KR20080073310A - Process information managing device and program - Google Patents

Abstract

[PROBLEMS] The conventional process information managing device has a problem that a user cannot judge whether contents of a plenty of recipe in a plenty of control devices are identical by looking at them all at once. [MEANS FOR SOLVING PROBLEMS] A process information managing device contains two or more recipe as information on a process held by two or more control devices controlling two or more processing devices performing a predetermined process on a substrate to be processed while correlating the recipe to the two or more control devices and contains a master recipe as a reference recipe. The device acquires difference information as information on a difference between the master recipe and the two or more recipe for each of the two or more recipe, outputs the acquired difference information for each of the two or more recipe, and does not output information on a step difference as contents of the two or more recipe. Thus, a user can view whether contents of a plenty of recipe in a plenty of control devices are identical all at once.

Description

Process information management apparatus and program {PROCESS INFORMATION MANAGING DEVICE AND PROGRAM}

TECHNICAL FIELD This invention relates to the process information management apparatus which manages process information which is information regarding control with respect to processing apparatuses, such as a semiconductor manufacturing apparatus and a liquid crystal panel manufacturing apparatus, for example.

Background Art Conventionally, there has been a control system that can control a plurality of processing apparatuses for processing a substrate to be processed, such as a semiconductor wafer, under unitary management, and can improve the maintainability of the entire manufacturing system (see Patent Document 1). ). This control system is capable of centralized management of recipes (process conditions) for each processing device and process control of each processing device based on the recipe. In addition, the control system performs an analysis process on all the process data obtained from each processing apparatus, performs an intensive monitoring process of the analysis result or process data, and further, a process of reflecting the analysis / statistics result in the recipe, and the like. Group controller). In this control system, by monitoring all the process data obtained from each processing apparatus and the analysis result thereof, abnormality or deterioration state of a processing apparatus can be detected more early and early.

Moreover, in the commercial process information management apparatus (for example, the server apparatus which comprises the group management system which manages the process of several semiconductor manufacturing apparatuses), whether each step among one or more steps which comprise two recipes is the same. There was a function to indicate whether it was different.

In recent years, due to the large scale of production systems such as semiconductor wafers and liquid crystal panels, there has been a demand for unity management of a large number of processing apparatuses that perform processing (processes) such as film formation, etching, and thermal oxidation treatment on a substrate to be processed. Is getting higher. Specifically, for example, there is a need to unitarily manage a number of processing devices and control devices of several tens.

[Patent Document 1] Japanese Patent Application Laid-Open No. 11-16797 (first page, FIG. 1, etc.)

(Initiation of invention)

(Tasks to be solved by the invention)

On the other hand, in order to properly operate the processing apparatus, on the side of the process information management apparatus included in the control system, it is necessary to check the difference between the recipe that is guaranteed to some extent and the other recipe.

However, in the conventional apparatus, when presenting the difference between the master recipe and other recipes, it is only possible to display in detail whether each step among one or more steps constituting the two recipes is the same or different. The user could not overview at a time whether the and two or more recipes (usually several dozens of recipes) were the same or different.

Therefore, it takes a considerable amount of time to find out whether the contents of a plurality of recipes of a plurality of control devices are the same, so that the user may cause a recognition error.

(Means to solve the task)

The process information management apparatus of the present invention comprises two or more recipes, which are information on processes held by two or more control apparatuses that respectively control two or more processing apparatuses that perform a predetermined process on a substrate to be processed. Are stored in association with each other, and contain a recipe storage unit that stores a master recipe, which is a reference recipe, and movement information that is information about the movement of the master recipe and the two or more recipes. It is a process information management apparatus provided with the recipe movement information acquisition part acquired every time, and the movement information output part which outputs the movement information acquired by the said recipe movement information acquisition part for every said 2 or more recipes.

1 is a conceptual diagram of a control system in an embodiment.

2 is a diagram illustrating an example of the same semiconductor wafer manufacturing apparatus.

3 is a block diagram showing a configuration of a process information management apparatus.

4 is a flowchart for explaining the operation of the process information management apparatus.

5 is a flowchart for explaining the movement information output process.

6 is a flowchart for describing the detailed output process.

7 is a conceptual diagram of the control system.

8 is a diagram illustrating the recipe management table.

Fig. 9 is a diagram showing the control device information management table.

Fig. 10 is a diagram showing the user authentication information management table.

Fig. 11 is a diagram showing the process information management apparatus.

Fig. 12 shows the recipe management table.

Fig. 13 is a diagram showing an example of the output.

14 is a diagram illustrating an example of the output.

(The best form to carry out invention)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of a process information management apparatus etc. is demonstrated with reference to drawings. In addition, in embodiment, since the component which attached | subjected the same code | symbol performs the same operation, description of it again may be abbreviate | omitted.

(Embodiment 1)

1 is a conceptual diagram of a control system according to the present embodiment. A control system is a system which controls manufacturing apparatuses, such as a semiconductor manufacturing apparatus and a liquid crystal panel manufacturing apparatus, for example. In addition, the control system includes one or more processing apparatuses 11 (processing apparatus 11 (1) to processing apparatus 11 (n)), and one or more control apparatuses 12 (control apparatus 12 (1)). The control apparatus 12 (n) and the process information management apparatus 13 are provided.

