KR20090055989A - High speed optical monitoring system using a rotatable mirror - Google Patents

Abstract

A high speed optical monitoring system using a rotatable mirror is provided to take pictures of several subjects rapidly and obtain clear observation image. A high speed optical monitoring system(1) comprises: one or more subject source(11) producing a subject; a subject source supporting part(10) which arranges the subject source in a row and supporting the subject source to position the subject on the same focus space; an image obtaining unit(20) including an image pickup device; a mirror(30) installed between the subject and the image obtaining unit; a focus compensation lens(40) arranged between the subject and the mirror; an image processing unit(50) processing the photographed image with digital data; an illuminating unit(70) illuminating the subject; and a system controller(60) controlling the units. The rotation angle of the mirror is varied.

Description

High speed optical monitoring system using a rotatable mirror

The present invention relates to a high speed optical observation system, and more particularly, to a high speed optical observation system capable of observing at least one or more subjects arranged in the same focal space plane at high speed clearly.

Conventionally, the subject observing apparatus 101 for observing a plurality of subjects is disclosed in Korean Patent Application Nos. 10-2005-0092641 and PCT / US2006 / 015607 and the like, and is shown in FIG. It was configured to observe the subjects 110 that are mounted on one moving stage 130 and sequentially move in the X direction and / or Y direction and exist in the same focal plane F.

Alternatively, when the subjects 110 to be observed originate from the same subject source 111, the camera source 120 is fixed, and the subject source 111 together with the subject source support 112, at least one moving stage 131. By moving in the X direction and / or Y direction by the camera 120 is configured to sequentially observe the individual subjects 110 to be observed.

On the other hand, the camera 120 and the subject 110 respectively move the moving stage 130 with respect to the camera, the subject source 111, and the moving stage 131 with respect to the subject source support 112, while the subject 110 moves with each other. ) May be configured to be viewed sequentially by the camera 120.

However, in the conventional subject observing apparatus, since the subject is observed while the camera and / or subjects are moved by using the moving stage, the observation time is reduced by the required time according to the moving distance of the moving stage, so that high-speed observation is difficult. There was this.

In particular, since the moving stage must be repeatedly reciprocated in the X direction and / or the Y direction in order to periodically observe a plurality of subjects, the vibrationless reciprocating motion is performed at high speed due to the inertial force of the moving stage and the camera or the object to be moved. There is a problem that it is not easy to make it realistically. As a result, a problem of shaking an image of a subject observed by a camera and a problem of failing to observe at high speed has occurred.

Accordingly, it is an object of the present invention to provide a high speed optical observation system capable of observing at least one or more subjects at high speed and at the same time obtaining a clear observation image.

The object of the present invention is a high-speed optical observation system for observing at least one or more subjects, the at least one subject source generating the subject and the subject sources in a line such that the subjects are positioned on the same focal space plane. An image acquisition means having an object source support for aligning and supporting an image pickup device for observing and photographing the subjects in an aligned position, a mirror provided to be able to change a rotation angle between the object and the image acquisition means, the subject and the A focus correction lens disposed between the mirrors, an image processing unit for processing the image photographed by the image acquisition means into digital data, lighting means for illuminating the subject, the subject source, the image acquisition means, and the mirror Contains a system control unit for controlling driving and lighting means It is achieved by a high-speed optical observation system characterized in that.

Here, it is preferable that the subject is a large number, and is stationary or moving, or is generated periodically or quasi-periodic and is moving statically or dynamically.

In addition, it is effective to include a subject source alignment device coupled to the subject source support to tilt the subject source in the rotational direction about X, Y, Z and each axis.

Further, the image acquisition means is more preferably a camera having a CCD or a CMOS image pickup device.

At this time, it is more effective that the mirror has a mirror body made of a planar mirror having at least a single mirror surface, and a mirror driving portion for rotating the mirror body at a predetermined rotation angle.

Preferably, the mirror has a mirror body made of a polygon mirror having at least a plurality of mirror surfaces, and a mirror driving portion for rotating the mirror body at a predetermined rotation angle.

In addition, it is effective that the focus correcting lens is provided with a single f-theta aspherical lens or the focus correcting lens with a plurality of aspherical lenses or a combination of spherical / spherical lenses.

