KR20090100805A - Bellows device having duplex structure - Google Patents

Abstract

PURPOSE: A bellows device with a duplex structure is provided to reduce the number of complicated device design elements and facilitate device design by forming each part of the bellows pipe to be contracted and displaced in one direction. CONSTITUTION: A bellows device with a duplex structure is installed between a first member and a second member to be relatively moved to each other. The bellows device is contracted and displaced according to the relative movement of the first member and the second member. The bellows device with a duplex structure comprises a first member flange, a first bellows pipe, a second member flange, a second bellows pipe, and a connecting member. The first member flange(1) is fixed to and combined with the first member. The one end of the first bellows pipe(7) is connected to the first member flange. The second member flange(3) is fixed to and combined with the second members. The one end of the second bellows pipe(4) is connected to the second member flange. The connecting member(2) is positioned between the first bellows pipe and the second bellows pipe and is combined with the other end of the first bellows pipe and the second bellows pipe.

Description

Bellows device of double structure {BELLOWS DEVICE HAVING DUPLEX STRUCTURE}

The present invention relates to a bellows device installed between opposing first and second members which are relatively movable with respect to each other, and which is elastically displaced according to relative movement of the first and second members. The present invention relates to a bellows device having a dual structure in which a bellows pipe that is stretched and displaced according to the movement of the first member and the second member is divided into a portion that is responsible for the axial stretch and a portion that is responsible for the lateral stretch.

A bellows device is used as a mechanical element for tightly protecting a member therein while elastically connecting two members, a movable member and a movable member or a movable member and a fixed member. Typically, such a bellows device is composed of two flanges respectively coupled to two member sides, and an elastic bellows pipe provided between the two flanges.

The bellows pipe is made of various materials such as metal and resin. Among them, the metal bellows tube can be manufactured by welding a metal thin plate, and is mainly used where high temperature, high pressure, high corrosion resistance, high precision, and the like are required. In particular, metal bellows pipes are precision parts that require special seal reliability, and are widely used in a wide range of industries such as aerospace, semiconductor equipment, ultra-high vacuum equipment, radiation accelerators, measuring instruments, and mechanical seals. It is used.

1 to 3 show the configuration and operation of the conventional bellows device.

1 is a view illustrating a state in which a bellows device is attached and operated to a processing chamber that is a part of an LCD manufacturing equipment or a semiconductor manufacturing equipment, and is stretched together when the processing chamber is moved back and forth, left and right or up and down for processing of an object to be processed therein. At the same time as the expansion and contraction, the sealing atmosphere is maintained by blocking the vacuum atmosphere inside the processing chamber and the external vacuum chamber.

Fig. 2 shows an aspect of general stretch displacement of such a bellows device.

As shown, the bellows device comprises a first member side flange 1 connected to a first member (not shown), a second member side flange 3 connected to a second member (not shown) and a bellows pipe provided therebetween ( B) consists of. The bellows pipe (B), as shown in Figure 2a, in accordance with the movement of the first member side flange (1) or the second member side flange (3) which is moved in accordance with the movement of the first member or the second member, The shaft is displaced in the axial direction vertically connecting the first member and the second member, or is displaced in the inclined direction inclined with respect to the axis as shown in b) of FIG. It is displaced in the lateral direction perpendicular to the.

In summary, the expansion and contraction aspects of the bellows pipes can be expressed in terms of the expansion and contraction directions of all the bellows pipes in the axial direction, the lateral direction, and the axial direction and the lateral direction.

On the other hand, the conventional bellows pipe is designed to have an optimum fatigue strength according to the kind of stretching displacement acting as described above. When the bellows pipe is displaced only in a single direction in the axial direction or the lateral direction, since the number of design factors to be considered is relatively small, it is easy to design the characteristics such as the fatigue strength of the bellows pipe to meet the target value.

However, when the bellows pipe is moved with a compound telescopic displacement in which both the axial and the lateral telescopic displacements are mixed, both conflicting forces and the telescopic displacements must be taken into consideration, so that the bellows pipe must be considered to obtain the required characteristics. As the design factor increases, the design range of the bellows pipe is not only narrowed, but the bellows pipe has a tendency to drop rapidly in performance and life of the bellows pipe over a long period of repeated use compared to the bellows pipe with a single telescopic displacement.

Fig. 3 shows a modification of the metal bellows tube in the case where the expansion and contraction movement in the axial direction and the extension in the lateral direction act in combination.

As shown, the left portion of the bellows tube near the upper flange side is narrowed in the gaps or pitches of the sheet metal constituting the bellows pipes, and the gaps or pitches in the right portion are widened conversely, so that tension and compression are mutually relative to the central axis. The same phenomenon occurs in the opposite direction. In this case, especially in the case of narrow gaps, the thin metal on the left side is severely in contact with each other, which may cause wear. In addition, the same phenomenon occurs in the bellows pipe near the lower flange side of FIG. 3 (but the tension and compression directions are reversed), and the complex deformation of the bellows pipe causes wear and excessive fatigue of the bellows pipe, thereby causing the bellows to flow. This causes the tube to be destroyed, and therefore, the bellows pipe that is expanded and displaced in a complex manner has a problem of shortening the service life, that is, the service life, compared to the bellows pipe that is expanded and contracted in a single stretch.

The present invention is to solve the above problems of the conventional bellows device, the bellows pipe of the bellows device is divided into a portion responsible for the axial expansion and displacement, the portion responsible for the lateral expansion and displacement the bellows pipe is substantially unidirectional It is an object of the present invention to provide a bellows device having improved performance such as durability and lifespan while reducing device design factors to be considered.

