KR20080024548A - Spot cleaner - Google Patents

Abstract

A dust-proof unit (100) is provided with a slit main body (120) attachable to a cleaner main body (110), and a cover (130) attachable to the cleaner main body (110) to cover an outer section of the slit main body (120). Thus, the cover (130) prevents vibration from being easily transmitted to the external. ® KIPO & WIPO 2008

Description

Spot Cleaner {SPOT CLEANER}

The present invention relates to a spot cleaner for ejecting simple clean air, air containing ultrasonic waves vibrating at an ultrasonic frequency, or air containing positive and negative ions (hereinafter, these collectively referred to as cleaning air).

Objects to be damped, such as glass substrates used in TFT (thin-film transistor) liquid crystal panels, PDPs (plasma display panels), LCDs (liquid crystal displays), or sheets such as elongated paper or films (hereinafter, simply referred to as subjects to be damped). With respect to this, dust removal is performed by the vibration suppression apparatus.

The spot cleaner included in such a vibration damping apparatus has a function of blowing cleaning air to the object to be dusted, scattering dust from the object to be dusted, and sucking the scattered dust together with the cleaning air.

Hereinafter, the spot cleaner of the prior art will be described with reference to the drawings. 10 is an external perspective view of a spot cleaner of the prior art. 11 is a sectional view of a spot cleaner of the prior art.

As shown in FIG. 10, the spot cleaner 10 includes a cleaner main body 110 and a slit main body 120, and a slit main body 120 is provided below the cleaner main body 110.

As shown in FIG. 11, the cleaner main body 110 is comprised by the air suction chamber 111 (V1), the air blowing chamber 112 (P), and the air suction chamber 113 (V2). The air suction chambers 111 and 113 are connected to an intake pump not shown, and the air blowing chamber 112 is connected to the blowing pump not shown, respectively.

The air suction chamber 111, the air blowing chamber 112, and the air suction chamber 113 are each provided with the suction vent hole 114, the jet vent hole 115, and the suction vent hole 116, respectively.

The slit main body 120 is formed with a concave surface 121, a flat surface 122, and a concave surface 123 so as to face the object to be damped (G), and the suction slit 124 is flat with the concave surface 121. A jetting slit 125 is formed at 122, and a suction slit 126 is formed at the concave surface 123. The suction vent hole 114, the jet vent hole 115, and the suction vent hole 116 of the spot cleaner 10 are respectively the suction slit 124, the jet slit 125, and the suction slit 126 of the slit body 120. ).

In such spot cleaner 10, cleaning air is blown out from the blowing slit 125, and the dust on the surface to be dusted is suspended in the space between the spot cleaner 10 and the dust to be cleaned. At the same time, the dust suspended together with the cleaning air is sucked and removed by the suction slits 124 and 126 before and after the jetting slit 125.

Further, as another prior art of such spot cleaner, for example, Japanese Patent Application Laid-open No. Hei 11-104586 is known.

In recent years, however, an increase in vibration suppression capability has been required. Therefore, an increase in the ejection amount and suction amount of the cleaning air, or an increase in the sound pressure of the ultrasonic wave is effective in the case of the cleaning air including the ultrasonic wave, but in this case, there is a problem that the noise increases, in which case the noise is suppressed. At the same time, there was a demand to improve the damping ability. There is also a need to reliably remove scattered dust.

Accordingly, the present invention has been made to solve the above problems, and an object thereof is to provide a spot cleaner which simultaneously realizes the suppression of noise and the improvement of vibration suppression ability with a simple configuration.

In order to solve the above problems, the spot cleaner according to claim 1 includes a cleaner body having at least one air suction chamber and an air blowing chamber, respectively;

A slit body mounted on the cleaner body and having a linear jet slit communicating with the air blowing chamber and a linear suction slit communicating with the air suction chamber,

And a cover attached to the cleaner body to cover the outer side of the slit body,

The cleaning air is blown toward the substrate surface through the linear jet slit communicating with the air blowing chamber, and the scattered dust is sucked through the suction slit of the linear 15 communicating with the air suction chamber.

Moreover, the spot cleaner which concerns on invention of Claim 2 is the spot cleaner of Claim 1,

A buffer space is formed between the cover and the slit body.

In addition, the spot cleaner which concerns on invention of Claim 3 is the spot cleaner of Claim 2,

The suction amount of the cleaning air of the air suction chamber is larger than the blowing amount of the cleaning air from the air blowing chamber, and the inside of the buffer space is kept at a low pressure with respect to the external space.

