KR20090117177A - Nanoprobe fabricating method and the nanoprobe thereby - Google Patents

Abstract

PURPOSE: A method for manufacturing a micro probe and a micro probe thereof are provided to easily control shape, thickness, and length of a micro probe by controlling a concentrating region of an electric field. CONSTITUTION: A body of a micro probe is formed by aligning at least two electrodes(ST10). A solution for forming a micro probe formed by mixing a nano wire and one of nano particle to monomer is prepared(ST20). The solution for forming the micro probe is supplied between the electrodes(ST30). An electric field is concentrated between corresponding tips by applying a voltage between the electrodes(ST40). A micro probe is formed in an end of the electrode(ST50). The solution for forming the micro probe includes catalyst.

Description

Micro probe manufacturing method and the micro probe {nanoprobe fabricating method and the nanoprobe hence}

The present invention relates to a method for manufacturing a fine probe, and more particularly, to a method for manufacturing a fine probe having excellent manufacturing efficiency and having various functions.

Recently, interest in nanotechnology for manufacturing nanoscale components and devices has been increasing, and research on nanotechnology has been actively conducted. Development of nanoprobe fabrication technology can be the basis for developing nanoimage analysis equipment.

AFMs are widely used to observe nanoscale structures, but are limited in a variety of situations that require high resolution due to the structural limitations of commercialized tips themselves.

However, the atomic force microscope combined with nanoprobes reduces the convolution effect because of its high aspect ratio and high elasticity.

As a result, atomic force microscopes are capable of high resolution and can be observed without damaging the surface of biological materials. In other words, nanoprobe manufacturing technology becomes the basic technology for observing the field of nanobiotechnology that is currently active.

The nanoprobe fabrication technology may be applied to various fields from research of cell biology to application of new drug development by injecting various samples and proteins into cells in order to study cells or microstructures in the field of biotechnology and observing the reaction.

However, the conventional syringe-injected drug damages the cells, whereas the nano-injector technology using nanoprobes allows the sample to penetrate into the cells without damaging the cell membrane.

Nanoinjector technology can also measure signals inside cells by coating various functional groups and enzymes on conductive nanoprobes. Thus, the development of conductive nanoprobes could be a solution for studying various cellular responses.

For example, nanoprobes are manufactured by etching silicon tips through a MEMS (Microelectromechanical Systems) process. The tip of the nanoprobe is several tens of nanometers in size and can be processed in a batch process. However, the silicon forming the nanoprobe has a high brittleness and, due to the limitation of the etching process, does not have a high aspect ratio.

Another example is a nanoprobe having a high aspect ratio by attaching or growing carbon nanotubes (CNTs) to tip ends using electron beam (Ebeam) and Dielectrophoresis (DEP) techniques. However, these nanoprobes have low productivity and low reproducibility, making them difficult to commercialize.

One embodiment of the present invention improves the manufacturing efficiency, and relates to a fine probe manufacturing method for manufacturing a fine probe having a variety of functions.

One embodiment of the present invention relates to a method for manufacturing a fine probe to manufacture a fine probe having a variety of functions using a variety of materials, and to control the length and thickness of the fine probe.

In the method of manufacturing a fine probe according to an embodiment of the present invention, at least two electrodes are prepared in a solution for forming a fine probe, and a voltage is applied to the electrodes to induce an electric field concentration between the sharp electrodes. At the end, a fine probe can be formed.

In a method of manufacturing a fine probe according to an embodiment of the present invention, an electrode preparation step of preparing an electrode to be a body of a fine probe by aligning at least two electrodes, forming a fine probe in which one of the nanowires and the nanoparticles is mixed with a monomer A solution preparation step of preparing a solution for solution, a solution supply step of supplying the solution for forming the fine probe between the prepared electrodes, and electric field concentration to focus the electric field between the corresponding tips by applying a voltage between the electrodes It may include a step.

