KR20090032291A - Apparatus and method of producting carbon nano tube - Google Patents

Abstract

An apparatus for manufacturing carbon nanotube is provided to induce metal catalyst settled in a dispersion plate to the inside of a distributing hole by changing the distributing hole and level a metal catalyst layer of the dispersion plate using a guide unit. An apparatus for manufacturing carbon nanotube comprises the following units. A reactor(110) supplies a space for a reaction of generating carbon nanotube by a source gas for floating metal catalyst. A dispersion plate(140) having a plurality of distributing holes(141) distributes the source gas uniformly. A guide unit(170) changes location of the dispersion plate by flowing metal catalyst particles settled in the dispersion plate. The guide unit includes a magnetic body(171) located in a lower part of the dispersion plate and a location changer for flowing the metal catalyst particles by changing relative interval between the magnetic body and the dispersion plate.

Description

Carbon nanotube manufacturing apparatus and method thereof {APPARATUS AND METHOD OF PRODUCTING CARBON NANO TUBE}

The present invention relates to a carbon nanotube manufacturing apparatus and a method thereof, and more particularly, to a carbon nanotube manufacturing apparatus and method for producing carbon nanotubes by flowing metal catalyst particles.

Carbon nanotubes (CNTs) are three adjacent carbon atoms joined together in a hexagonal honeycomb pattern to form a carbon plane and the carbon plane is rolled into a cylindrical shape to form a tube.

Carbon nanotubes exhibit metallic or semiconducting conductivity depending on their structure, and can be widely applied in various technical fields. For example, carbon nanotubes are applicable to electrodes of electrochemical storage devices such as secondary batteries, fuel cells or supercapacitors, electromagnetic shielding, field emission displays, or gas sensors.

Carbon nanotubes are produced by dispersing and reacting metal catalyst particles with a hydrocarbon-based source gas in a high temperature reactor. Specifically, the apparatus for producing carbon nanotubes includes a reactor and a dispersion plate provided in the reactor to disperse the source gas of the carbon component.

Looking at the process of producing carbon nanotubes in the reactor, first, a metal catalyst is provided to the reactor is loaded on the dispersion plate. The source gas flows into the lower portion of the distribution plate and is dispersed to the upper portion of the distribution plate through the distribution holes formed in the distribution plate. The metal catalyst reacts with the source gas to grow carbon nanotubes while floating in the reactor by the source gas provided through the dispersion holes.

However, since the metal catalyst particles located between two adjacent dispersion holes are difficult to receive the source gas, they remain on the dispersion plate. In addition, metal catalyst particles having a size of about 0.6 μm to 45 μm are difficult to be suspended by the source gas, and metal catalyst particles having a shape other than spherical shape have higher friction force than spherical particles, and thus remain in the dispersion plate. easy to do.

In this way, the metal catalyst particles remaining on the dispersion plate are agglomerated by heat and adhered to the dispersion plate, and a separate operation of removing the metal catalyst particles is required. For this reason, a metal catalyst is lost and productivity falls.

An object of the present invention to provide a carbon nanotube manufacturing apparatus that can prevent the loss of the metal catalyst.

It is also an object of the present invention to provide a method for producing carbon nanotubes using the carbon nanotube manufacturing apparatus described above.

Carbon nanotube manufacturing apparatus according to one feature for realizing the above object of the present invention comprises a reactor, a dispersion plate and a guide unit.

The reactor provides a reaction space in which the metal catalyst is suspended by the source gas to produce carbon nanotubes. The dispersion plate is provided in the reaction space and has a plurality of distribution holes for uniformly dispersing the source gas. The guide unit moves the metal catalyst particles seated on the dispersion plate to change its position on the dispersion plate.

Specifically, the guide unit is provided in the lower portion of the dispersion plate and provided with a magnetic material having a magnetic force.

In addition, the guide unit may further include a position changer for changing the relative position between the magnetic body and the dispersion plate to flow the metal catalyst particles seated on the upper surface of the dispersion plate. Here, the magnetic body has a rod shape, and the position change unit rotates the magnetic body.

