KR20060110900A - A arc chamber of ion implant apparatus - Google Patents

A arc chamber of ion implant apparatus Download PDF

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Publication number
KR20060110900A
KR20060110900A KR1020050032663A KR20050032663A KR20060110900A KR 20060110900 A KR20060110900 A KR 20060110900A KR 1020050032663 A KR1020050032663 A KR 1020050032663A KR 20050032663 A KR20050032663 A KR 20050032663A KR 20060110900 A KR20060110900 A KR 20060110900A
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South Korea
Prior art keywords
arc chamber
cathode
wall
ion implantation
lattice
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KR1020050032663A
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Korean (ko)
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KR100699112B1 (en
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신문우
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동부일렉트로닉스 주식회사
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Priority to KR1020050032663A priority Critical patent/KR100699112B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32495—Means for protecting the vessel against plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/03—Mounting, supporting, spacing or insulating electrodes
    • H01J2237/038—Insulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Abstract

An arc chamber of an ion implantation apparatus is provided to fix a gas layer and prevent an electrical insulating breakdown due to flakes of the gas layer by installing a grating net on a wall of an arc chamber. An arc chamber of an ion implantation apparatus includes a cathode(1), an insulator(2), a reflector and a grating net. The cathode is used for emitting thermoelectron. The insulator is used for insulating the cathode and a main body(4) of the arc chamber from each other. The reflector is used for reflecting the thermoelectron. The grating net is closely attached to a gas layer(5). The gas layer is deposited on an inner wall of the main body of the arc chamber.

Description

이온주입 장비의 아크챔버{A arc chamber of ion implant apparatus}A arc chamber of ion implant apparatus

도 1은 개스막 박편이 생성된 종래 아크챔버의 단면도1 is a cross-sectional view of a conventional arc chamber in which gas film flakes are generated.

도 2는 본 발명에 따른 격자넷을 설치한 아크챔버의 단면도Figure 2 is a cross-sectional view of the arc chamber with a grid net according to the present invention

도 3은 도 2에 도시된 격자넷의 분리 사시도3 is an exploded perspective view of the lattice net shown in FIG.

<도면 주요부분에 대한 부호의 설명><Description of Symbols for Main Parts of Drawing>

1: 캐소드 2: 절연체1: cathode 2: insulator

3: 공극 4: 아크챔버 본체3: void 4: arc chamber body

5: 개스막 6: 박편5: Gasm 6: flakes

본 발명은 이온주입 장비의 아크챔버 벽에 증착되는 개스막이 벗겨져서 생긴 박편에 의하여 발생하는 케소드와 아크챔버사이의 절연파괴를 방지하기위하여 챔버벽에 격자넷을 설치한 이온주입 장비의 아크챔버에 관한 것이다. The present invention is directed to the arc chamber of the ion implantation equipment in which the lattice net is installed on the chamber wall to prevent breakdown between the cathode and the arc chamber caused by the flaking formed by peeling off the gas film deposited on the arc chamber wall of the ion implantation equipment. It is about.

이온주입설비는 소정의 대상물에 불순물을 주입하는 설비로서 불순물의 특 성, 대상물의 표면으로부터의 깊이, 주입되는 이온의 양이 각각 고려되고, 그에 따른 에너지가 공급되어서 충분히 가속된 후 주입이 이루어진다. 이를 위해서는 이온 빔을 제공하기 위한 가스가 공급되고, 소스 헤드의 아크챔버에서 가스상태의 소스를 이온으로 전환 시킨다.The ion implantation facility is a facility for injecting impurities into a predetermined object, taking into account the characteristics of the impurities, the depth from the surface of the object, and the amount of implanted ions, respectively, and the implantation is performed after the energy is sufficiently accelerated. To this end, a gas for supplying an ion beam is supplied, and the gaseous source is converted into ions in the arc chamber of the source head.

한편, 캐소드와 아크챔버는 절연체, 아크챔버와 캐소드 사이의 미세한 공극에 의하여 전기적으로 절연되어 있으나 이온 주입 공정에서 아크챕버 내부변에는 개스막이 형성되며 이러한 개스막이 벗겨져 박편을 형성할 경우, 박편에 의해 아크챔버와 캐소드 사이의 전기적인 절연이 파괴되고 안정적인 아크생성이 어려워 더 이상 장비를 사용하지 못하는 문제점이 발생한다. On the other hand, the cathode and the arc chamber are electrically insulated by the minute gap between the insulator, the arc chamber and the cathode, but in the ion implantation process, a gas film is formed on the inner side of the arc chapter. The electrical insulation between the arc chamber and the cathode is destroyed, and stable arc generation is difficult, resulting in the problem that the equipment can no longer be used.