In the electrode preparation step, the electrode is prepared as two first electrodes and a second electrode, and the first electrode and the second electrode are aligned to face the sharp tips to each other, and the shortest distance between the tip and the tip. It can be shaped.

In the electrode preparation step, three or four electrodes are prepared, and each tip of the electrodes may be arranged in a triangle or a square.

The electrode preparation step may adjust the distance between the electrodes in the state in which one of the nanowires and the nanoparticles are integrated.

The electrode preparation step may include manufacturing an electrode having a pointed tip, and aligning the tip through fine position adjustment.

The electrode preparation step may form a pointed tip by electrochemical etching using tungsten wire.

The electrode preparation step may produce a fine pillar perpendicular to the plane by aligning the pointed electrode to the electrode formed on the plane.

The solution preparation step may include a monomer of a functional polymer that is electrochemically synthesized in the solution for forming the fine probe.

The monomer of the functional polymer may include one or two or more of pyrrole, aniline, acetylene, thiophene, isothiophene, phenylene, toludine, azine, asene, azulene, pyridine, and indole.

The solution preparation step may include a first mixing step of mixing one of the nanowires and nanoparticles in a solvent, and a second mixing step of mixing monomers of the functional polymer in a solution in which one of the nanowires and nanoparticles is mixed. It may include.

The first mixing step may add one of the nanowires and nanoparticles by 0.01 to 10% by weight. The first mixing step may be one of a surfactant and ultrasonic wave treatment to the solution. The first mixing step may adjust the concentration of one of the nanowires and nanoparticles in the solution.

In the second mixing step, 0.1 to 5 moles (M) of the functional polymer monomer may be added. The second mixing step may dilute or sonicate the functional polymer monomer in an organic solvent in the solution. In the second mixing step, the doping solution may be further mixed.

One of the nanowires and nanoparticles may include one of carbon nanotubes (CNT), fullerenes (C60), gold nanoparticles, and silver nanoparticles. The solution for forming the fine probe may include a catalyst.

The solution supplying step may include one of dropping the fine probe forming solution between the electrodes and immersing the electrodes in the fine probe forming solution.

The solution supply step may further include adding a monomer of a conductive polymer to the solution for forming the fine probe. The solution supply step may supply at least two solutions for forming the fine probe according to the manufacturing step of the fine probe.

The electric field concentration step may apply one of alternating current and direct current to the electrodes.

In the electric field concentration step, the electric field is concentrated by applying different voltages to the electrodes.

The AC voltage may include a frequency range of 1 kHz to 100 MHz.

The DC voltage may include a range of 0.1 to 0.5V. The electric field concentration step may adjust the magnitude of the DC voltage.

The electric field concentration step may increase the distance between the electrodes.

In the method of manufacturing a fine probe according to an embodiment of the present invention, following the electric field concentration step, the solution for forming the fine probe is removed, and the menis is sharpened with a material and a sharp tip concentrated between the first electrode and the second electrode. While forming a meniscus, the method may further include a probe completion step of aggregating the concentrated material to complete the fine probe.

In addition, the micro-probe according to an embodiment of the present invention is manufactured by one of the methods of manufacturing the micro-probe, the tip of the atomic force microscope (AFM), the tip of the scanning microscope (STM), the bio probe (Bio Probe), the electron gun ( electron emission source), an electron emission device, and a cell / biomaterial internal property measurement sensor.

As described above, according to an embodiment of the present invention, two or more electrodes are disposed in a solution for forming a fine probe, the electric field is concentrated between the tips of the electrodes, and nanowires or nanoparticles are integrated in the concentrated electric field so that the fine probe is Since it promotes the formation of, it is effective to produce a fine probe efficiently and stably.

By adjusting the arrangement of the electrodes and the magnitude of the voltage applied to each electrode, by adjusting the concentrated region of the electric field, there is an effect of easily adjusting the shape, thickness and length of the manufactured fine probe.

In forming the fine probe, there is an effect of increasing the length of the generated fine probe by increasing the distance between the electrodes.

