KR20060085507A - Levelling sensing unit for susceptor of single wafer type thermal process apparatus - Google Patents

Abstract

The present invention relates to a horizontal sensing unit for a susceptor of a sheet type heat treatment facility, and includes a disc-shaped unit body seated across a susceptor edge and a horizontal sensing unit mounted on the unit body to sense whether the susceptor is horizontal or not. The horizontal sensing unit includes a plurality of distance sensing sensors for sensing a distance value from the upper surface of the susceptor, a horizontal sensing sensor for sensing the horizontality of the susceptor, and a control unit for displaying the detected values from the distance sensing sensors and the horizontal sensing sensor on the display. In this case, when the susceptor is periodically checked, the operator can adjust the horizontal level of the susceptor on which the wafer is seated by adjusting the indicator in real time, thereby minimizing product defects due to the susceptor horizontal failure.

Description

LEVELLING SENSING UNIT FOR SUSCEPTOR OF SINGLE WAFER TYPE THERMAL PROCESS APPARATUS}

1 is a cross-sectional view schematically showing a conventional sheet type heat treatment equipment.

Figure 2 is a perspective view showing a susceptor horizontal sensing unit of the sheet-type heat treatment equipment according to the present invention.

3 is a cross-sectional view along the line I-I 'shown in FIG.

4 is a block diagram showing the operation of the horizontal sensing unit according to the present invention.

** Explanation of Signs of Major Parts of Drawings **

200: susceptor

400: horizontal sensing unit

410: unit body

450: distance sensor

440: horizontal sensor

460: control unit

470 indicator

480: Alarm

490 horizontal sensing unit

The present invention relates to a susceptor horizontal sensing unit of a single wafer heat treatment equipment, and more particularly, to maintain the level of the wafer seated on the susceptor by leveling the susceptor mounted inside the single heat treatment equipment. It relates to a horizontal sensing unit for susceptors of lobe heat treatment equipment.

In general, there are a batch type heat treatment facility for forming a film on a wafer surface and a single wafer type heat treatment facility for processing a plurality of wafers at a time, and a single wafer type heat treatment facility for processing one by one. Therefore, it is necessary to use the equipment appropriately according to the type of film formation and the production amount.

Referring to FIG. 1, in general, a sheet type heat treatment apparatus introduces a wafer W into a reaction chamber 120 in a chamber 100 through a transfer device (not shown), and then onto the susceptor 200. The internal heater 250 installed inside the susceptor 200 itself or the lower susceptor 200 with respect to the wafer W seated on the susceptor 200 is installed inside the chamber 100. By heating the external heater 130, the inside of the reaction chamber 120 is formed at a process temperature to perform a heat treatment process on the wafer (W).

Such a facility performs a periodic inspection of the chamber 100 after the process or before the process. At this time, to set the susceptor 200, the upper part of the susceptor 200 is formed of a quartz or graphite plate or the like in order to easily transfer the heat from the lower inner heater 250.

However, in general, the susceptor 200 is assembled in such a manner that a plurality of components are combined with the quartz plate as described above. . At this time, the worker checks whether the wafer (W) is sliding on the susceptor (200).

In the wafer W sliding check operation, the wafer W is seated on the susceptor 200, and then the wafer W is susceptor by driving the wafer lifter 290 mounted below the susceptor 200 up and down. Check if the sliding on the (200). However, when the sliding of the wafer (W) occurs, as described above, whether the sliding due to the air friction on the wafer (W) and the susceptor 200, or whether the susceptor 200 itself is a sliding caused by a slight inclination A problem that is difficult to determine occurs.

In addition, if a process is performed on the wafer W in a state in which the susceptor 200 is inclined finely, a film is formed on the surface of the wafer W while the wafer W is inclined and thus on the surface of the wafer W. There is a problem that an excessively large amount of film formation is formed on only one side, causing product defects.

Accordingly, an object of the present invention is to adjust the susceptor horizontally using a separate horizontal sensing unit on the susceptor on which the wafer is seated in the chamber during the periodic inspection, and then perform a film forming process on the wafer. It is to provide a horizontal sensing unit for the susceptor of the single-sheet heat treatment equipment to facilitate the film formation process, thereby improving the product yield.

Susceptor horizontal sensing unit of the sheet-type heat treatment equipment of the present invention for solving the above problems is a disk-shaped unit body seated across the susceptor edge; And a horizontal sensing unit mounted on the unit body to sense whether the susceptor is horizontal.

The horizontal sensing unit may be a plurality of distance sensing sensors mounted on the bottom of the unit body to sense distance values from the susceptor upper surface except for the susceptor edge.

In addition, the horizontal sensing unit preferably includes a control unit for displaying the distance values detected by the distance detecting sensors with an indicator. Therefore, the controller informs the operator of the distance values from the distance sensors to the susceptor upper surface in real time.