도 1은 개스막 박편이 생성된 종래 아크챔버의 단면도로서, 아크챔버는 열전자를 방출하는 캐소드(1)와 아크챔버본체(4), 리플렉터(7) 그리고 이들을 절연하는 절연체(2)로 크게 구성된다. 아크챔버 내부에는 이온주입 공정에서 내벽에 개스막(5)이 증착된다. FIG. 1 is a cross-sectional view of a conventional arc chamber in which gas film flakes are formed. The arc chamber is largely composed of a cathode 1 emitting hot electrons, an arc chamber body 4, a reflector 7, and an insulator 2 insulating them. do. Inside the arc chamber, the gas film 5 is deposited on the inner wall in the ion implantation process.

아크챔버 본체(4)와 캐소드(1)는 각각 전원에 연결되어 있으며, 두 부분은 절연체(2)와 공극(3)에 의하여 절연 상태가 유지되고 있다. The arc chamber main body 4 and the cathode 1 are respectively connected to a power source, and the two parts are insulated by the insulator 2 and the space 3.

아크챔버의 작동방법을 간단히 설명하면 캐소드(1)에서 방출되는 열전자가 도 1에서 도시하지는 않았지만 가스공급관에서 공급되는 가스와 반응하여 이온이 발생하고, 상기 이온은 추출기에 의해 이온빔의 형태로 추출되어 최종적으로 웨이퍼에 주입되도록 이루어진다.Briefly describing the operation method of the arc chamber, although the hot electrons emitted from the cathode 1 react with the gas supplied from the gas supply pipe although not shown in FIG. 1, ions are generated, and the ions are extracted in the form of an ion beam by an extractor. Finally it is made to be injected into the wafer.

아크챔버가 원활하게 작동하여 안정적인 아크생성을 위해서는 캐소드(1)와 아크챔버 본체(4)의 절연이 중요하다. 그러나 아크챔버 내벽에 증착되는 개스막(5)이 벗겨져 박편(6)이 생성될 경우 캐소드(1)와 아크챔버 본체(4)의 공극(3)의 사이에 전도체의 역할을 하여 절연을 파괴할 경우가 발생한다. 이로 인해, 안정적인 아크의 생성이 어려워 더 이상 장비를 사용하지 못하는 경우가 발생한다.Insulation of the cathode 1 and the arc chamber body 4 is important for smooth operation of the arc chamber and stable arc generation. However, if the gas film 5 deposited on the inner wall of the arc chamber is peeled off to produce a flake 6, it may act as a conductor between the cathode 1 and the cavity 3 of the arc chamber body 4 to destroy the insulation. The case occurs. As a result, it is difficult to generate a stable arc, so that the equipment can no longer be used.

본 발명은 이러한 종래의 문제점을 개선하고자 안출한 것으로, 아크챔버 내부벽에 촘촘한 격자로 구성된 격자넷을 장착함으로써 개스막 박편이 격자에 의해 고착하게 하여 아크챔버와 캐소드간의 전기적인 절연이 파괴되는 것을 방지하는 이온주입 장비의 아크챔버를 제공하고자 함에 발명의 목적이 있다.The present invention has been made to improve such a conventional problem, and by mounting a lattice net consisting of a dense lattice on the inner wall of the arc chamber, the gas film flakes are fixed by the lattice to prevent the electrical insulation between the arc chamber and the cathode is destroyed. An object of the present invention is to provide an arc chamber of ion implantation equipment.

상기 목적을 달성하기 위한 본 발명은 이온주입 장비의 아크챔버에 있어서,열전자를 방출하는 캐소드, 상기 캐소드와 아크챔버 본체를 절연시키는 절연체, 상기 열전자를 반사하는 리플렉터, 상기 아크챔버 본체의 내벽에 증착된 개스막과 밀착되게 설치된 격자넷을 포함하는 것을 특징으로 한다.In the arc chamber of the ion implantation equipment, the present invention for achieving the above object, a cathode for emitting hot electrons, an insulator for insulating the cathode and the arc chamber body, a reflector for reflecting the hot electrons, deposited on the inner wall of the arc chamber body And a lattice net installed in close contact with the made gas film.

이하 첨부한 도면을 참조로 본 발명의 바람직한 일실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명에 따른 격자넷을 설치한 아크챔버의 단면도로서, 격자넷(9) 은 개스막(5)이 있는 아크챔버 내부벽에 설치한다. 격자넷(9)의 격자의 크기는 개스막(6)의 박편이 격자에 의하여 고착될 수 있도록 작게 만든다. 2 is a cross-sectional view of an arc chamber provided with a lattice net according to the present invention, in which the lattice net 9 is provided on the inner wall of the arc chamber where the gas film 5 is located. The size of the lattice of the lattice net 9 is made small so that the flakes of the gas film 6 can be fixed by the lattice.

