KR20090126621A - Uneri measurement device and measurement method - Google Patents

Abstract

PURPOSE: A uneri measurement device and a measuring method thereof are provided to distinguish a side of a glass substrate where the uneri is generated. CONSTITUTION: A uneri measurement device comprises a chamber(205), a light source(220), a fluorescent screen(250), a measurement glass substrate(240) and camera(260). The chamber secludes the external light. The light source generates ultraviolet ray in one side inside the chamber. The fluorescent screen is parallel with the light source. The measurement glass substrate is parallel with the room between the light source and fluorescent screen. The camera is located in one side discrete from the fluorescent screen.

Description

Uneri Measurement Device and Measurement Method

The present invention relates to a uneori measuring equipment, and more particularly, to a uneori measuring equipment that can determine in advance the kind of uneori that appears as a fine egg bend on the surface of the glass substrate.

In general, the driving principle of the liquid crystal display device uses the optical anisotropy and polarization property of the liquid crystal. The liquid crystal has a long and thin structure, and thus has a directivity in the arrangement of molecules. Can be controlled.

Accordingly, when the molecular arrangement direction of the liquid crystal is arbitrarily adjusted, the molecular arrangement of the liquid crystal is changed, and light is refracted in the molecular arrangement direction of the liquid crystal due to optical anisotropy to express image information.

Currently, active matrix LCDs (AM-LCDs) in which thin film transistors and pixel electrodes connected to the thin film transistors are arranged in a matrix manner have attracted the most attention because of their excellent resolution and video performance.

Hereinafter, a liquid crystal display according to the related art will be described with reference to the accompanying drawings.

1 is a schematic cross-sectional view of a liquid crystal display according to the related art.

As shown in the drawing, the liquid crystal display 95 according to the related art has a first cell 5 and a second substrate 10 which have a predetermined cell gap d and are opposed to each other, and the first substrate 5 and the first substrate. The liquid crystal layer 15 is disposed in the spaced apart space of the second substrate 10, and the backlight unit 90 is disposed on the back surface spaced apart from the second substrate 10. In this case, the first and second substrates 5 and 10 and the liquid crystal layer 15 may be referred to as a liquid crystal panel 30.

The first substrate 5 may include a first glass substrate 1 divided into an active region AA that implements an image, an inactive region NAA, and a lower surface of the first glass substrate 1. Red (R), green (G), and blue (B) sub color filters 16a and 16b sequentially patterned on the black matrix 12 corresponding to the inactive region NAA and the black matrix 12 is bounded. And a color filter layer 16 including a common electrode 80 formed on the entire lower surface of the color filter layer 16.

Although not shown in the drawings, an overcoat layer (not shown) may be further configured in the space between the color filter layer 16 and the common electrode 80 for the purpose of mixing and planarizing color pigments.

Meanwhile, the second substrate 10 may include an active region AA including a pixel region P and a switching region S, and a second glass substrate 2 divided into an inactive region NAA. A gate wiring (not shown) configured in one direction of the upper surface of the second glass substrate 2, a gate electrode 25 extending from the gate wiring, and an upper front surface of the gate wiring and the gate electrode 25. A gate insulating layer 45 covering the semiconductor layer 45, a semiconductor layer 40 overlapping the gate electrode 25 on the gate insulating layer 45, and a pixel region disposed on the semiconductor layer 40 and vertically intersecting with the gate wiring. A data line (not shown) defining P), a source electrode 32 extending from the data line and in contact with the semiconductor layer 40, a drain electrode 34 spaced apart from the source electrode 32, One of the drain electrodes 34 covering the data line and the source and drain electrodes 32 and 34. To include a pixel electrode 70 connected to the drain electrode 34 via the protective film 55 and the drain contact hole (CH1) containing the drain contact hole (CH1) of exposure.

