KR20100058308A - Transfer table of linear motor system formed composite material - Google Patents

Transfer table of linear motor system formed composite material Download PDF

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KR20100058308A
KR20100058308A KR1020080117064A KR20080117064A KR20100058308A KR 20100058308 A KR20100058308 A KR 20100058308A KR 1020080117064 A KR1020080117064 A KR 1020080117064A KR 20080117064 A KR20080117064 A KR 20080117064A KR 20100058308 A KR20100058308 A KR 20100058308A
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South Korea
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transfer table
metal sheet
linear motor
cooler
composite material
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KR1020080117064A
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Korean (ko)
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KR100981829B1 (en
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은인웅
이춘만
황영국
배성우
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창원대학교 산학협력단
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28—Means for securing sliding members in any desired position
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/005—Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2705/00—Driving working spindles or feeding members carrying tools or work
    • B23Q2705/10—Feeding members carrying tools or work
    • B23Q2705/14—Electric drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2313/00—Elements other than metals
    • B32B2313/04—Carbon

Abstract

PURPOSE: A transfer table made of composite material for a linear motor is provided to reduce cross torque due to inertia by maintaining rigidity on magnetic suction force and also, reducing weight. CONSTITUTION: A transfer table(5) made of composite material for a linear motor is guided by an LM guide and an LM(Linear Motion) block. The main body of the transfer table is formed of carbon fiber reinforced plastics(9). A metal sheet(10) is attached to a double-sided adhesive film(11) on the upper and lower parts of the main body. A cooler contact metal sheet(13) contacts a cooler(6) on the lower part of the transfer table. A step-shaped contact part(16) is formed from a transfer table contact metal sheet(14) in the cooler contact metal sheet.

Description

복합재로 형성되는 리니어모터 시스템의 이송테이블{transfer table of linear motor system formed composite material}Transfer table of linear motor system formed composite material

본 발명은 리니어모터의 이송테이블을 금속판 사이에 탄소강화플라스틱 복합재를 삽입하는 샌드위치 구조로 형성하여 자기흡인력을 지지할 수 있는 강성을 유지하면서 경량화하여 관성에 의한 크로스토크 현상을 억제할 수 있게 하여 이송테이블의 가·감속 특성을 향상할 수 있게 한 것에 관한 것이다.The present invention is to form a sandwich structure for inserting the carbon reinforced plastic composite material between the metal plate of the linear motor to reduce the crosstalk phenomenon due to inertia by reducing the weight while maintaining the rigidity to support the magnetic attraction force It is about what made it possible to improve the acceleration / deceleration characteristic of a table.

리니어모터 시스템은 리니어모터가 가지는 고속성, 고정밀성, 비접촉성, 정숙성 등의 장점으로 인해 반도체장비, 수송기기, 자동화기기, 공작기계 등의 직선운동기구가 필요한 대부분의 산업분야에서 널리 사용되고 있다.The linear motor system is widely used in most industrial fields requiring linear motion devices such as semiconductor equipment, transportation equipment, automation equipment, and machine tools because of the high speed, high precision, non-contact, and quietness of the linear motor.

리니어모터가 가지는 이러한 특성을 효과적으로 활용하기 위하여는 리니어모터 자체의 성능향상과 함께 이동부의 경량화 설계, 가동자와 고정자 사이에 작용하는 자기흡인력에 의한 굽힘변형을 최소화하는 기술, 모터의 발열에 따른 효과적인 냉각기술, 공기간극과 영구자석에 이물질 침입을 방지하는 방진대책 등 복합적인 기술이 필요하다.In order to effectively utilize these characteristics of the linear motor, the performance of the linear motor itself, the lightweight design of the moving part, the technology of minimizing the bending deformation caused by the magnetic attraction force between the mover and the stator, and the effective effect of the heating of the motor There is a need for complex technologies such as cooling technology, dustproof measures to prevent foreign substances from entering the air gap and permanent magnets.

