KR20090091393A - Mems ultrasonic transducer and obesity curing apparatus having the same - Google Patents

Abstract

An MEMS ultrasonic transducer and an obesity curing apparatus having the same are provided, which focus ultrasonic wave generated in the piezoelectric element. A manufacturing process of the condenser lens array of the MEMS ultrasonic transducer comprises: a process of depositing the pattern substance on the silicon wafer(22a); a coating process of depositing the PR(photo-resistor) on the pattern substance in the fixed thickness; and a development process which forms the PR pattern by selectively melting the photosensitized part among the PR layer after performing exposure process.

Description

MEMS Ultrasonic Transducer and Obesity Curing Apparatus having the same}

The present invention relates to an obesity treatment apparatus using ultrasound, and more particularly, to an ultrasound transducer manufactured based on MEMS and an obesity treatment apparatus having the same.

In general, the ultrasonic wave has been applied to various applications such as an ultrasonic diagnostic device for diagnosing a disease of a human body, an ultrasonic detector using an ultrasonic wave, an acupuncture therapy using an ultrasonic wave, and an ultrasonic processing device for mechanical micromachining.

In addition, the ultrasonic wave is an inaudible vibration sound wave generated by the piezoelectric effect, the vibration frequency is 17000 ~ 20000Hz or more, can be irradiated directly to the human body non-invasive for the purpose of treating human disease, using the thermal effect and / or mechanical effect It is used for the purpose of treatment of pain, treatment of bone and massage.

The ultrasonic treatment apparatus using the ultrasonic wave includes an ultrasonic wave generator for generating the ultrasonic wave, a high frequency oscillator for generating the high frequency current to input a high frequency current to the ultrasonic wave generator, and a control unit for controlling the high frequency oscillator. It is common to be configured.

The ultrasound therapy device may be used for the purpose of abdominal obesity treatment or joint treatment, but due to the instability of ultrasound therapy, an ultrasound therapy device is developed in combination with a low frequency or a heat generator.

However, in the ultrasound therapy apparatus for the purpose of the above-mentioned abdominal obesity treatment or fracture treatment, the ultrasonic wave is directly irradiated to the human body from the ultrasonic generator 1 as shown in FIG. Although at a low level, it diffuses at a predetermined radial angle.

Therefore, there is a problem that the ultrasonic wave emitted from the ultrasonic generator is not delivered to the treatment site at the intensity required for treatment. In addition, when ultrasound of the intensity required for treatment is delivered to the treatment target area, it affects a wide range of other areas of the human body, ie, other human tissues through which ultrasound passes, until the ultrasound reaches the treatment site. Instability, including the risk of developing unwanted sequelae, pain, or discomfort.

In other words, when the area to be treated by the ultrasound is a muscle part, the epidermal layer, the dermal layer and the subcutaneous fat layer located on the path of the ultrasound may be exposed to the ultrasound to cause unwanted discomfort, pain or sequelae.

Accordingly, in order to treat obesity by focusing the ultrasonic wave generated by the piezoelectric element at a certain focus, for example, the fat layer, the present inventors have intensive treatment of a specific site even with the small ultrasonic power intensity generated by the piezoelectric element. For example, it is possible to minimize the effect of ultrasonic waves on other areas, and to develop a compact and mass-produced focused ultrasound transducer through precise and fine processing according to a desired focal length.

An object of the present invention is to provide a focused MEMS ultrasound transducer having a lens array manufactured by using a semiconductor manufacturing process to focus ultrasound waves generated in a piezoelectric element to form an ultrasound focus, and an obesity treatment apparatus having the same.

Another object of the present invention is to provide a focused MEMS ultrasonic transducer capable of mass production and small production.

In order to solve the above object, the present invention is a piezoelectric element for generating ultrasonic waves; In addition, in order to focus the ultrasonic waves generated by the piezoelectric element, the MEMS ultrasonic waves of the ultrasonic obesity treatment apparatus including a focused lens array having a fine pattern formed on the front surface using a semiconductor manufacturing process based on MEMS. Transducer (MEMS Ultrasonic Tansducer) is provided.

The fine pattern is; At least one lens of a concave curved shape formed on a silicon wafer (silicon wafer) for the concentration of the ultrasonic wave is configured.

