JP2003151501A - Short arc discharge lamp - Google Patents
Short arc discharge lampInfo
- Publication number
- JP2003151501A JP2003151501A JP2001352838A JP2001352838A JP2003151501A JP 2003151501 A JP2003151501 A JP 2003151501A JP 2001352838 A JP2001352838 A JP 2001352838A JP 2001352838 A JP2001352838 A JP 2001352838A JP 2003151501 A JP2003151501 A JP 2003151501A
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- Prior art keywords
- lamp
- discharge lamp
- light emitting
- spherical
- tube
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ショートアーク型
放電灯に関し、特に、半導体デバイス（IC）や液晶表示
パネル（LCD）やプリント基板（PCB）などの製造工程に
おける露光に使用される紫外線を発生するショートアー
ク型放電灯に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a short arc type discharge lamp, and more particularly, to an ultraviolet ray used for exposure in a manufacturing process of a semiconductor device (IC), a liquid crystal display panel (LCD), a printed circuit board (PCB) or the like. The present invention relates to a generated short arc type discharge lamp.
【０００２】[0002]
【従来の技術】一般に、超高圧放電灯の点灯中には、管
内部の圧力が20気圧を超えることが知られている。特
に、液晶表示パネル（LCD）の製造工程における露光に
使用される放電管は、高照度化の要求が厳しく、照度を
高めるために、発光に寄与する水銀を多量に封入してい
る。これにより、印加電力を増加させることなく、ｇ
線、ｈ線、ｉ線の放射量を増加させ、露光照射面の紫外
線照度を上昇させている。これは、動作中の水銀蒸気圧
を上昇させて、複数分子発光を大量に起こさせること
で、水銀輝線以外に、水銀輝線近傍の発光を生じさせ、
紫外線波長域において連続スペクトルで発光させるもの
である。2. Description of the Related Art It is generally known that the pressure inside a tube exceeds 20 atm during lighting of an ultra-high pressure discharge lamp. In particular, a discharge tube used for exposure in a manufacturing process of a liquid crystal display panel (LCD) is required to have high illuminance, and in order to increase illuminance, a large amount of mercury that contributes to light emission is sealed. As a result, g is increased without increasing the applied power.
The irradiance of the X-rays, the H-rays, and the i-rays is increased to increase the UV illuminance on the exposure irradiation surface. This is because the vapor pressure of mercury during operation is increased to cause a large amount of multi-molecular light emission, so that light emission near the mercury emission line is generated in addition to the mercury emission line.
It emits light in a continuous spectrum in the ultraviolet wavelength range.
【０００３】この連続スペクトル発光では、水銀輝線以
外の波長域、特に、赤外線波長域での発光効率の向上が
顕著となる。水銀蒸気圧を上昇させる方法としては、水
銀ランプの発光管内に封入する水銀封入量を、発光管１
cc当たり約20mg以上とする方法がある。水銀封入量の増
加は、水銀ランプの発光効率をさらに増加させる。した
がって、これらの放電灯の発光部を設計する際には、バ
ルブ部の機械的強度が、20気圧以上の圧力に耐えられる
ような強度となるように設計することが、放電灯の破裂
事故を防ぐために重要である。In this continuous spectrum emission, the luminous efficiency is remarkably improved in the wavelength region other than the mercury emission line, particularly in the infrared wavelength region. As a method of increasing the mercury vapor pressure, the amount of mercury enclosed in the arc tube of the mercury lamp is set to
There is a method to make about 20 mg or more per cc. Increasing the amount of mercury enclosed further increases the luminous efficiency of the mercury lamp. Therefore, when designing the light-emitting part of these discharge lamps, it is important to design the mechanical strength of the bulb part so that it can withstand a pressure of 20 atm or more to prevent accidental explosion of the discharge lamp. It is important to prevent.
【０００４】従来、放電管を設計する際には、搭載する
光学系の楕円ミラーの寸法等を加味した上で、ランプへ
の印加電力をランプの内表面積値で割った値（管壁負荷
値）等を基にして、バルブ部の設計を行っていた。この
管壁負荷値は、ランプ長寿命化の指標として使ってい
る。ランプ電力を下げるか、ランプ発光管内表面積を大
きくすることにより、管壁負荷を低くすることができ、
ランプを長寿命化できる。すなわち、ランプ電力を一定
とした場合、ランプ発光部形状が大きいほど、長寿命化
できる。Conventionally, when designing a discharge tube, the power applied to the lamp is divided by the inner surface area of the lamp (tube wall load value) after taking into consideration the dimensions of the elliptical mirror of the optical system to be mounted. ), Etc., based on which the valve part was designed. This tube wall load value is used as an index for extending the lamp life. By reducing the lamp power or increasing the surface area inside the lamp arc tube, the wall load can be reduced.