There is an effect of adjusting the shape and position of the fine probe by changing the frequency of the alternating voltage and the magnitude of the voltage between the electrodes. In consideration of the field in which the fine probe is used, a fine probe may be manufactured in a shape corresponding thereto, and the fine probe may be used in various fields.

In addition, it is possible to manufacture a fine probe having a variety of properties according to the type and concentration of nanowires or nanoparticles contained in the solution for forming a probe, the type and concentration of the functional polymer monomer, and the type of the doping material to be added, and also in various fields There is an effect that can be used.

The micro probe manufactured by this manufacturing method can be applied to SPM (Scanning Probe Microscopy) such as AFM, and it can reduce the convolution effect that AFM tip has so far, thereby reducing the uncertainty caused by AFM tip. May have

Since the shape of the tip having the fine probe has a high aspect ratio, the tip may reach the inside of the cell, thereby measuring the transfer of a substance into the cell or various signals inside the cell.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like elements throughout the specification.

Throughout the present invention, the term "micro probe" refers to a probe having a diameter of micrometer or nanometer level.

1 is a conceptual diagram of a method of manufacturing a fine probe according to an embodiment of the present invention, Figure 2 is a flow chart of a method of manufacturing a fine probe according to an embodiment of the present invention.

1 and 2, in the method of manufacturing a fine probe, at least two electrodes are prepared in a solution for forming a fine probe, a voltage is applied to the electrodes to induce electric field concentration between the sharp electrodes, and thus the fine probe at the end of the electrode. To form.

Since nanowires or monomers contained in the solution for forming the fine probe are concentrated between the electrodes by the electric field concentrated between the electrodes, the formation of the fine probe is promoted and the production efficiency is improved.

In more detail, the method for manufacturing a fine probe includes an electrode preparation step ST10, a solution preparation step ST20, a solution supply step ST30, and an electric field concentration step ST40.

In the electrode preparation step ST10, at least two electrodes 1 and 2 are prepared to prepare the electrodes 1 and 2 to be the bodies of the fine probes, and are aligned through fine position adjustment. The electrodes 1, 2 with pointed tips facilitate the concentration of the electric field between each other.

In the solution preparation step (ST20), one of the nanowires and the nanoparticles and the monomer is mixed to prepare a fine probe forming solution (3).

In the solution supply step ST30, the fine probe forming solution 3 is supplied between the prepared electrodes 1 and 2. Solution supply step (ST30) may be appropriately selected in consideration of the manufacturing environment of the fine probe (4), either a method of dropping the solution or a method of dipping the electrodes (1, 2) in the solution.

The electric field concentration step ST40 applies a voltage between the electrodes 1 and 2 to concentrate the electric field between the tips corresponding to each other to form a fine probe.

Since the electric field is concentrated at the sharp tips of the electrodes 1 and 2, the nanowires or nanoparticles contained in the solution for forming the fine probe 3 are integrated by this electrophoresis, thereby further facilitating the formation of the fine probe.

Battery concentration step (ST40) can be formed by the AC voltage, thereby eliminating the need for expensive equipment for the electrical signal of a complex waveform, by changing the AC frequency can adjust the shape of the fine probe. .

In addition, the method for manufacturing a fine probe according to an embodiment further includes a probe completion step (ST50). Probe completion step (ST50) is followed by the electric field concentration step (ST40), to remove the fine probe formation solution (3). Therefore, the meniscus is formed on the material and the sharp tip which is concentrated between the two electrodes 1 and 2, and the concentrated material is aggregated to form the fine probe 4.

The solution for forming a fine probe 3 used in the method for producing a fine probe according to the present embodiment includes a solvent, a nanowire or a nanoparticle, a surfactant, and a functional polymer monomer.

The surfactant evenly distributes the nanowires or nanoparticles in the solvent, and the functional high spray monomers impart various functions to the fine probe.