In order to solve the above problems, the bellows device of the present invention,

In a bellows device provided between the opposite first member and the second member which is relatively movable with respect to each other, the bellows device is elastically displaced in accordance with the relative movement of the first member and the second member,

A first member side flange fixedly coupled to the first member,

A first bellows pipe having one end connected to the first member side flange,

A second member side flange fixedly coupled to the second member;

A second bellows pipe having one end connected to the second member side flange,

Located between the first bellows pipe and the second bellows pipe and comprises a connecting member coupled to the other end of the first bellows pipe and the second bellows pipe,

The first bellows pipe may be stretched in the axial direction in which the first member and the second member are vertically connected according to the relative movement of the first member and the second member, but in a plane perpendicular to the axial direction. The stretch displacement in the lateral direction that is stretched along the side is regulated,

The second bellows pipe is composed of a bellows device having a dual structure in which the expansion and contraction in the lateral direction is possible according to the relative movement of the first member and the second member. It features.

The bellows device of the dual structure of an embodiment of the present invention is disposed on the outer side of the second bellows pipe, and has a fixed shaft one end is fixedly coupled to the second member side flange, the other end is coupled to the connecting member, The other end of the fixed shaft is characterized in that the relative movement in the lateral direction with respect to the connection member is coupled but impossible to move in the axial direction.

In the bellows device of the dual structure of the embodiment, the coupling portion to which the other end of the fixed shaft of the connection member is coupled, a space in which the fixed shaft can move laterally is formed, and covers the space above and below the space of the coupling portion. The slide guide coupled to the fixed shaft to regulate the axial movement of the fixed shaft is coupled, the fixed shaft is characterized in that coupled to the connecting member through the space between the upper and lower slide guide and the coupling portion.

In the bellows device of the dual structure of the embodiment, the connecting member is formed in a disk shape, a fixed shaft engaging portion corresponding to the number of the fixed shaft is formed along the periphery of the disk, the coupling portion of the disk A concave portion curved concave toward the center direction is formed so that the fixed shaft is moved laterally in the concave portion.

In the bellows apparatus of the dual structure of the said embodiment, it is preferable that the distance between the said fixed shaft and the recessed inner peripheral surface is larger than the lateral maximum stretch displacement distance of the said 2nd bellows pipe | tube.

In the bellows device of the dual structure of the above embodiment, the fixed shafts are arranged in pairs at the front, rear, left, and right sides of the second bellows pipe. It is preferable that each pair is formed.

In addition, the bellows device of the present invention, when one of the connecting member or the first member side flange is moved laterally according to the relative movement of the first member and the second member, the connecting member or the first member side flange The other one of the members is characterized in that configured to move sideways together.

According to the present invention, the bellows pipe is manufactured in a double structure instead of a single structure, so that the lateral expansion and axial expansion displacements are handled in different zones, thereby preventing excessive deformation of the bellows pipe. As a result, the fatigue life can be reduced, resulting in a significant improvement in the service life and performance of the bellows pipe.

In addition, the bellows pipe is made of a portion responsible for the axial expansion and displacement, and a portion responsible for the lateral expansion and displacement, and the bellows pipe that is stretched and displaced in one direction is not stretched or displaced in the other direction. By constructing the part so that it is stretched substantially in only one direction, it is possible to simplify the device design by reducing the number of complex device design factors to be considered in complex displacement.

The double bellows device of the present invention is a bellows pipe of a bellows device provided between an opposing first member and a second member that is relatively movable with respect to each other. And a bellows pipe and a second bellows pipe, wherein the expansion and contraction direction of each bellows pipe is limited only to an axial direction connecting the first member and the second member vertically or to a lateral direction perpendicular to the axial direction. There is a characteristic. That is, the first bellows pipe can be stretched in the axial direction but limited in the lateral direction, and conversely, the second bellows pipe can be stretched in the lateral direction but in the axial direction. If configured to be limited, even when the axial and lateral expansion and contraction acts in combination, the respective bellows tubes share the expansion and displacement in each direction, so that each part of the entire bellows tube of the present invention is substantially Only the unidirectional stretching displacement can reduce the wear and fatigue of the bellows pipe as in the prior art and improve the service life.

In the present invention, the term 'relative movement between the first member and the second member' means that when one of the first member and the second member is fixed and the other member moves with respect to the fixed member, Of course, this includes both cases where the two members move simultaneously and approach and separate from each other. In addition, the movement direction of the first member and the second member is the axial direction, as well as the movement in the axial direction connecting each other vertically and the lateral direction moving along the plane perpendicular to the axial direction. It includes all movement in the inclined direction inclined with respect to the lateral direction. Even when the first member or the second member moves relative to the inclined direction, the axial movement and the lateral movement can be seen as a combination, and in this case, the inclined movement of the first member or the second member According to the force in each direction acting according to, the first bellows pipe and the second bellows pipe may be stretched and displaced in the axial direction and the lateral direction, respectively.

Restricting the expansion and contraction directions of the first bellows pipe and the second bellows pipe so as to expand and contract only in one direction can be achieved by a restricting mechanism as in the following embodiments.

Hereinafter, with reference to the accompanying drawings, it will be described in detail an embodiment of the present invention.

