KR20090130498A - Apparatus for roading a substrate - Google Patents

Apparatus for roading a substrate Download PDF

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Publication number
KR20090130498A
KR20090130498A KR1020080056167A KR20080056167A KR20090130498A KR 20090130498 A KR20090130498 A KR 20090130498A KR 1020080056167 A KR1020080056167 A KR 1020080056167A KR 20080056167 A KR20080056167 A KR 20080056167A KR 20090130498 A KR20090130498 A KR 20090130498A
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KR
South Korea
Prior art keywords
cassette
chamber
substrate
ball screw
elevating
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KR1020080056167A
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Korean (ko)
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정진황
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정진황
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Priority to KR1020080056167A priority Critical patent/KR20090130498A/en
Publication of KR20090130498A publication Critical patent/KR20090130498A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Abstract

PURPOSE: An apparatus for loading a substrate is provided to shorten a stroke trough ascending a cassette by using a ball screw having a shaft adjacent to the cassette. CONSTITUTION: In a device, a chamber(10) accommodates a cassette(20) including a substrate. A substrate carry-out unit(11) is formed in the chamber. A lift plate(30) is installed inside the chamber. The lift plate lifts the cassette. A carrier is installed inside the chamber and raise the lift plate. A pumping unit make inside the chamber vacuum by pumping. The carrier is formed with a ball screw(40). The ball screw is installed to be near the cassette. The ball screw raise the lift plate to transfer the substrate mounted at the lower part of cassette to the carry-out unit.

Description

기판로딩장치{Apparatus for roading a substrate}Apparatus for roading a substrate}

본 발명은 기판로딩장치에 관한 것으로서, 보다 상세하게는 스트로크를 최소화하면서 기판이 적재된 카세트를 챔버에 수납한 상태에서 상기 카세트를 상승시키면서 적재된 기판을 순차적으로 로딩할 수 있는 기판로딩장치에 관한 것이다. The present invention relates to a substrate loading apparatus, and more particularly, to a substrate loading apparatus capable of sequentially loading a loaded substrate while raising the cassette while storing a cassette in which a substrate is loaded in a chamber while minimizing stroke. will be.

일반적으로 LCD나 OLED 등의 평판 디스플레이 패널을 제조하기 위한 클러스터 장비는 반송로봇이 내장된 공통된 하나의 반송챔버(Transport Chamber)와, 이의 각 면(Facet)들에 다수의 공정챔버(Process Module)와 로딩챔버 등의 부착챔버(Attached Module)이 장착되는 형태로 구성되어진다.In general, cluster equipment for manufacturing flat panel display panels, such as LCDs and OLEDs, includes a common transport chamber in which a transport robot is built, and a plurality of process modules on each face thereof. Attached chamber (Attached Module) such as loading chamber is configured in the form.

그 작동상태를 살펴보면, 로딩챔버에 로딩된 기판은 반송챔버에 구비된 반송로봇을 이용하여 각 공정챔버로 반입되고, 공정챔버에 반입된 기판은 공정 수행 전에 공정챔버 내에서 기판을 정렬한 후 공정을 수행하게 된다. Looking at the operation state, the substrate loaded in the loading chamber is brought into each process chamber by using a transfer robot provided in the transfer chamber, and the substrate loaded into the process chamber is aligned with the substrate in the process chamber before the process is performed. Will be performed.

도 1a 및 도 1b는 종래 로딩챔버(100)를 도시한 것이다. 도 1a를 참조하면, 로딩챔버는 챔버본체(110) 내부에 기판이 다수장 적재된 카세트(120)가 수납되고, 일측벽에 반송로봇(미도시)이 진입할 수 있는 기판반출구(111)가 형성되어 있다. 1A and 1B show a conventional loading chamber 100. Referring to FIG. 1A, a loading chamber has a substrate outlet 111 into which a cassette 120 having a plurality of substrates loaded therein is accommodated in a chamber body 110, and into which a transport robot (not shown) may enter a side wall. Is formed.