In order to manufacture the liquid crystal display device 95 having the above-described configuration, two glass substrates, that is, first and second glass substrates 1 and 2, are necessarily required. In this case, the first and second glass substrates 1 and 2 have been mainly used with a thickness of 1.1 mm, but in recent years, the thickness of 0.7 mm has become popular due to thinning and weight reduction. The first and second glass substrates 1 and 2 are generally manufactured by a floating method or a fusion method.

However, due to problems in the manufacturing process of the first and second glass substrates (1, 2), unevenness appears in the form of bands on the surface of the first and second glass substrates (1, 2) Saliva, etc.) often occurs.

FIG. 2A is a plan view illustrating a glass substrate on which a unary is generated, and FIG. 2B is a cross-sectional view taken along line II-II ′ of FIG. 2A, and will be described in detail with reference to the drawing.

As shown in FIG. 2A and FIG. 2B, the large glass substrate 100 used as the base of the 1st or 2nd glass substrate (1 or 2 of FIG. 1) of a liquid crystal display device (95 of FIG. 1) is shown. . The portion F indicated by the dotted line on the glass substrate 100 is a photolithography process including a deposition, exposure, development, and etching process on the glass substrate 100 to produce an array element or a color filter element, and then scribe and cut The area to be cut by the process and separated into individual first or second glass substrates.

In this case, a fine curvature unery (uneri) 110 is generated on the surface of the glass substrate 100 due to a defect in the manufacturing process. The unery 110 is one of defects generated in the manufacturing process of the glass substrate 100 and refers to the occurrence of stripe pattern bending at a predetermined height H from the surface of the glass substrate 100.

That is, as shown in FIG. 2B, the uriri 110 refers to a pattern in which a regular or irregularly protruding pattern repeatedly appears along the exposed surface of the glass substrate 100. The unery 110 may be classified into streaks generated on one exposed surface of the glass substrate 100 and code defects generated on both surfaces of the glass substrate 100.

At this time, the uriri 110 is generated in various forms such as a triangular shape, a semi-circular shape from the surface of the glass substrate 100 in the cross section.

The unery 110 is formed on the entire surface of the glass substrate 100 along the horizontal or vertical direction of the glass substrate 100 in the form of a band due to the manufacturing process characteristics of the glass substrate 100. Although the unery 110 is extremely finely generated on the surface of the glass substrate 100, when the fabrication of the liquid crystal display device is completed and the inspection process is performed, the unery 110 is expressed as a linear unevenness, causing a problem of deterioration in image quality due to uneven brightness. I'm making it.

In particular, in consideration of the fact that the unery 110 is generated at the glass substrate 100 which occupies a large portion of the manufacturing cost as well as at the beginning of the manufacturing process of the liquid crystal display device, the unery 110 is generated in advance. It is urgent to provide a system that can detect the presence or absence. However, since the unery 110 is generated at an extremely fine scale, it is not easy to solve the problem, thus causing a great impact on the production yield.

There is a contact method and a non-contact method for measuring the presence or absence of such defects of the uneri (110). The contact method has a height method and a wavyness method. The contact method has excellent measurement reliability while damaging the surface of the glass substrate 100 by damaging the surface of the glass substrate 100. It has the disadvantage of being coated.

In contrast, there is an optical system as a non-contact system. Such an optical method is generally used to use a xenon lamp (Xe-Lamp), the optical method using such a xenon lamp has an advantage that can easily measure the presence or absence of the Uneri 110 in a non-destructive manner.

Hereinafter, an optical method using a xenon lamp according to the related art will be described with reference to the accompanying drawings.

3 is a view schematically showing a uniori measuring equipment using a xenon lamp according to the prior art.

As shown in the drawing, the conventional unary measuring apparatus 150 may include a xenon lamp 155, a screen 170 spaced apart from the xenon lamp 155, and the xenon lamp 155 and the screen 170. And a stage 165 positioned in an interspace and capable of rotating 360 degrees, and a measurement glass substrate 160 fixed to an upper surface of the stage 165.

