KR20070107409A - Variety changing management system of semiconductor equipments and variety changing method using the same - Google Patents

Abstract

A system and a method for verifying semiconductor manufacturing equipments are provided to minimize time delay of the whole process by automatically inputting a completion code input of a unit operation. Plural unit operations are sequentially performed in manufacturing equipments. An equipment server(50) is connected to the manufacturing equipments to control the equipments. A terminal(60) is connected to the equipment server to change set values of the manufacturing equipments and monitor manufacturing and replacing processes. The manufacturing equipment has a display member(70) having plural lamps connected to the equipment server, and first and second alarming members connected to the equipment server.

Description

VARIETY CHANGING MANAGEMENT SYSTEM OF SEMICONDUCTOR EQUIPMENTS AND VARIETY CHANGING METHOD USING THE SAME}

1 is a configuration diagram schematically showing a breed companionship system of a molding facility according to the prior art.

Figure 2 is a flow chart schematically showing a molding facility variety replacement method according to the prior art.

Figure 3 is a schematic diagram showing a molding facility varieties replacement management system according to an embodiment of the present invention.

4 is a perspective view showing a state display means according to the present embodiment;

5 is a flowchart showing unit operations and standard working hours according to the present embodiment.

<Description of Symbols for Main Parts of Drawings>

10: Variety Replacement Management System

20: molding equipment

50: equipment server

60: terminal

70: status display means

70a: yellow warning light

70b: red warning light

70c: orange warning light

70d: blue warning light

70e: green warning light

80: first alarm means

80a: green lamp

80b: yellow lamp

80c: red lamp

90: second alarm means

90a: green warning light

90b: yellow warning light

90c: red warning light

The present invention relates to a varietal replacement management system of a semiconductor manufacturing method, and more particularly, to a varietal replacement management system of a semiconductor manufacturing facility that can minimize the replacement time when the varietal replacement of a semiconductor manufacturing facility and a variety replacement method using the same. .

In general, a semiconductor package manufacturing process using a lead frame includes a chip attaching process for attaching a semiconductor chip to a lead frame, a wire bonding process for electrically connecting a terminal portion of the semiconductor chip to a lead frame, and a semiconductor using an insulating resin such as an epoxy resin. A molding process of forming a portion including a chip and a wire as a seal portion, a plating process for improving solder wettability so that the lead exposed to the outside of the seal portion can be easily bonded when mounted on the substrate, and the like.

Such various manufacturing processes are performed through semiconductor manufacturing facilities (hereinafter, referred to as manufacturing facilities) corresponding to the respective processes. In this case, each manufacturing facility is a mold or parts suitable for the varieties of the semiconductor package to be manufactured to proceed with the process, if the manufactured semiconductor package is changed to a different varieties, and then replaced with a different mold or parts suitable for this, The manufacturing process is continued.

Among these manufacturing facilities, a molding plant is described as an example of a variety change method as follows.

1 is a configuration diagram schematically showing a breed companionship system of a molding facility according to the prior art.

Referring to FIG. 1, the conventional variety change system 100 includes a plurality of molding facilities 120, a terminal 160, and a facility server 150.

The plurality of molding facilities 120 perform molding processes independently of each other, and all of them are connected to the facility server 150 online.

The facility server 150 is connected to all the molding facilities 120, the terminal 160, and a database server (not shown), and receives the process basic data from the database server and based on the molding facility 120. Operate and control them.

The terminal 160 is connected to the facility server 150 and used by a worker to change setting values of the molding facilities 120 or to monitor an operation state and a process progress of the molding facilities 120.

Looking at the conventional molding equipment varieties replacement method using the conventional varieties replacement system 100 having such a configuration as follows.

Figure 2 is a flow chart schematically showing a molding facility variety replacement method according to the prior art.

1 and 2, the conventional molding equipment varieties replacement method is a preparatory operation (S100) to prepare a part to be replaced (hereinafter, a mold), the operation to replace and install the prepared mold with a mold installed in the molding facility (S200), an adjustment operation (S300) for adjusting the position of the replaced mold, a cleaning operation (S400) for cleaning the molding facility 120 including the mold, and the molding facility 120 is operated once to replace the mold. The inspection is completed (S500) to check whether it is done properly.

Each unit task is started after the operator enters the start code (A01 to E01) of the operation to the facility server 150 through the terminal 160. Similarly, when the unit work is completed, the operator inputs the completion codes (A010 to E010) of the work to notify the facility server 150 that the unit work is completed to complete the unit work.