In addition, the spot cleaner according to the invention of claim 4 is the spot cleaner according to any one of claims 1 to 3,

The vibration damping unit is characterized in that the air blowing chamber and two air suction chambers interposed therebetween are arranged side by side along the substrate conveyance direction.

In addition, the spot cleaner according to the invention of claim 5 is the spot cleaner according to any one of claims 1 to 4,

The vibration damping unit is disposed to face each other in a pair of two on the front and back surfaces of the substrate.

In addition, the spot cleaner according to the invention of claim 6 is the spot cleaner according to any one of claims 1 to 5,

The jetting slit is characterized in that the jetting direction is inclined in the opposite direction to the substrate conveying direction.

According to the present invention as described above, it is possible to provide a spot cleaner which simultaneously realizes the suppression of noise and the improvement of the vibration suppression ability with a simple configuration.

1 is an external perspective view of a spot cleaner.

2 is a bottom view of the spot cleaner.

3 is a cross-sectional view of the spot cleaner.

It is explanatory drawing explaining the flow of the cleaning air of a spot cleaner.

It is explanatory drawing explaining the flow of the cleaning air of a spot cleaner.

It is explanatory drawing explaining the flow of the cleaning air of a spot cleaner.

7 is a sectional view of a spot cleaner of another embodiment.

8 is a sectional view of a spot cleaner of another embodiment.

9 is a sectional view of a spot cleaner of another embodiment.

10 is an external perspective view of a spot cleaner of the prior art.

11 is a sectional view of a spot cleaner of the prior art.

Embodiments of the present invention will be described with reference to the drawings. 1 is an external perspective view of a spot cleaner, FIG. 2 is a bottom view of the spot cleaner, and FIG. 3 is a sectional view of the spot cleaner. 3 is a cross-sectional view taken along the line A-A of FIG. In addition, although there exists a some overlapping structure with the prior art, it demonstrates with the same code | symbol for comparison.

As shown in FIG. 1 or FIG. 2, the spot cleaner 100 includes a cleaner body 110, a slit body 120, and a cover 130. The slit main body 120 is provided below this cleaner main body 110, and the cover 130 is attached to the lower outer side part of the cleaner main body 110. As shown in FIG. 3, the buffer space 140 covered with the cleaner main body 110, the slit main body 120, the cover 130, and the to-be-damped object G surface is formed.

As shown in FIG. 3, the cleaner main body 110 is comprised by the air suction chamber 111 (V1), the air blowing chamber 112 (P), and the air suction chamber 113 (V2). The air suction chambers 111 and 113 are connected to an intake pump not shown, and the air blowing chamber 112 is connected to the blowing pump not shown, respectively.

The air suction chamber 111, the air blowing chamber 112, and the air suction chamber 113 are each provided with the suction vent hole 114, the jet vent hole 115, and the suction vent hole 116, respectively.

The slit main body 120 is formed with a concave surface 121, a flat surface 122, and a concave surface 123 so as to face the object to be damped (G), and a suction slit 124 is formed on the concave surface 121. The injection slit 125 is formed in the plane 122 and the suction slit 126 is formed in the concave surface 123. The plane 122 is formed in order to make the flow volume of the cleaning air which blows off uniform. The concave surfaces 121 and 123 are formed in order to facilitate the flow of cleaning air to be sucked. The suction vent hole 114, the jet vent hole 115, and the suction vent hole 116 of the spot cleaner 100 are respectively the suction slit 124, the jet slit 125, and the suction slit 126 of the slit body 120. ).

The cover 130 is a rectangular cylinder having a rectangular opening in this embodiment. In addition, although various embodiments are possible with respect to the cover 130, what is necessary is just to be able to form the buffer space 140 between the slit main body 120 and the cover 130 at least.

The buffer space 140 is a rectangular space formed between the cleaner body 110, the slit body 120, and the cover 130. As shown in FIG. 3, this buffer space 140 becomes a space which is placed between the object to be subjected to vibration damping again when the spot cleaner 100 is used. The buffer space 140 communicates with the outside world through the gap portion 141 formed between the object to be damped G and the cover 130. In addition, the buffer space 140 should just be a space which covers the periphery of the slit main body 120 at least, and is not limited to the rectangular space.

