KR20080039337A - Fluid control device - Google Patents

Abstract

An integrated fluid control device in which welded portions in inter-line connection means for connecting the paths of lines are reduced almost without an increase in the number of parts. As a result, an increase and change of lines are easier. An inter-line connection means (50) for connecting lines adjacent to each other in the lateral direction has a lateral projection (64b) formed on a two-way connection block-like joint (64) of a first line, a recess (64c) formed in a two-way connection block-like joint (64) of a second line so that the lateral projection (64b) can be fitted into the recess (64c), an in-joint branch path (82) formed in the two-way connection block-like joints (64), a branch path (90A) in a first valve body, provided in a body (54a) of an on-off valve (54) of the first line and constantly communicating to each other an in-valve body main path (89) and a joint body upper surface opening (82a) of the in-joint branch path (82), and a branch path (90B) in a second valve body, provided in a body (54a) of an on-off valve (54) of the second line and constantly communicating to each other an in-valve body main path (89) and an lateral projection (64b) upper surface opening of the in-joint branch path (82).

Description

Fluid Control Device {FLUID CONTROL DEVICE}

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a fluid control device used in a semiconductor manufacturing apparatus, and more particularly, to an integrated fluid control device assembled so that a fluid control device can be taken out upwards alone during maintenance inspection.

In this specification, about right and left before and after, it shall suppose that the right side from FIG. 1 to FIG. 3 is front, left side is back, top and bottom of FIG. 3 is up and down, and right and left are facing forward. This front and rear and up and down is a convenience, and may be used because the front and rear are reversed or the upper and lower sides may be left and right.

In the fluid control device used in the semiconductor manufacturing apparatus, various fluid control devices are arranged in a plurality of rows, and passages of the fluid control devices in adjacent rows are configured to be connected to each other by device connection means at predetermined locations. In this type of fluid control apparatus, the integration which connects a massflow controller, an opening-closing valve, etc. without passing through a tube is progressing. For example, Patent Literature 1 includes a plurality of fluid control devices disposed at an upper end and a plurality of joint members disposed at a lower end thereof so that the plurality of lines face the inlet at the rear and the outlet at the front. Disclosed are a fluid control device arranged in parallel on a substrate and wherein passages of predetermined lines are connected to each other by means of connection between lines.

FIG. 10 is a perspective view showing an example of the fluid control device described in Patent Document 1, wherein the fluid control device includes lines A1 (A2) and A3 without three bypass passages, and three bypass passages. Lines B1, B2, and B3 are arranged on the substrate 1 in parallel. Lines A1 (A2) (A3) without each bypass passage and lines (B1) (B2) (B3) with each bypass passage are arranged at the top of the mass flow controller, on-off valve, A plurality of fluid control devices (2) (3) (4) (5) (6) (7) and a bottom of the fluid control devices (2) (3) (4) (5) (6) (7) A plurality of joint members 11, 12, 13, 14, 15, 16, 17, and 40 are formed to communicate the 41 with each other.

The fluid control device in each of the lines A1 (A2) and A3 without a bypass passage is an inlet opening / closing provided through the filter 4 on the inlet side of the massflow controller 2 and the massflow controller 2. The fluid control device of the valve | bulb 3 and the outlet side opening-closing valve 5 provided in the outlet side of the massflow controller 2, and the line B1 (B2) (B3) with each bypass passage is a massflow controller. (2), the inlet side opener 6 provided on the inlet side of the massflow controller 2 through the filter 4, and the outlet side opener 7 provided on the outlet side of the massflow controller 2; )to be.

The inlet-side shut-off opener 6 has a block-shaped body 21, two open / close valve actuators 22 and 23 attached thereto, and a block-shaped seam with tubular connections attached to the upper surface of the body 21. And a passage block 25 attached to the upper surface of the main body. The outlet side disconnect opening 7 includes a first block-type main body (not shown) disposed on a side close to the mass flow controller 2, a first open / close valve actuator 27 attached thereto, and a first block. It is formed by the 2nd block-type main body 28 arrange | positioned adjacent to the back of a mold main body, and the two open / close valve actuators 29 and 30 attached to it.

The fluid control device is provided with an inverted U-shaped bypass pipe 35 passing through the mass flow controller 2, and is divided into an inverted L-shaped part and an I-shaped part during the bypass pipe 35. A tubular seam 36 is provided which makes it possible.

The massflow controller 2 and the seams 11, 12, 14 are attached to the substrate 1 via inverted U-shaped brackets 8, 9, 19. The mass flow controller 2 removes the joints 15 and 17 on both sides thereof, and the filter 4 and the on / off valves 3 and 5 remove the screw 37 screwed from the upper side. By taking out, each can be taken out independently.