The lamp life can be extended. That is, when the lamp power is constant, the longer the lamp light emitting portion is, the longer the life can be.
【０００５】ランプの強度は、ランプの形状にも依存す
る。図６に示すショートアーク型放電灯の電極封入方法
を参照しながら、ランプの強度と形状の関係を説明す
る。図６（ａ）に示すように、ストレート形状の石英管
をバーナーで溶融して、Ｎ2などで内側を加圧して膨ら
まして、カーボン製などの型で最終成形する。成形後の
発光管の両端は、加工前の石英管の部分が残る。この部
分の外径が、直管部外径ｂである。直管部の内径は、図
６（ｂ）に示すように、陽極を管の中に挿入するため、
陽極の外径よりも太い必要がある。陽極のステム部分の
管状部材９の位置に対応する直管部を溶かして、内部の
管状部材９と溶着して封じる。したがって、図６（ｃ）
に示すように、直管部に段差ができる。ただし、管状部
材９の外径を大きくすれば、段差ができないようにする
こともできる。直管部外径ｂが大きいほど、ランプステ
ム部内部と外部の温度差が大きくなり、クラック等が生
じやすく、ランプ破損の原因になる。直管部外径ｂが小
さいほど、ランプステム部と外部の温度差は小さくなる
が、ステム部の強度が弱くなる。The intensity of the lamp also depends on the shape of the lamp. The relationship between the intensity and shape of the lamp will be described with reference to the electrode encapsulation method for the short arc discharge lamp shown in FIG. As shown in FIG. 6 (a), a straight quartz tube is melted by a burner, the inside is pressurized with N 2 or the like to inflate, and finally molded with a mold made of carbon or the like. The parts of the quartz tube before processing remain on both ends of the arc tube after molding. The outer diameter of this portion is the straight pipe outer diameter b. As shown in Fig. 6 (b), the inner diameter of the straight pipe portion is such that the anode is inserted into the pipe,
It must be thicker than the outer diameter of the anode. The straight pipe portion corresponding to the position of the tubular member 9 in the stem portion of the anode is melted and welded to the internal tubular member 9 to be sealed. Therefore, FIG. 6 (c)
As shown in, a step is formed in the straight pipe portion. However, if the outer diameter of the tubular member 9 is increased, it is possible to prevent the step from being formed. The larger the outer diameter b of the straight pipe portion, the larger the temperature difference between the inside and the outside of the lamp stem portion, which is likely to cause cracks and the like, which causes lamp damage. The smaller the outer diameter b of the straight pipe portion, the smaller the temperature difference between the lamp stem portion and the outside, but the weaker the strength of the stem portion.
【０００６】以下に、ショートアーク型放電灯の形状に
関する技術の従来例をいくつか挙げる。特開平9-265951
号公報に開示された「放電ランプ」は、ランプ電圧が20
0V級で、ランプ電力が２kW級の長寿命で小型軽量な放電
ランプである。一対の電極の間隔Ｌ（mm）と、気密容器
の電極軸と直交する方向の最大内径Ｄ（mm）が、30≦Ｌ
≦38，30≦Ｄ≦34，Ｌ≧Ｄを満たす。電極が無用に近接
しないので、点灯時の気密容器の内圧が許容範囲となっ
て、破裂が発生しない。発光点が小さくなって、光学特
性も改善される。気密容器が無用に小さくないので、ア
ークの湾曲による気密容器の破損も発生しない。気密容
器が無用に大きくないので、機械的強度も向上する。全
体に小型軽量であり、効率も良い。The following are some conventional examples of techniques relating to the shape of a short arc type discharge lamp. JP 9-265951
The "discharge lamp" disclosed in the publication has a lamp voltage of 20
It is a small and lightweight discharge lamp with a long life of 0 kW and a lamp power of 2 kW. The distance L (mm) between the pair of electrodes and the maximum inner diameter D (mm) in the direction orthogonal to the electrode axis of the hermetic container are 30 ≦ L
≦ 38, 30 ≦ D ≦ 34, L ≧ D are satisfied. Since the electrodes do not come close to each other unnecessarily, the internal pressure of the airtight container at the time of lighting is within an allowable range, and no rupture occurs. The light emitting point is reduced, and the optical characteristics are improved. Since the airtight container is not unnecessarily small, damage to the airtight container due to arc bending does not occur. Since the airtight container is not unnecessarily large, the mechanical strength is also improved. Overall, it is small and lightweight and efficient.
