KR20080017127A - Correction for equiment used method and high voltage generation correction for equiment used the plate electrode - Google Patents

Abstract

An apparatus for correcting a high voltage generating device by using a plate electrode and a method for using the same are provided easily to measure a high voltage with a sensor detecting an electric field. An apparatus for correcting a high voltage generating device by using a plate electrode includes an upper metal plate electrode(40) formed with predetermined area and thickness. A lower metal plate electrode(30) is installed for the lower metal plate electrode to be in parallel to the metal plate electrode. The upper metal plate electrode and the lower metal plate electrode are fixed by a movable supporting plate. An electric field measuring sensor(10) is installed at an upper end of the lower metal plate electrode. An outer power source(20) is connected to the upper metal plate electrode and the lower metal plate electrode. The outer power source applies power source to the upper metal plate electrode and the lower metal plate electrode. A digital oscilloscope(60) is connected to the electric field sensor to measure an output voltage between the upper metal plate electrode and the lower metal plate electrode.

Description

Apparatus for calibrating high voltage source using parallel plate electrode and method using same {Correction for equiment used method and high voltage generation correction for equiment used the plate electrode}

1 is a block diagram according to the present invention,

2 is a block diagram showing a flat plate electrode and an electric field measuring sensor according to the present invention,

3 is a block diagram showing a measuring method using the apparatus of the present invention;

Figure 4 is a table showing the sensor output according to the voltage between the fixed electrode electrode parallel plate in accordance with the present invention,

5 is a diagram showing a sensor output according to the distance between the parallel plate electrodes while maintaining a constant applied voltage according to the present invention;

6 is a table showing the magnitude of the high voltage according to the output of the sensor according to the present invention.

<Explanation of symbols for the main parts of the drawings>

10: electric field measuring sensor 20: external power supply

30: lower metal plate electrode 40: upper metal plate electrode

50: electrode support 51: electrode fixing plate

60: digital oscilloscope

The present invention relates to a device for calibrating a high voltage source using a parallel plate electrode, and more particularly, to a device for calibrating a high voltage source, comprising: an upper metal plate electrode formed to have a predetermined width and thickness; A lower metal plate electrode formed to be the same as the upper metal plate and installed to be parallel to the upper metal plate electrode; A moving pedestal for fixing the upper and lower metal plate electrodes; An electric field measuring sensor installed at an upper end of the lower metal plate; An external power supply device connected to the upper and lower metal plates to apply power; And a digital oscilloscope connected to the electric field measuring sensor for measuring output voltages between upper and lower metal plate electrodes. The present invention relates to a device for calibrating a high voltage generator using a parallel plate electrode.

The method of calibrating a high voltage source of 1 kV or more conventionally used is as follows.

First, the ratio of the high voltage divider is measured using a standard high voltage generator, and accurate values such as 1:10, 1: 100, 1: 1,000 are recorded.

Then, the high voltage generator for calibration is input at a specific ratio (1:10, 1: 100, 1: 1,000) of the high voltage divider, and the output attenuated by the voltage divider is measured using a calibrated voltage meter.

Finally, multiplying the meter reading by the ratio of the potentiometer gives the correct output of the high voltage source for calibration. For example, if the meter reading is 2.1 volts and the potentiometer ratio is 1: 1,000), the output of the calibration high voltage source will be 2.1 × 1,000 = 2,100 volts.

This conventional calibration procedure requires a calibrated high voltage voltage divider and expensive equipment to calibrate the high voltage voltage divider. However, obtaining them from small and medium-sized companies is difficult because they are expensive and difficult to prepare.

The present invention has been made to solve the above problems, the shape of a quadrangular in planar and vertically coupled to each corner, and coupled to the pillar, one side and the other side is a plurality of layers, the electrode support is parallel to It is coupled, the upper and lower metal plate electrodes are installed in parallel to the electrode support, and a sensor for detecting an electric field is attached to the upper side of the lower metal plate electrode is provided with a device for calibrating a high voltage source using a parallel plate electrode. The purpose is to.