In addition, the subject is moved or moved, and the lighting means is more preferably using an impulse-type LED or a laser diode in conjunction with the movement of the subject being moved or moved.

In addition, it is more effective to include a light amount deviation corrector provided on the optical path between the subject and the image acquisition means to correct the light amount deviation of the illumination means.

On the other hand, the lighting means is provided on the rear of the subject or the image acquisition means to illuminate the subject, when the lighting means is provided in the image acquisition means, it is preferable that a reflecting plate is provided behind the subject.

Here, the lighting means is more effective to include an air-cooled or water-cooled cooling device for blocking the heat generated from the illumination source.

In this case, the cooling device preferably comprises at least one of an IR filter or a dichroic optical filter.

Alternatively, the cooling device is effectively a Peltier element.

In addition, it is preferable that at least one optical filter of an infrared cut filter, a polarization filter, a color filter, and a band pass filter is provided on the optical path between the subject and the image acquisition means.

On the other hand, it is effective to further include a standard specimen for calibrating the optical alignment relationship between the subject, the image acquisition means, and the mirror body and the focus correction lens on the same focal space plane.

Here, the standard specimen support for supporting the standard specimen on the same focal space plane, wherein the standard specimen support is detachably coupled to the same focal space plane, the position and the position disposed on the same focal space plane It is preferable to be provided so that a movement is possible between the positions which deviate on the same focal space plane.

In addition, the standard specimen support is effectively positioned on the same focal space plane manually or automatically.

In addition, the standard specimen is preferably formed with a pattern corresponding to the subject on a substrate of a transparent, translucent or opaque material.

At this time, the pattern of the standard specimen is obtained as an image to the image acquisition means, and the optical alignment relationship between the subject, the image acquisition means, the mirror body, and the focus correction lens by using a correlation between the image and the size of the pattern. It is effective to be able to calibrate and to calibrate image processing performance.

On the other hand, the mirror driver transmits an electrical detection signal for the rotation angle of the mirror body to the system controller, the system controller receives the electrical detection signal for the rotation angle of the mirror body to control the driving of the mirror driver. It is preferable to control the rotation angle of the mirror body.

And a mirror reflecting light detecting sensor for sensing light reflected from the mirror main body and a light irradiator for irradiating light onto the mirror main body, wherein the system controller is configured to perform the mirror driving unit based on a detection value transmitted from the mirror reflecting light detecting sensor. It is effective to control the rotation angle of the mirror body by controlling the driving of.

Further, the system controller acquires the light quantity and light quantity deviation according to the frequency, pulse time, driving voltage or current value of the lighting means, or the light quantity and light quantity deviation between the lighting means light sources as the image acquisition means, and then softwarely. It is preferable to adjust the amount of light and the amount of light deviation to adjust the amount of light and the amount of light deviation between the luminaire or the luminaire means, or to correct an image acquired by the image acquiring means that is distorted due to the amount of light and the amount of light deviation.

In addition, the system control unit beam splitting a part of the light irradiated from the lighting means to the light quantity and light quantity deviation according to the frequency, pulse time, driving voltage or current value of the lighting means, or the light quantity and light quantity deviation between the lighting means light source After measuring using an optical sensor, it is effective to adjust the amount of light and the amount of light deviation between the lighting means or the means of the light sources, or to correct the image acquired by the image acquiring means distorted due to the amount of light and the amount of light deviation.

In addition, the image processing unit preferably processes the spatiotemporal information of the size, trajectory, speed, and position of the subjects using the digital data.

In this case, it is effective that the image processing unit is embedded on the board based on a real-time OS.

The system controller may perform feedback control on the subject generation operation of the subject source, the rotation angle of the mirror, the driving of photographing the image acquisition means, the amount of light of the lighting means, the impulse time, and the impulse timing based on the digital data. It is preferable.

Thus, according to the present invention, there is provided a high speed optical observation system capable of observing a plurality of subjects at high speed and obtaining a clear observation image.

