KR20100002867U - The fixing apparatus for a gas piping - Google Patents

The fixing apparatus for a gas piping Download PDF

Info

Publication number
KR20100002867U
KR20100002867U KR2020080011968U KR20080011968U KR20100002867U KR 20100002867 U KR20100002867 U KR 20100002867U KR 2020080011968 U KR2020080011968 U KR 2020080011968U KR 20080011968 U KR20080011968 U KR 20080011968U KR 20100002867 U KR20100002867 U KR 20100002867U
Authority
KR
South Korea
Prior art keywords
fixing
fitting
valve
fitting member
valve assembly
Prior art date
Application number
KR2020080011968U
Other languages
Korean (ko)
Other versions
KR200449225Y1 (en
Inventor
노영석
Original Assignee
(주)파인텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)파인텍 filed Critical (주)파인텍
Priority to KR2020080011968U priority Critical patent/KR200449225Y1/en
Publication of KR20100002867U publication Critical patent/KR20100002867U/en
Application granted granted Critical
Publication of KR200449225Y1 publication Critical patent/KR200449225Y1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B7/00—Connections of rods or tubes, e.g. of non-circular section, mutually, including resilient connections
    • F16B7/04—Clamping or clipping connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
    • F16L19/06—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts in which radial clamping is obtained by wedging action on non-deformed pipe ends

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)

Abstract

본 고안은 반도체 가스배관의 피팅 고정부재에 관한 것으로서, 반도체의 생산 공정에서 필요한 가스는 매우 고가이며 인체에 유해한 것이 많으며 이에 따라 공급하는 배관의 연결부의 결합이 사용중 느슨해지거나 풀리는 것을 방지하기 위하여 개발된 것으로;The present invention relates to a fitting fixing member of a semiconductor gas pipe, the gas required in the production process of the semiconductor is very expensive and harmful to the human body, and accordingly developed to prevent the loosening or loosening of the connection of the connection pipe supply To be;

양측의 배관의 끝에는 내주면에 나사산이 형성되어 회전할 수 있는 육각기둥 형상의 피팅부재가 형성되고, 밸브 손잡이가 구비되고 각각 양측으로 외주면에 나사산이 형성되어 상기 피팅부재와 결합하도록 하는 연결관이 형성되는 밸브조립체로 구성되는 반도체 가스배관 연결부에 있어서;At the end of the pipes on both sides, a threaded member is formed on the inner circumferential surface to form a hexagonal pillar-shaped fitting member which can rotate, and a valve handle is provided, and a thread is formed on the outer circumferential surface on both sides to form a connection tube for engaging with the fitting member. In the semiconductor gas pipe connecting portion composed of a valve assembly that is;

상기 밸브조립체의 밸브손잡이가 형성된 타측면에는 내주면에 나사산이 형성된 수 개의 제1 결합홀이 형성되고;A plurality of first coupling holes having a thread formed on an inner circumferential surface thereof is formed on the other side of the valve assembly in which the valve handle is formed;

판의 형태로 이루어져 상기 밸브조립체의 제1 결합홀에 상응하는 위치에는 관통된 제2 결합홀이 형성되어 볼트에 의하여 상기 밸브조립체에 장착되도록 하는 밸브 고정부와, 상기 밸브 고정부의 상하 방향으로 조립된 상기 피팅부재가 위치한 곳까지 연장되어 상기 피팅부재와 인접한 양측으로 각각 제1 고정홀이 형성되는 고정부재 장착부로 이루어지는 브라켓과;A valve fixing portion formed in the form of a plate corresponding to the first coupling hole of the valve assembly and having a second coupling hole formed therein so as to be mounted to the valve assembly by bolts, and in a vertical direction of the valve fixing portion; A bracket comprising a fixing member mounting portion extending to an assembled position of the fitting member and having first fixing holes formed at both sides adjacent to the fitting member, respectively;

