KR20070045431A - Method for patterning of different materials on a substrate and a capillary flow control device using the substrate produced therefrom - Google Patents

Abstract

The present invention relates to a method for manufacturing a single substrate patterned with a dissimilar material, and a capillary flow control device using the substrate manufactured by the method. More specifically, the hole pattern is formed on the first substrate, and the hole patterning is performed. Contacting the second substrate with one surface of the formed first substrate, and then inserting a liquid heterogeneous material into the hole pattern, and solidifying the heterogeneous material and removing the second substrate. A method for manufacturing a substrate and a capillary flow control device using a single substrate patterned with a dissimilar material produced by the method.

According to the present invention, a heterogeneous material can be patterned on a single substrate in a simple manner, and the hydrophobic material is patterned on a hydrophilic substrate, or the hydrophilic material is patterned on a hydrophobic substrate, thereby stopping, branching, concentrating, and delaying capillary flow. It is possible to control, and is useful for fields such as microfluidics.

Patterning, Substrate, Hydrophilic, Hydrophobic

Description

Method for Patterning of Different Materials on a Substrate and a Capillary Flow Control Device Using the Substrate Produced Therefrom}

1 is a schematic diagram schematically showing a patterning method of the present invention.

2 is a schematic diagram of a microchannel according to Embodiment 1 of the present invention.

3 is a view of the capillary flow in accordance with Example 1 of the present invention.

4 is a schematic diagram of a microchannel according to Embodiment 2 of the present invention.

5 is a view of the capillary flow in accordance with Example 2 of the present invention.

6 is a schematic diagram of a microchannel according to Embodiment 3 of the present invention.

7 is a view of the capillary flow in accordance with Example 3 of the present invention.

The present invention relates to a method for manufacturing a single substrate patterned with a dissimilar material, and a capillary flow control device using the substrate manufactured by the method. More specifically, a hole pattern is formed in a first substrate, and the first substrate is formed. The second substrate is brought into contact with one surface of the substrate, and then a liquid dissimilar material is inserted into the hole pattern, and the dissimilar material is solidified. A capillary flow control device using a single substrate on which a material is patterned.

To produce a single substrate patterned with dissimilar materials, a representative technique for patterning materials is photolithography. Using traditional photolithography techniques, smaller size patterns can be formed by using light sources with an exponentially decreasing wavelength. Light sources used in traditional photolithography are Krypton fluoride (KRF) excimer lasers that produce g-line (435 nm), i-line (365 nm) and 248 nm Deep Ultraviolet (DUV). In the case of photolithography using the light source, there is an advantage in that the substrate can be mass-produced, but there is a problem in that patterning of 100 nm or less is impossible.

Accordingly, in the art, EUV lithography, X-ray lithography, ion lithography and E-beam lithography have been developed as alternatives to traditional photolithography. Non-traditional lithography using this light can produce a shape of several nanometers, which overcomes the disadvantages of the conventional photolithography, the "100 nm barrier". However, the problem is that the production cost is high and the manufacturing method is not suitable for mass production. have.

In particular, EUV (Extream Ultralithography) has the advantage that it is possible to pattern below 90nm by using extreme ultraviolet light for the exposure process, but there is a problem that it is very difficult to make a mask or a lens. X-ray lithography, which uses smaller wavelengths than ultraviolet light, also has a problem of making 1: 1 masks, which increases production costs.

In addition, E-Beam lithography has a merit in that patterning is performed by scanning an electron beam on a substrate, and thus finer patterning is possible than in the EUV lithography method. There is also a disadvantage that is not easy.

Meanwhile, a method of patterning a hydrophobic material by the photolithography, a method of patterning a self-assembled monolayer of n-octadecyl-trichlorosilane (OTS) on a glass substrate or silicon oxide layer (Handique, K., et al., SPIE 3224 (210, 1997), hydrophobic patterning in microchannels by selectively depositing octafluorocyclobutane (C ₄ F ₈ ) using plasma in silicon microchannels formed by deep reactive etching (DRIE) (Helene Andersson, et al., Sensors and Actuators B , 75: 136, 2001).

However, the common drawbacks of the traditional and non-traditional photolithography described above are the difficulty in patterning on non-planar surfaces, the inability to form patterns with specific chemical functions on the substrate surface, and the ability to produce only two-dimensional structures in advance. It is necessary to fabricate the formed master mask and that the applied material is limited to the photosensitizer.