Fig. 4 is a schematic view showing a bellows device having a dual structure as an embodiment of the present invention, Fig. 5 is a detailed view of a connecting member engaging portion 2a which is a main part of the embodiment, and Figs. 6 and 7 are bellows of the embodiment. A diagram showing a lateral stretch displacement mode of the device, and FIG. 8 is a diagram showing an axial stretch displacement mode of the bellows device of the embodiment.

In Fig. 4, the first member side flange 1 located at the bottom end is fixedly coupled to the first member not shown at the bottom thereof, and the second member side flange 3 at the top end thereof is not shown in the second. It is fixedly coupled to the member. One end of the first bellows pipe 7 is connected to the first member side flange 1, and the other end is connected between the first member side flange 1 and the second member side flange 3. Is coupled to (2). In addition, one end of the second bellows pipe 4 is connected to the second member side flange 3, and the other end is coupled to the rear surface of the first bellows pipe 7 engaging surface of the connecting member 2. The first bellows pipe 7 and the second bellows pipe 4 are arranged successively in the axial direction connecting the first member and the second member vertically. In the present embodiment, the diameters of both bellows pipes are the same, but the diameters of the bellows pipes may be different depending on the size of the parts sealed in the bellows pipes, the arrangement relationship thereof, and the like.

Outside the second bellows pipe 4, the second bellows pipe has a fixed shaft 5 having one end fixedly coupled to the second member side flange 3 and the other end coupled to the connection member 2. It is installed side by side with (4). The other end of the fixed shaft (5) is coupled relative to the connecting member (2) in the lateral direction but impossible to move in the axial direction, thereby axial expansion and displacement restriction mechanism of the second bellows pipe (4) To form. For example, when a space in which the fixed shaft 5 is laterally moved is formed at the coupling portion at which the other end of the fixed shaft 5 of the connecting member 2 is coupled, the flange 2 of the second member side is formed. The fixedly coupled fixed shaft 5 may be moved laterally according to the lateral movement of the second member side flange 3. However, when the slide guide 6 is coupled to the fixed shaft 5 to cover the space above and below the coupling portion space of the connecting member 2 to regulate the axial movement of the fixed shaft 5, the fixed shaft The axial movement of (5) becomes impossible. That is, the fixed shaft 5 coupled to the connecting member 2 through the slide guide 6 above and below the connecting member coupling part 2a and the coupling part 2a is connected to the connecting member 2. Since it can move in the formed space, it is possible to move relative to each other with respect to the connecting member 2 laterally, but because of the slide guide 6 it is impossible to move in the axial direction. Therefore, since the distance between the second member side flange 3 and the connecting member 2 is always kept constant by the distance of the fixed shaft 5 therebetween, the second member side flange 3 and the connecting member 2 are kept constant. The axial expansion and contraction displacement of the 2nd bellows pipe 4 provided between them also becomes impossible. That is, the second member side flange (3), the fixed shaft (5) fixedly coupled to the flange, the slide guide (6) and the connecting member (2) coupled to the fixed shaft (5) are all in one mass. An axial stretch displacement limiting mechanism of the second bellows pipe 4 is formed.

On the other hand, the second member side flange (3), the fixed shaft (5) fixedly coupled to the flange and the slide guide (6) coupled to the fixed shaft (5) are integrated into the space of the connecting member (2) In the side can be moved relative to the connecting member (2). Of course, the connecting member 2 can also move laterally with respect to the unitary configuration. Between the slide guide 6 and the fixed shaft coupling portion (2a) of the connecting member 2 by placing a clearance of a predetermined interval or by injecting lubricating oil, the relative movement between the unitary configuration and the connecting member (2) It can be done smoothly.

In order to keep the distance between the second member side flange 3 and the connecting member 2 constant, at least one fixed shaft 5 is required, and in this embodiment, the fixed shaft 5 has a second bellows. A total of two pairs of one pair each are arranged on the front, rear, left, and right sides of the tube 4.

The connecting member 2 is formed in a disk shape, and a fixed shaft coupling portion 2a corresponding to the number of the fixed shafts 5 protrudes along the circumference of the disk. 4 is a plan view of the connecting member 2. In this embodiment, two pairs of fixed shaft coupling portions 2a are arranged on the front, rear, left, and right sides of the disc corresponding to the number of the fixed shafts 5.

In addition, in the present embodiment, as the space in which the fixed shaft 5 can move in the fixed shaft engaging portion 2a, a concave portion M having a concave curved shape toward the center of the disc is formed. As shown in Fig. 5, when the bellows device is in the stationary state, the fixed shaft 5 is located at the center of the recess M, but the second member side flange 3 moves laterally, for example. In this case, the fixed shaft 5 is moved left and right toward the inner circumferential surface or the outer side of the recess (M). The distance between the fixed shaft 5 and the inner peripheral surface of the recess M corresponds to the maximum movable stroke of the fixed shaft 5. The lateral maximum stretch displacement distance of the second bellows tube 4 cannot be greater than the maximum movable stroke. When the fixed shaft 5 moves and collides with the inner circumferential surface of the concave portion M, noise is generated and damage to the bellows device is generated. Thus, the maximum width in the lateral direction of the second bellows pipe 4 is increased. The stretching displacement distance is set smaller than the distance between the fixed shaft 5 and the inner peripheral surface of the recess M. On the device design, the lateral maximum stretch displacement distance of the second bellows pipe 4 is set such that the fixed shaft 5 stops immediately before the inner circumferential surface of the recess M. As shown in FIG.

The present invention further includes a restricting mechanism that permits the axial expansion and contraction of the first bellows pipe 7 while restricting the expansion and contraction in the lateral direction.

