KR20070009421A - Holder for spin coat, and spin coat apparatus - Google Patents

Abstract

A spin coat holder and a spin coat device are provided to prevent exterior defects by properly regulating the position of a lens by holding the lenses of various shapes by a holding unit. The spin coat holder(2) for holding an article(L) to be coated by a spin coating method is composed of a ring-shaped frame(21) for surrounding the article; a plurality of holding units(23) installed on a surface(21A) of the frame facing the article to hold the article; and an elastic support member(22) installed on at least one of the holding units to elastically support the article to the other holding unit. An elastic support force applying tool is installed at the elastic support member to increase elastic support force of the holding unit for the article according to the rotation of the frame.

Description

Spin coat holder, and spin coat device {HOLDER FOR SPIN COAT, AND SPIN COAT APPARATUS}

1 is a side view showing a spin coat device according to a first embodiment of the present invention;

2 is a plan view showing a spin coat apparatus according to the embodiment;

Fig. 3 shows a spin coat holder in the above embodiment, (A) is a plan view, (B) is an arrow display diagram of a cross section taken along line B-B in (A),

4 is a cross-sectional view showing a structural example of the plastic spectacle lens L according to the above embodiment, wherein (A) is provided with a primer film, (B) is not provided with a primer film,

Fig. 5 is a plan view showing the spin coat holder 2 during the high speed rotation in the above embodiment;

6 is a side view showing a spin coat device according to a second embodiment of the present invention;

7 is a cross-sectional view showing a conventional adsorption pad suction type spin coat apparatus;

8 is a side view showing a conventional chuck claw direct holding spin coat apparatus;

9 is a plan view showing a conventional chuck claw direct holding spin coat apparatus;

Fig. 10 is a plan view showing the spin coat holder in the modifications of the first and second embodiments.

<Explanation of symbols for main parts of drawing>

1, 1A: spin coat apparatus 2, 2A: spin coat holder

21: Frame 21A: Inner circumferential surface (opposite surface with workpiece)

21B: protrusion 22, 25: leaf spring member (elastic support member)

22A: bend 22B: bulwark

23, 26: holding part 24: weight member (elastic support force applying mechanism)

3, 3A: Chuck 31: Chuck Claw

4, 4A: rotary mechanism 5, 5A: discharge part

52: first discharge part 53: second discharge part

6: reverse mechanism 1: gripping part

L: Plastic spectacle lens (cover) LQ: Coating agent

[Technical Field]

The present invention relates to a spin coat holder for holding a to-be-coated object subjected to the coating process by the spin coat method, and a spin coat apparatus provided with the spin coat holder.

[Background]

In general, the coating is used in various industrial fields as a method of protecting the coated object and imparting the appearance performance to the coated object, and of bringing a high function to the coated object and providing high added value. have.

In particular, in the optical field, for example, in the manufacture of plastic spectacle lenses, various kinds of coating processes such as primer processing, hard coat processing, and antireflection processing are performed on the surface of the plastic spectacle lens as a coated object. In order to improve performance and function, it is generally performed.

Here, a primer process is a process which gives functions, such as the improvement of adhesiveness of a plastic spectacle lens base material and a hard-coat film, an impact resistance improvement, etc., and generally apply | coats the composition for primers to the surface of a plastic spectacle lens Thereafter, heat curing treatment is performed.

In addition, hard-coat processing is processing which gives functions, such as durability improvement of a plastic spectacle lens surface, adhesiveness improvement with an anti-reflective film, and is generally heat-hardened after apply | coating the composition for hard-coating to the plastic spectacle lens surface. By processing.

In addition, antireflection processing prevents the surface reflection of a plastic spectacle lens, and gives the function of preventing the increase of the light which does not contribute to the decrease of the transmittance | permeability or image formation of an optical system, and the fall of image contrast. Processing. This anti-reflection processing has been conventionally performed by forming a multilayer anti-reflective film mainly on a plastic spectacle lens by a vacuum vapor deposition method. However, in recent years, the coating film method of apply | coating the curable liquid (composition for antireflection film) which has an antireflection function is used. As the coating method of this composition for anti-reflection films, the composition for anti-reflection films is apply | coated by the immersion method, the spin coat method, etc. on the hard-coat layer formed directly in the lens base material, or on the hard-coat layer formed through the primer layer in the lens base material, It is common to harden after that.

Among them, the spin coat method discharges the coating composition on the surface of the plastic spectacle lens and rotates to form a coating film, so that not only a uniform and high quality coating film can be obtained but also the processing speed is fast and the device is simple. It is also widely used.

As a method of holding a plastic spectacle lens when applying the coating composition to a plastic spectacle lens by this spin coat method, a method of holding the back surface side by suction through a suction pad with respect to the plastic spectacle lens coating surface (for example, (See Patent Document 1) or a plurality of chuck claws abut the outer circumferential edge (cutting portion) of the plastic spectacle lens, and apply a force toward the center from the outer circumferential edge (cutting portion) of the plastic spectacle lens to the chuck claw. There is a way to keep it.

In the conventional spin coat method, a hard coating composition is applied to each surface of a plastic spectacle lens and heat cured. However, in recent years, in order to further speed up the coating film and to simplify the spin coat apparatus, the outer peripheral edges (cutting portions) of the plastic spectacle lenses are held by the chuck claws, and at the same time hard on both sides of the plastic spectacle lenses. The method of apply | coating the composition for coating and heat-hardening has also been used.

[Patent Document 1] Japanese Patent Laid-Open No. 9-94519

However, in the method of holding | maintaining by suction of the adsorption pad like patent document 1 mentioned above, since only one surface can be apply | coated in one application | coating operation, when it is necessary to apply double-sided application, once the coated surface is once After drying and firing, it is necessary to apply the other side again, and the time close to the double | double in the case of simultaneous application | coating on both sides is needed. In addition, when the plastic spectacle lens is set on the suction pad, it is necessary to directly handle the outer peripheral edge (cutting portion) of the plastic spectacle lens. Because of the contact, there was a risk of contaminating the surface to be coated.

In addition, in the method of holding the outer peripheral edge (cutting part) of the plastic spectacle lens by the chuck claw, it is possible to apply one side or both sides simultaneously, but the chuck claw is directly connected to the outer peripheral edge (cutting part) of the plastic eyeglass lens. As a result of contact, there was a risk of contaminating the surface to be coated. In addition, in the case of holding a non-circular plastic spectacle lens such as an ellipse, the rotational axis of the plastic spectacle lens and the position of the discharge nozzle are shifted, so that the coating composition is not discharged to the center of the plastic spectacle lens. Problems, such as application | coating remainder generate | occur | produce, are mentioned as an example.

In view of the above-described problems, the present invention is a spin coat holding tool capable of forming a coating film suitable for a coated object by satisfactorily holding a coated object of various shapes in the coating treatment by the spin coating method. And it aims at providing the spin coat apparatus provided with this spin coat holding tool.