The present invention has the following features to achieve the above object.

An apparatus for calibrating a high voltage source, comprising: an upper metal plate electrode having a predetermined size, thickness, and width; A lower metal plate electrode formed to be the same as the upper metal plate and installed to be parallel to the upper metal plate electrode; A moving pedestal for fixing the upper and lower metal plate electrodes; An electric field measuring sensor installed at an upper end of the lower metal plate; An external power supply device connected to the upper and lower metal plates to apply power; And a digital oscilloscope connected to the electric field measuring sensor for measuring the output voltage between the upper and lower metal plate electrodes.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram according to the present invention, Figure 2 is a block diagram showing a flat plate electrode and an electric field measuring sensor according to the present invention, Figure 3 is a block diagram showing a measuring method using the apparatus of the present invention, 4 is a diagram showing the sensor output according to the voltage fixed to the parallel plate electrode spacing according to the present invention, Figure 5 is a diagram showing the sensor output according to the distance between the parallel plate electrode while maintaining the applied voltage according to the invention 6 is a diagram showing the magnitude of the high voltage according to the output of the sensor according to the present invention.

When describing the present invention with reference to the drawings, first constitute the top and bottom layers of the movable pedestal in the shape of a square, the pillars are coupled to each corner of the top and bottom layers to connect the top and bottom layers are configured in a square pillar shape, A rod-shaped electrode support 50 is formed in parallel in a plurality of layers inside one side and the other side of the pillar, and the metal plate electrodes 30 and 40 are fixed at a predetermined position on the rear side of the electrode support 50. Electrode fixing plate is coupled, the bottom of the column is attached to the wheel is formed to be easily moved.

An electric field for fixing the upper and lower metal plate electrodes 30 and 40 formed of a metal material and having a predetermined width and thickness to the electrode support 50 of the movable pedestal, and measuring an electric field on the lower metal plate electrode 30. The measuring sensor 10 is attached, and the electric field measuring sensor 10 is connected to the measuring device 60 to measure the electric field between the upper and lower metal plate electrodes 30 and 40.

A power electrode is formed at one side of the upper and lower metal plate electrodes 30 and 40 to conduct external power applied from the external power supply device 20 to the metal plate electrodes 30 and 40.

The method of calibrating the power source using the apparatus for calibrating a high voltage source using the parallel plate electrode is as follows.

First, when the external power supply device 20 is connected to the upper and lower metal plate electrodes 30 and 40 to apply power, the electric field is generated, and the electric field is applied to the electric field measuring sensor 10 attached to the upper side of the lower metal plate electrode 30. The measurement is transmitted to the digital oscilloscope 60.

At this time, the output of the electric field measuring sensor 10 is represented by E. The equation is as follows.

Where V is the voltage applied to the metal plate electrodes 30 and 40, and d is the interval between the metal plate electrodes 30 and 40.

In order to know the value of E in the above equation, if only the relation function f of the above equation is known, if the meter voltage E is measured while the interval between the metal plate electrodes 30 and 40 is kept constant, the calculated voltage is calculated immediately even if the applied voltage is not measured directly. You will know.

The measurement method using the device will be described in detail as follows.

First, the interval between the metal plate electrodes 30 and 40 is kept constant, and then the output of the standard voltage source is applied to the metal plate electrodes 30 and 40 step by step at 0.1 to 1 kV (voltage below the output of the calibration high voltage source). Let it be. At this time, if the output of the standard voltage generator is changed in stages and the meter voltage is measured, the approximate function f of the above equation can be calculated.

Next, in the same system, instead of the standard voltage generator, the output of the calibration high voltage generator is applied to the parallel plate electrode and the meter output is measured. In this case, the applied voltage is 1 ~ 10 kV, which is the high voltage range for calibration.

Finally, the measured source voltage and the known relation function f can be calculated by substituting the above equation for the source voltage.