For example, when one of the connecting member 2 or the first member side flange 1 moves laterally according to the relative movement of the first member and the second member, the connecting member 2 is moved. ) Or when the other member of the first member side flange (1) is configured to move sideways together, the first member side flange (1), the connecting member (2) and the first member side flange (1) Since the first bellows pipe 7 disposed between the members 2 is moved in a lump in a lateral direction, the expansion and contraction of the first bellows pipe 7 in the lateral direction is restricted. The lateral expansion and displacement restriction mechanism of the first bellows pipe 7 can be configured by using the difference in rigidity between the first bellows pipe 7 and the second bellows pipe 4 as shown in FIGS. 4 to 8. 9 and 17, a predetermined mechanical device may be added and configured.

In the case of the embodiment of FIG. 4, the lateral deformation stiffness, which exhibits resistance to lateral deformation of the first bellows pipe 7, is set much larger than the lateral deformation stiffness of the second bellows pipe 4. Here, as the first member side flange 1 or the second member side flange 3 is moved laterally by the relative movement between the first member and the second member, the rigidity difference between the two bellows pipes, When the lateral force is applied to the first bellows pipe 7 and the second bellows pipe 4, and the second bellows pipe 4 is stretched laterally by the lateral force, When the lateral expansion and displacement of the one bellows pipe 7 is set to a large stiffness difference that hardly occurs, the lateral expansion and displacement restriction of the first bellows pipe 7 can be achieved. For easy understanding, assuming that the first bellows pipe 7 is a spring made of iron and the second bellows pipe 4 is a rubber band, the first bellows pipe 7 and the second bellows pipe 4 When the lateral force is simultaneously applied, the rubber side is elongated in the lateral direction while the steel spring hardly extends. Of course, the steel spring can be increased by applying a large force such that the steel spring is extended in the lateral direction, the lateral deformation force assumed in the present invention is that the elastic, that is, the second bellows pipe (4) can be extended laterally As the accuracy, even when the second bellows pipe 4 is stretched to the maximum in the lateral direction, the steel spring, that is, the first bellows pipe 7 is in the magnitude range of the force which hardly extends in the lateral direction. A large force, such as, is a matter of the present invention.

The lateral deformation stiffness of the bellows pipe can be adjusted to have the above stiffness difference by appropriately changing various factors such as changing the material of both bellows pipes or changing the design specifications thereof.

The lateral stretch displacement aspect of this embodiment is shown in FIGS. 6 and 7. Considering the case where the first member and the first member side flange 1 are fixed and the second member and the second member side flange 3 move, as shown in FIG. 6, the second member side flange As (3) moves to the left, the second bellows pipe 4 is extended and displaced in the left side direction. At this time, the fixed shaft 5 fixedly coupled to the second member side flange 3 and the slide guide 6 coupled to the fixed shaft 5 are also laterally moved. As shown in the plan view of the connecting member 2 below in FIG. 6, in this case, the fixed shaft 5 is moved to the left in the recess M of the fixed shaft engaging portion 2a. Of the four recesses M in total, except for the recesses M on the left side, the fixed shaft 5 moves up to just before reaching the inner circumferential surface of the recesses M, except for the recesses M on the left and right sides. To stop. The lateral displacement distance of the 2nd bellows pipe 4 at this time becomes a maximum displacement distance to the left side direction.

On the other hand, since the first bellows pipe 7 has much greater resistance to lateral deformation, that is, the lateral deformation stiffness than the second bellows pipe 4, despite the lateral displacement of the second bellows pipe 4, The first bellows tube 7 is hardly displaced laterally.

In FIG. 7, it is disclosed that the second bellows pipe 4 is elongated and displaced to the right as the second member side flange 3 moves to the right. In this case, in the concave portion M formed in the coupling portion 2a on the upper and lower sides and the left side of the connecting member 2, the fixed shaft 5 is disposed just before the inner circumferential surface of the concave portion M. It moves, and the lateral displacement distance of the 2nd bellows pipe 4 at this time becomes a maximum displacement distance to the right side direction. In this case, too, the first bellows pipe 7 is hardly displaced laterally.

In the embodiment of Figs. 6 and 7, it is assumed that the first member and the first member side flange 1 are fixed, and the second member and the second member side flange 3 move left and right. Assuming that the first member and the first member side flange 1 move left and right, and the second member and the second member side flange 3 are fixed, the lateral displacement aspect of the bellows device is almost the same. . That is, when the first member side flange 1 moves laterally according to the lateral movement of the first member, the first bellows pipe 7 and the connecting member 2 connected thereto move together in the lateral direction. Since the first bellows pipe 7 is set to have a lateral rigidity that is hardly displaced laterally with a lateral force applied to the bellows device, the first member side flange 1 In spite of the lateral movement of), it hardly stretches laterally. Accordingly, when the first member side flange 1 and the first bellows pipe 7 move laterally, the connecting member 2 connected to the first bellows pipe 7 also has to move together. In addition, when the connecting member 2 is moved laterally, the second bellows tube 4 having a much lower lateral deformation rigidity is laterally displaced, so that the shape is almost the same as that of the deformation patterns of FIGS. 6 and 7. To displace. At this time, the connecting member 2 moves laterally until the inner peripheral surface of the concave portion M of the connecting member 2 touches the fixed shaft 5, and at this time, the second bellows pipe 4 The point where the lateral displacement becomes the maximum displacement is the same as in the example of FIGS. 6 and 7.