Reference numeral 40 denotes a manifold block type seam that connects lines A1 (A2) and A3 without three bypass passageways to each other, and reference numeral 43 denotes three bypass passageways. Represents a manifold block type seam that connects lines B1 (B2) and B3 with one seam to each other, and reference numeral 41 denotes a passage closing block attached with screws 37 to the manifold block type seam 40. Reference numeral 42 denotes an inverted U-shaped bracket for attaching the manifold block type seams 40 and 43 to the substrate 1. The line manifold block type seam 40 with no bypass passage and the line manifold block type seam 43 with the bypass passage are connected by a communication pipe 44, and common outlets are connected to these. It becomes the end part of the line manifold block type joint 43 with a path | pass path, and the opening-closing valve 45 with the tubular joint 46 is provided here.

In lines (B1) (B2) (B3) with bypass passages, the block-shaped seams (24) with tubular connections of the inlet side breaker (6) and the outlet side breaker (7) Block-shaped joints 33 with two tubular connections are connected to each other by reverse U-shaped communication pipes 47 and 48 as connection means between lines. These line-to-line connection means 47 and 48 use L-shaped seams L and T-shaped seams T, and these seams L and T and pipes P are welded (W in the drawing). Is connected to).

According to the fluid control apparatus of the said patent document 1, about one line, the lower block type seam is detachably attached to a board | substrate, and the upper fluid control device is detachably attached across the lower block type seam. It is easy to attach and detach the fluid control device of each line. However, since the connection means between the lines is formed by connecting the seams with pipes and welding each other, there is a problem that it takes time to detach and attach the lines between the lines during expansion and change of the lines.

Thus, by eliminating this time, Patent Literature 2 discloses that one line is formed of a plurality of fluid control devices disposed at an upper end, and a plurality of joint members disposed at a lower end, and the plurality of lines are located at the rear of the inlet. In the fluid control apparatus, the outlets are arranged in parallel toward the front and the passages of the predetermined lines are connected to each other by the line-to-line connecting means, wherein the line-to-line connecting means are the same position in the front-rear direction of the upper end of each line to be connected. A lower passage block formed at each line and having at least one uplink opening therebetween, a horizontal passage disposed above the lower passage block over each line to be connected and extending in a line orthogonal direction, and horizontally One or more upwards having a downward passage extending from the directional passage and passing through an upward opening of the passage for connecting the lines of the lower passage block; It consists of a passage block, the lower passage block is coupled to the lower joint member detachably by a screw from the top, the upper passage block is coupled to the lower passage block detachably by a screw from the top A fluid control device is proposed.

[Patent Document 1] Japanese Unexamined Patent Publication No. 2002-89798

[Patent Document 2] Japanese Patent Application Laid-Open No. 2004-183771

According to the fluid control apparatus of the said patent document 2, it has the advantage that a welding point can be eliminated by the line-to-line connection means, and it can cope easily with expansion and a change of a line, but there exists a problem that the number of types of aisle blocks increases. The improvement has been a problem.

An object of the present invention is to suppress the increase in the number of parts (path block = type of block type seam) when eliminating the welding point in the inter-line connecting means for connecting the passages of the line to each other, and thereby to increase or change the line. The present invention provides an integrated fluid control device that can be more easily coped with.

The fluid control device according to the present invention comprises a plurality of lines, each line consisting of a lower layer having a plurality of joint members arranged in the front-rear direction, and an upper layer having a plurality of fluid control devices arranged in the front-rear direction. And the front and rear block joints as bottom layer components of each line and the on / off valves as top layer components disposed across their block seams, arranged horizontally, A fluid control device in which a front-rear passage in a rear block-type joint is made to be opened and closed by operation of an actuator of an on / off valve, wherein at least one of the line connecting means for connecting the first and second lines adjacent in the horizontal direction Is a transverse protrusion formed in one of the block-shaped seams of the front and rear of the first line, and A recess formed in the block-shaped seam of the second line so that the transverse protrusion can be fitted, and a block-shaped seam having a transverse protrusion, one end of which is opened on the upper surface of the seam body, and the other end is opened on the upper surface of the horizontal protrusion. Branch passages in the first valve body, which are provided in the main body of the on-off valve of the first line, the main passage in the valve body, and the upper surface opening of the joint main body of the branch passage in the seam, and the second passage of the second line. And a branch passage in the second valve body, which is provided in the main body of the on-off valve and always communicates with the main passage in the valve body and the upper surface opening of the horizontal projection of the branch passage in the joint.

The line connecting means for connecting the first and second lines adjacent in the horizontal direction is provided, for example, two at the inlet side and at the outlet side, but in this case, all four may be of the above configuration, but, for example, the outlet Only two of the sides may be configured as described above. And the interline connection means which does not have the said structure becomes a moving piping block extended in the horizontal direction provided across the some block-shaped seam arrange | positioned in the horizontal direction in the lower layer, for example, and adjacent to this moving piping block, A plurality of transverse passages for communicating block-like joints with each other through the valve body passage of the on-off valve are provided.