【０００７】特開平10-188893号公報に開示された「液
晶バックライト用セラミック製高圧水銀放電ランプ」
は、万一破裂した場合の破裂音が小さく、発光管の強度
が強く、光出力の立上り時間が早く、高い動作圧で点灯
することができ、赤色を強く発色するリチウムを封入し
てもランプ寿命の長い液晶バックライト用高圧水銀放電
ランプである。透光性セラミックスで成形された発光管
内に、一対の電極が対向配置され、水銀と希ガスが封入
される。発光管中央部の最大外径Ｄと発光管端部の電極
導入部の外径ｄの比ｄ／Ｄの値が0.4以下である。水銀
の動作圧60atm以上で点灯する。必要に応じて発光管内
に適量の水素ガスを封入する。"Ceramic high-pressure mercury discharge lamp for liquid crystal backlight" disclosed in Japanese Patent Laid-Open No. 10-188893
Is a small burst sound in case of bursting, the intensity of the arc tube is strong, the light output rise time is fast, it can be lit at a high operating pressure, and even if lithium that strongly emits red is enclosed, the lamp It is a high-pressure mercury discharge lamp for LCD backlights that has a long life. A pair of electrodes are arranged to face each other in an arc tube formed of translucent ceramics, and mercury and a rare gas are enclosed. The ratio d / D of the maximum outer diameter D of the central portion of the arc tube and the outer diameter d of the electrode introduction portion at the end of the arc tube is 0.4 or less. It lights up when the operating pressure of mercury is 60 atm or more. If necessary, an appropriate amount of hydrogen gas is sealed in the arc tube.
【０００８】特開2000-223023号公報に開示された「高
圧放電ランプ」は、ランプ寿命に応じた要求性能および
信頼性を簡単な構成で確保し、寿命中の破裂などを未然
に防止するものである。バルブに水銀を封入する。バル
ブ内に、電極間距離５（ｍｍ）以下で、一対の電極を対
向配置する。管壁負荷［ランプ電力（Ｗ）／バルブ内表
面積（cm2）］をRWとし、ランプ寿命をＴ（時間）と
し、封入水銀量をＭ（mg／cc）とするとき、0.4Ｍ≦50
−[logＴ×√(RW)]を満足する。[0008] The "high pressure discharge lamp" disclosed in Japanese Patent Laid-Open No. 2000-223023 secures required performance and reliability according to the lamp life with a simple structure and prevents a burst or the like during the life from occurring. Is. Seal the bulb with mercury. In the bulb, a pair of electrodes are arranged to face each other with a distance between electrodes of 5 (mm) or less. When the tube wall load [lamp power (W) / bulb surface area (cm 2 )] is RW, the lamp life is T (hours), and the amount of enclosed mercury is M (mg / cc), 0.4M ≦ 50
-[LogT × √ (RW)] is satisfied.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、従来の
入力電力１kW以上の大形放電管においては、管壁負荷値
を基にしてバルブ部を設計すると、バルブ点灯中に大き
な歪みが生じやすく、最悪の場合、歪みが進行してバル
ブの破壊に至り、ランプを搭載する光学系に大きなダメ
ージを与えるという問題があった。However, in the conventional large-sized discharge tube with an input power of 1 kW or more, if the valve portion is designed based on the wall load value, a large distortion is likely to occur during the lighting of the valve, which is the worst case. In this case, there was a problem that the distortion progressed and the bulb was destroyed, and the optical system mounting the lamp was seriously damaged.
【００１０】本発明は、上記従来の問題を解決して、ラ
ンプの破裂耐性が高く、長寿命なショートアーク型放電
灯を堤供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to solve the above conventional problems and provide a short arc type discharge lamp having a high lamp burst resistance and a long life.
【００１１】[0011]
【課題を解決するための手段】上記の課題を解決するた
めに、本発明では、発光管内に陰極及び陽極を対向して
配置し、発光管内の空間に水銀と希ガスを封入したショ
ートアーク型放電灯の発光管の球面部最大内径aと、発
光管の球面部全長ｃとの関係を、0.42＜（ａ／ｃ）＜1.
02の範囲とした。このように構成したことにより、ラン
プの破裂耐性を高くでき、長寿命にできる。In order to solve the above problems, according to the present invention, a cathode and an anode are arranged in an arc tube so as to face each other, and mercury and a rare gas are enclosed in a space in the arc tube. The relation between the maximum inner diameter a of the spherical part of the arc tube of the discharge lamp and the total length c of the spherical part of the arc tube is 0.42 <(a / c) <1.