6 and 7, the expansion and displacement mechanism in the lateral direction, as well as the displacement in the left and right directions perpendicular to the axial direction, as well as the front and rear directions perpendicular to the axial direction (that is, the direction entering and exiting the ground) 6, 7 and 7), the same applies to the displacement to the up and down direction based on the top view of the connecting member 2 shown in FIGS. That is, the displacement in the lateral direction as used in the present invention is a concept including all the movement on the plane perpendicular to the axial direction. For example, a pair of fixed shaft coupling portions 2a symmetrical with respect to the center of the disk are formed between the upper, lower, left, and right sides of the disk-shaped connecting member 2 shown in the plan view of FIG. 6, and the fixed shaft 5 ) Is also formed in a pair corresponding to the coupling portion, the connecting member 2 and the fixed shaft 5 can be moved relative to each other in the radial direction of the disk between the upper, lower, left and right.

8, the axial expansion-displacement aspect of this embodiment is shown. The second member and the second member side flange 3 are fixed, and the first member and the first member side flange 1 are approached toward the second member side (in the case of FIG. 8 (a)) or therefrom. In the case of being separated (in the case of FIG. 8 (b)), the second bellows pipe 4 includes the second member side flange 3, the fixed shaft 5, the slide guide 6, and the connecting member 2. It is not displaced by the action of the axial expansion / displacement regulating mechanism which is constituted, and therefore the axial length of the second bellows pipe 4 is always constant. On the other hand, as the first member side flange 1 moves up and down, the first bellows pipe 7 is extended and compressed in the axial direction.

As for the axial telescopic displacement mechanism and the lateral telescopic displacement mechanism of the first bellows pipe 7 and the second bellows pipe 4, as described above, either one of the first member and the second member is fixed and the other In the case of lateral movement, of course, both members move in the axial direction or the lateral direction, but the movement direction or distance thereof is relatively different, so that both members are relatively close to each other. That is, the axial expansion and contraction mechanism and the lateral expansion and displacement mechanism are applied both when the 'first member and the second member relative movement'.

Meanwhile, in the above embodiment, the pair of fixed shafts 5 are formed at positions corresponding to the top, bottom, left, and right sides of the connecting member 2, but they are not necessarily formed in pairs. It may be appropriately determined in consideration of the shape of the space formed in the fixed shaft coupling portion (2a) of the connecting member (2). For example, when the space of the fixed shaft coupling portion 2a is not in the form of a concave recessed portion M as shown in the figure, but in a circular shape surrounded by the fixed shaft coupling portion 2a, The fixed shaft 5 may be positioned at the center of the circle, and the fixed shaft 5 may be reciprocated in the radial direction of the circle. In this case, only one fixed shaft 5 is sufficient to maintain the gap between the second member side flange 3 and the connecting member 2. However, even in such a case, the fixed shaft 5 is maintained in a stable manner and the connecting member 2 and the fixed shaft 5 can be stably moved in the lateral direction on a plane perpendicular to the axial direction. And it is preferable to form the connection member coupling portion (2a) in pairs.

In the above embodiment, the side of the first bellows pipe 7 is configured by the rigidity of the first bellows pipe 7 so that the first member side flange 1 and the connecting member 2 move sideways. Although the directional stretching displacement is regulated, a predetermined mechanical device can be added to regulate the lateral stretching displacement of the first bellows pipe 7. That is, axially disposed between the connecting member 2 and the first member side flange 1, one end or both ends of at least one of the connecting member 2 and the first member side flange 1. It extends further in the axial direction through the member, is installed so as to be movable relative to each other in the axial direction with the at least one member, and is installed to be movable together laterally in accordance with the movement in the lateral direction of the at least one member. By providing a shaft member to be used, the displacement aspect of the first bellows pipe 7 can be regulated.

Such lateral expansion and displacement restricting mechanisms include, for example, embodiments as disclosed in FIGS. 9 to 17. Also in these embodiments, the axial displacement restricting mechanism of the second bellows pipe 4 is the same as the embodiment of Figs. 4 to 8, except that the lateral displacement restricting mechanism of the first bellows pipe 7 is different. Therefore, in each embodiment, common components are denoted by the same reference numerals, and redundant description thereof will be omitted. 9 to 17, the second member and the second member side flange 3 are fixed, and the first member and the first member side flange 1 are laterally oriented. Or assume that it is moved in the axial direction.

In the embodiment shown in FIG. 9, the first bellows pipe 7 and the second bellows pipe penetrate through portions of the connecting member 2 in the inner center of the first bellows pipe 7 and the second bellows pipe 4. A connecting member bushing tube 2-1 having a smaller diameter than (4) is provided. Further, a flange bushing tube 1-1 having a diameter smaller than that of the first bellows tube 7 penetrates through the first member side flange 1 directly below the connecting member bushing tube 2. It is installed. In this embodiment, the shaft member is formed to extend through the flange bushing tube (1-1) and the connecting member bushing tube (2-1), both ends of the shaft further extending toward the first and second members, respectively It consists of (S).

Lubricant is interposed or a predetermined clearance is formed between the shaft S, the flange bushing tube 1-1, and the connecting member bushing tube 2-1 so that the shaft S and each bushing tube are formed. Are able to move relative to each other in the axial direction. In addition, the shaft (S) is installed vertically between the connecting member 2 and the first member side flange (1), of course, both ends thereof are extended long toward the first member and the second member, respectively. It is installed to be movable in the lateral direction.