In order to achieve the above object, the spin coat holder of the present invention is a spin coat holder for holding a workpiece to be coated by a spin coating method, and has a ring-shaped frame surrounding the workpiece. And a plurality of holding portions provided on an opposite surface of the frame to the coated object to hold the coated object, and provided on at least one of these holding portions to elastically support the coated object on the other holding portion side. An elastic support member is provided.

According to the present invention, there is no risk of contaminating the surface to be coated since the adsorption pad does not need to be brought into contact with the workpiece when the object is held, or the workpiece is not directly handled when the workpiece is conveyed. . Moreover, since the holding part is attached to the frame via an elastic support means that can be elastically deformed, it is possible to match the rotational axis of the coated object with the position of the discharge nozzle even in a substantially circular or non-circular shaped object. Appearance defects, such as a coating remainder, can be suppressed.

Therefore, it is possible to form a coating film suitable for the coated object by keeping the coated object of various shapes satisfactorily.

Moreover, in this invention, it is preferable that the said elastic support member is provided with the elastic support force provision mechanism which increases the elastic support force with respect to the to-be-coated object of the said holding part with rotation of the said frame.

According to the present invention, even in the case of holding a coated object with a weight, the centrifugal force during spin coating (high-speed rotation) can be effectively utilized, so that the coated object can be more strongly sandwiched, so that the coated object can be dropped. Can be prevented.

In addition, in the present invention, the elastic support member and the holding portion is composed of a series of leaf springs, the base end of the leaf spring is fixed to the opposite surface of the frame to the object to be coated, the leaf spring The bent portion of the leaf spring constitutes the holding portion, and the bent portion is bent between the proximal end portion of the leaf spring and the distal end portion in a state of being in contact with the opposite surface of the frame to the object to be coated, and the bent portion of the leaf spring is provided. Between the part and the base end, a separation part spaced apart from the opposing surface of the frame is formed, and the elastic support force applying mechanism is constituted by a weight member provided in the separation part of the leaf spring. It is desirable to have.

 According to the present invention, by the principle of centrifugal force and lever, the force directed outward by the additional rotation mounted on the elastic support means is converted into the force directed toward the inside of the holding portion to hold the workpiece. As a result, even in the case of holding a weighted object to be coated, the centrifugal force during spin coating (high-speed rotation) can be effectively utilized, and the object to be coated can be held more strongly, thereby preventing falling of the object to be coated. can do.

In addition, since the elastic support member, the bent portion, the separation portion, and the holding portion can be formed at the same time by bending a series of leaf springs, they can be easily manufactured and inexpensively manufactured spin holders. can do.

And in this invention, it is preferable that three or more said holding parts are provided.

According to the invention, even if the frame is rotated at high speed, the object to be coated is held at three or more points, so that the objects to be coated in various shapes can be held in a stable and highly stable manner. Thereby, a coating film can be formed uniformly with respect to a to-be-coated object.

The spin coat apparatus of this invention is a spin coat apparatus which apply | coats a to-be-coated object by a spin coat method, Comprising: The spin coat holder of any one of Claims 1-4, and this spin coat holder And a chuck for holding the frame, a rotating mechanism supporting and rotating the chuck, and a discharge portion for discharging a coating agent to the object to be coated.

According to the present invention, even when applying one surface at a time, since it is not necessary to bring the adsorption pad into contact with one surface, it is possible to invert the state without applying drying and firing, and to apply both surfaces. Moreover, when discharging means which discharges the composition for coating is provided above and below a to-be-coated object, application | coating simultaneously of both surfaces also becomes possible. Therefore, the lead time can be shortened.

Moreover, in this invention, it is preferable to provide the inversion mechanism which inverts the said frame, when the said chuck releases the grip of the said frame.

According to the present invention, since the operator does not intervene in the reversal work of the frame, it is possible to always process in a comfortable environment.

And in this invention, it is preferable that the protrusion part which protruded toward the outer side is provided in the outer peripheral edge part of the said frame, and the said inversion mechanism is provided with the holding part which hold | grips the said protrusion part.

According to the present invention, in the case of coating one by one, when applying one side of the object to be coated and then inverting the object by the reversing mechanism, the projection of the frame can be grasped and inverted. It is not necessary to handle this, and contaminating the surface to be coated can be avoided.

Moreover, in this invention, the said chuck is equipped with the some chuck claw which clamps the said frame in the said spin coat holding tool, The said rotation means is the chuck claw before the start of a rotation, It is preferable to have an encoder which controls to rotate the said chuck in the state which is located in the position which does not interfere.

According to the present invention, since the position of the chuck claw before the start of rotation is automatically set at a position that does not interfere with the reversal mechanism, the reversal mechanism is avoided even if the position of the chuck claw is not manually adjusted when reversing the workpiece. The coating can be reversed. Therefore, the extra working time in reversing can be reduced, efficiency can be improved, and the continuous operation of the coating process on the to-be-coated object becomes possible.

Embodiment of the Invention

(1) First embodiment

(1-1) Structure of Spin Coat Apparatus 1

The spin coat apparatus 1 which concerns on 1st Embodiment of this invention is demonstrated based on drawing. 1 is a side view showing the spin coat apparatus according to the first embodiment of the present invention. 2 is a plan view of the spin coat apparatus.

In addition, in this embodiment, the case where an anti-reflective film is formed in the plastic spectacle lens L as a to-be-coated object by the spin coat apparatus 1 is illustrated and demonstrated, but it is not limited to this, In the spin coat apparatus 1 It is possible to form various coating films for various to-be-coated objects other than the plastic spectacle lens L. FIG.

In FIG. 1 and FIG. 2, the spin coat apparatus 1 is an apparatus which apply | coats the plastic spectacle lens L by a spin coat method. This spin coat apparatus 1 includes a spin coat holder 2 for holding a plastic spectacle lens L, a chuck 3 for holding the spin coat holder 2, and this chuck 3 ) Is provided at the lower portion of the rotating mechanism 4 for supporting and rotating the chuck 3 and the discharge portion 5 provided above the spin coat holder 2 to discharge the coating agent to the plastic spectacle lens L. ) And an inversion mechanism 6 for inverting the spin coat holder 2.

Specifically, the structure of the spin coat holding tool 2 is demonstrated based on drawing. Fig. 3 shows a spin coat holder, (A) is a plan view, and (B) is an arrow display diagram of a cross section taken along line B-B in (A).

As shown in FIG. 3 (A), the spin coat holder 2 includes a frame 21 surrounding the outer circumference of the plastic eyeglass lens L, and an inner circumferential surface 21A of the frame 21 ( Four leaf spring members 22 as elastic support members fixed to the outer circumferential edge of the plastic spectacle lens L, and holding portions 23 provided in series on each of the leaf spring members 22, respectively. And a weight member 24 serving as an elastic supporting force imparting mechanism attached to the leaf spring member 22.