For example, the solvent includes water or an organic solvent. Organic solvents include methanol, ethanol, isopropanol, butanol, acetone, acetonitrile, toluene, dichloromethane, dimethyl formamide (DMF), dimethyl sulfoxide (DMSO), tetrahydrofuran (THF), And propylene carbonate.

Nanowires or nanoparticles accumulate in areas where electric fields are concentrated, forming the basic skeleton of the formation of the fine probe 4, and serving as a catalyst for promoting the polymerization of functional polymer monomers.

The nanowires or nanoparticles may be made of one of carbon nanotubes (CNT), fullerenes (C60), gold nanoparticles, and nanoparticles. The materials used as catalysts can vary even more than these, and they are concentrated in areas where electric fields are concentrated to locally concentrate currents to promote polymerisation.

The solution for forming the fine probe may further include a dispersant, for example, the dispersant may be sodium dodecylsulfate.

The functional polymer monomer is one of pyrrole, aniline, thiophene, isothiophene, phenylene, toludine, azine, acene, azulene, pyridine, and indole having a conductive function, and may be various other polymer monomers.

The solution for forming a fine probe may be prepared by mixing a dispersant, a nanowire or a nanoparticle with a solvent, and then adding a monomer of a functional polymer to the solvent.

In addition, the solution for forming a fine probe may be prepared by further adding a doping material when it is necessary to impart desired characteristics to the fine probe by using doping.

For example, carbon nanotubes may be used as nanowires or nanoparticle materials, and in this case, carbon nanotubes may be added in an amount of 0.01 to 10 wt% based on the total weight of the solvent.

After the solvent, the dispersant and the carbon nanotubes are mixed, sonication may be performed for about 10 to 60 minutes so that the carbon nanotubes can be efficiently dispersed in the solvent.

Even in this state, the carbon nanotubes that are not dispersed in the solution for forming a fine probe can be removed by centrifugation or a nano filter.

For example, as the functional polymer monomer, pinol may be used, and the carbon nanotubes may be added at a concentration of 0.01 to 5 mol (M) based on the solution for forming the micro probe.

The solution for forming a fine probe applied to the present invention is not limited to the above description, and may use various materials that can serve as a solvent, a conductive polymer monomer, a catalyst, and a dispersant, and a solvent, a conductive polymer monomer, and a catalyst. Depending on the materials used, their proportions may also vary.

When the conductive polymer monomer is added to the fine probe forming solution 3, a fine probe which is a composite of the conductive polymer and carbon nanotubes may be manufactured. Conductive polymers have the flexibility, chemical stability, and biocompatibility that metals do not have, allowing micro probes to be applied to various types of sensors.

3 is an arrangement of two electrode tips in FIG. 1, FIG. 4 is an integrated state diagram of carbon nanotubes on two electrode tips of FIG. 3, and FIG. 5 shows a fine probe formed on two electrode tips of FIG. 4. 6 is a state diagram in which a fine probe is manufactured at an electrode tip.

3 and 4, the electrodes 1 and 2 can be fabricated by electrochemically etching the tungsten wire to have a pointed tip. Electrochemical etching of the tungsten wire is performed by connecting a positive electrode to the tungsten wire using 0.5 to 5 mol (M) aqueous sodium hydroxide solution, and placing the negative electrode between circular platinum electrodes to which the negative electrode is connected, thereby applying a DC voltage of 1 to 10 V. Do it. The etch shape of the tungsten tip can be controlled by adjusting the concentration of the etch solution, the voltage applied to it, and the length of the tungsten wire immersed in the solution.

The tungsten tip thus prepared is connected to the finely adjusted triaxial stage, and the electrodes 1 and 2 having the tungsten tip are aligned while observing using a microscope. For example, the two electrodes 1 and 2 face each other and are aligned such that the two electrodes maintain a spacing of 5 to 10 μm.