10 shows a lateral stretch displacement embodiment of this embodiment with a shaft S. FIG.

As shown, when the first member side flange 1 moves laterally, the shaft S is caught by the flange and the shaft S moves laterally, so that the shaft S moves the connecting member 2. The connecting member 2 is also moved laterally by pushing laterally. As a result, by the shaft S, the first member side flange 1 and the connecting member 2 always move together in the left and right lateral directions, and thus the lateral direction of the first bellows pipe 7. The stretching displacement is completely limited. At this time, the second bellows pipe 4 connected to the connecting member 2 is displaced laterally in accordance with the movement of the first member side flange 1-shaft S-connecting member 2. The effect of the invention is achieved. In the present embodiment, since the displacement of the first bellows pipe 7 in the lateral direction is restricted by the mechanical device, it is not necessary to consider the lateral deformation stiffness difference from the second bellows pipe 4.

On the other hand, the extension length of the shaft S toward the second member should be formed so as not to interfere with the lateral movement of the second member side flange 3. For example, the shaft (S) is formed to extend to a length of at least penetrating the connecting member 2 past the first member side flange (1), as long as it extends until it reaches the second member side flange (3), Simultaneous movement in the lateral direction of the first member side flange 1 and the connecting member 2 can be achieved. However, in the case where the shaft S extends through the second member side flange 3 for a more stable operation, as shown in FIGS. 9 to 11, the second member side flange 3 is formed. It is necessary to form the through hole 3-1 in the hole, and the diameter of the through hole 3-1 is larger than the maximum stroke in the lateral direction of the shaft S. By this configuration, even if the second member side flange 3 is moved laterally, it is possible to stably move sideways without being disturbed by the shaft S.

FIG. 11 shows an axial stretch displacement embodiment of the embodiment with the shaft S. FIG.

When the first member and the first member side flange 1 are compressed in the axial direction (Fig. 11 (a)) and extended (Fig. 11 (b)), the first member side flange 1 is connected to the connecting member ( Approaching and spaced apart in the axial direction with respect to 2), the first bellows pipe 7 is stretched in the axial direction. At this time, the second bellows pipe 4 is a shaft formed by the axial expansion and contraction displacement regulating mechanism composed of the second member side flange 3, the fixed shaft 5, the slide guide 6, and the connecting member 2. Stretch displacement in the direction is completely limited.

Accordingly, each bellows pipe is displaced only in one of the axial direction and the lateral direction, and not displaced in the other direction, thereby achieving the effect of the present invention.

In the embodiment shown in FIG. 12, the shaft member includes a flange portion 8-1 fixedly coupled to the first member side engaging surface of the first member side flange 1, and a first member side flange 1. Shaft shaft 8, which is formed through shaft member 8-1 extending through the coupling member bushing tube 2-1 installed in the connecting member 2 and extending further toward the second member.

In addition, in this embodiment, the connection member bushing tube 2-1 is formed on the connection member 2 is the same as the embodiment of FIG.

Since the flange portion 8-1 and the first member side flange 1 of the shaft flange 8 are fixedly coupled, the shaft flange 8 and the first member side flange 1 are moved together.

Lubricant is interposed between the shaft portion 8-1 and the connecting member bushing tube 2-1, or a predetermined clearance is formed, such that the shaft portion 8-1 and the connecting member bushing tube ( 2-1) is able to move relative to each other in the axial direction. In addition, the shaft portion 8-1 is not only disposed vertically between the connecting member 2 and the first member side flange 1, but also extending long toward the second member and extending laterally. It is installed to be movable.

FIG. 13 shows a lateral stretch displacement embodiment of the embodiment with a shaft flange 8.

As shown, when the first member side flange 1 is moved laterally, the shaft flange 8 is moved laterally, so that the shaft portion 8-1 is connected to the connecting member 2. Pushing laterally, the connecting member 2 is also moved laterally. As a result, by the shaft portion 8-1, the first member side flange 1 and the connecting member 2 always move together in the left and right lateral directions, and thus the first bellows pipe 7 The lateral stretching displacement of is completely limited. At this time, as the first member side flange 1-shaft flange 8-connecting member 2 moves, the second bellows pipe 4 connected to the connecting member 2 is laterally displaced. The effect of the present invention is achieved.

On the other hand, the extension length of the shaft toward the second member must also be formed so as not to interfere with the lateral movement of the second member side flange 3. Accordingly, in FIG. 13, the shaft portion 8-1 extends to a length that passes through the first member side flange 1 to at least penetrate the connecting member 2, and the second member side flange 3 is formed. It extends only until it reaches.

FIG. 14 shows an axial stretch displacement embodiment of an embodiment with a shaft flange 8.

When the first member and the first member side flange 1 are compressed in the axial direction (Fig. 14 (a)) and extended (Fig. 14 (b)), the first member side flange 1 is connected to the connecting member ( Approaching and spaced apart in the axial direction with respect to 2), the first bellows pipe 7 is stretched in the axial direction. At this time, the 2nd bellows pipe | tube 4 is a shaft by the axial expansion-and-displacement restriction mechanism comprised from the 2nd member side flange 3-the fixed shaft 5-the slide guide 6, and the connection member 2. Stretch displacement in the direction is completely limited.

Accordingly, each bellows pipe is displaced only in one of the axial direction and the lateral direction, and not displaced in the other direction, thereby achieving the effect of the present invention.

