradients without having to manufacture a new device, thereby reducing the production cost, the number of processes, etc. Can be effective.

In addition, by flexibly adjusting the electrode gap and the electric field gradient, the utilization of the microelectronic device can be maximized and its application field can be greatly increased.

In addition, there is an effect that can be simply implemented at any time, due to the characteristics of the device that can be modified also electrode shape, size and spacing that could not be conventionally implemented.

As described above, using the microelectronic device capable of adjusting the electrode spacing according to the present invention can be applied in the field of a lab on a chip which performs various medical, biological, and chemical experiments on a chip using electrodynamic principles. have.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention; First, it should be noted that the same components or parts in the drawings represent the same reference numerals as much as possible. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the gist of the present invention.

1 is a conceptual diagram illustrating a microelectronic device capable of adjusting electrode spacing according to a first embodiment of the present invention. According to the first embodiment of the present invention, an electronic device capable of adjusting electrode spacing includes a power supply device 10, a first electrode 20, a second electrode 30, and a polymer 40.

The power supply device 10 applies a voltage to the microelectronic device capable of adjusting the electrode spacing according to the first embodiment of the present invention.

An AC voltage source or a DC voltage source is used as the power supply device 10. When the AC voltage source is used as described above, the shape and offset voltage of the signal may be adjusted as well as the frequency and voltage magnitude.

The first electrode 20 is electrically connected to one end of the power supply device 10 and receives a reference voltage from the power supply device 10.

The first electrode 20 may be formed of one of gold, silver, copper, platinum, aluminum, and indium tin oxide (ITO). However, the first electrode 20 may be transparent so that the inside of the device may be observed through the first electrode 20. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The second electrode 30 is electrically connected to the other end of the power supply device 10 and receives a driving voltage from the power supply device 10.

The second electrode 30 may be formed of one of gold, silver, copper, platinum, aluminum, and ITO, but in order to observe the inside of the device through the second electrode 30, ITO or transparent conductive material may be used. It is preferable to form a thin gold thin film.

In addition, a photoconductive material is deposited on the first electrode 20 and the second electrode 30 on the first electrode 20 and the second electrode 30 to induce an electric field using light. It is possible to develop in the form. The detailed structure of such an optoelectronic device may refer to the structure of the photoconductive layer described in Korean Patent Nos. 748,181, 841,021, and 850,235, and thus description thereof will be omitted.

The polymer 40 is an object that can be deformed in shape and positioned between the first electrode 20 and the second electrode 30, and may include one or more. 1 illustrates a microelectronic device using two polymers 40, but the present invention is not limited to the number of polymers 40.

The polymer 40 is formed of PDMS (polydimethysiloxane) or rubber, etc., so that sufficient deformation can be made.

In addition, the polymer 40 may be formed in the shape of a microfluidic flow path through which the fluid can pass. The microfluidic flow channel is a space in which the samples move, wherein the sample includes various materials such as polymer microparticles, metal nanoparticles, semiconductor nanoparticles, biomolecules such as proteins and DNA, and microparticles in which molecules are bound.

In particular, the sample is prepared such that these substances are present in various liquid droplets such as distilled water, cell culture medium, PBS buffer, and the like, and the movement of the substances occurs within the liquid droplets present in the microfluidic flow path.

On the other hand, when the height of the polymer 40 is lowered by the deformation of the polymer 40, the distance between the first electrode 20 and the second electrode 30 is closer, the first electrode 30 and The magnitude of the electric field and the gradient of the electric field formed between the second electrodes 30 may increase.

On the contrary, when the height of the polymer 40 increases due to the deformation of the polymer 40, the distance between the first electrode 20 and the second electrode 30 is increased, and the first electrode 20 and The magnitude of the electric field and the gradient of the electric field formed between the second electrodes 30 may be reduced.

2A and 2B are diagrams illustrating a difference in strain according to a polymer shape of a microelectronic device capable of adjusting electrode spacing according to a first embodiment of the present invention.

