KR20060135458A - Zig for shower head gap measuring and shower head gap measuring method using thereof - Google Patents

Zig for shower head gap measuring and shower head gap measuring method using thereof

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Publication number
KR20060135458A
KR20060135458A KR1020050055425A KR20050055425A KR20060135458A KR 20060135458 A KR20060135458 A KR 20060135458A KR 1020050055425 A KR1020050055425 A KR 1020050055425A KR 20050055425 A KR20050055425 A KR 20050055425A KR 20060135458 A KR20060135458 A KR 20060135458A
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South Korea
Prior art keywords
shower head
jig
heating block
gap measuring
head gap
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KR1020050055425A
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Korean (ko)
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안경민
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삼성전자주식회사
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Priority to KR1020050055425A priority Critical patent/KR20060135458A/en
Publication of KR20060135458A publication Critical patent/KR20060135458A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

A shower head distance measuring jig and a shower head distance measuring method using the same are provided to reduce remarkably the maintenance time of equipment and to measure exactly the distance between a heating block and a shower head. A shower head distance measuring jig(130) is used for measuring the distance between a heating block(100) and a shower head(150) in a CVD apparatus. The shower head distance measuring jig is formed like a disc type structure. The shower head distance measuring jig is made of a metal or teflon.

Description

샤워해드 간격 측정용 지그 및 이를 이용한 샤워해드 간격 측정방법{ZIG FOR SHOWER HEAD GAP MEASURING AND SHOWER HEAD GAP MEASURING METHOD USING THEREOF }Jig for shower head spacing measuring method and shower head spacing measuring method using the same {ZIG FOR SHOWER HEAD GAP MEASURING AND SHOWER HEAD GAP MEASURING METHOD USING THEREOF}

도 1a는 알루미늄 호일이 히팅블럭 위에 놓여진 상태를 보여주는 사진, Figure 1a is a photograph showing a state in which the aluminum foil is placed on the heating block,

도1b는 상기 알루미늄 호일 위에 샤워해드가 놓여진 상태를 보여주는 사진, Figure 1b is a photograph showing a state in which the shower head is placed on the aluminum foil,

도2는 화학기상증착 장치의 횡단면도, 2 is a cross-sectional view of a chemical vapor deposition apparatus,

도3은 본 발명에 따른 샤워해드 간격 측정용 지그가 화학기상증착 장치의 히팅블럭 위에 장착된 것을 보여주는 사진,3 is a photograph showing that the shower head gap measuring jig according to the present invention is mounted on the heating block of the chemical vapor deposition apparatus,

도4는 도3의 히팅블럭 위에 샤워해드가 안착된 것을 보여주는 사진이다. 4 is a photograph showing that the shower head is seated on the heating block of FIG.

<도면의 주요부분에 대한 부호설명> <Code Description of Main Parts of Drawing>

100: 히팅블럭 130:샤워해드 간격 측정용 지그100: heating block 130: shower head gap measurement jig

150: 샤워해드150: shower head

본 발명은 반도체 제조 장치의 샤워해드 간격 측정용 지그에 관한 것으로, 보다 구체적으로는 화학기상증착(CVD:Chemical Vapor Deposition) 장치의 샤워헤드 간격(Shower Head Gap) 측정용 지그 및 이를 이용한 샤워해드 간격 측정방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for measuring shower head spacing in a semiconductor manufacturing apparatus. It relates to a measuring method.

일반적으로 화학기상증착 공정은 반응가스간의 화학반응으로 형성된 입자들을 웨이퍼 표면에 증착하여 절연막이나 전도성막을 형성시키는 공정이다. 현재에는 화학기상증착 장치의 히팅블럭과 샤워해드(showerhead:25) 사이의 간격을 측정하기 위하여, 알루미늄 호일을 사용하고 있다. In general, a chemical vapor deposition process is a process of depositing particles formed by a chemical reaction between reaction gases on the wafer surface to form an insulating film or a conductive film. Currently, aluminum foil is used to measure the distance between the heating block of the chemical vapor deposition apparatus and the showerhead 25 .

도 1a는 알루미늄 호일이 히팅블럭 위에 놓여진 상태를 보여주는 사진, 도1b는 상기 알루미늄 호일 위에 샤워해드가 놓여진 상태를 보여주는 사진이다. Figure 1a is a photograph showing a state in which the aluminum foil is placed on the heating block, Figure 1b is a photograph showing a state in which the shower head is placed on the aluminum foil.

도 1a 및 도1b에 도시된 바와 같이, 히팅블럭 위에 알루미늄 호일을 놓은 후에 알루미늄 호일의 두께를 측정함으로서, 히팅블럭과 샤워해드 사이의 간격을 측정하는 것이다. As shown in Figure 1a and Figure 1b, by placing the aluminum foil on the heating block by measuring the thickness of the aluminum foil, it is to measure the distance between the heating block and the shower head.

