KR20060083657A - Method for manufacturing short-arc discharge lamp - Google Patents

Abstract

The present invention provides a light emitting part forming step of forming a light emitting part in a predetermined portion of the quartz glass tube, an electrode assembly inserting step of inserting the electrode assembly inside the quartz glass tube, and sealing the electrode assembly existing at both ends of the light emitting part to form an encapsulation part. A method of manufacturing a short arc type discharge lamp including a step of forming an encapsulation part, and a step of filling a light emitting material and an encapsulating gas into the light emitting part, wherein the step of filling the light emitting material and the encapsulating gas includes an encapsulation part. By inserting a tubular tube into the light emitting portion from the outside surface is characterized in that the tube insertion site is sealed after injecting the light emitting material and the sealing gas through the tube. According to this, the tube inserted into the light emitting portion to inject the encapsulation gas into the light emitting portion is inserted into the light emitting portion from the outer surface of the encapsulation portion, so that the tip (Tip), which is a tube insertion mark formed during the encapsulation on the outer surface of the encapsulation portion Is formed. Thus, the light scattering due to the tip of the short arc discharge lamp does not occur. Therefore, light loss is prevented from occurring due to problems such as scattering of light.

Short arc, discharge lamp, light emitting part, encapsulation part, photolithography, overlay, encapsulated gas

Description

Method for Manufacturing Short Arc Discharge Lamp {Method for Manufacturing Short-Arc Discharge Lamp}

1 is a view schematically illustrating some components of a light source unit of a general overlay measuring apparatus.

2 is a configuration diagram schematically showing a short arc-type discharge lamp shown in FIG.

Figure 3 is a schematic view showing a short arc-type discharge lamp manufactured according to the method of manufacturing a short arc-type discharge lamp of the present invention.

<Description of Symbols for Major Parts of Drawings>

100, 300: short arc type discharge lamp 101, 301: quartz glass tube

102, 302: light emitting portion 103, 303: encapsulation portion

104, 304: electrode assembly 104a, 304a: anode

104b, 304b: cathode 105, 305: tip

110: light source unit 111: housing

112: Y axis micro adjuster 113: Z axis micro adjuster

114: support

The present invention relates to a method for manufacturing a short arc type discharge lamp that emits ultraviolet rays, and more particularly, to a method for manufacturing a short arc type discharge lamp used in an overlay measuring device of a semiconductor device manufacturing apparatus.

In general, in order to manufacture a semiconductor device, a circuit is formed in a stacked manner to form a layer, which is formed in a photolithography process consisting of photoresist coating, exposure, and development. Is implemented.

Here, most of the exposure process uses an optical system equipped with a plurality of lenses, such a lens generates a shift phenomenon that varies depending on the shape and size of the actual pattern, causing misalignment during the exposure process. Let's go.

Therefore, after the current exposure process step, the degree of alignment of the pattern is compared, measured and corrected to determine how much the actual pattern formed on the wafer is aligned with the reference pattern formed on the mask. At this time, the lamp used in the overlay measuring device for the overlay measuring process includes an arc discharge lamp or a halogen lamp.

Among them, the arc type discharge lamp can be divided into a long arc type discharge lamp and a short arc type discharge lamp according to the arc shape. The arc type discharge lamp has a light emitting part surrounding the light emitting space made of quartz glass and an encapsulation part formed on both sides of the light emitting part. In addition, the anode and the cathode are formed at a predetermined distance inside the light emitting unit, and a sealed gas made of a light emitting material and a predetermined rare gas or a mixture thereof is enclosed.

Currently, rare gases used are xenon (Xe) gas, argon (Ar) gas, krypton (Kr) gas, and the like. In the short arc type discharge lamp used in the overlay measuring device, xenon gas is used as the encapsulation gas. .

Hereinafter, a light source unit of a general overlay measuring apparatus using a short arc discharge lamp manufactured by the above method will be briefly described with reference to the accompanying drawings.

FIG. 1 is a schematic view of a part of a light source unit of a general overlay measurement apparatus, and FIG. 2 is a schematic view of a short arc type discharge lamp shown in FIG. 1.

1 and 2, the light source unit 110 of the general overlay measuring device has a short arc type discharge lamp 100 fixed as a light source inside the housing 111, and the short arc type discharge lamp 100 is It is fixed by the support 114 formed in the housing 111. Here, the support 114 can be moved finely by the Y-axis micro-controller 112 and the Z-axis micro-controller 113 is connected through one side of the housing 111, at this time fixed to the support 114 The shot arc discharge lamp 100 is also moved together with the support (114).