If the deformation of the polymer 40 is not sufficient, the strain may be formed in the shape of a circle or a sphere as shown in FIG. 2A or in the shape of a tube or a ring as shown in FIG. 2B. You can increase it.

In particular, when the polymer 40 is made of PDMS, since the strain of the PDMS is only about 10%, it is preferable to form the polymer 40 in the form as shown in FIG. 2A or 2B.

3 is a diagram illustrating an experimental configuration using a microelectronic device capable of adjusting electrode spacing according to a first embodiment of the present invention.

The experiment shown in FIG. 3 is to observe the change of the electric field according to the change of the distance between the first electrode 20 and the second electrode 30 and the change of the electrodynamic force acting on the sample exposed in the electric field.

Since the power supply device 10, the first electrode 20, the second electrode 30, and the polymer 40 have been described above, the distance adjusting device 50 and the lens 60 will be described. .

The distance adjusting device 50 has a top surface of the first electrode 20 and a second electrode 30 in a parallel flat electrode structure such as the first electrode 20 and the second electrode 30 shown in FIG. 3. 3 may be disposed on the lower surface of the lower surface of the lower surface of the lower surface of the lower surface of the lower surface of the lower surface of the lower surface of the lower electrode, and when the physical force is applied in the direction of the arrow shown in FIG. Deformation of the shape of the polymer 40 located between 20 and the second electrode 30 is induced.

The lens 60 functions to observe the inside of the microelectronic device or to irradiate light. Therefore, the distance adjusting device 50 may be formed to be partially open or transparent to facilitate the observation inside the microelectronic device using the lens 60.

4 is a conceptual diagram illustrating a microelectronic device capable of adjusting electrode spacing according to a second embodiment of the present invention. According to the second embodiment of the present invention, a microelectronic device capable of adjusting electrode spacing includes a power supply device 10, a first electrode 20, a second electrode 30, a substrate 31, and a polymer 40. . As shown in FIG. 4, the microelectronic device capable of adjusting the electrode spacing according to the second embodiment of the present invention is different from the first embodiment in that the second electrode 30 is formed on the upper surface of the substrate 31. have.

The power supply device 10 applies a voltage to the microelectronic device capable of adjusting the electrode spacing according to the second embodiment of the present invention.

An AC voltage source or a DC voltage source is used as the power supply device 10. When the AC voltage source is used as described above, the shape and offset voltage of the signal may be adjusted as well as the frequency and voltage magnitude.

The first electrode 20 is electrically connected to one end of the power supply device 10 and receives a reference voltage from the power supply device 10.

The first electrode 20 may be formed of one of gold, silver, copper, platinum, aluminum, and indium tin oxide (ITO). However, the first electrode 20 may be transparent so that the inside of the device may be observed through the first electrode 20. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The second electrode 30 is formed on the upper surface of the substrate 31 and is electrically connected to the other end of the power supply device 10 to receive a driving voltage from the power supply device 10.

That is, the second electrode 30 is formed by a patterned method on the substrate 31, and the patterned method is deposited by a method such as sputtering or nano imprinting to form a pattern. Can be converted.

The second electrode 30 may be formed of one of gold, silver, copper, platinum, aluminum, and ITO, but in order to observe the inside of the device through the second electrode 30, ITO or transparent conductive material may be used. It is preferable to form a thin gold thin film.

The polymer 40 is an object that can be deformed in shape and positioned between the first electrode 20 and the second electrode 30, and may include one or more. 4 illustrates a microelectronic device using two polymers 40, but the present invention is not limited to the number of polymers 40.

The polymer 40 is formed of PDMS (polydimethysiloxane) or rubber, etc., so that sufficient deformation can be made.

In addition, the polymer 40 may be formed in the shape of a microfluidic flow path through which the fluid can pass. In addition, the polymer 40 may be formed in the shape of a microfluidic flow path through which the fluid can pass. The microfluidic flow channel is a space in which the samples move, wherein the sample includes various materials such as polymer microparticles, metal nanoparticles, semiconductor nanoparticles, biomolecules such as proteins and DNA, and microparticles in which molecules are bound.

