KR20090085238A - The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition - Google Patents

The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition Download PDF

Info

Publication number
KR20090085238A
KR20090085238A KR1020080011033A KR20080011033A KR20090085238A KR 20090085238 A KR20090085238 A KR 20090085238A KR 1020080011033 A KR1020080011033 A KR 1020080011033A KR 20080011033 A KR20080011033 A KR 20080011033A KR 20090085238 A KR20090085238 A KR 20090085238A
Authority
KR
South Korea
Prior art keywords
electrode
vapor deposition
chemical vapor
electroluminescent device
organic electroluminescent
Prior art date
Application number
KR1020080011033A
Other languages
Korean (ko)
Inventor
이정익
추혜용
이종희
Original Assignee
한국전자통신연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국전자통신연구원 filed Critical 한국전자통신연구원
Priority to KR1020080011033A priority Critical patent/KR20090085238A/en
Publication of KR20090085238A publication Critical patent/KR20090085238A/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
    • H01L21/76876—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for deposition from the gas phase, e.g. CVD
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14—Carrier transporting layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/17—Carrier injection layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/021—Formation of the switching material, e.g. layer deposition
    • H10N70/023—Formation of the switching material, e.g. layer deposition by chemical vapor deposition, e.g. MOCVD, ALD
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

A method for manufacturing an electrode of an organic electroluminescent device is provided to rapidly form an electrode on a substrate of large area without damage to an organic thin film by using a chemical vapor deposition method. An organic electroluminescent device includes a first electrode(2), an organic thin film(3), an electron injection layer(4), and a second electrode(5). The first electrode is formed on a substrate(1). The organic thin film and the electron injection layer are formed on the first electrode. The second electrode is formed on the organic thin film. The second electrode is formed by a chemical vapor deposition method at a process temperature less than 200 degree. The second electrode is made of aluminum, barium, zinc, silver, magnesium, calcium, and oxide conductor having a high electron injection property.

Description

화학 기상 증착법을 이용한 유기 전기 발광 소자의 전극 제조방법{The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition}The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition}

본 발명은 유기 전기 발광 소자에 관한 것으로, 특히 화학 기상 증착법으로 제조된 전극을 포함하는 유기 전기 발광 소자에 관한 것이다.The present invention relates to an organic electroluminescent device, and more particularly, to an organic electroluminescent device including an electrode manufactured by chemical vapor deposition.

최근 디스플레이 산업은 박막을 이용한 소형 경량화 및 박막화를 추구할 뿐만 아니라 고해상도를 요구하며 발전하고 있다. 이러한 요구에 발맞추어 차세대 디스플레이의 구현을 위해서, 현존하는 소자 제작 기술 중에 유기 전계 발광 소자 기술이 주목을 받고 있으며, 이에 대한 연구가 집중적으로 이루어지고 있다. Recently, the display industry is pursuing small size, light weight and thin film using thin film, and demanding high resolution. In order to meet these demands, in order to implement a next-generation display, organic electroluminescent device technology is attracting attention among existing device fabrication technologies, and research on this has been concentrated.

통상적으로, 유기 전기 발광 소자는 기판상에 제 1 전극, 정공 수송층, 발광층, 전자 수송층, 절연층 및 제 2 전극을 차례로 고진공 하에서 적층하여 형성되며, 제 1 및 제 2 전극은 투명 전극 또는 금속 전극으로 이루어질 수 있다. 이처럼 구성된 유기 전계 발광 소자는 제 1 전극 및 제 2 전극에 (+)전극과 (-)전극을 각각 연결하면, 제 1 전극으로부터의 정공이 정공 수송층을 통해 발광층으로 공급되고, 제 2 전극으로부터의 전자가 전자 수송층을 통해 발광층으로 공급되어, 발광층 에서 결합함으로써 발광하게 된다. 전술한 구성의 유기 전계 발광 소자는 응답속도가 빠르고, 저전압구동으로 자기 발광형이기 때문에 배면광(back light)이 필요 없어 경량 박형이 가능할 뿐 아니라, 휘도가 뛰어나며 시야각 의존성이 없는 등 여러 가지 장점을 갖고 있다. In general, an organic electroluminescent device is formed by sequentially stacking a first electrode, a hole transporting layer, a light emitting layer, an electron transporting layer, an insulating layer, and a second electrode on a substrate under high vacuum, and the first and second electrodes are transparent electrodes or metal electrodes. Can be made. In the organic electroluminescent device configured as described above, when the (+) electrode and the (-) electrode are respectively connected to the first electrode and the second electrode, holes from the first electrode are supplied to the light emitting layer through the hole transport layer, and from the second electrode Electrons are supplied to the light emitting layer through the electron transport layer, and emit light by bonding in the light emitting layer. The organic electroluminescent device of the above-described configuration is fast response speed, low voltage driving, self-luminous type, so it is not necessary to have a back light, so it is possible to be light and thin, and has various advantages such as excellent brightness and no viewing angle dependence. Have