The frame 21 is formed in a round shape with a plate made of metal such as stainless steel, for example, and has an outer circumferential surface of the frame 21 (a surface facing the outer circumferential edge of the plastic spectacle lens L). On the opposite side), the protruding portion 21B protruding in the shape of a blade is formed integrally with the radially outer side of the frame 21.

The leaf spring members 22 each have a rectangular thin plate spring plate bent in a substantially arc shape, and are elastically deformed by a force such as a finger, for example. These leaf spring members 22 are provided in parallel with the pair of leaf spring members 22 which are in mirror-inverse relationship with each other on the inner peripheral surface 21A of the frame 21, In addition, a pair of the leaf spring members 22 is further provided at a position facing each other in the radial direction of the frame 21, and a total of four are provided.

Each base end of these leaf spring members 22 is fixed to an inner circumferential surface 21A of the frame 21. On the other hand, each tip portion of the leaf spring member 22 is bent in a state toward the center of the frame 21 and is separated from the inner circumferential surface 21A of the frame 21, and the tip portion of the spring member 22 is The holding part 23 is comprised.

And at the center of the base end part and the front end part of the leaf | plate spring member 22, the bending part 22A bent in convex shape in the direction which abuts on the inner peripheral surface 21A of the frame 21 is provided, and this bending part ( 22A) is in point contact with 21 A of inner peripheral surfaces.

Further, between the bent portion 22A and the proximal end of the leaf spring member 22, the teeth are curved in a convex shape in a direction toward the center point of the frame 21 and spaced apart from the inner circumferential surface 21A of the frame 21. The trunk part 22B is provided, and the weight member 24 is attached to the intermediate part of this separation part 22B.

The holding part 23 is provided in each front-end | tip part of the leaf | plate spring member 22 as mentioned above, and holds the outer peripheral edge part (cutting part) of the plastic spectacle lens L at four points.

As shown in FIG. 3 (B), these holding portions 23 are formed to have a width approximately double than that of the leaf spring member 22, and each V-shaped cutout portion 23A is formed at each tip. Formed. The outer peripheral edge portion (cutting portion) of the plastic spectacle lens L is inserted into the cutout portions 23A.

And the holding part 23 of the right side in FIG.3 (B) of the pair of leaf | plate spring members 22 which are in mirror image symmetry mutually mutually shifts and arrange | positions below the left holding part 23, Therefore, even if each holding part 23 moves in the frame 21, it does not interfere with each other.

Moreover, the deepest parts of each cutout part 23A are provided in the same straight line in the circumferential direction of the frame 21 (up-down direction in FIG. 3 (B)). Accordingly, when the outer peripheral edge (cutting portion) of the plastic spectacle lens L is inserted into each of the cutouts 23A, the surface of the plastic spectacle lens L is almost in the circumferential direction of the frame 21. It is intended to remain parallel. When the frame 21 is rotated, the plastic spectacle lens L can be stably rotated in the horizontal plane without shaking up and down.

The holding part 23 is elastically supported with respect to the plastic spectacle lens L by the leaf spring member 22 in a state where the plastic spectacle lens L is attached, whereby the plastic spectacle lens L is It is supposed to be stable.

The weight member 24 is a metal piece with a large specific gravity, etc. For example, this metal piece is adhere | attached to the separation part 22B of the leaf | plate spring member 22, or the outer side of the separation part 22B with a some metal piece. It is installed by inserting and fixing it.

The weight member 24 is provided with a gap between the weight member 24 and the inner circumferential surface 21A in a state where the weight member 24 is attached to the separation portion 22B of the leaf spring member 22. As the weight member 24 moves outward in the radial direction of the frame 21 in this gap, in the principle of the lever with the bent portion 22A as the point, the holding portion 23 is made of the plastic spectacle lens L. To be more elastically supported toward the.

The chuck 3 is a device for holding the frame 21 in the spin coat holder 2.

Specifically, as shown in FIG. 1 and FIG. 2, the chuck 3 includes, for example, three end-mounted chuck claws 31 and a core for supporting these end-mounted chuck claws 31. The chuck 32 is provided.

The end fitting chuck claw 31 is a rod-shaped member each extending in the vertical direction in FIG. 1, the upper end side of which is smaller in diameter than the middle portion, and a stepped portion 31A is formed therein. . The protruding portion 21B of the frame 21 of the spin coat holder 2 can be engaged with this step portion 31A. In the state where the frame 21 of the spin coat holder 2 is held by the end-fitting chuck claw 31, the frame 21 is in a state substantially parallel to the horizontal plane.

The centripetal chuck 32 is formed in a substantially cylindrical shape, and in the upper end surface part of FIG. 1 of this centripetal chuck 32, three cutouts 32A extending along the radial direction of the centripetal chuck 32 are formed. It is installed at equal intervals along the circumferential direction. The other end side (lower end side in FIG. 1) of the end attachment chuck claw 31 is inserted through this cutout part 32A, and the lower end side of these end attachment chuck claws 31 is a centripetal chuck ( 32) It is supported by the chuck claw drive mechanism not shown inside. Then, the chuck claw driving mechanism moves the end chuck claws 31 along the radial direction of the centripetal chuck 32 to widen or narrow the distance between the end chuck claws 31. As a result, the frame 21 of the spin coat holder 2 can be held and opened by the end-fitting chuck claw 31.

The rotating mechanism 4 is provided with the spindle motor 41 which rotates a drive shaft, and the rotating shaft 42 which one end is connected to the drive shaft of this spindle motor 41, and the other end side is connected to the lower part of a centripetal chuck. .

And the spindle motor 41 is equipped with the encoder not shown which sets the position of the end attachment chuck claw 31 in a specific position before rotation start. As such an encoder, for example, the drive shaft is rotated so that the rotation angle of the drive shaft of the spindle motor 41 becomes a threshold value, or the center centrifugal chuck acquired from this position sensor by providing a position sensor below the centrifugal chuck 32 ( And rotating the drive shaft based on the positional information of 32). Thereby, the position of the end fitting chuck claw 31 after rotating the chuck 3 with the spindle motor 41 is set at a specific position before the next rotation start. Therefore, the operation of the inversion mechanism 6 will be described later. However, when the inversion mechanism 6 inverts the plastic spectacle lens L, the inversion mechanism 6 and the end-fitting chuck claw 31 are controlled by the encoder. It does not interfere with each other.

The discharge part 5 is an apparatus which discharges the coating agent LQ from upper direction toward the to-be-coated surface (upper surface in FIG. 1) of the plastic spectacle lens L. As shown in FIG. When discharging the coating agent LQ from the discharge part 5, it is preferable to match the position of the discharge nozzle 51 with the rotation center axis of the rotating plastic spectacle lens L.