The processing apparatus 11 is an apparatus which performs a predetermined process with respect to a to-be-processed substrate. More specifically, the processing apparatus 11 is a manufacturing apparatus, such as a semiconductor manufacturing apparatus and a liquid crystal panel manufacturing apparatus. The processing apparatus 11 performs various processes with respect to a to-be-processed substrate, such as a film-forming process, an etching process, and a thermal oxidation process, for example. The processing apparatus 11 is a semiconductor wafer manufacturing apparatus of a complex process type, for example. An example of this semiconductor wafer manufacturing apparatus is shown in FIG. As shown in Fig. 2, the present semiconductor wafer manufacturing apparatus includes a plurality of (e.g., three) process chambers that perform various processes on the semiconductor wafer, for example, a film forming process, an etching process, a thermal oxidation process, or the like. (1, 2, 3), cassette chambers 4, 5 which accommodate cassettes C1, C2 that can accommodate a plurality of wafers W (e.g., 50 sheets), and a process chamber ( It is comprised by the conveyance chamber 6 which guides the wafer W between 1, 2, 3, and the cassette chambers 4 and 5. FIG. Opening and closing are freely connected between each chamber via the gate valve G. As shown in FIG. In the transfer chamber 6, for example, a multi-joint transfer arm 7 capable of extending and rotating operations is formed, and the transfer arm 7 provides a wafer W between chambers. Conveyance is performed. The cassettes C1 and C2 are inverted by 90 degrees when they are taken into the cassette chambers 4 and 5, and the wafer insertion exits of the cassettes C1 and C2 are rotated to face the center in the transfer chamber 6. The wafer W is placed in a position capable of putting in and out of the wafer W by the transfer arm 7.

In addition, the control apparatus 12 is an apparatus which controls the processing apparatus 11, and is normally formed corresponding to the processing apparatus 11. As shown in FIG. The control apparatus 12 stores the recipe (usually a set of process condition values) which is the information about the predetermined process with respect to a to-be-processed board | substrate, and controls the processing apparatus 11 using the said recipe. The control apparatus 12 is equipped with the ECC control part which is an upper control system of each processing apparatus 11, and MC (machine controller) which is a lower control system of each processing apparatus 11, for example. In this case, the ECC control unit has, for example, a Remote Agent Process (RAP), which is a logical interface means with the process information management apparatus 13, and various data with the process information management apparatus 13 by this RAP. Is transmitted and received. In addition, the processing apparatus 11 and the control apparatus 12 may be integrated, and may be separated.

The process information management device 13 is, for example, a server device that constitutes a so-called group management system.

3 is a block diagram of a process information management apparatus according to the present embodiment. The process information management device 13 includes a reception unit 131, a user information storage unit 132, a recipe storage unit 133, a recipe movement information acquisition unit 134, a step movement acquisition unit 135, and a movement information output unit. 136, a control device information storing unit 137, a recipe receiving unit 138, and a recipe storing unit 139.

The recipe movement information acquisition unit 134 includes a movement acquisition unit 1341, a nonexistent information acquisition unit 1342, a communication impossibility information acquisition unit 1343, and an output impossibility information acquisition unit 1344.

The acceptor 131 accepts instructions and user information from the user. An instruction is a master recipe, a recipe designation instruction which is a designation of two or more recipes other than the master recipe, a movement information output instruction which is an instruction to output movement information, and an output indicating different effect between two or more recipes. In addition, the detailed output instruction, which is an instruction for knowing the details of the high point. The recipe specification instruction may have one recipe identifier. In such a case, a recipe designation instruction designates the recipe of one or more control apparatuses and the master recipe which have the same recipe identifier. In addition, a recipe specification instruction may also contain a regular expression (for example, "abc *" or "abc?"). In addition, when the recipe specification instruction includes "abc *", recipes starting with the string "abc" are matched. User information is information which identifies a user, for example, is a set of a user ID, a user ID, and a password. The detailed output instruction includes, for example, an instruction of the master recipe and one recipe. The detailed output instruction is an instruction for outputting the detail of the difference between the master recipe and this one recipe. The input means such as an instruction may be anything such as a ten key, a keyboard, a mouse, or a menu screen. In addition, the instruction may be transmitted from an external device, and in this case, the acceptor 131 has a receiver. The acceptor 131 can be realized by a device driver of an input means such as a ten key or a keyboard, control software of a menu screen, communication means or the like.

The user information storage unit 132 at least temporarily stores the user information received by the reception unit 131. The user information storage unit 132 is suitably a volatile recording medium such as RAM, but can also be implemented in a nonvolatile recording medium such as a hard disk.

In the recipe storage unit 133, a master recipe and two or more recipes (recipes other than the master recipe) are stored. A recipe is the information regarding the process which the one or more control apparatus 12 which controls the processing apparatus 11 which performs a predetermined process with respect to a to-be-processed board | substrate holds. Here, a recipe is a kind of process information. The process information may be a command sequence for controlling processes other than the recipe. Recipe is stored in the recipe storage part 133 in correspondence with the control apparatus 12, respectively. The master recipe may be information associated with one control device 12 or may be virtual information. In addition, the master recipe may not be fixed. The user may specify the master recipe. Although the recipe storage part 133 is suitable for a nonvolatile recording medium, it can be implemented also in a volatile recording medium.

The recipe movement information acquisition unit 134 acquires, for each of two or more recipes, movement information which is information about the movement of a master recipe and two or more recipes. The movement information may be information indicating whether two recipes are the same (same information) or not (upper information). In addition, the movement information may take three or more types of values. Three or more types of values are the same information (for example, the value "0") that is information indicating that the recipes to be compared are the same as the higher information (for example, the value "1"), which is information indicating that the recipes to be compared are different; Nonexistent information (for example, the value "2") indicating that the recipe to be compared does not exist, and communication indicating that the control device 12 corresponding to the recipe to be compared is in a state where communication with the process information management device 13 is impossible. The information is either one of impossible information (for example, the value "3") and information that cannot be output (for example, the value "4") which is information indicating that the user cannot obtain the movement information. The movement information usually includes the same information and higher level information. The three or more kinds of movement information are the same information, higher level information, and other one or more movement information. The other one or more pieces of movement information is nonexistent information, for example. The recipe movement information acquisition part 134 acquires the movement information of the master recipe which the acceptance part 131 accepted the designation, and two or more recipes except the master recipe which accepted the designation. In addition, it does not ask how to judge whether two recipes are the same or different. The recipe movement information acquisition unit 134 usually compares all the details (contents) of one or more steps included in each of the two recipes, determines whether the two recipes are the same, and processes one of the steps. Even if the condition value is different, the moving information is used as higher information (the recipe is different). In addition, the recipe movement information acquisition unit 134 compares the attribute values (update date and time, updater, etc.) of each of two recipes without comparing the contents of the recipes, and differs in the movement information when any one of the attribute values is different. Information may be used. When the movement information is obtained by comparing the attribute values, the processing can be speeded up. The recipe movement information acquisition unit 134 can usually be realized from an MPU, a memory, or the like. The processing procedure of the recipe movement information acquisition unit 134 is usually implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit). The recipe movement information acquisition unit 134 can usually be realized from an MPU, a memory, or the like. The processing procedure of the recipe movement information acquisition unit is usually implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