양측 끝단에 상기 제1 고정홀에 상응하는 위치에 수직으로 길게 관통된 장홀이 형성되어 볼트에 의하여 브라켓에 고정되도록 하는 장착부와, 상기 양측 장착부 사이로는 전방으로 일정 원호를 이루며 굴절되어 상기 피팅부재를 감싸도록 하되 내측면에는 수직방향으로 연장되는 걸림돌기가 일정 간격으로 다수 형성되는 피팅부재 고정부로 이루어지는 두 개의 피팅 고정부재로 구성됨을 특징으로 하는 반도체 가스배관의 피팅 고정부재에 관한 것이다.A long hole vertically penetrated at a position corresponding to the first fixing hole is formed at both ends, and a mounting portion is fixed to the bracket by bolts, and the fitting member is refracted by forming a circular arc forward between the mounting portions. It relates to a fitting fixing member of the semiconductor gas pipe, characterized in that the inner surface is composed of two fitting fixing member consisting of a fitting member fixing portion formed in a plurality of predetermined intervals on the inner surface extending in the vertical direction.

반도체, 가스, 피팅 Semiconductor, gas, fittings

Description

반도체 가스배관의 피팅 고정부재{The fixing apparatus for a gas piping}Fitting fixing member for semiconductor gas piping

본 고안은 반도체 가스배관의 피팅 고정부재에 관한 것으로서, 좀더 상세하게 설명하면 반도체 가스배관의 연결부의 결합이 발생하는 충격과 진동 등에도 견고하게 결합된 상태를 유지할 수 있도록 하기 위하여 개발된 반도체 가스배관의 피팅 고정부재에 관한 것이다.The present invention relates to a fitting fixing member of a semiconductor gas pipe, and in more detail, the semiconductor gas pipe developed to maintain a firmly coupled state against shocks and vibrations generated by coupling of a connection part of a semiconductor gas pipe. It relates to a fitting fixing member.

일반적으로 반도체를 생산하는 공정은 크게 나누면 증착(deposition), 이온주입(ion injection), 포토리소그라피(photo lithography), 식각(etch), 세정(cleaning) 등이 여러 번 반복되는 것으로 이루어진다.In general, the process of producing a semiconductor is divided into a plurality of times, such as deposition, ion injection, photo lithography, etching, and cleaning.

상기 공정 중에 가스가 필요한 공정은 플라즈마 즉 이온화된 상태의 기체를 이용하는 것으로 Ar, SiH4, N2O, PH3, SF6, Cl, O2 등의 다양한 기체가 사용되고 있으며, 이러한 기체 즉 가스의 경우 제도원가가 상당히 고가인 것이 대부분이며 또 누출이 되면 인체에 치명적인 영향을 주는 기체도 포함되어 있다.The process that requires gas during the process is a plasma, that is, gas in an ionized state, and various gases such as Ar, SiH 4, N 2 O, PH 3, SF 6, Cl, O 2, and the like, are expensive. Most of them are also leaking gas that has a fatal effect on the human body.

따라서 가스를 공급하는 배관 계통은 지면 또는 벽면에 견고하게 고정되어 내부 가스의 흐름에 따른 진동과 외부에서의 충격에도 견딜 수 있는 내구성을 가지도록 하였다.Therefore, the pipe system for supplying gas is firmly fixed to the ground or the wall to have durability to withstand the vibration and the impact from the flow of the internal gas.

하지만 각 배관과 배관의 연결부분 또는 밸브와의 연결부와 같은 곳은 피팅부재 즉 결합을 위하여 형성된 부재가 진동 및 충격에 의하여 상기 피팅부재가 회전을 하여 결합부분이 약해질 우려가 있으나 이를 방지하기 위한 수단은 구비되지 않고 있다.However, there is a possibility that the fitting member, i.e., the connecting member of the pipe or the connecting portion of the pipe, such as a connecting portion between the valve and the fitting member is weakened because the fitting member rotates due to vibration and shock. Means are not provided.

본 고안은 상기와 같은 문제점을 해결하기 위하여 개발된 것으로서, 그 목적은 반도체 생산공정에서 사용되는 가스배관의 피팅부재를 고정할 수 있는 수단을 개발하는 것에 있다.The present invention was developed to solve the above problems, the object of which is to develop a means for fixing the fitting member of the gas pipe used in the semiconductor production process.