The upper surface of the lower layer and the lower surface of the upper layer are each the same surface, so that the lower opening of each fluid control device and the upper opening of each joint member are located in the same plane. Each fluid control device has a main body in which a passage having an opening is formed in the lower end, and the joint member is formed with a passage leading to the lower end opening of the main body passage of the fluid control device. Moreover, the passage which opens to a horizontal direction or a front-back direction is formed in a fluid control device and a joint member as needed. Seal portions are provided at each connecting portion of the passage.

When expanding lines, create a space slightly larger than one line width (as wide as a horizontal projection) between adjacent lines, and place a new line (pre-built other than the opening / closing valve) therebetween. The horizontal protrusions of the block-shaped seams of one line may be inserted into the recesses of the block-shaped seams of the second line, each line may be approached to each other to be fixed at a predetermined position, and finally, the operation of attaching the opening / closing valve may be performed. The same is true when the line is changed, and in this way, the line can be easily expanded and changed.

According to the fluid control apparatus of the present invention, in the absence of the line-to-line connection means, there is a one-way connecting block type seam having a front-rear passage and no transverse passage, and a transverse direction and a transverse direction. A fluid control part for blocking and opening the front-rear direction (line direction) path according to the one-way connection valve body having no rear passage and the rear one-way connection block type joint having no passage and the transverse direction passage. Where the line-to-line connection means is provided, the front or rear two-way connecting block type seam having the main passage in the front-rear direction and the branch passage in the transverse direction, and the transverse passage in the front-rear direction Two-way connecting valve body with one-way connecting block type seam at the rear or front not provided, main passage in the front-rear direction and branch passage in the horizontal direction As a result, a fluid control portion is formed to block open and close the front-back direction (line direction) passage and to open and close the transverse direction (orthogonal direction of the line) passage.

The contour shape of the two-way connection block type seam becomes a shape in which the horizontal direction protrusion part and / or the recessed part were formed in the one-way connection block type seam. The one-way connection block type seam is rectangular, and the basic one can be produced from one type of square member. Since the two-way connection block type seam has a shape similar to that of the one-way connection block type seam, it is possible to reduce the amount of special processing at the time of manufacturing the block seam seam. Each block type seam can be processed in one direction using a three-axis processing machine.

Positioning in the front-rear direction is performed by fixing a screw member to a board in a state in which joint members such as block-shaped joints constituting the bottom layer are in close contact with each other, and thus, without using a special tool for position alignment, the fluid control device Tolerance is secured to obtain an appropriate seal between and. The massflow controller is disposed between the block-shaped joints at intervals from each other, and in this case, a spacer for setting the gap is interposed between the block-shaped joints supporting the massflow controller. Then, the fluid control device as the top layer component is disposed over the joint members adjacent to each other back and forth, and is fixed to the joint member corresponding to the screw member, whereby the fluid control device ensured sealability can be assembled without a welding point. Positioning in the horizontal direction is performed by inserting the horizontal protrusion formed in the two-way connecting block type seam into the recess formed in the two-direction connecting block type seam adjacent to the horizontal direction. That is, the two-way connection block type seam has not only a function of flowing a fluid in two directions but also a positioning function.

Among the plurality of two-way connecting block type joints among the line connecting means, the seam located at one end of the line connecting means does not have a horizontal protrusion and a branch passage, and the other seams have a horizontal protrusion and a branch passage. desirable. That is, the seams located at one end of the connection means between the lines (ends that interfere with the other lines) have no horizontal protrusions and branching passages, so that interference with other lines can be avoided, and the one-way connection block By eliminating the shape where only the horizontal projection was formed in the mold joint, the number of parts of the block joint can be reduced.

The plurality of lines are provided with an inert gas line, a process gas line and a purge gas line, and it is preferable that not only the inert gas line and the process gas line but also the purge gas line is composed of an upper layer and a lower layer. In this way, the lower layer also includes a purge gas line, and becomes one layer, and the attachment and detachment of the joint member of the lower layer is facilitated.

The front and rear passages in the front block-shaped seam and the front and rear passages in the rear block-shaped seam are V-shaped in the transverse direction, and the branch passages in the two-way connecting block-type seam are V-shaped in the front-back direction.