The piezoelectric element is provided on the rear surface of the focusing lens array as a piezoletric element.

In addition, the piezoelectric element and the focusing lens array may be integrally coupled to the main body unit of the ultrasonic obesity treatment device by forming a module.

In another aspect, the present invention is to provide a focused lens array having a fine pattern formed on the front surface by using a semiconductor manufacturing process in order to focus the piezoelectric elements generating ultrasonic waves and the ultrasonic waves generated by the piezoelectric elements. MEMS ultrasonic transducer having; And it provides a ultrasonic obesity treatment apparatus having a drive control unit for controlling the drive of the MEMS ultrasonic transducer, comprising a body unit to which the MEMS ultrasonic transducer is coupled.

Here, the fine pattern is; In order to concentrate the ultrasonic wave, it is preferable that at least one concave curved lens formed on a silicon wafer is formed.

According to the MEMS ultrasound transducer of the ultrasonic obesity treatment apparatus according to the present invention has the following effects.

First, according to the present invention, since the ultrasonic waves generated in the piezoelectric element are concentrated at the focusing portion by the lens array, the ultrasonic intensity may be increased at the focusing portion even if the ultrasonic output of the piezoelectric element is low. The therapeutic effect can be obtained, and the reduction of the ultrasonic intensity can be prevented.

Second, according to the present invention, since the ultrasonic waves generated in the piezoelectric element are concentrated at the focusing portion, the transmission area passing through the human body is minimized until the ultrasonic waves reach the focusing portion, thereby minimizing the influence of the ultrasonic wave on the untreated object portion. can do.

Third, according to the present invention, since the ultrasonic intensity applied per unit area of the human tissue gradually increases toward the focusing region, the intensity of the ultrasonic wave received by the human tissue placed on the ultrasonic transmission path before reaching the focusing region is harmless to the human body. Can be set.

Fourth, according to the present invention, since the lens array is manufactured using a semiconductor manufacturing process based on MEMS, fine and precise pattern processing can be performed according to a desired focal length, so that mass production can be performed in small size and manufacturing cost can be reduced. .

Fifth, according to the present invention, the lens array and the piezoelectric element are integrally modularized to be detachably attached to the ultrasonic treatment device, so that the piezoelectric element is easily replaced / repaired when the piezoelectric element is broken or at the end of its life.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention that can specifically realize the above object will be described. In the description of the present embodiment, the same names and symbols are used for the same components, and additional descriptions and redundant descriptions thereof will be omitted below.

First, referring to Figures 2 and 3, an embodiment of an ultrasonic obesity treatment apparatus having a MEMS ultrasonic transducer according to the present invention.

2 is a block diagram showing the configuration of the ultrasonic obesity treatment apparatus having a MEMS ultrasonic transducer according to the present invention, Figure 3 is a projection of the ultrasound irradiation on the skin tissue using the MEMS ultrasonic transducer according to the present invention It is sectional drawing which shows schematically.

2 and 3, the ultrasonic obesity treatment apparatus according to the present invention includes a body unit 10 and a MEMS ultrasonic transducer 20 provided in the body unit 10.

Here, the MEMS means an ultra-fine electromechanical system, and in English, it stands for Micro Electronic Mechanical System. In more detail, the MEMS is called a microelectromechanical system, a microelectromechanical control technology, etc., and it is established based on semiconductor process technology, and manufactured micron or micron precision machine by processing silicon or crystal. The present invention provides an ultrasonic transducer that can be miniaturized and mass-produced by performing processing of fine and precise shapes using semiconductor processing technology.

And the transducer is a device for converting some form of energy received from one or more sources into another, for example, a speaker for converting an electrical voice signal into an audible air pressure wave, and a pickup for converting a mechanical movement of the needle into electrical pressure. to be. Therefore, the ultrasonic transducer corresponds to an ultrasonic transducer that converts electrical energy into ultrasonic waves.

The present invention is an ultrasonic obesity treatment apparatus having an ultrasonic transducer manufactured on the basis of MEMS as described above, wherein the main body unit 10 includes a driving control unit 11 for controlling the driving of the MEMS ultrasonic transducer 20. The MEMS ultrasonic transducer 20 is coupled to the body unit 10.

