KR20090069439A - System for managing physical distribution and management methode used the same - Google Patents

Abstract

A system for managing physical distribution and management method used the same are provided to prevent the delay of the physical distribution delivery by using an automatic sending apparatus. A plurality of unit process equipment(10) performs a semiconductor unit manufacturing process. A plurality of automatic sending apparatus(30) transfers a plurality of carriers. A plurality of wafers is mounted in a plurality of carriers. The host computer(40) outputs the control signal for the smooth movement of a plurality of wafer carriers. The transfer time for payment of a plurality of wafer carriers is calculated by a control signal. According to the transfer time for payment, the transfer of physical distribution is successively controlled.

Description

Semiconductor logistics management system and its management method {System for managing physical distribution and management methode used the same}

The present invention relates to a semiconductor logistics management system, and more particularly, to a semiconductor logistics management system using an automatic transfer machine such as an overhead hoist transfer (O.H.T) for carrying a wafer carrier on which a plurality of wafers are mounted.

Recently, semiconductor manufacturing technology has been developed in the direction of improving integration, reliability, and processing speed according to the rapid development of information and communication technology. The semiconductor is manufactured by fabricating a silicon wafer used as a semiconductor substrate from a silicon single crystal, forming a processed film on the semiconductor substrate, and forming the processed film in a pattern having electrical or dielectric properties.

The patterns are formed by selective or repetitive performance of unit processes such as film formation, photolithography, polishing, ion implantation, and the like. In the recent semiconductor manufacturing process requiring a design rule of 0.15 μm or less, the control of process conditions such as pressure and temperature applied to the unit processes must be performed more precisely. This is actively going on. In addition, a large number of semiconductor manufacturing apparatuses are provided in the manufacturing process line for mass production, and their operation and control are being automated.

As an example of the automation, there is a transport apparatus including an auto guided vehicle (AGV) for transporting a semiconductor substrate in a bay area where devices for performing the manufacturing process are provided. Recently, not only the unmanned transfer truck but also an overhead transfer (OHT) has been applied to the transfer. The detailed structure of the overhead transfer is disclosed in detail in US Pat. No. 6,092,678. The overhead transfer is mainly used for the transfer of articles including wafers having a diameter of 300 mm, using rails mounted on the ceiling in the working space, and using vehicles traveling along the rails. It has a configuration for transporting the article. In addition, a semiconductor logistics management system using the overhead transfer and a management method thereof are disclosed in US Patent No. 7,024,275.

The conventional semiconductor logistics management system and its management method can sequentially move a carrier on which a plurality of wafers are mounted between a plurality of unit process facilities or stockers using the overhead transfer. In this case, an automatic transfer machine such as the overhead transfer may carry the carrier while moving according to a program to which priority is applied in an unmanned workspace. At this time, in the conventional semiconductor logistics management system and its management method, the transfer of the logistics is made by making the process time in the unit process facility in which the unit process is made a top priority.

For example, the conventional method of managing semiconductor logistics, SPT (Shortest Processing Time): Select from the work that needs the shortest process time, LTWK (Least Total Work): Work with the shortest overall process time (sum of process time) LWKR (Least Work Remaining): Select the job with the shortest remaining work time, SRM (Shortest Remaining Time): Select from the job with the shortest remaining time except for the process under consideration. SPT / TWK: Process under consideration SPT / TWKR: Divide the required time of the process under consideration by the remaining process time, select from the job with the smallest ratio, LPT (Longest Processing Time). ): Select the job that requires the longest process time, MTWK (Most Total Work): Select the job with the largest total process time (sum of process time), MWKR (Most Work Remaining): Remaining work time Select the longest job, LRM (Longest Remaining Work): Select the longest remaining job except the process under consideration. LPT / TWK: Divide the process time under consideration by the total process time, and the ratio is the highest. LPT / TWKR: Select from large work, divide the time required for the process under consideration into the remaining process time, and select the work with the largest ratio.

However, the semiconductor logistics management system according to the prior art had the following problems.

First, the conventional semiconductor logistics management system and its management method, when the priority is determined for the process time, there is no consideration of low-priority work according to the process time, the productivity is lowered because the delay of logistics transfer occurs There was a disadvantage

Secondly, the conventional semiconductor logistics management system and its management method have no processing rules for logistics having the same or similar priority according to the process time, and there is a problem that productivity is low because there is no countermeasure for solving the problem.