2 is a schematic diagram of a high speed optical observation system according to the present invention. As shown in these figures, the high-speed optical observation system 1 according to the present invention comprises: a subject source support 10 for supporting at least one subject source 11 generating at least one subject 5; Image acquisition means 20 for observing and photographing the subject 5 at a fixed position, and disposed between the subject 5 and the image acquisition means 20 in a fixed state of the subject 5 and the image acquisition means 20. A mirror 30 and a focus correcting lens 40 for transmitting the image of the subject 5 to the image acquisition means 20 through a change in the optical path, and lighting means 70 for applying a light amount to the subject 5; And driving the image processing unit 50 for processing the digital image photographed by the image acquisition means 20 as data, the subject source 11 and the image acquisition means 20, the mirror 30 and the lighting means 70. System control unit 60 for controlling the.

The subject source support unit 10 supports the subject sources 11 in a line in a predetermined length so that the subjects 5 can be located on the same focal space plane F, and if necessary, It may include a subject source alignment device 80 that can perform fine alignment to position the subject 5 in the same focal space plane (F) by performing a rotational movement about the / Y / Z axis and each axis. .

Here, the subjects 5 generated from each subject source 11 may be stopped or moved in the same focal space plane or moved with periodic temporal characteristics. When the subjects 5 to be observed are liquids such as ink droplets, It can be transparent, translucent, or opaque. In addition, the subjects 5 may be refracted, diffracted, reflected, or scattered with respect to light, and may be observed in a dark field or a bright field.

For example, when the subject source 11 is an inkjet head and the subject 5 is ink particles ejected from the inkjet head, the subject 5 may have a size of about 5 μm to 100 μm, and the ejection movement speed is about 1 m / s. May have 20 m / s. The subjects 5 to be observed at one time may vary from 1 to 200, and may have periodic movement characteristics in the range of approximately 100 Hz to 100 kHz.

Of course, the shape of the subject 5 is only one embodiment according to the present invention, and the size, movement speed, number, periodic time characteristics, and generation source of the subject 5 may be variable.

Then, the subject source alignment device 80 spatially moves or tilts the subject source 11 in order to position the subject 5 on the same focal space plane F recognized by the image acquisition means 20 which will be described later. As a device for performing this, the function of aligning at least one of the subjects 5 generated from the subject source 11 with the same focal space plane is performed. More specifically, the object source alignment device 80 moves the subject source 11 to X, Y, Z and the stage combined with the subject source support 10 in the rotational directions about the respective axes. Can move in the direction of rotation.

Here, the subject source alignment device 80 may use a general six-axis manual stage method, for example, a six-axis manual stage method for driving the stage in six axes by rotating a rod of a cylinder type imprinted with a thread of a certain pitch. Can be used. Of course, the object source alignment device 80 may use an automatic alignment device that drives a stage coupled to the object source 11 in six axes using a gear such as a worm gear or a bevel gear and a step motor. .

In addition, the driving of the object source alignment device 80 is driven by automatic operation by manipulation of a button or the like, by using a pre-programmed software, or in conjunction with a vision recognition system, so that the system control unit 60 controls the automatic control. Drive for alignment is possible. In this case, the subject source alignment apparatus 80 may be provided to independently move each subject source 11 in the six-axis direction.

The subject source aligning device 80 sets the subjects 5 generated from the subject source 11 so that they can be located at the same focal space plane F at the initial setting of the system. The subject 5 can be accurately photographed by the image acquiring means 20 while the acquiring means 20 is aligned.

The image acquisition means 20 is for observing and capturing images of the subjects 5, and a camera having a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) imaging device may be used.

Here, it is preferable to use a camera having an image pickup device capable of acquiring a high definition image of a high frame rate and high resolution of 30 frames / sec or more. In addition, according to the size of the subject 5, it is preferable to include a high magnification manual or automatic zoom lens having a magnification of 3 times or more, and may further include a doubler lens for magnification improvement. In addition, the camera may further include an aperture for adjusting the depth and the amount of light.

Preferably, a long focus high magnification lens may be used to arrange an optical filter and an optical component to be described later, including a mirror 30 or a focus correcting lens 40 in a camera, which is the subject 5 and the image acquisition means 20. have. In this case, the type and combination of the lens and the optical component may be variable, it is free to be modified as long as the gist of the present invention is not impaired.

