KR20070029058A - High luminance discharge lamp and irradiation device using the high luminance discharge lamp - Google Patents

Abstract

A high luminance discharge lamp and an irradiation device using the same are provided to reduce largely a total size by irradiating light of different wavelengths in the same direction. A first transparent dielectric tube(1) is filled with a first discharge emitting medium(A). A common electrode(2) is used as a common electrode of the first discharge emitting medium and a second discharge emitting medium(B). A transparent dielectric tube(3) is used for pressing and sealing the common electrode. A second transparent dielectric tube(4) is filled with the second discharge emitting medium. An electrode(5) is used as an electrode for the first discharge emitting medium. An electrode(6) is used as an electrode for the second discharge emitting medium.

Description

HIGH LUMINANCE DISCHARGE LAMP AND IRRADIATION DEVICE USING THE HIGH LUMINANCE DISCHARGE LAMP}

1 is a cross-sectional view along the major axis and the radial direction of the coaxial composite high brightness discharge lamp according to the first embodiment of the present invention;

2 is a cross-sectional view along the major axis direction and minor axis direction of the flat composite high brightness discharge lamp according to the second embodiment of the present invention;

3 is a cross-sectional view in the long axis direction and short axis direction of the parallel cylindrical composite high brightness discharge lamp according to the third embodiment of the present invention;

4 is a conceptual diagram of an irradiation apparatus according to a fourth embodiment of the present invention;

5 is an axial sectional view of a conventional composite discharge lamp;

6 is a radial cross-sectional view of a conventional composite discharge lamp;

7 is an axial cross-sectional view of another conventional composite discharge lamp.

<Description of Symbols for Major Parts of Drawings>

1: first transparent dielectric tube

2: common electrode

3: transparent dielectric tube

4: second transparent dielectric tube

5: electrode

6: electrode

7: lamp

8: subject

9: chamber

10: lamp

11: lamp

[Patent Document 1] Japanese Patent No. 2812736

[Patent Document 2] Japanese Patent No. 3291809

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to high brightness discharge lamps, and more particularly, to high brightness discharge lamps in which two kinds of light emitting tubes for independently emitting light of different wavelengths are integrally combined.

Conventionally, what was disclosed by patent document 1 is known as a light source for the purpose of emitting the ultraviolet-ray from which a wavelength differs. Moreover, what was disclosed by patent document 2 is known as a light source which irradiates a to-be-processed object with the ultraviolet-ray from a different wavelength.

The 'high power beam generator' disclosed in Patent Document 1 is a highly efficient and economical device for generating ultraviolet rays of a very large planar beam. The high brightness discharge lamp disclosed in patent document 1 is shown in FIG. 5 and FIG. The discharge chamber is filled with a gas that emits ultraviolet rays. A high voltage source is connected between the electrodes. There is a dielectric plate in contact with the discharge chamber. The electrode is embedded in the dielectric plate so that discharge occurs only on the surface of the dielectric plate. When voltage is applied between the electrodes, a number of creepage discharges occur along the surface of the dielectric plate. Ultraviolet light is radiated by this discharge. The entire length of the discharge channel is used to generate the ultraviolet beam.

Two discharge chambers are filled with different gases. These gases are separated from the dielectric plate. The structure of this electrode is the same as that of the discharge light emitting electrode of a plasma television. Different ultraviolet rays generated at the two surfaces of the dielectric plate do not transmit through the dielectric plate and the electrode, but are radiated in different directions, respectively. As shown in FIG. 5, a discharge channel is formed between the electrodes. Ultraviolet rays due to creeping discharges of the upper discharge chamber are emitted through the upper ultraviolet transmission plate. At the same time, ultraviolet rays by the surface discharge of the lower discharge chamber are emitted through the lower ultraviolet transmission plate. In the cylindrical beam generator shown in Fig. 6, the traveling direction of light is not clearly shown. The outer tube and the inner tube are ultraviolet ray transmitting tubes. The intermediate tube in which the electrode is embedded is a tube of dielectric but is not stated to be light transmissive. The intermediate tube in which the electrode is embedded is considered to be a tube that does not transmit light. That is, the cylindrical beam generator shown in Fig. 6 is a high brightness discharge lamp in which light is not emitted only in one direction different from each other.