Finally, 5 to 10 ul of the fine probe forming solution 3 is supplied between the aligned electrodes 1 and 2, and an alternating voltage of 1 kHz to 100 MHz is applied between the two electrodes 1 and 2 so that the two electrodes 1 2) Carbon nanotubes 5 contained in the solution for forming a fine probe 3 are integrated between the ends to produce a fine probe 4 (see FIG. 3).

In this process, the thickness of the fine probe can be adjusted by adjusting the time for applying the voltage and the concentration of the solution for forming the fine probe, and between the electrodes 1 and 2 while removing the supplied fine probe forming solution. As the varnish (meniscus) is formed, the integrated carbon nanotubes 5 are condensed to produce a fine and thin micro probe 4 (see FIGS. 4, 5, and 6).

The concentration of nanowires or nanoparticles in the solution for forming a fine probe has a direct relationship with the amount of nanowires or nanoparticles accumulated between the electrodes 1 and 2 by electric field concentration at a certain time, It is directly related to physical, mechanical, electrical and chemical properties. Therefore, by adjusting the concentration, the properties of the fine probe 4, for example, the thickness and the electrical properties can be adjusted.

In addition, in the state in which the carbon nanotubes 5 are integrated, adjusting the distance between the electrodes 1 and 2 changes the length and width of the integrated carbon nanotubes 5 distribution, and by using the fine The length and thickness of the probe 4 can be further adjusted.

7 is a state diagram of the electrode tip and the AFM tip, Figure 8 is a state diagram of the AFM tip having a high aspect ratio.

Referring to FIGS. 7 and 8, an AFM tip is used as the electrodes 1 and 21 to fabricate an AFM tip having a high aspect ratio.

An electrode 1 having an electrochemically etched tungsten tip and a commercial atomic force microscope tip are used as the electrodes 21, and the two electrodes 1 and 21 are aligned at intervals of 10 mu m (see FIG. 7).

With an alternating voltage applied between the aligned two electrodes (1, 21), a fine probe forming solution (3) is supplied between the two electrodes (1, 21) for several seconds to provide a high aspect ratio at the tip of the atomic force microscope tip. The branched carbon nanotubes 5 or nanowires were synthesized to fabricate an atomic force microscopy tip having a fine probe 24 having a high aspect ratio (see FIG. 8).

9 and 10 are aligned state diagrams of three electrode tips.

9 and 10, the production of various types of fine probes using three or more, for example, three electrodes 31, 32, and 33 will be described.

Align the electrodes 31, 32, 33 having three tungsten tips electrochemically etched so that the tips form a triangle, and supply the solution 3 for forming a fine probe between the electrodes 31, 32, 33. (See Fig. 9).

The two electrodes 32 and 33 are connected to each other and connected to the (+) terminal, and the other electrode 31 is connected to the (+) terminal and applied with an alternating voltage to form a wedge-shaped fine probe 34. To prepare (see Fig. 10).

By applying different voltages to the electrodes 31, 32, and 33, a portion in which an electric field is concentrated between the electrodes is controlled, and thus, fine probes having various shapes can be manufactured.

11 to 14 are manufacturing state diagrams of the fine probes manufactured while increasing the distance between the electrodes.

Referring to FIGS. 11 to 13, manufacturing while increasing the length of the fine probe while gradually increasing the distance between the two electrodes 41 and 42 will be described.

The electrodes 41, 42 having two tungsten tips etched electrochemically are aligned at 10 占 퐉 intervals, and a solution 3 for forming a fine probe is supplied between the electrodes 41, 42.

In this state, an alternating voltage is applied between the two electrodes 41 and 42 to agglomerate the carbon nanotubes 45 (see FIG. 11), while gradually increasing the length between the electrodes 41 and 42 to increase the length. The probe 44 is produced (FIGS. 12-14).

15 to 17 are manufacturing state diagrams of a pinol fine probe, aniline fine probe, and thiophene fine probe.

Referring to Figure 15 to 17, it will be described to produce a fine probe using a solution for forming a fine probe containing a variety of functional polymer monomers.