그러나 종래의 화학기상장치에서는 오염이자 또는 샤워해드의 변형 때문에 이를 교체할 경우에는, 기본 3회 이상 정도의 작업을 진행하므로 하루 이상의 시간이 소모되었다. However, in the conventional chemical vapor apparatus, when replacing it because of the contamination or the deformation of the shower head, the basic three or more times the work is carried out because more than one day was consumed.

또한, 상기 알루미늄 호일은 작업자에 의해 수동 얼라인됨기 때문에 측정하는 작업자에 따라 또는 호일의 놓인 위치에 따라, 데이타 값은 변할 수 있다는 문제가 있다. In addition, since the aluminum foil is manually aligned by the operator, there is a problem that the data value may change depending on the operator to measure or the position of the foil.

따라서, 상기 간격 체크를 위한 유지보수 시간 및 인력 공수가 크다는 문제가 있다. Therefore, there is a problem that the maintenance time and manpower maneuver for the interval check is large.

따라서, 본 발명은 이와 같은 문제점을 감안한 것으로써, 본 발명의 목적은 히팅블럭과 샤워해드 사이의 간격을 정확하게 측정하고 설비의 유지보수 시간을 단축할 수 있는 지그를 제공함에 있다. Accordingly, the present invention has been made in view of such a problem, and an object of the present invention is to provide a jig that can accurately measure the distance between the heating block and the shower head and shorten the maintenance time of the facility.

이하, 첨부된 도면을 참조하여 본 발명에 따른 샤워해드 간격 측정용 지그 및 이를 이용한 샤워해드 간격 측정 방법에 대해 상세하게 설명한다.Hereinafter, a shower head gap measuring jig and a shower head gap measuring method using the same will be described in detail with reference to the accompanying drawings.

상기 목적을 달성하기 위한 본 발명에 따른 샤워해드 간격 측정용 지그는, 원판 형태로서, 화학기상증착 장치의 히팅블럭과 샤워헤드 사이의 간격을 측정한다. Jig for shower head spacing measuring according to the present invention for achieving the above object, in the form of a disk, measures the distance between the heating block and the shower head of the chemical vapor deposition apparatus.

이때, 상기 샤워해드 간격 측정용 지그는 금속 또는 테프론 재질인 것이 바람직하다. At this time, the shower head spacing jig is preferably a metal or Teflon material.

도2는 화학기상증착 장치의 횡단면도, 도3은 본 발명에 따른 샤워해드 간격 측정용 지그가 화학기상증착 장치의 히팅블럭 위에 장착된 것을 보여주는 사진, 도4는 도3의 히팅블럭 위에 샤워해드가 안착된 것을 보여주는 사진이다. Figure 2 is a cross-sectional view of the chemical vapor deposition apparatus, Figure 3 is a photograph showing that the jig for shower head gap measurement according to the present invention is mounted on the heating block of the chemical vapor deposition apparatus, Figure 4 is a shower head on the heating block of Figure 3 This is a picture showing what was settled down.

화학기상증착 장치는 열 및 플라즈마 강화된 2가지 형태로 작동될 수 있는데, 상기 화학기상증착 장치의 히팅블럭은 받침대와 받침대(32)의 상부에 있는 저항 가열기(92)로 구성된다. The chemical vapor deposition apparatus can be operated in two forms, thermally and plasma enhanced. The heating block of the chemical vapor deposition apparatus consists of a pedestal and a resistance heater 92 on top of the pedestal 32.

열적 형태의 경우, 전원(90)은 받침대(32)를 가열하기 위해 받침대(32)의 상부에 있는 저항 가열기(92)에 전력을 공급하고, 이에 따라 화학기상증착 반응을 열 적으로 활성화시키기에 충분히 상기 받침대 위에 안착된 웨이퍼(36)를 상승된 온도로 가열한다. In the thermal form, the power supply 90 supplies power to the resistance heater 92 on top of the pedestal 32 to heat the pedestal 32, thereby thermally activating the chemical vapor deposition reaction. The wafer 36 sufficiently seated on the pedestal is heated to an elevated temperature.

플라즈마 강화된 반응 형태에서, RF 전력원(94)은 금속 샤우어 헤드(40)를 향한 스위치(96)에 의해 통과되고, 이에따라 전극으로서 작용한다. In the plasma enhanced reaction form, the RF power source 94 is passed by a switch 96 towards the metal shower head 40 and thus acts as an electrode.

샤워해드(40)는 전기적으로 비전도성인 세라믹으로 형성된, 환상 절연체 링(64)에 의해 리드 림(66) 및 세라믹 본체(72)로부터 전기 절연된다. 받침대(32)는 RF 전력이 샤워해드(40)와 받침대(32) 사이에서 분리되도록 RF 전원과 결합된 편의된(biaded) 부재(98)에 접속된다. 샤워해드(40)와 받침대(32) 사이의 처리 구역(56) 내에서 처리가스가 플라즈마를 배출 및 형성하도록 RF 전원(94)에 의해 충분한 전압 및 전력이 공급된다. The showerhead 40 is electrically insulated from the lead rim 66 and the ceramic body 72 by an annular insulator ring 64 formed of electrically nonconductive ceramic. The pedestal 32 is connected to a biased member 98 coupled with the RF power source such that RF power is separated between the showerhead 40 and the pedestal 32. Sufficient voltage and power are supplied by the RF power supply 94 to allow the processing gas to discharge and form plasma in the processing zone 56 between the showerhead 40 and the pedestal 32.