The "treatment method using a dielectric barrier discharge lamp" shown in Patent Document 2 is a high efficiency treatment method using a photochemical reaction with a dielectric barrier discharge lamp. The cross sectional view of the light source disclosed in patent document 2 is shown in FIG. Ultraviolet rays of different wavelengths are emitted by the first dielectric barrier discharge lamp and the second dielectric barrier discharge lamp. Treatment is performed by contacting the object with the processing fluid. The treatment fluid is irradiated with ultraviolet rays from the first dielectric barrier discharge lamp to generate ozone. Ultraviolet rays from the second dielectric barrier discharge lamp are irradiated to generate active oxygen.

The dielectric barrier discharge lamp of patent document 2 is a light source which produces the ultraviolet-ray of a different wavelength. This light source is used for processing by bringing a workpiece into contact with a processing fluid. This light source is also a light source composed of a coaxial dielectric. On the inner surface of the innermost dielectric, a transparent electrode is provided. On the outer surface of the outer dielectric, a transparent electrode is provided. Oxygen gas, which is a processing fluid, flows from one end of the annular inner dielectric. Ozone is produced by light of wavelength 120nm-180nm. Ozone is surrounded by the surface of the outer light emitting tube and decomposed by ultraviolet rays having different wavelengths of 240 nm to 255 nm to become active oxygen. An example of using a light source in a sterilization method is described. It is clearly disclosed that light having a wavelength of 240 nm to 255 nm from the outer electrode is optimal for sterilization. Like this patent document 1, the emitted ultraviolet-ray is emitted only in one direction from which each differs.

On the other hand, when the object to be processed is treated with ultraviolet rays, for example, the improvement of its characteristics is strongly required. For example, as an example, the SiOCH film, which is a low dielectric constant film (Low-K film) used in the interlayer insulating film of semiconductors in recent years, is a process technology for enhancing mechanical strength by light. Xenon excimer light having the center wavelength is used. However, for example, when a low-K film having a dielectric constant of 2.4 is irradiated with UV light having an illuminance of 14 mW / cm 2 for two minutes at a wavelength of 172 nm, the young's module exhibiting mechanical strength becomes 8 Gpa, and a desired value. Is obtained. However, there is a problem that the dielectric constant becomes 2.6 or more, which greatly increases than the original dielectric constant. In order to solve this problem, it is necessary to cut the target chemical bond efficiently and control the stress, hardness and dielectric constant arbitrarily. It is also necessary to prevent the standing wave from occurring in the film by a single wavelength. For this reason, it is effective to irradiate light of the optimum wavelength different for every purpose.

However, the conventional composite discharge lamp has the following problems. When different light sources are assembled into one device, the device is large and expensive. In addition, it is practically difficult to assemble a large number (about twice) of light sources in a limited space. In the lamp of the conventional structure, light of different wavelengths cannot be irradiated to the irradiated object from the same direction. It is necessary to assemble two different light sources in separate chambers. The irradiated object must be transferred between the two chambers by a robot arm or the like.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problem so that light of different wavelengths of a composite discharge lamp can be irradiated to the irradiated object in the same direction, thereby miniaturizing the irradiation apparatus.

In order to solve the above problems, in the present invention, a plurality of transparent dielectric walls constituting a plurality of independent discharge spaces, a discharge light emitting medium filled in each discharge space so as to generate light of different wavelengths by forming different plasma states, and transparent Light having different wavelengths in the same direction is formed in a transparent dielectric wall of a high brightness discharge lamp having an electrode formed on the dielectric wall, a power source for applying high frequency power independently to the electrode, and a control means for individually emitting each discharge light emitting medium. Configure to be radiated.

Best Mode for Carrying Out the Invention The best mode for carrying out the present invention will now be described in detail with reference to Figs.

Embodiment 1 of the present invention constitutes a plurality of independent discharge spaces in a concentric cylindrical transparent dielectric wall, forms a different plasma state in each discharge space, and fills a discharge light emitting medium for generating light of different wavelengths, and the dielectric wall It is a coaxial complex high brightness discharge lamp that applies high frequency power independently to the electrodes formed on the light source, emits each discharge light emitting medium separately, and transmits light having different wavelengths through the transparent dielectric wall to radiate in the same direction.