In addition, the distance sensors are preferably mounted at equal intervals along the bottom edge of the unit body.

Here, the distance sensors are preferably any one of an optical sensor, an ultrasonic sensor, and an infrared sensor composed of a light receiving unit and a light emitting unit.

On the other hand, the horizontal sensing unit is preferably mounted on the center of the upper surface of the unit body is a horizontal sensing sensor for sensing the horizontal of the susceptor.                     

Here, the horizontal sensing unit preferably includes a control unit for displaying the horizontal value detected by the horizontal sensing sensor as an indicator. Therefore, the operator can check the level of susceptor in real time.

In addition, the horizontal sensor is preferably any one of the electronic horizontal gauge and the droplet horizontal gauge.

In addition, an alarm for notifying an operator is added to the controller of the horizontal detection unit when a distance value of any one of the distance values detected by the distance detection sensors is different or the horizontal value of the electronic horizontal detection sensor becomes a predetermined value. It is preferable to be equipped with.

On the other hand, the horizontal sensing unit is preferably provided with the distance sensor and the horizontal sensor.

Hereinafter, with reference to the accompanying drawings, it will be described embodiments of the susceptor horizontal sensing unit of the sheet-type heat treatment equipment of the present invention.

First, the first embodiment according to the present invention will be described.

2 and 3, the first embodiment according to the present invention is provided with a disc-shaped unit body 410 seated over the edge of the circular susceptor 200 shown in FIG. It is mounted to the 410 is provided with a horizontal detecting unit 490 for detecting the presence or absence of the susceptor 200 (see Fig. 4).

The horizontal sensing unit 490 illustrated in FIG. 4 is mounted on the bottom of the unit body 410, and is preferably four distance detecting sensors 450 mounted at equal intervals along the outer circumference of the bottom of the unit body 410. The distance sensors 450 may employ any one of an optical sensor, a light sensor, an infrared sensor, and an infrared sensor.

In addition, referring to Figure 4, the horizontal detection unit 490 is equipped with a control unit 460 for receiving the distance value from each of the mounting position from the above-described distance sensor 450 to display on the display 470 The controller 460 is further equipped with an alarm 480 for notifying an operator of an alarm when any one of the distance values detected by the four distance sensors 450 is different.

Of course, when comparing the distance values from the four distance sensors 450 in the controller 460, a minimum error value is preset. This error value is given as a distance value, and is a value of a condition in which product defects do not occur when the wafer W shown in FIG. 1 seated on the susceptor 200 performs a film forming process or the like. That is, it is the minimum inclination value of the susceptor 200.

Therefore, during the periodic inspection before the process, by mounting the above-described horizontal sensing unit 400 on the susceptor 200, and displays the distance value at a plurality of points between the bottom of the unit body 410 and the upper surface of the susceptor 200 By zooming in, the operator can determine at which position of the susceptor 200 the inclination is made. In addition, the distance sensor 450 displays the distance values at the mounting position in real time on the indicator 470, so that the operator can display the susceptor 200 at the portion where the distance sensors 450 are mounted through the indicator 470. By adjusting the horizontal level of the susceptor 200 can be adjusted. Therefore, the film forming process may be performed while the wafer W seated on the susceptor 200 is horizontally formed to form a uniform film formation on the surface of the wafer W, thereby increasing the yield of the product. Can be improved.

Next will be described a second embodiment according to the present invention.

2 and 3, the second embodiment according to the present invention is provided with a disc-shaped unit body 410 seated on the susceptor 200 as in the first embodiment, the unit body A horizontal detecting unit 490 (see FIG. 4) having a horizontal detecting sensor 440 electrically detecting a horizontal level is installed on a central upper surface, and a unit body 410 is provided on the susceptor 200. In the seated state it is to detect the horizontality of the susceptor 200. The horizontal sensor 440 is preferably an electronic horizontal gauge.

Referring to FIG. 4, the horizontal sensing unit 490 is further provided with a controller 460 which displays the horizontal value detected by the horizontal sensing sensor 440 on the display 470. In addition, the controller 460 compares the horizontal value with a predetermined minimum horizontal error value and additionally installs an alarm 480 for notifying an operator when the detected horizontal value is out of the minimum horizontal error value range. .

Here, the minimum horizontal error value corresponds to the purpose of the minimum error value from the distance detection sensors 450 described in the first embodiment. That is, when the detected horizontal value is a value within the minimum horizontal error value range, the value does not affect the wafer W in the film forming process for the wafer W.

Accordingly, when the susceptor 200 is periodically checked, the unit body 410 is placed on the susceptor 200, and the controller 460 is a horizontal sensor 440 such as an electronic horizontal gauge mounted on the unit body 410. By displaying the detected horizontal value on the display 470 in real time, the operator can adjust the level of the susceptor 200 as in the first embodiment.