Here, when forming an anti-reflective film in the plastic spectacle lens L, a fluorine compound, a silane compound, etc. are mentioned as this coating agent LQ. In particular, in this embodiment, the silane compound is diluted with an organic solvent, and hydrolysis is performed by adding water or dilute hydrochloric acid, acetic acid, etc. as necessary, and silica-based fine particles are dispersed in a colloidal form in an organic solvent. ), A surfactant, a ultraviolet absorber, an antioxidant, etc. are added as needed, and the thing stirred sufficiently is used as a coating agent (LQ). The film thickness of the antireflective film to be formed is controlled in a range of, for example, ± 10 nm with respect to a predetermined film thickness of 100 nm in order to realize desired optical characteristics.

The inverting mechanism 6 is an apparatus for inverting the frame 21 when the chuck 3 releases the grip of the frame 21, and the spin coat holder 2 held in the state held by the chuck 3. It is provided in the position adjacent to a horizontal direction (left-right direction in FIG. 1). Then, the gripping portion 61 gripping the projection 21B of the frame 21 of the spin coat holder 2 and the one end of the gripping portion 61 are provided in succession to hold the gripping portion 61. An inverting portion 62 for inverting and a continuous portion of one end of the inverting portion 62, and horizontally moving the holding portion 61 and the inverting portion 62 with respect to the spin coat holder 2 (Fig. 1). In the horizontal direction).

The structural example of the plastic spectacle lens L coated by the spin coat apparatus 1 of such a structure is demonstrated based on drawing. 4A and 4B are cross-sectional views showing structural examples of the plastic spectacle lens L. FIG.

The plastic spectacle lens L illustrated in FIG. 4A has a primer film 101, a hard coat film 102, an antireflection film 103, and an antifouling film on both surfaces of the substrate 100. 104 is formed by forming a coating film sequentially.

The plastic spectacle lens L illustrated in FIG. 4B does not include the primer film 101 of FIG. 4A, and the hard coat film 102 is formed on both surfaces of the substrate 100. The antireflection film 103 and the antifouling film 104 are formed by sequentially forming a coating film.

The base material 100 is formed in a substantially elliptical shape with a plastic material, one end surface is a convex surface, and the other end surface is a concave surface.

The primer film 101 is formed of a urethane resin or the like, and is formed when the adhesion between the base material 100 and the hard coat film 102 needs to be improved or when the impact resistance needs to be improved. As a result, if there is no need, the hard coat film 102 is formed directly on the substrate 100 without forming the primer film 101 as shown in FIG.

The hard coat film 102 is formed of a silicon-based or acrylic-based material to have a thickness of about 2 μm, for example, in order to prevent damage to the plastic spectacle lens L. FIG. In the case where the hard coat film 102 is directly formed on the substrate 100, it is preferable to perform alkali treatment, acid treatment, polishing treatment with fine particles, plasma treatment, or the like on the surface of the substrate 100 in advance. The adhesion between the substrate 100 and the hard coat film 102 is improved.

In order to prevent surface reflection of the plastic spectacle lens L, the anti-reflection film 103 is formed as a layer having a lower refractive index than the hard coat film 102, the primer film 101, and the base material 100. . This antireflection film 103 is applied to the plastic spectacle lens L by the spin coat apparatus 1, and can be formed not only as a single layer film but also as a multilayer film.

The antifouling film 104 includes a fluorine-containing compound as an antifouling component, and is formed as the outermost layer of the plastic spectacle lens L.

(1-2) Operation of the Spin Coat Apparatus 1

The operation of forming the antireflection film 103 on the plastic spectacle lens L by the spin coat apparatus 1 as described above will be described based on the drawings. 5 is a plan view showing the spin coat holder 2 at the high speed rotation.

First, as shown in FIG. 4, as a pretreatment step of forming the anti-reflection film 103 on the plastic spectacle lens L, the substrate 100 is formed by heating and / or light irradiation on a liquid plastic raw material, The primer film 101 and the hard coat film 102 are formed on the base material 100. The primer film 101 and the hard coat film 102 are formed by applying a coating liquid by a dipping method, a spinner method, a roll coating method, a spray method, an inkjet method, or a flow method, followed by heat drying. After the surface modification treatment is performed on the surface of the hard coat film 102 by plasma, the anti-reflection film 103 is applied by the spin coat apparatus 1. In addition, it is also possible to apply | coat the primer film 101, the hard-coat film 102, and the anti-reflective film 103 in series by the spin coat apparatus 1.

As described above, the plastic spectacle lens L in a state where the coating treatment of the antireflection film 103 is enabled is attached to the spin coat holder 2.

Specifically, the leaf spring member 22 is bent to insert the outer circumferential edge portion (cutting portion) of the plastic spectacle lens L into the cutout portion 23A of the holding portion 23. In particular, when attaching the substantially oval plastic spectacle lens L as shown in FIG. 5, the cutouts 23A are provided at both ends in the longitudinal axis direction of the outer peripheral edge (cutting portion) of the plastic spectacle lens L. FIG. Insert in At this time, since each holding part 23 is elastically supported by the leaf spring member 22, the plastic eyeglass lens L is stably held by these holding parts 23, and the non-round-shaped plastic eyeglass lens is supported. Even in (L), the four holding parts 23 are stably fitted.

Then, the spin coat holder 2 in the state where the plastic spectacle lens L is mounted is attached to the spin coat apparatus 1 as shown in FIGS. 1 and 2.

Specifically, when the spin coat holder 2 is attached to the spin coat apparatus 1, the rotational drive of the rotary mechanism 4 is stopped, and the respective end-fitting chucks are caused by the action of the centripetal chuck 32. The claws 31 are separated from each other. Moreover, the position of the end attachment chuck claw 31 is set to the specific position by the encoder of the rotation mechanism 4. When the spin coat holder 2 is introduced into the spin coat apparatus 1 in such a state, and the interval between the end chuck claws 31 is narrowed by the centripetal chuck 32, the end chuck claw 31 is formed. The protrusion 21B of the frame 21 of the spin coat retainer 2 is engaged with the stepped portion 31A of the) so that the frame 21 is gripped by the end-fitting chuck claw 31. Thereby, attachment of the spin coat holder 2 to the spin coat apparatus 1 is completed and it will be in the state which can be apply | coated.

As described above, when the spin coat holder 2 is attached to the spin coat apparatus 1, the spindle motor 41 rotates at high speed, and with this, the chuck 3 is interposed through the rotary shaft 42. Rotate at high speed. Thereby, the plastic spectacle lens L held by the spin coat holder 2 rotates at high speed in the X direction about the center point of the frame 21.