1 is a cross-sectional view of a coaxial composite high brightness discharge lamp in Embodiment 1 of the present invention. Figure 1 (a) is a cross-sectional view parallel to the axis. 1B is a cross-sectional view perpendicular to the axis. In FIG. 1, the first transparent dielectric tube 1 is a tube filled with the discharge light-emitting medium A. In FIG. The common electrode 2 is an electrode common to the discharge light emitting mediums A and B. The transparent dielectric tube 3 is a tube for pressing and sealing the common electrode 2. The second transparent dielectric tube 4 is a tube filled with the discharge light-emitting medium (B). The electrode 5 is an electrode for the discharge light-emitting medium A which forms a set with the common electrode 2. The electrode 6 is an electrode for the discharge light-emitting medium B which forms a set with the common electrode 2.

The manufacturing method and operation of the coaxial composite high brightness discharge lamp in the first embodiment of the present invention configured as described above will be described. The first transparent dielectric tube 1 is a first dielectric wall in which the discharge light-emitting medium A is sealed. Specifically, quartz glass is preferable. The transparent dielectric tube 3 of the same material as the first transparent dielectric tube 1 is the second dielectric wall. The inner diameter of the transparent dielectric tube 3 is slightly larger than the outer diameter of the first transparent dielectric tube 1. Between the first transparent dielectric tube 1 and the transparent dielectric tube 3, one or more common electrodes 2 of thin metal, such as molybdenum, are sandwiched in a nitrogen-free nitrogen atmosphere. The transparent dielectric tube 3 is baked and hardened by well-known heating means such as an oxyhydrogen burner or a plasma torch to seal the common electrode 2 of the thin metal. At the same time, the transparent dielectric tube 3 is melted and fixed as the outer peripheral portion of the first transparent dielectric tube 1. The first transparent dielectric tube 1 is a transparent first dielectric structure discharger and forms a first discharge space D1 enclosing the first discharge light emitting medium A. FIG. By forming the SiO ₂ into a desired electrode shape by the spatter method and depositing a metal such as tungsten, molybdenum, tantalum and the like with high melting point thereon, an electrode that can replace the thin metal can be formed.

In this fixed portion, the second transparent dielectric tube 4, which is a third dielectric wall for newly encapsulating the discharge light-emitting medium B, is melted on the transparent dielectric tube 3 with a heating source such as an oxyhydrogen burner or a plasma torch. Stick. In addition, the second discharge space D2 encapsulating the second discharge light emitting medium B is formed by the transparent dielectric tube 3 and the second transparent dielectric tube 4. The discharge space D1 and the discharge space D2 are independent of each other. An electrode 5 is provided on the inner circumferential wall of the first transparent dielectric tube 1. An independent electrode 6 is provided on the outer circumferential wall of the second transparent dielectric tube 4. The electrode 5 may be net or plate-shaped. The electrode 6 is preferably a mesh conductor or a transparent electrode having a predetermined aperture ratio for ultraviolet radiation. High voltage AC power is independently applied from the power supply device between the electrode 6 and the common electrode 2 and between the electrode 5 and the common electrode 2.

The discharge light-emitting medium A is filled in the discharge space D1 from each exhaust pipe not shown. As the discharge light-emitting medium (A), for example, xenon chloride (XeCl ₂ ) is filled at a pressure of 400 Torr. The discharge space D2 is filled with, for example, xenon (X2) at a pressure of 400 Torr as the discharge light-emitting medium (B). Then, light of different wavelengths is emitted from the discharge light emitting medium of the first discharge space and the second discharge space. In the present embodiment, two discharge spaces are formed, but three or more discharge spaces are similarly possible.