Meanwhile, Professor Harvard's Whitesides has produced and announced soft lithography, which uses soft polymers to form patterns on surfaces without using light or high energy particles (Amit Kumar and George M. Whitesides, Appl . Phys. Lett ., 1993: 63, 2002). Soft lithography refers to the process of creating a pattern or structure between 30 nm and 100 μm using a stamp made of elastomer, and using microcontact printing, replica molding, and microtransfer molding. There is a kind. Soft lithography enables the production of substrates at low manufacturing costs, the ability to form patterns with various chemical properties on the surface of the substrate, the application of materials is not limited, and the formation of structures and patterns on non-planar surfaces. Although there is an advantage in that it can be generated, there is a problem in that such a soft lithography has to produce a master mask in which a pattern is formed in advance, and a manufacturing method is somewhat difficult.

Thus, in the art, it is possible to easily pattern heterogeneous materials on a single substrate, to pattern hydrophobic materials on a hydrophilic substrate, or to pattern hydrophilic materials on a hydrophobic substrate, thereby controlling various control of capillary flow, and There is no need to manufacture, and since the existing equipment can be used as it is, there is an urgent need for the development of a new method of manufacturing a single economical substrate.

Accordingly, the present inventors have completed the present invention as a result of diligent efforts to develop a method of patterning a substrate which is simpler, more economical, and can be suitably used for capillary flow control than a conventional method of manufacturing a single substrate by photolithography and soft lithography. Was done.

After all, the main object of the present invention is to form a hole pattern on the first substrate, to contact the second substrate on one surface of the first substrate, to insert a liquid heterogeneous material into the hole pattern, and to solidify the heterogeneous material. It is to provide a method for producing a single substrate patterned heterogeneous material characterized.

Another object of the present invention is to provide a capillary flow control device using a substrate produced by the method.

In order to achieve the above object, the present invention comprises the steps of (a) forming a hole pattern on the first substrate; (b) contacting a second substrate with one surface of the hole patterned first substrate; (c) inserting a heterogeneous liquid material into the hole pattern; (d) solidifying the heterogeneous material; And (e) removing the second substrate, thereby providing a method of manufacturing a single substrate patterned with a dissimilar material.

In the present invention, the material of the first substrate may be any one or more selected from the group consisting of polymer, glass, quartz, silicon, metal, ceramic, porous membrane and the like.

In the present invention, the hole pattern may be formed by laser processing or Computerized Numerical Control (CNC) processing, but the present invention is not limited thereto. Any method of forming the hole pattern on the first substrate may be used. It is possible.

In the present invention, when the first substrate is a hydrophilic material, the dissimilar material is preferably a hydrophobic material, and conversely, when the first substrate is a hydrophobic material, the dissimilar material is preferably a hydrophilic material.

In the present invention, the second substrate may be characterized in that the silicone rubber, the heterogeneous material may be characterized in that the liquid thermosetting material or UV curing material.

The present invention also provides a single substrate patterned with a dissimilar material produced by the above method.

The present invention is also made by bonding a single hydrophilic substrate (cover substrate) patterned with a hydrophobic material prepared by the above method to a substrate on which a straight micro channel, a fluid inlet port and an air outlet port are formed, and the microchannel formed substrate. The contact angle with respect to the fluid and the contact angle with respect to the fluid of the cover substrate is less than 90 degrees, respectively, to provide a capillary flow control device configured to allow the fluid introduced by the capillary phenomenon to naturally flow through the microchannel.

When using the capillary flow control device, according to the patterned shape of the hydrophobic material, it is possible to effectively control the capillary flow. For example, when the patterned hydrophobic material is disposed in the center of the microchannel in a size smaller than the width of the microchannel, the introduced fluid may branch, and the patterned hydrophobic material may be larger in size than the width of the microchannel. When placed in the center of the channel, the introduced fluid can be stopped, and when the patterned hydrophobic material is disposed on both sides except the central portion of the microchannel, the introduced fluid can be concentrated.

In the present invention, the material of the substrate on which the linear microchannel is formed may be any one or more selected from the group consisting of polymer, glass, quartz, silicon, metal, ceramic, porous membrane, and the like.

Hereinafter, the present invention will be described in more detail with reference to Examples. These examples are only for illustrating the present invention, it will be apparent to those skilled in the art that the scope of the present invention is not to be construed as being limited by these examples.

Example  1: heterogeneous material Patterned  Fabrication of a Single Board

In order to insert heterogeneous materials into the first substrate 10, which is an acrylic film (Sumitomo Chemical Co., Ltd.) having a thickness of 125 µm, the holes 20 are patterned as shown in FIG. did. In order to fill the heterogeneous material 90 in the holes of the patterned first substrate, as shown in FIG. 1C, a second substrate 30 of PDMS (polydimethylsiloxane) material, which is precured on one surface of the first substrate 10, is pre-cured. ) Was attached. When a polydimethylsiloxane (PDMS), which is a kind of silicone rubber, is used as the second substrate, since the first substrate and the second substrate make conformal contact, the first substrate and the second substrate are in close contact with each other without requiring a special bonding method.