The movement obtaining means 1321 compares the contents of the master recipe with the contents of the recipe with which the movement with the master recipe is compared, determines whether two recipes are the same or different, and acquires the same information or higher information. . In addition, a recipe usually has one or more steps. A step is a set of process condition values for controlling the processing apparatus 11. The movement acquisition means 1341 can usually be realized from an MPU, a memory, or the like. The processing procedure of the movement acquiring means 1341 is usually implemented by software, and the software is stored in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

The absence information acquisition means 1342 determines that the recipe to which the movement is compared does not exist, and acquires the absence information. The non-existent information acquisition means 1342 is, for example, when the reception unit 131 receives a recipe designation instruction, whether the recipe corresponding to the recipe identifier included in the recipe designation instruction exists in the recipe storage unit 133. If it is judged whether or not, and if it is determined that it does not exist in the recipe storage unit 133, the absence information is obtained. The recipe identifier may be ID or name as long as it is information for identifying the recipe. The absence information acquisition means 1342 can usually be realized from an MPU, a memory, or the like. The processing procedure of the non-existent information acquisition means 1342 is usually implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

The non-communicable information acquiring means 1343 determines whether communication with the control device 12 is possible, and acquires non-communicable information when communication is impossible. When the communication with the control apparatus 12 is not possible, the case where the control apparatus 12 is shutting down, the case where the control apparatus 12 is not connected to a network, etc. are mentioned. Since determination of whether communication is possible or not is possible by a well-known technique, detailed description is abbreviate | omitted. The non-communicable information acquisition means 1343 can usually be realized from an MPU, a memory, or the like. The processing procedure of the non-communicable information acquisition means 1343 is usually implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

The non-output information acquisition unit 1344 accepts the reception information by the reception unit 131 and uses the user information stored in the user information storage unit 132 to obtain movement information by the user of the process information management device 13. It is judged whether or not the user cannot be obtained, and in the case of a user who cannot obtain the movement information, information that cannot be output is obtained. The non-output information acquisition means 1344 stores one or more user information that can obtain movement information, for example, and is stored in the user information storage unit 132 among the one or more user informations stored therein. It is determined whether the user information exists or not, and if it does not exist, the movement information is set to non-output information (for example, the value "4"). The non-output information acquisition means 1344 stores one or more user information that can obtain movement information, for example, for every recipe, for each control device, or for every pair of recipes and control devices. The user identified by the received user information and the user information stored and the received user information determine whether or not the user can obtain the movement information with the control device. If it is determined, the movement information is made impossible to output. The non-output information acquisition means 1344 can usually be realized from an MPU, a memory, or the like. The processing procedure of the output impossible information acquisition means 1344 is normally implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

The step movement acquisition unit 135 compares one or more steps of the recipe corresponding to the instruction received by the reception unit 131 with one or more steps of the master recipe, and compares the step movement information, which is movement for each step, every step. Acquire. The instruction for the step movement acquisition unit 135 to operate is the above-described detailed output instruction. The step movement acquisition unit 135 can usually be realized from an MPU, a memory, or the like. The processing sequence of the step movement acquisition unit 135 is usually implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

The movement information output unit 136 outputs the movement information acquired by the recipe movement information acquisition unit 134 for every two or more recipes, and the contents of two or more recipes until the reception unit 131 receives the detailed output instruction. Information about the difference between in steps is not output. That is, the movement information output unit 136 outputs whether two or more recipes are the same as the master recipe, respectively. In that case, the movement information output part 136 does not output the information of the step which is the content of a recipe. By the output of the movement information output unit 136, it is possible to overview whether two or more recipes (typically many more) and a master recipe are the same. In addition, the output form of the movement information is not asked. The output type may be the font of the recipe, the color of the figure representing the recipe, the character string "same" or "different" or not. The movement information output unit 136 also outputs one or more step movement information acquired by the step movement acquisition unit 135. Step movement information is information which shows whether the steps which are the content of a recipe are the same, and may include the information which shows another step or the same step in the step in the recipe to compare. Here, the output is a concept including display on a display, printing to a printer, sound output (including a buzzer sound), transmission to an external device, and the like. The movement information output unit 136 may or may not be considered to include an output device such as a display or a speaker. The movement information output unit 136 can be realized by driver software of an output device, driver software of an output device, an output device, or the like.

The control device information storage unit 137 stores one or more control device information which is information about one or more control devices 12. The control device information is, for example, an ID for identifying the control device 12, a name of the control device 12, or the like. Although the control apparatus information storage part 137 is suitable for the nonvolatile recording medium, it is also possible to implement it also to a volatile recording medium.

The recipe receiving unit 138 receives a recipe from the control device 12. The recipe receiving unit 138 receives a recipe from the control device 12, for example, at a timing at which the recipe is updated in each control device 12. In such a case, the control apparatus 12 is a recipe update reception part which receives a recipe update, a recipe update part which updates a recipe, the recipe update detection part which detects the update of a recipe, and a recipe update detection part detects the update of a recipe. And a recipe transmitter for transmitting the recipe to the process information management device. It goes without saying that the control device 12 includes a control unit for controlling the processing device based on the recipe. However, the recipe receiver 138 may periodically communicate with the control device 12 to obtain a recipe. That is, the timing of receiving the recipe by the recipe receiving unit 138 is not asked. The recipe receiving unit 138 is usually realized by wireless or wired communication means, but may be implemented by means of receiving a broadcast.