In addition, the camera and the lens may include a zoom and auto focusing or manual focusing device for accurate focusing on the subject 5. At this time, for the best image quality, the optical depth of focus of the image acquisition means 20 with respect to the subject 5 is preferably at least two times or more the maximum length of the subject 5 to be observed.

The image acquisition means 20 may use a variety of image acquisition means 20 in addition to the CCD camera or CMOS camera within the range that can be obtained by observing and photographing the subject (5).

The mirror 30 is composed of a mirror body 31 for changing the optical path between the subject 5 and the image acquisition means 20, and a mirror driver 33 for driving the mirror body 31 to rotate.

As shown in FIG. 2, the mirror main body 31 may be provided as a polygon mirror having at least a plurality of mirror surfaces, but in some cases, as shown in FIG. 3, a mirror mirror having a single mirror surface may be provided. May be Here, the mirror driver 33 preferably uses a forward and reverse rotation motor such as a step motor capable of finely adjusting the rotation angle of the mirror body 31.

The mirror 30 serves to refract the optical path from the subject 5 toward the image acquisition means 20 while the rotation angle of the mirror body 31 is changed by driving the mirror driver 33. The object 5 to be observed can be imaged while the image acquisition means 20 and the subject source 11 are aligned.

At this time, the mirror driver 33 transmits an electrical detection signal for the rotation angle of the mirror body 31 to the system controller 60, so that the system controller 60 optimizes the rotation angle of the mirror body 31. The drive of 33 can be controlled.

The focus correcting lens 40 corrects the distance on the optical path between the image acquisition means 20 and the subject 5 changed by the mirror 30 to synchronize the focus on the subjects 5. As a result, the focus between at least one or more subjects 5 existing in the same focal space plane F as the camera, which is the image acquisition means 20, is corrected so that the image of the subjects 5 is the image acquisition means 20. Are correctly focused on.

Here, as shown in FIG. 2, the focus correction lens 40 preferably uses an F-theta aspherical lens. In some cases, as shown in FIG. 4, the configuration of the ultra-correction lens 40 is plural. The optical defects such as chromatic aberration and refractive aberration can be corrected by using a combination of aspherical or aspherical / spherical lenses. At this time, the configuration or structure of the focus correction lens 40 may be variously modified in a range capable of correcting the difference in the optical path between the image acquisition means 20 and the subject 5.

The luminaire 70 secures the brightness necessary for photographing an image acquisition device such as a camera by giving a sufficient amount of light to the subjects 5.

The luminaire 70 preferably uses an illumination device such as an impulse-type LED or a laser diode that is linked to the movement of the subject 5. The faster the movement speed of the subject 5 is, the higher the amount of light is required to obtain a clear image. And short impulses are required. Here, the condition of sufficient light quantity and short impulse means the amount of light and the impulse time that the subjects 5 most clearly form the image acquisition means 20 through experiments.

In addition, in order to supply sufficient light amount within the limited frame rate of the camera, it is preferable to select a light source having a high wavelength band and high instant illuminance for the imaging device of the camera within a range that does not affect the photosensitive sensitivity of the subject 5. . In this case, it is preferable that the dominant wavelength band of the luminaire 70 is selected as a wavelength for avoiding photo reaction with respect to the subject 50.

As shown in FIGS. 2 to 4, the luminaire 70 is integrally provided with the subject source support 10 to illuminate light to the subjects 5 generated from the subject sources 11 as a whole. Although not, the lighting means may be provided at the rear of the subjects 5 generated from the respective subject sources 11 to independently illuminate the light of each of the subjects 5 generated from the respective subject sources 11. . Alternatively, although not shown, the lighting means 70 may be provided to be movable to a position where the light can be illuminated on the subject 5 corresponding to the image recognition area of the image acquisition means 20.

Meanwhile, as shown in FIG. 5A, the luminaire 70 may be provided in the image acquisition unit 20 to illuminate the subject 5. In this case, the lighting means 70 may be provided with various flashes that can be detachably mounted to the image acquisition means 20, and although not shown, the lighting means 70 may be provided as a flash integrally integrated in the image acquisition means 20. have.