[effect]

According to the fluid control apparatus of the present invention, at least one of the line-to-line connecting means includes a transverse protrusion formed in the block-like seam of either the front or the rear of the first line, and the second protrusion into which the transverse protrusion can be fitted. A concave portion formed in the block-shaped seam of the line, a branch passage in the seam formed at the block-shaped seam having the transverse protrusions, one end of which is opened on the upper surface of the seam main body, and the other end of which is opened on the upper surface of the transverse protrusions, Branch passages in the first valve body which are provided in the main body of the on-off valve and always communicate with the main body of the valve body and the upper surface of the joint body of the branch passage in the seam, and the main body of the valve body in the main body of the on / off valve of the second line. Consisting of a branch passage in the second valve body which always communicates with the top surface opening of the transverse protrusion of the branch passage in the passage and the seam. Therefore, this line-to-line connection means can be configured without welding, and the block-shaped seams having the horizontal protrusions and the recesses have the same contour shape as the other block-shaped seams because the horizontal protrusions are fitted into the recesses. An increase in the number is suppressed, a flexible design is possible, and furthermore, maintenance property is improved.

1 is a plan view showing the entire configuration of a fluid control device according to the present invention.

2 is a plan view showing a bottom layer of the fluid control device according to the present invention.

3 is a longitudinal sectional view showing an example of the configuration of one line of the fluid control device according to the present invention.

4 is a perspective view showing a two-way connecting block type seam constituting the line-to-line connecting means.

5 is the plan view.

6 is a cross-sectional view taken along the line VI-VI of FIG. 5.

7 is a cross-sectional view taken along the line VII-VII of FIG. 5.

8 is a plan view showing a passage of an inter-line connecting means.

9 is a flow chart of a fluid control device in accordance with the present invention.

10 is a perspective view showing a conventional fluid control device.

<Explanation of symbols for the main parts of the drawings>

I1, I2, I3, I4, T1, T2, T3, T4, P: Line

2C: Massflow Controller

50: connection means between lines

53: on-off valve

53a: one-way connecting valve body

54: on-off valve

54a: 2-way connecting valve body

62: Front one-way connection block type seam

63: Rear one-way connection block type seam

64: 2-way connection block type seam

64a: seam body

64b: transverse protrusion

64c: concave

65: one-way connection block type seam

81: main passage

82: branch passage within seam

82a: seam top opening

82b: transverse top opening

87: front and rear passage

89: main passage in the valve body

90A: branch passage in first valve body

90B: branch passage in the second valve body

Embodiments of the present invention will be described below with reference to the drawings.

1 and 2 show the overall configuration of the fluid control device according to the present invention.

The fluid control device comprises inert gas lines I1 (I2) (I3) I4 from I1 to I4, process gas lines T1 (T2) (T3) (T4) and one purge gas from T1 to T4. It has a plurality of lines I1 (I2) (I3) (I4) (T1) (T2) (T3) (T4) (P) consisting of the line P (P). Each line I1 (I2) (I3) (I4) (T1) (T2) (T3) (T4) (P) is a plurality of block-shaped seams 61, 62, 63 ( A lower layer (FIG. 2) having 64, 65, 66 and a plurality of fluid control devices 2, 51, 52, 53, 54, 55 and 56 arranged in the front-rear direction. It consists of a top layer having (Fig. 1).

3, T4 line T4 is shown as an example of a line structure. The line T4 is a mass flow controller 2 constituting the top layer, and four inlet side block-shaped joints 61, 62, 62, 63 which are provided on the inlet side and constitute the bottom layer. Three fluid controllers 51, 52, 53 and adjacent to the front and rear of the inlet-side block-shaped joints 61, 62, 62, 63, and the massflow controller 2; Of the four outlet side block joints 64, 65, 65 and 66 installed at the outlet side of the outlet side and forming the lower floor. It is provided with three fluid controllers 54, 55, 56 which adjoin back and forth and comprise a top layer.

The massflow controller 2 includes the frontmost block-shaped seam 63 of the four inlet side block seams 61, 62, 62 and 63 and the four outlet-side seam 64 and 65. 65) is installed over the rearmost block-shaped seam 64 of the 66. Between the two block-type joints 63 and 64 supporting the massflow controller 2, a spacer 70 for spacing close to the joints 63 and 64 is interposed. Two block-shaped joints 63 and 64 supporting the flow controller 2 are positioned. The other block-shaped seams 61, 62, 62, 65, 65, 66 are positioned by their close contact with each other.

The fluid controllers 51, 52, 53 on the inlet side are the manual valve 51, the first open / close valve 52, and the second open / close valve 53 from the side far from the mass flow controller 2. The fluid controllers 54, 55 and 56 on the outlet side are the first on / off valve 54, the second on / off valve 55 and the third on / off valve 56 from the side close to the mass flow controller 2. have.