The recipe storing unit 139 accumulates the recipe received by the recipe receiving unit 138 in the recipe storing unit 133. The recipe accumulating unit 139 accumulates the recipe received by the recipe receiving unit 138 in the recipe storing unit 133 in association with the control device 12 that has transmitted the recipe. The accumulation of recipes associated with the control device 12 means that the control device information identifying the control device 12 and the recipe are stored in pairs. The recipe accumulating unit 138 can usually be realized from an MPU, a memory, or the like. The processing procedure of the recipe storing unit 138 is usually implemented by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

Next, the operation of the process information management apparatus will be described using the flowcharts of FIGS. 4 to 6.

(Step S401) The acceptance unit 131 determines whether or not an input has been accepted. If an input is received, the flow goes to step S402. If an input is not accepted, the flow goes to step S411.

(Step S402) The acceptance unit 131 determines whether or not the input received in step S401 is user information. If it is user information, the flow goes to step S403, and if not, the flow goes to step S404.

(Step S403) The acceptance unit 131 stores the user information received in step S401 in the user information storage unit 132. Return to step S401. In addition, you may perform an authentication process using user information by means not shown. In addition, since authentication process is a well-known technique, detailed description is abbreviate | omitted.

(Step S404) The acceptance unit 131 determines whether or not the input received in Step S401 is a recipe designation instruction. If the recipe designation instruction, the process goes to step S405, and if not the recipe designation instruction, the process goes to step S407.

(Step S405) The output means not shown acquires the recipe identifier contained in a recipe designation instruction, and temporarily stores it.

(Step S406) The output means not shown changes the display of the recipe identifier identified by the recipe identifier acquired by step S405, for example. For example, the output means (not shown) displays the display of the recipe identifier obtained in step S405 in a prominent form in comparison with other recipe identifiers (focuses on the recipe identifier). It is also assumed that a list of two or more recipe identifiers is displayed before a recipe specifying instruction is input. For example, the output means not shown is a recipe identified by the recipe identifier acquired in step S405, and reads one or more recipe identifiers corresponding to the registered one or more control apparatus information, and reads the said one or more recipe identifiers. You can print the list. Return to step S401.

(Step S407) The acceptance unit 131 determines whether or not the input received in step S401 is a movement information output instruction. If it is the movement information output instruction, the flow goes to step S408, and if it is not the movement information output instruction, the flow goes to step S409.

(Step S408) The recipe movement information acquisition unit 134 and the movement information output unit 136 perform movement information output processing. Return to step S401. The movement information output processing will be described later using the flowchart shown in FIG.

(Step S409) The acceptance unit 131 determines whether or not the input received in step S401 is a detailed output instruction. If it is the detailed output instruction, the flow goes to step S410, and if it is not the detailed output instruction, the flow returns to step S401.

(Step S410) The movement information output unit 136 performs detailed output processing. Return to step S401. The detailed output processing will be described later using the flowchart shown in FIG.

(Step S411) The recipe receiving unit 138 determines whether or not a recipe has been received from the control device 12. If the recipe is received, the process goes to step S412. If the recipe is not received, the process returns to step S401.

(Step S412) The recipe storing part 139 accumulates the recipe received in step S412 in the recipe storing part 133. The recipe storing unit 139 accumulates recipes in association with control device information for identifying the control device 12 that has received the recipe. Return to step S401.

In addition, in the flowchart of Fig. 4, for example, when the user information is received, authentication processing is performed, and the authentication permission is granted, the user information is temporarily stored, and from the control device information storage unit 137, 1 is displayed. The above control device information may be read, and the recipe identifier and the master recipe identifier corresponding to the read one or more control device information may be output in a list format. The recipe designation instruction has two or more recipe identifiers among two or more recipe identifiers (including the identifier of the master recipe) output in the list format. That is, the user may instruct two or more recipe identifiers with a mouse or the like among two or more recipe identifiers output in a list format.

In addition, in the flowchart of FIG. 4, the process ends by interrupting the power off or the end of the process.

Next, the movement information output process of step S408 is demonstrated using the flowchart of FIG.

(Step S501) The recipe movement information acquisition unit 134 carries out the initial processing, the control apparatus information which holds the recipe identified by the recipe identifier acquired by step S405, for example, the control apparatus information price. This is a process of reading from the payment 137. The initial process also includes a process of assigning 1 to the counter i. In addition, when the recipe identifier is not acquired in step S405, the recipe movement information acquisition part 134 may read all the recipes of the control apparatus information storage part 137. FIG.

(Step S502) The recipe movement information acquisition unit 134 determines whether or not the i-th recipe (recipe of the i-th control device information) as the movement determination target with the master recipe exists. If the i-th recipe exists, the process goes to step S503. If the i-th recipe does not exist, the process goes to step S524.

(Step S503) The output impossibility information acquisition means 1344 reads user information from the user information storage unit 132.

(Step S504) The output impossibility information acquisition means 1344 uses the user information read in step S503 to determine whether the user identified by the user information is accessible to the i-th recipe.

(Step S505) If the determination in step S504 is accessible, it will go to step S508, and if not, it will go to step S506.

(Step S506) The non-output information acquisition means 1344 sets the movement information to non-output information. Specifically, the output impossible information acquisition means 1344 substitutes information that cannot be output into the variable "movement information", for example.

(Step S507) The recipe movement information acquisition unit 134 increments the counter i by one, and returns to step S502.

(Step S508) The communication impossibility information acquisition means 1343 acquires the control apparatus information corresponding to an i-th recipe.

(Step S509) The communication unavailability information acquisition means 1343 acquires the communication state of the control apparatus identified by control apparatus information, and the process information management apparatus 13 using the control apparatus information acquired by step S508. The communication impossibility information acquisition means 1343 acquires the communication state of the control apparatus and the process information management apparatus 13 by issuing a command "ping IP address" and obtaining a return value, for example.

(Step S510) The communication impossibility information acquisition means 1343 determines whether or not the communication state (for example, the return value of step S509) acquired in step S509 is a non-communication state. If the communication is in the disabled state, the flow goes to step S511. If the communication is not in the impossible state, the flow goes to step S512.