The range is 02. With this structure, the burst resistance of the lamp can be increased and the life can be extended.
【００１２】さらに、発光管の球面部終端面外径ｂが1.
82＜（ａ／ｂ）＜3.44の範囲に有るようにし、ランプ電
力をＷ（W）とし、発光管の球面部内表面積をＳ（mm2）
としたときに、Ｗ／Ｓ＜0.3とした。このように構成し
たことにより、ランプの破裂耐性を一層高くでき、長寿
命にできる。Furthermore, the outer diameter b of the end surface of the spherical portion of the arc tube is 1.
82 <(a / b) <3.44, the lamp power is W (W), and the inner surface area of the spherical portion of the arc tube is S (mm 2 ).
Then, W / S <0.3. With such a structure, the burst resistance of the lamp can be further increased and the life can be extended.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態につい
て、図１〜図５を参照しながら詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS.
【００１４】（実施の形態）本発明の実施の形態は、発
光管の球面部最大内径aと発光管球面部全長ｃとの関係
を、0.42＜（ａ／ｃ）＜1.02の範囲とし、発光管の球面
部終端面外径ｂを、1.82＜（ａ／ｂ）＜3.44の範囲と
し、ランプ電力Ｗ（W）と発光部球面部内表面積Ｓ（m
m2）の比を、Ｗ／Ｓ＜0.3としたショートアーク型放電
灯である。(Embodiment) In the embodiment of the present invention, the relationship between the maximum inner diameter a of the spherical portion of the arc tube and the total length c of the spherical surface of the arc tube is set in the range of 0.42 <(a / c) <1.02. The outer diameter b of the end surface of the spherical surface of the tube is set to a range of 1.82 <(a / b) <3.44, and the lamp power W (W) and the surface area S (m
It is a short arc type discharge lamp in which the ratio of m 2 ) is W / S <0.3.
【００１５】図１は、本発明の実施の形態におけるショ
ートアーク型放電灯の概念図である。図２は、ショート
アーク型放電灯の球面部の拡大図である。図１と図２に
おいて、発光管１は、ショートアーク型放電灯の石英ガ
ラス管である。ガラス管部分をバルブとも呼ぶ。陰極２
は、負電圧を印加する電極である。陽極３は、正電圧を
印加する電極である。内部リード棒４,５は、電極とス
テム部を結ぶ導体である。ステム部６は、電極と口金を
支持する部分である。口金７,８は、電源を接続すると
ともに、ランプを支持する部材である。管状部材９は、
発光管の直管部と溶着させる部分である。発光管内部21
は、水銀などのガスを封じた発光部分である。FIG. 1 is a conceptual diagram of a short arc type discharge lamp according to an embodiment of the present invention. FIG. 2 is an enlarged view of the spherical portion of the short arc type discharge lamp. 1 and 2, the arc tube 1 is a quartz glass tube of a short arc type discharge lamp. The glass tube part is also called a bulb. Cathode 2
Is an electrode for applying a negative voltage. The anode 3 is an electrode that applies a positive voltage. The inner lead rods 4 and 5 are conductors that connect the electrode and the stem portion. The stem portion 6 is a portion that supports the electrode and the base. The bases 7 and 8 are members that connect a power source and support the lamp. The tubular member 9 is
This is a portion to be welded to the straight tube portion of the arc tube. Inside the arc tube 21
Is a light emitting portion in which a gas such as mercury is sealed.
【００１６】発光部球面部最大内径ａは、発光管の球面
部の軸に直交する方向の最大内部直径である。直管部外
径ｂは、発光管の球面部終端面の外径である。発光管球
面部全長ｃは、発光管の球面部の軸方向の長さである。
すなわち、球面部両端の直管部との接合部（球面部終端
面）間の長さである。放電灯の発光管は、ストレート形
状の石英管をバーナーで溶融して、例えばＮ2で内側を
加圧して膨らまして、例えばカーボン製の型で最終成形
する。成形後の発光管の両端は、加工前の石英管の部分
が残る。この部分の外径が、直管部外径ｂである。発光
管の球面部の形状は、ほぼ球面またはほぼ回転楕円体で
あるが、これらを総称して単に球面と呼ぶ。球面部内表
面積は、球面部両端の直管部との接合部を除いた内面の
表面積である。The maximum inner diameter a of the spherical surface of the light emitting section is the maximum inner diameter in the direction orthogonal to the axis of the spherical section of the arc tube. The straight tube portion outer diameter b is the outer diameter of the spherical end surface of the arc tube. The total length c of the spherical portion of the arc tube is the axial length of the spherical portion of the arc tube.