In addition, the magnetic material may be made of an electromagnet.

On the other hand, the guide unit may be made of a vibration member for vibrating the dispersion plate to flow the metal catalyst particles seated on the dispersion plate. The vibration member generates sound waves to vibrate the dispersion plate.

In addition, the carbon nanotube manufacturing apparatus according to another feature for achieving the above object of the present invention includes a reactor and a dispersion plate.

The reactor provides a reaction space in which the metal catalyst is suspended by the source gas to produce carbon nanotubes. The dispersion plate is provided in the reaction space and has a plurality of distribution holes for uniformly dispersing the source gas. The dispersion hole guides the metal catalyst particles deposited on the dispersion plate toward the lower surface of the dispersion plate.

Specifically, the dispersion hole has a wider width gradually from the lower surface of the distribution plate toward the upper surface of the distribution plate.

In addition, the carbon nanotube manufacturing apparatus may further include a guide unit for changing the position on the dispersion plate by moving the metal catalyst particles seated on the dispersion plate.

In addition, the carbon nanotube manufacturing method according to one feature for realizing the above object of the present invention is as follows. First, a metal catalyst is provided to a reactor to load the metal catalyst on a dispersion plate provided in the reactor. The position of the metal catalyst particles seated on the dispersion plate is changed. The source gas is supplied to the reactor, dispersed through the dispersion holes, and the metal catalyst is suspended by the source gas to generate carbon nanotubes.

The process of changing the position of the metal catalyst particles is performed by disposing a magnetic material having magnetic force under the dispersion plate and moving the metal catalyst particles seated on the dispersion plate by using the magnetic force of the magnetic material.

In addition, the process of changing the position of the metal catalyst particles, may be made through the process of flowing the metal catalyst particles seated on the dispersion plate by vibrating the dispersion plate.

According to the present invention, the carbon nanotube manufacturing apparatus guides the metal catalyst particles seated on the dispersion plate into the dispersion holes by changing the dispersion holes. In addition, the carbon nanotube manufacturing apparatus flattens the metal catalyst layer on the dispersion plate using a guide unit, and moves the metal catalyst particles deposited on the dispersion plate into the dispersion hole.

Accordingly, the carbon nanotube manufacturing apparatus can prevent adhesion of the dispersion plate of the metal catalyst, reduce the loss of the metal catalyst, improve productivity, and reduce the manufacturing cost.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

1 is a view showing a carbon nanotube manufacturing apparatus according to an embodiment of the present invention, Figure 2 is a plan view showing a dispersion plate shown in Figure 1, Figure 3 is a cut line I-I 'of FIG. It is a cross section.

Referring to FIG. 1, the apparatus for manufacturing carbon nanotubes (CNTs) according to the present invention 101 includes a reactor 110, a catalyst supply nozzle 120, a gas supply unit 130, a dispersion plate 140, and heating. The unit 150, and the recovery line 160.

In detail, the reactor 110 includes a body 111 and a cover 112. The body portion 111 has a cylindrical shape with an upper surface opened, and the body portion 111 is made of a metal material having high strength and heat resistance, for example, stainless steel.

The body part 111 may include a preliminary space PS into which the source gas SG is introduced, and a reaction space RS positioned at an upper portion of the preliminary space PS to substantially generate carbon nanotubes CNT. to provide.

The cover part 112 is provided on an upper portion of the body part 111, and the cover part 112 is coupled to the body part 111 to seal the body part 111. An exhaust port 112a for discharging the exhaust gas EG formed in the process of generating the carbon nanotubes CNT is formed at the center of the cover part 112. The exhaust port 112a is connected to an external exhaust device (not shown) to provide the exhaust gas EG to the exhaust device.

The body part 111 is connected to the catalyst supply nozzle 120 for providing the metal catalyst MC. The output end of the catalyst supply nozzle 120 is provided in the reaction space RS through the side wall of the body 111, and provides the metal catalyst MC to the reactor 110. As the metal catalyst MC, an organometallic compound having magnetic properties, such as iron (Fe), cobalt, nickel, or the like is used.