리니어모터 시스템의 이송테이블은 고정자와 가동자 사이에서 발생하는 큰 자기흡인력을 지지할 수 있는 강성을 가지면서 가·감속시 관성에 의한 영향을 줄이기 위하여는 경량일수록 유리하며, 또한 관성크로스토크 현상의 억제를 위해 질량중심과 구동점 사이의 거리가 가까운 저중심 설계에 유리한 구조를 가져야 한다.The transfer table of the linear motor system has a rigidity that can support the large magnetic attraction force generated between the stator and the mover, and is lighter in order to reduce the influence of inertia during acceleration and deceleration. For suppression, the distance between the center of mass and the driving point should have an advantageous structure for low center of gravity design.

종래 리니어모터 시스템의 이송테이블 경량화와 강성유지를 위하여 탄소섬유강화플라스틱(CFRP)으로 대체하는 시도가 있었으나 CFRP와 같은 복합소재의 경우 표면에 미세한 입자들이 발생할 수 있고 흡습성, 열충격, 광선에 의한 열화, 외부하중에 의한 충격손상 등에 취약하여 리니어모터 시스템에 적용할 경우 리니어모터 구동부에 이물질의 혼입위험 및 외부하중에 의한 충격손상 등의 문제점이 있었다.In order to reduce the weight and rigidity of the transfer table of the linear motor system, an attempt was made to replace carbon fiber reinforced plastic (CFRP), but in the case of a composite material such as CFRP, fine particles may be generated on the surface, and hygroscopicity, thermal shock, degradation by light, When applied to the linear motor system because it is vulnerable to impact damage due to external load, there is a problem such as the risk of mixing of foreign matter into the linear motor driving unit and impact damage by external load.

본 발명은 이송테이블의 경량화를 위해 탄소섬유강화플라스틱 복합재의 상·하부에 금속판을 접착하는 샌드위치 구조로 형성하되 금속판과 복합재의 열팽창계수의 차이에 따른 이송테이블의 변형을 방지할 수 있게 하는 수단을 제공하는 것을 목적으로 한다.The present invention provides a means for forming a sandwich structure for bonding the metal plate on the upper and lower portions of the carbon fiber reinforced plastic composite material to reduce the weight of the transfer table, but prevents deformation of the transfer table due to the difference in thermal expansion coefficient between the metal plate and the composite material. It aims to provide.

본 발명은 탄소섬유강화플라스틱 복합재의 상부면에 금속판을 덧대고 금속판과 탄소섬유강화플라스틱 복합재 사이에는 필름형 양면 접착 테이프로 접착하여 상·하 이질적인 재료의 열팽창의 차이를 접착부에서 흡수할 수 있게 구성하고, 복합재의 하부에서 리니어모터의 발열에 직접 영향을 받는 부분에는 상부와 같이 금속판을 접착하되 리니어모터와 접촉하는 부분에는 쿨러를 설치하여 모터의 발열이 이송테이블로 직접 전달되지 않게 하고, 쿨러와 이송테이블이 결합하는 부분에는 하부 냉각판을 구비하되 하부 냉각판은 하부의 금속판과 분리하여 하부냉각판의 팽창시 하부금속판과 상호 미끄러질 수 있게 하는 슬라이딩면을 형성하고 팽창을 흡수할 수 있는 간극을 구비하여 쿨러로부터 직접 열을 전달받는 하부냉각판의 열팽창에 의한 변형이 이송테이블에 직접 영향을 미치지 않도록 구성한다.According to the present invention, a metal plate is padded on the upper surface of the carbon fiber reinforced plastic composite, and the metal sheet and the carbon fiber reinforced plastic composite are bonded to each other with a film-type double-sided adhesive tape so as to absorb the difference in thermal expansion of different materials. In the lower part of the composite material, the metal plate is attached to the part directly affected by the heat generation of the linear motor, but the cooler is installed at the part contacting the linear motor so that the heat of the motor is not directly transmitted to the transfer table. The lower cooling plate is provided at the portion where the transfer table is coupled, but the lower cooling plate is separated from the lower metal plate to form a sliding surface for sliding with the lower metal plate when the lower cooling plate is inflated, and there is a gap to absorb the expansion. Deformation by thermal expansion of the lower cooling plate to receive heat directly from the cooler So as not to constitute a direct effect on the transfer table.