Through the above process, the pattern of the first substrate existing as a hole became a well shape as shown in FIG. 1 (c). As shown in FIG. 1 (d), the PDMS was inserted into the liquid hydrophobic heterogeneous material at 70 ° C. It cured about 1 hour. After the heterogeneous material was solidified, as shown in FIG. 1 (e), the second substrate was removed to complete the first substrate on which the heterogeneous material was patterned. The first substrate is used as a cover substrate in the capillary flow control device.

Example  2: hydrophobic in capillary flow In patterning  Branching of capillary flow by

Using the substrate prepared by the method of Example 1, a capillary flow control device capable of branching a single flow of fluid introduced into the microchannel into a plurality of flows was produced.

By injection molding, the PMMA board | substrate 130 in which the linear microchannel was formed was produced. The microchannel has a preformed inlet 150 for fluid injection and an outlet 160 for air discharge, and has a width of 2 mm and a depth of 50 μm. In order to fabricate the hydrophobic pattern, as shown in FIG. 3A, the hydrophobic pattern 120 was formed on the cover substrate 110 of the microchannel substrate 130 using PDMS as a heterogeneous material. At this time, the cover substrate 110 is an acrylic film (Sumitomo Chemical Co., Ltd.) has a thickness of 125㎛. The microchannel 140 including the hydrophobic pattern 120 is bonded to the prepared microchannel PMMA substrate 130 by adhering the cover substrate 110 on which the hydrophobic pattern is formed using a UV curing agent. Was completed. FIG. 2 (c) is a cross-sectional view taken along the line AA ′ of FIG. 2 (b), and the lower portion of the microchannel 140 has a hydrophobic pattern 120, and the edge of the cover substrate 110 is a hydrophilic surface. It shows what is formed.

Since the contact angle with respect to the water of the PMMA substrate was 67 degrees, and the cover substrate had a hydrophilic surface at 76 degrees, the fluid flowing in the inlet 150 by the capillary phenomenon naturally flowed through the micro channel 140. Figure 3 (a) is a photograph of the micro channel produced by the above process. As shown in FIG. 3B, the fluid introduced from the inlet 150 naturally flows through the microchannel. At this time, when the hydrophobic pattern 120 of the PDMS formed in a straight line on one surface of the channel as shown in Figure 3 (c), the fluid can not flow in the hydrophobic pattern 120 because the contact angle of the PDMS to the water is 98 ° , It was confirmed that the single fluid is divided into two fluids by the hydrophobic pattern 120.

Example  3: Stopping capillary flow with a hydrophobic valve in capillary flow

Using the substrate prepared by the method of Example 1, a capillary flow control device capable of stopping the fluid flowing into the microchannel was prepared.

In order to produce a straight microchannel, a SU-8 pattern having a width of 1 mm and a height of 50 μm was fabricated on a silicon substrate using photolithography. Sylgard 184 (Dow Corning Corporation) was cast on the fabricated SU-8 pattern and thermoset to produce a straight PDMS microchannel 230. An inlet 250 for fluid injection and an outlet 260 for air discharge were fabricated in the manufactured PDMS microchannel 230. Since PDMS is a hydrophobic material, no capillary flow can occur. Therefore, after modifying the surface of the PDMS hydrophilic through UV-Ozone treatment, covering the cover substrate 210, to complete the micro-channel 240 as shown in Figure 4 (b).

In order to manufacture the hydrophobic valve on the cover substrate 210, as shown in FIG. 4 (a), a hydrophobic pattern 220 was formed using PDMS as a heterogeneous material. In this case, the cover substrate 110 is an acrylic film (Sumitomo Chemical Co., Ltd.) has a thickness of 125㎛. Since the PDMS microchannel 230 makes a conformal contact with the cover substrate 210, the PDMS microchannel 230 and the cover substrate 210 can be brought into close contact with each other without a special bonding method. FIG. 4C is a cross-sectional view taken along line BB ′ of FIG. 4B. The entire lower surface of the microchannel 240 is formed of a hydrophobic pattern 220.

Since the contact angle of the UV-Ozone-treated PDMS to water is 55 ° and the cover substrate 210 made of acrylic has a hydrophilic surface of 76 °, the fluid introduced from the inlet 250 by the capillary phenomenon is a microchannel. 240 flowed naturally. However, the hydrophobic valve 220 of the PDMS is hydrophobic because the contact angle with water is 98 °, and it can be seen that negative pressure is generated in the fluid reaching the hydrophobic valve 220 to stop the capillary flow.