On the other hand, the gas supply unit 130 provides the source gas (SG) to the reactor (110). That is, the output end of the gas supply unit 130 is located in the preliminary space PS through the side wall of the body portion 1110 and includes a plurality of injection nozzles 131 for injecting the source gas SG. The plurality of injection nozzles 131 are provided below the dispersion plate 140, and provide the source gas SG to the dispersion plate 140. Gases such as acetylene, ethylene, methane, hydrogen gas and the like are used.

1 and 2, the dispersion plate 140 is positioned at a boundary between the reaction space RS and the preliminary space PS and faces the bottom surface of the body part 111. In one example of the present invention, the dispersion plate 140 has a circular shape, but the shape of the dispersion plate 140 may be changed according to the shape of the body portion 111.

A plurality of distribution holes 141 are formed in the dispersion plate 140 to disperse the source gas SG provided from the injection nozzles 131 in the reaction space RS. The source gas SG injected from the injection nozzles 131 is uniformly dispersed through the distribution holes 141 and flows into the reaction space RS. The metal catalyst MC introduced into the upper portion of the dispersion plate 140 may be connected to the reaction space RS by the source gas SG introduced into the reaction space RS through the distribution holes 141. At the same time, the carbon nanotube (CNT) is generated by reacting with the source gas (SG).

As such, since the carbon nanotubes (CNT) are generated while the metal catalyst (MC) is suspended in the reaction space (RS), as the floating of the metal catalyst (MC) is activated, the carbon nanotubes (CNT) Growth is activated.

1 and 3, each of the dispersion holes 141 gradually increases in diameter from the lower surface 142 of the dispersion plate 140 to the upper surface 143, and the surface defining each dispersion hole is It consists of a slope. Accordingly, each of the dispersion holes has a larger diameter D2 corresponding to the upper surface 143 than the diameter D1 corresponding to the lower surface 142 of the distribution plate 140.

As described above, each of the dispersion holes 141 is formed to have a wider width toward the upper surface 143 of the dispersion plate 140. Therefore, the dispersion plates 140 may include metal catalyst particles seated on the dispersion plate 140. Guides toward the lower surface 142. Accordingly, the fine particles of about 0.6 μm to about 45 μm of the metal catalyst MC mounted on the dispersion plate 140 also move toward the bottom surface 142 of the dispersion plate 140 along the inclined surface defining each dispersion hole. Induced. The metal catalyst particles guided to the lower surface 142 of the dispersion plate 140 are suspended in the reaction space RG by the source gas SG introduced from the lower portion of the dispersion plate 140.

In addition, the dispersion plate 140 may minimize the area of the upper surface 143 than the area of the lower surface 142, thereby minimizing the amount of metal catalyst particles seated on the upper surface 143 of the dispersion plate 140. Can be.

As described above, the carbon nanotube manufacturing apparatus 101 reduces the metal catalyst remaining in the dispersion plate 140, thereby preventing the metal catalyst MC from agglomerating on the dispersion plate 140 and enabling the use thereof. The particle size of the metal catalyst can be minimized. Accordingly, the carbon nanotube manufacturing apparatus 101 can improve the yield and productivity of the product and the purity of the carbon nanotubes (CNT), and can reduce the manufacturing cost.

On the other hand, the carbon nanotube manufacturing apparatus 101 further includes a guide unit 170 for flowing a metal catalyst seated on the dispersion plate 140.

4 is a plan view illustrating the guide unit illustrated in FIG. 1, and FIG. 5 is a plan view illustrating another example of the magnetic body illustrated in FIG. 4.

1 and 4, the guide unit 170 is provided in the preliminary space PS to planarize the metal catalyst layer loaded on the dispersion plate 140 using a magnetic force, and the dispersion plate 140. ), The metal catalyst particles are moved to the adjacent dispersion hole side.