또한 상기 카세트(120)는 승강플레이트(130)에 재치되어 승강되는데, 상기 승강플레이트(130)를 승강시키는 승강수단이 구비된다. 승강수단은 일반적으로 에어 실린더나 모터 등의 구동원을 이용하는데, 도시된 예는 에어 실린더(141)를 이용한 것이다. 즉, 실린더(141)가 상기 챔버본체(110) 외측의 하부에 구비되고, 상기 실린더(141)의 구동에 따라 승강하는 실린더 로드(142)가 챔버본체(110)를 관통하여 승강플레이트(130)에 연결된다. 물론, 상기 챔버본체(110)의 기밀을 유지하는 밸로우즈 등의 기밀유지수단(미도시)이 더 구비되어야 한다. In addition, the cassette 120 is mounted on the elevating plate 130 to elevate, and elevating means for elevating the elevating plate 130 is provided. The lifting means generally uses a driving source such as an air cylinder or a motor, and the illustrated example uses the air cylinder 141. That is, the cylinder 141 is provided in the lower portion of the outside of the chamber body 110, the cylinder rod 142, which is elevated according to the driving of the cylinder 141 is penetrated through the chamber body 110, elevating plate 130 Is connected to. Of course, the airtight maintaining means (not shown), such as a bellows for maintaining the airtight of the chamber body 110 should be further provided.

이와 같이 구성된 종래의 로딩챔버(110)의 작동상태를 살펴보면, 먼저, 챔버본체(110)에 형성된 기판반출구(111)를 통해 진입된 반송로봇에 의해 카세트(120)의 최상층에 재치된 기판을 반출한다. 다음으로, 상기 실린더(141)를 구동하여 실린더로드(142)를 상승시키고, 이는 승강플레이트(130)와 함께 카세트(120)를 상승시키게 된다. 이 상태에서 다시 기판을 반출하고, 이와 같은 동작을 반복함으로써 카세트의 최하층에 재치된 기판까지 반출하는 것이다. Looking at the operating state of the conventional loading chamber 110 configured as described above, first, the substrate placed on the uppermost layer of the cassette 120 by the transport robot entered through the substrate outlet 111 formed in the chamber body 110 Export. Next, the cylinder rod 142 is driven by driving the cylinder 141, which raises the cassette 120 together with the lifting plate 130. In this state, the substrate is again taken out, and the above operation is repeated to carry out the substrate placed on the lowermost layer of the cassette.

이와 같이 구성된 종래의 로딩챔버는 승강플레이트를 승강하기 위한 승강수단의 스트로크가 크기 때문에 그 만큼 챔버고(t1)가 높게 설치되는 문제점이 있다. The conventional loading chamber configured as described above has a problem in that the chamber height t1 is set as high as the stroke of the lifting means for lifting the lifting plate is large.

본 발명은 상술한 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은 스트로크를 최소화하면서 기판이 적재된 카세트를 챔버에 수납한 상태에서 상기 카세트를 상승시키면서 적재된 기판을 순차적으로 로딩할 수 있는 기판로딩장치를 제공함에 있다. The present invention has been made to solve the above-described problems, an object of the present invention is to load the loaded substrate sequentially while raising the cassette while the cassette is stored in the chamber while the substrate is loaded in a chamber with a minimum stroke In providing a substrate loading apparatus.

위와 같은 기술적 과제를 해결하기 위하여 본 발명에 의한 기판로딩장치는 기판이 적재된 카세트를 수납하고, 기판 반출구가 형성되는 챔버; 상기 챔버 내에 마련되어 상기 카세트를 재치한 상태에서 승강하는 승강플레이트; 상기 챔버 내에 설치되어 상기 승강플레이트를 승강시키는 승강수단; 및 상기 챔버 내부를 펌핑하여 진공분위기로 조성하는 펌핑수단;을 포함한다. In order to solve the above technical problem, the substrate loading apparatus according to the present invention accommodates a cassette on which a substrate is loaded, and a chamber in which a substrate outlet is formed; An elevating plate provided in the chamber for elevating in a state where the cassette is placed; Elevating means installed in the chamber to elevate the elevating plate; And pumping means for pumping the inside of the chamber to form a vacuum atmosphere.

특히, 상기 승강수단은 샤프트가 상기 카세트에 이웃하여 설치되는 볼스크류인 것이 바람직하다. In particular, the lifting means is preferably a ball screw that the shaft is installed adjacent to the cassette.