In particular, the sample is prepared such that these substances are present in various liquid droplets such as distilled water, cell culture medium, PBS buffer, and the like, and the movement of the substances occurs within the liquid droplets present in the microfluidic flow path.

On the other hand, when the height of the polymer 40 is lowered by the deformation of the polymer 40, the distance between the first electrode 20 and the second electrode 30 is closer, the first electrode 30 and The magnitude of the electric field and the gradient of the electric field formed between the second electrodes 30 may increase.

On the contrary, when the height of the polymer 40 increases due to the deformation of the polymer 40, the distance between the first electrode 20 and the second electrode 30 is increased, and the first electrode 20 and The magnitude of the electric field and the gradient of the electric field formed between the second electrodes 30 may be reduced.

5 is a conceptual diagram illustrating a microelectronic device capable of adjusting electrode spacing according to a third embodiment of the present invention. According to the third embodiment of the present invention, an electronic device capable of adjusting electrode spacing includes a power supply device 10, a first electrode 20, a second electrode 30, and a polymer 40. As shown in FIG. 5, the microelectronic device capable of adjusting electrode spacing according to the third embodiment of the present invention may be formed in the form of a substrate in which the polymer 40 is longer than the height of the polymer 40. 40) The first electrode 20 and the second electrode 30 are formed on the upper surface is different from the first embodiment and the second embodiment.

The power supply device 10 applies a voltage to the microelectronic device capable of adjusting the electrode spacing according to the third embodiment of the present invention.

An AC voltage source or a DC voltage source is used as the power supply device 10. When the AC voltage source is used as described above, the shape and offset voltage of the signal may be adjusted as well as the frequency and voltage magnitude.

The first electrode 20 is electrically connected to one end of the power supply device 10 and receives a reference voltage from the power supply device 10.

The first electrode 20 may be formed of one of gold, silver, copper, platinum, aluminum, and indium tin oxide (ITO). However, the first electrode 20 may be transparent so that the inside of the device may be observed through the first electrode 20. It is preferably formed of ITO or a thin gold thin film which is a conductive material.

The second electrode 30 is electrically connected to the other end of the power supply device 10 and receives a driving voltage from the power supply device 10.

The second electrode 30 may be formed of one of gold, silver, copper, platinum, aluminum, and ITO, but in order to observe the inside of the device through the second electrode 30, ITO or transparent conductive material may be used. It is preferable to form a thin gold thin film.

As shown in FIG. 5, in the microelectronic device capable of controlling electrode spacing according to the third embodiment of the present invention, the polymer 40 is formed in the form of a substrate, and the first surface of the polymer 40 in the form of a substrate is formed on the first surface of the microelectronic device. The electrode 20 and the second electrode 30 are formed. Of course, as shown in FIG. 5, the first electrode 20 and the second electrode 30 are spaced apart from each other. Of course, in the present embodiment, a microelectronic device using two electrodes is illustrated, but the present invention is not limited to the number of electrodes.

On the other hand, when changing the shape of the polymer 40 by controlling an external force, there is a feature that the distance between the first electrode 20 and the second electrode 30 can be adjusted, the polymer 40 In order to change the shape, a distance adjusting device (not shown) may be used. The distance adjusting device (not shown) is located on the left and right sides of the polymer 40, unlike the distance adjusting device according to the first embodiment of the present invention shown in FIG. The shape of the polymer 40 can be changed by a shrinking method (see arrow direction in FIG. 5).

The polymer 40 is formed in the form of a substrate, the left and right width is longer than the height, as shown in Figure 5, formed of PDMS (polydimethysiloxane) or rubber, such that sufficient deformation can be made.

On the other hand, when the left and right widths of the polymer 40 are narrowed by the deformation of the polymer 40 (the direction opposite to the arrow direction shown in FIG. 5), the distance between the first electrode 20 and the second electrode 30 is reduced. As it approaches, the magnitude of the electric field and the gradient of the electric field formed between the first electrode 30 and the second electrode 30 may increase.