In detail, the guide unit 170 includes a magnetic body 171 provided below the dispersion plate 140 and a rotation motor 172 provided below the magnetic body 171.

In one example of the present invention, the magnetic body 171 has a rod shape, but as shown in FIG. 5, the magnetic body 173 may be formed in a disc shape.

In addition, in this embodiment, the magnetic body 171 has a length close to the diameter of the dispersion plate 140, but may have a length close to the radius of the dispersion plate 140, the magnetic body 171 of the The length may be changed according to the magnetic force of the magnetic body 171.

The magnetic body 171 is rotated by the rotational force of the rotary motor 172 to move the metal catalyst particles seated on the dispersion plate 140 into the distribution holes 141. That is, since the metal catalyst particles seated on the dispersion plate 140 have magnetic properties, the metal catalyst particles move into the adjacent dispersion holes by the magnetic force and rotation of the magnetic body 171. In particular, since the particles having a shape other than the spherical shape of the metal catalyst particles have a large friction force, it is difficult to flow them when seated on the dispersion plate 140. However, since the guide unit 170 flows the metal catalyst particles by using the magnetic force, particles having a shape other than spherical shape can be easily moved into the dispersion hole.

Accordingly, the carbon nanotube manufacturing apparatus 101 can prevent the metal catalyst (MC) from remaining in the dispersion plate 140, the yield and productivity of the product and the purity of the carbon nanotubes (CNT) It can improve the manufacturing cost and reduce the manufacturing cost.

The magnetic bodies 171 and 173 of the guide unit 170 illustrated in FIGS. 4 and 5 may be made of permanent magnets, but the guide unit 170 may be made of electromagnets.

6A and 6B are cross-sectional views illustrating another example of the guide unit illustrated in FIG. 4.

Referring to FIG. 6A, the guide unit 181 according to another example of the present invention includes a sound wave generator 181. The sound wave generator 181 is disposed below the dispersion plate 140, and generates a sound wave SW to change positions of metal catalyst particles seated on the dispersion plate 140. That is, the sound wave generator 181 generates the sound wave SW and vibrates the dispersion plate 140 using the sound wave SW. The metal catalyst particles seated on the dispersion plate 140 move into adjacent dispersion holes by the vibration of the dispersion plate 140.

 Although not shown in FIG. 6A, the injection nozzles 131 (see FIG. 1) of the gas supply unit 130 are positioned between the sound wave generator 181 and the distribution plate 140.

Referring to FIG. 6B, the guide unit 182 according to another example of the present invention includes a vibrator 182. The vibration generator 182 is connected to the distribution plate 140 and vibrates the distribution plate 140 by applying a physical force to the distribution plate 140. The metal catalyst particles seated on the dispersion plate 140 are changed in position in the dispersion plate 140 by the vibration of the dispersion plate 140.

Again, referring to FIG. 1, the heating unit 150 is provided outside the reactor 110. The heating part 150 is located on the sidewall of the body part 111 and heats the body part 111 to activate the growth of the carbon nanotubes (CNT) in the temperature of the reaction space (RS). Rise and maintain at an appropriate temperature.

When the production of the carbon nanotubes (CNT) is completed, the metal catalyst on which the carbon nanotubes (CNTs) are grown is discharged to the outside through the recovery line 160. The recovery line 160 has an input terminal penetrating the side wall of the body portion 111 is provided in the reaction space (RS), and the carbon nanotube collecting device outside the metal catalyst on which the carbon nanotubes (CNT) are grown (Not shown).

Hereinafter, a method of manufacturing the carbon nanotubes (CNT) will be described in detail with reference to the accompanying drawings.

FIG. 7 is a view illustrating a process of generating carbon nanotubes in the carbon nanotube manufacturing apparatus illustrated in FIG. 1, and FIGS. 8A and 8B illustrate metal catalyst particles seated on an upper surface of the dispersion plate illustrated in FIG. 7. It is a diagram showing a process performed. 8A and 8B omit the gas supply unit 130 in order to clearly show the relationship between the dispersion plate 140 and the guide unit 170.

