KR20070005421A - Stamp for contact printing and contact printing method using the same - Google Patents

Abstract

A stamp for a contact print and a method for performing a contact print using the same are provided to allow an accurate alignment between the stamp and a substrate when the contact print is performed using the stamp. In a method for performing a contact print using a stamp(100), alignment marks of the stamp and a substrate are matched by using a dummy relief pitcher(101). An ink or a deposited material inked or deposited on the rest relief pitcher is transferred to a substrate to form a pattern by pressing a stamp relief. The dummy relief pitcher is longer than those of the rest relief pitchers. The stamp and the support are formed of a transparent material.

Description

Stamp for contact printing and contact printing method using the same {Stamp for contact printing and contact printing method using the same}

1 is a schematic diagram showing the structure of a stamp used in the present invention.

Figure 2a is a schematic diagram showing a process of alignment between the substrate and the stamp.

2B is a schematic diagram illustrating a process in which an ink or deposit is transferred to a substrate to form a pattern.

2C is a view showing a pattern formed on a substrate.

The present invention relates to a stamp for contact printing and a contact printing method using the same.

As a patterning method, direct printing methods such as inkjet printing, screen printing, and shadow masking are used, and the resolution is about 100 to 200 μm.

In the case of photolithography, resolutions up to several micrometers are possible, but due to the use of expensive equipment and toxic compounds such as photo masks, pellicles, and light sources, the limitations are limited compared to the direct printing mentioned above. many. In particular, a photoresist, a developer, a solvent, and exposure conditions used in the case of an organic electronic material may change the characteristics of the organic material.

Contact printing (or soft lithography) is not only a high resolution solution but also an easy to apply patterning method.

1 is a schematic diagram showing a process of manufacturing a rubber stamp (rubber stamp).

Inexpensive rubber stamp technology, polydimethylsiloxane (PDMS), polyurethane, polyimides, crosslinked Novolac resin on relief master surface A rubber stamp is produced by casting and curing an initial prepolymer of an elastic material such as [phenol formaldehyde polymer].

Among them, PDMS is easily released because of its conformable contact with the curved plane of the micrometer scale, its low interfacial energy and its chemical inertness. In addition, PDMS can impart suitable interfacial energy through plasma treatment and SAM treatment, and are homogeneous, isotropic, and transparent to about 300 nm optical wavelength. In addition, PDMS is durable and can be used many times.

2 is a simplified diagram illustrating a process of contact printing and patterning using a rubber stamp.

When the solution (ink) of the material to be patterned on the rubber stamp is deposited or vacuum deposited and then peeled off on the substrate, the ink or the deposition material rises on the substrate in the pattern of the stamp.

As a representative example thereof, an ink capable of forming a self-assembled monolayer such as an alkanethiol ink on a substrate made of copper, silver, gold, or the like is embedded in the stamp. After a few seconds, the ink of the stamp is transferred to the substrate by drying with nitrogen vapor and then contacting the substrate for several tens of seconds.

Other examples of transferring the vacuum-deposited material on the stamp to the substrate include wetting by thinly coating titanium (Ti) on the PDMS stamp, depositing gold (Au), and then contacting a thin film of organic material such as pentacene. There is a way to transfer gold.

However, in using the rubber stamp, the stamp may be bent when contacting the stamp and the substrate, which may cause a problem of incorrect printing on the substrate or air trapped.

In order to solve this problem, an alignment mark is formed at one end of the substrate, the stamp is aligned, and then slowly printed to the other end.

In addition, bubbles that are often generated can be removed within a few seconds by spreading through the PDMS because PDMS has a gas permeability when using a stamp made of PDMS.

In order to prevent bending or shrinkage of the stamp, the PDMS may be supported on an organic substrate having a low thermal expansion rate.

The present invention provides a new contact printing method that can solve the problem that the stamp is printed incorrectly on the substrate and the air trapped when contacting the stamp and the substrate, which is a problem caused by using the rubber stamp, Also provided is a stamp used for this.

The present invention to solve the above problems,

In the method of contact printing, using a dummy relief feature to match an alignment mark on a substrate with a stamp, and then pressing the stamp support to transfer the ink or deposit deposited or deposited onto the substrate to form a pattern on the remaining relief features. It provides a contact printing method characterized by.