Accordingly, when electrical energy is applied from the main body unit 10 to the MEMS ultrasonic transducer 20, ultrasonic waves are generated by the MEMS ultrasonic transducer 20, and the ultrasonic waves are projected onto the human body to cause lipolysis or other Carry out the desired treatment.

In more detail, the main body unit 10 is provided with a microprocessor constituting the drive control unit 11 and a power supply circuit for supplying power to the transducer, and the microprocessor 12 is ultrasonic irradiation. The configuration of the input unit 13 for receiving the condition, the display unit 14 for displaying the operating conditions, and the power supply unit 15 for supplying power to each electric component is electrically connected.

The input unit 13 is an operation unit, the ultrasonic irradiation conditions such as the output amount of the ultrasonic wave and the irradiation time of the ultrasonic wave is input. In addition, the display unit 14 may display the operating time of the ultrasonic wave and the output intensity of the current ultrasonic wave. In addition, the power supply unit 15 may be configured as a battery for wireless operation or supply external power in a wired manner through an electric cable.

In addition, a circuit board 16 is electrically connected to the micro process 12 and connected to the MEMS ultrasonic transducer 20.

The MEMS ultrasonic transducer 20 includes a piezoelectric element 21 and a focusing lens array 22. Examples of the piezoelectric element 21 include a piezoletric element already known. Pb (Zr, Ti) O ₃ , which is a solid solution of PbTiO ₃ and PbZrO ₃ as a basic material, can be applied as a multilayer actuator of MEMS ultrasonic transducer according to the present invention having a large piezoelectric property by thick-layer lamination with a thick film process. .

The piezoelectric element 21 is a small device that generates ultrasonic waves. More specifically, when electrical energy is input to the piezoelectric element 21, the piezoelectric element 21 vibrates to generate ultrasonic waves.

The principle of the generation of the ultrasonic wave by the piezoelectric element 21 and the configuration of the main body unit 10 for this purpose, that is, the control of the ultrasonic output by the supply voltage or the oscillation of the high frequency current is generally known, which will be further described. Omit.

On the other hand, the focusing lens array 22 is configured for focusing the ultrasonic waves generated by the piezoelectric element 21 and emitted forward, and is applied for ultrasonic focusing.

3 illustrates the state in which the ultrasonic waves generated by the piezoelectric element 21 and then focused by the focusing lens array 22 are irradiated to the fat layer of the human tissue. According to the present invention, even if the intensity of the ultrasonic wave generated in the piezoelectric element 21 is weak, the focus area k has a stronger ultrasonic intensity than that.

For example, assuming that the ultrasonic intensity in the focal region k of ultrasonic waves formed by the focusing lens array 22, that is, the desired intensity of ultrasonic waves at a target depth is 3 W / cm 2, the focal region (subcutaneous fat layer) Ultrasound intensity is less than 3W / ㎠ in the human tissue (epidermal layer, dermis layer) located on the transmission path of the ultrasonic wave until the ultrasonic wave is transmitted through the ultrasonic wave, even if the ultrasonic wave is transmitted to the human tissues other than the focal region, the ultrasonic wave is not affected or affected. This can be minimized.

This is the same principle as forming the maximum energy in the focus area by condensing weak light using a magnifying glass.

One embodiment of the ultrasonic obesity treatment apparatus according to the present invention is to decompose a fat layer using ultrasound, and the target depth is a subcutaneous fat layer of the human body. Here, the focal length f between the focusing region and the focusing lens array 22 and the intensity of the ultrasonic waves in the focusing region are generated at the refractive angle and the first piezoelectric element according to the shape and material of the focusing lens array 22. It is influenced by factors such as the intensity of the ultrasonic waves.

When the shape of the pattern formed on the surface of the focusing lens array 22 is a hemispherical shape or a curvature shape close to the hemispherical shape, the angle of refraction is affected by the curvature R of the surface and Snell's Law is applied. Therefore, by adjusting the shape of the focusing lens array in consideration of the intensity of the ultrasonic waves, the focal length can be easily set according to the design conditions, and the intensity of the ultrasonic waves can be set within the medical device safety standard prescribed by the FDA. Can be.