At this time, as shown in FIG. 5, the centrifugal force Y acts on each of the weight members 24 by the high-speed rotation of the frame 21, and the centrifugal force Y causes the weight member 24 and the inner circumferential surface. In the gap formed between 21A, the weight member 24 moves toward the radially outer side of the frame 21. In connection with this, according to the principle of the lever with the bending part 22A as the point, as shown by the solid line in FIG. 5, the holding part 23 is moved to the direction toward the center of the frame 21. As shown in FIG. For this reason, as shown by the virtual line in FIG. 5, in the state in which the holding part 23 hold | maintained the plastic spectacle lens L, the holding part 23 increases the elastic support force to the plastic spectacle lens L. FIG. By this action, the plastic spectacle lens L is fitted to such an extent that it can withstand high speed rotation.

And the coating agent LQ is discharged from the discharge part 5 toward the plastic spectacle lens L from upper direction.

At this time, since the leaf spring member 22 is elastically deformable, the position in the frame 21 of the plastic spectacle lens L can be appropriately adjusted, and the rotational central axis of the plastic spectacle lens L and the discharge nozzle ( When the position of 51) is matched, the coating agent LQ is spread evenly on the upper surface of the plastic spectacle lens L, and the application remainder is lost. Moreover, since the plastic spectacle lens L is stably held by the spin coat holder 2 and rotates stably at a high speed in a horizontal plane without shaking up and down, the film thickness of the formed coating film is constant. do. In addition, since the holding part 23 holds the outer peripheral edge (cutting part) of the plastic spectacle lens L in point contact, the holding part 23 does not cover the coated surface of the plastic spectacle lens L, and is in the corner. Application | coating process is performed to a corner.

In this way, when the coating agent LQ is discharged to the discharge part 5 and the application | coating process to the plastic spectacle lens L is performed, the spindle motor 41 will stop rotation, and an end attachment chuck is performed by the encoder which is not shown in figure. The position of the claw 31 is set at a specific position. And the horizontal moving part 63 of the inversion mechanism 6 horizontally moves the holding part 61 and the inverting part 62 toward the spin coat holder 2, and the holding part 61 spin-coats. The protrusion 21B of the frame 21 of the dragon holder 2 is gripped. Further, the centripetal chuck 32 widens the interval between the end-fitting chuck claws 31 to release the holding of the frame 21, and the inverting portion 62 interposes the holding portion 61 to hold the spin coat holder. Invert (2) 180 degrees. Thereby, the reverse surface in which the application process of the plastic spectacle lens L is not performed is reversed in the state which opposes the discharge part 5.

In the inverting operation of the plastic spectacle lens L, the gripping portion 61 grips the protrusion 21B of the frame 21, so that the coated surface of the plastic spectacle lens L subjected to the coating treatment is contaminated. There is no Moreover, since the position of the end attachment chuck claw 31 is set to a specific position by the encoder, the inversion mechanism 6 does not come into contact with the end attachment chuck claw 31.

When the plastic spectacle lens L is inverted, the centripetal chuck 32 narrows the distance between the end-fitting chuck claws 31 to hold the frame 21, and the grip portion 61 of the frame 21 The grip of the protrusion 21B is released. In addition, the horizontal moving part 63 horizontally moves the holding part 61 and the inverting part 62 in a direction away from the spin coat holder 2, whereby the spin coat device 1 is in a rotatable state. do. And in the above operation | movement, an application | coating process is performed with respect to the opposite surface on which the application | coating process of the plastic spectacle lens L is not performed.

When the coating process is applied to both surfaces of the plastic spectacle lens L as described above, the centripetal chuck 32 widens the interval between the end-fitting chuck claws 31 to release the holding of the frame 21 and spins. The coat holder 2 is in a state in which it can be taken out. And the frame 21 is hold | maintained in the state with which the plastic spectacle lens L was attached, and the spin coat holder 2 is conveyed by the drying and baking process which is the next process. After baking, the leaf spring member 22 is bent, the plastic spectacle lens L is pulled out from the spin coat holder 2, and the application of the series of antireflection films 103 is completed.

In this way, since the plastic spectacle lens L can be transported (handled) in the state of being attached to the spin coat holder 2, the plastic spectacle lens L after the coating treatment is not contaminated during handling. Further, by inverting the plastic spectacle lens L with the inversion mechanism 6, it is possible to continuously apply the coating process to both surfaces of the plastic spectacle lens L, and to handle each time the coating process is performed one by one. No need to dry and fire. As a result, the process is greatly reduced, so that the overall working time of the coating treatment is greatly shortened.

(1-3) Effects of the First Embodiment

In the spin coat apparatus 1 described above, the following effects can be obtained.

(1-3-1) In the spin coat holder 2, since the holding part 23 is provided in the frame 21 via the plate spring member 22 which is elastically deformable, the leaf spring member ( 22 is elastically deformed to conform to the shape of the plastic spectacle lens L, and the outer circumferential edge (cutting portion) of the plastic spectacle lens L is inserted into the cutout portion 23A of the retaining portion 23, thereby forming various shapes. Plastic spectacle lens L can be attached to the spin coat holder 2. At this time, since the holding part 23 is elastically supported by the leaf spring member 22, the plastic spectacle lens L can be stably supported. In particular, since the four holding portions 23 are provided, even the non-round plastic spectacle lens L can be stably held by the four holding portions 23. As a result, the plastic spectacle lens L can be stably rotated, whereby a film can be formed uniformly with respect to the plastic spectacle lens L. FIG.

(1-3-2) Since the leaf spring member 22 is elastically deformable when discharging the coating agent LQ from the discharge portion 5, the position in the frame 21 of the plastic spectacle lens L Can be adjusted appropriately, and the rotation center axis of the plastic spectacle lens L of various shapes can be matched with the position of the discharge nozzle 51. Thereby, the coating agent LQ spreads evenly on the upper surface of the plastic spectacle lens L, and can suppress appearance defects, such as a coating remainder, in the plastic spectacle lens L of various shapes.

(1-3-3) The holding portion 23 holds the outer peripheral edge portion (cutting portion) of the plastic spectacle lens L in point contact at the substantially V-shaped cut-out portion 23A, so that the holding portion ( It is possible to prevent 23 from covering the coated surface of the plastic spectacle lens L. Thereby, an application | coating process can be performed even to every corner of the plastic spectacle lens L.

(1-3-4) Since the protruding portion 21B is provided on the outer circumferential surface of the frame 21, and the end-fitting chuck claw 31 grips the protruding portion 21B, the chuck claw 31 in the coating process. It is possible to prevent the application surface of the plastic spectacle lens L from being contaminated. In addition, since the inversion mechanism 6 grips and inverts the protrusion 21B of the frame 21 when inverting the plastic spectacle lens L, the application surface of the plastic spectacle lens L after the coating process is contaminated. Can be prevented.

(1-3-5) The shape of the frame 21 is made into a circular ring shape, and the spin coat holder 2 can be suitably attached to the spin coat apparatus 1, and in addition, various shapes The plastic spectacle lens L can be held.