Referring to FIG. 7, first, the heating unit 150 is driven to heat the reactor 110, and the temperature of the reaction space RS is raised and maintained at an appropriate temperature, for example, about 600 degrees Celsius or more. Let's do it.

The catalyst supply nozzle 120 provides the metal catalyst MC to the reaction space RS, and the metal catalyst MC introduced into the reaction space RS is loaded into the dispersion plate 140.

7 and 8A, the metal catalyst particles MCP loaded on the dispersion plate 140 are guided into the dispersion hole as much as possible by the inclined surface defining the dispersion hole. That is, the dispersion holes 141 formed in the dispersion plate 140 are gradually wider in diameter from the lower surface 142 to the upper surface 143 of the dispersion plate 140. Accordingly, when the metal catalyst MC is seated on the dispersion plate 140, the metal catalyst particles MCP may be formed along the inclined surfaces defining the dispersion holes 141. It moves to the lower surface 142 side.

The injection nozzles 131 of the gas supply unit 130 inject the source gas SG into the distribution plate 140, and the source gas SG is the distribution holes 141 of the distribution plate 140. Through the reaction space (RS).

When the source gas SG is introduced through the dispersion holes 141, the metal catalyst particles MCP positioned in the dispersion holes 141 may be formed by the reaction gas RS by the source gas SG. To float).

As such, the dispersion plate 140 moves the metal catalyst particles seated in the dispersion plate 140 to the dispersion holes 141 as much as possible, thereby improving the floating rate of the metal catalyst MC, and The loss of the catalyst MC is prevented.

On the other hand, the carbon nanotube manufacturing method further comprises the step of moving the metal catalyst particles (MCP) seated on the dispersion plate 140 into the dispersion holes (141). Hereinafter, a process of guiding the metal catalyst particles MCP seated on the dispersion plate 140 to an adjacent dispersion hole will be described in detail with reference to the accompanying drawings.

As shown in FIG. 8A, when the metal catalyst MC flows into the reaction space RS, the metal catalyst particles MCP are loaded on the dispersion plate 140 to form a metal catalyst layer MCL. do. In this case, the metal catalyst layer (MCL) is formed non-uniformly on the dispersion plate 140.

Referring to FIGS. 7 and 8B, the guide unit 170 may planarize the metal catalyst layer MCL formed non-uniformly using magnetic force. Specifically, first, the rotary motor 172 provided below the dispersion plate 140 is driven, and the magnetic body 171 connected to the rotary motor 172 is rotated by the rotational force of the rotary motor 172. do.

Particles MCP of the metal binding layer MCL move along the moving direction of the magnetic body 171 by the magnetic force of the magnetic body 171, and the position on the dispersion plate 140 is changed. Accordingly, the metal catalyst layer MCL is planarized.

The planarized metal catalyst layer MCL receives the source gas SG through the dispersion holes 141 of the dispersion plate 140, and the metal catalyst particles MCP are suspended.

As described above, the guide unit 170 moves the metal catalyst particles seated on the dispersion plate 140 toward the adjacent dispersion hole and guides the lower surface 142 of the dispersion plate 140. Accordingly, the carbon nanotube manufacturing apparatus 101 may improve the floating rate of the metal catalyst MC.

Meanwhile, the metal catalyst particles positioned between two adjacent dispersion holes may not be affected by the source gas SG introduced from the dispersion holes, and thus may remain on the dispersion plate 140.

The remaining metal catalyst particles are moved into the adjacent dispersion holes by the magnetic force and the rotational motion of the magnetic body 171. Accordingly, the carbon nanotube manufacturing apparatus 101 prevents the metal catalyst particles MCP from remaining on the dispersion plate 140 and improves the floating rate of the metal catalyst MC.