Therefore, according to the present invention, the intensity of the ultrasound is maximized at the target depth, that is, the fat layer, and a focal region is formed in the fat layer so that ultrasonic lipolysis can be performed locally in a short time. Therefore, the fat decomposed locally by the ultrasonic obesity treatment apparatus according to the present invention can achieve a natural discharge mechanism that is slowly introduced into the blood vessel and naturally discharged into the body through secretions such as sweat, but in large quantities in large areas at once When fat is degraded, natural excretion mechanisms may be inhibited due to blood vessel resistance.

The focusing lens array 22 performing the above-described function is manufactured using a semiconductor manufacturing process based on MEMS, thereby concentrating ultrasonic waves generated from the piezoelectric element to form a focus. More specifically, a fine pattern formed using the semiconductor manufacturing process is formed on the front surface of the focusing lens array 22, and the fine pattern functions to focus the ultrasonic waves.

The fine pattern is for concentrating ultrasonic waves emitted from the piezoelectric element and includes at least one lens 22b formed on a silicon wafer 22a.

Here, the lens 22b has a concave curvature shape and has a shape recessed on the entire surface of the silicon wafer 22a to refract the ultrasonic waves. The lens 22b has a hemispherical shape or a curved shape smaller than the hemisphere.

The piezoelectric element 21 is provided on the rear surface of the focusing lens array 22 to generate ultrasonic waves by the current supplied by the driving controller and the power supply circuit.

Hereinafter, an embodiment of a process of manufacturing the focusing lens array 22 of the MEMS ultrasonic transducer according to the present invention will be described with reference to FIG. 4.

As shown in FIG. 4, the focusing lens array 22 is manufactured using a semiconductor manufacturing process. First, a process of depositing a pattern material on the silicon wafer 22a (b) and a PR (on the pattern material) are performed. Coating process (c) is carried out to deposit photoresist to a constant thickness. An example of the pattern material is nitride (nitride).

After the PR is applied, the mask is formed by arranging a mask having a predetermined pattern on the silicon wafer 22a to which the PR is applied, and then performing an exposure process to expose the PR by illuminating a light source on the aligned mask. A developing step (d) is performed in which a PR pattern is formed by selectively melting a portion of the layer exposed by the light source using a developing solution.

The focusing lens array shown in FIG. 5 may be manufactured by using a shape in which a circular dot shape pattern is regularly arranged from side to side in the mask used in the present embodiment.

Next, after performing the etching process (e) of the pattern material for dissolving the pattern material in accordance with the pattern of the PR formed on the silicon wafer 22a, the PR is removed. Then, the etching process (f) is performed to form a desired fine pattern on the entire surface of the silicon wafer 22a (the image side surface in FIG. 4), thereby forming the focused lens array 22 having the hemispherical lens.

 Here, the curvature and the focal length of the lens may vary according to conditions such as the time when the surface of the silicon wafer 22a is exposed to the etching solution and the type of developer. The precision pattern processing method by such a photolithography process can be made by using a semiconductor manufacturing process.

Thereafter, the pattern material (Nitride) is removed (g), Ti / Au is sputtered on the back surface of the silicon wafer 22a, and deposited (h), and the Ti / Au film is deposited thereon. One embodiment of the MEMS ultrasonic transducer according to the present invention may be manufactured by attaching the PZT forming the piezoelectric element to the back surface of the wafer.

The MEMS ultrasonic transducer 20 manufactured as described above is electrically connected to a circuit board. When the piezoelectric element 21 generates ultrasonic waves by a supplied current, the lens 22b formed on the silicon wafer receives ultrasonic waves. Focus and form focus.

Therefore, even if the intensity of the ultrasonic wave emitted from the piezoelectric element is low, high-intensity ultrasonic energy can be obtained in the focal region. When the ultrasonic energy is absorbed into the fat layer of the skin tissue, the fat layer is decomposed by ultrasonic action such as heat generation. Obesity can be treated.

On the other hand, the PZT, that is, the piezoelectric element 21 is preferably coupled to the main body unit 10 by being integrally coupled to the focusing lens array 22 to form a module (module).