본 발명은 리니어모터 시스템의 가동부인 이송테이블을 자기흡인력에 대하여 강성을 유지하면서 경량화할 수 있게 하여 관성에 의한 크로스토크 현상을 완화하고, 리니어모터의 발열에 의한 열팽창으로 이송테이블이 변형되는 것을 방지하게 할 수 있어 가·감속특성을 향상하고 진동을 방지하여 정숙성을 향상하게 할 수 있다.According to the present invention, the transfer table, which is a movable part of the linear motor system, can be reduced in weight while maintaining rigidity with respect to the magnetic attraction force, thereby alleviating crosstalk due to inertia, and preventing the transfer table from being deformed due to thermal expansion due to heat generation of the linear motor. It is possible to improve acceleration and deceleration characteristics and to prevent vibration to improve quietness.

이하에서 본 발명의 바람직한 실시 예에 대하여 첨부한 도면을 참조하여 상세하게 설명하기로 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 1에 도시된 것과 같이 통상적인 리니어모터 시스템(1)은 베드(2) 상에 고정자(3)를 배치하고, 고정자(3)의 상부에 가동자(4)와 결합된 이송테이블(5)이 구비된다.As shown in FIG. 1, a conventional linear motor system 1 places a stator 3 on a bed 2, and a transfer table 5 coupled with a mover 4 on top of the stator 3. Is provided.

이송테이블(5)과 가동자(4) 사이에는 가동자(4)에서 발생하는 열을 냉각시키기 위한 쿨러(6)가 구비되며, 이송테이블(5)의 양단부에는 이송테이블(5)의 직선왕복운동을 가이드하는 LM블록(7)과 LM가이드(8)가 배치된다.A cooler 6 is provided between the transfer table 5 and the mover 4 to cool the heat generated by the mover 4, and at both ends of the transfer table 5 is a straight reciprocating line of the transfer table 5. The LM block 7 and the LM guide 8 for guiding the movement are arranged.

상기 가동자(4)의 코어에는 코일(도면미도시)이 권취되고 코일의 외부는 몰딩부재로 피복된다.A coil (not shown) is wound around the core of the mover 4 and the outside of the coil is covered with a molding member.

리니어모터를 가동시키기 위하여 코일에 전류가 흐르게 되면 열이 발생하고 발생한 열은 쿨러(6)에 의하여 냉각되나 일부의 열은 쿨러(6)를 통하여 이송테이블(5)로 전달된다.When current flows in the coil to operate the linear motor, heat is generated and the generated heat is cooled by the cooler 6, but some heat is transferred to the transfer table 5 through the cooler 6.

리니어모터의 가동자(4)에 대한 냉각장치로는 KR등록특허 제635255호(2006.10.11등록) 또는 KR공개특허2007-13737(2007.01.31공개) 등으로 다수가 공개된 바 있다.As a cooling device for the mover 4 of the linear motor, a number of them have been disclosed in KR Patent No. 635255 (registered on October 11, 2006) or KR Patent Publication 2007-13737 (published on January 31, 2007).

도 2는 본 발명 리니어모터 시스템 이송테이블의 단면도로서, 이송테이블(5)의 본체는 탄소섬유강화플라스틱(CFRP)(9)으로 형성되고, CFRP(9)의 상·하부는 금속시트(10)를 부착하여 CFRP의 표면에서 마찰에 의하여 파티클이 발생하는 것을 방지하고 수분의 흡수, 열충격, 광선에 의한 열화나 충격에 의한 손상을 방지할 수 있게 구성한다.2 is a cross-sectional view of the linear motor system transfer table of the present invention, wherein the main body of the transfer table 5 is formed of carbon fiber reinforced plastic (CFRP) 9, and the upper and lower portions of the CFRP 9 are metal sheets 10. It is configured to prevent particle generation by friction on the surface of CFRP and to prevent moisture absorption, thermal shock, deterioration by light rays or shock damage.

