KR20060087436A - A fluid transfer pump - Google Patents

Abstract

A cylinder 2 having a suction port 32 and a discharge port 33, a plunger 5 in which the inside of the cylinder 2 is reciprocally driven in a direction along its axis J1, and the cylinder 2 And a membrane-shaped sealing member 6 for sealing the gap G of the plunger 5, and conveying sucked from the suction port 32 by reciprocatingly driving the plunger 5 to alternately perform suction and discharge operations. In the liquid transfer pump 1 for discharging the object liquid from the discharge port 33, the suction port 32 is provided on the side of the cylinder 2 to provide a liquid transfer pump having excellent liquid displacement characteristics with a very low retention rate of the liquid. To provide.

Description

Liquid transfer pump {A FLUID TRANSFER PUMP}

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial front sectional view showing a pump for transferring liquid according to the present invention.

2 is a perspective view showing an appearance of a membrane-shaped sealing member.

3 is a schematic view showing a pump for transferring liquid according to the present invention.

4 is a partial cross-sectional view of a plane showing another type of liquid transfer pump according to the present invention.

5 is a partial cross-sectional view showing yet another form of liquid transfer pump according to the present invention.

6 is a schematic view showing another form of liquid transfer pump according to the present invention.

7 is a partial front sectional view showing a conventional liquid transfer pump.

<Explanation of symbols for the main parts of the drawings>

1: Pump for transferring liquid 2: Cylinder

5: plunger 32: suction port

33: discharge port

The present invention includes a cylinder having a suction port and a discharge port, a plunger provided with a reciprocating drive of the inside of the cylinder in a direction along the axis thereof, and a membrane sealing member for sealing a gap between the cylinder and the plunger, and reciprocating the plunger. It relates to a liquid transfer pump for discharging a transfer target liquid sucked from a suction port by driving to alternately perform a suction operation and a discharge operation. In particular, it is related with the pump suitable for conveyance of the liquid containing a precipitation substance, for example, the resist liquid used for manufacture of a liquid crystal substrate, and the like.

Conventionally, a means for supplying a resist liquid used for manufacturing a liquid crystal substrate to a liquid crystal substrate manufacturing apparatus, comprising: a cylinder having a suction port and a discharge port, a plunger provided with a reciprocating drive in the direction along the axis thereof, and a cylinder The pump for liquid transfer provided with the sealing member which seals the clearance gap between a and plunger was used. In the liquid transfer pump, an O-ring was used for the sealing member. However, according to the O-ring, since the problems such as dust and liquid leakage resulting from abrasion, or shortening of the service life were great, the inventors of the present invention replaced Fujikura Rubber Industry Co., Ltd. product catalog CAT. No. The liquid transfer pump using the membrane-shaped sealing member described in BFS1-061 (hereinafter referred to as Non-Patent Document 1) was produced.

7 is a partial front sectional view of a conventional liquid transfer pump 10 using the membrane-shaped sealing member described in Non-Patent Document 1. As shown in FIG. FIG. 7A shows a state where the plunger 5 is at the bottom dead center, and FIG. 7B shows a state where the plunger 5 is at the top dead center.

As shown in FIG. 7, the conventional liquid transfer pump 10 includes a cylinder 20, a plunger 5, and a membrane-shaped sealing member 6. At the top of the cylinder 20, the suction port 320 and the discharge port 330 are drilled so as to be parallel to the axis J1, respectively. The liquid transfer pump 10 is used in a standing state, and discharges the resist liquid sucked from the suction port 320 from the discharge port 330 by alternately performing the suction operation and the discharge operation by reciprocating the plunger 5.

The membrane-shaped sealing member 6 is composed of a cap-shaped body made of a flexible material (see Fig. 2), and the body portion of the cap-shaped body in a state where the opening end 62 of the cap-shaped body is fixed on the inner circumferential surface of the cylinder 20. The upper portion of the plunger 5 is covered by 63. Then, by folding the cylinder 20 and the plunger 5 downward, the U-shaped retracting portion 61, which is U-shaped in cross section, is formed, and the U-shaped retracting portion 61 is used. The gap G is sealed. The U-shaped retracting portion 61 moves the gap G in the same direction as the driving direction with the reciprocating drive of the plunger 5. At this time, since the U-shaped retracting portion 61 moves to roll the gap G, there is little wear loss and no leakage of liquid or gas.

However, since the U-shaped retracted portion 61 of the membrane-shaped sealing member 6 is very narrow, the resist liquid easily stays therein. The remaining resist liquid gels or precipitates immediately, which is one of the factors causing the resist liquid supplied to the liquid crystal substrate manufacturing apparatus to contain impurities. The liquid crystal substrate manufacturing apparatus is always required to supply a resist liquid with high purity, and a liquid transfer pump having good liquid substitution characteristics, that is, a liquid transfer pump with a very low retention of liquid is required.