In the embodiment shown in FIG. 15, the shaft member has one end fixedly coupled to a portion of the connecting member 2 outside the first bellows tube 7, and the other end of the shaft member has a first outside the first bellows tube 7. It is an external fixed shaft 9 which extends further to the said 1st member through the flange bushing pipe 1-2 installed through the member side flange 1 part.

In the present embodiment, unlike the embodiment of Figs. 9 and 12, the shaft member is disposed outside the bellows pipe. Since one end of the external fixed shaft 9 is fixedly coupled to the connection member 2, the external fixed shaft 9 is moved together with the connection member 2.

Lubricant is interposed between the external fixed shaft 9 and the flange bushing tube 1-2 or a predetermined clearance is formed, so that the external fixed shaft 9 and the flange bushing tube 1-2 are It is possible to move relative to each other in the axial direction. In addition, the outer fixed shaft 9 is installed between the connecting member 2 and the first member side flange 1 vertically, as well as the other end is extended long toward the first member, the lateral direction It is installed to be movable to.

In the schematic view of the upper part of FIG. 15 for convenience of illustration, one external fixed shaft 9 is shown, but as shown in the plan view of the connecting member 2 in the lower part of FIG. One or more external fixed shafts 9 can be formed between 2a), preferably arranged symmetrically with respect to the center of the disc of the connecting member 2. Correspondingly, the connection member 2 may also have the same number of external fixed shaft coupling portions 2b as the number of external fixed shafts 9.

16 shows a lateral stretching displacement embodiment of this embodiment with an external fixed shaft 9.

As shown, when the first member side flange 1 moves laterally, the inner circumference of the flange bushing tube 3-2 provided with the outer fixed shaft 9 penetrating the first member side flange 1. They are pushed together and laterally moved, so that the connecting member 2 fixedly coupled to the outer fixed shaft 9 is laterally moved. As a result, by the outer fixed shaft 9, the first member side flange 1 and the connecting member 2 are always moved together in the left and right lateral directions, and thus the first bellows pipe 7 Lateral stretching displacement is completely limited. At this time, the second bellows pipe 4 connected to the connecting member 2 is laterally displaced in accordance with the movement of the first member side flange 1-the outer fixed shaft 9-the connecting member 2. This achieves the effect of the present invention.

FIG. 17 shows an axial stretching displacement embodiment of an embodiment with an external fixed shaft 9.

When the first member and the first member side flange 1 are compressed in the axial direction (Fig. 17 (a)) and extended (Fig. 17 (b)), the first member side flange 1 is connected to the connecting member ( Approaching and spaced apart in the axial direction with respect to 2), the first bellows pipe 7 is stretched in the axial direction. At this time, the 2nd bellows pipe | tube 4 is a shaft by the axial expansion-and-displacement restriction mechanism comprised from the 2nd member side flange 3-the fixed shaft 5-the slide guide 6, and the connection member 2. Stretch displacement in the direction is completely limited.

Accordingly, each bellows pipe is displaced only in one of the axial direction and the lateral direction, and not displaced in the other direction, thereby achieving the effect of the present invention.

On the other hand, the external fixed shaft (9) extends toward the first member through the first member side flange (1), although not shown, the external fixed shaft (9) is also inserted into the first member in the axial direction A tubular member is provided so that the first member can move relative to the external fixed shaft 9 in the axial direction.

For convenience of explanation, in the embodiments of FIGS. 9 to 17, the second member is fixed and only the first member is moved. However, as described above, the axial stretching displacement mechanism of the embodiment and The lateral stretch displacement mechanism is also applied to the case where both members move in the axial direction or the lateral direction but their moving directions or distances are relatively different, so that both members approach and space apart from each other. That is, the axial expansion and displacement mechanism and the lateral expansion and displacement mechanism are applied both when the 'first member and the second member relative movement'.

In addition, the present invention is not limited to the configuration described in the above embodiments, and may be modified in various ways without departing from the spirit of the appended claims. In addition, the present invention can be applied to all bellows pipe products in which the composite stretching displacement in two directions is applied regardless of the type and material of the bellows pipe.

1 is a view showing an example of use of a conventional bellows device.

2 is a view showing a general displacement mode of the bellows device.

3 is a view showing a displacement mode of the bellows device when subjected to a compound displacement.

4 is a schematic diagram of a dual structure bellows device according to an embodiment of the present invention.

Fig. 5 is a diagram showing the main parts of the embodiment.

Fig. 6 and Fig. 7 are schematic views showing the displacement mode in the left side direction and the displacement side in the right side direction, respectively, of the bellows device of the embodiment.

Fig. 8 is a schematic diagram showing an expansion and contraction embodiment in the axial direction of the bellows device of the embodiment.

9 is a schematic view showing the configuration of a bellows device according to another embodiment of the present invention.

Fig. 10 is a schematic diagram showing a displacement aspect in left and right lateral directions of the bellows device of the embodiment.

Fig. 11 is a schematic diagram showing a stretch displacement mode in the axial direction of the bellows device of the embodiment.

12 is a schematic view showing the configuration of a bellows device according to still another embodiment of the present invention.

Fig. 13 is a schematic diagram showing a displacement aspect in left and right lateral directions of the bellows device of the embodiment.

Fig. 14 shows an expansion-displacement aspect in the axial direction of the bellows device of the embodiment;

I am schematic.

Fig. 15 is a schematic diagram showing the configuration of a bellows device according to still another embodiment of the present invention.

Fig. 17 is a schematic view showing a displacement mode in left and right lateral directions of the bellows device of the embodiment.

Fig. 18 is a schematic diagram showing an expansion and contraction embodiment in the axial direction of the bellows device of the embodiment.