In this case, the measurement glass substrate 160 may be irradiated in a direction perpendicular to the screen 170, that is, the irradiation direction of the xenon lamp 155 is parallel to the thickness plane T of the measurement glass substrate 160. The xenon lamp 155, the measuring glass substrate 160, and the screen 170 are aligned.

The unery measuring device 150 having such a configuration operates the xenon lamp 155 to irradiate light onto the measuring glass substrate 160, and the light passing through the measuring glass substrate 160 forms a difference on the screen 170. The principle is to use it.

That is, in the conventional uneri measuring equipment 150, in the state where the thickness plane T of the xenon lamp 155 and the measurement glass substrate 160 are arranged in a line, the light irradiated from the xenon lamp 155 is When light is not transmitted by the thickness T of the measuring glass substrate 160 to prevent image formation on the screen 170, the stage 165 is gradually turned clockwise or counterclockwise to change the angle of the xenon lamp. Light irradiated from 155 passes through the flat surface of the measuring glass substrate 160 to form an image on the screen 170.

At this time, it is possible to detect whether the unori is generated through the correlation between the angle change of the measurement glass substrate 160 by the stage 165 and the image formed on the screen 170. That is, it may be referred to as a method using a difference in transmittance of light irradiated onto the measurement glass substrate 160 according to the angle change of the stage 165.

However, since the conventional Uneri measuring equipment 150 is measured by the naked eye, it can only detect the position of the Uneri generated in the measuring glass substrate 160 because it is dependent on the measurer. In addition, there is a problem in that it is impossible to determine which side of the unery is generated on the measurement glass substrate 160.

That is, a streak in which a uni-ri occurs on one surface of the measurement glass substrate 160 and a cord generated on both surfaces of the measurement glass substrate 160 are different in structure and scale. Due to such a difference, the tendency to cause problems in mass production of the liquid crystal display device is different.

For example, assuming that streaks are generated in the measurement glass substrate 160, when the side where streaks are generated during the manufacturing process of the liquid crystal display device is disposed outside the liquid crystal layer, the image quality is not affected. In the case of being disposed inside, a problem of poor image quality is caused due to the refractive index inside the liquid crystal layer.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and improves the production yield by providing a uneori measuring equipment that can determine not only the kind of uniri but also on which side of the glass substrate. For the purpose of

According to a first aspect of the present invention, there is provided a unitary measuring apparatus comprising: a chamber for blocking external light; A light source generating ultraviolet rays from one side of the chamber; A fluorescent screen spaced in parallel with the light source; A measurement glass substrate disposed parallel to the spaced space between the light source and the fluorescent screen; Located on one side spaced apart from the fluorescent screen, and irradiated with ultraviolet light from the light source to the measurement glass substrate includes a measurement camera to detect which side of the unery on the measurement glass substrate.

The ultraviolet light is characterized in that it has a wavelength range of 300 ~ 400nm. In this case, the ultraviolet light is characterized in that the ultraviolet lamp including a luminous lamp and an insect repellent ultraviolet lamp.

In addition, the fluorescent screen is characterized in that the fluorescent material is emitted by the ultraviolet light is coated.

According to a first aspect of the present invention, there is provided a method for measuring unery according to a first embodiment of the present invention. Irradiating ultraviolet rays from the light source to the unery generation point of the measurement glass substrate to determine the refractive pattern of the unery by the fluorescent screen and the measurement camera.

According to a second aspect of the present invention, there is provided a unitary measuring apparatus comprising: a chamber for blocking external light; A light source generating ultraviolet rays from one side of the chamber; A measurement glass substrate spaced apart from and parallel to the light source; And a current detector disposed parallel to the measurement glass substrate and detecting ultraviolet light from the light source on the measurement glass substrate to detect which side of the measurement glass substrate exists.

In the present invention, first, it is possible to easily determine the type of unori generated on the glass substrate, thereby improving the production yield due to the reduction of defects during mass production of the liquid crystal display device.