This invention is made | formed in order to solve such a problem, Comprising: It makes it a subject to provide the liquid conveyance pump excellent in the liquid substitution characteristic with a very small retention rate of a liquid.

In order to solve the above-mentioned problems, the invention of aspect 1 reciprocates the cylinder 2 provided with the inlet 32 and the discharge port 33, and the inside of the cylinder 2 in the direction along the axis line J1. The plunger 5 provided so that it is possible, and the film-like sealing member 6 which seals the clearance gap G of the said cylinder 2 and the said plunger 5 are provided, and the said plunger 5 is reciprocally driven and suctioned. In the liquid transfer pump 1 which discharges the liquid to be transferred from the suction port 32 from the discharge port 33 by performing an operation and a discharge operation alternately, the suction port 32 is the cylinder 2. It is installed on the side of the.

In the invention of aspect 2, the suction port 32 is provided in a range R in which the gap G is formed when the plunger 5 reaches the top dead center position.

In the invention of aspect 3, the suction port 32 is provided by tilting the axis J0 of the suction port 32 at a predetermined angle θ of 90 degrees or less with respect to the axis J1 of the cylinder 2. .

In the invention of aspect 4, the suction port 32 has a constant angle (less than 90 degrees) with respect to the straight line J2 orthogonal to the axis J0 of the suction port 32 and the axis J1 of the cylinder 2. φ) is inclined.

In the invention of aspect 5, the membrane-shaped sealing member 6 is constituted of a cap-shaped member made of a flexible material, and is formed in the state in which the opening end 62 of the cap-shaped member is fixed on the inner peripheral surface of the cylinder 2. A U-shaped retracting portion 61 which covers the upper portion of the plunger 5 by the body portion 63 of the cap-shaped body and is folded back in the gap G between the cylinder 2 and the plunger 5. The gap G is sealed by

The invention of aspect 6 is used by providing the axis J1 of the cylinder 2 in parallel with the vertical axis.

According to the present invention, the resist liquid is ejected from the suction port 32 when the plunger 5 is driven downward. Since the suction port 32 is provided on the side surface of the cylinder 2, this jet flow flows down forming the swirl flow along the inner wall of the cylinder 2. As shown in FIG. Then, a circulation flow such as stirring and washing the inside of the U-shaped retracting portion 61 is obtained. Thereby, the retention of the resist liquid in the U-shaped retracting portion 61 is eliminated, and the liquid replacement characteristic is improved. In this manner, a liquid transfer pump excellent in liquid displacement characteristics with a very low retention of liquid is provided.

EMBODIMENT OF THE INVENTION Hereinafter, the best form for implementing this invention is demonstrated with reference to an accompanying drawing. 1 is a partial front cross-sectional view showing a pump 1 for transferring liquid according to the present invention, FIG. 1A shows a state where the plunger 5 is at the bottom dead center, and FIG. 1B shows the plunger 5 at the top dead center. It shows the state that there is. FIG. 2 is a perspective view showing the appearance of the membrane-shaped sealing member 6, and FIG. 3 is a partial sectional plan view showing a pump for transferring liquid according to the present invention.

In addition, although the case where a liquid is a resist liquid is demonstrated below as an example, it cannot be overemphasized that liquids other than a resist liquid can be employ | adopted.

As shown in FIG. 1, the liquid transfer pump 1 according to the present invention includes a cylinder 2, a plunger 5, and a membrane-shaped sealing member 6.

The cylinder 2 consists of an approximately bowl-shaped upper cover body 3 having an ear portion 31 and a substantially bowl-shaped lower cover body 4 having an ear portion 41 in the same manner. The upper cover body 3 and the lower cover body 4 are formed in such a state that the opening end 62 of the membrane sealing member 6 is sandwiched between each of the ear portion 31 and the ear portion 41. 41) The bolts 42 are fastened to each other to form a cylinder body.

The inlet 32 and the outlet 33 are perforated in the upper cover body 3. The suction port 32 is perforated on the side of the upper cover body 3. Further, the suction port 32 is drilled in the range R in which the gap G is formed when the plunger 5 reaches the top dead center position. In addition, the suction port 32 is provided by inclining the axis line J0 with respect to the axis line J1 of the cylinder 2 at a predetermined angle θ. Angle (theta) is 90 degrees or less. The minimum value of the angle θ is an angle at least partially applied to the flange portion of the membrane-shaped sealing member 6 sealed by the elliptical arc of the suction port 32 (see FIGS. 3A and B). At the same time, as shown in FIG. 3C, the suction port 32 is provided with the axis J0 inclined at a predetermined angle φ with respect to the straight line J2 perpendicular to the axis J1 of the cylinder 2. The most preferable range of the angle φ is a range in which a hole centering on the axis J0 has a tangential relationship with the inner circumference of the cylinder 2 (a straight line belonging to the hole and parallel to the axis J0 The range tangent to the inner circumference of the cylinder 2) (see FIG. 3D). The discharge port 33 is provided in the direction parallel to the axis line J1 at the top of the upper cover body 3. On the other hand, it is also possible to provide a direction switching valve or the like (not shown) so that the inlet 32 serves as the outlet.