CFRP(9) 상·하부에 부착하는 금속시트(10)는 3mm정도의 두께를 가지는 알루미늄 또는 SUS판재를 사용하는 것이 적당하다.The metal sheet 10 attached to the upper and lower portions of the CFRP 9 is preferably made of aluminum or an SUS plate having a thickness of about 3 mm.

CFRP(9)와 금속시트(10)는 열팽창계수가 서로 달라 쿨러(6)를 통하여 이송테이블(5)로 전달되는 열에 의하여 이송테이블(5)이 변형될 수 있으므로 이를 방지하기 위하여 본 발명에서는 이송테이블(5)의 상부에 부착되는 금속시트(10)는 이송테이블(5)의 전체를 커버하는 단일시트로 형성하고, 금속시트(10)와 CFRP간의 열팽창계수의 차이를 금속시트(10)와 CFRP가 접착되는 접착부에서 흡수할 수 있게 구성한다.Since the CFRP 9 and the metal sheet 10 have different thermal expansion coefficients, the transfer table 5 may be deformed by heat transferred to the transfer table 5 through the cooler 6. The metal sheet 10 attached to the upper portion of the table 5 is formed as a single sheet covering the entire transfer table 5, and the difference in thermal expansion coefficient between the metal sheet 10 and CFRP is determined by the metal sheet 10 and the metal sheet 10. The CFRP is configured to be absorbed at the bonded portion.

금속시트(10)와 CFRP(9) 사이에는 공업용 양면접착필름(11), 예를 들면 상품명 FM73 등으로 접착하여 이종재료 간의 열팽창의 차이를 흡수할 수 있게 하여 이송테이블(5)의 변형을 방지한다.The metal sheet 10 and the CFRP 9 are bonded by an industrial double-sided adhesive film 11, for example, trade name FM73, to absorb the difference in thermal expansion between different materials, thereby preventing deformation of the transfer table 5. do.

이송테이블(5)의 하부, 즉, 쿨러(6)와 부착되는 면은 이송테이블(5)의 상부 면보다 열에 의한 영향을 더욱 크게 받으므로 이송테이블(5)의 하부면에 접착되는 금속시트는 쿨러(6)와 직접 접촉되는 면과 이송테이블(5)에만 접착되는 면을 분리하고, 쿨러 접촉금속시트(13)는 이송테이블 접촉금속시트(14)보다 다소 두껍게 형성하여 쿨러(16)에서 전달되는 열이 쿨러 접촉금속시트(13)에서 이송테이블 접촉금속시트(14)로 보다 빨리 전달될 수 있게 구성한다.The lower portion of the transfer table 5, that is, the surface attached to the cooler 6, is more affected by heat than the upper surface of the transfer table 5, so that the metal sheet adhered to the lower surface of the transfer table 5 is cooler. Separate the surface directly contacted with (6) and the surface adhered only to the transfer table (5), the cooler contact metal sheet 13 is formed somewhat thicker than the transfer table contact metal sheet (14) is transferred from the cooler 16 It is configured to allow heat to be transferred faster from the cooler contact metal sheet 13 to the transfer table contact metal sheet 14.

양시트 사이에는 계단(12)을 형성하여 쿨러 접촉금속시트(13)가 이송테이블 접촉금속시트(14)와 계단(12)상 접촉부(16)에서 슬라이딩할 수 있게 구성하고, 접촉부(16)에는 일정간극(15)을 형성하여 열팽창을 흡수할 수 있게 구성된다.A step 12 is formed between both sheets so that the cooler contact metal sheet 13 can slide at the contact portion 16 on the transfer table contact metal sheet 14 and the stairs 12, and the contact portion 16 It is configured to absorb the thermal expansion by forming a predetermined gap (15).