5 (a) is a microchannel comprising a hydrophobic valve 220 fabricated by the above method. The fluid introduced by natural capillary flow as shown in FIG. 5 (b) was stopped by the hydrophobic valve 220 fabricated by the method of the present invention as shown in FIG. 5 (c).

Example  4: hydrophobic in capillary flow Patterning  Concentration of capillary flow through

Using the substrate prepared by the method of Example 1, a capillary flow control device capable of concentrating a single flow of fluid introduced into the microchannel was prepared.

Through the same process as in Example 3, a PDMS microchannel 330 having a width of 2 mm and a depth of 50 μm was manufactured. The hydrophobic pattern 320 was formed on the cover substrate 310 of the acrylic film using PDMS as shown in FIG. After the UV-Ozone treatment was performed on the PDMS microchannel 330, the cover substrate 310 including the hydrophobic pattern was closely attached to the microchannel 340 as shown in FIG. 7B. FIG. 6C is a cross-sectional view taken along line CC ′ of FIG. 6B. As shown in FIG. 6C, the central portion of the microchannel is the hydrophilic cover substrate 310 and the edge portion is the hydrophobic pattern 320. Therefore, when the fluid flowed in, it was found that the surface of the hydrophobic pattern 320 was not blurred and concentrated on the central hydrophilic portion 310.

Fig. 7 (a) is a view of a microchannel manufactured by the above method. As shown in FIG. 7 (b), the fluid introduced into the microchannel moved only along the central hydrophilic part as shown in FIG.

As described above in detail specific parts of the present invention, it is apparent to those skilled in the art that such specific descriptions are merely preferred embodiments, and thus the scope of the present invention is not limited thereto. something to do. Therefore, the substantial scope of the present invention will be defined by the appended claims and their equivalents.

As described in detail above, according to the present invention, it is simpler than the conventional method for manufacturing a single substrate by photolithography and soft lithography, and has the advantage of being able to economically pattern heterogeneous materials having different properties from the substrate. That is, a single substrate manufactured by patterning hydrophobic materials on a hydrophilic substrate or by patterning hydrophilic materials on a hydrophobic substrate is useful as an essential component of a capillary flow control device capable of various controls such as stopping, branching, concentrating, and delaying capillary flow. Do.

Claims (14)

A method for producing a single substrate patterned with a dissimilar material comprising the following steps: (a) forming a hole pattern in the first substrate; (b) contacting a second substrate with one surface of the hole patterned first substrate; (c) inserting a heterogeneous liquid material into the hole pattern; (d) solidifying the heterogeneous material; And (e) removing the second substrate. The method of claim 1, wherein the material of the first substrate is at least one selected from the group consisting of polymer, glass, quartz, silicon, metal, ceramic, porous membrane, and the like. The method of claim 1, wherein the first substrate is a hydrophilic material, and the heterogeneous material is a hydrophobic material. The method of claim 1, wherein the first substrate is a hydrophobic material, and the heterogeneous material is a hydrophilic material. The method of claim 1, wherein the hole pattern is formed by laser processing or Computerized Numerical Control (CNC) processing. The method of claim 1, wherein the second substrate is silicon rubber. The method of claim 1, wherein the heterogeneous material is a liquid thermosetting material or a UV curing material. A single substrate patterned with a dissimilar material produced by the method of any one of claims 1 to 7. A hydrophilic material prepared by the method of claim 3 is bonded to a substrate on which a straight microchannel and a fluid inlet and an air outlet are formed. A capillary flow control device configured to allow the fluid introduced by the capillary phenomenon to naturally flow through the microchannel because the contact angle of the cover substrate and the contact angle of the fluid of the cover substrate are less than 90 °, respectively. 10. The capillary flow control device of claim 9, wherein the capillary flow is controlled in accordance with the patterned shape of the hydrophobic material. 11. The capillary flow control device of claim 10, wherein the patterned hydrophobic material is disposed at the center of the microchannel in a size smaller than the width of the microchannel to branch the introduced fluid. 11. The capillary flow control device of claim 10, wherein the patterned hydrophobic material is disposed at the center of the microchannel in a size wider than the width of the microchannel, to stop the fluid introduced therein. 11. The capillary flow control device of claim 10, wherein the patterned hydrophobic material is disposed on both sides of the microchannel except at the central portion, thereby concentrating the introduced fluid. The capillary flow control device according to claim 9, wherein the material of the substrate on which the straight microchannel is formed is at least one selected from the group consisting of polymer, glass, quartz, silicon, metal, ceramic, porous membrane, and the like.

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