In this case, as shown in FIG. 5B, the lighting means 70 is preferably configured to be connected to the barrel of the camera, which is the image acquisition means 20, to illuminate the subject 5. Here, more preferably, the reflecting plate 75 is disposed on the rear surface of the subject 5 so that the light illuminated from the luminaire 70 connected to the barrel is reflected by the reflecting plate 75 to illuminate the subject 5. The image acquisition means 70 to obtain the image more effectively.

At this time, at least one of a collimator, a homogenizer, and a diffuser to correct a light amount deviation of the luminaire 70 on the optical path between the subject 5 and the image acquisition means 20. A light amount deviation corrector 90 may be disposed. Or, as shown in Figures 2a, 3 and 4, when the luminaire 70 is disposed on the back of the subject, the light amount deviation corrector (not shown) is disposed between the luminaire and the subject or coupled to the front of the luminaire Can be.

In addition, although not shown, the luminaire 70 may be provided at a position spaced apart from the subject 5 by a predetermined distance so as to indirectly illuminate the subject. In this case, in order to guide the light emitted from the lighting means 70 to the subject 5 according to the position of the lighting means 70, an illumination guide member having a refracted barrel structure having a prism and a reflecting plate or the like may be used.

In addition, the luminaire 70 may comprise a cooling device for shielding heat generated from the illumination source, which is not shown but IR on the optical path between the luminaire 70 and the subject 5. It is provided with at least one of a filter or a dichroic optical filter, or is provided with an air-cooled cooling device such as a cooling fan or a cooling fin, a water-cooled cooling device, or a Peltier element as a cooling device in the lighting device 70. Heat generated in 70) can be cooled. As a result, it is possible to effectively prevent the subject source 11 and the subject 5 from being deformed by the heat generated by the lighting means 70.

Meanwhile, the image processing unit 50 digitizes the images of the subjects 5 acquired by the camera, which is the image acquisition means 20, and uses the digitized image data to calculate the size, trajectory, speed, position and the like of the subjects 5. Process the same spatiotemporal information.

The image processing unit 50 may be composed of hardware and software such as a frame grabber or a computer, or may use a method that is processed at a very high speed through a real-time OS that is typically expressed through a board specialized for high speed image processing. have.

In addition, by processing the acquired image of the at least one subject (5), information on the size, speed, trajectory, state, etc. of the subject (5) on-image acquisition means 20 through a dedicated board equipped with a real-time OS The image processing unit 50 may be provided in various forms such as being boarded.

On the other hand, the high speed optical observation system 1 according to the present invention, as shown in Figure 6, by placing the optical filter 91 on the optical path formed between the object 5 and the image acquisition means 20 In addition, it is desirable to improve the optical characteristics of the subject 5 so that the image acquiring means 20 can obtain a higher quality image of a clearer, more accurate and desired shape.

In this case, the optical filter 91 may be any one of an infrared cut filter, a polarization filter, a color filter, a band pass filter, or a combination thereof. In addition, the optical filter 91 is preferably disposed in the optical path region between the focus correction lens 40 and the mirror 30, but in some cases, the optical filter 91 may be a subject. (5) between the optical path region between the focus correction lens 40, the optical path region between the focus correction lens 40 and the mirror 30, and the optical path region between the mirror 30 and the image acquisition means 20 It may be arranged in any one region, or may be arranged in combination in these regions.

On the other hand, although not shown, the high speed optical observation system 1 according to the present invention obtains a high quality image by disposing additional optical components on an optical path formed between the subject 5 and the image acquisition means 20. It is desirable to be able to.

In this case, the optical component may be provided as an expander, a collimator, a homogenizer, a diffuser, or a combination thereof.

In addition, the arrangement position of the optical component is preferably disposed in the optical path region between the focus correction lens 40 and the mirror 30, but in some cases, the optical path between the subject 5 and the focus correction lens 40. Area, the optical path area between the focus correcting lens 40 and the mirror 30, the optical path area between the mirror 30 and the image acquisition means 20, or a combination of these areas It may be.

On the other hand, the high-speed optical observation system 1 according to the present invention is disposed on the same focal space plane F of the subject 5, as shown in Fig. 7, the subject 5, the image acquisition means 20 and the mirror Standard specimen 95 for calibrating the optical alignment relationship between the 30 and the focus correction lens 40 may be further included.