Second, the non-destructive and optical method can easily determine the type of unery without fear of damage to the measurement glass substrate.

--- First Embodiment ---

The present invention is characterized by providing a unitary measuring equipment that can easily distinguish the type of unery using an ultraviolet lamp and a fluorescent screen.

Hereinafter, with reference to the accompanying drawings it will be described with respect to the unery measuring equipment according to a first embodiment of the present invention.

4 is a view schematically illustrating the unori measuring apparatus according to the first embodiment of the present invention, and more particularly, relates to the uneri measuring apparatus capable of determining the type of uneri, and FIGS. 5A and 5B A diagram for explaining the trick and code.

First, as shown in FIG. 4, the unary measuring apparatus 200 according to the first exemplary embodiment of the present invention includes a chamber 205 for blocking external light, and an ultraviolet (UV) light at one inner side of the chamber 205. A light source 220 generating UV), a fluorescent screen 250 spaced in parallel with the light source 220, and a measurement disposed in parallel to the spaced space between the light source 220 and the fluorescent screen 250 And a glass camera 240 and a measurement camera 260 for photographing and observing a pattern of ultraviolet light (UV) passing through the measurement glass substrate 240 to one side of the fluorescent screen 250 through the fluorescent screen 250. do.

The chamber 205 blocks external light to prevent generation of noise due to interference effects caused by external light.

The measurement glass substrate 240 is placed on the stage 230 that can be rotated 360 degrees, it is possible to move the measurement glass substrate 240 in the desired direction and position through the stage 230.

In this case, the light source 220 is an ultraviolet lamp that can irradiate light of a short wavelength. That is, the unary measuring apparatus 250 according to the first embodiment of the present invention is an optical and non-tactile method using ultraviolet rays.

In general, since ultra-violet (UV) light having an ultra-short wavelength of 300 nm or less may be absorbed by the measurement glass substrate 240, it is preferable to use an ultraviolet lamp having a wavelength range of 300 to 400 nm. Such ultraviolet lamps include blacklight blue light (BLB) and blacklight lamps (BL). In particular, when the luminous lamp is applied, a wavelength band of 352 nm is extracted using an optical filter.

Since the ultraviolet (UV) is not visible to the naked eye unlike the visible light, the fluorescent screen 250 coated with a fluorescent material that emits light when irradiated with ultraviolet (UV) is used. Therefore, the ultraviolet (UV) emitted from the light source 220 is emitted by the fluorescent screen 250 after passing through the measuring glass substrate 240, each of the ultraviolet (UV) passing through the measuring glass substrate 240 The pattern of ultraviolet (UV) light emitted from the position may be determined through the measurement camera 260, and reproducibility may be secured by collecting information detected by the measurement camera 260.

At this time, the unery measuring apparatus 200 according to the first embodiment of the present invention checks the location of the unery 210 using the conventional xenon lamp 155 of FIG. Type, that is, a streak where the unori 210 is generated on one surface of the measurement glass substrate 240 or a cord in which the unori 210 is generated on both surfaces of the measurement glass substrate 240. It is used for the purpose of determining the authorization.

The unery 210 has a height H of 20 nm or less on the surface of the measurement glass substrate 240 having a thickness t of 0.7 mm and is generated in the form of a band. In this case, FIG. 5A illustrates a streak in which the unery 210 protrudes irregularly from one exposed surface of the measurement glass substrate 240, and FIG. 5B illustrates the measurement glass substrate 240. It shows the cord (cord) is generated in the regular or irregularly protruding unire 210 on both exposed surfaces of the.

These streaks are generated with a height H of 10-20 nm, a width W of 10-20 nm, and a cord having a height H of 10 nm or less and a width W of 5 nm or less, respectively.

6A, 6B, and 6C are diagrams for describing detection of streaks and codes, respectively, and will be described with reference to FIG. 4.