또한 상기 승강수단은 상기 카세트의 최하부에 적재된 기판이 상기 기판 반출구가 형성된 위치에 도달할 때까지 상기 승강플레이트를 상승시키는 것이 바람직하다. In addition, it is preferable that the elevating means raises the elevating plate until the substrate loaded at the lowermost portion of the cassette reaches the position at which the substrate outlet is formed.

또한 상기 볼스크류는 상기 승강플레이트를 중심으로 대각선 방향으로 한 쌍이 설치되는 것이 바람직하다. In addition, the ball screw is preferably a pair of diagonally installed around the lifting plate.

또한 상기 승강플레이트의 승강운동을 안내하는 안내수단이 더 구비되는 것 이 바람직하다. In addition, it is preferable that the guide means for guiding the lifting movement of the lifting plate is further provided.

또한 상기 안내수단은 상기 챔버 내에 상기 카세트와 나란하게 설치되며, 상기 승강플레이트에 연결되는 볼스플라인 또는 LM가이드로 구성될 수 있다. In addition, the guide means may be installed in parallel with the cassette in the chamber, it may be composed of a ball spline or LM guide connected to the lifting plate.

본 발명에 따르면, 기판이 적재된 카세트를 챔버에 수납한 상태에서 상기 카세트를 상승시키면서 적재된 기판을 챔버 밖으로 순차적으로 로딩할 수 있는 효과가 있다. According to the present invention, there is an effect that the loaded substrate can be sequentially loaded out of the chamber while the cassette is raised while the cassette on which the substrate is loaded is stored in the chamber.

특히, 상기 카세트에 이웃하여 설치되는 샤프트를 가진 볼스크류를 이용하여 상기 카세트를 상승시킴으로써 스트로크를 현저하게 단축할 수 있고, 이에 따라 챔버고를 감축할 수 있다. In particular, by raising the cassette using a ball screw having a shaft installed adjacent to the cassette, the stroke can be significantly shortened, thereby reducing the chamber height.

이하, 첨부된 도면을 참조하여 본 발명에 의한 기판로딩장치의 구성 및 작용을 설명한다. Hereinafter, with reference to the accompanying drawings will be described the configuration and operation of the substrate loading apparatus according to the present invention.

도 2를 참조하면, 본 발명에 의한 기판로딩장치(1)는 기판이 적재된 카세트(20)를 수납하고 일측벽에 기판 반출구(11)가 형성되는 챔버(10)와, 상기 챔버(10)의 내부에서 마련되어 상기 카세트(20)를 재치한 상태에서 승강하는 승강플레이트(30)와, 상기 승강플레이트(30)를 승강시키는 승강수단이 더 구비된다. 본 실시예에서 상기 승강수단은 챔버(10) 내에 설치되는 볼스크류(40)이다. Referring to FIG. 2, the substrate loading apparatus 1 according to the present invention includes a chamber 10 in which a cassette 20 loaded with a substrate is accommodated, and a substrate outlet 11 is formed on one side wall, and the chamber 10. It is further provided with an elevating plate (30) for raising and lowering in the state in which the cassette 20 is mounted, and elevating means for elevating the elevating plate (30). In the present embodiment, the lifting means is a ball screw 40 installed in the chamber 10.

도 3 및 도 4를 참조하면, 상기 볼스크류(40)는 상기 챔버(10) 내에 설치되며, 상기 카세트(20)에 이웃하여 수직으로 설치되는 샤프트(41)와, 상기 샤프 트(41)의 회전에 의해 상기 샤프트(41)를 따라 승강하는 너트부재(42)와, 상기 샤프트(41)를 회전시키는 구동원(미도시)을 포함하여 구성된다. 상기 너트부재(42)는 상기 승강플레이트(30)와 연결부재(31)에 의해 연결되어 너트부재(42)의 승강에 따라 함께 승강한다. 3 and 4, the ball screw 40 is installed in the chamber 10, the shaft 41 is installed vertically adjacent to the cassette 20, and the shaft 41 of the It comprises a nut member 42 for lifting up and down along the shaft 41 by the rotation, and a drive source (not shown) for rotating the shaft 41. The nut member 42 is connected by the elevating plate 30 and the connecting member 31 to be lifted together in accordance with the lifting and lowering of the nut member 42.