On the contrary, when the polymer 40 is widened by the deformation of the polymer 40 (the arrow direction shown in FIG. 5), the distance between the first electrode 20 and the second electrode 30 is increased. The magnitude of the electric field and the gradient of the electric field formed between the first electrode 20 and the second electrode 30 may be reduced.

FIG. 6 is a diagram illustrating a simulation result showing a change in an electric field formed in an element when the electrode interval of the microelectronic device, in which the electrode gap is adjustable, according to the third embodiment of the present invention is changed.

FIG. 7 is a diagram illustrating a simulation result showing a change in an electric field formed in an element when the electrode gap of the microelectronic device, in which the electrode gap is adjustable, according to the second embodiment of the present invention is changed.

In FIG. 6 and FIG. 7, simulation conditions were applied to the first electrode 20 and the second electrode 30 at a voltage of 100 kHz, and the sample in which the electric field was formed was assumed to be distilled water. As a result of the simulation, when the distance between the first electrode 20 and the second electrode 30 approaches, the magnitude of the electric field and the gradient of the electric field become larger, and the distance between the first electrode 20 and the second electrode 30 is increased. As the distance increases, it can be seen that the magnitude of the electric field formed and the electric field gradient become smaller.

When a voltage is applied through the first electrode 20 and the second electrode 30, a sample formed between the first electrode 20 and the second electrode 30 exposed to an electric field is electrokinetic. To move in a specific direction

The electrokinetic principle may include electrophoresis, dielectric electrophoresis and electroosmotic.

Electrophoresis is a phenomenon in which fine particles having positive and negative charges are moved by a coulomb force in an electric field. That is, the particles with the positive charge move to the negative electrode, and the particles with the negative charge move to the positive electrode. The movement characteristics of the particles by electrophoresis may vary depending on the amount of charge, the size of the particles, the electrical, chemical, physical properties of the medium, or the strength of the electric field.

Dielectrophoresis (DEP) is a phenomenon in which a dielectric exhibits an electric dipole due to electromagnetic induction and moves under a force in a non-uniform electric field. The movement of these particles is determined by the difference in permittivity between the particles and the liquid around the particles, and the size of the particles (proportional to the cube of the radius) and the magnitude of the electric field gradient (proportional to the gradient of the square of the electric field). This will affect the speed of movement.

The dielectrophoresis includes negative dielectrophoresis in which fine particles move in a direction in which the electric field is weak, and positive dielectrophoresis in which fine particles move in a direction in which the electric field is strong. The nature of the electrophoresis may vary depending on the type of fluid, the type of microparticles and molecules, and the frequency of the AC voltage signal.

The electroosmosis includes AC electroosmosis (ACEO), induced-charge electroosmosis (ICEO), Faradaically-coupled electroosmosis (FCEO), and the like.

AC electroosmosis (ACEO) refers to a tangential electric field formed by a voltage in a non-uniform electric field, in which ions in the fluid form a thin electric double layer on the electrode surface and the liquid interface. This is a phenomenon in which fluid moves along an electrode surface due to the influence of an electric field.

This electroosmotic phenomenon causes the electric field to flow in the strong direction, leading to rapid concentration of materials. The concentration characteristics of the electroosmosis depend on various physical and chemical properties such as the frequency of the AC voltage signal and the type, size, and charge amount of the material or medium.

The induced-charge electroosmosis (ICEO) is an electroosmotic flow generated on the surface of the microparticles by electric charges induced by the microparticles in the electric field, and pushes the microparticles located near the electrode surface to the wall and assembles them. There is this. This phenomenon can cause the microparticles to self-assemble (aggregate) with a crystal structure (crystal structure).

Faradaically-coupled electroosmosis (FCEO) is an electroosmotic flow generated by an electric field of a horizontal component generated on an electrode surface, which cannot ignore the Faraday reaction at an electrode in a low frequency region. There is a characteristic that generates the upward flow of the particles float up from the bottom of the near-fine particles.

