KR20100030247A - Apparatus and method for fabricating display device - Google Patents

Abstract

PURPOSE: An apparatus and a method for fabricating display device are provided to simply a manufacturing process by attaching a rolled mask film to a substrate and depositing an organic material or a metal material on the substrate. CONSTITUTION: A substrate plate(110) supports a substrate(120). A mask film(130) forms the pattern for the deposition which is attached on the substrate. The deposition supply source discharges a film formation material in direction of a mask film. The mask film has an adhesive layer on one side. The mask film is wound round a roll(150). The roll moves along a longitudinal direction of the substrate.

Description

Display apparatus manufacturing apparatus and manufacturing method therefor {APPARATUS AND METHOD FOR FABRICATING DISPLAY DEVICE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a display device, and more particularly, to an apparatus for manufacturing a display device and a method of manufacturing the same, which can reduce manufacturing costs and simplify a manufacturing process.

Recently, various flat panel display devices that can reduce weight and volume, which are disadvantages of cathode ray tubes, have emerged. Such flat panel displays include liquid crystal displays, field emission displays, plasma displays, and organic electroluminescence displays. .

Among them, the organic light emitting display device is a self-light emitting device that emits a light emitting material by recombination of electrons and holes.

The organic light emitting display device has an advantage that the response speed is as fast as that of a cathode ray tube as compared to a passive light emitting device requiring a separate light source like a liquid crystal display device. In addition, the organic light emitting display device has many advantages such as low voltage driving, self-luminous, thin film type, wide viewing angle, fast response speed and high contrast, and is expected to be the next generation display device.

In the organic light emitting display device, a plurality of subpixels are arranged in a matrix form. In each subpixel, a thin film transistor and an organic light emitting diode element are formed. The organic light emitting diode device may include a first electrode, an organic emission layer, and a second electrode. The organic light emitting layer may include a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and an electron injection layer.

The organic light emitting layer should be formed for each subpixel, and a mask for forming the organic light emitting layer is used only in a predetermined region (organic light emitting layer forming region). That is, after aligning the mask on the substrate, the organic material is released using the deposition equipment, the organic material partially passes through the mask to form a light emitting layer at a desired position.

The mask consists of a plurality of patterns spaced apart from each other.

A mask frame of a supporting rectangular frame is provided to support the mask. The mask frame is a metal material, and maintains the flatness of the mask and prevents the flow of the mask.

1 is a view illustrating a method of manufacturing a conventional organic light emitting display device.

As shown in FIG. 1, in a method of manufacturing a general organic light emitting display device, first, a mask and a mask frame are assembled.

Here, although not shown in the drawing, the mask and the mask frame are aligned to align the mask and the mask frame using a camera such that the first alignment key formed at the edge of the mask and the second alignment key formed at the edge of the frame mask overlap. Process, a mask flatness process disposed on the edge of the mask to pull the mask outward to prevent sagging of the mask, and welding to fix the edge of the mask and the edge of the mask frame to fix the mask to the mask frame. It includes a process. (S01)

The state in which the mask and the mask frame are assembled is defined as a frame mask assembly (FMA).

The frame mask assembly FMA and the substrate are loaded for alignment with each other (S02).

The frame mask assembly FMA is aligned on the substrate for film formation (S03).

The organic material is deposited on the substrate on which the frame mask assembly FMA is aligned (S04).

When film formation is completed, the frame mask assembly FM aligned on the substrate is separated from the substrate (S05).

In the conventional method of manufacturing an organic light emitting display device, the manufacturing of the frame mask assembly (FMA) includes a variety of processes as described above. .

In addition, as the organic light emitting display device is manufactured, the size of the mask increases as the size of the organic light emitting display device increases in size, so that film formation defects frequently occur due to sagging of the mask, and there are problems such as alignment defects.

An object of the present invention is to provide an apparatus for manufacturing a display device and a method for manufacturing the same, which can reduce cost.

Another object of the present invention is to provide an apparatus for manufacturing a display device and a method of manufacturing the same, which can reduce a manufacturing process.

An apparatus for manufacturing a display device according to a first embodiment of the present invention,

A substrate plate for supporting a substrate; A mask film having a plurality of patterns for film formation attached to the substrate; And a deposition source for emitting the deposition material in the mask film direction, wherein the mask film has an adhesive layer formed on one surface thereof, and one surface of the mask film is in contact with one surface of the substrate corresponding thereto. .

In the manufacturing method of the display device according to the second embodiment of the present invention,

Providing a substrate plate in surface contact with one surface of the substrate; Attaching the mask film to the other surface of the substrate using a roll on which the mask film is wound to correspond to the other surface of the substrate; And forming an organic light emitting material or a metal material on the substrate.