In this embodiment, the PZT, that is, the piezoelectric element 21 is integrally attached to the back surface of the silicon wafer 22a using epoxy to form a module. More preferably, the piezoelectric element 21 is integrally provided with the silicon wafer 22a inside the transducer case (not shown), and the case has a terminal for supplying current to the piezoelectric element 21. If so, the ultrasonic transducer can be easily replaced as needed.

To this end, the main body unit 10 is preferably formed with a socket-shaped mounting portion for mounting the MEMS ultrasonic transducer 20.

Of course, as shown in FIG. 4, the circuit board 16 may be integrally bonded to the MEMS ultrasonic transducer 20 using an adhesive resin (for example, an epoxy resin).

FIG. 5 illustrates an embodiment of the focused lens array 22 manufactured based on MEMS, and a plurality of lenses 22b are formed on the silicon wafer 22a.

Accordingly, a plurality of focal points can be formed by each lens, and the intensity of the ultrasonic wave in the focal region is maximized to locally decompose the fat layer.

As described above, since the ultrasonic transducer according to the present invention includes a focusing lens array manufactured based on MEMS, mass production is possible by using a semiconductor manufacturing process, and the focusing lens array having a desired fine and precise shape can be easily manufactured. The production of the product by mass production can be reduced.

As described above, the preferred embodiments of the present invention have been described, and the fact that the present invention can be embodied in other specific forms in addition to the above-described embodiments without departing from the spirit or scope thereof has ordinary skill in the art. It is obvious to them.

Therefore, the above-described embodiments should be regarded as illustrative rather than restrictive, and thus, the present invention is not limited to the above description and may be modified within the scope of the appended claims and their equivalents.

1 is a cross-sectional view of a skin tissue showing an ultrasound projection of projecting ultrasound onto a tissue of a human body by a conventional ultrasound therapy apparatus.

Figure 2 is a block diagram showing the configuration of the ultrasonic obesity treatment apparatus having a MEMS ultrasonic transducer according to the present invention.

Figure 3 is a cross-sectional view schematically showing the projection of the ultrasonic wave irradiated to the skin tissue using the MEMS ultrasonic transducer according to the present invention.

4 is a view showing a manufacturing process of the MEMS ultrasonic transducer according to the present invention.

5 is a perspective view showing a lens array of the MEMS ultrasonic transducer according to the present invention.

Explanation of symbols on the main parts of the drawings

10: main unit 11: drive control unit

12: microprocessor 13: input

14: display section 15: power supply section

20: MEMS ultrasonic transducer 21: piezoelectric element

22: focusing lens array 22a: silicon wafer

22b: lens

Claims (6)

Piezoelectric elements for generating ultrasonic waves; And In order to focus the ultrasonic waves generated from the piezoelectric element, an ultrasonic obesity treatment apparatus comprising a focused lens array having a fine pattern formed on the front surface using a semiconductor manufacturing process based on MEMS. MEMS Ultrasonic Tansducer. The method of claim 1, The fine pattern is; MEMS ultrasonic transducer of the ultrasonic obesity treatment apparatus, characterized in that it comprises at least one concave curved lens formed on a silicon wafer for the concentration of the ultrasonic wave. The method according to claim 1 or 2, The piezoelectric element is a piezo element (piezoeletric element) of the MEMS ultrasonic transducer of the ultrasonic obesity treatment apparatus, characterized in that provided on the back of the focusing lens array. The method of claim 3, The piezoelectric element and the focusing lens array are integrally formed as a module, and the MEMS ultrasonic transducer of the ultrasonic obesity treatment apparatus, characterized in that is detachably coupled to the body unit of the ultrasonic obesity treatment apparatus. A MEMS ultrasonic transducer having a piezoelectric element for generating ultrasonic waves and a focused lens array having a fine pattern formed on the front surface by using a semiconductor manufacturing process to focus the ultrasonic waves generated by the piezoelectric elements; And Ultrasonic obesity treatment apparatus having a drive control unit for controlling the drive of the MEMS ultrasonic transducer, comprising a body unit coupled to the MEMS ultrasonic transducer. The method of claim 5, MEMS ultrasonic transducer of the ultrasonic obesity treatment apparatus, characterized in that it comprises at least one concave curved lens formed on a silicon wafer for the concentration of the ultrasonic wave.

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