That is, it is the length between the joints (end surface of the spherical portion) with the straight pipe portions at both ends of the spherical portion. For the arc tube of the discharge lamp, a straight quartz tube is melted by a burner, and the inside is pressurized with, for example, N 2 to swell, and finally molded by, for example, a carbon mold. The parts of the quartz tube before processing remain on both ends of the arc tube after molding. The outer diameter of this portion is the straight pipe outer diameter b. The shape of the spherical portion of the arc tube is a substantially spherical surface or a substantially spheroid, but these are collectively referred to simply as a spherical surface. The inner surface area of the spherical surface portion is the surface area of the inner surface excluding the joints with the straight pipe portions at both ends of the spherical surface portion.
【００１７】図３は、ショートアーク型放電灯の形状と
最大歪との関係を示す表である。図４は、ショートアー
ク型放電灯の球面部内表面積一定の場合における形状と
最大歪との関係を示す表である。図５は、ショートアー
ク型放電灯の球面部内表面積と破裂時間との関係を示す
表である。FIG. 3 is a table showing the relationship between the shape of the short arc type discharge lamp and the maximum strain. FIG. 4 is a table showing the relationship between the shape and the maximum strain when the surface area of the spherical portion of the short arc type discharge lamp is constant. FIG. 5 is a table showing the relationship between the surface area inside the spherical portion and the burst time of the short arc type discharge lamp.
【００１８】上記のように構成された本発明の実施の形
態におけるショートアーク型放電灯の特性について説明
する。最初に、図１と図２を参照して、ランプバルブの
形状と破裂耐性との関係について説明する。ランプ破裂
の原因となる歪みは、ランプバルブ形状に由来する機械
的強度の変化によるものと考える。ランプバルブは、石
英ガラスの直管の中央部を、球状あるいは回転楕円体状
に膨らませて形成する。発光管１内に、陰極２と陽極３
を対向して配置する。発光管１内の空間21に、水銀と希
ガスを封入する。発光管１の大きさを、直管の直径に対
して大きくすれば、機械的強度は下がる。The characteristics of the short arc discharge lamp in the embodiment of the present invention configured as described above will be described. First, the relationship between the shape of the lamp bulb and the burst resistance will be described with reference to FIGS. 1 and 2. The strain that causes the lamp to burst is considered to be due to the change in mechanical strength due to the shape of the lamp bulb. The lamp bulb is formed by bulging the central part of a straight tube of quartz glass into a spherical or spheroidal shape. Inside the arc tube 1, a cathode 2 and an anode 3
To face each other. A space 21 inside the arc tube 1 is filled with mercury and a rare gas. If the size of the arc tube 1 is made larger than the diameter of the straight tube, the mechanical strength is lowered.
【００１９】次に、図３の表を参照しながら、発光部形
状の変化による最大主応力の変化について説明する。ラ
ンプに、封入ガスとしてキセノンＸeを１atmと、水銀を
50mg／cc封入し、７kWの電力で500時間点灯した。図３
の表は、16種類のバルブ形状のランプについて、ランプ
点灯時のバルブ部の最大歪み発生量の大きさを測定し、
各ランプのバルブ形状と測定結果を示したものである。
図３の表に示すように、ランプ発光部の形状によって、
歪み発生位置と歪みの量が異なっている。ランプバルブ
部の応力分布は、バルブ形状と密接な関係がある。しが
って、バルブ形状によっては、ランプの機械的強度との
関係により、点灯時に破裂に至るものがでるのである。
発光部球面部最大内径をａとし、直管部外径をｂとし、
発光管球面部全長をｃとすると、0.42＜（ａ／ｃ）＜1.
02かつ1.82＜（ａ／ｂ）＜3.44の範囲では、最大主応力
値が小さい。このことから、ランプ発光部形状は、0.42
＜（ａ／ｃ）＜1.02と、1.82＜（ａ／ｂ）＜3.44を満た
すものであることが望ましいということになる。Next, the change of the maximum principal stress due to the change of the shape of the light emitting portion will be described with reference to the table of FIG. Xenon Xe at 1 atm and mercury as fill gas in the lamp
Enclosed with 50mg / cc, it was lit for 500 hours with 7kW power. Figure 3
In the table, for 16 types of bulb-shaped lamps, the amount of maximum strain generated in the bulb when the lamp is lit is measured,
It shows the bulb shape of each lamp and the measurement results.
As shown in the table of FIG. 3, depending on the shape of the light emitting portion of the lamp,
The strain generation position and the strain amount are different. The stress distribution of the lamp bulb is closely related to the bulb shape. Therefore, depending on the shape of the bulb, the bulb may burst at the time of lighting depending on the relationship with the mechanical strength of the lamp.