(1-3-6) The weight member 24 is provided in the separation part 22B of the leaf spring member 22. As shown in FIG. For this reason, according to the centrifugal force Y and the principle of lever, the force which the weight member 24 attached to the leaf | plate spring member 22 faces outward by rotation is converted into the force which the holding part 23 faces inward. Thus, the plastic spectacle lens L can be sandwiched and supported. As a result, the holding speed of the plastic spectacle lens L is increased along with the increase of the rotational speed. Therefore, even when the plastic spectacle lens L having the weight is held, the plastic spectacle lens L can be held more strongly. It is possible to prevent the fall of the plastic spectacle lens L with a simple configuration.

(1-3-7) By bending one rectangular thin plate spring piece, the leaf spring member 22, the bent portion 22A, the separation portion 22B, and the holding portion 23 are simultaneously formed. Since it is made possible, manufacture of the spin coat holder 2 can be performed easily and manufacturing cost can be suppressed at low cost.

(1-3-8) In the rotating mechanism 4, since the position of the end-fitting chuck claw 31 is set at a specific position before the start of rotation by the encoder, the inversion mechanism 6 is made of the plastic spectacle lens L. ) Can be avoided from contacting the end-fitting chuck claw 31 when it is moved when inverting. Thereby, continuous automatic operation becomes possible in the coating process to the plastic spectacle lens L by the spin coat apparatus 1, and a coating process can be performed with high efficiency.

(1-3-9) Since the plastic spectacle lens L is inverted by the inversion mechanism 6, it is possible to apply the coating process continuously to both surfaces of the plastic spectacle lens L, and to apply the coating process one by one. There is no need to handle, dry or fire each time. Thereby, since a process is greatly reduced, the whole working time of a coating process can be shortened significantly.

(2) Second Embodiment

(2-1) Structure of Spin Coat Apparatus 1A

Next, the spin coat apparatus 1A according to the second embodiment of the present invention will be described based on the drawings. 6 is a side view showing the spin coat apparatus according to the second embodiment of the present invention.

In addition, the spin coat apparatus 1A shown in this FIG. 6 makes it possible to apply | coat simultaneously to the upper and lower surfaces of the plastic spectacle lens L, and the spin coat apparatus which concerns on 1st Embodiment shown in FIG. 1 and FIG. It differs in part from (1) in that the chuck | zipper 3 and the rotation mechanism 4 are partially different, and the discharge part is provided in upper and lower sides, and differs in the point which does not include the inversion mechanism 6. As shown in FIG. For this reason, about the structure similar to the spin coat apparatus 1 shown in FIG. 1 and FIG. 2, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

In FIG. 6, the spin coat apparatus 1A includes the spin coat holder 2 shown in FIG. 3, the chuck 3A, the rotation mechanism 4A, and the discharge portion 5A. have.

The through hole 33 is formed in the centripetal chuck 32A in the chuck 3A along its central axis.

4 A of rotation mechanisms are the substantially cylindrical 1st integrally provided in the spindle motor 41, the drive shaft 43 of this spindle motor 41, and the substantially center of the outer peripheral surface in this drive shaft 43. As shown in FIG. A pulley 44, a timing belt 45 that is caught and rotated on the outer circumferential surface of the first pulley 44, and a substantially cylindrical cylinder which is installed adjacent to the first pulley 44 and is caught by the timing belt 45 on the outer circumferential surface and rotated. It is provided with the 2nd pulley 46 of a shape, and the rotating shaft 47 integrally attached to the inner peripheral surface of this 2nd pulley 46, and one end side connected to the lower part of the centripetal chuck 32A.

And 47 A of through-holes are formed in the rotating shaft 47 along the center axis | shaft, This through-hole 47A and the through-hole 33 in the centripetal chuck 32A are provided on the same axis.

The discharge part 5A is the first discharge part 52 which discharges the coating agent LQ from the upper direction toward the upper end surface in FIG. 6 of the plastic spectacle lens L, and the lower end in FIG. 6 of the plastic spectacle lens L. The 2nd discharge part 53 which discharges the coating agent LQ from the downward direction toward the surface is provided.

53 A of discharge nozzles of this 2nd discharge part 53 pass through 47 A of through-holes of the rotating shaft 47, and the through-hole 33 of the centripetal chuck 32A from below the centripetal chuck 32A. It extends to the position which opposes the lower end surface of plastic spectacle lens L. As shown in FIG. Thus, in order to install the 2nd discharge part 53 below the centripetal chuck 32A, in this embodiment, the timing belt 45 etc. are attached to the rotation mechanism 4A, and the spindle motor 41 is attached. It is set as the structure provided in the position off from the lower part of the centripetal chuck 32A.

(2-2) Operation of the Spin Coat Device 1A

The operation of forming the antireflection film 103 on the plastic spectacle lens L by the above described spin coat apparatus 1A will be described. In addition, description is abbreviate | omitted suitably about the operation | movement similar to the operation | movement of the spin coat apparatus 1 shown to said (1-2).

In the same manner as in the above (1-2), the spin coat holder 2 in the state where the plastic spectacle lens L is mounted is attached to the spin coat apparatus 1A as shown in FIG. Then, when the spindle motor 41 rotates at high speed, the drive shaft 43, the first pulley 44, the timing belt 45, the second pulley 46, and the rotation shaft 47 are sequentially interposed. The driving force is transmitted to the chuck 3A, and the chuck 3A rotates at high speed.

The first discharging unit 52 discharges the coating agent LQ from the upper side toward the upper end surface of the plastic spectacle lens L, and at the same time, the second discharging unit 53 discharges the plastic spectacle lens L from the lower side. The coating agent LQ is discharged toward the bottom surface.

At this time, the rotation center axis of the plastic spectacle lens L, the position of the ejection nozzle 52A in the first ejection part 52 and the position of the ejection nozzle 53A in the second ejection part 53 are almost If it matches, the coating agent LQ will spread evenly on the upper surface and lower surface of the plastic spectacle lens L, and the application remainder will disappear.

Thus, in this embodiment, since the coating process is performed simultaneously on both surfaces of the plastic spectacle lens L, the plastic spectacle lens L is inverted by providing the inversion mechanism 6 shown in FIGS. 1 and 2. It is not necessary to, and the time for the coating treatment is halved as compared with the case of single-side coating.

(2-3) Effect of 2nd Embodiment

According to the spin coat apparatus 1A of 2nd Embodiment mentioned above, in addition to the effect shown to said (1-3-1)-(1-3-8) of the spin coat apparatus 1 of 1st Embodiment, The following effects can be obtained.