In the manufacturing method of the display device according to the third embodiment of the present invention,

Providing a substrate plate in surface contact with one surface of the substrate; Providing a mask film plate in surface contact with one surface of the mask film; Moving the substrate plate in the mask film direction to attach a mask film on the substrate at a constant pressure; And forming an organic light emitting material or a metal material on the substrate.

In the manufacturing method of the display device according to the fourth embodiment of the present invention,

Providing a substrate plate in surface contact with one surface of the substrate; Providing a mask film plate in surface contact with one surface of the mask film; Moving the mask film plate toward the substrate and attaching the mask film on the substrate at a constant pressure; And forming an organic light emitting material or a metal material on the substrate.

According to the present invention, a mask film wound on a roll is attached to one surface of a substrate by using a roll to deposit an organic material or a metal material, thereby simplifying the manufacturing process.

In addition, the present invention is to produce the plate mask assembly (FMA) by forming an organic material or a metal material on the substrate using a mask film without using a plate mask assembly (FMA) used in the manufacturing apparatus of the general display device By eliminating a number of processes and costs to reduce the number and cost of the manufacturing process is effective.

In addition, the present invention can fundamentally prevent a problem of causing a pattern defect formed on a substrate due to alignment defects or the like when using a plate mask assembly (FMA) used in a manufacturing apparatus of a general display device.

In addition, the present invention has a structure in which a mask film is attached to a substrate, and as the display device is gradually enlarged, problems such as sag due to enlargement of the mask can be prevented.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a view schematically illustrating an alignment process of a mask film and a substrate according to an embodiment of the present invention, and FIG. 3 is a process of depositing a film formation material on a substrate having a mask film according to an embodiment of the present invention. It is a diagram showing.

As shown in FIG. 2 and FIG. 3, in the manufacturing apparatus of the display device according to the exemplary embodiment, the substrate 120 is fixed on the substrate plate 110, and the film is deposited on the substrate 120. The mask film 130 is included.

The substrate plate 120 is supported from the plurality of plate supports 111 and is in surface contact with one surface of the substrate 120.

The mask film 130 is attached to the other surface of the substrate 230. The mask film 130 is provided in the form of a roll 150.

The mask film 130 includes a plurality of patterns in the form of holes to correspond to a predetermined region of the substrate 120.

Here, a plurality of patterns of the mask film 130 may be formed in an area where an organic material or a metal electrode is formed.

Although not shown in detail in the drawing, an adhesive layer (not shown) is formed on one surface of the mask film 130.

One surface of the mask film 130 having the adhesive layer formed thereon corresponds to the substrate 120 and is in surface contact with the substrate 120.

The roll 150 moves in the longitudinal direction of the substrate 120, and the mask film 130 is attached to the substrate 120 by the rotation of the roll 150.

When the roll 150 is rotated to attach the mask film 130 to the substrate 120, the film forming process is performed.

The deposition source 160 for discharging the deposition material at regular intervals from a surface corresponding to the mask film 130 is disposed.

4 is a cross-sectional view illustrating a substrate on which a film is formed using a manufacturing apparatus of a display device according to an embodiment of the present invention, and FIG. 5 is an organic light emitting display using the manufacturing apparatus of a display device according to an embodiment of the present invention. It is a figure which shows the method of manufacturing a display apparatus.

As illustrated in FIG. 4, a metal such as indium thin oxide (ITO) is deposited on the base substrate 121 to form an electrode pattern 123.

An insulating pattern 125 is formed on the electrode pattern 123, and a partition wall 127 having a predetermined height in a direction perpendicular to the insulating pattern 125 is formed on the insulating pattern 125.

The mask film 130 of the present invention is attached on the partition 127.

The partition 127 is defined as a pixel in which a light emitting material is formed.

In the mask film 130, a plurality of patterns (holes) are formed in a region corresponding to the pixel so that the light emitting material is deposited.

The mask film 130 of the present invention is attached to the partition wall 127 on the base substrate 121, and the organic light emitting material is emitted toward the base substrate 121 to form the organic light emitting pattern 129.

Although not shown in detail in the drawing, the red, green, and blue light emitting bodies corresponding to each pixel are sequentially deposited using the mask film 130 of the present invention.

Here, although the manufacturing apparatus of the display device according to the exemplary embodiment of the present invention has a limited structure in which the mask film 130 is attached to the substrate 120 to form the organic light emitting pattern 129, the present invention is limited thereto. Instead, the mask film 130 of the present invention may also be used when the electrode pattern 123 is formed.

Referring to FIG. 5, in the method of manufacturing an organic light emitting display device according to an exemplary embodiment, first, a mask film is attached onto a substrate using a roll (S101).

The substrate to which the mask film is attached is moved to the film forming equipment to deposit an organic material or a metal material on the substrate.

After the organic material or the metal material is evaporated, the mask film attached to the substrate is removed.