Of course, if the sample has a strong charge, the effect of electrophoresis is increased, and if the dielectric is a weak charge, the effect of the electrophoresis is increased.

As described above, when the distance between two electrodes is closer to each other, the microelectronic device capable of adjusting the electrode spacing increases the electrokinetic force acting on the sample, and when the distance between the two electrodes increases, The electrokinetic forces acting on them become smaller.

As described above with reference to the drawings illustrating a fine electronic device capable of adjusting the electrode spacing according to the present invention, the present invention is not limited by the embodiments and drawings disclosed herein, the technical scope of the present invention Of course, various modifications can be made by those skilled in the art.

1 is a conceptual diagram illustrating a microelectronic device capable of adjusting electrode spacing according to a first embodiment of the present invention.

2A and 2B are diagrams illustrating a difference in strain according to a polymer shape of a microelectronic device capable of adjusting electrode spacing according to a first embodiment of the present invention.

3 is a diagram illustrating an experimental configuration using a microelectronic device capable of adjusting electrode spacing according to a first embodiment of the present invention.

4 is a conceptual diagram illustrating a microelectronic device capable of adjusting electrode spacing according to a second embodiment of the present invention.

5 is a conceptual diagram illustrating a microelectronic device capable of adjusting electrode spacing according to a third embodiment of the present invention.

FIG. 6 is a diagram illustrating a simulation result showing a change in an electric field formed in an element when the electrode interval of the microelectronic device, in which the electrode gap is adjustable, according to the third embodiment of the present invention is changed.

FIG. 7 is a diagram illustrating a simulation result showing a change in an electric field formed in an element when the electrode gap of the microelectronic device, in which the electrode gap is adjustable, according to the second embodiment of the present invention is changed.

 <Description of Symbols for Main Parts of Drawings>

10: power supply device 20: first electrode

30: second electrode 31: substrate

40: polymer 50: distance control device

60: lens

Claims (35)