If you know the relation function f of the system in this calibration sequence, the calibration process can be completed simply by the second and third steps.

That is, in a method using a device for calibrating a high voltage source using a parallel plate electrode, a metal plate electrode mounting step of loading a metal plate electrode at a predetermined interval on an electrode support formed on a moving pedestal; (S10) applying a standard voltage to the metal plate electrode; A step of applying a standard voltage; and (S20) an approximate function discharge step of obtaining an approximation function by measuring the standard voltage step by step; (S30) a step of applying a calibration voltage after applying the calibration voltage after measuring the standard voltage; (S40) a meter voltage measuring step of measuring the calibration voltage with a measuring device; (S50) a voltage calculation step of substituting the measured function of the meter voltage and a related function into an equation; (S60).

The present invention will be described in more detail as follows.

Electric field measurements are parallel plate electrodes arranged in parallel up and down as shown in Figure 1, AC high voltage sources for applying high voltages to the electrodes, circular sensors for electric field measurements, and digital oscilloscopes for measuring output voltage values from the sensors. It consists of.

The parallel plate electrode in FIG. 1 is produced by attaching Cu foil to both sides of 1 m (width) x 1 m (length) x 0.03 m (thickness) plywood. In addition, the distance between the parallel plate electrodes can be gradually changed from 0.1 m to 1 m at intervals of approximately 0.1 m. The sensor for electric field measurement is made of a circular epoxy substrate with a diameter of 110 mm and a thickness of 3 mm. The sensor output voltage is measured by measuring the effective value with a digital oscilloscope (TDS1012).

The relationship between the voltage applied to the parallel plate electrode and the output ( E ) of the electric field measuring sensor can be written as follows.

식 1

Equation 1

Where V is the voltage applied to the parallel plate electrodes and d is the spacing between the parallel plate electrodes. The function f is a function that depends on the voltage and the plate spacing. In fact, since the parallel plate electrode is not infinitely large, the output of the sensor is not E = (V / d) , and the function f varies according to the voltage and the electrode plate gap as shown in Equation 1. In addition, when measuring the electric field under high voltage, the electric field is distorted due to the change of impedance due to the change in the length of the measuring wire and the position of the wire connecting the sensor substrate for measuring the electric field and the measuring device. This results in a large difference in measured voltage. Therefore, the sensor measurement voltage is different according to the change of measurement lead even in the same parallel plate electrode spacing and applied voltage. Therefore, experiments should be conducted under the same conditions for reproducibility of measurement.

In order to obtain the correlation function f between the voltage and the pole plate spacing for the electric field of Equation 1, first, the electric field is measured by fixing the pole plate gap and increasing the voltage. The first experiment first measures the sensor output electric field by fixing the distance between the parallel plate electrodes ( d ) arranged up and down and increasing the voltage in the range of 0.1 kV to 1 kV with a standard voltage generator (FLUKE 5720A). In this experiment, the sensor output was measured while increasing the voltage at a total of 10 pole plate intervals in the range of pole plate interval d = 91.1 cm ~ 985.4 cm, and the measurement results are shown in FIG. 4.

4 shows that the sensor output electric field ( E ) and the applied voltage ( V ) are proportional at all pole plate intervals ( E E V) , and the narrower the gap between the pole plates, the increase rate of the sensor output voltage with respect to the applied voltage It can be seen that this increases. Using this method, we can measure the sensor output electric field while increasing the voltage to obtain the relation function of the voltage for the electric field.

Secondly, the experiment was performed while changing the parallel plate electrode spacing d step by step while keeping the applied voltage V constant. The applied voltage was measured at V = 100 V, 250 V, 500 V, 750 V, 1000 V, and the results are shown in FIG.

The curve of Figure 5 was fitted in the following equation.