In more detail, in order to start the preparatory work S100, the worker inputs a start code A01 of the preparatory work through the terminal 160. Accordingly, the facility server 150 recognizes that the preparation work S100 is started during the variety replacement work of the molding facility 120 through the input start code A01. After the preparation work (S100) is completed, the worker enters the completion code (A010) of the preparation work (S100), the equipment server 150 is prepared through the completion code (A010) of the input preparation work (S100) It is recognized that all of the work S100 is completed.

As such, when all the preparatory work (S100) is completed, the worker enters the start code (B01) of the present work (S200) to start the next unit work, the main work (S200), the installation server 150 After the recognition, the molding facility 120 starts to actually replace the varieties. When the operation (S200) is completed in the molding facility 120, the worker inputs the completion code (B010) of the operation (S200) through the terminal 160 as in the preparation operation (S100), the operation (S200). The facility server 150 is notified that this is completed. Since the adjustment operation (S300), the cleaning operation (S400), and the inspection operation (S500) to be carried out in the same manner as the above-described process will be omitted in detail.

As described above, in the varietal replacement method of the semiconductor manufacturing facility including the molding facility according to the prior art, a varietal replacement operation is performed by a worker inputting a corresponding code through a terminal at the start and completion of each unit work. However, such a conventional variety replacement method has the following problems.

In the process of changing varieties first, the progress of each unit work is not clearly displayed externally, so it is difficult for the worker to easily understand the current progress of the unit work of the manufacturing facility except the worker in charge. It is difficult for an operator to quickly grasp the state of the manufacturing facility and proceed with the work.

In addition, after the previous work is completed, the start code must be entered at each start of the subsequent work, but there is a problem in that the process is delayed because the operator may not input it quickly.

In addition, since the working time for each unit of work is not standardized, the working time is not managed, which leads to a long time for the entire varietal change work, thereby delaying the overall processing time and lowering the production yield. there is a problem.

Accordingly, an object of the present invention is to solve the problems of the prior art as described above, the semiconductor manufacturing that can minimize the delay of the overall process time by efficiently managing the replacement work during the varieties replacement operation of the semiconductor manufacturing equipment The present invention provides a variety change management system of a facility and a variety change method using the same.

Variety replacement management system of a semiconductor manufacturing facility according to the present invention for achieving the above object is a varieties replacement management system of a semiconductor manufacturing facility to replace a variety by sequentially performing a plurality of unit operations, the manufacturing process and varieties replacement work is in progress Manufacturing equipments, equipment servers connected to manufacturing equipments to control manufacturing equipments respectively, terminals connected to equipment servers to change setting values of manufacturing equipments or to monitor the manufacturing process and variety change of manufacturing equipments, and equipments It is characterized in that it comprises a status display means connected to the server and displaying the unit operations carried out in the manufacturing facilities to the outside.

In this case, the status display means includes lamps which have the same number as the unit operations and emit light corresponding to each unit operation, and the lamps preferably have different colors of emitted light.

In addition, in the present invention, it is preferable that each of the manufacturing facilities is further provided with a first alarm means connected to the facility server and displaying a time elapsed rate for each unit work, wherein the first alarm means emits different light. The three lamps may include a combined tower lamp and a buzzer.

In addition, the present invention preferably further comprises a second alarm means connected to the facility server, the second alarm means collectively displaying the rate of change of varieties for the group of production facilities, wherein the second alarm means is a group of production facilities. Three lamps which are installed at positions close to each other and emit light of different colors may be installed side by side.

Variety replacement method of the semiconductor manufacturing equipment according to the present invention is a varietal replacement method of using the varieties replacement management system of the semiconductor manufacturing equipment, and sequentially performing the unit operations based on a preset standard work time, a) to the equipment server A step in which a start code of the unit work is input, b) a step in which the unit work is performed in the manufacturing facility, c) a step in which the unit work is completed, and an end code of the unit work is input to the facility server, and d) If the unit task is the last unit task, terminate the varieties change task; if it is not the last unit task, start step b) and c) are repeated after the start code of the subsequent unit task is automatically entered. It is characteristic to include.

In this case, the unit operations include a sequential preparation operation, a present operation, an adjustment operation, a cleaning operation, and an inspection operation, and a standard operation time is preferably set for all unit operations, respectively.