As shown in FIG. 4, the measuring method using the unery measuring device 200 according to the first exemplary embodiment of the present invention includes the unery 210 through the unery measuring device using a conventional xenon lamp. After confirming the position, the light source 220 and the measurement glass substrate 240 and the fluorescent screen 250 positioned on the stage 230 are disposed in parallel. In this case, after irradiating the ultraviolet (UV) emitted from the light source 220 to the position where the unery 210 of the measurement glass substrate 240 is present, the ultraviolet (UV) passing through the measurement glass substrate 240 is fluorescent The screen 250 and the measurement camera 260 are used to determine the type of the unery 210.

To explain this in detail, assuming that there is a uni 210 having a height of 10 nm on one surface of the measurement glass substrate 240, when applying a laser having a wavelength band of 632.8 nm, 10 nmm / 632.8 nm = 0.0158 (1.58%), and a phase difference of 0.0158 * 360 = 5.69 degrees occurs.

On the other hand, when applying ultraviolet (UV) having a wavelength band of 300 to 400nm, more specifically 352nm, 10nm / 352nm = 0.0284 (2.84%), a phase difference of 0.0284 * 360 = 10.23 degrees occurs.

For this reason, when applying ultraviolet (UV) having a shorter wavelength than the laser, it is possible to maximize the refraction effect of the bending of the Woori 210, the variation of the path change of light and the fluorescent screen 250 There is an advantage that it is easy to detect with the measurement camera 260.

Therefore, in the first embodiment of the present invention, since the ultraviolet light (UV) having a wavelength band similar to the size of the unori 210 is used as the light source 220, the ultraviolet light (UV) is the measurement glass substrate 240. In the process of passing through the light path due to the minute curvature of the measurement glass substrate 240 becomes sensitive, it is easy to distinguish between the streak and the cord, furthermore, on which side of the measurement glass substrate 240 is the streak generated? The information on can be determined.

That is, as shown in FIG. 6A, when the unori 210 is present on the upper surface of the measurement glass substrate 240, the UV light from the light source 220 is not present at the portion where the uneri 210 is not present. The measurement glass substrate 240 will be penetrated as it is without refraction, and the fluorescent screen may be formed by the first refraction pattern R ₁ , which is refracted once by minute bending of the uneri 210, at the portion where the uneri 210 is present. 250).

In addition, as shown in FIG. 6B, when the anneal 210 is present on the lower surface of the measuring glass substrate 240, ultraviolet rays (UV) from the light source 220 may be exposed to the upper surface of the measuring glass substrate 240 and the same. After passing through the interior as it is without refraction, the second refraction pattern R ₂ , once refracted by the UNERI 210 present on the lower surface of the measurement glass substrate 240, will be irradiated onto the fluorescent screen 250. .

In addition, as shown in FIG. 6C, when the unery 210 is present on both the upper surface and the lower surface of the measurement glass substrate 240, ultraviolet light (UV) from the light source 220 is exposed to the unery 210 of the upper surface. ) And the third refractive pattern R ₃ refracted by the unary 210 of the lower surface will be irradiated to the fluorescent screen 250.

Through detecting the first, second, and third refraction patterns R ₁ , R ₂ , and R ₃ with the fluorescent screen 250 and the measurement camera 260, not only the type of the unori 210, but also the measurement glass It is possible to determine which side of the substrate 240 has the unery 210 generated.

Therefore, in the first embodiment of the present invention, it is possible to determine not only the kind of unori but also on which side of the glass substrate. Therefore, the production yield can be determined by determining in advance whether mass production of the measuring glass substrate is applied. Can be improved.

In addition, in the case of the streaks in which one side of the glass substrate is present, the problem of poor image quality can be prevented by arranging the glass substrate on the outer surface where the streaks are not in contact with the liquid crystal layer.

--- Second Embodiment ---

The second embodiment of the present invention is characterized by providing a uneori measuring equipment that can easily distinguish the type of uneori using a current detector instead of a fluorescent screen and a measuring camera.