(Step S511) The communication impossibility information acquisition means 1343 makes movement information into communication impossibility information. Specifically, the non-communicable information acquisition means 1343 substitutes non-communicable information into the variable "moving information", for example. Go to step S507.

(Step S512) The absence information acquisition means 1342 reads the i-th recipe.

(Step S513) The absence information acquisition means 1342 determines whether the i-th recipe exists. If the i-th recipe exists, the process goes to step S515. If the i-th recipe does not exist, the process goes to step S514.

(Step S514) The absence information acquisition means 1342 sets the movement information as the absence information. Specifically, the absence information acquisition means 1342 substitutes the absence information into the variable "movement information", for example. Go to step S507.

(Step S515) The movement acquisition means 1341 reads the master recipe from the recipe storage unit 133. In addition, the master recipe identifier for identifying the master recipe is included in the recipe designation instruction.

(Step S516) The movement acquisition means 1341 substitutes 1 in the counter j.

(Step S517) The movement acquisition means 1341 determines whether the j-th step exists in the i-th recipe. If the j-th step exists, the process goes to step S518. If the j-th step does not exist, the process goes to step S522.

(Step S518) The movement acquiring means 1341 reads the information of the j-th step and the information of the steps of the master recipe (having the same step identifier) corresponding to the step in the i-th recipe, and the two Compare the information in the steps. Moreover, when there is no step of the master recipe corresponding to the j-th step, the comparison result in step S519 becomes a comparison result that is not the same.

(Step S519) The movement acquisition means 1341 determines whether or not the comparison result in step S518 is the same. If it is the same, go to step S520, and if not, go to step S521.

(Step S520) The movement acquisition means 1341 increments the counter j by one, and returns to step S517.

(Step S521) The movement acquisition means 1341 sets movement information as difference information. Specifically, the movement acquisition means 1341 substitutes higher level information into the variable "movement information", for example. Go to step S507.

(Step S522) The movement acquisition means 1341 judges whether or not a step for which movement is not compared exists in the i-th recipe or the master recipe. If there is a step for which the movements are not compared, the flow goes to step S521. If there is no step for which the movements are not compared, the flow goes to step S523.

(Step S523) The movement acquisition means 1341 makes movement information the same information. Specifically, the movement acquisition means 1341 substitutes the same information into the variable "movement information", for example. Go to step S507.

(Step S524) The movement information output part 135 outputs the movement information of the master recipe compared with the one or more recipe compared with the said one or more recipe. Return to the parent function.

In addition, in the flowchart of FIG. 5, the output form of the movement information of a recipe is not asked. In addition, the processing sequence at the time of acquiring five types of movement information is not limited to the processing sequence mentioned above. However, the above processing sequence is very suitable. This is because the above processing procedure is a determination procedure for speeding up the processing.

Next, the detailed output process of step S410 is demonstrated using the flowchart of FIG.

(Step S601) The movement information output unit 136 substitutes 1 for the counter i.

(Step S602) The movement information output unit 136 determines whether or not the designated recipe has the i-th step. If it has the i-th step, it goes to step S603. If it does not have the i-th step, it returns to the upper function.

(Step S603) The movement information output unit 136 reads information of the i-th step of the designated recipe and the step of the master recipe corresponding to the step.

(Step S604) The movement information output unit 136 determines whether the information in both steps is the same. If both are the same, the flow goes to step S605, and if the two are not the same, the flow goes to step S606.

(Step S605) The movement information output part 136 outputs in the form which shows that the i-th step of the designated recipe is the same as the step of a master recipe. Go to step S607.

(Step S606) The movement information output part 136 outputs in the form which shows that the i-th step of a specified recipe differs from the step of a master recipe.

(Step S607) The movement information output unit 136 increments the counter i by one. Return to step S602.

In addition, in the flowchart of Fig. 6, the form of outputting the movement of the step does not matter.

In addition, in the flowchart of FIG. 4 thru | or 6, although the master recipe at the time of determining a movement was specified by the recipe designation instruction | indication, it is not necessary to specify. In this case, the master recipe is determined in advance corresponding to the recipe.

Hereinafter, the specific operation | movement of the process information management apparatus in this embodiment is demonstrated. 7 is a conceptual diagram of a control system including a process information management apparatus. This control system is provided with the process information management apparatus 13, the client terminal 101, the control apparatus E1, E2, E3, E4, E5, E6, and the processing apparatus P1 to P6 corresponding to each control apparatus. do. In this control system, the control apparatus E3 is not currently connected to a network.

In addition, the recipe storage part 133 of the process information management apparatus 13 has the recipe management table shown in FIG. The recipe management table has attributes such as "ID", "recipe identifier", "control device information", "recipe group", "editor", "update date" and "version". "ID" is information for identifying a record, and exists for record management in the table. "Recipe identifier" is a recipe name. "Control device information" is the name of the control device in which a recipe is used. In addition, one recipe is specified by "recipe identifier" and "control device information". "Recipe group" is an attribute value of a recipe and shows a group. "Editor" is information identifying the person who edited the recipe last, "Update date and time" is the date and time when the recipe was last updated, and "Version" shows the version number of the recipe. In addition, although not shown in figure, the recipe storage part 133 stores the substance of the recipe specified by the "recipe identifier" and the "control device information." In addition, a recipe is said to consist of one or more steps.

9 is a control device information management table stored in the control device information storage unit 137. The control device information management table has attributes of "ID" and "control device information." "Control device information" is the name of the control device in which a recipe is used. Further, the control device information stored in the control device information storage unit 137 may be considered as the attribute value "control device information" in FIG.