In this case, the standard specimen 95 is supported by the standard specimen support 95a, and the standard specimen support 95a may be provided in a structure detachably installed in the same focal space plane F of the subject 5. . In addition, the standard specimen support 95a on which the standard specimen 95 is supported may be provided to be manually or automatically positioned on the same focal space plane F of the subject 5.

Here, the standard specimen 95 is preferably provided with a pattern 95b corresponding to the subject 5 formed on the substrate 95c of a transparent, translucent, or opaque material. The pattern 95b of the standard specimen 95 is obtained as an image on the image acquisition means 20, and the subject 5 is obtained by using the correlation between the image and the actual known size of the pattern 95b of the standard specimen 95. ) And the optical alignment relationship between the image acquisition means 20 and the mirror 30 and the focus correction lens 40 can be calibrated.

In addition, the performance of the image processing unit 50 may be calibrated using the pattern 95b of the standard specimen 95.

On the other hand, the system control unit 60 controls the driving of the image acquisition means 20, the mirror 30 and the lighting means 70 to optimize the shooting requirements such as the focusing position and the lighting state, so that the subjects 5 acquire the image acquisition means. 20 to be photographed.

To this end, the image acquisition means 20, the mirror 30 and the illumination means 70 may include a drive control module 98 such as a sensor for transmitting the driving state of each element to the system control unit 60, the system The control unit 60 receives and processes the signal transmitted from each driving control module 98 and based on this, the driving control of the image acquisition means 20, the driving angle control of the mirror 30, and the amount of light of the lighting means 70. Feedback control can be performed in an optimal state.

Here, the driving control module 98 may be provided with a mirror control module for transmitting the driving state of the mirror 30 to the system control unit 60, which is described above, the mirror driving unit 33 It may be a module provided by itself to transmit an electrical detection signal for the rotation angle of the mirror body 31 to the system controller 60.

Alternatively, although not shown, the mirror control module may be provided as a beam irradiator for scanning light to the mirror main body 31 and a mirror reflection light detecting sensor for sensing the light reflected from the mirror main body 31 and transmitting the light to the system controller 60. Can be. The system controller 60 may control the rotation angle of the mirror body 31 by driving the mirror driver 33 based on the sensing value detected by the mirror reflection light detecting sensor.

By the signal transmitted from the mirror control module, the system controller 60 can control the rotation angle of the mirror body 31 in an optimal state.

In addition, the driving control module 98 may be provided with a lighting control module for transmitting the driving state of the lighting means 70 to the system control unit 60, the lighting control module is a light amount emitted from the lighting means 70 It may be a module such as an optical sensor that measures and transmits a signal for the measured amount of light to the system controller 60.

Here, the light amount of the luminaire 70 may be generated according to the frequency, the pulse time, the driving voltage or the current value of the luminaire 70, and the light amount may be generated by an illumination control module such as an optical sensor as described above. Not only may be sensed and transmitted to the system controller 60, but also the amount of light is measured by software using the brightness information of the image obtained by the image acquisition means 20, and the system controller 60 of the lighting means 70 You can also adjust the amount of light.

At this time, the system controller 60 may correct the image distorted by the light amount and light amount deviation of the image acquired by the image acquisition means. Of course, as described above, the system controller 60 may detect and measure the light amount and light amount deviation of the lighting means 70 by using an optical sensor, and then adjust the light amount of the lighting means 70 and distort according to the light amount deviation. You can also correct the image.

In addition, the system controller 60 generates an object 5 of the object source 11 based on spatiotemporal information such as size, trajectory, speed, and position of the subjects 5 processed by the image processing unit 50. By feedback control, the spatio-temporal physical quantity such as the size, trajectory, speed, and position of the subjects 5 and the amount of light, impulse time, and impulse timing of the lighting means 70 may be feedback controlled. To this end, the subject source 11 may include a subject generation controller 15.

With this configuration, a method of observing a plurality of subjects 5 by the high speed optical observation system 1 according to the present invention will be described.