The contact printing method may be a contact printing method characterized in that the dummy relief feature uses longer than the remaining relief features.

The contact printing method may be a contact printing method using a material of any one of polydimethylsiloxane (PDMS), polyurethane, polyimide, and crosslinked novolac resin (phenol formaldehyde resin) as a stamp. .

The contact printing method may be a contact printing method characterized in that it uses a transparent one as a stamp and a support.

In another aspect, the present invention provides a stamp for contact printing, characterized in that it further has a relief feature and a dummy relief feature longer than the relief feature.

The contact printing stamp may be a stamp for contact printing, characterized in that the material of any one of polydimethylsiloxane, polyurethane, polyimide, cross-linked novolak resin (phenol formaldehyde resin).

The contact printing stamp may be a contact printing stamp, characterized in that the transparent material.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

The present invention is to improve the method of aligning a rubber stamp on a substrate in contact printing, and adopts a method of adding a dummy relief feature to the rubber stamp used for contact printing as a means thereof.

1 is a schematic diagram showing the structure of a stamp 100 used in the present invention.

A plurality of relief features 102 are formed on the stamp 100 and ink or deposits are inked or deposited to form a pattern, and dummy relief features 101 are formed at both ends.

The dummy relief feature 101 is for aligning the stamp and the substrate with each other and protrudes longer than the other relief features 102.

The stamp may be an elastic material such as polydimethylsiloxane (PDMS), polyurethane, polyimides, crosslinked Novolac resin (phenol formaldehyde polymer), and the like. Use Among them, PDMS is most preferred.

2A to 2C are schematic views showing a contact printing method using the stamp of the present invention.

Figure 2a is a schematic diagram showing a process of alignment between the substrate and the stamp.

In FIG. 2A, a stamp 100 having a relief feature 102 and a dummy relief feature 101 is supported on a stamp support 103.

The stamp support is preferably a rigid material that can support the stamp so as not to bend.

First, the material to be raised on the substrate in a pattern is inked or deposited on the relief feature 101 of the stamp and then approaches the substrate 105. In close proximity, the alignment mark (not shown) on the substrate and the dummy relief feature 101 are matched with each other to ensure accurate alignment between the substrate 105 and the stamp 100.

When aligning the substrate and the stamp, the stamp and the stamp support are optically transparent so that the dummy relief feature and the alignment mark on the substrate can be easily matched.

2B is a schematic diagram illustrating a process in which an ink or deposit is transferred to a substrate to form a pattern.

Press the stamp support 103 so that the relief feature 102 in which the ink or deposit 104 is buried can touch the substrate 105 while the alignment is completed, so that the ink or deposit 104 is transferred to the substrate 105. It is transferred and a pattern is formed.

2C is a view showing a pattern formed on the substrate 105 through the above process.

As described above, the technical configuration of the present invention can be understood by those skilled in the art that the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention.

Therefore, the above-described embodiments are to be understood as illustrative and not restrictive in all respects, and the scope of the present invention is indicated by the appended claims rather than the detailed description, and the meaning and scope of the claims and All changes or modifications derived from the equivalent concept should be interpreted as being included in the scope of the present invention.

In the case of contact printing using stamps, not only can the alignment between the stamp and the substrate be correct, but it also reduces the defects that can be caused by trapped air pockets.

Claims (7)

In the contact printing method, Contact printing method using a dummy relief feature to match the alignment mark on the substrate and then press the stamp support to transfer the ink or deposit inking or deposited on the remaining relief feature to the substrate to form a pattern . The method of claim 1, And the dummy relief feature uses longer than the remaining relief features. The method of claim 1, The stamp is a contact printing method, characterized in that using a material of any one of polydimethylsiloxane (PDMS), polyurethane, polyimide, cross-linked novolac resin (phenol formaldehyde resin). The method of claim 1, And the stamp and the support are transparent. The stamp for contact printing, characterized in that it has a relief feature and a dummy relief feature longer than the relief feature. The method of claim 5, The contact printing stamp is a contact printing stamp, characterized in that the material of any one of polydimethylsiloxane, polyurethane, polyimide, cross-linked novolac resin (phenol formaldehyde resin). The method of claim 5, The contact printing stamp is a contact printing stamp, characterized in that the transparent material.

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