10 is a user authentication information management table held by the output impossible information obtaining means 1344. FIG. The user authentication information management table is used when determining the permission / deny of login of the process information management device 13 of the user. In addition, the user authentication information management table is used to determine the recipe corresponding to the control apparatus which a user can access. The user authentication information management table has attributes of "ID", "user identifier", "password" and "control device information". "User identifier" is a user name. The "password" is used together with the "user identifier" to determine whether to permit or disallow login to the process information management device 13 (authentication processing). "Control device information" is control device information corresponding to the recipe which a user identified by "user identifier" can output. "Control device information" can also be said to be the information which shows the recipe which a user identified by "user identifier" can output, and can also be referred to as the information about the control device corresponding to the recipe which can be output.

In such a situation, it is assumed that the user of the client terminal 101 attempts to log in to the process information management device 13 by substituting the user identifier "Tanaka" and the password "0912".

Next, the acceptance unit 131 of the process information management device 13 receives user information (user identifier "Tanaka" and password "0912").

Next, the process information management apparatus 13 performs authentication processing by means not shown, and judges it as authentication permission, and permits login to the process information management apparatus 13 from the client terminal 101. This is because the user information (user identifier "Tanaka" and password "0912") is managed by the information of FIG. The process information management device 13 temporarily stores the user information (user identifier "Tanaka" and password "0912") in the user information storage unit 132.

Next, the process information management apparatus 13 reads the "recipe identifier" of the recipe management table of FIG. 8, uniquely processes it, and acquires one or more recipe identifiers which do not overlap. And the process information management apparatus 13 outputs the recipe list which has one or more recipe identifiers which do not overlap to the client terminal 101, and the client terminal 101 displays a recipe list as shown in FIG. It is said.

Next, the user identified by the user identifier "Tanaka" is said to have designated the recipe identifier "RCP1" with the mouse from the client terminal 101, and pressed the "move information output" button.

Next, the acceptance unit 131 of the process information management device 13 receives a movement information output instruction having a recipe identifier "RCP1".

Next, the recipe movement information acquisition unit 134 is a recipe identified by the recipe identifier "RCP1", and records a record containing control device information represented by "control device information" of the control device information storage unit 137. 8 is searched from the recipe management table in FIG. 8 to obtain the temporary table in FIG.

In the temporary table of Fig. 12, the recipe movement information acquisition unit 134 assumes that the recipe corresponding to the record of " ID = 1 " is the master recipe. It goes without saying that the master recipe may be designated by the user.

Next, the recipe movement information acquisition part 134 compares a master recipe and the recipe corresponding to the record of "ID = 7" by "ID = 2" in order.

First, the recipe corresponding to the record of "ID = 2" is processed. That is, the recipe movement information acquisition unit 134 accesses the recipe corresponding to the control device identified by the control device information "E1" owned by the record of "ID = 2" and is accessed by the user identified by the user identifier "Tanaka". Determine if it is possible or not. That is, it is determined from the user authentication information management table of FIG. 10 whether or not a record in which the user identifier "Tanaka" and the control device information "E1" are paired exists. Here, in FIG. 10, since there exists a record in which the user identifier "Tanaka" and the control device information "E1" are paired, the recipe movement information acquisition unit 134 is a control device identified by the control device information "E1". Regarding the recipe corresponding to, it is determined that the user identified by the user identifier "Tanaka" is accessible.

Next, the recipe movement information acquisition part 134 determines whether communication with the control apparatus identified by control apparatus information "E1" is possible. Here, it is the situation of FIG. 7, and the recipe movement information acquisition part 134 judges that communication is possible.

Next, the recipe movement information acquisition unit 134 determines whether or not an entity (for example, a file) of the recipe identified by the recipe identifier "RCP1" and the control device information "E1" exists in the recipe storage unit 133. Judge. Here, it is assumed that the substance of the recipe identified by the recipe discriminator "RCP1" and the control device information "E1" exists.

Next, the recipe movement information acquisition unit 134 is a substance of the master recipe (for example, a file), a recipe identifier (for example, a file) identified by the recipe identifier "RCP1" and the control device information "E1". ) Is read from the recipe storage unit 133. Then, it is determined whether all the steps of the two recipes are the same. Here, it is assumed that the recipe movement information acquisition unit 134 determines that the contents of the two recipes (files) are exactly the same. And the movement acquisition means 1342 substitutes "same information (for example," 0 ") into the movement information corresponding to the recipe identified by recipe identifier" RCP1 "and control device information" E1 ". In addition, since the process of determining whether two recipes (normally, each recipe consists of one or more files) is the same by a well-known technique, detailed description is abbreviate | omitted.

Next, the recipe corresponding to the record of "ID = 3" is processed. Here, similarly to the above, the movement acquiring means 1321 is configured to move information corresponding to the recipe identified by the recipe identifier "RCP1" and the control device information "E2" to "same information (for example," 0 "). Is substituted.

Next, the recipe corresponding to the record of "ID = 4" is processed. Here, the user identified by the user identifier "Tanaka" is accessible to the control device identified by the control device information "E3". In FIG. 7, the control device identified by the control device information "E3" is connected to the network. The non-communicable information acquisition means 1343 detects that it is not. The non-communicable information acquisition means 1343 adds "non-communicable information (for example," 3 ") to the movement information corresponding to the recipe identified by the recipe identifier" RCR1 "and the control device information" E3 ". Assign. In addition, since detection of whether an apparatus is connected to a network is possible by a well-known technique, detailed description is abbreviate | omitted.

Next, the recipe corresponding to the record of "ID = 5" is processed. Here, it is assumed that the user identified by the user identifier "Tanaka" can access the control device identified by the control device information "E4", and the control device identified by the control device information "E4" is connected to the network. In addition, the recipe identified by recipe identifier "RCP1" and control device information "E4" is assumed to exist in the recipe storage part 133. FIG. However, it is assumed that the movement obtaining means 1341 determines that the recipe identified by the recipe identifier "RCP1" and the control device information "E4" is different from the master recipe. It is assumed that this is obtained by the movement acquiring means 1341 that the two recipes are different because the difference is obtained by acquiring the difference between the contents of the two recipes. In such a situation, the movement acquiring means 1341 adds "high information (for example," 1 ") to movement information corresponding to the recipe identified by the recipe identifier" RCP1 "and the control device information" E4. " Assign.