특히, 상기 볼스크류(40)는 상기 사각형태의 승강플레이트(30)의 대각선 방향에 한 쌍이 설치된다. In particular, the ball screw 40 is a pair is installed in the diagonal direction of the lifting plate 30 of the rectangular shape.

또한, 본 실시예는 상기 승강플레이트(30)의 승강운동을 안내하기 위한 안내수단으로서 볼 스플라인(50)이 더 구비된다. 상기 볼 스플라인(50)은 상기 승강플레이트(30)의 다른 대각선 방향에 한 쌍이 설치되고 연결부재(32)에 의해 승강플레이트(30)에 연결된다. In addition, the present embodiment is further provided with a ball spline 50 as a guide means for guiding the lifting movement of the lifting plate 30. The ball spline 50 is a pair is installed in the other diagonal direction of the elevating plate 30 and is connected to the elevating plate 30 by a connecting member (32).

이하, 본 실시예의 작동상태를 설명한다. Hereinafter, the operating state of the present embodiment will be described.

도 5a를 참조하면, 먼저, 다수의 기판이 적재된 카세트(20)를 챔버(10) 내부에 장착한 상태에서, 챔버(10)를 펌핑하여 진공상태로 유지한다. 이 상태에서 상기 볼스크류(40)의 구동원을 작동시켜 샤프트(41)를 회전하고, 이에 따라 너트부재(42) 및 이에 연결되는 승강플레이트(30)를 상승시킨다. 이와 같이 승강플레이트(30)가 상승하면 카세트(20)도 함께 상승하게 되고, 이러한 방법으로 카세트(20)의 최상부에 적재된 기판이 기판 반출구(11)가 형성된 위치에 도달할 때까지 상승시킨다. 이 상태에서 상기 기판 반출구(11)를 통해 진입된 반송로봇(미도시)으로 카세트(20)의 최상부에 적재된 기판을 반출한다. Referring to FIG. 5A, first, in a state in which a cassette 20 on which a plurality of substrates are stacked is mounted inside the chamber 10, the chamber 10 is pumped and maintained in a vacuum state. In this state, the drive source of the ball screw 40 is operated to rotate the shaft 41, thereby raising the nut member 42 and the lifting plate 30 connected thereto. As such, when the lifting plate 30 rises, the cassette 20 also rises together, and in this way, the substrate loaded on the top of the cassette 20 is raised until the position at which the substrate outlet 11 is formed is reached. . In this state, the substrate loaded on the top of the cassette 20 is carried out to the transfer robot (not shown) entered through the substrate discharge port 11.

이와 같은 방법으로 카세트(20)를 순차적으로 상승하고, 그에 따라 순차적으 로 기판을 반출하여 카세트(20)의 최하부에 적재된 기판까지 모두 반출한다. 이 상태에서는 카세트(20)의 최하부에 적재된 기판이 상기 기판 반출구(11)가 형성된 위치까지 상승된다(도 5b참조) In this way, the cassette 20 is sequentially raised, and accordingly, the substrate is sequentially taken out and then all the substrates loaded on the lowermost portion of the cassette 20 are taken out. In this state, the board | substrate loaded in the lowermost part of the cassette 20 is raised to the position in which the said board | substrate discharge opening 11 was formed (refer FIG. 5B).

이와 같이 카세트(20)에 적재된 기판이 모두 반출되면, 상기 카세트(20)를 다시 하강한다. When all of the substrates stacked on the cassette 20 are removed, the cassette 20 is lowered again.

한편, 볼스크류(40)의 샤프트(41)가 상기 카세트(20)에 이웃하여 설치되기 때문에 본 발명에 의하면 승강수단의 스트로크를 고려한 챔버고(t2)가 낮게 설치될 수 있다(도 5a의 t2 < 도 1a의t1). On the other hand, since the shaft 41 of the ball screw 40 is installed adjacent to the cassette 20, according to the present invention, the chamber height t2 considering the stroke of the lifting means can be set low (t2 in FIG. 5A). <T1 of FIG. 1A).