An object of the present invention is to solve the problems according to the prior art, to provide a semiconductor logistics management system and its management method that can increase or maximize productivity by preventing delay of logistics transfer for low priority work There is.

In addition, another object of the present invention is to provide a semiconductor logistics management system and a management method thereof that can increase or maximize productivity by overcoming the limitations of processing rules for logistics having the same or similar priority.

A semiconductor logistics management system according to an aspect of the present invention for achieving the above object comprises a plurality of unit processing facilities for performing a semiconductor unit manufacturing process; A plurality of automatic transporters for transporting a plurality of carriers on which a plurality of wafers on which semiconductor unit manufacturing processes are performed in the plurality of unit processing facilities are carried; And calculating a delivery date of the plurality of wafer carriers to control the movement of the plurality of wafer carriers smoothly between the plurality of unit processing facilities through the plurality of automatic transfer machines, and sequentially transferring the logistics according to the delivery dates. It characterized in that it comprises a host computer for outputting a control signal for controlling.

Here, the host computer calculates a dynamic slack using a delivery date generation unit for generating a delivery date of the logistics and a delivery date generated by the delivery date generation part, and calculates a dynamic slack for selecting an emergency return job and a spare return job. And a cost table calculator configured to calculate a cost table using information of the emergency conveyance task and the spare conveyance tasks selected by the dynamic slack calculator and the automatic transfer machine, and the cost table calculator. Preferably, the cost table is arranged in a Hungarian manner and includes an ap solution application unit for outputting a control signal optimized for logistics movement to the automatic transfer machine.

In addition, another aspect of the present invention, the step of inputting a transfer operation of a plurality of wafer carriers on which a plurality of wafers are mounted to perform the semiconductor manufacturing process; Calculating a delivery date for each of the plurality of wafer carriers; Calculating each dynamic slack using the transfer delivery date; Selecting an emergency conveyance job and a spare conveyance job by using the dynamic slack; Calculating a cost table between the wafer carrier and the idle automatic transfer device on which emergency or spare transfer operations are to be performed; And arranging the cost table by the Hungarian method to obtain an optimization of logistics movement for an emergency return operation or a spare return operation.

According to the present invention, by using a host computer to control the logistics transfer operation by the automatic transfer machine based on the transfer delivery date of the corresponding logistics to prevent the delay of logistics transfer for the low priority task according to the conventional process time This can increase or maximize productivity.

In addition, an optimized logistics transfer operation is sequentially calculated from a cost table in which any logistics transfer operation by an automatic transfer machine is arranged in a matrix, thereby limiting the limitations of processing rules for logistics having the same or similar priority according to the conventional process time. By overcoming it, the logistics can be easily transported, thus increasing or maximizing productivity.

Hereinafter, a semiconductor logistics management system and a management method thereof according to an embodiment of the present invention will be described with reference to the accompanying drawings. Although the present invention has been described in detail only with respect to specific embodiments, it will be apparent to those skilled in the art that modifications and variations can be made within the scope of the technical idea of the present invention, and such modifications or changes belong to the claims of the present invention. something to do.

1 is a diagram schematically showing a semiconductor logistics management system according to an embodiment of the present invention.

As shown in FIG. 1, the semiconductor logistics management system of the present invention performs a unit process in a plurality of unit process facilities 10 in which a unit process of a plurality of wafers is performed, and in the plurality of unit process facilities 10. Or a plurality of stockers 20 for loading a plurality of wafer carriers on which a plurality of wafers are mounted or completed, and a plurality of wafer carriers for transferring the plurality of wafer carriers between the plurality of unit processing facilities 10 and the plurality of stockers 20. The plurality of wafer carriers and the plurality of wafer carriers between the plurality of unit processing facilities 10 and the plurality of stockers 20 through the plurality of auto transporters 30. In order to control the smooth movement of the plurality of wafer carriers to calculate the delivery date, the transfer of the logistics in sequence according to the delivery time It comprises a host computer 40 for outputting a control signal for controlling the.

Here, the unit process facility 10 is formed to sequentially perform a semiconductor unit process of a plurality of wafers mounted on the wafer carrier. For example, the unit process equipment 10 may include a chemical vapor deposition apparatus or a physical vapor deposition apparatus for forming a process film such as an interlayer insulating film, a semiconductor film, or a conductive metal film on the plurality of wafers, and the plurality of wafers or An ion implantation facility for ion implanting conductive impurities into the semiconductor film, a photo spinner facility and an exposure facility for forming a process film on the plurality of wafers or the process film, and the wafer or the wafer exposed by the process film And an etching facility for etching the processed film, and a chemical mechanical polishing facility for smoothly polishing the processed film.