Inert gas lines I1 (I2) (I3) (I4) and processing gas lines (T1) (T2) (T3) other than the T4 line (T4) have the same or similar configuration as the T4 line (T4), The same code | symbol is attached | subjected to the structure similar to T4 line T4, and description of each line I1 (I2) (I3) (I4) (T1) (T2) (T3) is abbreviate | omitted. The purge gas line P does not have a mass flow controller, and the upper layer is constituted by two open / close valves 52 and 54 and a closing block 57 disposed therebetween, and the lower layer is opened and closed. Blocked seams 61, 62, 65, 66 supporting the valves 52, 54 and the closing block 57 are connected via a pipe 72 and a block seam 66 at the rear. It is comprised by the block-shaped joint 67 for closing the front-back direction passage | route.

Inlet-side pipe joints 71 are provided in the lines I1, I2, I3, I4, T1, T2, T3, T4, and P, respectively. Inert gas lines I1 (I2) (I3) (I4) from I1 to I4 and process gas lines T1 (T2) (T3) (T4) from T1 to T4 exit the massflow controller 2. On the side, they are connected by the line connecting means 50 which is a main part of this invention, respectively. In addition, the block-shaped joint 65 on the outlet side of the inert gas line I3 of I3 and the block-shaped joint 65 on the outlet side of the process gas line T4 of T4 are connected through the pipe 73. In addition, the block-like seam 66 at the outlet side of the inert gas line I4 at I4 and the block-like seam 66 at the outlet side of the process gas line T3 at T3 are connected through the pipe 74. In FIG. 2, it is the moving piping which is arrange | positioned over the block-shaped joint 66 of the exit side of the process gas line T4 of T4, and the block-shaped joint 67 for closing the front-back direction passage of the purge gas line P. In FIG. Block 75, and the purge gas of the purge gas line P passes through each of the lines I1, I2, I3, I4, T1, T2, T3, T4 through this moving piping block 75. To be distributed). In addition, it is shown with the reference numeral 76 in FIG. 3, and it is installed in the inlet side of the massflow controller 2 between the block-type joints 62 and 63 and the opening / closing valve main body 53a. I) moving pipe block 76, wherein the upper layer has a two-layer structure consisting of the moving pipe block 76 and the valve body.

The inert gas line I3 of I3 is provided with an upward pipe joint 77 for discharge of the pipe 73 connected to the processing gas line T4 of T4, and the inert gas line I4 and T3 of I4. In the pipe 74 connecting the processing gas line T3, an exhaust pipe joint 78 for discharge is provided. In addition, at the outlet of the passage of the block-shaped joint 66 of the processing gas line T4 of T4, two discharge pipe joints 77 and 78 for upward and forward directions are provided.

In FIG. 9, the flow direction of the fluid in each line I1 (I2) (I3) I4 (T1) (T2) (T3) (T4) (P) and the line I1 (I2) (I3) The branching / joining between (I4) (T1) (T2) (T3) (T4) (P) is shown by the flowchart.

The line-to-line connecting means 50 is a two-way connecting block-type joint 64 (64A) and one arranged in the front-rear direction in the lower layers of the plurality of lines (I1) to (I4) or (T1) to (T4). The directional connection block type joints 65 and 67 and the opening / closing valve (upper layer) 54 arrange | positioned over these block type joints 64, 64A, 65 and 67 are provided. The plurality of two-way connecting block-type joints 64 and 64A have a main passage 81 in the front-rear direction and a branch passage 82 in the transverse direction, except for one seam 64A at the end. The two-way connecting block-shaped seam 64A at has only the passage 81 in the front-rear direction. As the one-way connecting block type joints 65 and 67, those having a joint 65 having only the front and rear passages 87 and a block type joint 67 for closing the front and rear passages are used. Each open / close valve 54 is composed of a two-way connecting valve body 54a and an actuator 54b, and the two-way connecting valve body 54a includes a main passage 88a and 88b in the front-rear direction and a branch passage in the horizontal direction. (Not shown in FIG. 3, see FIG. 8).

4 to 7, the detailed configuration of the two-way connecting block type seam 64 is shown. The two-way connecting block type seam 64 has a rectangular main body 64a, a horizontal projection 64b projecting to the left in the front edge of the main body 64a, and a right side in the front edge of the main body 64a. It consists of the recessed part 64c removed, and the V-shaped main passage 81 and the upper surface opening in front of the main passage 81 are seen in the horizontal direction extending the center of the left and right sides of the main body 64a in the front-rear direction. In the front-rear direction extending from the main body side upper surface opening 82a of the position shifted in the horizontal direction (left direction) slightly from (outlet) 81a to the protrusion side upper surface opening 82b in the left end of the horizontal projection 64b. The V-shaped branch passage 82 is seen.

The concave portion 64c of the two-way connecting block-shaped seam 64 is cut as large as possible without being caught by the main passage 81, and the horizontal projection 64b has about half of its tip side adjacent thereto. The shape fits snugly into the recessed portion 64c of the two-way connecting block-type joint 64. The lower layers of each of the lines I1, I2, I3, I4, T1, T2, T3, T4, and P are horizontally spaced apart from each other, as shown in FIG. The amount of protrusion of the horizontal protrusion 64b-the depression of the recess 64c = each line I1 (I2) (I3) (I4) (T1) (T2) (T3) (T4) There is a space | interval between the lower layers of (P).