상기와 같은 목적을 달성하기 위하여 본 고안은 양측의 배관의 끝에는 내주면에 나사산이 형성되어 회전할 수 있는 육각기둥 형상의 피팅부재가 형성되고, 밸브 손잡이가 구비되고 각각 양측으로 외주면에 나사산이 형성되어 상기 피팅부재와 결합하도록 하는 연결관이 형성되는 밸브조립체로 구성되는 반도체 가스배관 연결부에 있어서;In order to achieve the above object, the present invention has a hexagonal pillar-shaped fitting member which can be rotated by forming a screw thread on the inner circumferential surface at the ends of the pipes on both sides, and a valve handle is provided, and the thread is formed on the outer circumferential surface on both sides, respectively. In the semiconductor gas pipe connecting portion consisting of a valve assembly is formed to connect the coupling member and the fitting member;

상기 밸브조립체의 밸브손잡이가 형성된 타측면에는 내주면에 나사산이 형성된 수 개의 제1 결합홀이 형성되고;A plurality of first coupling holes having a thread formed on an inner circumferential surface thereof is formed on the other side of the valve assembly in which the valve handle is formed;

판의 형태로 이루어져 상기 밸브조립체의 제1 결합홀에 상응하는 위치에는 관통된 제2 결합홀이 형성되어 볼트에 의하여 상기 밸브조립체에 장착되도록 하는 밸브 고정부와, 상기 밸브 고정부의 상하 방향으로 조립된 상기 피팅부재가 위치한 곳까지 연장되어 상기 피팅부재와 인접한 양측으로 각각 제1 고정홀이 형성되는 고정부재 장착부로 이루어지는 브라켓과;A valve fixing portion formed in the form of a plate corresponding to the first coupling hole of the valve assembly and having a second coupling hole formed therein so as to be mounted to the valve assembly by bolts, and in a vertical direction of the valve fixing portion; A bracket comprising a fixing member mounting portion extending to an assembled position of the fitting member and having first fixing holes formed at both sides adjacent to the fitting member, respectively;

양측 끝단에 상기 제1 고정홀에 상응하는 위치에 수직으로 길게 관통된 장홀이 형성되어 볼트에 의하여 브라켓에 고정되도록 하는 장착부와, 상기 양측 장착부 사이로는 전방으로 일정 원호를 이루며 굴절되어 상기 피팅부재를 감싸도록 하되 내측면에는 수직방향으로 연장되는 걸림돌기가 일정 간격으로 다수 형성되는 피팅부재 고정부로 이루어지는 두 개의 피팅 고정부재로 구성됨을 특징으로 한다.A long hole vertically penetrated at a position corresponding to the first fixing hole is formed at both ends, and a mounting portion is fixed to the bracket by bolts, and the fitting member is refracted by forming a circular arc forward between the mounting portions. To wrap, but the inner surface is characterized in consisting of two fitting fixing member consisting of a fitting member fixing part formed in a plurality at regular intervals the engaging projection extending in the vertical direction.

아울러, 상기 밸브 고정부와 연결된 고정부재 장착부의 사이에는 상기 고정부재 장착부가 상기 피팅부재의 배면에 밀착되도록 단턱진 단턱부가 추가로 구비됨을 특징으로 한다.In addition, a stepped stepped portion is further provided between the fixing member mounting portion connected to the valve fixing portion such that the fixing member mounting portion is in close contact with the rear surface of the fitting member.

상술한 바와 같이 본 고안은 가스배관의 연결부에 위치한 피팅부재가 회전하지 않도록 견고하게 고정하도록 하여 가스의 공급에 따른 진동과 외부의 충격에서도 견고한 결합 상태를 유지하여 가스누출에 대한 피해를 예방할 수 있는 효과가 있다.As described above, the present invention allows the fitting member located at the connection portion of the gas pipe to be firmly fixed so as not to rotate, thereby maintaining a firmly coupled state even in the vibration and external shock caused by the supply of gas, thereby preventing damage to the gas leakage. It works.