The subjects 5 generated from the subject sources 11 are periodically moved in the same focal space plane F at a predetermined movement distance. Here, the movement of the subjects 5 may mean that they are ejected from the subject source 11 and fall or discharge onto a predetermined plane.

At this time, the image acquisition means 20 is the optical path (A) formed through the focusing lens 40 and the rotation angle adjustment action of the mirror 30 by the control of the system control unit 60 in the position is aligned. By accurately focusing one region of the same focal space plane of the subjects 5 arranged in a line, the subjects 5 moving in the corresponding region are accurately photographed.

Then, the image acquisition means 20 is the optical path (A, converted through the focusing lens 40 and the rotation angle adjustment action of the mirror 30 by the control of the system control unit 60 in the position is aligned, Fast and accurate focusing of different regions of the same focal space plane of the subjects 5 arranged in a line through B and C accurately captures the subjects 5 moving in the corresponding regions.

The subjects 5 may be quickly and accurately photographed by the image acquisition means 20 at the position where the image acquisition means 20 and the subject source 11 are aligned while adjusting the rotation angle of the mirror 30.

Meanwhile, the images of the subjects 5 photographed by the image acquisition means 20 are processed into image data digitized by the image processing unit 50 to identify spatiotemporal information such as size, trajectory, speed, and position of the subjects 5. Can be.

In addition, if the system controller 60 controls the subject source 11 using the subject generation controller 15 based on the space-time information of the digitized subjects 5, the size, trajectory, speed, The spatiotemporal physical quantity such as position can be formed uniformly. In addition, the system controller 60 may control the amount of light, impulse time, impulse timing, and the like of the illumination source 70.

As described above, the high-speed optical observation system according to the present invention observes the subjects using the optical path changing action of the mirror and the focus correction lens while the subjects and the image acquisition means such as the camera are fixed, thereby accurately and rapidly subjecting the subjects. Observation can be taken and based on this, the subject source can be controlled to actively control the generation of the subjects.

According to a preferred embodiment of the high speed optical observation system presented in the present invention, the subject source 11 is an inkjet print head, and the subject 5 is ink droplets ejected from the nozzles of the inkjet print head, and is discharged from the nozzles. It may be an inkjet high speed monitoring system for observing ink droplets at high speed using the rotatable mirror 30 and the focus correction lens 40.

1 is a simplified perspective view of a conventional optical observation device,

2a is a simplified schematic diagram of a high speed optical observation system in accordance with the present invention;

2b is a control block diagram of a high speed optical observation system in accordance with the present invention;

3 to 7 is a simplified block diagram of a high speed optical observation system according to another embodiment of the present invention,

* Explanation of symbols for the main parts of the drawings

 5: Subject 10: Subject source support

11: subject source 20: image acquisition means

30 mirror 40 focus lens

50: image processing unit 60: system control unit

70: lighting means 80: subject source alignment device

Claims (26)