도 1a 및 도 1b는 종래 로딩챔버를 도시한 것이다. 1A and 1B show a conventional loading chamber.

도 2 내지 도 4는 본 발명에 의한 일 실시예를 나타낸 것이다. 2 to 4 show one embodiment according to the present invention.

도 5a 및 도 5b는도 2에 도시된 실시예의 작동상태를 나타낸 것이다. 5a and 5b show the operating state of the embodiment shown in FIG.

**도면의 주요부분에 대한 부호의 설명**** Description of the symbols for the main parts of the drawings **

1: 기판로딩장치 10: 챔버1: substrate loading apparatus 10: chamber

11: 기판 반출구 20: 카세트11: substrate outlet 20: cassette

30: 승강플레이트 40: 볼스크류30: lifting plate 40: ball screw

41: 샤프트 42: 너트부재41: shaft 42: nut member

50: 볼스플라인50: ball spline

Claims (7)

기판이 적재된 카세트를 수납하고, 기판 반출구가 형성되는 챔버;A chamber accommodating a cassette on which a substrate is loaded and having a substrate outlet; 상기 챔버 내에 마련되어 상기 카세트를 재치한 상태에서 승강하는 승강플레이트; An elevating plate provided in the chamber for elevating in a state where the cassette is placed; 상기 챔버 내에 설치되어 상기 승강플레이트를 승강시키는 승강수단; 및 Elevating means installed in the chamber to elevate the elevating plate; And 상기 챔버 내부를 펌핑하여 진공분위기로 조성하는 펌핑수단;을 포함하는 것을 특징으로 하는 기판로딩장치. And pumping means for pumping the inside of the chamber to form a vacuum atmosphere. 제1항에 있어서,The method of claim 1, 상기 승강수단은 볼스크류인 것을 특징으로 하는 기판로딩장치.And said elevating means is a ball screw. 제2항에 있어서,The method of claim 2, 상기 볼스크류의 샤프트는 상기 카세트에 이웃하여 설치되는 것을 특징으로 하는 기판로딩장치. And the shaft of the ball screw is installed adjacent to the cassette. 제3항에 있어서,The method of claim 3, 상기 볼스크류는 상기 카세트의 최하부에 적재된 기판이 상기 기판 반출구가 형성된 위치에 도달할 때까지 상기 승강플레이트를 상승시키는 것을 특징으로 하는 기판로딩장치. And the ball screw raises the elevating plate until the substrate loaded at the lowermost portion of the cassette reaches a position where the substrate outlet is formed. 제2항에 있어서,The method of claim 2, 상기 볼스크류는 상기 승강플레이트를 중심으로 대각선 방향으로 한 쌍이 설치되는 것을 특징으로 하는 기판로딩장치. The ball screw is a substrate loading apparatus, characterized in that a pair is installed in a diagonal direction with respect to the lifting plate. 제1항에 있어서,The method of claim 1, 상기 승강플레이트의 승강운동을 안내하는 안내수단이 더 구비되는 것을 특징으로 하는 기판로딩장치. Substrate loading device, characterized in that the guide means for guiding the lifting movement of the elevating plate is further provided. 제6항에 있어서,The method of claim 6, 상기 안내수단은 상기 챔버 내에 상기 카세트와 나란하게 설치되며, 상기 승강플레이트에 연결되는 볼스플라인 또는 LM가이드인 것을 특징으로 하는 기판로딩장치. The guide means is installed in the chamber parallel to the cassette, substrate loading apparatus, characterized in that the ball spline or LM guide connected to the lifting plate.
KR1020080056167A 2008-06-16 2008-06-16 Apparatus for roading a substrate KR20090130498A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160083255A (en) * 2014-12-30 2016-07-12 주식회사 선익시스템 Substrate Heating System
KR20160083254A (en) * 2014-12-30 2016-07-12 주식회사 선익시스템 Substrate Cooling System

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160083255A (en) * 2014-12-30 2016-07-12 주식회사 선익시스템 Substrate Heating System
KR20160083254A (en) * 2014-12-30 2016-07-12 주식회사 선익시스템 Substrate Cooling System

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