As shown in FIG. 2, the short arc-type discharge lamp 100 has an encapsulation portion 103 formed at both ends of an ellipsoid-shaped light emitting portion 102 surrounding the discharge space, and an electrode assembly in the light emitting portion 102. Not only are the negative electrode portion 104b and the positive electrode portion 104a disposed opposite to 104, but also the light emitting material and the enclosed gas are filled. Here, the electrode assembly 104 is typically composed of a tungsten electrode, a molybdenum foil, and an outer molybdenum lead, and as a material, a high melting point metal having a melting point of at least 3000 (K) such as tungsten and rhenium tantalum is employed.

In addition, when the short arc-type discharge lamp 100 is fixed to the support 114 in the housing 111, the anode part 104a is generally fixed to the bottom side and the cathode part 104b is directed upward. During lighting, the anode portion 104a side becomes hotter than the cathode portion 104b side, so that convection of encapsulated gas occurs in the light emitting portion 102.

Therefore, the light source unit 110 of the general overlay measuring device having such a configuration is arranged after the short arc-type discharge lamp 100 so that the light is accurately irradiated to the irradiated object located at a predetermined position, the short arc-type discharge lamp 100 Light is emitted from the light emitted by the irradiated object through the one side of the housing 111.

However, the conventional short arc type discharge lamp 100 has a tip 105 formed at a predetermined portion of the light emitting unit 102, which is a method of manufacturing the short arc type discharge lamp 100 according to the related art. It is formed in the light emitting material and the filling gas filling step.

That is, in the method of manufacturing the short arc type discharge lamp 100 according to the related art, the filling of the light emitting material and the encapsulating gas is a step of encapsulating the light emitting material and the encapsulating gas in the light emitting part 102, and the outer surface of the light emitting part 102. After injecting the light emitting material and the encapsulation gas into the light emitting unit 102 through the tubular tube in, the insertion portion of the tube is sealed with heat. Thus, the tip 105 is formed on the outer surface of the light emitting unit 102 as a mark for the insertion portion of the tube.                         

Therefore, the short arc type discharge lamp 100 manufactured by the method of manufacturing a short arc type discharge lamp according to the related art has a problem such that light is scattered due to the tip 105 formed on the outer surface of the light emitting unit 102 when it is turned on. Is generated, and the strength is reduced, which may cause a process defect during the overlay measurement process.

Accordingly, the short arc type discharge lamp 100 manufactured by the method of manufacturing a short arc type discharge lamp according to the related art is used in the light emitting part 102 in which the tip 105 is not formed when the short arc type discharge lamp 100 is replaced at the end of its life in the overlay measuring device. There is also the inconvenience of having to align the position so that the light emitted from one side is irradiated to the irradiated object.

Accordingly, the present invention is to provide a method of manufacturing a short arc type discharge lamp to prevent the tip is formed in a predetermined portion of the light emitting portion when the mercury and the encapsulated gas is injected into the light emitting portion.

The present invention provides a light emitting part forming step of forming a light emitting part in a predetermined portion of the quartz glass tube, an electrode assembly inserting step of inserting the electrode assembly into the quartz glass tube, and sealing a predetermined portion of the electrode assembly existing at both ends of the light emitting part. A method of manufacturing a short arc type discharge lamp including a step of forming an encapsulation part to form a part, and a step of filling a light emitting material and an encapsulating gas into a light emitting part, the step of filling a light emitting material and an encapsulated gas. Insert the tubular tube into the light emitting portion from the outer surface of the encapsulation portion is characterized in that the injecting the light emitting material and the gas through the tube to seal the tube insertion site.

Hereinafter, with reference to the accompanying drawings will be described in detail an embodiment of the present invention.

3 is a configuration diagram schematically showing a short arc type discharge lamp manufactured according to the method of manufacturing a short arc type discharge lamp of the present invention.

Referring to FIG. 3, a method of manufacturing a short arc type discharge lamp according to the present invention includes a light emitting part forming step of forming a light emitting part 302 at a predetermined portion of a quartz glass tube 301, and an electrode assembly inside the quartz glass tube 301. An electrode assembly insertion step of inserting the 304, an encapsulation part forming step of sealing the electrode assembly 304 present at both ends of the light emitting part 302 to form the encapsulation part 303, and the light emitting part 302. It includes a light emitting material and the filling gas filling step of encapsulating the light emitting material and the inclusion gas.