As described above, in the apparatus for manufacturing a display device according to an exemplary embodiment of the present invention, a mask film 130 wound on a roll is attached to one surface of the substrate 120 by using a roll to deposit an organic material or a metal material. The manufacturing process can be simplified.

In addition, the present invention provides a plate mask by forming an organic material or a metal material on the substrate 120 using the mask film 130 without using a plate mask assembly (FMA) used in a typical display device manufacturing apparatus. The number of processes and costs for manufacturing an assembly (FMA) can be eliminated to reduce the number and cost of manufacturing processes.

In addition, the present invention can fundamentally prevent a problem of causing a pattern defect formed on a substrate due to alignment defects or the like when using a plate mask assembly (FMA) used in a manufacturing apparatus of a general display device.

In addition, the present invention has a structure in which the mask film 130 is attached to the substrate 120, and as the display device is gradually enlarged, deflection may occur due to the enlargement of the mask.

6 is a diagram illustrating a manufacturing apparatus of a display device according to another exemplary embodiment of the present invention, and FIG. 7 is a diagram illustrating a manufacturing apparatus of a display device according to another exemplary embodiment of the present invention.

As illustrated in FIG. 6, an apparatus for manufacturing a display device according to another exemplary embodiment may include a substrate plate 210 supporting a substrate 220 in surface contact with one surface of a substrate 220, and a plurality of patterns. The branch includes a mask film plate 240 that supports the mask film 230 in surface contact with one surface of the mask film 230.

Although not shown in the drawings, an adhesive layer is formed on the other surface of the mask film 230 disposed on the mask film plate 240.

The substrate plate 210 moves in the mask film 230 direction to attach the mask film 230 to the substrate 220. Here, the substrate plate 210 exerts a constant pressure so that the mask film 230 is firmly attached to the substrate 220. In this case, the other surface of the substrate 230 and the other surface of the mask film 230 are in surface contact with each other.

As shown in FIG. 7, the apparatus for manufacturing a display device according to another exemplary embodiment of the present invention may include a mask film plate 340 supporting the mask film 330 by being in surface contact with one surface of the mask film 330; It includes a substrate plate 310 for supporting the substrate 320 in surface contact with one surface of the substrate 320.

Although not shown in the drawing, an adhesive layer is formed on the other surface of the mask film 320 disposed on the mask film plate 310.

The mask film plate 340 moves in the direction of the substrate 320 to apply a constant pressure to contact the other surface of the mask film 330 and the other surface of the substrate 320.

The present invention described above is not limited to the three embodiments in the method of attaching the mask films 130, 230, 330 on the substrates 120, 220, 320, and other methods such as a vacuum deposition method may be used. Can be.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

1 is a view illustrating a method of manufacturing a conventional organic light emitting display device.

2 is a view schematically showing an alignment process of a mask film and a substrate according to an embodiment of the present invention.

3 is a view illustrating a process of depositing a film formation material on a substrate having a mask film according to an embodiment of the present invention.

4 is a cross-sectional view illustrating a substrate on which deposition is performed using a manufacturing apparatus of a display device according to an embodiment of the present invention.

FIG. 5 is a diagram illustrating a method of manufacturing an organic light emitting display device using an apparatus for manufacturing a display device according to an embodiment of the present invention.

6 illustrates an apparatus for manufacturing a display device according to another exemplary embodiment of the present invention.

7 is a diagram illustrating an apparatus for manufacturing a display device according to still another embodiment of the present invention.

Claims (8)

A substrate plate for supporting a substrate; A mask film having a plurality of patterns for film formation attached to the substrate; And A deposition source for emitting a deposition material in the mask film direction; An adhesive layer is formed on one surface of the mask film, and one surface of the mask film is in contact with one surface of the substrate corresponding thereto. According to claim 1, And the mask film is wound on a roll, and the roll moves in the longitudinal direction of the substrate. According to claim 1, And the mask film is disposed on a partition wall formed on the substrate. According to claim 1, And a mask film plate supporting the mask film by surface contact with the other surface of the mask film. Providing a substrate plate in surface contact with one surface of the substrate; Attaching the mask film to the other surface of the substrate using a roll on which the mask film is wound to correspond to the other surface of the substrate; And And forming an organic light emitting material or a metal material on the substrate. The method of claim 5, And an adhesive layer is formed on one surface of the mask film corresponding to the substrate. Providing a substrate plate in surface contact with one surface of the substrate; Providing a mask film plate in surface contact with one surface of the mask film; Moving the substrate plate in the mask film direction to attach a mask film on the substrate at a constant pressure; And And forming an organic light emitting material or a metal material on the substrate. Providing a substrate plate in surface contact with one surface of the substrate; Providing a mask film plate in surface contact with one surface of the mask film; Moving the mask film plate toward the substrate and attaching the mask film on the substrate at a constant pressure; And And forming an organic light emitting material or a metal material on the substrate.

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