In the coaxial composite high brightness discharge lamp configured as described above, high-voltage AC power is applied between the electrode 5 and the common electrode 2 from a power supply device (not shown). The alternating electric field excites the discharge light emitting medium A through the first transparent dielectric tube 1 in which the discharge light emitting medium A is enclosed. Generating a so-called excimer by the discharge plasma, and from a XeCl ₂ is radiated ultraviolet light having a wavelength of 308nm. The emitted light is emitted outside the lamp through the transparent dielectric tube 3, the second discharge space D2, and the second transparent dielectric tube 4. At this time, since electric power is not supplied between the common electrode 2 and the electrode 6, the discharge light emitting medium B is not excited at all. Light from the first discharge space D1 is radiated to the outside of the lamp without interfering with the discharge light-emitting medium B at all.

Thereafter, power supply to the electrode 5 and the common electrode 2 is stopped. A high voltage AC power is applied between the electrode 6 and the common electrode 2 from a power supply device (not shown). The alternating electric field excites the discharge light emitting medium B through the transparent dielectric tube 3 and the second transparent dielectric tube 4 encapsulating the discharge light emitting medium B. That is, an excimer state is generated by the discharge plasma, and ultraviolet rays of wavelength 172nm are emitted from Xe. This emitted light is emitted outside the lamp through the second transparent dielectric tube 4. Further, it is also radiated toward the first discharge space D1 via the transparent dielectric tube 3.

That is, power is applied to each of the discharge light emitting media separately from the power supply device at a time difference. Light having a wavelength of 308 nm from the inner light emitting tube is emitted through the Xe in the outside rare gas state where light emission is stopped. Further, light of wavelength 172nm from the outer Xe is emitted directly through the same path as the path through which light of wavelength 308nm passes. In this way, light is radiated to both inside and outside through each dielectric tube. Light of different wavelengths is emitted out of time on the second transparent dielectric tube 4. A predetermined treatment is performed by irradiating the object with light of different wavelengths. As the rare gas light emitting medium, a combination of XeB1 and Xe, Xe1 and Xe, KrBr and XeF is preferable, but other combinations are possible.

Further, by emitting several Torr of argon and a small amount of mercury in one discharge space and applying a high-voltage alternating power, it is possible to obtain radiated light having a wavelength of 185 nm and a wavelength of 254 nm from an electrodeless low pressure mercury lamp by an electric field. The other discharge space may be selected and filled with a discharge light emitting medium that emits optimal light for the irradiated object.

As described above, in Embodiment 1 of the present invention, a coaxial composite high brightness discharge lamp constitutes a plurality of independent discharge spaces in a concentric cylindrical transparent dielectric wall, and forms different plasma states in each discharge space, thereby allowing light of different wavelengths. Filling the discharge light emitting medium generating the light emitting medium, and applying high frequency power independently to the electrode formed on the dielectric wall to emit each discharge light emitting medium individually, and transmit light of different wavelengths in the same direction through the transparent dielectric wall. Because of this, the lamp for emitting light of different wavelengths in the same direction can be miniaturized, and the target object can be irradiated accurately.

Example 2

Embodiment 2 of the present invention constitutes a plurality of independent discharge spaces in parallel transparent dielectric walls, and forms a different plasma state in each discharge space to fill a discharge light emitting medium for generating light having different wavelengths, A flat composite high-brightness discharge lamp in which high-frequency power is independently applied to an electrode formed on a dielectric wall to emit each discharge light emitting medium individually, and light of different wavelengths is transmitted through the transparent dielectric wall to radiate in the same direction.

2 is a cross-sectional view of a flat composite high brightness discharge lamp according to a second embodiment of the present invention. 2A is a cross-sectional view parallel to the longitudinal axis. 2B is a cross-sectional view perpendicular to the longitudinal axis. In Fig. 2, the first transparent dielectric tube 1 is a flat transparent dielectric tube filled with the discharge light-emitting medium A. The common electrode 2 is an electrode common to the discharge light emitting mediums A and B. The second transparent dielectric tube 4 is a flat transparent dielectric tube filled with the discharge light-emitting medium (B). The electrode 5 is an electrode for the discharge light-emitting medium A, which forms a group with the common electrode 2. The electrode 6 is an electrode for the discharge light-emitting medium B that forms a group with the common electrode 2.

In Example 2 of this invention comprised as mentioned above, the manufacturing method and operation | movement of a flat composite high brightness discharge lamp are demonstrated.