이에 본 고안의 구성을 첨부된 도면에 의하여 당업자가 용이하게 이해하고 재현할 수 있도록 상세하게 설명하면 다음과 같다.Accordingly, the configuration of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily understand and reproduce.

도 1은 본 고안의 일 실시 예에 따른 사시도이며, 도 2는 본 고안의 일 실시 예에 따른 분해사시도이고, 도 3은 본 고안의 일 실시 예에 따른 피팅 고정부재의 결합을 나타낸 개념도로서, 통상의 가스배관 연결부는 양측의 배관(1)의 끝에는 내주면에 나사산이 형성되어 회전할 수 있는 육각기둥 형상의 피팅부재(2)가 형성되고, 밸브 손잡이(31)가 구비되고 각각 양측으로 외주면에 나사산이 형성되어 상기 피팅부재(2)와 결합하도록 하는 연결관(32)이 형성되는 밸브조립체(3)로 구성된다.1 is a perspective view according to an embodiment of the present invention, Figure 2 is an exploded perspective view according to an embodiment of the present invention, Figure 3 is a conceptual diagram showing the coupling of the fitting fixing member according to an embodiment of the present invention, In general, the gas pipe connection portion has a hexagonal column-shaped fitting member (2) rotatably formed on the inner circumferential surface at the end of the pipe (1) on both sides, and provided with a valve handle (31), respectively, on the outer circumferential surface on both sides. It is composed of a valve assembly (3) is formed with a screw thread is formed to form a connecting pipe (32) to engage with the fitting member (2).

이러한 가스배관은 외부의 충격이나 가스의 운송중 발생하는 진동에 의하여 상기 피팅부재(2)가 풀릴 우려를 가지고 있다.The gas pipe has a fear of loosening the fitting member 2 due to an external shock or vibration generated during transportation of the gas.

이에 본 고안은 상기 밸브조립체(3)의 밸브손잡이(31)가 형성된 타측면에는 내주면에 나사산이 형성된 수 개의 제1 결합홀(33)을 형성하고;The present invention is formed on the other side of the valve handle 31 of the valve assembly 3 is formed with a plurality of first coupling holes (33) formed with a screw thread on the inner peripheral surface;

판의 형태로 이루어져 상기 밸브조립체(3)의 제1 결합홀(33)에 상응하는 위치에는 관통된 제2 결합홀(411)이 형성되어 볼트(412)에 의하여 상기 밸브조립체(3)에 장착되도록 하는 밸브 고정부(41)와, 상기 밸브 고정부(41)의 상하 방향으로 조립된 상기 피팅부재(2)가 위치한 곳까지 연장되어 상기 피팅부재(2)와 인접한 양측으로 각각 제1 고정홀(421)이 형성되는 고정부재 장착부(42)로 이루어지는 브라켓(4)과;The second coupling hole 411 is formed at a position corresponding to the first coupling hole 33 of the valve assembly 3 in the form of a plate, and is mounted to the valve assembly 3 by bolts 412. First fixing holes to both sides adjacent to the fitting member 2 by extending to the valve fixing portion 41 and the fitting member 2 assembled in the vertical direction of the valve fixing portion 41. Bracket (4) consisting of a fixing member mounting portion 42 is formed 421;

양측 끝단에 상기 제1 고정홀(421)에 상응하는 위치에 수직으로 길게 관통된 장홀(511)이 형성되어 볼트(512)에 의하여 브라켓(4)에 고정되도록 하는 장착부(51)와, 상기 양측 장착부(51) 사이로는 전방으로 일정 원호를 이루며 굴절되어 상기 피팅부재(2)를 감싸도록 하되 내측면에는 수직방향으로 연장되는 걸림돌기(521)가 일정 간격으로 다수 형성되는 피팅부재 고정부(52)로 이루어지는 두 개의 피팅 고정부재(5)을 장착하여 상기 피팅부재(2)가 풀어지는 것을 방지하도록 하였다.Longitudinal holes 511 which vertically penetrate at a position corresponding to the first fixing holes 421 are formed at both ends, and mounting portions 51 fixed to the bracket 4 by bolts 512, and both sides The fitting member fixing part 52 is formed between a plurality of mounting portions 51 to be curved in a predetermined arc to the front to surround the fitting member 2, but a plurality of engaging projections 521 extending in the vertical direction at regular intervals. Two fitting fixing members (5) consisting of) were mounted to prevent the fitting member (2) from being loosened.