A high speed optical observation system for observing at least one subject, At least one subject source for generating the subject, A subject source support unit for aligning and supporting the subject sources in a line such that the subjects are positioned on the same focal space plane; Image acquisition means having an image pickup device for observing and photographing the subjects in an aligned position; A mirror installed between the subject and the image acquiring means to change a rotation angle; A focus correcting lens disposed between the subject and the mirror; An image processing unit for processing the image photographed by the image acquisition means into digital data; Illumination means for illuminating the subject, And a system controller for controlling the subject source, the image acquisition means, and the driving and illuminating means of the mirror. The method of claim 1, And a plurality of subjects, which are stationary or moving, or are generated periodically or quasi-periodic and are in motion, either statically or dynamically. The method of claim 1, And a subject source alignment device coupled to the subject source support to tilt the subject in X, Y, Z and rotational directions about each axis. The method of claim 1, And said image acquisition means is a camera having a CCD or a CMOS image pickup device. The method of claim 1, And said mirror has a mirror body consisting of a planar mirror having at least a single mirror surface, and a mirror driving portion for rotating said mirror body at a predetermined rotation angle. The method of claim 1, And said mirror has a mirror body consisting of a polygon mirror having at least a plurality of mirror surfaces, and a mirror driving portion for rotating said mirror body at a predetermined rotation angle. The method of claim 1, And said focus compensating lens is a single f-theta aspherical lens or said focus compensating lens is provided with a plurality of aspherical lenses or a combination of spherical and aspherical lenses. The method of claim 1, The subject is moved or moved, the illumination means is a high-speed optical observation system, characterized in that using an impulse-type LED or a laser diode linked to the movement of the movement or movement of the subject. The method according to claim 1 or 8, And a light amount deviation corrector provided on an optical path between the subject and the image acquisition means to correct a light amount deviation of the illumination means. The method according to claim 1 or 8, The lighting means is provided on the rear of the subject or the image acquisition means to illuminate the subject, And the reflecting plate is provided behind the subject when the lighting means is provided in the image acquisition means. The method of claim 1, And said luminaire comprises an air-cooled or water-cooled chiller to block heat generated from the illumination source. The method of claim 11, The cooling device comprises at least one of an IR filter or a dichroic optical filter. The method of claim 11, The cooling device is a high speed optical observation system, characterized in that the Peltier element. The method of claim 1, And at least one optical filter among an infrared cut filter, a polarization filter, a color filter, and a band pass filter is provided on the optical path between the subject and the image acquisition means. The method of claim 5, And a standard specimen for calibrating the optical alignment relationship between the subject, the image acquisition means, and the mirror body and the focus correction lens on the same focal space plane. The method of claim 15, A standard specimen support for supporting the standard specimen on the same focal space plane, The standard specimen support is detachably coupled to the same focal space plane, or is provided to be movable between a position disposed on the same focal space plane and a position deviated from the same focal space plane. system. The method of claim 16, And said standard specimen supporter is positioned manually or automatically on said coplanar space plane. The method according to any one of claims 15 to 17, The standard specimen is a high-speed optical observation system, characterized in that the pattern corresponding to the subject is formed on a substrate of a transparent, translucent or opaque material. The method of claim 18, The pattern of the standard specimen is obtained as an image to the image acquisition means, and the optical alignment relationship between the subject, the image acquisition means, the mirror body, and the focus correction lens is calibrated using the correlation between the image and the size of the pattern. And calibrate image processing performance. The method of claim 5, The mirror driver transmits an electrical detection signal for a rotation angle of the mirror body to the system controller. The system controller receives the electrical detection signal for the rotation angle of the mirror body to control the driving angle of the mirror driving unit to control the rotation angle of the mirror body. The method of claim 5, It includes a light irradiator for irradiating light to the mirror body and a mirror reflection light sensor for sensing the light reflected from the mirror body, The system control unit is a high-speed optical observation system, characterized in that for controlling the rotation angle of the mirror body by controlling the drive of the mirror driving unit based on the detection value transmitted from the mirror reflection light detecting sensor. The method of claim 1, The system control unit acquires the light quantity and light quantity deviation according to the frequency, pulse time, driving voltage or current value of the lighting means, or the light quantity and light quantity deviation between the lighting means light sources as the image acquisition means, A high-speed optical observation system characterized by measuring the amount of light deviation to adjust the amount of light and the amount of light deviation between the luminaire or the light source sources, or to correct the image obtained by the image acquisition means distorted due to the amount of light and the amount of light deviation . According to the first, The system controller beam splits a part of the light irradiated from the luminaire, and uses the optical sensor to detect the amount of light and the amount of light, or the amount of light and the amount of light between the luminaires, depending on the frequency, pulse time, driving voltage or current value of the luminaire. High-speed optical, characterized in that after the measurement by using, to adjust the amount of light and the amount of light deviation between the luminaire or the light source, or to correct the image obtained by the image acquisition means is distorted due to the amount of light and the amount of light deviation Observation system. The method of claim 1, And the image processing unit processes the spatiotemporal information of the size, trajectory, velocity, and position of the subjects using the digital data. The method of claim 24, The image processing unit is embedded on the board based on the real-time OS on the high-speed optical observation system, characterized in that the onboard. The method of claim 1, The system controller may perform feedback control on the subject generation operation of the subject source, the rotation angle of the mirror, the photographing driving of the image acquisition means, the light amount of the luminaire, the impulse time, and the impulse timing based on the digital data. High speed optical observation system.

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