(n < 1) 식 2

( n < 1) (2)

The sensor output electric field ( E ) decreased exponentially as in Eq. 2 without being inversely proportional to the linear function of the distance ( d ). The exponent n of Equation 2 does not have a constant value and approaches 1 as the applied voltage V of the plate increases. In addition, since the index n is changed as the distance between the parallel plate electrodes varies even at the same pole plate applied voltage, the pole plate applied voltage cannot be accurately known only by the sensor output voltage. This result appears to be due to the fact that the size of the parallel plate electrodes is not infinite and is limited to 1 m × 1 m.The relation function of the sensor output electric field according to the distance between the parallel plate electrodes is an approximation function, which is complex It is difficult to calculate the applied voltage accurately.

As a result, it can be seen from the above two measurement results that the sensor output electric field and the pole plate applied voltage measured with the pole plate constant at the parallel plate electrode structure can be expressed as a linear function. If only the measurement is made, the unknown electrode applied voltage can also be known simply and accurately using Equation (1). Therefore, this method is intended to extend the measurement range of high voltage sources.

Based on the results discussed above, in order to extend the measurement range of the high voltage source, the high voltage source measuring system using the electric field measuring sensor is the same as that of FIG. 1, and the distance d between the parallel plate electrodes was kept constant at 885.8 mm. The extension of the measurement range for high voltage sources is divided into two phases:

First, the high voltage of 1 kV ~ 30 kV is applied to the parallel plate electrode by using the high voltage source that knows the output value accurately, and the output electric field ( E ) of the electric field measuring sensor is measured by the digital oscilloscope 60. The measurement results are shown in FIG. 6.

As a result of fitting the experimental results up to 30 kV of FIG. 6, the relationship between the output electric field E and the voltage V of the electric field measuring sensor was linear. The relation function f is given by

식 3

Expression 3

In Equation 3, y is the voltage ( V ) of the high voltage source, x is the output electric field (E) of the sensor.

The second step is to calibrate the voltage from an unknown high voltage source 40 kV to 60 kV by measuring the electric field, using the relation function f obtained in the first step of the voltage range 1 kV to 30 kV. It applies a high voltage of 40 kV to 60 kV from an unknown high voltage source to the parallel plate electrode and measures the sensor output electric field. The output electric field of the electric field sensor is input to the x variable of the relation function f of Equation 3, and the calculated y-variable value is the high voltage measured by the electric field measuring sensor. Table 1 shows the output voltage of the high voltage calculated by the measurement of the electric field from 40 kV to 60 kV.

Rated voltage of unknown high voltage source (kV) Sensor output electric field (V) High voltage source output voltage (kV) obtained by the relevant function 40 50 55 60 32.23 38.83 43.67 47.72 40.33 48.59 54.64 59.70

Table 1

To evaluate the uncertainty of high voltage measurement technology using electric field measurement sensors, the uncertainty factor is used to find the standard uncertainty ( u 1, u 2, ...,) and the degree of freedom for each factor. Relative expansion uncertainty ( U ) is obtained by multiplying the relative composite standard uncertainty by the inclusion factor according to the effective degrees of freedom and confidence level. Since the inclusion factor is 2, the relative expansion uncertainty ( U ) is expressed as

식 4

Equation 4

Uncertainty factors for high voltage measurements using electric field sensors are summarized in the first column of Table 2, respectively. The magnitudes of each uncertainty evaluated for high voltage values (40 kV, 50 kV, 55 kV, 60 kV) are shown, and the relative composite standard uncertainty and relative expansion uncertainty are shown in the last two columns of Table 2, respectively. The relative expansion uncertainty for high voltage measurements is within about 3.15%.

unit %

      Uncertainty factor 40 kV 50 kV 55 kV 60 kV Repeated measurement, u 1 ac voltage source accuracy, u 2 electric field distortion effect, u 3 electrode plate geometry, u 4 fitting error, u 5 0.52 0.50 0.40 0.20 0.96 0.79 0.50 0.40 0.20 0.96 0.69 0.50 0.40 0.20 0.96 1.05 0.50 0.40 0.20 0.96   Relative Composite Standard Uncertainty 1.28 1.41 1.36 1.57 Relative Expansion Uncertainty, U (k = 2) 2.56 2.83 2.72 3.15