Electrodes 1, 2 having two tungsten tips etched electrochemically are aligned at intervals of 10 μm, and a solution for forming a fine probe is supplied between the electrodes 1, 2.

Probe formation solutions 13, 23, 43 containing pyrrole, aniline and thiophene, respectively, were supplied between the electrodes 1, 2 to provide fine probes 54, 64, 74 having respective functional polymer properties. It manufactures (refer FIG. 15-17).

When preparing a fine probe, by using a variety of different types of fine probe forming solution for one probe step by step, it is possible to obtain a fine probe having different characteristics along the length direction of the fine probe.

18 to 21 are state diagrams of producing a fine probe using a DC voltage.

18 to 21, a DC probe is applied to the electrodes 1 and 2 to polymerize the functional polymer monomer from the (+) electrode to produce a fine probe, and to adjust the length of the fine probe. Explain.

Electrodes 1, 2 having two tungsten tips etched electrochemically are aligned at intervals of 10 μm, and a solution 3 for forming a fine probe is supplied between the electrodes 1, 2.

Applying an alternating current voltage between the two electrodes (1, 2) in a state where the carbon nanotubes are integrated in a concentrated electric field, when a direct current voltage is applied, current flows concentrated along the integrated carbon nanotubes from the positive electrode. As the polymerization of the functional polymer monomer proceeds, fine probes grow along the integrated carbon nanotubes.

In this case, the applied DC voltage may be 0.1 to 5V, and by adjusting the size of the DC voltage, the polymerization rate of the polymer monomer may be controlled, and thus the length of the generated fine probe may be controlled.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

1 is a conceptual diagram of a method for manufacturing a fine probe according to an embodiment of the present invention.

Figure 2 is a flow chart of a method for manufacturing a fine probe according to an embodiment of the present invention.

3 is an aligned state diagram of the two electrode tips in FIG.

4 is an integrated state diagram of carbon nanotubes at two electrode tips of FIG. 3.

FIG. 5 is a state diagram in which a fine probe is manufactured at two electrode tips of FIG. 4.

6 is a state diagram in which a fine probe is manufactured at an electrode tip.

7 is an alignment diagram of an electrode tip and an AFM tip.

8 is a state diagram of an AFM tip having a high aspect ratio.

9 and 10 are aligned state diagrams of three electrode tips.

11 to 14 are manufacturing state diagrams of the fine probes manufactured while increasing the distance between the electrodes.

15 to 17 are manufacturing state diagrams of a pinol fine probe, aniline fine probe, and thiophene fine probe.

18 to 21 are state diagrams of producing a fine probe using a DC voltage.

<Description of the symbols for the main parts of the drawings>

1, 2, 21, 31, 32, 33, 41, 42: electrode

3, 13, 23, 43: solution for forming a fine probe

4, 44, 54, 64, 74: fine probe

5, 45: carbon nanotubes

Claims (30)