Further, in the present invention, the green lamp of the first alarm means flashes when the running time of the unit work progressed in the manufacturing facility is within 80% of the standard working time, and when 80% of the standard working time elapses, It is preferable that the yellow lamp flashes, and the red lamp of the first alarm means flashes at the same time as the buzzer sounds when the standard working time elapses,

In addition, the present invention is a green lamp of the second alarm means flashes when the unit work in one or more manufacturing facilities of a group of manufacturing facilities, and the unit work performed in one or more manufacturing facilities of a group of manufacturing equipment is a standard working time of When 80% of the elapsed time, the yellow lamp of the second alarm means flashes, and it is preferable that the red lamp of the second alarm means flashes when the unit work being performed at one or more manufacturing facilities in the group of manufacturing elapses the standard working time. .

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In describing the embodiments, descriptions of technical contents which are well known in the technical field to which the present invention belongs and are not directly related to the present invention will be omitted. In addition, detailed description of components having substantially the same configuration and function will be omitted.

For the same reason, some components in the accompanying drawings are exaggerated, omitted, or schematically illustrated, and the size of each component does not entirely reflect the actual size.

3 is a configuration diagram schematically showing a molding facility variety replacement management system according to an embodiment of the present invention.

Referring to FIG. 3, the variety change management system 10 according to the present embodiment includes the facility server 50, the terminal 60, the molding facility 20, the status display means 70, and the first and the first agents. Two warning means 80, 90.

The facility server 50 is connected online with the respective molding machines 20 and controls the molding machines 20 through the embedded machine control software.

The molding facilities 20 are actually equipments in which a molding process of the semiconductor package is performed, and are connected to the facility server 50, respectively.

The terminal 60 is connected to the facility server 50 and used by the operator to change setting values for each molding facility 20 or to monitor the process progress. 1 according to the present embodiment shows an example in which one terminal 60 is installed for a group of molding facilities 20 (for example, 6 to 12). Therefore, a group of molding facilities 20 are controlled through one terminal 60. However, the present invention is not limited thereto, and when a larger number (eg, 12 or more) of molding facilities 20 are installed, it is preferable that a plurality of terminals 60 are also installed.

Status display means 70 are respectively installed on the upper end of the molding facility 20 so that the operator can easily recognize, and is connected to the facility server 50. 4 is a perspective view showing the status display means according to the present embodiment. As shown in FIGS. 3 and 4, the status display means 70 includes a body 72 and a plurality of warning lights 70a to 70e. do. Each of the warning lamps 70a to 70e emits light of different colors, and is installed in a line along the longitudinal direction of the body 72. In the present embodiment, five warning lights 70a to 70e are arranged in the order of the yellow warning light 70a, the red warning light 70b, the orange warning light 70c, the blue warning light 70d, and the green warning light 70e from the left along the horizontal direction. The furnace body 72 is installed. However, the present invention is not limited thereto and may be installed in a vertical direction. In addition, the number of the warning lights 70a to 70e is preferably installed to correspond to the number of unit operations according to the variety replacement method described later. In addition, the warning lamps 70a to 70e of the status display means 70 according to the present embodiment can also use a lamp or the like that can blink.

The first alarm means 80 is installed at a position close to the status display means 70 installed at the upper end of the molding facility 20, and is connected to the facility server 50, respectively. The first alarm means 80 is a tower lamp and a buzzer configured by a green lamp 80a at the bottom, a yellow lamp 80b at the center, and a red lamp 80c at the top. Not included).

The second alarm means 90 are connected to the facility server 50 and collectively display the breed change time elapsed rate for a group of molding facilities 20 (eg 6-12). The second alarm means 90 is located at the central portion of the group of molding installations 20 and is installed at a location (for example, a ceiling, etc.) that can be easily identified by the workers. In the second alarm means 90 according to the present embodiment, the green warning lamp 70e, the yellow warning lamp 70a, and the red warning lamp 70b are installed side by side in the body 92. However, the present invention is not limited thereto and may be installed in the form of a vertical tower like the first alarm means 80.

Next, look at the breed replacement method using the breed replacement management system 10 according to the present embodiment having the configuration as described above.

5 is a view showing the unit work and the standard working time according to this embodiment.