As such, the carbon nanotube manufacturing apparatus 101 changes the position of the metal catalyst particles (MCP) located in the dispersion plate 141 by using a physical force, so that the fine particles of about 0.6 μm to about 45 μm are used. Metal catalyst particles can also move into the dispersion holes. Accordingly, the carbon nanotube manufacturing apparatus 101 can reduce the minimum size of available metal catalyst particles and improve the productivity and purity of the carbon nanotubes (CNT).

Meanwhile, the metal catalyst particles MCP are thermally decomposed with the source gas SG while floating the reaction space RS by the source gas SG to generate the carbon nanotubes CNTs. The source gas SG introduced into the reaction space RS rises along the central portion of the reaction space RS and moves toward the side wall of the body portion 111 and along the side wall of the body portion 111. Descend.

When the production of the carbon nanotubes (CNT) is completed, the recovery line 160 sucks the metal catalyst particles in which the carbon nanotubes (CNT) are grown and provides them to the carbon nanotube collecting device.

9 is a view showing a carbon nanotube manufacturing apparatus according to another embodiment of the present invention.

Referring to FIG. 9, the carbon nanotube manufacturing apparatus 102 according to the present invention has the same configuration as the carbon nanotube manufacturing apparatus 101 shown in FIG. 1 except for the dispersion plate 190. Therefore, in the detailed description of the configuration of the carbon nanotube manufacturing apparatus 102, the same configuration as the carbon nanotube manufacturing apparatus 101 shown in FIG. do.

The carbon nanotube manufacturing apparatus 102 includes a reactor 110, a catalyst supply nozzle 120, a gas supply unit 130, a dispersion plate 190, a heating unit 150, a recovery line 160, and a guide unit ( 170).

Specifically, the reactor 110 is a preliminary space PS into which the source gas SG is introduced, and a reaction space RS positioned above the preliminary space PS to substantially generate carbon nanotubes CNTs. ).

The reactor 110 receives the metal catalyst MC from the catalyst supply nozzle 120, and receives the source gas SG from the gas supply unit 130.

The heating unit 150 heats the reactor 110 to increase the temperature of the reaction space RS, and the dispersion plate 190 disperses the source gas SG in the reaction space RS. .

In detail, the dispersion plate 190 has a disc shape and is positioned above the dispersion nozzles 131 of the gas supply unit 130. A plurality of distribution holes 191 are formed in the dispersion plate 190 to disperse the source gas SG from the dispersion nozzles 131. Here, each of the dispersion holes 191 has a uniform diameter. Therefore, the dispersion hole has a diameter corresponding to a lower surface of the distribution plate 190 and a diameter corresponding to an upper surface of the distribution plate 190.

The guide unit 170 disposed below the dispersion plate 190 changes the position of the metal catalyst particles seated on the dispersion plate 190. In detail, the guide unit 170 includes a magnetic body 171 and a rotating motor 172, and flows the metal catalyst particles seated on the dispersion plate 190 using the magnetic force of the magnetic body 171.

Accordingly, the guide unit 170 may flatten the metal catalyst layer formed on the dispersion plate 190 and guide the metal catalyst particles remaining in the dispersion plate 190 into adjacent dispersion holes. Accordingly, the carbon nanotube manufacturing apparatus 102 prevents the metal catalyst particles from remaining in the dispersion plate 190 and aggregates, prevents loss of the metal catalyst MC, improves productivity, and Improve yields and reduce manufacturing costs.

In one example of the present invention, the guide unit 170 includes a magnetic body 171 made of a permanent magnet, but the guide unit 170 may be made of an electromagnet.

In addition, as an example of the present invention, the carbon nanotube manufacturing apparatus 102 is provided with a guide unit 170 for changing the position of the metal catalyst particles using a magnetic force, the carbon nanotube manufacturing apparatus 102 is The guide units 181 and 182 shown in FIGS. 6A and 6B may be provided.

Although described with reference to the embodiments above, those skilled in the art will understand that the present invention can be variously modified and changed without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

1 is a view showing a carbon nanotube manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view illustrating the dispersion plate illustrated in FIG. 1.