At least two electrodes are prepared in a solution for forming a fine probe, and a voltage is applied to the electrodes to induce electric field concentration between the sharp electrodes to form a fine probe at the end of the electrode. Preparing an electrode to align the at least two electrodes to be a body of the fine probe; A solution preparation step of preparing a solution for forming a fine probe in which one of the nanowires and the nanoparticles and the monomer are mixed; A solution supply step of supplying the solution for forming the fine probe between the prepared electrodes; And And a field concentration step of concentrating an electric field between tips corresponding to each other by applying a voltage between the electrodes. The method of claim 2, The electrode preparation step, The electrode is prepared as two first electrodes and a second electrode, The first electrode and the second electrode, The fine probe manufacturing method is arranged to face the pointed tip to form the shortest distance between the tip and the tip. The method of claim 2, The electrode preparation step, Prepare three or four electrodes, Wherein each tip of the electrodes is arranged in a triangle or a square. The method of claim 4, wherein The electrode preparation step, Fine probe manufacturing method for adjusting the distance between the electrodes in the state in which one of the nanowires and the nanoparticles are integrated. The method of claim 2, The electrode preparation step, Manufacturing an electrode having a pointed tip And aligning the tip through fine positioning. The method of claim 6, The electrode preparation step A method of manufacturing a fine probe using a tungsten wire to form a pointed tip by electrochemical etching. The method of claim 2, The electrode preparation step is to produce a fine probe perpendicular to the plane by aligning the pointed electrode to the electrode formed on the plane. The method of claim 2, The solution preparation step, Method for producing a fine probe comprising a monomer of a functional polymer that is electrochemically synthesized in the solution for forming a fine probe. The method of claim 9, The monomer of the functional polymer, A method of making a microprobe comprising one or more of pyrrole, aniline, acetylene, thiophene, isothiophene, phenylene, toludine, azine, asene, azulene, pyridine, and indole. The method of claim 2, The solution preparation step, A first mixing step of mixing one of the nanowires and nanoparticles in a solvent, And a second mixing step of mixing the monomer of the functional polymer in a solution in which one of the nanowires and nanoparticles is mixed. The method of claim 11, wherein  The first mixing step Method for producing a fine probe by adding one of the nanowires and nanoparticles by 0.01 to 10% by weight. The method of claim 12, The first mixing step is a fine probe manufacturing method of treating one of the surfactant and the ultrasonic wave to the solution. The method of claim 12, The first mixing step, Fine probe manufacturing method for adjusting the concentration of one of the nanowires and nanoparticles in the solution. The method of claim 12, The second mixing step, Method for producing a fine probe to add 0.1 to 5 mol (M) of the functional polymer monomer. The method of claim 12, The second mixing step is a fine probe manufacturing method of diluting or sonicating the functional polymer monomer in the solution in an organic solvent. The method of claim 12, The second mixing step is a fine probe manufacturing method for further mixing the doping solution. The method of claim 9, One of the nanowires and nanoparticles, A method of manufacturing a fine probe comprising one of carbon nanotubes (CNT), fullerenes (C60), gold nanoparticles, and silver nanoparticles. The method of claim 9, The fine probe forming solution is a fine probe manufacturing method comprising a catalyst. The method of claim 2, The solution supply step, Dropping the solution for forming the fine probe between the electrodes; And dipping the electrodes in the solution for forming the fine probe. The method of claim 20, The solution supply step, The method of manufacturing a fine probe further comprising the step of adding a monomer of the conductive polymer to the solution for forming a fine probe. The method of claim 2, The solution supply step is a fine probe manufacturing method for supplying at least two solutions for forming the fine probe according to the manufacturing step of the fine probe. The method of claim 2, The field concentration step of applying a fine probe of one of the alternating current and direct current to the electrodes. The method of claim 23, wherein The electric field concentration step, The method of manufacturing a fine probe to control the concentration of the electric field by applying different voltages to the electrodes. The method of claim 23, wherein The alternating voltage is a fine probe manufacturing method comprising a frequency range of 1kHz to 100MHz. The method of claim 23, wherein The direct current voltage has a fine probe manufacturing method comprising a range from 0.1 to 0.5V. The method of claim 23, wherein The electric field concentration step is a fine probe manufacturing method for adjusting the magnitude of the DC voltage. The method of claim 23, wherein The field concentration step is fine probe manufacturing method for increasing the distance between the electrodes. The method of claim 2, After the electric field concentration step, by removing the solution for forming the fine probe, The method of claim 1, further comprising a probe completion step of forming a fine probe by agglomerating the concentrated material while forming a meniscus on a material and a sharp tip concentrated between the first electrode and the second electrode. 30 is manufactured by the method of manufacturing a fine probe according to any one of claims 1 to 29, Microscopically applied to at least one of the tip of an atomic force microscope (AFM), the tip of a scanning microscope (STM), a bio probe, an electron emission source, an electron-emitting device, and a sensor for measuring physical properties inside a cell / biomaterial Probe.

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