3 to 5, the variety change method according to an embodiment of the present invention is a plurality of unit operations (S10 to S50) proceeds sequentially based on a preset standard working time. Unit operations (S10 to S50) for varieties replacement is a preparatory operation (S10) to prepare a mold or parts (hereinafter, a mold) to be replaced, the present operation for replacing the mold of the molding facility 20 using the prepared mold ( S20), an adjustment operation (S30) for adjusting the position of the replaced mold, a cleaning operation (S40) for cleaning the molding facility 20 including the mold, and a molding facility 20 once operated to replace the mold properly. It includes a check operation (S50) to check whether the made.

The facility server 50 is set to the standard working time for each of these unit operations (S10 to S50). The standard work time is set in advance by the operator, and the unit work (S10 to S50) is progressed and is set to the universal time required.

The standard working time of the preparatory work S10 according to this embodiment is set to 20 minutes, and the standard working time of the cleaning work S40 is set to 80 minutes. For this operation (S20), the standard working time is set to 2 minutes if only the mold is replaced, 60 minutes if one worker replaces all parts, and 20 minutes if two workers replace all parts together. Standard working hours are set.

As described above, a process of sequentially processing the unit operations S10 to S50 in which the standard work time is set, is as follows. The worker proceeds with the preparation unit (S10), which is the first unit work in order to proceed with the varieties replacement work, wherein the molding process is not carried out in the molding facility 20, the preparation work (S10) during the varietal replacement work is carried out. The process is made to recognize the facility server 50. The worker enters the start code (A01) of the preparatory work (S10) by using the terminal 60, this is the equipment server 50, varieties replacement work is in progress in the molding facility 20, the preparation of It is recognized that work S10 has started.

When the start code A01 of the preparation operation S10 is input, the facility server 50 turns on the yellow warning lamp 70a which is the first lamp of the status display means 70 and at the same time the The green lamp 80a flashes. Therefore, the worker may recognize that the preparation operation S10 is in progress through the yellow warning light 70a of the status display means 70 even if the molding facility 20 is not examined in detail, and the first warning means 80 It can be seen that the work is progressing smoothly through the green lamp 80a of FIG.

Here, the warning lights 70a to 70e of the status display means 70 correspond to the unit operations S10 to S50. That is, the preparation unit (S10), which is the first unit operation, corresponds to the yellow warning lamp (70a), the next unit operation, the main operation (S20) is a red warning lamp (70b), and the adjustment operation (S30) is an orange warning lamp (70c). The cleaning operation S40 corresponds to the blue warning lamp 70d and the inspection operation S50 corresponds to the green warning lamp 70e, respectively. Therefore, through the color of the warning lights (70a to 70e) that is lit on the status display means 70, workers can easily recognize what unit work is in progress in the molding facility (20).

On the other hand, the worker who entered the start code (A01) of the preparatory work (S10) proceeds to the preparatory work (S10) in the molding facility 20, and when all the preparatory work (S10) is completed, the operator again the terminal ( Through 60, the end code A010 of the preparation operation S10 is input. At this time, the facility server 50 checks the time that elapses from the time when the start code A01 of the preparation work S10 is input and compares it with the standard working time of the preparation work S10.

The facility server 50 proceeds from the molding facility 20 when the time required for the preparation work S10 has passed 80% of the standard work time, that is, the standard work time of the preparation work S10 set to 20 minutes. When the preparation operation S10 to be 16 minutes has elapsed, the yellow lamp 80b of the first alarm means 80 blinks and the buzzer sounds. Therefore, other workers easily recognize that the time spent in the preparation work (S10) that is carried out in the molding facility 20 has passed 80% of the standard work time, and other workers who have recognized this work together in preparation work (S10). ) To proceed to the remaining preparatory work (S10) more quickly.

In addition, when the required time of the preparatory work S10 passes the standard work time, that is, when the preparatory work S10 progressed in the molding facility 20 passes 20 minutes, the facility server 50 receives the first time. The red lamp 80c of the alarm means 80 flashes and the buzzer sounds at the same time. Accordingly, the surrounding workers will be aware of this and participate in the remaining preparation work (S10) together to complete the remaining preparation work (S10) more quickly.

When all the preparatory work (S10) that has been carried out in the molding facility 20 is completed, the operator enters the end code (A010), the start code (B01) of the subsequent unit work (S20) is automatically entered, This operation S20 is started. Variety replacement management system 10 according to this embodiment does not enter the start code (B01) of the operation (S20) of the worker when the operation (S20) is started as in the prior art, the preparation work ( When the end code A010 of S10 is input, the facility server 50 inputs the start code B01 of this work S20 which is a subsequent work by itself.