(2-3-1) Discharge the coating agent LQ from the first discharge portion 52 toward the upper surface of the plastic spectacle lens L from above, and at the same time, the plastic glasses from the second discharge portion 53 from below. Since the coating agent LQ is discharged toward the lower end surface of the lens L, the coating treatment can be simultaneously applied to both surfaces of the plastic spectacle lens L. FIG. Thereby, since the time of application | coating process can be halved compared with the case of single-side application, lead time can be shortened. In addition, since it is not necessary to provide the inversion mechanism 6 shown in FIG. 1 and FIG. 2, the structure of the spin coat apparatus 1A is simplified, and the manufacturing cost of the spin coat apparatus 1A can be cheaply manufactured at low cost (3). Example

Next, the Example of this invention is described.

(3-1) Example 1

Spin coating apparatus 1 of 1st Embodiment shown in FIG. 1 and FIG. 2 with respect to the substantially elliptical plastic eyeglass lens L which formed the primer film and the hard-coat film, and surface-modified by plasma. By this, the composition for antireflection film was coated.

The oval-shaped plastic spectacle lens L is set to the spin coat holder 2 with the convex face up, and the spin coat holder 2 is set to the end-fitting chuck claw 31 to be fitted. The coating agent LQ (composition for antireflection film) was discharged from the discharge nozzle 51 while rotating at a low speed, and then sufficiently shaken while rotating at a high speed. Thereafter, the inversion mechanism 6 was automatically inverted to form a coating film on the concave surface side in the same manner, and then dry-baked to form an antireflection film.

The appearance of the obtained plastic spectacle lens L was good, and no appearance defects such as adhesion of particles occurred.

(3-2) Example 2

With respect to the substantially elliptic-shaped plastic spectacle lens L in which a primer film and a hard coat film were formed in advance and subjected to a surface modification treatment by plasma, by the spin coat apparatus 1A of the second embodiment shown in FIG. 6, Coating of the composition for antireflection film was performed.

The oval-shaped plastic spectacle lens L is set to the spin coat holder 2 with the convex face up, and the spin coat holder 2 is set to the end-fitting chuck claw 31 to be fitted. The coating agent LQ (composition for antireflection film) was simultaneously discharged from the first discharge nozzle 52A and the second discharge nozzle 53A while rotating at a low speed, and then sufficiently shaken while rotating at a high speed. Then, the anti-reflective film was formed by drying and baking.

The appearance of the obtained plastic spectacle lens L was good, and no appearance defects such as adhesion of particles occurred.

(3-3) Comparative Example 1

Next, the comparative example 1 is demonstrated based on drawing. 7 is a cross-sectional view showing a conventional adsorption pad suction type spin coat apparatus.

In FIG. 7, the spin coat apparatus 200 is a suction pad suction type spin coat apparatus which sucks and maintains the back surface side of the application surface in the plastic spectacle lens L with a suction pad. The spin coat apparatus 200 includes a holder 220 provided at one end of the rotating shaft 210, a suction pad 230 attached to the holder 220, and a lens L disposed on the suction pad 230. The discharge part 240 provided in the position which opposes the upper surface of ().

Using the spin coat apparatus 200 shown in FIG. 7, the anti-reflective coating composition is coated on a substantially oval plastic eyeglass lens L in which a hard coat layer is formed in advance and subjected to surface modification by plasma. Was performed.

A plastic oval lens L having an approximately elliptic shape is set and supported on the suction pad 230 with the convex face up, and the coating agent LQ (composition for antireflection film) is discharged to the discharge part 240 while rotating at a low speed. Then, they were shaken sufficiently while rotating at high speed. The plastic spectacle lens L in this state was dried and fired to form an antireflection film on the convex surface side.

Then, after setting the plastic spectacle lens L on the suction pad 230 with the concave surface facing up, the composition for an antireflection film was formed in the same manner on the concave surface side.

Particles adhered to the obtained plastic spectacle lens, and appearance defects occurred.

(3-4) Comparative Example 2

Next, the comparative example 2 is demonstrated based on drawing. Fig. 8 is a side view showing a conventional chuck claw direct holding spin coat apparatus. Fig. 9 is a plan view showing a conventional chuck claw direct holding spin coat apparatus.

8 and 9, the spin coat apparatus 300 is a conventional chuck claw direct holding type that directly abuts and holds three chuck claws 311 at the outer peripheral edge (cutting portion) of the plastic spectacle lens L. Spin coat device. This spin coat apparatus 300 is provided with the chuck 310, the rotation mechanism 320, and the discharge part 330. The chuck 310 includes three end-fitting chuck claws 311 provided with engaging portions 312 on the upper end side, and a centripetal chuck 313. The centripetal chuck 313 includes three cutouts 314 into which each lower end side of the end-fitting chuck claw 3 is inserted, and a chuck claw driving mechanism supporting the lower end side of the chuck claw 311. Equipped. The rotating mechanism 320 is equipped with the spindle motor 321 and the rotating shaft 42. As shown in FIG. The discharge part 330 is provided with the discharge nozzle 331 which discharges the coating agent LQ from upper direction.

Using the spin coat apparatus 300 shown in FIG. 8 and FIG. 9, the anti-reflection film is applied to the substantially oval plastic eyeglass lens L in which a hard coat layer is formed in advance and subjected to surface modification by plasma. The composition was coated.

The oval-shaped plastic spectacle lens L is set in the end-fitting chuck claw 311 with the convex face up, and the coating agent LQ (composition for antireflection film) is discharged through the discharge nozzle 331 while rotating at a low speed. It was shaken sufficiently while continuing to rotate at high speed. The plastic spectacle lens L in this state was dried and fired to form a reflection preventing film on the convex surface side.

Thereafter, the plastic spectacle lens L was set in the end-fitting chuck claw 311 with the concave surface facing up, and then the composition for the antireflection film was formed in the same manner on the concave surface side.

In the center part of the obtained plastic spectacle lens L, since the ejection nozzle 331 and the lens center did not substantially correspond, application | coating remainder generate | occur | produced.

(3-5) Comparative Example 3

Using the spin coat apparatus 300 shown in FIG. 8 and FIG. 9, the hard-coat layer was formed previously, and the round-shaped plastic spectacle lens L which surface-modified by plasma was used, The coating was done.

The circular plastic spectacle lens L is set in the end-fitting chuck claw 311 with the convex face up, and the coating agent LQ (composition for antireflection film) is discharged through the discharge nozzle 331 while rotating at a low speed. Then, they were shaken sufficiently while rotating at high speed. The plastic spectacle lens L in this state was dried and fired to form an antireflection film on the convex surface side.

Thereafter, the plastic spectacle lens L was set in the end-fitting chuck claw 311 with the concave surface facing up, and then the composition for the antireflection film was formed in the same manner on the concave surface side.

Particles adhered to the obtained plastic spectacle lens, and appearance defects occurred.

(3-6) Table 1 summarizes the results of Examples 1 and 2 described above and Comparative Examples 1 to 3.