이송테이블(5)의 하부에 접착되는 쿨러 접촉금속시트(13)와 이송테이블접촉금속시트(14)는 각각 양면접착필름(11)으로 접착한다.The cooler contact metal sheet 13 and the transfer table contact metal sheet 14 adhered to the lower portion of the transfer table 5 are bonded to the double-sided adhesive film 11, respectively.

이상에서 설명한 본 발명은 상세한 설명에 기재된 사항에 한정되지 아니하고 본 발명의 기술적인 사상을 벗어나지 아니하는 범위 내에서 재질을 변경하여 치환될 수 있음은 당업자에게는 자명한 사항일 것이다.It will be apparent to those skilled in the art that the present invention described above may be substituted by changing the material within the scope not departing from the technical spirit of the present invention without being limited to the details described in the detailed description.

이상의 리니어모터 시스템은 이송테이블의 중량이 무겁고 발열에 의하여 영향을 크게 받는 다양한 리니어모터 시스템에 적용이 가능하다.The above linear motor system is applicable to various linear motor systems in which the weight of the transfer table is heavy and greatly affected by heat generation.

도 1은 통상적인 리니어모터 시스템의 개략도1 is a schematic diagram of a conventional linear motor system

도 2는 본 발명 리니어모터 시스템 이송테이블의 단면도Figure 2 is a cross-sectional view of the present invention linear motor system transfer table

※ 도면의 주요부분에 대한 부호의 설명[Description of Drawings]

1. 리니어모터 시스템 2. 베드1. Linear motor system 2. Bed

3. 고정자 4. 가동자3. stator 4. mover

5. 이송테이블 6. 쿨러5. Transfer Table 6. Cooler

7. LM블록 8. LM가이드7. LM block 8. LM guide

9. 탄소섬유강화플라스틱(CFRP)9. Carbon Fiber Reinforced Plastics (CFRP)

10. 금속시트 11. 양면접착필름10. Metal sheet 11. Double sided adhesive film

12. 계단 13. 쿨러 접촉금속시트12. Stairs 13. Cooler Contact Metal Sheet

14. 이송테이블 접촉금속시트14. Transfer table contact metal sheet

15. 간극 16. 접촉부15. Clearance 16. Contacts

Claims (2)

LM가이드 및 LM블록에 의해 안내되고 가동자에서 발열되는 열을 쿨러에 의하여 냉각하는 리니어모터 시스템의 이송테이블에 있어서,In the transfer table of the linear motor system which is guided by the LM guide and the LM block and cools the heat generated by the mover by a cooler, 이송테이블(5)의 본체는 탄소섬유강화플라스틱(9)으로 형성하고 본체의 상·하부는 금속시트(10)를 양면접착필름(11)으로 접착하되, 이송테이블(5)의 하부에서 쿨러(6)와 접촉하는 쿨러 접촉금속시트(13)는 이송테이블 접촉금속시트(14)와 분리하여 계단(12)상의 접촉부(16)를 형성하고 접촉부(16)에는 간극(15)을 형성한 것을 특징으로 하는 복합재로 형성되는 리니어모터 시스템의 이송테이블.The main body of the transfer table 5 is formed of carbon fiber reinforced plastic 9, and the upper and lower parts of the main body adhere the metal sheet 10 to the double-sided adhesive film 11, but the cooler ( 6) the cooler contact metal sheet 13 in contact with the transfer table contact metal sheet 14 forms a contact portion 16 on the staircase 12 and a gap 15 is formed in the contact portion 16. Transfer table of linear motor system formed of composite material. 제 1항에 있어서, 이송테이블(5)의 상부면에 접착되는 금속시트(10)는 단일시트로 형성되는 것을 특징으로 하는 복합재로 형성되는 리니어모터 시스템의 이송테이블.The transfer table according to claim 1, wherein the metal sheet (10) bonded to the upper surface of the transfer table (5) is formed of a single sheet.
KR1020080117064A 2008-11-24 2008-11-24 transfer table of linear motor system formed composite material KR100981829B1 (en)

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