Although not shown, the unit process facility 10 receives a control signal output from the host computer 40 and processes the plurality of wafers in the unit process facility 10, a process progress environment, and a process recipe. According to the present invention, a plurality of user interfaces for controlling the semiconductor manufacturing process are performed. The user interface may receive predetermined information required in the semiconductor manufacturing process performed in the unit process facility 10 by an operator or a manager working in the semiconductor production line. Since the user interface communicates with each other by the Semi Equipment Communications Standard (SECS) protocol, which is a communication protocol of the unit process facility 10, data is shared or exchanged, and the user interface and the host computer 40 are TCP, which is a general communication protocol. It communicates with each other by / IP (Transmission Control Protocol / Internet Protocol).

In addition, the unit process facility 10 is located in a work space called a clean room in order to be freely managed from dust or moisture in the air, and is sequentially installed in the work space according to the order of the semiconductor manufacturing process. It is. The workspace is divided into a manned workspace and an unmanned workspace. In addition, the semiconductor manufacturing process is often repeated, and thus a wafer carrier on which a plurality of wafers are mounted is often required to be moved to a predetermined position in a short distance or a long distance. Therefore, in a manned workspace, a manual carrier (manual carrier truck) for mounting the wafer carrier can be transported by an operator, and in an unmanned workspace, an automatic carrier 30 such as an automatic carrier cart and an overhead transfer (automatic The wafer carrier can be automatically transported by a transfer cart).

In this case, the unit process facility 10 is provided with a load port (not shown) in which the wafer carrier carried by the manual transport cart or the automatic transporter 30 is loaded. The load port is a preliminary place for loading a wafer carrier on which a plurality of wafers on which the semiconductor manufacturing process is to be performed in the unit process facility 10 is loaded, and the plurality of semiconductor manufacturing processes completed in the unit process facility 10. The wafer carrier on which the two wafers are mounted is a waiting place for unloading. In addition, the load port protrudes out of the unit process facility 10 and loads / unloads the wafer carrier carried by the automatic transfer machine 30 and flows into the unit process facility 10. The semiconductor manufacturing process of the plurality of wafers mounted on the wafer carrier is performed.

Similarly, the stocker 20 is a warehouse for storing wafer carriers and includes a loading port on which the wafer carriers carried by the automatic carrier 30 and the manual carrier are loaded. In addition, the stocker 20 may communicate with the host computer 40 to bring in a wafer carrier on which a plurality of wafers on which the preceding unit process has been completed in the unit processing facility 10 is loaded, and the unit at the unit processing facility 10. A plurality of wafers on which the process is to be carried out is formed to carry a loaded wafer carrier.

The automatic transfer machine 30 is configured to load the wafer carrier from the load port of the unit processing facility 10 and the stocker 20 to the load port of the designated unit process facility 10 and the stocker 20. . The automatic transfer machine 30 may transfer the wafer carrier to the designated unit process facility 10 by a control signal output from the host computer 40. Although not shown, the automatic transfer machine 30 or 30 receives the control signal output from the host computer 40 to eliminate traffic congestion, collision, and deadlock in the unmanned workspace and to efficiently move logistics. It comprises a control unit for the automatic transfer machine 30 to control. For example, when a track in signal is output from the host computer 40 together with the information about the wafer carrier, the controller 30 determines the starting and destination of the wafer carrier. In addition, by setting the shortest distance movement path of the wafer carrier to determine whether it is distinguished from the movement path of the other wafer carrier, and whether the bottleneck is generated by examining the occurrence of the bottleneck section to move the wafer carrier in the movement path to obtain the maximum efficiency Can be.

The host computer 40 is a general purpose computer that plays a central role in the information processing system. The host computer 40 is a computer that plays a central role in processing data processing requests of the entire organization in a centralized information processing system. For example, the host compute consists of a supercomputer with a unique name, SiMAX. The centralized system has a general-purpose (large) computer system suitable for processing capability in a central computer room, which centralizes and processes information processing needs of all sectors within a semiconductor production company.