The second embodiment of the present invention differs only in some configurations from the first embodiment, and the description thereof will be omitted since it is the same in terms of objects and effects.

FIG. 7 is a view schematically illustrating the unori measuring apparatus according to the second embodiment of the present invention, and more particularly, relates to the uneri measuring apparatus capable of determining the type of uneri.

As shown, the unary measuring apparatus 300 according to the second embodiment of the present invention generates a chamber 305 for blocking external light and ultraviolet (UV) at one inner side of the chamber 305. A light source 320, a current detector 350 spaced in parallel with the light source 320, and a measurement glass substrate 340 disposed in parallel to the spaced space between the light source and the current detector 350. do.

In this case, the unary measuring apparatus 300 according to the second embodiment of the present invention is characterized by using the current detector 350 instead of the fluorescent screen 250 of FIG. 4 and the measurement camera 260 of FIG. 4.

After irradiating ultraviolet (UV) light from the light source 320 to the measurement glass substrate 340 in a state where the current detector 350 is disposed on the front surface, the measurement glass of ultraviolet rays (UV) penetrating the measurement glass substrate 340. Since only the refractive pattern R by the unori 310 present in the substrate 340 can be directly computerized, the kind and position of the uneri 310 can be determined more precisely.

Therefore, in the second embodiment of the present invention, the same effects as in the first embodiment can be obtained.

However, the present invention is not limited to the above embodiments, and it will be apparent that various modifications and changes can be made without departing from the spirit and the spirit of the present invention.

1 is a schematic cross-sectional view of a liquid crystal display according to the related art.

FIG. 2A is a plan view illustrating a glass substrate on which unery is generated. FIG.

FIG. 2B is a cross-sectional view taken along the line II-II 'of FIG. 2A;

Figure 3 is a schematic view showing the uneori measuring equipment using a xenon lamp according to the prior art.

4 is a schematic view of the unori measuring equipment according to the first embodiment of the present invention.

5A and 5B are diagrams for explaining streaks and codes.

6A, 6B, and 6C are respective diagrams for explaining example detection of streaks and codes.

7 is a schematic view of the unori measurement equipment according to a second embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings *

200: uri chamber measuring equipment 205

210: Uneri 220: light source

230: stage 240: measuring glass substrate

250: fluorescent screen 260: measuring camera

UV: UV

Claims (6)

A chamber for blocking external light; A light source generating ultraviolet rays from one side of the chamber; A fluorescent screen spaced in parallel with the light source; A measurement glass substrate disposed parallel to the spaced space between the light source and the fluorescent screen; A measuring camera positioned on one side of the fluorescent screen and irradiated with ultraviolet rays from the light source to the measuring glass substrate to detect which side of the measuring glass substrate exists; Uneri measuring equipment comprising a. The method of claim 1, The UV measurement apparatus of claim 1, characterized in that having a wavelength band of 300 ~ 400nm. The method of claim 1, The ultraviolet light is a UV measurement lamp, characterized in that the UV lamp including a luminous lamp and insect repellent UV lamp. The method of claim 1, The fluorescent screen is a unimetric measuring equipment, characterized in that the fluorescent material is applied to the ultraviolet light is applied. In the Uneri measuring equipment in which a light source, a measuring glass substrate, a fluorescent screen, and a measuring camera are arranged in sequence, Confirming the unery generation point on the measuring glass substrate by using the unery measuring equipment using a xenon lamp; Irradiating ultraviolet rays from the light source to the unery generation point of the measurement glass substrate to determine the refractive pattern of the unery by the fluorescent screen and the measurement camera. Unori measuring method comprising a. A chamber for blocking external light; A light source generating ultraviolet rays from one side of the chamber; A measurement glass substrate spaced apart from and parallel to the light source; A current detector disposed parallel to the measurement glass substrate and irradiating ultraviolet rays from the light source to the measurement glass substrate to detect on which side of the measurement glass substrate there is an unery; Uneri measuring equipment comprising a.

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