Next, the recipe corresponding to the record of "ID = 6" is processed. Here, it is assumed that the user identified by the user identifier "Tanaka" can access the control device identified by the control device information "E5", and the control device identified by the control device information "E5" is connected to the network. However, it is assumed that the recipe identified by the recipe identifier "RCP1" and the control device information "E5" does not exist in the recipe storage unit 133. In such a situation, the absence information acquisition means 1342 determines that the recipe to which the movement is compared does not exist, and acquires the absence information. That is, the absence information acquisition means 1342 substitutes "existence information (for example," 2 ") into movement information corresponding to the recipe identified by the recipe identifier" RCP1 "and the control device information" E5 ". .

Next, the recipe corresponding to the record of "ID = 7" is processed. Here, the non-output information acquisition means 1344 acquires non-output information because the user identified by the user identifier "Tanaka" is inaccessible in FIG. 10 to the control device identified by the control device information "E6". . The output impossibility information acquisition means 1344 adds "output impossibility information (for example," 4 ") to movement information corresponding to the recipe identified by the recipe identifier" RCP1 "and the control device information" E6. " Assign.

Next, the movement information output part 135 outputs the movement information acquired by the recipe movement information acquisition part 134 for every recipe. An example of the output of the movement information output unit 135 is shown in FIG.

In Fig. 13, "Master" is output in the "result" column of the master recipe. In Fig. 13, in the "Result" column, "Same" when the movement information is the same information, "Different" when the movement information is higher level information, "Not Found" when the movement information is nonexistent information, "Offline" is output when the movement information is communication unavailable information, and "Disable" is output when the movement information is non-output information. In addition, the movement information output unit 135 does not output a part of the attribute value of the recipe when the movement information is any of non-existent information, non-communicable information, and non-printable information. In Fig. 13, the attribute values of "Editor", "Update Date" and "Version" are not output. This is uncertain when the movement information output unit 135 outputs the "editor", "update date" or "version" of any one of the non-existent information, the non-communicable information, and the non-printable information from the information of FIG. It is not valid to output.

Next, the user inputs the detailed output instruction while watching the output of FIG. The input of the detailed output instruction means that the control device information "E4" shown in FIG. 13 is double-clicked, for example. That is, the user wants to obtain the details of the difference between the master recipe (recipe identified by ACC_RCP) and the recipe (recipe identified by E4) whose movement information is higher order information.

Next, the acceptance unit 131 receives a detailed output instruction including "E4". Next, the detail output unit 139 reads the master recipe (the recipe identified by ACC_RCP) and the recipe (the recipe identified by E4) whose movement information is higher order information, and the step higher order information for each corresponding step. Get and print An example of such an output is shown in FIG. In Fig. 14, the left side of the screen is a list of steps, and the diagonally-lined rows show that the steps with two recipes are different. In Fig. 14, "step C" and "step D" of the recipe are different. In addition, the right side of Fig. 14 is a process condition value of a step that is focused ("step C" indicated by an arrow on the right side of the screen) with respect to two recipes, and the process condition value with an oblique line is different. Process condition value and the like. In Fig. 14, "Main Set" is different.

In addition, by the means not shown in the process information management apparatus, a recipe in which the movement information is higher level information may be edited to be the same as the master recipe, and the edited recipe may be accumulated. Since such an editing function and an accumulation function are by a well-known technique, detailed description is abbreviate | omitted. In addition, the process information management apparatus may store the result information (only the screen image of FIG. 14, the information relating to other steps, etc.) of the result of which the movement information of FIG. 14 was higher level information by means not shown. Since this storage function is also known technology, detailed description thereof is omitted.

As mentioned above, according to the process information management apparatus of this embodiment, a user can overview at a time whether the content of many recipes of many control apparatuses is the same as a master recipe. That is, according to the process information management apparatus of the present embodiment, the master recipe can be compared with each of two or more recipes, and movement information which is information about whether the master recipe and the two or more recipes are the same or not can be output at once. In the process information management apparatus of the present embodiment, when there are a lot of recipes to be compared with the master recipe, it is possible to collectively check whether or not a plurality of recipes to be compared are the same as the master recipe, which is very effective.

Moreover, according to the process information management apparatus of this embodiment, not only whether the recipe compared with a master recipe is the same or different, but also other states (for example, output impossible, communication impossibility, absence) etc. can be output. Therefore, a user can know the difference of the state of two recipes, etc. in more detail, and a user can take the following appropriate correspondence. Specifically, when a user compares a master recipe with recipes of a plurality of control devices, the user knows that no offline control device or recipe exists in the control device, no access authority to the control device, or the like. Can be. This is the case in which a semiconductor manufacturing plant operates several tens to hundreds of control devices and processing devices, and is effective in ensuring recipe consistency between these control devices and processing devices. More specifically, when there is no difference between the master recipe and the recipe of the control device that is going to execute the process, the user executes the process using the recipe. And when there is a difference between the master recipe and the recipe of the control device which is going to execute the process, the user checks the details of the difference between the master device and the recipe to be executed. When the user finds a missed setting of the recipe, the user edits the recipe to be executed and fits the master recipe. If the recipe does not exist in the same destination class as the directory in which the master recipe exists, the user opens and references the recipe of the master device, and copies the recipe of the master device to the control device that performs process evaluation.

In addition, for example, a user interrupts a job or makes an application for user registration (registration to obtain an output permission) with respect to the recipe determined as output non-accessible information which a user cannot access. Further, the user contacts the user of the control apparatus to instruct the control apparatus that processes the recipe to be in a communicable state, or instructs the user to start the control apparatus, with respect to the recipe that is determined to be non-communicable information that cannot be communicated. . In addition, the user copies, for example, the latest recipe for the recipe determined as nonexistent information. In addition, the user copies, for example, the latest recipe from the recipe determined by the master recipe and other higher information.

In addition, in the specific example of this embodiment, although the user operated from the client terminal, it is needless to say that you may operate directly from the process information management apparatus 13.