<Explanation of symbols for the main parts of the drawings>

One… First member side flange 2... Connecting member

2a... Fixed shaft coupling portion M.. Recess

3... Second member side flange 4.. 2nd bellows pipe

5... Fixed shaft 6.. Slide guide

7... 1st bellows pipe 1-1... Flanged bushing tube

1-2... Flange bushing tube 2-1. Connecting member bushing pipe

S… Shaft 3-1... Through hole

8… Shaft flange 8-1... Flange

8-2... . Shaft portion 9.. External fixed shaft

2b... External fixed shaft coupling

Claims (12)

In a bellows device provided between the opposite first member and the second member which is relatively movable with respect to each other, the bellows device is elastically displaced in accordance with the relative movement of the first member and the second member, A first member side flange fixedly coupled to the first member, A first bellows pipe having one end connected to the first member side flange, A second member side flange fixedly coupled to the second member; A second bellows pipe having one end connected to the second member side flange, Located between the first bellows pipe and the second bellows pipe and comprises a connecting member coupled to the other end of the first bellows pipe and the second bellows pipe, The first bellows pipe may be stretched in the axial direction in which the first member and the second member are vertically connected according to the relative movement of the first member and the second member, but in a plane perpendicular to the axial direction. The stretch displacement in the lateral direction that is stretched along the side is regulated, The second bellows pipe is a bellows device having a double structure, characterized in that the elastic displacement in the lateral direction is possible according to the relative movement of the first member and the second member. . The method of claim 1, A fixed shaft having one end fixedly coupled to the second member side flange and the other end coupled to the connection member at an outer side of the second bellows pipe, The other end of the fixed shaft is a bellows device of the dual structure characterized in that the relative movement in the lateral direction with respect to the connecting member is coupled but impossible to move in the axial direction. The method of claim 2, In the coupling portion to which the other end of the fixed shaft of the connection member is coupled, a space is formed in which the fixed shaft can move laterally, and the upper and lower spaces of the coupling portion cover the space and are coupled to the fixed shaft to move in the axial direction. A slide guide for regulating the combination is coupled, the fixed shaft is a bellows device having a dual structure characterized in that coupled to the connecting member penetrates the space between the upper and lower slide guide and the engaging portion. The method of claim 3, The connecting member is formed in a disk shape, a fixed shaft coupling portion corresponding to the number of the fixed shaft is formed along the circumference of the disk, the coupling portion is formed in the concave curved concave toward the center direction of the disk And the fixed shaft is laterally moved within the recess. The method of claim 4, wherein And the distance between the fixed shaft and the recessed inner circumferential surface is larger than the lateral maximum stretching displacement distance of the second bellows pipe. The method of claim 5, The fixed shafts are arranged in pairs in front, rear, left and right of the second bellows pipe, Correspondingly, the fixed-shaft coupling portion of the connecting member also has a double structure bellows device, characterized in that formed in each pair of front and rear and left and right of the disk-shaped connecting member. The method according to any one of claims 1 to 6, When one of the connecting member or the first member side flange moves laterally according to the relative movement of the first member and the second member, the other member of the connecting member or the first member side flange moves laterally. A double bellows device, characterized in that configured to move together. The method of claim 7, wherein The lateral deformation stiffness indicating resistance to lateral deformation of the first bellows pipe is greater than the lateral deformation stiffness of the second bellows pipe, The stiffness difference between the first bellows pipe and the second bellows pipe may be changed by moving the first member side flange or the second member side flange laterally by the relative movement of the first member and the second member. When a lateral force is applied to the first bellows pipe and the second bellows pipe, and the second bellows pipe is stretched laterally by this lateral force, the lateral stretch of the first bellows pipe hardly occurs. A double bellows device, characterized in that it has a difference in lateral deformation rigidity. The method of claim 7, wherein Axially disposed between the connecting member and the first member side flange, one end or both ends of which extend further through the at least one member of the connecting member and the first member side flange, and further extend in the axial direction; A bellows device having a dual structure with a shaft member which is installed to be movable relative to each other in the axial direction and the member of the at least one member, and is installed to be movable together laterally in accordance with the lateral movement of the at least one member. The method of claim 9, A connecting member bushing tube installed through the connecting member portion in the inner center of the first bellows pipe and the second bellows pipe and having a diameter smaller than that of the first bellows pipe and the second bellows pipe, and directly below the connecting member bushing pipe; A flange bushing tube installed through the flange portion of the first member side of the crankcase and having a diameter smaller than that of the first bellows tube; The shaft member is a bellows device having a dual structure, characterized in that the shaft extending through the flange bushing tube and the connecting member bushing tube, both ends are further extended toward the first and second members, respectively. The method of claim 9, A connecting member bushing tube installed through the connecting member portion in the inner center of the first bellows tube and the second bellows tube and having a diameter smaller than that of the first bellows tube and the second bellows tube; The shaft member extends through a flange portion fixedly coupled to a first member side engaging surface of the first member side flange, and a first member side flange portion directly under the connecting member bushing tube and connected to the connecting member. A double bellows device, characterized in that the shaft flange consisting of a shaft portion extending further through the bushing tube toward the second member. The method of claim 9, A flange bushing tube provided through the first member side flange portion outside the first bellows tube; The shaft member, one end is fixed to the connecting member portion outside the first bellows pipe, the other end is a double structure bellows characterized in that the outer fixed shaft extending through the flange bushing tube toward the first member Device.

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