Let the maximum inner diameter of the spherical surface of the light emitting part be a and the outer diameter of the straight pipe part be b,
If the total length of the spherical surface of the arc tube is c, 0.42 <(a / c) <1.
In the range of 02 and 1.82 <(a / b) <3.44, the maximum principal stress value is small. From this, the shape of the lamp emission part is 0.42
This means that it is desirable that the values satisfy <(a / c) <1.02 and 1.82 <(a / b) <3.44.
【００２０】第３に、図４の表を参照しながら、バルブ
の球面部内表面積が一定で、バルブ部の形状が異なる場
合における、ランプ点灯時のバルブ部の最大歪み発生量
について説明する。図４の表は、ランプに、封入ガスと
してキセノンＸeを１atmと水銀を50mg／cc封入し、７kW
の電力で500時間点灯して、バルブ部の最大歪み発生量
を測定した結果を、各ランプのバルブ形状とともに示し
たものである。図４の表に示すように、ランプ発光部の
寸法と最大主応力発生量と発生位置には相関がある。こ
の表から、バルブの発光部球面部最大内径ａと、発光管
の球面部終端面外径ｂと、バルブの発光管球面部全長ｃ
の関係が、0.42＜（ａ／ｃ）＜1.02かつ1.82＜（ａ／
ｂ）＜3.44となることが望ましいといえる。Thirdly, with reference to the table of FIG. 4, the maximum strain generation amount of the bulb portion when the lamp is lit when the surface area of the bulb portion is constant and the shape of the bulb portion is different will be described. The table in Fig. 4 shows that the lamp is filled with 1 atm of xenon Xe and 50 mg / cc of mercury as the filling gas, and 7 kW
The result of measuring the maximum strain generation amount of the bulb part after lighting for 500 hours with the power of is shown together with the bulb shape of each lamp. As shown in the table of FIG. 4, there is a correlation between the size of the lamp light emitting portion, the maximum principal stress generation amount, and the generation position. From this table, the maximum inner diameter a of the spherical surface of the bulb of the bulb, the outer diameter b of the end surface of the spherical portion of the bulb, and the total length c of the spherical surface of the bulb of the bulb c
Is 0.42 <(a / c) <1.02 and 1.82 <(a /
b) It can be said that it is desirable that <3.44.
【００２１】第４に、図５の表を参照しながら、ランプ
内表面積と破裂時間との関係を説明する。図５の表は、
同じ入力電力で内表面積が異なるランプを連続点灯し、
破裂するまでの時間を計測した結果を示したものであ
る。図５の表に示すように、バルブの発光管球面部の最
大内径ａと、バルブ両サイドの直管部外径ｂと、バルブ
の発光管球面部全長ｃの関係が、0.42＜（ａ／ｃ）＜1.
02かつ1.82＜(ａ／ｂ)＜3.44の範囲内であっても、入力
電力を内表面積で割った値が0.3以下でないランプは、1
000時間以内で破裂した。入力電力を内表面積で割った
値が高いほど、ランプバルブの温度が上昇する傾向があ
る。バルブの高温化により、バルブ素材である石英ガラ
スが劣化し、破裂に到ったと考えられる。しかし、バル
ブの発光管球面部最大内径ａと、バルブ両サイドの直管
部外径ｂと、バルブの発光管球面部全長ｃの関係が、0.
42＜（ａ／ｃ）＜1.02かつ1.82＜（ａ／ｂ）＜3.44の範
囲内であり、かつ入力電力を内表面積で割った値が0.3
以下であれば、ランプは1000時間の点灯でも破裂しな
い。Fourthly, the relationship between the surface area inside the lamp and the burst time will be described with reference to the table of FIG. The table in FIG.
Lamps with the same input power but different internal surface areas are continuously lit,
It shows the result of measuring the time until it bursts. As shown in the table of FIG. 5, the relationship between the maximum inner diameter a of the bulb spherical surface of the bulb, the outer diameter b of the straight tube on both sides of the bulb, and the total length c of the bulb spherical surface of the bulb is 0.42 <(a / c) <1.
02 and 1.82 <(a / b) <3.44, but the value that the input power divided by the inner surface area is not less than 0.3 is 1
Exploded within 000 hours. The higher the value obtained by dividing the input power by the inner surface area, the higher the temperature of the lamp bulb tends to be. It is considered that the high temperature of the bulb deteriorated the quartz glass, which is the material of the bulb, and caused the glass to burst. However, the relationship between the maximum inner diameter a of the bulb arc surface of the bulb, the outer diameter b of the straight tube on both sides of the bulb, and the total length c of the bulb arc surface of the bulb is 0.