A power supply for applying a voltage; A first electrode electrically connected to one end of the power supply device and receiving a reference voltage from the power supply device; A second electrode electrically connected to the other end of the power supply device and receiving a driving voltage from the power supply device; Located between the first electrode and the second electrode, fine electronic device capable of adjusting the electrode spacing, characterized in that it comprises one or more polymers capable of deformation of the shape. The method according to claim 1, The power supply device is a microelectronic device capable of adjusting the electrode spacing, characterized in that the AC voltage source or DC voltage source. The method according to claim 1, The first electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO. The method according to claim 1, The second electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO. The method according to claim 1, The polymer is a microelectronic device capable of adjusting the electrode spacing, characterized in that formed in the shape of a microfluidic flow path through which the fluid can pass. The method according to claim 1, The polymer is a microelectronic device capable of adjusting the electrode spacing, characterized in that formed of PDMS or rubber. The method according to claim 1, If the height of the polymer is lowered, the distance between the first electrode and the second electrode is closer, the electrode interval characterized in that the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field increases. Adjustable microelectronic device. The method according to claim 1, When the height of the polymer increases, the distance between the first electrode and the second electrode is far, the size of the electric field formed between the first electrode and the second electrode and the gradient of the electric field is reduced Microelectronic device with adjustable spacing. The method according to claim 1, The sample exposed to the electric field formed between the first electrode and the second electrode is a microelectronic device capable of adjusting the electrode spacing, characterized in that the movement in the direction determined by the electrodynamic principle. The method according to claim 9, The electrodynamic principle is a microelectronic device capable of adjusting electrode spacing, characterized in that one of electrophoresis, dielectric electrophoresis and electroosmotic. The method according to claim 9, When the height of the polymer is lowered, the distance between the first electrode and the second electrode is closer, the electro-electrodynamic force applied to the sample is characterized in that the electrode spacing is adjustable. The method according to claim 9, When the height of the polymer is increased, the distance between the first electrode and the second electrode is far, the electrodynamic force applied to the sample is small electronic device capable of adjusting the electrode spacing. The method according to claim 1, The microelectronic device may further comprise a distance adjusting device for inducing deformation of the polymer shape. A power supply for applying a voltage; A first electrode electrically connected to one end of the power supply device and receiving a reference voltage from the power supply device; A substrate facing the first electrode; A second electrode formed on an upper surface of the substrate and electrically connected to the other end of the power supply device to receive a driving voltage from the power supply device; Located between the first electrode and the substrate, the electronic device can control the electrode spacing, characterized in that it comprises one or more polymers capable of deformation. The method according to claim 14, The power supply device is a microelectronic device capable of adjusting the electrode spacing, characterized in that the AC voltage source or DC voltage source. The method according to claim 14, The first electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO. The method according to claim 14, The substrate is a fine electronic device capable of adjusting the electrode spacing, characterized in that formed of one of glass, silicon, silicon oxide, plastic, PCB. The method according to claim 14, The second electrode is patterned on the substrate, the second electrode is fine electronic device, characterized in that the electrode is formed of one of gold, silver, copper, platinum, aluminum and ITO. The method according to claim 14, The second electrode may be formed on the upper surface of the substrate by sputtering or nanoimprinting to be deposited and patterned to form a microelectronic device. The method according to claim 14, The polymer is a microelectronic device capable of adjusting the electrode spacing, characterized in that formed in the shape of a microfluidic flow path through which the fluid can pass. The method according to claim 14, The polymer is a microelectronic device capable of adjusting the electrode spacing, characterized in that formed of PDMS or rubber. The method according to claim 14, When the height of the polymer is lowered, the distance between the first electrode and the second electrode is closer, the electrode interval characterized in that the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field increases. Adjustable microelectronic device. The method according to claim 14, When the height of the polymer increases, the distance between the first electrode and the second electrode is far, the size of the electric field formed between the first electrode and the second electrode and the gradient of the electric field is reduced Microelectronic device with adjustable spacing. The method according to claim 14, The sample exposed to the electric field formed between the first electrode and the second electrode is a microelectronic device capable of adjusting the electrode spacing, characterized in that the movement in the direction determined by the electrodynamic principle. 27. The method of claim 24, The electrodynamic principle is a microelectronic device capable of adjusting the electrode spacing, characterized in that one of electrophoresis, dielectric electrophoresis and electroosmotic. 27. The method of claim 24, When the height of the polymer is lowered, the distance between the first electrode and the second electrode is closer, the electro-electrodynamic force applied to the sample is characterized in that the electrode spacing is adjustable. 27. The method of claim 24, When the height of the polymer is increased, the distance between the first electrode and the second electrode is far, the electrodynamic force applied to the sample is small electronic device capable of adjusting the electrode spacing. 27. The method of claim 24, The microelectronic device may further comprise a distance adjusting device for inducing deformation of the polymer shape. A power supply for applying power; A polymer formed in the form of a substrate having a larger left and right width than a height, and capable of deforming the shape; A first electrode formed on an upper surface of the polymer and electrically connected to one end of the power supply device to receive a reference voltage; And a second electrode formed on an upper surface of the polymer and spaced apart from the first electrode, and electrically connected to the other end of the power supply device to receive a driving voltage. The method of claim 29, The power supply device is a microelectronic device capable of adjusting the electrode spacing, characterized in that the AC voltage source or DC voltage source. The method of claim 29, The first electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO. The method of claim 29, The second electrode may be formed of one of gold, silver, copper, platinum, aluminum, and ITO. The method of claim 29, The polymer is a microelectronic device capable of adjusting the electrode spacing, characterized in that formed of PDMS or rubber. The method of claim 29, When the area of the polymer is reduced, the distance between the first electrode and the second electrode is closer, the electrode gap characterized in that the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field increases Adjustable microelectronic device. The method of claim 29, When the area of the polymer increases in the horizontal direction, the distance between the first electrode and the second electrode is farther away, and the magnitude of the electric field formed between the first electrode and the second electrode and the gradient of the electric field are reduced. Fine electronic device capable of adjusting the electrode spacing.

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