In such a system, the host computer 40 is equipped with a powerful operating system such as time division processing and multiple programming, and has a communication control system to enable immediate processing of data through numerous terminals and online. In addition, since all data is centralized, a large amount of auxiliary memory is required. Therefore, the auxiliary memory device of the host computer 40 stores all the data regarding the process, for example, the process sequence of each semiconductor manufacturing facility, so that all the semiconductor manufacturing facilities arranged in the semiconductor production line can proceed in an optimal state. , Process progress environment, process condition recipe, and logistics movement information such as the wafer carrier.

In particular, the host computer 40 outputs a control signal for controlling the movement of the logistics based on the due date of the logistics, such as the wafer carrier.

FIG. 2 is a diagram illustrating the host computer 40 of FIG. 1, wherein the host computer 40 generates a delivery date 42 for generating a delivery date of a corresponding logistics when information about a logistics movement is input, and generates the delivery date. The dynamic slack calculation unit 44 which calculates the dynamic slack using the transfer delivery time generated by the unit 42, and selects the urgent conveyance operation and the spare conveyance operation, and the urgent selected by the dynamic slack calculation unit 44. The cost table calculated by the cost table calculation unit 46 which calculates a cost table using the conveyance job and the said spare conveyance jobs and the information of the said automatic transfer machine 30, and the cost table calculated by the cost table calculation part 46 is Hungary It comprises an ap solution application unit 48 for outputting the control signal to the automatic transfer machine 30 by arranging in a manner to optimize the logistics movement.

Here, the delivery date generation unit 42, when information about the corresponding logistics is input from the outside based on the user interface of the unit process facility 10 or the database of the host computer 40, the information corresponding to the delivery delivery date for the corresponding logistics. Can be generated. For example, the delivery date generation unit 42 may calculate a time span by adding a time span to a time at which information about transport of the corresponding logistics is input.

The dynamic slack calculation unit 44 may calculate a dynamic slack value by using the delivery date of the logistic, and may determine the urgency of the transport operation of the logistic according to the dynamic slack value. For example, the dynamic slack calculation unit 44 may calculate the dynamic slack value of the corresponding logistics by subtracting the current time and the expected transfer time from the delivery date, and may determine the emergency transfer operation and the marginal transfer operation using the dynamic slack value.

The cost table calculation unit 46 and the API solution applying unit 48 create a cost table based on assigning an arbitrary job for transferring the corresponding logistics to any automatic transfer machine 30, and based on the cost table. In order to optimize the transport of logistics, it is described in detail in patent application 2006-0090873. For example, the cost table calculation unit and the API solution applying unit 48 calculate a cost table in which the information about the logistics transfer operation and the automatic transfer machine 30 are represented by an n × n matrix, and converts the cost table into a hunger language. It is formed to calculate the optimized logistics transfer work by the method. In this case, the automatic transfer machine 30 may be allocated to the n logistic transfer operations to prevent delay in logistic transfer for the low-priority logistic transfer operation according to the conventional process order.

Therefore, the semiconductor logistics management system according to an embodiment of the present invention is a conventional process using a host computer 40 to control the logistics transfer operation by the automatic transfer machine 30 based on the transfer delivery date of the logistics Productivity can be increased or maximized by preventing delays in logistics transfer for low priority tasks over time.

In addition, an optimized logistics transfer operation is sequentially calculated from a cost table in which any logistics transfer operation by an automatic transfer machine 30 is represented in a matrix, thereby processing for logistics having the same or similar priority according to the conventional process time. By overcoming the limitations of the rules, logistics can be easily transported, thus increasing or maximizing productivity.

Referring to the semiconductor logistics management method using a semiconductor logistics management system according to an embodiment of the present invention configured as described above are as follows.

3 is a flowchart showing the semiconductor logistics management method of the present invention.

As shown in FIG. 3, in the semiconductor logistics management method of the present invention, when information about logistics is input to the host computer 40, information corresponding to a delivery date for logistics is generated. Here, the host computer 40 generates a plurality of logistic transfer delivery times when information on the plurality of logistics to be transferred by the plurality of automatic transfer machines 30 is input. As described above, the transfer delivery time generation unit 42 of the host computer 40 can calculate by adding each time span to the time at which information about the transfer of the plurality of logistics is input.

Next, the dynamic slack calculation unit 44 calculates the dynamic slack values of the plurality of logistics using the information according to the delivery date. Here, the dynamic slack calculation unit 44 calculates the respective dynamic slack values by subtracting the current time and the expected transfer time from the delivery deadlines of the plurality of logistics.

In addition, the dynamic slack calculation unit 44 determines whether the emergency transfer operation using the dynamic slack value. Here, the dynamic slack calculation unit 44 classifies the logistic transfer operation as an emergency transfer operation when the dynamic slack value of the logistic is represented by a negative number. On the other hand, if the dynamic slack value of the logistic is positive, the logistic transport is classified as a free transport.

Next, the cost table of the emergency transfer operation is created by combining the plurality of logistic transfer operations classified as the emergency transfer operation and the information of the plurality of automatic transfer machines 30. The cost table is composed of a plurality of logistics transfer operations (J ₁ , J ₂ , J ₃ ,... N) and a plurality of automatic transfer machines 30 (V 1, V 2, V 3,... N). It is represented by the matrix n.

The Hungarian method finds the rows and columns in which "0" appears while subtracting the minimum value from each row or column component of the n × n matrix and assigns an automatic transfer machine 30 suitable for each logistics transfer operation. Can be optimized.

Therefore, the semiconductor logistics transfer method according to an embodiment of the present invention to prevent the logistics transfer delay for the low priority operation according to the conventional process time by allowing the logistics transfer operation is made based on the transfer delivery time of the corresponding logistics. As a result, productivity can be increased or maximized.

In addition, by using dynamic slack calculated on the basis of the delivery date, it is classified into emergency transfer work and free transfer work, and the information about each transfer work and work transfer cart is calculated by the cost table of n × n matrix, By optimizing the logistics in this way, productivity can be increased or maximized because the logistics can be easily transported by overcoming the limitations of the processing rules for the same or similar priorities according to the conventional process time.

In addition, the description of the above embodiment is merely given by way of example with reference to the drawings in order to provide a more thorough understanding of the present invention, it should not be construed as limiting the present invention. Various changes and modifications are possible to those skilled in the art without departing from the basic principles of the invention.

1 is a diagram schematically showing a semiconductor logistics management system according to an embodiment of the present invention.

2 is a diagram illustrating the host computer of FIG.

3 is a flow chart showing a semiconductor logistics management method of the present invention.

* Description of the symbols for the main parts of the drawings *

10 unit processing equipment 20 stocker

30: automatic transfer machine 40: host computer

Claims (5)

A plurality of unit processing facilities for performing a semiconductor unit manufacturing process; A plurality of automatic transporters for transporting a plurality of carriers on which a plurality of wafers on which semiconductor unit manufacturing processes are performed in the plurality of unit processing facilities are carried; And In order to control the movement of the plurality of wafer carriers smoothly between the plurality of unit processing facilities through the plurality of automatic transfer machines, the transfer delivery date of the plurality of wafer carriers is calculated, and the transfer of logistics is sequentially performed according to the delivery delivery date. And a host computer for outputting a control signal to control. The method of claim 1, The host computer includes a delivery date generation unit for generating a delivery date, a dynamic slack calculation part for calculating a dynamic slack using the delivery date generated by the delivery date generation part, and selecting an emergency return job and a spare return job, and the dynamic A cost table calculation unit for calculating a cost table by using the emergency return job and the spare return jobs selected by the slack calculation unit and information of the automatic transfer machine, and a cost table calculated by the cost table calculation unit in Hungarian And ap solution application unit for outputting a control signal optimized for logistics movement by arranging the method to the automatic transfer machine. The method of claim 2, The delivery date generation unit semiconductor logistics management system, characterized in that for calculating the delivery time of the logistics by adding a time span (time span) to the time when the information on the transfer of the logistics is input. The method of claim 2, The dynamic slack calculation unit calculates the dynamic slack value of the corresponding logistics by subtracting the current time and the estimated transfer time from the delivery date, and uses the dynamic slack value to determine the emergency and spare transfer operations. system. Inputting a conveying operation of a plurality of wafer carriers on which a plurality of wafers are mounted to perform the semiconductor manufacturing process; Calculating a delivery date for each of the plurality of wafer carriers; Calculating each dynamic slack using the transfer delivery date; Selecting an emergency conveyance operation and a surplus conveyance operation by using the dynamic slack; Calculating a cost table between the wafer carrier and the idle automatic transfer device on which emergency or spare transfer operations are to be performed; And And arranging the cost table by a Hungarian method to obtain an optimization of logistics movement for an emergency return operation or a spare return operation.

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