구체적으로 설명하면 상기 브라켓(4)은 상기 밸브조립체(3)와 연결 고정되고, 상기 피팅 고정부재(5)의 내측에 형성되는 걸림돌기(521)의 사이에 육각형의 피팅부재(2) 모서리가 삽입되어 회전을 방지하도록 하는 구조이다.In detail, the bracket 4 is fixedly connected to the valve assembly 3, and the hexagonal fitting member 2 has an edge between the locking protrusions 521 formed inside the fitting fixing member 5. Inserted to prevent rotation.

또한 상기 피팅 고정부재(5)의 장착부(51)에 길게 연장되는 장홈(511)을 형성한 것은 조립된 피팅부재(2)의 위치는 상황에 따라 수직 방향으로 다소 차이가 있으며 이에 따라 보다 정확한 위치에 효율적으로 상기 피팅 고정부재(5)를 장착하기 위한 것이다.In addition, the long groove 511 is formed to extend in the mounting portion 51 of the fitting fixing member 5, the position of the assembled fitting member 2 is slightly different in the vertical direction depending on the situation and accordingly more accurate position In order to efficiently mount the fitting fixing member (5).

도 4는 본 고안의 다른 실시 예에 따른 분해사시도이며, 도 5는 본 고안의 다른 실시 예에 따른 측면도로서, 상기 밸브 고정부(41)와 연결된 고정부재 장착부(42)의 사이에는 상기 고정부재 장착부(42)가 상기 피팅부재(2)의 배면에 밀착되도록 단턱진 단턱부(43)가 추가로 구비되는 실시 예를 제시하였다.Figure 4 is an exploded perspective view according to another embodiment of the present invention, Figure 5 is a side view according to another embodiment of the present invention, the holding member mounting portion 42 connected to the valve holding portion 41 and the holding member An example in which the stepped stepped part 43 is further provided to attach the mounting part 42 to the rear surface of the fitting member 2 is provided.

상기 실시 예는 상기 밸브조립체(3)가 벽면이나 바닥면에 밀착되어 있더라도 상기 피팅부재(2)는 어느 정도 이격된 상태를 이루게 되며 이 경우 상기 피팅 고정부재(5)로 고정할 경우 브라켓(4)이 평면일 경우 똑같이 이격된 상태로 있어 고정이 견고하지 못한 단점을 해결하기 위하여 안출한 실시 예이다.In the above embodiment, even though the valve assembly 3 is in close contact with the wall or the bottom surface, the fitting member 2 may be spaced to some extent. In this case, the bracket assembly 4 may be fixed when the valve assembly 3 is fixed to the fitting fixing member 5. ) Is an embodiment that is devised to solve the disadvantage that the fixing is not solid because it is equally spaced apart.

도 1은 본 고안의 일 실시 예에 따른 사시도1 is a perspective view according to an embodiment of the present invention

도 2는 본 고안의 일 실시 예에 따른 분해사시도2 is an exploded perspective view according to an embodiment of the present invention

도 3은 본 고안의 일 실시 예에 따른 피팅 고정부재의 결합을 나타낸 개념도3 is a conceptual view showing the coupling of the fitting fixing member according to an embodiment of the present invention

도 4는 본 고안의 다른 실시 예에 따른 분해사시도Figure 4 is an exploded perspective view according to another embodiment of the present invention

도 5는 본 고안의 다른 실시 예에 따른 측면도5 is a side view according to another embodiment of the present invention