The lower cover body 4 is provided with a vacuum draining mechanism 43 and a rod hole 44. The vacuum releasing mechanism 43 is connected to the vacuum pump 73 at the lower position of the lower cover body 4. By vacuum-pressure-reducing the inside of the cylinder 2 of the cylinder 2 via the vacuum pump 73, the adhesiveness of the outer peripheral surface of the head 51 and the inner peripheral surface of the cylinder 2, and the membrane-shaped sealing member 6 is improved, and a loss is carried out. Incorporation of gas into the gas can be prevented more effectively. The rod hole 44 is a through hole provided so that the rod 53 slidably penetrates, and is punctured in the bottom of the lower cover body 4.

The plunger 5 has a head 51, a seat plate 52 and a rod 53. The head 51 covered by the membrane sealing member 6 is connected to the rod 53 by bolts 54 via the seat plate 52. The rod 53 penetrating the rod hole 44 connects the other end to the drive device which is not shown in figure. As a result, the plunger 5 is capable of reciprocating the inside of the cylinder 2.

The membrane-shaped sealing member 6 is composed of a cap-like body made of a flexible material. As the flexible material, for example, rubber coated on a strong polyester cloth is used, and the membrane-shaped sealing member 6 seals the gap G as follows. That is, the upper part of the plunger 5 is coat | covered with the trunk | drum 63 of the said cap shape body in the state which the opening edge part 62 was fixed on the inner peripheral surface of the cylinder 2. As shown in FIG. Then, by folding the cylinder 2 and the plunger 5 downward, the U-shaped retracting portion 61, which is U-shaped in cross section, is formed, and the U-shaped retracting portion 61 is used. Seal the gap G.

The liquid transfer pump 1 having such a configuration is used in the standing state, and the resist liquid is injected into the cylinder 2 from the inlet 32 by alternately performing the suction operation and the discharge operation by reciprocating the plunger 5. Is sucked and the sucked resist liquid is discharged from the discharge port 33.

When the plunger 5 is driven downward, the resist liquid supplied through the check valve 71 is ejected from the suction port 32. This jet flows down while forming a swirl flow along the inner wall of the cylinder 2. And it becomes a circulation flow which wash | cleans by stirring inside the U-shaped retracting part 61. As shown in FIG. Thereby, the retention of the resist liquid in the U-shaped retracting portion 61 is eliminated, and the liquid replacement characteristic is improved.

The resist liquid introduced into the cylinder 2 is pressurized by being driven upward by the plunger 5 to be discharged from the discharge port 33, and supplied to the liquid crystal substrate manufacturing apparatus (not shown) through the check valve 72.

The U-shaped retracting portion 61 moves the gap G in the same direction as the driving direction with the reciprocating drive of the plunger 5. At this time, since the U-shaped retracting portion 61 moves to roll the gap G, there is little wear loss and no leakage of liquid or gas.

Next, another type of liquid transfer pump 1A according to the present invention will be described. 4 is a partial cross-sectional view of a plane showing another type of liquid transfer pump 1A according to the present invention.

As shown in FIG. 4, the liquid delivery pump 1A includes an upper cover body 3A instead of the upper cover body 3 in the liquid delivery pump 1. In configurations other than the upper cover body 3A, since it is the same as that of the liquid conveying pump 1, those description is abbreviate | omitted.

The upper cover body 3A is provided with one suction port 32A having the same shape as the suction port 32 of the liquid transfer pump 1 at a position symmetrical with respect to the center thereof. With this configuration, since the resist liquid ejected from the suction ports 32 and 32A during the suction operation is rotated in the same direction as shown by the arrow W2 in FIG. 4, the swirl flow is compared with the case where there is only one suction port. The speed can be increased to further increase the effect of the tactics.

Moreover, the liquid transfer pump 1B of another form which concerns on this invention is demonstrated. FIG. 5 is a partial cross-sectional view showing yet another form of liquid transfer pump 1B according to the present invention. FIG. 5A shows a partial front cross sectional view, and FIG. 5B shows a partial partial top cross sectional view.

As shown in FIG. 5, the liquid transfer pump 1B includes an upper cover 3B instead of the upper cover 3 in the liquid transfer pump 1. Structures other than the upper cover body 3B are the same as those of the liquid transfer pump 1, and their description is omitted.