4 and 5, reference numeral 83 denotes a through hole through which a bolt for attaching the block-shaped seam 64 to the substrate 1 is inserted, and reference numeral 84 denotes a fluid controller (opening and closing valve) main body 54a. ) Is a screw hole with a bottom into which the bolt to attach) is inserted. Reference numerals 85 and 86 are leak ports for detecting leakage. The upper surface opening of the block-shaped joint 64 is provided with a seal portion (there is no seal portion except the upper surface opening), and the block-shaped joint 64 is directly connected to the main body 54a of the on-off valve 54 through the seal portion. . Therefore, the leak port 85 and the isolated leak port 86 which lead to the upper surface opening sealed by the seal part can detect the presence or absence of the leak from the seal part.

In addition, although illustration is abbreviate | omitted, block-shaped seams, such as the code | symbol 62 (65), are made into the shape which made into a completely rectangular shape omitting the branching path 82 in the said 2-way connection block type seam 64. As shown in FIG. .

As shown in FIG. 3, in the two-way connecting valve main body 54a used for the interline connection means 50, the inlet passage 88a and the front block type which communicate with the back block-shaped seam 64 are shown. An outlet passage 88b communicating with the seam 65 is provided. Then, the opening of the inlet passage 88a is made to be blocked open by the actuator 54b. The other manual valve 51 and the main body of each open / close valve 52, 53, 55, 56 are also provided with corresponding block-type joints 61, 62, 63, 64, 65 and 66. Communication inlet and outlet passages (not shown) are provided.

Fig. 8 shows a passage of the line-to-line connection means (the configuration is the same as that for the inert gas lines I1 to I4 and the processing gas lines T1 to T4).

As shown in the figure, the passage 88 of the two-way connecting valve body 54a of each open / close valve 54 has one end in addition to the inlet passage 88a and the outlet passage 88b shown in FIG. One or two branch passages 90A in communication with the passage 88c around the valve seat, the other end communicating with the top openings 82a, 82b of the branch passage 82 of the two-way connecting block type seam 64. ) 90B. And since the opening of the inlet_path | path 88a is made to block | open and open by the actuator 54b, the inlet_path | path 88a, the passage | channel 88c around the valve seat, and the outlet channel | path 88b are the actuators 54b. The main passage 89 is blocked and opened by the &quot; In addition, in FIG. 8, each passage 88, 88a, 88b, 88c, 89, 90A, 90B of the two-way connecting valve body 54a is a passage of a block-shaped joint (indicated by a broken line). (81) 82 (87) and openings (indicated by large circles) 81a, 82a, 82b, 87a are easily drawn to represent solid lines.

The two-way connecting block type joint 64 of the fourth line T4 has a horizontal protrusion 64b, and has a main passage 81 in the front-rear direction and a branch passage 82 in the horizontal direction. In addition, although the recessed part 64c is unnecessary in the two-way connection block type joint 64 of the 4th line T4, the one with the recessed part 64c is used for reducing the number of components.

The one-way connection block type joint 65 of the fourth line T4 has a V-shaped passage 87 viewed in the transverse direction extending from the left and right centers of the main body in the front-rear direction.

The passage 88 of the two-way connecting valve body 54a of the fourth line T4 includes a main passage 89 formed of an inlet passage 88a, a passage 88c around the valve seat, and an outlet passage 88b; Branch passage extending from the passage 88c around the valve seat to the left and communicating with the main body side upper surface opening 82a of the branch passage 82 of the two-way connecting block-shaped seam 64 of the fourth line T4 ( 90A). The main passage 89 is the front and rear passages of the main passage 81 of the two-way connecting block type joint 64 of the fourth line T4 and the one-way connecting block type seam 65 of the fourth line T4 ( 87) is connected to allow disconnection and opening.

The two-way connecting block-shaped seam 64 of the third line T3 has a recess 64c into which the horizontal projection 64b of the two-way connecting block-shaped seam 64 of the fourth line T4 is fitted. And a horizontal protrusion 64b having the same shape as the horizontal protrusion 64b of the two-way connecting block-shaped joint 64 of the fourth line T4, and having a main passage 81 in the front-rear direction and a horizontal direction. It has a branch passage 82.

The one-way connecting block type joint 65 of the third line T3 has a V-shaped passage 87 viewed in the horizontal direction extending from the left and right centers of the main body in the front-rear direction.