Subsequently, the use method of such spot cleaner 100 is demonstrated. In the spot cleaner 100, the cleaning air is blown out from the jet slit 125, and the dust on the surface of the object to be dusted G is suspended in the space between the spot cleaner 100 and the object to be dusted G, The dust on the surface of the object G is suspended in the space between the spot cleaner 100 and the object to be cleaned G. At the same time, when the cleaning air is sucked by the suction slits 124 and 126 before and after the blowing slit 122, it is removed together with the floating dust. In addition, the total suction amount of the cleaning air of the air suction chambers 111 and 113 is made larger than the ejection amount of the cleaning air from the air blowing chamber 112.

The spot cleaner 100 outputs cleaning air (simple clean air, air containing ultrasonic waves vibrating at an ultrasonic frequency, or air containing positive and negative ions). In such cleaning air, vibration occurs at the time of blowing, and noise becomes a problem. In particular, in the case of cleaning air containing ultrasonic waves, noise due to ultrasonic vibration becomes remarkable. However, even if these vibrations reach the cover 130 through the blocking space 140, the cover 130 attenuates the vibration by the ultrasonic waves, so that the noise reaching the operator is reduced. In addition, since the gap 141 is a narrow gap, most of the gap 141 passes through the cover 130, so that the noise reaching the worker is also reduced in this respect.

In addition, although it is in communication with the external space through the gap portion 141, the inside of the cover 130 is considered to have a larger suction amount than the blowing amount of the cleaning air, so that the buffer space 140 has a low pressure with respect to the external space. It is held, and the clearance part 141 takes in intake from the external space to the internal buffer space. This point will be described with reference to the drawings. 4, 5, and 6 are explanatory views for explaining the flow of cleaning air of the spot cleaner, respectively.

In the board | substrate conveyance direction, as shown in FIG. 4, the cleaning air ejected from the blowing slit 125 is attracted by the suction slit 124,126 before and behind. Air is also introduced from the buffer space 140 or the gap portion 141 and is sucked by the suction slits 124 and 126. Therefore, no air flows from the buffer space 140 to the outside world. In addition, since the suction amount is large, the inside of the buffer space 140 is sufficiently maintained at low pressure.

Next, in the lateral direction of the jet slit 125, even if a blow-by in which a part of the cleaning air jetted from the jet slit 125 flows in the horizontal direction occurs, it is low pressure. Air flows into the buffer space 140 from the external space through the gap portion 141, and the air collides in the buffer space 140 and flows into the buffer space 140 having a low pressure, thereby cleaning from the gap portion 141. No air is leaked out.

Next, in the lateral direction of the suction jet slit 124, 126, it is suctioned by the suction slit 124, 1126 as shown in FIG. Air is also introduced from the buffer space 140 or the gap portion 141 and is sucked by the suction slits 124 and 126. For this reason, the cleaning air does not flow out from the gap part 141. FIG.

In this way, the gap portion 141 allows air to flow into the cover 130 from the external space at any place. As a result, the dust scattered by the cleaning air does not go out from the buffer space 140, and the dust May be sucked by the suction slit 124, 126.

Since the shock absorbing space 140 can be formed by the cover 130 in this way, it is possible to realize the suppression of noise and the improvement of the vibration suppression ability with a simple configuration.

Subsequently, another embodiment will be described with reference to the drawings. 7 is a sectional view of a spot cleaner of another embodiment. In addition, about the structure which overlaps with embodiment mentioned above, the same code | symbol is attached | subjected and the description which is repeated is abbreviate | omitted. In the present embodiment, the spot cleaners 100 shown in FIG. 2 are arranged so as to face each other in a pair of two on the front and back sides of the object to be subjected to vibration damping. In such a structure, vibration damping can be performed on both front and back surfaces of the object to be subjected to vibration damping. For this reason, noise reduction and improvement of vibration damping ability are realized together.

Subsequently, another embodiment will be described with reference to the drawings. 8 is a sectional view of a spot cleaner of another embodiment. In addition, about the structure which overlaps with embodiment mentioned above, the same code | symbol is attached | subjected and the description which is repeated is abbreviate | omitted. In the present embodiment, there is almost no difference from the embodiment shown in FIG. 3, but in the embodiment shown in FIG. 3, the ejection slit 125 of the slit main body 120 is formed in a direction substantially perpendicular to the object to be subjected to vibration damping, In the embodiment shown in FIG. 8, the ejection direction of the ejection slit 125 'of the slit main body 120 is inclined in the opposite direction to the substrate conveyance direction a. In such a configuration, there is an advantage that the flow of cleaning air is stabilized when the object to be damped G enters the spot cleaner 100. When dust removal is performed by the spot cleaner 100, the flow rate from the air blowing chamber 112 (P) to the air suction chamber 111 (V1) increases, so that some air flows into the air suction chamber 111 (V1). Although it tries to reach the clearance gap 141 of the side cover 130, since it collides with the air which flows in from an outer space, and flows into the buffer space 140, cleaning air does not leak from the cover 130. For this reason, vibration is made possible on the surface of the to-be-damped object G, and for the said reason, reduction of a noise and improvement of a damping capability are simultaneously realized.