본 발명에 따른 샤워해드 간격 측정용 지그를 상기 구성의 화학기상증착 장치의 히팅블러과 샤워해드 사이의 간격을 측정하는 방법은 화학기상 장치의 히팅블럭 위에 샤워해드 간격 측정용 지그를 설치하는 단계; 상기 지그 위에 샤워해드를 안착하는 단계; 상기 샤워해드를 고정하는 단계; 및 상기 히팅블럭과 샤워해드 사이의 간격을 측정하는 단계로 구성된다. The method for measuring the spacing between the shower head spacing jig according to the present invention the heating block and the shower head of the chemical vapor deposition apparatus of the configuration comprises the steps of installing a shower head spacing jig on the heating block of the chemical vapor apparatus; Mounting a shower head on the jig; Fixing the shower head; And measuring an interval between the heating block and the shower head.

우선 도3과 같이, 화학기상증착 장치의 히팅블럭 위에 샤워해드 간격 측정용 지그를 장착한다. 이때, 사용되는 샤워해드 간격 측정용 지그의 수에는 특별한 제한이 없으나, 상기 간격을 정확하게 측정하기 위하여 6개 정도를 사용하는 것이 바람직하다. First, as shown in FIG. 3, a shower head spacing jig is mounted on the heating block of the chemical vapor deposition apparatus. At this time, the number of jig for measuring shower head spacing is not particularly limited, but it is preferable to use about 6 to accurately measure the spacing.

다음으로, 도4에 도시된 바와 같이, 샤워해드를 상기 지그 위에 안착시킨다. Next, as shown in Figure 4, the shower head is seated on the jig.

상기와 같이 지그 위에 샤워해드가 안착되면, 탑플레이트(미도시)에 샤워헤드를 고정하는 세라믹 지지대(미도시)를 높이에 맞게 조절하고, 상기 샤워해드를 고정한 후에 설비에 연결된 샤워해드를 셋팅한 후에, 상기 히팅블럭과 샤워해드 사이의 간격을 측정한다. When the shower head is seated on the jig as described above, the ceramic support (not shown) for fixing the shower head to the top plate (not shown) is adjusted to a height, and the shower head connected to the equipment is set after fixing the shower head. After that, the distance between the heating block and the shower head is measured.

본 발명에 따른 상기 샤워해드 간격 측정용 지그를 사용하는 상기 샤워해드 간격 측정방법은 종래의 모든 화학기상증착 장치에서 사용할 수 있다. The shower head spacing measuring method using the shower head spacing jig according to the present invention can be used in all conventional chemical vapor deposition apparatus.

본 발명은 상기 실시예에 한정되지 않으며 당분야에서의 통상의 지식을 가진자에 의하여 본 발명의 기술적 사상내에서 많은 변형에 의한 실시가능함은 명백하다. It is apparent that the present invention is not limited to the above embodiments and can be implemented by many modifications within the technical idea of the present invention by those skilled in the art.

이와 같이 본 발명에 의한 샤워해드 간격 측정용 지그에 따르면, 히팅블러과 샤워해드사이의 간격을 정확하게 측정할 수 있다. 또한, 샤워헤드 교체 후 간격 체크로 소모되는 유지보수 시간을 단축함으로서 설비의 가동 능력을 증대시킬 수 있다. Thus, according to the jig for shower head spacing according to the present invention, it is possible to accurately measure the distance between the heating blur and the shower head. In addition, it is possible to increase the operating capacity of the equipment by reducing the maintenance time consumed by the interval check after replacing the showerhead.

Claims (3)

화학기상증착 장치의 히팅블럭과 샤워헤드 사이의 간격을 측정하는 원판 형태의 샤워해드 간격 측정용 지그. A disc-shaped showerhead gap measuring jig that measures the distance between the heating block and the shower head of the chemical vapor deposition apparatus. 제1항에 있어서, The method of claim 1, 상기 샤워해드 간격 측정용 지그는 금속 또는 테프론 재질인 것을 특징으로 하는 샤워해드 간격 측정용 지그. The shower head spacing jig is a shower head spacing jig characterized in that the metal or Teflon material. 화학기상 장치의 히팅블럭 위에 샤워해드 간격 측정용 지그를 설치하는 단계;Installing a shower head spacing jig on a heating block of the chemical vapor apparatus; 상기 지그 위에 샤워해드를 안착하는 단계;Mounting a shower head on the jig; 상기 샤워해드를 고정하는 단계; 및 Fixing the shower head; And 상기 히팅블럭과 샤워해드 사이의 간격을 측정하는 단계를 포함하는 것을 특징으로 하는 샤워해드 간격 측정방법. And measuring a gap between the heating block and the shower head.
KR1020050055425A 2005-06-25 2005-06-25 Zig for shower head gap measuring and shower head gap measuring method using thereof KR20060135458A (en)

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