상기 유기 전기 발광 소자에서는 음극으로 전자주입특성이 우수한 알칼리 금속, 알카리토 금속, 알루미늄, 은 등과 같은 재료를 사용하며, 보통의 경우 열증착법을 이용하여 박막을 제조한다. In the organic electroluminescent device, a material such as alkali metal, alkaline metal, aluminum, silver, etc. having excellent electron injection characteristics is used as a cathode, and in general, a thin film is manufactured by thermal evaporation.

그러나, 이러한 종래의 방법은 작은 면적 또는 박막 제조 시간에 제한이 없는 경우에 이용할 수 있으나, 대량 생산을 위하여 대면적의 기판을 사용하고 빠른 공정 시간을 필요로 하는 경우에는 이용할 수 없다는 문제가 있다. However, such a conventional method can be used when there is no limitation in a small area or a thin film manufacturing time, but there is a problem that it cannot be used when a large area substrate is used for mass production and a fast process time is required.

이러한 문제점을 해결하기 위한 방법으로 스퍼터 방법을 이용한 음극의 제조를 이스트만 코닥에서 발표하였으나(US patent 2003/0224204A1), 이 경우에는 플라즈마에 의한 유기 박막의 손상이라는 문제점을 안고 있다. In order to solve this problem, Eastman Kodak published the manufacture of a cathode using a sputtering method (US patent 2003 / 0224204A1), but in this case, the organic thin film is damaged by plasma.

본 발명은 전술한 종래 기술의 문제점을 해결하기 위하여, 유기 박막의 손상 없이 대면적의 기판에 빠른 시간 안에 전극을 제조할 수 있는 방법을 제공하는 데 그 목적이 있다. SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a method for manufacturing an electrode on a large area substrate in a short time without damaging the organic thin film, in order to solve the aforementioned problems of the prior art.

상기 목적을 달성하기 위하여 본 발명에 따른 유기 전기 발광 소자는, 기판 상부에 형성되는 제1전극; 상기 제1전극 상부에 형성되는 정공층, 발광층, 전자층; 및 상기 유기층 상부에 형성되는 화학기상증착법으로 제작되는 제2전극을 포함하는 것을 특징으로 한다.In order to achieve the above object, the organic electroluminescent device according to the present invention includes a first electrode formed on the substrate; A hole layer, an emission layer, and an electron layer formed on the first electrode; And a second electrode formed by a chemical vapor deposition method formed on the organic layer.

본 발명에 의한 화학기상증착법으로 유기전기발광소자의 전극을 제조하게 되면, 유기박막의 손상없이 대면적으로 빠른 시간 안에 전극을 제작할 수 있게 된다.When the electrode of the organic electroluminescent device is manufactured by the chemical vapor deposition method according to the present invention, it is possible to manufacture the electrode in a large time without damage to the organic thin film.

상기 목적을 달성하기 위하여 본 발명에서는 화학 기상 증착법으로 제작된 전극을 포함하는 것을 특징으로 하는 유기 전기 발광 소자를 제공한다. In order to achieve the above object, the present invention provides an organic electroluminescent device comprising an electrode manufactured by chemical vapor deposition.

또한, 상기 유기 전기 발광 소자의 상부 전극은 화학 기상 증착법으로 제작된 금속 전극을 포함하는 것을 특징으로 한다.In addition, the upper electrode of the organic electroluminescent device is characterized in that it comprises a metal electrode manufactured by chemical vapor deposition.

