KR20070018463A - Double structure O-ring and it's manufacturing method - Google Patents

Abstract

 The present invention relates to a double-structured O-ring and a method of manufacturing the same different from the inner rubber material and the outer rubber material.

In dry etching, O-rings are used to seal the inside and outside of the etching chamber.

Currently used O-rings are divided into perfluoro-based and fluoro-based O-rings according to their purpose of use. Perfluoro O-rings are resistant to plasma but weak in resilience, resulting in poor sealing. On the other hand, fluoro O-rings are excellent in resilience but have low plasma resistance and often generate particles during use. Therefore, there is a problem that can not use the O-ring made of any one material.

The present invention has been made in order to improve the above problems by using a rubber of a material excellent in plasma resistance on the outside, and by manufacturing a double-structured O-ring using a rubber of a material with excellent restoring force to use in the semiconductor etching process To improve the sealing efficiency and plasma resistance of the chamber.

Inner rubber, outer rubber, perfluoro-based, fluoro-based

Description

Double structure O-ring and it's manufacturing method

1 is a partial cutaway perspective view of a dual structure O-ring in accordance with the present invention

2 is an enlarged cross-sectional view taken along line AA ′ of FIG. 1;

3 is a partial cutaway perspective view of a mold for producing the inner rubber of the present invention;

Figure 4 is a partial cutaway perspective view of a mold for producing the O-ring of the dual structure of the present invention

<Description of the symbols for the main parts of the drawings>

11: inner rubber 12: boundary

13: outer rubber 21, 31: lower mold

22, 32: upper mold 23, 33: powder supply port

24, 34: air outlet

The present invention relates to an O-ring, and more particularly, to a double-structured O-ring and a method of manufacturing the same in which the material of the inner rubber and the material of the outer rubber.

For the dry etching process, the pressure in the process chamber must be maintained at a certain pressure. To this end, the atmosphere and the interior of the chamber must be sealed. In order to strengthen the sealing role of the coupling part in the process of combining the components of the chamber in combination with each other, a ring made of rubber material is interposed between the parts, which is called an O-ring.

Currently used O-rings are divided into perfluoro and fluoro according to their purpose of use. Perfluoro-based O-rings are resistant to plasma but have poor resilience, resulting in poor sealing, whereas fluoro-based reverse resilience, but with low plasma resistance, often generate particles during use.

The table below compares the physical properties of perfluoro O-rings and fluoro O-rings.

   Kinds   Hardness   Heat-resistant temperature  Plasma resistance  Properties O ₂ system Halogen  dynamic stability(%)  Tensile rate (%) Perfluoro system 70 250 Relatively good good 12 120 Fluoro-based 70 180 Not good Relatively good 18 200

As shown in the above table, when comparing the plasma resistance and physical properties, a problem arises that it is difficult to simultaneously satisfy the plasma resistance and the resilience when using only one material of the O-ring.

An object of the present invention is to provide an O-ring having a dual structure using a rubber having good restoring force on the inside and rubber having excellent plasma resistance on the outside.

The present invention for achieving the above object is characterized in that the rubber of the material having excellent restoring force inside the rubber used for excellent plasma resistance.

In addition, the manufacturing method of the O-ring of the double structure is a step of firing the inner rubber by putting powder for manufacturing the inner rubber in the mold for manufacturing the inner rubber and applying heat, and inserting the inner rubber made in the first step into the mold for manufacturing the outer rubber Then, the outer rubber powder is supplied around the inner rubber, characterized in that it consists of two steps of firing to wrap the inner rubber to a certain thickness.

Hereinafter, the configuration and operation of the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a partial cutaway perspective view of a dual structure O-ring according to the present invention, the appearance of which is not different from a general perfluoro O-ring. This is because the outer layer is a perfluoro rubber.

However, the incision clearly reveals the features of the present invention. Inside there is an internal rubber 11 of excellent restoring force. And perfluoro outer rubber 13 exists with a fixed boundary between them.

FIG. 2 is an enlarged cross-sectional view taken along line AA ′ of FIG. 1, and it can be clearly seen that the inner rubber 11 and the outer rubber 13 are bonded in different layers.

In manufacturing the O-ring of the present invention, it is important to fire the inner rubber 11 so as not to be exposed to the outside. Because the inner rubber 11 is weak in plasma resistance, particles may be generated by the plasma when protruding to the outside.

The property of the O-ring of the dual structure can be changed by adjusting the thickness of the inner rubber (11) and the outer rubber (13). In order to increase the restoring force, the diameter of the inner rubber 11 may be increased, and in order to increase the plasma resistance, the thickness of the outer rubber 13, which is a perfluoro system, may be increased.

The outer rubber 13 used in the above embodiment uses a perfluoro rubber, and the inner rubber 11 uses a fluoro system, but it can be replaced with another one having the same properties. That is, a rubber having excellent plasma resistance but weak restoring force can replace a perfluoro rubber, which is an outer rubber 13, and a rubber having a low plasma resistance but excellent restoring power, can be replaced with a fluoro system that is an inner rubber 11. Can be replaced.

3 is a partial cutaway perspective view of a mold for producing the internal rubber of the present invention.

The mold is paired with a pair of upper mold 22 and lower mold 21 having a semicircular incision surface, and a ring-shaped space is secured inside. The upper mold 22 has a powder supply port 23 for supplying powder and an air outlet 24 for discharging air. The powder for preparing the mold inner rubber 11 is filled through the powder supply port 23 of the upper mold 22. After applying heat and cooling to prepare the inner rubber (11).

4 is a partially cutaway perspective view of a mold for manufacturing an O-ring having a dual structure according to the present invention, in which the mold has the same shape as the mold shown in FIG. There is more space for molding (13) to a certain thickness.

When the inner rubber 11 is inserted into the space and the powder for applying the outer rubber 13 is filled and fired, an O-ring having a double structure is made.

As described above, the present invention has an advantage in that an O-ring having a double structure is manufactured and used in a semiconductor etching process, so that the inside of the chamber is sealed with the outside, and the possibility of generating particles by the O-ring is also lowered.

Claims (3)

A ring-shaped inner ring formed of a material having excellent resilience but poor plasma resistance, and an O-ring having a double structure, characterized by being made of an outer rubber having excellent plasma resistance but low resilience. The method of claim 1, The inner rubber is fluoro based, The outer ring is a double ring O-ring, characterized in that the perfluoro-based. Inserting the powder for the manufacture of the inner portion into the mold for manufacturing the inner rubber, and applying heat to sinter the annular inner rubber, and inserting the inner rubber made in the first step into the mold for manufacturing the outer rubber and then inserting the powder for the outer rubber into the inner rubber Double ring O-ring manufacturing method characterized in that consisting of two steps of firing so as to surround the inner rubber to a predetermined thickness.

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