42 <(a / c) <1.02 and 1.82 <(a / b) <3.44, and the value obtained by dividing the input power by the inner surface area is 0.3.
The lamp will not burst after 1000 hours of operation if:
【００２２】以上の説明では、１kW以上の放電管を対象
としたが、発光管を持つ放電管全てについて上記の性質
が当てはまるので、すべての放電管に応用して同様な効
果を得ることができる。In the above description, a discharge tube of 1 kW or more is targeted, but since the above properties apply to all discharge tubes having an arc tube, the same effect can be obtained by applying to all discharge tubes. .
【００２３】上記のように、本発明の実施の形態はで、
ショートアーク型放電灯の発光管球面部最大内径aと発
光管球面部全長ｃとの関係を、0.42＜（ａ／ｃ）＜1.02
の範囲とし、発光管の球面部終端面外径ｂを、1.82＜
（ａ／ｂ）＜3.44の範囲とし、ランプ電力Ｗ（W）と発
光部球面部内表面積Ｓ（mm2）の比を、Ｗ／Ｓ＜0.3とし
たので、ランプの破裂耐性を高くでき、長寿命にでき
る。As described above, the embodiment of the present invention is
The relation between the maximum inner diameter a of the spherical surface of the arc tube and the total length c of the spherical surface of the arc tube of the short arc discharge lamp is 0.42 <(a / c) <1.02.
And the outer diameter b of the end surface of the spherical surface of the arc tube is 1.82 <
(A / b) <3.44, and the ratio of the lamp power W (W) to the surface area S (mm 2 ) of the spherical surface of the light emitting section was set to W / S <0.3, so that the burst resistance of the lamp can be increased and Can be a lifetime.
【００２４】[0024]
【発明の効果】以上説明から明らかなように、本発明で
は、発光管内に陰極及び陽極を対向して配置し、発光管
内の空間に水銀と希ガスを封入したショートアーク型放
電灯の発光管球面部最大内径aと、発光管球面部全長ｃ
との関係を、0.42＜（ａ／ｃ）＜1.02の範囲としたの
で、ランプ発光部の機械的強度を高くでき、点灯中の破
裂事故を抑制できるという効果が得られる。As is apparent from the above description, according to the present invention, the arc tube of the short arc type discharge lamp in which the cathode and the anode are arranged to face each other in the arc tube, and the space inside the arc tube is filled with mercury and rare gas. Maximum spherical surface inside diameter a and arc tube spherical surface overall length c
Since the relation with the above is set in the range of 0.42 <(a / c) <1.02, the mechanical strength of the lamp light emitting part can be increased, and an effect of suppressing a rupture accident during lighting can be obtained.
【００２５】さらに、発光管の球面部終端面外径ｂが1.
82＜（ａ／ｂ）＜3.44の範囲に有り、ランプ電力Ｗ
（W）と発光部球面部内表面積Ｓ（mm2）の関係をＷ／Ｓ
＜0.3としたので、ショートアーク型放電灯の破裂耐性
を高くでき、長時間点灯しても破裂することがない長寿
命なものにできるという効果が得られる。Further, the outer diameter b of the spherical end surface of the arc tube is 1.
Lamp power W within the range of 82 <(a / b) <3.44
The relationship between (W) and the surface area S (mm 2 ) of the spherical surface of the light emitting part is expressed as W / S
Since it is <0.3, the short arc type discharge lamp can be highly resistant to rupture, and it is possible to obtain a long-life lamp that does not burst even after being lit for a long time.
【図１】本発明の実施の形態におけるショートアーク型
放電灯の概念図、FIG. 1 is a conceptual diagram of a short arc type discharge lamp according to an embodiment of the present invention,
【図２】本発明の実施の形態におけるショートアーク型
放電灯の拡大図、FIG. 2 is an enlarged view of a short arc type discharge lamp according to an embodiment of the present invention,
【図３】ショートアーク型放電灯の形状と最大歪との関
係を示す表、FIG. 3 is a table showing the relationship between the shape of the short arc type discharge lamp and the maximum strain,
【図４】ショートアーク型放電灯の内表面積一定の場合
における形状と最大歪との関係を示す表、FIG. 4 is a table showing the relationship between the shape and the maximum strain when the internal surface area of the short arc type discharge lamp is constant,
【図５】ショートアーク型放電灯の内表面積と破裂時間
との関係を示す表、FIG. 5 is a table showing the relationship between the internal surface area and the burst time of a short arc type discharge lamp,
【図６】ショートアーク型放電灯の電極封入方法の説明
図である。FIG. 6 is an explanatory diagram of an electrode encapsulation method for a short arc type discharge lamp.