또한, 상기 유기 전기 발광 소자의 상부 전극 제작을 위한 화학 기상 증착법의 공정 온도가 200 도를 넘지 않는 것을 특징으로 한다.In addition, the process temperature of the chemical vapor deposition method for manufacturing the upper electrode of the organic electroluminescent device is characterized in that not more than 200 degrees.

이하 첨부된 도면을 참조하여 본 발명에 의한 실시예를 상세히 설명하도록 한다. Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 1과 도 2는 유기 전기 발광 소자의 단면도이다. 1 and 2 are cross-sectional views of the organic electroluminescent device.

도 1은 양극이 기판상에 먼저 제작되고, 유기박막, 전자주입층 및 음극이 그 상부에 제작되는 소자의 구조이다.1 is a structure of a device in which an anode is first fabricated on a substrate, and an organic thin film, an electron injection layer, and a cathode are fabricated thereon.

도 2는 음극이 기판상에 먼저 제작되고, 유기박막, 전자주입층 및 양극이 그 상부에 제작되는 소자의 구조이다.2 is a structure of a device in which a cathode is first fabricated on a substrate, and an organic thin film, an electron injection layer, and an anode are fabricated thereon.

유기박막의 상부에 형성되는 전극은 전극의 제작 과정 중에 유기박막의 손상이 없어야 하며, 대량 생산을 위하여 대면적으로 빠른 시간 안에 제작되어야 한다.The electrode formed on the top of the organic thin film should be free of damage to the organic thin film during the manufacturing process of the electrode, and should be manufactured in a large amount of time for mass production.

화학기상증착법으로는 다양한 금속 및 산화물 전도체를 저온으로 제작할 수 있으며, 대면적 공정이 가능하고 빠른 시간으로 공정을 수행할 수 있다.Chemical vapor deposition can be used to produce a variety of metal and oxide conductors at low temperatures, large-area processing is possible and can be carried out in a fast time.

따라서, 도 1과 같이 음극이 상부전극으로 사용될 경우 좋은 전자 주입 특성을 갖는 알루미늄, 바륨, 아연, 은, 마그네슘, 칼슘, 산화물전도체 등을 화학기상증착법으로 제작하여 상기의 조건을 만족할 수 있다.Therefore, when the cathode is used as the upper electrode, as shown in FIG. 1, aluminum, barium, zinc, silver, magnesium, calcium, oxide conductor, etc. having good electron injection characteristics may be manufactured by chemical vapor deposition to satisfy the above conditions.

또한, 도 2와 같이 양극이 상부전극으로 사용될 경우 좋은 정공 주입 특성을 갖는 알루미늄, 바륨, 아연, 은, 마그네슘, 칼슘, 산화물전도체 등을 화학기상증착법으로 제작하여 상기의 조건을 만족할 수 있다.In addition, when the anode is used as the upper electrode as shown in FIG.

다른 예로 상부전극은 다층으로 구성될 수 있으며 그 중 하나의 층으로 화학기상증착법으로 증착된 전극을 포함할 수 있다. As another example, the upper electrode may be formed of a multilayer, and may include an electrode deposited by chemical vapor deposition as one layer thereof.

또한, 플라즈마가 결합된 화학기상증착법으로 상기의 전극을 제작할 경우 공 정온도를 더욱 낮출 수 있게 된다. In addition, when the electrode is manufactured by chemical vapor deposition combined with plasma, the process temperature can be further lowered.

도 1 및 도 2는 유기 전기 발광 소자의 단면도이다. 1 and 2 are cross-sectional views of the organic electroluminescent device.

* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

1 : 기판 1: substrate

2 : 양극2: anode

3 : 유기 박막3: organic thin film

4 : 전자주입층4: electron injection layer

5 : 음극5: cathode

Claims (6)

기판 상부에 형성되는 제1전극;A first electrode formed on the substrate; 상기 제1전극 상부에 형성되는 정공층, 발광층, 전자층; 및A hole layer, an emission layer, and an electron layer formed on the first electrode; And 상기 유기층 상부에 형성되는 화학기상증착법으로 제작되는 제2전극을 포함하는 유기전기발광소자An organic electroluminescent device comprising a second electrode formed by chemical vapor deposition formed on the organic layer 제1항에 있어서 The method of claim 1 화학기상증착법으로 제작되는 제2전극으로 알루미늄, 바륨, 아연, 은, 마그네슘, 칼슘, 산화물전도체를 포함하는 것을 특징으로 하는 유기전기발광소자Organic electroluminescent device comprising a second electrode manufactured by chemical vapor deposition comprising aluminum, barium, zinc, silver, magnesium, calcium, oxide conductor 제1항에 있어서The method of claim 1 화학기상증착법으로 제작되는 제2전극의 공정온도가 200 도 이하인 것을 특징으로 하는 유기전기발광소자The organic electroluminescent device, characterized in that the process temperature of the second electrode manufactured by chemical vapor deposition method is 200 degrees or less 제1항에 있어서The method of claim 1 제 2 전극은 다층구조로 구성할 수 있으며 그 중 하나의 전극이 화학기상증착법으로 제작된 전극을 포함하는 것을 특징으로 하는 유기전기발광소자The second electrode may have a multi-layered structure, wherein one of the electrodes includes an electrode manufactured by chemical vapor deposition. 제1항에 있어서 플라즈마와 결합된 화학기상증착법으로 제작되는 제2전극을 포함하는 유기전기발광소자The organic electroluminescent device of claim 1, further comprising a second electrode fabricated by chemical vapor deposition combined with plasma. 화학기상증착법으로 제작되는 전극을 포함하는 유기전기발광소자를 이용한 디스플레이 장치 및 조명 장치Display device and lighting device using organic electroluminescent device comprising electrode manufactured by chemical vapor deposition
KR1020080011033A 2008-02-04 2008-02-04 The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition KR20090085238A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080011033A KR20090085238A (en) 2008-02-04 2008-02-04 The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080011033A KR20090085238A (en) 2008-02-04 2008-02-04 The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition

Publications (1)

Publication Number Publication Date
KR20090085238A true KR20090085238A (en) 2009-08-07

Family

ID=41205293

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080011033A KR20090085238A (en) 2008-02-04 2008-02-04 The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition

Country Status (1)

Country Link
KR (1) KR20090085238A (en)

Similar Documents

Publication Publication Date Title
US8338223B2 (en) Fabrication method for organic electronic device and organic electronic device fabricated by the same method
EP2592672B1 (en) Organic light-emitting device and method for manufacturing same
WO2016123916A1 (en) Display substrate and manufacturing method thereof, and display device
JP2005353589A (en) Organic electroluminescent display device and its manufacturing method
KR100844788B1 (en) Fabrication method for organic light emitting device and organic light emitting device fabricated by the same method
KR100982411B1 (en) Organic light emitting diode and method for manufacturing the same
JP2012113976A (en) Organic el element
US11322563B2 (en) Electroluminescent device with improved luminous efficiency and viewing angle and method of manufacturing the same
KR100861640B1 (en) Fabrication method for organic light emitting device and organic light emitting device fabricated by the same method
KR20150037708A (en) Organic light emitting device
US10186678B2 (en) Organic light-emitting diode component and organic light-emitting diode display
WO2024055768A1 (en) Display panel, display panel manufacturing method, and display device
TWI321966B (en) Organic electro-luminescence device and method of manufacturing the same
US20090051280A1 (en) Light-emitting device, method for manufacturing light-emitting device, and substrate processing apparatus
JP2002198182A (en) Organic el element
WO2011093146A1 (en) Organic el device
KR20090085238A (en) The method for manufacturing electrode of organic electroluminescence device using chemical vapor deposition
US20080018242A1 (en) Double side emitting organic light emitting diode and method of fabricating the same
WO2018193822A1 (en) Electronic device and method for producing same
TW200427368A (en) An organic light emitting diode structure
KR100786231B1 (en) Evaporation apparatus of cathode
JP2013157424A (en) Organic el panel
JP2011082134A (en) Organic light-emitting display device and its manufacturing method
KR100611754B1 (en) Method for fabrication of organic electro luminescence device
KR100981015B1 (en) Method for fabricating a organic electroluminescence device

Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid