KR20090063658A - Multi function filter and duct system thereof - Google Patents

Multi function filter and duct system thereof Download PDF

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Publication number
KR20090063658A
KR20090063658A KR1020070131108A KR20070131108A KR20090063658A KR 20090063658 A KR20090063658 A KR 20090063658A KR 1020070131108 A KR1020070131108 A KR 1020070131108A KR 20070131108 A KR20070131108 A KR 20070131108A KR 20090063658 A KR20090063658 A KR 20090063658A
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KR
South Korea
Prior art keywords
filter
chemical
removal filter
dust
duct
Prior art date
Application number
KR1020070131108A
Other languages
Korean (ko)
Inventor
장석경
Original Assignee
주식회사 동부하이텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 동부하이텍 filed Critical 주식회사 동부하이텍
Priority to KR1020070131108A priority Critical patent/KR20090063658A/en
Publication of KR20090063658A publication Critical patent/KR20090063658A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0005—Mounting of filtering elements within casings, housings or frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)

Abstract

The present invention relates to a multi-functional filter and a duct system using the same, wherein the filter removes dust and chemicals from the air at the same time, the opening is formed on both sides, the mounting space is formed on the inside, and is mounted so as to cross the opening And a dust removal filter installed in the space, and a chemical removal filter installed in parallel with the dust removal filter in the mounting space. Therefore, in the present invention, the dust removal filter and the chemical component removal filter are made of a single unit to remove dust and chemical components at the same time, and the purchase cost is cheaper than when the filters are separately purchased, and the space occupied by the filter is This has the effect of minimizing the constraints of the design and installation of the duct system.

Description

Multifunction filter and duct system using it

The present invention is a multi-functional filter to remove dust and chemical components at the same time by a single filter for removing dust and chemical components, and to minimize the constraints of the design and installation of the duct system due to the small space occupied by the filter during installation And a duct system using the same.

In general, semiconductor device manufacturing processes are manufactured through a number of unit processes such as photo, etching, and thin film formation processes, and wafers for manufacturing semiconductor devices must be kept clean at all times to prevent defects. The manufacturing process is performed in a clean room where even fine dust is removed. In recent years, the cleanliness of the manufacturing process line of semiconductor devices has become more important because the design rules of the patterns are reduced to increase the degree of integration of the semiconductor devices.

In the manufacturing environment of the semiconductor device, a dust removal filter and a chemical removal filter are respectively installed to remove dust and chemical components from the air supplied through the duct.

As such, the reason why the dust removal filter and the chemical component removal filter, which are installed to clean the air in the clean room for manufacturing the semiconductor device, is respectively provided is that the dust removal filter alone does not remove the chemical component. As the external environment becomes important due to the high integration of chemicals, chemical components from odors or incineration generated from fire or garbage are introduced into the clean room through the duct system, which directly damages the semiconductor devices. Therefore, a filter for removing chemical components is provided along with the dust removal filter.

As described above, the filter used for air purification of a clean room for manufacturing a semiconductor device according to the prior art increases the cost of individual purchase by separately installing a filter for removing dust and a filter for removing chemical components. In addition, the installation took up a lot of space and had a problem that many limitations exist in the design and installation of the duct system.

In the present invention, the dust removal filter and the chemical component removal filter are made of a single unit to remove dust and chemical components at the same time, and the space occupied by the filter is small.

As an embodiment of the present invention, the multifunctional filter is a filter that removes dust and chemical components at the same time, and includes a housing having openings at both sides and a mounting space formed at an inside thereof, and installed in the mounting space so as to lie across the opening. And a chemical removal filter installed in parallel with the dust removal filter in the mounting space.

According to another embodiment of the present invention, a duct system using a multifunction filter is a duct system for providing clean air to a clean room or a manufacturing line of a semiconductor device, the duct providing a moving path of the air, and a housing in the duct. It is installed so as to lie horizontally, the opening is formed on both sides of the housing so that the air passes, and the dust removal filter and the chemical removal filter is installed in parallel to the opening in the housing to include a multi-functional filter is installed side by side. .

According to the present invention, the dust removal filter and the chemical removal filter are made of a single filter to remove dust and chemicals at the same time, and the filter cost is cheaper than when the filters are separately purchased, and the space occupied by the installation is reduced. It has the effect of minimizing the constraints of design and installation.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

1 is a cross-sectional view showing a duct system using a multifunctional filter according to a first embodiment equipped with a multifunctional filter of the present invention. As shown, the multifunctional filter 100 according to the present invention is a filter for removing dust and chemical components at the same time, the housing 110, the dust removal filter 120 and the chemical component removal mounted in the housing 110 And a filter 130.

The housing 110 has openings 111 formed at both sides to allow air to pass therethrough, and a mounting space 112 is formed at the inside to mount the filters 120 and 130 therein, and the side portions for easily detaching the filters 120 and 130 at the inside thereof. A door (not shown) that can be opened and closed may be provided.

The dust removal filter 120 is installed in the mounting space 112 so as to lie horizontally in the opening 111, and removes dust contained in the air passing through the opening 111 of the housing 110. Ultra Low Penetration Absolute (HEPA) filters or High Efficiency Particulate Arrestor (HEPA) filters are used.

The chemical component removal filter 130 is installed in the mounting space 112 of the housing 110 to be in contact with each other in parallel with the dust removal filter 120, and the chemical component contained in the air passing through the housing 110 As the filter to be removed, a first chemical filter 131 for removing total volatile organic compounds (TVOC) including hydrocarbon compounds, nitrogen compounds, sulfur compounds, H 2 O, CO 2, and the like, and a second chemical for removing NO X and SO X Filter 132.

In the duct system 200 using the multifunctional filter according to the first embodiment of the present invention, as shown in FIG. 1, the multifunctional filter 100 as described above is installed when the air suctioned from the outside of the clean room is introduced. To remove dust and chemicals at the same time and to send clean air to the clean room to prevent contamination of products such as equipment and semiconductor devices in the clean room, and to provide a path for the air to be supplied to the clean room. The multifunctional filter 100 is installed in the duct 210 and the first duct 210.

The first duct 210 is installed outside the clean room to provide a path for blowing external air to the clean room by the blowing force of the blower 220, and the multifunction filter at the inlet 211 and the outlet 212. 100 are respectively installed.

As described above, the multifunction filter 100 is installed such that the housing 110 is horizontally disposed inside the first duct 210, and openings 111 are formed at both sides of the housing 110 to allow air to pass therethrough, and the housing ( The dust removal filter 120 and the chemical component removal filter 130 are installed side by side so as to lie horizontally in the opening 111, and the chemical component removal filter 130 is a total volatile organic compound (TVOC). And a first chemical filter 131 for removing NO and a second chemical filter 132 for removing NO X and SO X.

Therefore, the air flowing into the first duct 210 is removed at the same time by the multi-function filter 100 installed in the inlet 211 and the outlet 212, so that clean air is supplied to the clean room. .

2 is a cross-sectional view showing a duct system using a multifunction filter according to a second embodiment of the present invention, as shown, the duct system 300 using a multifunction filter according to a second embodiment of the present invention is a first Like the embodiment, the second duct 310 and the multi-function filter 100 installed in the second duct 310, and only the differences from the first embodiment will be described.

The second duct 310 is installed in the manufacturing process line of the semiconductor device to provide a circulation path of air in the process line, a plurality of air so that the air is supplied to each of the production equipment (1) by the blowing force of the blower 320 The branch outlet 311 is formed, and the multifunctional filter 100 is provided in the branch outlet 311, respectively.

Therefore, in addition to the dust contained in the air circulated to the production equipment 1 through the second duct 310 in the manufacturing process line of the semiconductor device, as well as the total volatile organic compounds and chemical components such as NO X and SO X, etc. It removes simultaneously by the multifunction filter 100 which consists of.

3 is a cross-sectional view showing a duct system using a multifunction filter according to a third embodiment of the present invention. As shown, the duct system 400 using the multifunction filter according to the third embodiment of the present invention is a first embodiment. Like the embodiment, the third duct 410 and the multifunction filter 100 installed in the third duct 410 will be described, and only the differences from the first embodiment will be described.

The third duct 410 provides a path for air to be supplied by the blowing force of the blower 420 to a clean room such as a stocker of an automatic conveying system for storing the product 2 such as a semiconductor element for a long time. A plurality of branch outlets 411 for discharging air to the products 2 are provided, respectively, and the multifunction filter 100 is installed in each of the branch outlets 411.

Thus, not only the dust contained in the air supplied to the product 2 in the stocker but also the total volatile organic compounds and chemical components such as NO X and SO X are simultaneously removed by the multifunctional filter 100 which is made up of a single unit.

According to the preferred embodiments of the present invention as described above, the dust removal filter and the chemical component removal filter is made of a single to remove the dust and chemical components at the same time, and the purchase cost is cheaper than when the filter is separately purchased In addition, the space occupied by the filter during installation is minimal, minimizing the constraints of the design and installation of the duct system.

As described above, specific embodiments have been described in the detailed description of the present invention, but it is obvious that the technology of the present invention can be easily modified by those skilled in the art, and such modified embodiments are defined in the claims of the present invention. It will be included in the technical spirit described.

1 is a cross-sectional view showing a duct system using a multifunctional filter according to a first embodiment of the present invention,

2 is a cross-sectional view showing a duct system using a multifunctional filter according to a second embodiment of the present invention,

3 is a cross-sectional view showing a duct system using a multifunctional filter according to a third embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

100: multi-function filter 110: housing

111: opening 112: mounting space

120: filter for removing dust 130: filter for removing chemical components

131: first chemical filter 132: second chemical filter

210, 310, 410: Duct 211: Entrance

212: outlet 220, 320, 420: blower

311, 411: branch exit

Claims (4)

A filter that simultaneously removes dust and chemicals from air, A housing having openings at both sides and a mounting space formed therein; A dust removal filter installed in the mounting space so as to lie on the opening; Chemical component removal filter is installed in the mounting space parallel to the dust removal filter Multifunction filter comprising a. The method of claim 1, The chemical component removal filter, A first chemical filter for removing total volatile organic compounds (TVOC), Second chemical filter removes NO X and SO X Multifunctional filter, characterized in that consisting of. In a duct system for providing clean air to a clean room or a manufacturing line of a semiconductor device, A duct providing a path of movement of air; Multi-functional housing is installed in the duct so as to lie horizontally, openings are formed on both sides of the housing to allow air to pass through, and a dust removal filter and a chemical removal filter are installed side by side to lie horizontally in the opening inside the housing. filter Duct system using a multifunctional filter comprising a. The method of claim 3, wherein The chemical component removal filter, A first chemical filter for removing total volatile organic compounds, Second chemical filter removes NO X and SO X Duct system using a multifunctional filter, characterized in that consisting of.
KR1020070131108A 2007-12-14 2007-12-14 Multi function filter and duct system thereof KR20090063658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020070131108A KR20090063658A (en) 2007-12-14 2007-12-14 Multi function filter and duct system thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070131108A KR20090063658A (en) 2007-12-14 2007-12-14 Multi function filter and duct system thereof

Publications (1)

Publication Number Publication Date
KR20090063658A true KR20090063658A (en) 2009-06-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070131108A KR20090063658A (en) 2007-12-14 2007-12-14 Multi function filter and duct system thereof

Country Status (1)

Country Link
KR (1) KR20090063658A (en)

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