At least one thin metal such as thin molybdenum or a high melting point metal formed by vapor deposition or the like in the longitudinal axis between the first transparent dielectric tube 1 and the second transparent dielectric tube 4 that are flat in an oxygen-free nitrogen atmosphere. The common electrode 2 is formed. The first transparent dielectric tube 1 and the second transparent dielectric tube 4 are mutually heat-melted by a known method such as heating an oxyhydrogen burner or a plasma torch to form an integral tube. On the outer surface of the first transparent dielectric tube 1 and the second transparent dielectric tube 4, an electrode 5 having a good aperture ratio and an electrode 6 are formed to face each other by a method such as printing, spattering, vapor deposition, or transfer. .

The discharge light emitting mediums A and B are filled from an exhaust pipe not shown. ArF is filled, for example, as the discharge light-emitting medium A, and XeF is filled, for example, as the discharge light-emitting medium B. Electric fields are applied to the respective discharge light-emitting mediums A and B separately with a time difference from a power supply device (not shown). Each discharge light-emitting medium (A, B) is brought into an excited plasma state, so-called excimer state is generated. In this excimer state, light having a wavelength of 248 nm and light having a wavelength of 351 nm are respectively emitted in the vertical direction in FIG. 2.

In the state where the discharge light-emitting medium A is excited, the emitted light is emitted from the discharge space D1 to the outside through the first transparent dielectric tube 1. At the same time, it is radiated to the outside through the second transparent dielectric tube 4 and the discharge space (D2). Similarly, in the state where the discharge light-emitting medium B is excited, the emitted light is emitted from the discharge space D2 to the outside through the second transparent dielectric tube 4. At the same time, it is radiated to the outside through the first transparent dielectric tube 1 and the discharge space D1. In this example, two discharge spaces are formed, but three or more discharge spaces are similarly possible.

As described above, in the second embodiment of the present invention, a flat composite high brightness discharge lamp is formed of a plurality of independent discharge spaces by parallel transparent transparent dielectric walls, and different plasma states are formed in each discharge space so that light of different wavelengths is formed. Filling the discharge light emitting medium, and applying high frequency power independently to the electrode formed on the dielectric wall to emit each discharge light emitting medium individually to transmit light of different wavelengths through the transparent dielectric wall to radiate in the same direction. Because of the configuration, it is possible to miniaturize a lamp that emits light of different wavelengths in the same direction and to accurately irradiate the workpiece.

Example 3

Embodiment 3 of the present invention constitutes a plurality of independent discharge spaces in parallel cylindrical transparent dielectric walls, and forms a different plasma state in each discharge space to fill a discharge light emitting medium for generating light having different wavelengths, It is a parallel cylindrical composite high brightness discharge lamp that applies high frequency power independently to electrodes formed on the dielectric walls, emits each discharge light emitting medium individually, and transmits light having different wavelengths through the transparent dielectric wall to radiate in the same direction.

3 is a cross-sectional view of a parallel cylindrical composite high brightness discharge lamp according to a third embodiment of the present invention. 3A is a cross-sectional view parallel to the longitudinal axis. 3B is a cross-sectional view perpendicular to the longitudinal axis. In Fig. 3, the first transparent dielectric tube 1 is a cylindrical transparent dielectric tube filled with the discharge light-emitting medium A. The second transparent dielectric tube 4 is a cylindrical transparent dielectric tube filled with the discharge light-emitting medium (B). The electrode 5 is an electrode for the discharge light-emitting medium A. The electrode 6 is an electrode for the discharge light-emitting medium (B).

In Example 3 of this invention comprised as mentioned above, the manufacturing method and operation | movement of a parallel cylindrical composite high brightness discharge lamp are demonstrated.

In advance, two parallel pipe-shaped first transparent dielectric tubes 1 and second transparent dielectric tubes 4 are formed by means of melting or drawing. On the opposite sides of the first transparent dielectric tube 1 and the second transparent dielectric tube 4, an independent transparent electrode or a metal electrode having excellent aperture ratio is formed by a well-known method such as printing, sputtering, transfer, or the like. 5) and the electrode (6). Discharge light emitting mediums A and B are filled in the first transparent dielectric tube 1 and the second transparent dielectric tube 4. High frequency electric power is supplied between the electrode 5-1 and the electrode 5-2 provided on the outer side of the first transparent dielectric tube 1. High frequency electric power is supplied between the electrode 6-1 and the electrode 6-2 provided on the outer side of the second transparent dielectric tube 4. The two electrodes do not necessarily have to be main points, and may be a plate-like electroconductive plate having light reflectivity such as alumina.