As described above, in the variety change method according to the exemplary embodiment of the present invention, subsequent unit operations S20 to S50 are automatically started by input of end codes A010 to E010, so that each unit operations S20 to S50 are switched to start codes. (B01 to E01) It is possible to minimize the time spent waiting for input.

When this operation S20 starts, the installation server 50 turns off the yellow lamp 70b of the state display means 70 which was lighted, and of the state display means 70 which shows progress of this operation S20. The red warning lamp 70b is turned on. The lighting of the lamps 80a to 80c of the first alarm means 80 over time of this operation S20 proceeds in the same manner as the above-described preparation operation S10, which is a subsequent operation such as adjustment, cleaning, The same applies to the inspection operations S30 to S50.

When the operation (S20) is completed, the worker inputs the end code (B010) of the operation (S20) to the facility server 50 by using the terminal 60, the facility server 50 received the input described above As in the preparation work S10, the start code C01 of the adjustment work S30, which is a subsequent work, is automatically input. This automatic entry of the start code C01 applies equally to all subsequent unit operations S30 to S50. Therefore, detailed descriptions of the unit operations ranging from the adjustment operation S30 to the inspection operation S50 will be omitted.

On the other hand, the second alarm means 90 divides the entire molding equipment 20 into a plurality of areas, and one second alarm means 90 is provided for a group of molding facilities 20 located in the respective areas. Installed to display the rate of change of breeding time. The operation of the second alarm means 90 is made similar to the first alarm means 80, and only differs in that it displays the rate of change of breeding time for a group of molding facilities 20.

 Looking at the operation of the second alarm means 90 as follows. When the unit work (S10 to S50) for varieties change in one or more molding equipment 20 of the group of molding equipment 20 is in progress, the facility server 50 is a green warning light (90a) of the second alarm means (90) Flashes. Accordingly, the worker may easily recognize that the variety change work is being performed in at least one molding facility 20 of the group of molding facilities 20 to which the second alarm means 90 belongs via the second alarm means 90. Can be.

In addition, when the product replacement unit work (S10 to S50) that is carried out in one or more molding equipment 20 of the group of molding equipment 20 has passed 80% of the standard working time, the facility server 50 is a second The yellow warning light 90b of the alarm means 90 flashes, and when the standard working time has elapsed, the facility server 50 flashes the red warning light 90c of the second alarm means 90.

At this time, the varietal replacement unit work (S10 to S50) in one molding facility 20 has passed 80% of the standard working time, the varietal replacement unit work (S10 to S50) in another molding facility 20 is the standard working time When the elapsed time has passed, the facility server 50 flashes the yellow warning light 90b and the red warning light 90c of the second alarm means 90 simultaneously.

The second alarm means 90 actuated in this way has a buzzer to add an audible effect when the yellow warning light 90b and the red warning light 90c flash like the first warning means 80 to obtain a high alarm effect. It is also possible to install together.

In addition, the facility server 50 displays various data related to the variety change work of each molding facility 20 through the terminals (60). In this case, the displayed data includes the name of the molding facility in which the replacement work is performed, the standard work time of each unit work (S10 to S50), the elapsed time of the current unit work (S10 to S50), and the unit work (S10 to S50) currently in progress. ), The standard working time and time elapsed rate for the entire variety change work, and in addition, it is preferable to display more various data for the convenience of the operator.

On the other hand, the varieties replacement management system of the semiconductor manufacturing equipment according to the present invention and varieties replacement method using the same is not limited to the embodiment, various modifications are possible by those skilled in the art within the spirit of the present invention. Do. For example, in the present embodiment, although a flashing lamp or a warning lamp is used as the status display means, the first alarm means, and the second alarm means, the present invention is not limited thereto, and the LED (light-emitting diode) or the liquid crystal display (LCD) may be used. If you can effectively represent the time elapsed to the workers can be applied in various ways. In addition, the present embodiment has been exemplified for the method of replacing the varieties of the molding equipment consisting of five unit operations, it can be applied to all the semiconductor manufacturing equipment to replace the parts or mold when changing the varieties in addition to the molding equipment. In addition, the various elements and regions in the figures are schematically drawn. Accordingly, the present invention is not limited by the relative size or spacing drawn in the accompanying drawings.

As described above, in the varieties replacement management system of the semiconductor manufacturing equipment of the present invention and the varieties replacement method using the same, the start code of the subsequent unit work is automatically input when the end code of the immediately preceding unit work is input, and the preset standard job is set. Based on time, various alarm means display the elapsed rate of all unit operations.