The upper cover body 3B is provided with the suction port 32B in the side surface. The axis J0 becomes 90 degrees with respect to the axis J1 of the cylinder. Moreover, it becomes 0 degree with respect to the straight line J2 orthogonal to the axis line J1 of a cylinder. With this configuration, the resist liquid ejected from the suction port 32B during the suction operation is separated on both sides as shown by arrow W3 in Fig. 5B, and flows down while forming a swirl flow along the inner wall of the cylinder. Then, the swirl flows separated on both sides collide with each other on the opposite side to the suction port 32B and merge upwards (see FIGS. 5C and 5D). As a result, since the inside of the U-shaped retracting part 61 is stirred similarly to the case of the liquid conveying pump 1, liquid substitution characteristic improves.

Specifically, the liquid replacement test was performed in the state in which the plunger 5 is in top dead center.

In the state where the resist liquid was filled in the cylinder, the liquid was supplied by applying a pressure of 0.05 Mpa from the inlet port 320 of FIG. 7B and discharged from the outlet port 330. Even if the rinse liquid continued to flow, the resist liquid accumulated in the U-shaped retracted portion could not be completely replaced.

In the embodiment of Fig. 5, the same liquid substitution test was carried out, followed by 2 minutes of continuous application of 4 liters of liquid replacement cleaning liquid, thereby completely replacing the resist liquid accumulated in the U-shaped retracted portion.

By discharging (washing) the retentate, saving the replacement solution and shortening the required time, the liquid replacement property can be improved, and the productivity of the liquid crystal substrate can be improved. In other words, the retention substance becomes a defect when it enters the liquid crystal substrate, and the substitution solution (cleaning solution) is less, which contributes to cost reduction, and also improves the environment, and shortens the time required for maintenance such as regular cleaning. By shortening the stop time of the liquid crystal substrate manufacturing apparatus by this, productivity can be improved.

In each said embodiment, although the cylinder 2 is arrange | positioned so that the axis line J1 may become vertical, it is possible to arrange | position the cylinder 2 so that the axis line J1 may become horizontal.

FIG. 6: is schematic which shows embodiment which arrange | positioned the cylinder 2 so that axis J1 may become horizontal.

As shown in Figs. 6A and 6B, it is necessary to arrange the discharge port at the top. In addition, the suction port may be provided such that the axis line J0 is parallel to the axis line J3 of the discharge port, as shown in FIG. 6A, but as shown in FIG. 6B, the axis line J0 is connected to the cylinder 2. Perforation may be provided by inclining a predetermined angle (θ) with respect to the axis line J1. In addition, as shown in Fig. 6C, the suction port is pivoted in one direction by inclining the axis line J0 with a straight line J2 perpendicular to the axis line J1 of the cylinder 2 to be drilled. It is possible to do the same. In this case, it is preferable to make the angle range (alpha) which swirl flow is formed larger than 180 degree | times. However, it is also possible to set the inclination angle phi to 0 degrees, and in this case, it is preferable to provide a suction port on the opposite side of the discharge port.

According to the said structure, the liquid conveyance pump excellent in the liquid substitution characteristic which has very little liquid retention rate can be provided.

As mentioned above, although embodiment of this invention was described, embodiment mentioned above is an illustration to the last and the scope of the present invention is not limited to these embodiment. The scope of the present invention is indicated by the description of the scope of claims, and is intended to include the meanings equivalent to the scope of claims and all modifications within the scope.

Claims (6)

And a plunger having a suction port and a discharge port, a plunger provided to reciprocally drive the inside of the cylinder in a direction along the axis thereof, and a membrane sealing member for sealing a gap between the cylinder and the plunger. A liquid transfer pump for discharging a transfer object liquid sucked from the suction port by reciprocating to alternately perform suction and discharge operations from the discharge port, wherein the suction port is provided on the side of the cylinder. Transfer pump. The liquid transfer pump according to claim 1, wherein the suction port is provided within a range in which the gap is formed when the plunger reaches a top dead center position. The liquid transfer pump according to claim 1 or 2, wherein the suction port is provided by tilting an axis of the suction port at an angle of 90 degrees or less with respect to the axis of the cylinder. The liquid transfer pump according to any one of claims 1 to 3, wherein the suction port is inclined at a predetermined angle of less than 90 degrees with respect to a straight line orthogonal to the axis line of the cylinder. 5. The cap-shaped member according to any one of claims 1 to 4, wherein the membrane-shaped sealing member is composed of a cap-shaped member made of a flexible material, and the open end of the cap-shaped member is fixed on the inner circumferential surface of the cylinder. And a U-shaped retracting portion formed by covering the plunger by the body portion of the body and being folded downward from the gap between the cylinder and the plunger. The liquid transfer pump according to any one of claims 1 to 5, wherein the cylinder axis line is installed so as to be parallel to the vertical axis.

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