As shown in Fig. 3B, the emitted light is emitted from the transparent portions on the left and right sides of the first transparent dielectric tube 1 and the second transparent dielectric tube 4, so that light can be taken out effectively. A part of the first transparent dielectric tube 1 and the second transparent dielectric tube 4 may be transparent, and the entire tube does not necessarily have to be light transmissive. In this example, two discharge spaces are formed. However, the discharge space may be three or more.

As described above, in the third embodiment of the present invention, a parallel cylindrical composite high brightness discharge lamp is formed of parallel cylindrical transparent dielectric walls to form a plurality of independent discharge spaces, and different plasma states are formed in each discharge space to form different wavelengths. Filling the discharge light emitting medium generating the light of the light source, and applying high frequency power to the electrodes formed on the dielectric wall independently, and emitting each light emitting medium separately to transmit light of different wavelengths through the transparent dielectric wall in the same direction. Since it is a structure which emits, it can miniaturize the lamp which radiates the light of a different wavelength in the same direction, and can irradiate a to-be-processed object correctly.

Example 4

Embodiment 4 of the present invention is an irradiation apparatus in which a plurality of coaxial composite high luminance discharge lamps, flat composite high luminance discharge lamps or parallel cylindrical composite high luminance discharge lamps in which light of different wavelengths are radiated in one direction are arranged as a light source.

4 is a conceptual diagram of a radiation apparatus according to a fourth embodiment of the present invention. Fig. 4A is a conceptual diagram of an irradiation apparatus using four coaxial composite high brightness discharge lamps. Fig. 4B is a conceptual diagram of an irradiation apparatus using four flat composite high brightness discharge lamps. Fig. 4C is a conceptual diagram of an irradiation apparatus using four parallel cylindrical complex high-brightness discharge lamps. In Fig. 4, the lamp 7 is a coaxial composite high brightness discharge lamp. The irradiated object 8 is an object irradiated with ultraviolet rays and processed. The chamber 9 is a sealable housing. The lamp 10 is a flat composite high brightness discharge lamp. The lamp 11 is a parallel cylindrical composite high brightness discharge lamp.

In Example 4 of this invention comprised as mentioned above, the operation | movement of an irradiation apparatus is demonstrated.

As shown in Fig. 4A, four coaxial composite high brightness discharge lamps 7 are arranged in the chamber 9 for a 300 mm wafer. The irradiated object 8 is placed at a distance of about 100 mm from the lamp 7. The irradiated object of the irradiated object 8 is an interlayer insulating film SiOH having a thickness of 20 nm formed on the Cu phase. Under a reduced pressure atmosphere of 1 Torr, first, light having a wavelength of 308 nm that emits light in the state of XeCl _{2 in} an exema state is irradiated for 4 minutes. The dielectric constant is reduced by removing the unstable CH bond and CH ₃ bond in the film. Thereafter, irradiation is performed for 2 minutes with light having a wavelength of 172 nm which emits light in the excimer state of Xe. A good low dielectric film (Low-K film) having a dielectric constant of 2.4 and a Young's modulus showing mechanical strength of 8 Gpa is obtained.

As shown in Fig. 4 (b), four flat composite high-brightness discharge lamps 10 are arranged in the chamber 9 for the 300 mm wafer. The irradiated object 8 is placed at a distance of about 100 mm from the lamp 7. As shown in Fig. 4 (c), four parallel cylindrical complex high-brightness discharge lamps 11 are arranged in the chamber 9 for 300 mm wafers. The irradiated object 8 is placed at a distance of about 100 mm from the lamp 7. Light of different wavelengths is radiated in the same direction through the transparent dielectric wall to irradiate the object 8.