The passage 88 of the two-way connecting valve body 54a of the third line T3 includes a main passage 89 including an inlet passage 88a, a passage 88c around the valve seat, and an outlet passage 88b; Branch passage 90B which extends from the passage 88c around the valve seat to the right and communicates with the protrusion side opening 82b of the branch passage 82 of the two-way connecting block type seam 64 of the fourth line T4. ) And the main body side opening 82a of the branch passage 82 of the two-way connecting block type seam 64 of the third line T3 extends to the left from the passage 88c around the valve seat. It has the branch passage 90A. The main passage 89 is the front and rear passages of the main passage 81 of the two-way connecting block type seam 64 of the third line T3 and the one-way connecting block type seam 65 of the third line T3 ( 87) is connected to allow disconnection and opening.

The two-way connection block type seam 64 of the second line T2 has the same configuration as the two-way connection block type seam 64 of the third line T3, and the same reference numerals are assigned to the same configuration.

The one-way connection block type seam 67 of the second line T2 is a block type seam for closing the front and rear passages without a passage.

The passage 88 of the two-way connecting valve body 54a of the second line T2 has the same configuration as the passage 88 of the two-way connecting valve body 54a of the third line T3, and has the same configuration. Are given the same reference numerals. The main passage 89 allows the outlet 81a of the main passage 81 of the two-way connecting block type seam 64 of the second line T2 to be opened and closed, but forwardly through the main passage 89. The flow of fluid is blocked because the one-way connecting block type joint 67 of the second line T2 is for closing.

The two-way connecting block-shaped seam 64A of the first line T1 has a recess 64c into which the horizontal protrusion 64b of the two-way connecting block-shaped seam 64 of the second line T2 is fitted. The horizontal projection 64b is not provided in order to avoid interference with the neighboring line I4. As the passage, only the V-shaped passage 81 is provided when the center of the left and right sides of the main body 64a is extended in the front-rear direction.

In this way, of the two-way connection block type joints 64 and 64A among the line connection means 50, one end of the line connection means 50 (the one which interferes with the other line I4) The joint 64A positioned at the end) has no horizontal protrusion 64b and branch passage 82, and the other joints have horizontal protrusion 64b and branch passage 82. As shown in FIG.

The one-way connection block type seam 67 of the first line T1 is a block type seam for closing the front-rear passage that does not have a passage.

The passage 88 of the two-way connecting valve body 54a of the first line T1 includes a main passage 89 including an inlet passage 88a, a passage 88c around the valve seat, and an outlet passage 88b; Branch passage 90B extending from the passage 88c around the valve seat to the right and communicating with the protrusion side opening 82b of the branch passage 82 of the two-way connecting block type seam 64 of the second line T2. ) The main passage 89 allows the outlet 81a of the main passage 81 of the two-way connecting block type seam 64A of the first line T1 to be opened and closed, but forward through the main passage 89. The flow of the fluid is blocked because the one-way connecting block 67 of the first line T1 is for closing.

According to the above-described line-to-line connecting means 50, the main passage 81 in the front-rear direction of the two-way connecting block-type seam 64 of the third and fourth lines T3 and T4 has a block-like seam at the rear ( The passage 87 in the front-rear direction 65 of 65 and the main passage 89 of the two-way connecting valve body 54a of the opening / closing valve 54 are connected, and the front-rear passages 81, 87, 89 are connected. The flow of the fluid through the front is appropriately blocked and opened by the operation of the actuator 54b of the on-off valve 54.

For the first and second lines T1 and T2, the rear block-shaped joint 67 is for closing, so that even when the actuator 54b of the on-off valve 54 is opened, the fluid forward There is no flow. On the other hand, since the first line T1 and the second line T2 are always in communication through the branch passages 90B, 82 and 90A, it is determined whether the actuator 54b of the on-off valve 54 is open or closed. Regardless, the flow of the fluid from the first line T1 to the second line T2 or the flow of the fluid in this reverse direction becomes possible.

For example, the opening / closing valve 54 of the first line T1 is opened, the opening / closing valve 54 of the second line T2 is opened, and the opening / closing valve 54 of the third line T3 is closed, the fourth line. When the opening / closing valve 54 of T4 is closed, the fluid (process gas) introduced into the first line T1 and the fluid (process gas) introduced into the second line T2 are connected between the lines. All branch passages 90B, 82, 90A ((90B) 82, 90A, 90B, 82, 90A of 50 are discharged from the outlet of the fourth line T4.

In this way, the line-to-line connection means 50 makes the connection in the front-rear direction and the line-to-line connection, and various gas control, such as distribution and mixing of process gas, gas purge by purge gas, etc. is attained. . Moreover, the horizontal projections 64b formed on the two-way connecting block-shaped seam 64 are sandwiched by the recesses 64c formed on the two-way connecting block-shaped seam 64, 64A adjacent in the transverse direction. Since the positioning in the horizontal direction is performed, the two-way connecting block-type joints 64 and 64A of the line-to-line connecting means 50 perform not only the branching of the fluid but also the positioning function.