<도면 중 주요 부분에 대한 부호의 설명><Explanation of symbols for main parts of the drawings>

1 : 배관1: Piping

2 : 피팅부재2: fitting member

3 : 밸브조립체3: valve assembly

31 : 밸브손잡이 32 : 연결관     31 valve handle 32 connector

33 : 제1 결합홀     33: first coupling hole

4 : 브라켓4: Bracket

41 : 밸브 고정부     41: valve fixing part

411 : 제2 결합홀 412 : 볼트          411: second coupling hole 412: bolt

42 : 고정부재 장착부     42: fixing member mounting portion

421 : 제1 고정홀          421: first fixing hole

43 : 단턱부     43: step

5 : 피팅 고정부재5: fitting fixing member

51 : 장착부     51: mounting portion

511 : 장홀 512 : 볼트          511: long hole 512: bolt

52 : 피팅부재 고정부     52: fitting member fixing portion

521 : 걸림돌기          521: protrusion

Claims (2)

양측의 배관(1)의 끝에는 내주면에 나사산이 형성되어 회전할 수 있는 육각기둥 형상의 피팅부재(2)가 형성되고, 밸브 손잡이(31)가 구비되고 각각 양측으로 외주면에 나사산이 형성되어 상기 피팅부재(2)와 결합하도록 하는 연결관(32)이 형성되는 밸브조립체(3)로 구성되는 반도체 가스배관 연결부에 있어서;At the ends of the pipes 1 on both sides, a threaded member is formed on the inner circumferential surface to form a hexagonal fitting member 2 which can rotate, and a valve handle 31 is provided, and threads are formed on the outer circumferential surface on both sides, respectively. A semiconductor gas pipe connection portion consisting of a valve assembly (3) in which a connection pipe (32) is formed to engage with the member (2); 상기 밸브조립체(3)의 밸브손잡이(31)가 형성된 타측면에는 내주면에 나사산이 형성된 수 개의 제1 결합홀(33)이 형성되고;On the other side where the valve handle 31 of the valve assembly 3 is formed, several first coupling holes 33 having a thread formed on an inner circumferential surface thereof are formed; 판의 형태로 이루어져 상기 밸브조립체(3)의 제1 결합홀(33)에 상응하는 위치에는 관통된 제2 결합홀(411)이 형성되어 볼트(412)에 의하여 상기 밸브조립체(3)에 장착되도록 하는 밸브 고정부(41)와, 상기 밸브 고정부(41)의 상하 방향으로 조립된 상기 피팅부재(2)가 위치한 곳까지 연장되어 상기 피팅부재(2)와 인접한 양측으로 각각 제1 고정홀(421)이 형성되는 고정부재 장착부(42)로 이루어지는 브라켓(4)과;The second coupling hole 411 is formed at a position corresponding to the first coupling hole 33 of the valve assembly 3 in the form of a plate, and is mounted to the valve assembly 3 by bolts 412. First fixing holes to both sides adjacent to the fitting member 2 by extending to the valve fixing portion 41 and the fitting member 2 assembled in the vertical direction of the valve fixing portion 41. Bracket (4) consisting of a fixing member mounting portion 42 is formed 421; 양측 끝단에 상기 제1 고정홀(421)에 상응하는 위치에 수직으로 길게 관통된 장홀(511)이 형성되어 볼트(512)에 의하여 브라켓(4)에 고정되도록 하는 장착부(51)와, 상기 양측 장착부(51) 사이로는 전방으로 일정 원호를 이루며 굴절되어 상기 피팅부재(2)를 감싸도록 하되 내측면에는 수직방향으로 연장되는 걸림돌기(521)가 일정 간격으로 다수 형성되는 피팅부재 고정부(52)로 이루어지는 두 개의 피팅 고정부재(5)로 구성됨을 특징으로 하는 반도체 가스배관의 피팅 고정부재.Longitudinal holes 511 which vertically penetrate at a position corresponding to the first fixing holes 421 are formed at both ends, and mounting portions 51 fixed to the bracket 4 by bolts 512, and both sides The fitting member fixing part 52 is formed between a plurality of mounting portions 51 to be curved in a predetermined arc to the front to surround the fitting member 2, but a plurality of engaging projections 521 extending in the vertical direction at regular intervals. The fitting holding member of the semiconductor gas pipe, characterized in that consisting of two fitting holding member (5). 제 1항에 있어서, 상기 밸브 고정부(41)와 연결된 고정부재 장착부(42)의 사이에는 상기 고정부재 장착부(42)가 상기 피팅부재(2)의 배면에 밀착되도록 단턱진 단턱부(43)가 추가로 구비됨을 특징으로 하는 반도체 가스배관 피팅 고정부재.The stepped portion 43 of claim 1, wherein the fixing member mounting portion 42 is in close contact with the rear surface of the fitting member 2 between the valve fixing portion 41 and the fixing member mounting portion 42 connected to the valve fixing portion 41. Semiconductor gas pipe fitting fixing member characterized in that it is further provided.
KR2020080011968U 2008-09-03 2008-09-03 The fixing apparatus for a gas piping KR200449225Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2020080011968U KR200449225Y1 (en) 2008-09-03 2008-09-03 The fixing apparatus for a gas piping