By using such an irradiation apparatus, the floor area required for a semiconductor manufacturing apparatus can be made into half the conventional one. Moreover, since it can process continuously by the ultraviolet-ray of a different wavelength in one chamber, attachment of an impurity, contamination, etc. which generate | occur | produce when an irradiated object transfers between chambers can be removed. As a result, quality improves and yield also improves. Since the place where the lamp is attached is halved, the risk of vacuum leakage is halved.

As described above, according to the fourth embodiment of the present invention, the irradiation apparatus comprises a plurality of coaxial complex high brightness discharge lamps, flat complex high brightness discharge lamps or parallel cylindrical complex high brightness discharge lamps in which light of different wavelengths are irradiated in one direction, as light sources. Since it is a structure, the apparatus which irradiates the light of a different wavelength in the same direction can be miniaturized, and the to-be-processed object can be irradiated correctly.

The composite high brightness discharge lamp of the present invention is suitable as a high efficiency high brightness discharge lamp for optical CVD, annealing, film quality improvement, etc. in ultraviolet surface treatment, photochemical reaction, semiconductor process. In particular, a SiON film or SiN film used for a protective film of a semiconductor, a SiN film for preventing diffusion of Cu wiring on a via side wall, an SiN interlayer insulating film, a low dielectric constant interlayer insulating film (Low-K film), and a Cu barrier insulating film used for sidewalls of a transistor. It is most suitable as a high-brightness discharge lamp used for the process of improving film quality of SiOCH film | membrane, SiOCHN film | membrane, SiCH film | membrane, SiCHN film | membrane, etc. by light irradiation.

By the above configuration, it is possible to emit light of different wavelengths from the high-brightness discharge lamp in the same direction, and to miniaturize the lamp. In addition, it is possible to accurately irradiate the surface to be processed to be processed, and relative positioning of the lamp and the workpiece is easy.

Claims (8)

A plurality of transparent dielectric walls constituting a plurality of independent discharge spaces, a discharge light emitting medium filled in each of the discharge spaces to form different plasma states to generate light of different wavelengths, and electrodes formed on the transparent dielectric walls; A high brightness discharge lamp having a power source for independently applying high frequency power to the electrode and control means for individually emitting each discharge light emitting medium, And the transparent dielectric wall is configured to emit light of different wavelengths in the same direction. The method of claim 1, And said discharge space is concentric cylindrical and said plurality of transparent dielectric walls are integrated and inseparable. The method of claim 1, And the discharge space is a rectangular parallelepiped or cylindrical region separated in parallel in the longitudinal direction, and the plurality of dielectric walls are integrated and inseparable. The method according to any one of claims 1 to 3, The discharge light emitting medium is a high brightness discharge lamp, characterized in that the rare gas, halogen gas or mercury or a mixture thereof. The method according to any one of claims 1 to 3, The discharge light emitting medium is a high brightness discharge lamp, characterized in that the mixed gas of rare gas and metal iodide. An irradiation apparatus comprising the high brightness discharge lamp according to any one of claims 1 to 5 as a light source. A first discharge space filled with a first discharge light emitting medium to emit first ultraviolet rays; A first transparent dielectric constituting the first discharge space; A first electrode disposed on the first transparent dielectric and configured to excite the first discharge light emitting medium by receiving a first high frequency power; A second discharge space filled with a second discharge light emitting medium to emit a second ultraviolet ray different from the first ultraviolet ray; A second transparent dielectric constituting the second discharge space; A second electrode disposed on the second transparent dielectric and configured to excite the second discharge light emitting medium by receiving a second high frequency power; The first discharge space and the second discharge space are substantially parallel; The first transparent dielectric and the second transparent dielectric are integrally fixed to each other; The relative positional relationship between each of the transparent dielectrics and each of the discharge spaces is such that the first ultraviolet rays are radiated through the first transparent dielectric, the second discharge space and the second transparent dielectric, and the second ultraviolet rays are the second. A high brightness discharge lamp, characterized in that configured to radiate in the same direction as the first ultraviolet rays via a transparent dielectric. A plurality of high-brightness discharge lamps as described in any one of Claims 1-7 are provided, and it is set as a light source, And the high brightness discharge lamp is arranged such that light of different wavelengths from the high brightness discharge lamp is irradiated to the irradiated object in the same direction.

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