3 is a cross-sectional view taken along the line II ′ of FIG. 2.

4 is a plan view illustrating the guide unit illustrated in FIG. 1.

5 is a plan view illustrating another example of the magnetic body illustrated in FIG. 4.

6A and 6B are cross-sectional views illustrating another example of the guide unit illustrated in FIG. 4.

7 is a view showing a process of producing carbon nanotubes in the carbon nanotube manufacturing apparatus shown in FIG.

8A and 8B illustrate a process of guiding metal catalyst particles seated on an upper surface of the dispersion plate illustrated in FIG. 7.

9 is a view showing a carbon nanotube manufacturing apparatus according to another embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

101, 102: carbon nanotube manufacturing apparatus 110: reactor

120: catalyst supply nozzle 130: gas supply unit

140: dispersion plate 150: heating unit

160: recovery line 170, 180: guide unit

171, 173: magnetic body 172: rotating motor

Claims (15)

A reactor providing a reaction space for producing carbon nanotubes while the metal catalyst is suspended by the source gas; A dispersion plate provided in the reaction space and having a plurality of dispersion holes for uniformly dispersing the source gas; And Carbon nanotube manufacturing apparatus comprising a guide unit for changing the position in the dispersion plate by flowing the metal catalyst particles seated on the dispersion plate. The method of claim 1, wherein the guide unit, Carbon nanotube manufacturing apparatus, characterized in that provided in the lower portion of the dispersion plate, and comprising a magnetic material having a magnetic force. The method of claim 2, wherein the guide unit, Carbon nanotube manufacturing apparatus characterized in that it further comprises a position changing unit for flowing the metal catalyst particles seated on the upper surface of the dispersion plate by changing the relative position between the magnetic body and the dispersion plate. The apparatus of claim 3, wherein the magnetic material has a rod shape, and the position change unit rotates the magnetic material. According to claim 2, wherein the magnetic material is carbon nanotube manufacturing apparatus, characterized in that the electromagnet. The method of claim 1, wherein the guide unit, And a vibrating member for vibrating the dispersion plate to flow the metal catalyst particles seated on the dispersion plate. The apparatus of claim 6, wherein the vibration member vibrates the dispersion plate by generating sound waves. The apparatus of claim 1, wherein the guide unit is provided in the reactor. A reactor providing a reaction space for producing carbon nanotubes while the metal catalyst is suspended by the source gas; And A dispersion plate provided in the reaction space and having a plurality of dispersion holes for uniformly dispersing the source gas, The dispersion hole is a carbon nanotube manufacturing apparatus, characterized in that to guide the metal catalyst particles seated on the dispersion plate toward the lower surface of the dispersion plate. The apparatus of claim 9, wherein the dispersion holes have a wider width from a lower surface of the dispersion plate toward an upper surface of the distribution plate. The method of claim 9, Carbon nanotube manufacturing apparatus, characterized in that it further comprises a guide unit for changing the position in the dispersion plate by moving the metal catalyst particles seated on the dispersion plate. Providing a metal catalyst to a reactor to load the metal catalyst on a dispersion plate provided in the reactor; Changing the position of the metal catalyst particles seated on the dispersion plate; Distributing source gas to the reactor through the distribution holes; And And producing carbon nanotubes by floating the metal catalyst by the source gas. The method of claim 12, wherein the dispersion hole is carbon nanotube manufacturing method characterized in that the width is gradually formed from the lower surface of the dispersion plate toward the upper surface. The method of claim 13, wherein changing the position of the metal catalyst particles, Disposing a magnetic material having magnetic force under the dispersion plate; And Carbon nanotube manufacturing method comprising the step of flowing the metal catalyst particles seated on the dispersion plate by using the magnetic force of the magnetic material. The method of claim 13, wherein changing the position of the metal catalyst particles, The method of manufacturing a carbon nanotubes, characterized in that for flowing the metal catalyst particles mounted on the dispersion plate by vibrating the dispersion plate.

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