또한, 격자넷(9)은 벽면에 밀착 고정되도록 하여야 한다. 이는 처음부터 개스막(6)이 벗겨져 박편이 형성되지 않게 하는 장점이 있다. 격자넷(9)의 재질은 절연체인 것이 바람직하다. 이는 격자넷(9) 배치가 잘못되어 생긴 박편(6)이 절연을 파괴하는 것을 방지하기 위함이다. In addition, the grid net 9 should be fixed to the wall closely. This has the advantage that the gas film 6 is peeled off from the beginning so that the flakes are not formed. It is preferable that the material of the lattice net 9 is an insulator. This is to prevent the laminations 6 caused by the misalignment of the lattice nets 9 from breaking the insulation.

격자넷(9)이 벽면에 밀착고정되기 위해서는 합성수지 접착제를 이용한다.In order to fix the grid net 9 on the wall, a synthetic resin adhesive is used.

캐소드(1)와 아크챔버 본체(4)의 공극(3)부분을 완전히 덮을 수 있도록 공극사이에도 격자넷(9)을 도포하는 것이 바람직하다. 특히 이 부분의 박편(6)에 의하여 절연이 파괴되는 경우가 많으므로 충분히 개스막(5)을 감싸도록 한다.It is preferable to apply the lattice net 9 between the pores so as to completely cover the pores 3 of the cathode 1 and the arc chamber body 4. In particular, since the insulation is often broken by the flakes 6 in this portion, the gas film 5 is sufficiently wrapped.

도 2에서 도시하는 바와 같이 아크챔버 본체(4)의 내부 좌·우, 상·하 및 앞·뒤 벽면에 격자넷(9)이 밀착고정되어 있는 상태를 보여주고 있다.As shown in FIG. 2, the grid net 9 is shown in close contact with the inner left, right, top, bottom, and front and rear walls of the arc chamber main body 4.

도 3은 본 발명에 따른 아크챔버에 사용된 격자넷의 단면도로서, 격자넷(9)은 촘촘한 격자로 이루어져 있다. 격자의 모양은 크게 중요한 것이 아니나, 정사각형 모양이 바람직할 것이다.3 is a cross-sectional view of the lattice net used in the arc chamber according to the invention, wherein the lattice net 9 consists of a dense lattice. The shape of the grid is not of great importance, but a square shape would be desirable.

상기한 바와 같이, 본 발명은 아크챔버 벽에 촘촘한 격자로 구성된 격자넷을 장착함으로써, 격자에 의해 개스막이 고착되도록 하여 아크챔버 벽에서 개스막이 벗겨져 아크챔버 벽과 캐소드 사이에 전도체 역할을 하는 것을 막아주게 되고, 결과적으로 개스막의 박편에 의한 전기적인 절연 파괴를 막을 수 있는 장점이 있다.As described above, the present invention mounts a lattice net composed of a dense lattice on the arc chamber wall, thereby allowing the gas film to be fixed by the lattice, thereby preventing the gas film from being peeled off the arc chamber wall, thereby acting as a conductor between the arc chamber wall and the cathode. As a result, there is an advantage that can prevent electrical breakdown by the thin film of the gas film.

Claims (1)

이온주입 장비의 아크챔버에 있어서,In the arc chamber of the ion implantation equipment, 열전자를 방출하는 캐소드, Cathodes emitting hot electrons, 상기 캐소드와 아크챔버 본체를 절연시키는 절연체, An insulator that insulates the cathode and the arc chamber body, 상기 열전자를 반사하는 리플렉터, A reflector reflecting the hot electrons, 상기 아크챔버 본체의 내벽에 증착된 개스막과 밀착되게 설치된 격자넷을 포함하는 이온주입 장비의 아크챔버.Arc chamber of the ion implantation equipment comprising a lattice net in close contact with the gas film deposited on the inner wall of the arc chamber body.
KR1020050032663A 2005-04-20 2005-04-20 A arc chamber of ion implant apparatus KR100699112B1 (en)

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KR100699112B1 KR100699112B1 (en) 2007-03-22

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Publication number Priority date Publication date Assignee Title
JP3268180B2 (en) * 1994-11-18 2002-03-25 株式会社東芝 Ion generator, ion irradiation device, and method of manufacturing semiconductor device
JPH09147772A (en) * 1995-11-22 1997-06-06 Hitachi Ltd Ion generator and semiconductor manufacturing device using the same
JPH10289663A (en) 1997-04-16 1998-10-27 Sony Corp Ion generation device
JP3655491B2 (en) 1999-04-28 2005-06-02 株式会社東芝 Ion generation method and ion irradiation method

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