According to this, the variety change work is automatically performed according to the standard working time, and all workers can easily recognize the time elapsed rate of the molding facility in which the unit work is performed. Therefore, the replacement operation time can be managed efficiently, thereby minimizing the delay of the entire process time, thereby increasing the yield.

Claims (11)

Variety replacement management system of semiconductor manufacturing equipment that replaces varieties by sequentially performing a number of unit operations, Manufacturing facilities in which a manufacturing process and a variety change work are carried out; A facility server connected to each of the manufacturing facilities to control the manufacturing facilities; A terminal connected to the facility server to change a setting value of the manufacturing facilities or to monitor the manufacturing process and variety change of the manufacturing facilities; And And a status display means connected to the facility server and displaying the unit operations performed in the manufacturing facilities to the outside. The semiconductor device according to claim 1, wherein the status display means includes lamps having the same number as the unit jobs and emitting light corresponding to the unit jobs, wherein the lamps have different colors of emitted light. Variety replacement management system of manufacturing equipment. The variety change management of the semiconductor manufacturing facility according to claim 1, wherein each of the manufacturing facilities is further connected with the facility server and further provided with first alarm means for displaying a time elapsed rate for each unit operation. system. 4. The breed change management system according to claim 3, wherein the first alarm means comprises a tower lamp and a buzzer in which three lamps emitting different light are combined. 5. The method according to any one of claims 1 to 4, further comprising second alarm means connected to the facility server and collectively displaying a rate of change of breeding time for the group of production facilities. Variety replacement management system of semiconductor manufacturing equipment. 6. The variety change management system according to claim 5, wherein the second alarm means is installed at a position close to the group of manufacturing facilities, and three lamps emitting different colors are installed side by side. system. Variety replacement management system of semiconductor manufacturing equipment that replaces varieties by sequentially performing a number of unit operations, Manufacturing facilities in which a manufacturing process and a variety change work are carried out; A facility server connected to each of the manufacturing facilities to control the manufacturing facilities; And And a terminal connected to the facility server to change setting values of the manufacturing facilities or to monitor the manufacturing process and the variety change operation of the manufacturing facilities. The plurality of manufacturing facilities include: A status display means connected to the facility server and including a plurality of lamps that emit light according to the unit work being performed; And A first alarm means including a tower lamp and a buzzer configured to have a green lamp installed at the bottom, a yellow lamp installed at the center, and a red lamp installed at the top, and connected to the facility server; , Close to and easily identified from the group of manufacturing facilities, connected to the facility server, green lamps, yellow lamps, and red lamps are arranged in series to provide a rate of breed change time for the group of manufacturing facilities. A variety change management system for semiconductor manufacturing equipment, characterized in that a second alarm means for displaying the overall value is provided. A variety replacement method using a variety replacement management system of a semiconductor manufacturing facility according to claim 7 and sequentially performing the unit operations based on a preset standard working time, a) inputting a start code of the corresponding unit work to the facility server; b) performing the unit work in the corresponding manufacturing facility; c) the unit work is completed, and the end code of the unit work is input to the facility server; And d) if the unit work is the last unit work, terminate the variety change work, If it is not the last unit operation, step b) and step c) is repeated after the start code of the subsequent unit operation is automatically entered; varieties of the semiconductor manufacturing equipment comprising a. 9. The method of claim 8, wherein the unit operations include a sequential preparation operation, a present operation, an adjustment operation, a cleaning operation, and an inspection operation, wherein the standard operation time is set for each of the unit operations. A method for changing varieties of semiconductor manufacturing equipment. The green lamp of the first alarm means blinks when the running time of the unit work performed in the manufacturing facility is within 80% of the standard working time, and when 80% of the standard working time has elapsed. And the yellow lamp of the first alarm means flashes, and when the standard working time elapses, the buzzer sounds and the red lamp of the first alarm means flashes. The method according to claim 8, wherein the green lamp of the second alarm means flashes when the unit work is performed in one or more of the group of manufacturing facilities, and proceeds in one or more of the group of manufacturing facilities. The yellow lamp of the second alarm means flashes when the unit work is over 80% of the standard work time, and the unit work being carried out at one or more of the group of manufacturing facilities causes the standard work time. And a red lamp of said second alarm means flashes when the elapsed time elapses.

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