Table 2

On the other hand, in order to verify the effectiveness of the high voltage measurement technique using the electric field measuring sensor, the results of directly measuring the high voltage source with the high voltage voltage divider are compared with each other in Table 3. The last column of Table 3 shows the relative differences for the high voltage values obtained in both methods. Relative differences are defined as

식 5

Equation 5

Where V _D is the high voltage value measured by the high voltage divider and V _E is the high voltage value measured by the electric field measuring sensor. The relative differences were -0.37%, -0.37%, -0.08% and -0.18% at rated voltages of 40 kV, 50 kV, 55 kV and 60 kV, respectively. This is a fairly good agreement given that the uncertainties for the two methods are about 3%.

Rated voltage (kV) High voltage output voltage (kV) measured by electric field measuring sensor  High voltage output voltage (kV) measured with high voltage divider Relative Difference (%) 40 50 55 60 40.33 48.59 54.64 59.70 40.18 48.41 54.59 59.59 -0.37 -0.37 -0.08 -0.18

Table 3

As described above, the present invention is a planar quadrangular shape, the pillars are vertically coupled to each corner, and are coupled to the pillars, the one side and the other side is a plurality of layers, the electrode support is coupled to parallel The upper and lower metal plate electrodes are installed in parallel with the electrode support, and a sensor for detecting an electric field is attached to the upper side of the lower metal plate electrode to easily measure a high voltage.

Claims (6)

In the device for calibration of high voltage source, Upper metal plate electrodes 30 and 40 having a predetermined width and thickness; A lower metal plate electrode 30 formed to be the same as the upper metal plate electrode 40 and installed to be parallel to the upper metal plate electrode 40; A moving pedestal for fixing the upper and lower metal plate electrodes 30 and 40; An electric field measuring sensor 10 installed on the upper metal plate electrode 30; An external power supply device 20 connected to the upper and lower metal plate electrodes 30 and 40 to apply power; A digital oscilloscope 60 connected to the electric field measuring sensor 10 and measuring output voltages between upper and lower metal plate electrodes 30 and 40; and calibrating a high voltage source using a parallel plate electrode. Device. The method of claim 1, The movable pedestal is formed in the shape of a square in the plane is coupled to the vertical column at each corner, the electrode support 50 of a plurality of layers on one side and the other side of the movable pedestal is coupled to the column in parallel, A device for calibrating a high voltage source using a parallel plate electrode, characterized in that the wheel is coupled to the lower side. The method of claim 1, The movable pedestal is formed of an insulating material, the electrode support 50 is formed in a rod-like device for calibrating a high voltage source using a parallel plate electrode, characterized in that coupled to the pillar. The method of claim 1, An apparatus for calibrating a high voltage source using a parallel plate electrode, wherein an electrode fixing plate is formed on a rear side of the electrode support such that a metal plate electrode is fixed at a predetermined position. In the method using a device for calibrating a high voltage source using a parallel plate electrode, A metal plate electrode installation step of loading the metal plate electrodes at a predetermined interval on the electrode support formed on the movable support; (S10) A standard voltage applying step of applying a standard voltage to the metal plate electrode; (S20) An approximate function ejecting step of obtaining an approximate function by measuring the standard voltage step by step; (S30) A calibration voltage applying step of applying a calibration voltage step by step after measuring the standard voltage; (S40) A meter voltage measuring step of measuring the calibration voltage with a measuring device; And a voltage calculation step of calculating the measured voltage and the related function by using an equation; The method of claim 5, The standard voltage is 0.1 ~ 10 kV, the applied voltage is a calibration method using a high voltage source calibration device using a parallel plate electrode, characterized in that 10 ~ 100 kV.

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