Subsequently, another embodiment will be described with reference to the drawings. 9 is a sectional view of a spot cleaner of another embodiment.

In this embodiment, the ejection slit 125 'of the slit main body 120 as shown in FIG. 8 has a spot cleaner 100 in which the ejection direction is inclined in the opposite direction to the substrate conveyance direction a. It was made to be arranged in a pair of two on the front and back both sides. In such a structure, vibration damping can be performed on both front and back sides of the object to be subjected to vibration damping, and the noise reduction and the improvement of the vibration damping ability are simultaneously realized by the above reason.

In addition, the present invention may be modified in various ways. For example, although the to-be-damped object G is conveyed on the conveyance roller etc. which are not shown in FIG. 7 and FIG. 9, in this case, the upper surface (upper damping unit 100 of the to-be-damped object G) is carried out. The suction force to the upper side due to the venturi effect is generated by the air flowing through), and the suction force to the lower side due to the venturi effect by the air flowing through the lower surface (lower vibration damping unit 100 side) of the dust removal target G. Although this occurs, it is possible to ensure that the object to be subjected to vibration is conveyed stably by adjusting the balance of the Venturi effect to increase the suction force to the lower side.

In this case, the suction pressure (suction amount) with respect to the lower damping unit 100 and the suction pressure (suction amount) with respect to the upper damping unit 100 are made the same, and the ejection pressure from the lower damping unit 100 is made into the same. By making (eject amount) larger than the ejection pressure (eject amount) from the upper damping unit 100, the suction force by the venturi effect of the lower damping unit 100 is increased by the venturi effect of the upper damping unit 100. It can also be made larger than a suction force, and can give a force which presses a board | substrate with the conveyance roller which is not shown in figure.

Further, the ejection pressure (injection amount) from the lower vibration suppression unit 100 and the ejection pressure (injection amount) from the upper vibration suppression unit 100 are made the same, and the suction pressure (suction) to the lower vibration suppression unit 100 is applied. The amount greater than the suction pressure (suction amount) with respect to the upper damping unit 100, and the suction force by the venturi effect of the lower damping unit 100 is greater than the suction force by the venturi effect of the upper damping unit 100. It is also possible to provide a force for pressing the substrate with the conveyance roller.

Moreover, by adjusting the space | interval from the lower vibration damping unit 100 to the back surface of the to-be-damped object G so that it may become a length less than the space | interval from the upper damping unit 100 to the surface of the to-be-damped object G, The suction force due to the venturi effect of the lower vibration damping unit 100 is made greater than the suction force caused by the venturi effect of the upper damping unit 100 so as to impart a force to press the object to be damped G with the conveying roller. It may be.

It can also be made to further improve usability as such a damping unit.

Claims (6)

The cleaner body which has one or more air suction chambers and air blowing chambers each, A slit body mounted to the cleaner body and having a linear jet slit communicating with the air blowing chamber, and a linear suction slit communicating with the air suction chamber, and A cover mounted to the cleaner body to cover an outer portion of the slit body Including, The cleaning air is blown toward the surface of the substrate through the linear blowing jet slit communicating with the air blowing chamber, and the scattered dust is sucked through the linear suction suction slit communicating with the air suction chamber. Spot cleaner. The method of claim 1, Spot cleaner, characterized in that the buffer space is formed between the cover and the slit body. The method of claim 2, A spot cleaner, wherein the suction amount of the cleaning air in the air suction chamber is larger than the ejection amount of the cleaning air from the air blowing chamber, and the inside of the buffer space is kept at a low pressure with respect to the external space. The method according to any one of claims 1 to 3, The vibration damping unit is a spot cleaner, characterized in that the air blowing chamber and two air suction chambers for sandwiching the air blowing chamber are arranged side by side along the substrate conveyance direction. The method according to any one of claims 1 to 4, The vibration damping unit is disposed on both sides of the front and rear surfaces of the substrate in a pair of spot cleaners, characterized in that. The method according to any one of claims 1 to 5, The jet cleaner has a spot cleaner characterized in that the jet direction is inclined in a direction opposite to the substrate conveyance direction.

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