In addition, the method of manufacturing the short arc discharge lamp according to the present invention is different from the method of manufacturing the short arc discharge lamp according to the related art, and the light emitting part 302 is formed on the outer surface of the encapsulation part 303 in the light emitting material and the filling gas filling step. Injecting a tubular tube into the inside to inject the light emitting material and the encapsulation gas through the tube to seal the tube insertion portion (305a).

That is, in the forming of the light emitting part, the light emitting part 302 is formed to surround the light emitting space by heating and softening the outer surface of the predetermined portion of the quartz glass tube 301 using a burner, a plasma torch, or a laser. At this time, it is preferable to proceed while rotating the quartz glass tube 301 about an axis formed in the longitudinal direction.                     

Next, in the electrode assembly insertion step, the anode portion 304a constituting the anode of the electrode assembly 304 and the cathode portion 304b constituting the cathode are all inserted into the quartz glass tube 301 at a time, and then the light emitting portion 302 is disposed at a predetermined portion. When the front end of each of them is fixed, it is a step of fixing them. At this time, the distance between the two electrodes 304a and 304b is preferably about 1.5 mm.

Next, in the encapsulation forming step, the inside of the quartz glass tube 301 into which the electrode assembly 304 is inserted is decompressed (for example, 1 atm or less), and burns the plasma on the outer side portions of both ends of the light emitting part 302. It is a step of encapsulating the electrode assembly 304 by heating and softening it with a torch or a laser and the like so that the inner side thereof comes into close contact with the electrode assembly 304. At this time, it is preferable to proceed while rotating the quartz glass tube 301 about an axis formed in the longitudinal direction.

Next, unlike the arc tube type discharge lamp manufacturing method according to the prior art, the step of filling the light emitting material and the encapsulated gas, after inserting the tube into the light emitting portion 302 from the outer surface of the encapsulation portion 303 and dried one side of the tube By communicating with the xenon gas source, which is one of the enclosed gases, mercury, which is a light emitting material, is injected into the light emitting unit 302 together with the flow of the xenon gas. At this time, the pressure of the xenon gas is set to 0.1 to 10 atm during sealing, and the amount of mercury is preferably 10 to 60 mg / cc at a weight per cm 2.

Here, the light emitting material and the filling gas filling step is performed in a predetermined filling gas atmosphere so that the material injected into the light emitting unit 302 is not contaminated and the lifespan of the manufactured lamp is shortened or the efficiency is lowered. Should not occur.                     

Thereafter, when a predetermined light emitting material and encapsulation gas are injected into the light emitting unit 302, the tube insertion portion 305a may be formed using a burner, a plasma torch, or a laser as in the case of forming the light emitting unit 302 and the encapsulation 303. The outer portion of the encapsulation portion 303 formed with the heating and softening is sealed. At this time, a tip 305 is formed at a predetermined portion of the outer surface of the encapsulation portion 303 due to the sealing of the tube insertion portion 305a. However, this is formed on the outer surface of the encapsulation portion 303 rather than the light emitting portion 302, thereby not causing a problem such as reducing the intensity of light emitted from the light emitting portion 302. Here, the light emitting material and the light emitting material of the encapsulating gas may be first injected into the light emitting unit 302, and then the encapsulating gas may be injected, or vice versa.

As described above, the short arc-type discharge lamp manufacturing method according to the present invention by inserting the tube for injecting the light emitting material and the gas into the light emitting portion from the outer side of the sealing portion to the inside of the light emitting portion, the insertion place of the tube is sealed A tip formed of the marks is formed on the outer surface of the encapsulation portion. Accordingly, problems such as light scattering caused by the formation of the tip of the light emitting part that becomes the light emitting space do not occur.

Therefore, when the short arc type discharge lamp manufactured by the method of manufacturing the short arc type discharge lamp according to the present invention is used as an exposure light source such as an overlay measuring device, a phenomenon in which light reduced than the desired light intensity is irradiated does not occur. However, this does not cause a process defect.

Claims (1)

A light emitting part forming step of forming a light emitting part in a predetermined portion of the quartz glass tube, an electrode assembly inserting step of inserting an electrode assembly inside the quartz glass tube, and sealing the electrode assembly existing at both ends of the light emitting part to form an encapsulation part. In the manufacturing method of the short arc (Short Arc) discharge lamp comprising the step of forming the encapsulation, and the step of filling the light emitting material and the encapsulating gas to enclose the light emitting material and the encapsulated gas in the light emitting portion, The filling of the light emitting material and the encapsulating gas may include inserting a tubular tube from the outer surface of the encapsulation part into the light emitting part to inject the light emitting material and the encapsulating gas through the tube and then seal the tube insertion portion. Short arc type discharge lamp manufacturing method.

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