Next will be described a third embodiment according to the present invention.

2 and 3, the third embodiment according to the present invention is a horizontal sensing having a plurality of distance sensing sensors 450 and the horizontal sensing sensor 440 described in the first and second embodiments. The unit 490 is installed on the unit body 410. The plurality of distance detection sensors 450 are equally mounted along the outer periphery of the bottom of the unit body 410 as in the first embodiment, and horizontally. The detection sensor 440 is mounted as in the second embodiment.

Here, the horizontal sensor 440 is preferably an electronic horizontal gauge as in the first embodiment.

In addition, the control unit 460 is further installed in the horizontal detection unit 490, which receives the distance values detected by the distance detection sensors 450 and the horizontal values detected by the horizontal detection sensor 440, and then displays the indicator 470. Mark on

In addition, the control unit 460 is the minimum error value according to the detected distance value and the minimum horizontal error value according to the detected horizontal value as in the first and second embodiments are all set in a predetermined state, It further has an alarm 480 for notifying the alarm when the distance value and the horizontal value are out of the range of the error value and the horizontal error value.

Therefore, when the susceptor 200 is periodically inspected, in a state in which the unit body 410 is seated on the upper portion of the horizontal sensing unit 400 configured as described above, the operator looks at the indicator 470 of the susceptor 200. Allows you to check the level. That is, the controller 460 displays the distance value and the horizontal value detected in real time through the indicator 470, and notifies the horizontal state through the alarm 480 in comparison with the error values, so that the operator is alerted. It is possible to adjust the level of the susceptor 200 in a condition that can be stopped, and then to adjust the level of the susceptor 200 so that the alarm can be stopped, the distance value and the horizontal value corresponding to each It is to be within the error range.

Meanwhile, although the four distance detection sensors 450 described in the second and third embodiments are arranged at equal intervals along the outer periphery of the bottom surface of the unit body 410, the distance detection sensors 450 are arranged in three and horizontally of the susceptor 200. You can also control the condition.

On the other hand, the horizontal detection sensor 440 described in the second and third embodiments preferably employs the electronic horizontal gauge support, in addition, it is also possible to use a water droplet horizontal gauge. As described above, in the case where the water droplet horizontal gauge is employed in the second embodiment, the operator visually adjusts the level of the susceptor 200 so that the water droplets are located in the center of the gauge. 460 notifies the operator of the distance values from the distance sensors 450 through the indicator 470 and the alarm 480, and adjusts the level of the susceptor 200 as described above. To adjust the level.

Therefore, according to the present invention, when the susceptor regular inspection before the process in the chamber of the single-layer heat treatment equipment, the operator adjusts the horizontal while observing the susceptor on which the wafer is seated in real time through the indicator and alarm, It eliminates the inconvenience of horizontal leveling and the susceptor's horizontal error caused by the actual wafer seated on the susceptor, and improves the product yield by minimizing product defects caused by the susceptor's horizontal defect. It works.

Claims (8)

A disc shaped unit body seated across the susceptor edge; And And a horizontal sensing unit mounted to the unit body to sense a horizontal presence of the susceptor. The method of claim 1, And the horizontal sensing unit is a plurality of distance sensing sensors mounted on the bottom of the unit body to sense distance values from the upper surface of the susceptor except for the susceptor edge. The method of claim 2, The horizontal sensing unit has a horizontal sensing unit for a susceptor of a sheet type heat treatment facility, characterized in that it comprises a control unit for displaying the distance value detected by the distance sensing sensors as an indicator. The method of claim 2, The distance detecting sensor is a horizontal sensing unit for a susceptor of a single-leaf type heat treatment facility, characterized in that mounted at equal intervals along the edge of the bottom surface of the unit body. The method of claim 2, The distance sensing sensor is a horizontal sensor unit for a susceptor of a single-leaf heat treatment equipment, characterized in that any one of the light sensor, the light sensor and the light emitting unit consisting of a light emitting unit, infrared sensor. The method of claim 1, The horizontal sensing unit is a horizontal sensing unit for a single wafer heat treatment equipment, characterized in that the horizontal sensing sensor mounted on the center of the upper surface of the unit body for detecting the horizontal of the susceptor. The method of claim 6, The horizontal sensing unit has a horizontal sensing unit for a susceptor of a single-leaf type heat treatment equipment, characterized in that it comprises a control unit for displaying the horizontal value detected by the horizontal sensing sensor with an indicator. The method of claim 6, The horizontal sensor is a horizontal sensing unit for a susceptor of the single-leaf heat treatment equipment, characterized in that any one of the electronic horizontal gauge and the droplet horizontal gauge.

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