Lens shape Device Maintainability of the lens Appearance after adhesion of anti-reflection film (particle adhesion) Example 1 Approximate ellipse shape Spin coat apparatus 1 (FIGS. 1 and 2) of 1st Embodiment ○ ○ (there is no attachment) Example 2 Approximate ellipse shape Spin coat apparatus 1A of 2nd Embodiment (FIG. 6) ○ ○ (there is no attachment) Comparative Example 1 Approximate ellipse shape Spin Coat Device 200 of Mounting Pad Suction Type (FIG. 7) ○ × (with attachment) Comparative Example 2 Approximate ellipse shape Chuck Claw Direct Retention Spin Coat Device 300 (FIGS. 8 and 9) × ― (The remainder applied to center part) Comparative Example 3 Round shape Chuck Claw Direct Retention Spin Coat Device 300 (FIGS. 8 and 9) ○ × (with attachment)

In Table 1, the spin coat apparatus 1, 1A which concerns on this invention is equipped with the spin coat holder 2, and hold | maintains the substantially elliptical-shaped substantially oval-shaped plastic spectacle lens L favorably. It can be seen that a good appearance after the antireflection film formation can be obtained.

(4) Variation of Embodiment

In addition, this invention is not limited to embodiment mentioned above, It is including the deformation | transformation posted below in the range which can achieve the objective of this invention.

That is, in the said 1st and 2nd embodiment, although the structure which hold | maintains the substantially oval-shaped plastic spectacle lens L in the spin coat holder 2 was illustrated, it is not limited to this, For example, a round shape The non-round-shaped plastic spectacle lens L, such as the plastic spectacle lens L and the substantially elliptical shape or other polygonal shape, may be configured. The spin coat holder 2 is not limited to a plastic spectacle lens, and can hold any coated object such as, for example, a glass lens.

In the said 1st and 2nd embodiment, although the structure which attached the weight member 24 to the leaf | plate spring member 22 was illustrated, it is not limited to this. That is, as shown in FIG. 10, you may make it the structure which does not attach the weight member 24 to the leaf spring member 22. As shown in FIG. FIG. 10 is a plan view showing the spin coat holder in the modifications of the first and second embodiments. FIG. In FIG. 10, the spin coat holder 2A includes a frame 21, a leaf spring member 25, and a holder 26. The leaf spring member 25 does not include the bent portion 22A and the separation portion 22B as shown in FIG. 3, and the proximal end is fixed to the inner circumferential surface 21A of the frame 21 to hold the distal end. The part 26 is comprised. The leaf spring member 25 preferably has a spring pressure that can stably hold the plastic spectacle lens L even when the frame 21 is rotated at high speed. With such a configuration, even if the weight member is not attached, the plastic spectacle lens L of various shapes can be kept well and can be formed to form a suitable coating film without dropping the plastic spectacle lens L during high-speed rotation. Moreover, since the leaf | plate spring member 25 is a simple structure which does not have the bending part 22A and the clearance part 22B as shown in FIG. 3, the leaf-coating holder 2A can be made cheap. It can manufacture.

Although the leaf | plate spring member 22 was illustrated as an elastic support member in the said 1st and 2nd embodiment, if it has sufficient elastic support force, you may make a coil spring into an elastic support member, for example.

In the first and second embodiments, the spin coat holder 2 is provided with four leaf spring members 22 and four holding portions 23 provided in series, but not limited thereto. That is, three of the four holding portions are directly mounted to the frame 21 without interposing the elastic supporting member, and one remaining holding portion is formed in series with the elastic supporting member to form the elastic supporting member in the frame 21. It is good also as a structure attached to a. Even in such a structure, since the to-be-coated object can be hold | maintained in the state which elastically supports one holding part, the to-be-coated object of various shapes could be hold | maintained favorably and the suitable coating film was formed. The holding portions 23 may be provided with two, three, or five or more frames 21.

In the said 1st and 2nd embodiment, although the structure which hold | maintains the spin coat holder 2 with the three end fitting chuck claws 31 is illustrated in FIG. 2, it is not limited to this, The chuck claw is 1 Any number or more may be used, and in order to maintain more stably, it is preferable to provide four or more chuck claws.

In the first embodiment, the inversion mechanism 6 is configured to only invert the spin coat holder 2, but the present invention is not limited thereto, and a new plastic spectacle lens L is provided in the inversion mechanism 6. The function of supplying the attached spin coat holder 2 to the chuck 3 may be added. In this way, the application | coating process to the plastic spectacle lens L can be performed by continuous automatic operation, and processing efficiency can be improved significantly.

In the first and second embodiments, the discharge part 5, the first discharge part 52, and the second discharge part 53 are configured such that each discharge nozzle is provided to be movable to an arbitrary position. You may also In this way, the operation which matches the rotation center of the rotating plastic spectacle lens L and the position of each discharge part can be performed simply.

This invention can be used for the spin coat apparatus which apply | coats a to-be-coated object by a spin coat method.

Claims (8)

As a spin coat holder for holding a to-be-coated object to which a coating process is performed by the spin coat method, An annular frame surrounding the object to be coated, A plurality of holding portions provided on the opposite surface of the frame to the coated object, for holding the coated object; And a resilient support member provided on at least one of these holding portions and elastically supporting the object to be coated on the other holding portion side. The method according to claim 1, And said elastic support member is provided with an elastic support force imparting mechanism for increasing the elastic support force on said to-be-coated object with rotation of said frame. The method according to claim 2, The elastic support member and the holding portion is composed of a series of leaf springs, The proximal end of the leaf spring is fixed to the opposite surface of the frame, From the proximal end to the middle of the leaf spring is composed of the elastic support member, and the distal end of the leaf spring constitutes the holding portion, The intermediate portion of the leaf spring is provided with a bent portion bent in a state in contact with the surface facing the object to be coated of the frame, Between the bent portion and the proximal end of the leaf spring is formed a separation portion spaced apart from the opposite surface of the frame to the object to be coated, The said elastic support force provision mechanism is comprised by the weight member provided in the said separation part of the said leaf spring, The holding tool for spin coats characterized by the above-mentioned. The method according to any one of claims 1 to 3, Spin holder according to claim 3, characterized in that three or more are provided. As a spin coat apparatus which apply | coats a to-be-coated object by a spin coat method, Spin retainer of claim 1, A chuck that grips the frame in the spin coat holder; A rotating mechanism supporting and rotating the chuck, And a discharge portion for discharging a coating agent to the coated object. The method according to claim 5, And a reversing mechanism for reversing the frame when the chuck releases the grip of the frame. The method according to claim 6, The outer peripheral edge of the frame is provided with a protrusion protruding toward the outside, The inversion mechanism includes a gripping portion for gripping the projecting portion. The method according to claim 6 or 7, The chuck is provided with a plurality of chuck claws to hold the frame in the spin coat holder, And the rotating means is provided with an encoder for controlling the rotation of the chuck in a state where the chuck claw is positioned at a position where the chuck claw does not interfere with the inversion mechanism before the start of rotation.

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