In addition, in this embodiment, five types of movement information are not limited. The movement information may be two pieces of the same information and higher level information, or may be three, four, six or more pieces.

In addition, you may implement | achieve the process in this embodiment by software. The software may be distributed by software download or the like. The software may also be recorded and distributed on a recording medium such as a CD-ROM. In addition, this also applies in other embodiment in this specification. In addition, the software which implements the information processing apparatus in this embodiment is the following program. In other words, the program includes two or more recipes, which are information about a process held by two or more control devices, each of which controls two or more processing devices that perform a predetermined process on a substrate to be processed. Recipe movement information which stores correspondence to each and stores master recipe which is standard reference, and acquires movement information which is information about movement of master recipe and two or more recipes for every two or more recipes in computer To execute the movement information output step which outputs the acquisition step and the movement information acquired by the said recipe movement information acquisition step for every said 2 or more recipes, and does not output about the difference information of the step which is the content of the said 2 or more recipes. It is a program for.

Further, the program corresponds to a reception step for receiving an instruction for one recipe after outputting movement information for each of the two or more recipes in the movement information output step to a computer, and the instruction received at the reception step. Comparing one or more steps of a recipe to one or more steps of the master recipe, a step movement acquisition step of acquiring step movement information, which is movement for each step, is further executed. The program outputs one or more step movement information acquired in the step movement acquisition step.

In addition, the program further executes a recipe receiving step of receiving a recipe from the control device, and at least a part of the recipe of the recipe storing unit is preferably a recipe received in the recipe receiving step.

Further, at least two control device information which is information about the at least two control devices is stored, and the recipe movement information acquisition step in the program includes two or more controls of the master recipe and the control device information storage unit. It is very suitable to acquire movement information of two or more recipes corresponding to the two or more control devices indicated by the device information for each of the two or more recipes.

Further, in the program, the movement information is the same information indicating that the recipe to which the master recipe and the movement are compared are the same information, or higher information which is information indicating that the recipe to which the master recipe is compared with the movement is different; Or nonexistent information indicating that a recipe to be compared does not exist, or a control device corresponding to a recipe to be compared is incapable of communicating with the process information management device or indicating that the user cannot obtain mobile information. Information of any non-printable information that is information can be obtained, and the recipe movement information obtaining step compares the contents of the master recipe with the contents of the recipe to which the movement is compared, and differs according to whether two recipes are the same. Determine the hanji, take the same information or higher information It is determined that there is no movement acquisition step, a recipe to which the movement is compared, the absence information acquisition step of acquiring the absence information, and whether or not communication with the control device is possible, and communication is impossible. Accepting the non-communicable information acquiring step for acquiring impossibility information and user information which is information about a user who operates the process information management apparatus, and determining whether or not the user cannot obtain movement information based on the user information, In the case of a user who cannot obtain movement information, it is suitable to have a non-output information acquisition step of acquiring non-output information.

Further, in the reception step of the program, the designation of two or more recipes is also accepted, and in the recipe movement information acquisition step, movement information between the master recipe and two or more recipes that have received the specification of the recipe is acquired. Is very suitable.

In addition, in the said embodiment, each process (each function) may be implement | achieved by centralized processing by a single apparatus (system), or may be implement | achieved by distributed processing by a some apparatus.

The computer that executes the program may be singular or plural. In other words, the concentration processing may be performed or the dispersion processing may be performed.

The present invention is not limited to the above embodiments, and various modifications are possible, and needless to say, they are also included in the scope of the present invention.

In addition, the disclosure including the detailed description, drawings, and the claims of Japanese Patent Application No. 2006-124732 for which it applied on April 28, 2006 is incorporated by this reference in its entirety.

As mentioned above, the process information management apparatus which concerns on this invention has the effect that a user can easily know whether the content of many recipes of many control apparatuses is the same, for example, a semiconductor manufacturing apparatus and a liquid crystal It is useful as a process information management apparatus which manages process information which is information regarding control of processing apparatuses, such as a panel manufacturing apparatus.

Claims (6)

Two or more recipes, which are information about a process held by two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, are stored in correspondence with the two or more control devices, respectively, and With the recipe storing part storing the master recipe which is a standard recipe, A recipe movement information acquisition unit for acquiring movement information that is information about movement of the master recipe and the two or more recipes for each of the two or more recipes; A movement information output unit for outputting the movement information acquired by the recipe movement information acquisition unit for each of the two or more recipes; Process information management device having a. The method of claim 1, A reception unit which receives an instruction for one recipe after the movement information output unit outputs movement information for each of the two or more recipes; A step movement acquisition unit for comparing step one or more steps of a recipe corresponding to the instruction received by the reception unit with one or more steps of the master recipe, and obtaining step movement information, which is movement for each step, for each step; Additionally provided, And the movement information output unit outputs one or more step movement information acquired by the step movement acquisition unit. The method of claim 1, Recipe receiving unit for receiving a recipe from the control device Additionally provided, At least a part of the recipe of the said recipe storage part is a process information management apparatus which is a recipe which the said recipe receiver received. The method of claim 1, The control device information storage part which stores the 2 or more control device information which is the information about said 2 or more control devices. Additionally provided, The recipe movement information acquisition unit, A process information management device for acquiring movement information of two or more recipes corresponding to the two or more control devices indicated by the master recipe and two or more control device information of the control device information storage unit for each of the two or more recipes. The method of claim 2, The reception unit, I accept the designation of two or more recipes, The recipe movement information acquisition unit, A process information management device for acquiring movement information between a master recipe and two or more recipes that have received the specification of the recipe. On your computer, Two or more recipes, which are information about a process held by two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, are stored in correspondence with the two or more control devices, respectively, and I store the master recipe which is a standard recipe, A recipe movement information acquiring step of acquiring movement information, which is information about movement of the master recipe and the two or more recipes, for each of the two or more recipes, A movement information output step of outputting the movement information acquired in the recipe movement information acquisition step for each of the two or more recipes. Program to run.

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