１ 発光管 ２ 陰極 ３ 陽極 ４、５ 内部リード棒 ６ ステム部 ７、８ 口金 ９ 管状部材 21 発光管内の空間 ａ 発光部球面部最大内径 ｂ 直管部外径 ｃ 発光管球面部全長 1 arc tube 2 cathode 3 anode 4, 5 internal lead rod 6 Stem part 7,8 base 9 Tubular members 21 Space inside the arc tube Maximum inner diameter of spherical surface of light emitting part b Outer diameter of straight pipe c Arc tube spherical part total length
───────────────────────────────────────────────────── フロントページの続き (72)発明者 倉野 正宏 長野県茅野玉川4896番地 株式会社オーク 製作所諏訪工場内 (72)発明者 芹澤 和泉 長野県茅野玉川4896番地 株式会社オーク 製作所諏訪工場内 (72)発明者 藤森 昭芳 長野県茅野玉川4896番地 株式会社オーク 製作所諏訪工場内 Ｆターム(参考） 5C039 HH03 HH06 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Masahiro Kurano 4896 Chino Tamagawa, Nagano Prefecture Oak Co., Ltd. Inside the Suwa factory (72) Inventor Izumi Serizawa 4896 Chino Tamagawa, Nagano Prefecture Oak Co., Ltd. Inside the Suwa factory (72) Inventor Akiyoshi Fujimori 4896 Chino Tamagawa, Nagano Prefecture Oak Co., Ltd. Inside the Suwa factory F term (reference) 5C039 HH03 HH06
Claims (3)
し、前記発光管内の空間に水銀と希ガスを封入したショ
ートアーク型放電灯において、前記発光管の球面部最大
内径aと、前記発光管の球面部全長ｃとの関係が、0.42
＜（ａ／ｃ）＜1.02の範囲であることを特徴とするショ
ートアーク型放電灯。1. A short arc type discharge lamp in which a cathode and an anode are arranged to face each other in an arc tube and mercury and a rare gas are enclosed in a space inside the arc tube. The relationship with the total spherical surface length c of the arc tube is 0.42
<(A / c) <1.02 range, short arc type discharge lamp.
＜（ａ／ｂ）＜3.44の範囲に有ることを特徴とする請求
項１に記載のショートアーク型放電灯。2. The outer diameter b of the spherical end surface of the arc tube is 1.82.
The short arc type discharge lamp according to claim 1, wherein the range is <(a / b) <3.44.
の球面部内表面積をＳ（mm2）としたときに、Ｗ／Ｓ＜
0.3であることを特徴とする請求項１または２に記載の
ショートアーク型放電灯。3. When the lamp power is W (W) and the internal surface area of the spherical portion of the arc tube is S (mm 2 ), W / S <
It is 0.3, The short arc type discharge lamp of Claim 1 or 2 characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001352838A JP3898490B2 (en) | 2001-11-19 | 2001-11-19 | Short arc type discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001352838A JP3898490B2 (en) | 2001-11-19 | 2001-11-19 | Short arc type discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003151501A true JP2003151501A (en) | 2003-05-23 |
| JP3898490B2 JP3898490B2 (en) | 2007-03-28 |
Family
ID=19164961
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001352838A Expired - Lifetime JP3898490B2 (en) | 2001-11-19 | 2001-11-19 | Short arc type discharge lamp |
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| Country | Link |
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| JP (1) | JP3898490B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006092865A (en) * | 2004-09-22 | 2006-04-06 | Ushio Inc | Short arc type discharge lamp |
| US8212479B2 (en) * | 2006-07-13 | 2012-07-03 | Osram Ag | High-pressure discharge lamp with improved intensity distribution |
| JP2020004691A (en) * | 2018-06-21 | 2020-01-09 | 株式会社ユメックス | Short arc flash lamp |
-
2001
- 2001-11-19 JP JP2001352838A patent/JP3898490B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006092865A (en) * | 2004-09-22 | 2006-04-06 | Ushio Inc | Short arc type discharge lamp |
| US8212479B2 (en) * | 2006-07-13 | 2012-07-03 | Osram Ag | High-pressure discharge lamp with improved intensity distribution |
| JP2020004691A (en) * | 2018-06-21 | 2020-01-09 | 株式会社ユメックス | Short arc flash lamp |
| JP7215707B2 (en) | 2018-06-21 | 2023-01-31 | 株式会社ユメックス | short arc flash lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3898490B2 (en) | 2007-03-28 |
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