In addition, when connecting 3 or less lines to the line-to-line connection means 50, what is necessary is just to subtract the 2nd line T2 and / or the 3rd line T3, and to connect 5 or more lines to the end of line ( In the case of the connection via 50, for example, the same configuration as that of the second line T2 or the third line T3 may be added as many times as necessary between the second line T2 and the third line T3.

In addition, the five moving piping blocks 76 provided on the inlet side of the massflow controller 2 are connected to the branch passages 82 of the two-way connecting block-type joints 64 of the above-described line connecting means 50. Corresponding passages are formed by the number of lines, but instead of the moving piping block 76, the inlet side of the mass flow controller 2 also serves as the line-to-line connecting means 50, thereby moving the moving piping block 76. Can be omitted.

In a fluid control apparatus having a plurality of lines and used in a semiconductor manufacturing apparatus, the welding point can be eliminated from the line connecting means connecting the line passages to each other, and the increase in the number of parts thereof can be suppressed. It is possible to easily cope with the expansion and change.

Claims (9)

Comprised of a plurality of lines, each line is composed of a lower layer having a plurality of joint members arranged in the front and rear direction, and an upper layer having a plurality of fluid control devices arranged in the front and rear direction, the lower layer of each line The front and rear block seams as elements and the on / off valves as top layer components disposed over their block seams are arranged so as to be arranged in the transverse direction, so that the front and rear passages in the front block seams and the front and rear directions in the rear block seams In a fluid control device in which a passage is made to be opened and closed by operation of an actuator of an on / off valve, At least one of the line connecting means for connecting the first and second lines adjacent in the horizontal direction includes a horizontal protrusion formed in one of the block-shaped seams of the front and the rear of the first line, and the horizontal protrusion is interposed. A concave portion formed in the block-like seam of the second line that can be formed, and a branch passage in the seam, the other end of which is formed on the upper surface of the seam main body, the other end of which is opened on the upper surface of the horizontal protrusion, A branch passage in the first valve body, which is installed in the main body of the opening / closing valve of the first line and is always in communication with a main body opening in the valve body and a seam body upper opening of the branch passage in the seam, and the main body of the opening / closing valve of the second line And a branch in the second valve body which always communicates a top opening of the transverse protrusion of the branch passage in the seam with the main passage in the valve body. A fluid control device characterized in that the furnace configuration. The method of claim 1, wherein in the absence of the line-to-line connecting means, the front one-way connecting block type seam having a front-rear passage and no transverse passage, and a front-rear passage and a transverse passage. According to the one-way connecting block type joint which does not have a back direction, and the one-way connecting valve main body which has a passage in the front-back direction and does not have a horizontal passage, the fluid control part which blocks and opens the front-back direction passage is formed, Where there is a connecting means, the front or rear two-way connecting block-type seams having a main passage in the front-rear direction and a branching passage in the transverse direction, and the rear or front of the rear-side passage having a transverse direction and not having a transverse passage According to the two-way connecting valve body having a one-way connecting block type seam, a main passage in the front-rear direction and a branch passage in the horizontal direction, And a fluid control portion for blocking and opening the branch passage. The contour shape of the two-way connection block type seam according to claim 2, wherein the contour shape of the two-way connection block type seam is a shape in which only a lateral protrusion is formed, a shape in which only a recess is formed, and a shape in which both a horizontal protrusion and a recess are formed. The fluid control device being one. The plurality of lines include an inert gas line, a process gas line, and a purge gas line, and not only the inert gas line and the process gas line, but also the purge gas line includes a top layer and a bottom layer. Fluid control device. The fluid control apparatus according to claim 1, wherein the positioning in the front-rear direction is performed by fixing the screw member to the substrate in a state in which joint members such as block-like joints constituting the bottom layer are in close contact with each other. The fluid control apparatus according to claim 5, wherein the massflow controller is disposed between the spaced block-like seams, and the spacer for setting the spacing is interposed between the block-shaped seams supporting the massflow controller. . The horizontal positioning is performed by fitting the transverse protrusion formed in the two-way connecting block type seam to the recess formed in the two-direction connecting block type seam adjacent to the transverse direction. Fluid control device. 4. The plurality of two-way connecting block-type joints of the line-to-line connecting means, wherein the one end of the line-to-line connecting means does not have a horizontal protrusion and a branch passage, and the other seams have a horizontal protrusion. And a branch passage. The front and rear passages in the front block-shaped seam and the front and rear passages in the rear block-shaped seam are V-shaped in the transverse direction, and the branch passages in the two-way connecting block-shaped seam are V-shaped in the front-rear direction. Fluid control device.

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