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2020080011968U KR200449225Y1 (en) 2008-09-03 2008-09-03 The fixing apparatus for a gas piping

Publications (2)

Publication Number Publication Date
KR20100002867U true KR20100002867U (en) 2010-03-11
KR200449225Y1 KR200449225Y1 (en) 2010-06-24

Family

ID=44198199

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2020080011968U KR200449225Y1 (en) 2008-09-03 2008-09-03 The fixing apparatus for a gas piping

Country Status (1)

Country Link
KR (1) KR200449225Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102435284B1 (en) * 2022-01-25 2022-08-23 (주)디엘이엔지 Connection device for gas pipe of semiconductor equipment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101643951B1 (en) 2016-03-10 2016-07-29 주식회사 제이디티 Gas fitting lock device of semiconductor manufacturing equipment
KR102189289B1 (en) 2019-07-30 2020-12-11 조영준 Toxic gas pipe fixing bracket

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR980004012U (en) * 1996-06-05 1998-03-30 Pipe connection device with loosening prevention function
JP2774482B2 (en) * 1996-06-27 1998-07-09 ミツワガス機器株式会社 Gas meter mounting unit
KR19990012417U (en) * 1997-09-09 1999-04-06 연장익 Fixing device formed with nut inserting groove for communicating screw with nut

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102435284B1 (en) * 2022-01-25 2022-08-23 (주)디엘이엔지 Connection device for gas pipe of semiconductor equipment

Also Published As

Publication number Publication date
KR200449225Y1 (en) 2010-06-24

Similar Documents

Publication Publication Date Title
KR200471300Y1 (en) The fixing apparatus for a gas piping
KR200449225Y1 (en) The fixing apparatus for a gas piping
KR101948596B1 (en) Seismic restraint of gas piping
CN105089115A (en) Countertop rapid mounting structure of faucet
KR20090017887A (en) Apparatus of connecting process chamber used in manufacturing semiconductor device
KR101612778B1 (en) The fixing apparatus for a gas piping
KR102247975B1 (en) Water supply valve box
KR200389270Y1 (en) a crime prevention device for gas-pipe
JP5678120B2 (en) Receptacle coating protection method when lock ring is installed in pipe joint
KR200411382Y1 (en) Joint Device of Corrugated Pipes
KR100745653B1 (en) front insert type union
KR101412499B1 (en) Gas interception joint pipe and construction method therefor
KR200383836Y1 (en) saddle for water works
KR101803076B1 (en) Non water blockage valve
JP2008151323A (en) Resin tube embedded type valve and connection construction of valve and resin tube
KR20130000795U (en) Fixing device for pipe line
KR102430706B1 (en) tailback connecting pipe
JPH11336965A (en) Connecting device for fluid pipe
KR101713411B1 (en) Connector of hose for agricultural watering line
JP5839869B2 (en) Pit opening / closing structure
KR20120007827U (en) Pipe connecting device
JP2011089289A (en) Faucet
JP2010190331A (en) Fixture
KR20100007081U (en) Earthquake-proof cap for pipe-jointing member
JP2004092239A (en) Connecting structure for cylindrical member with member with through-hole part

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20130614

Year of fee payment: 4

LAPS Lapse due to unpaid annual fee