KR20060055385A - Photosensitive resin composition, spacer for display panel and display panel - Google Patents
Photosensitive resin composition, spacer for display panel and display panel Download PDFInfo
- Publication number
- KR20060055385A KR20060055385A KR1020050109734A KR20050109734A KR20060055385A KR 20060055385 A KR20060055385 A KR 20060055385A KR 1020050109734 A KR1020050109734 A KR 1020050109734A KR 20050109734 A KR20050109734 A KR 20050109734A KR 20060055385 A KR20060055385 A KR 20060055385A
- Authority
- KR
- South Korea
- Prior art keywords
- group
- spacer
- methyl
- ethyl
- carbon atoms
- Prior art date
Links
- 125000006850 spacer group Chemical group 0.000 title claims abstract description 62
- 239000011342 resin composition Substances 0.000 title claims abstract description 37
- 150000001875 compounds Chemical class 0.000 claims abstract description 50
- 229920001577 copolymer Polymers 0.000 claims abstract description 36
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract description 11
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims abstract description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 39
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 19
- 125000000217 alkyl group Chemical group 0.000 claims description 12
- 125000000623 heterocyclic group Chemical group 0.000 claims description 12
- 125000006552 (C3-C8) cycloalkyl group Chemical group 0.000 claims description 7
- 125000003545 alkoxy group Chemical group 0.000 claims description 7
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 6
- 229910052717 sulfur Inorganic materials 0.000 claims description 6
- 239000011593 sulfur Substances 0.000 claims description 6
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 claims description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 5
- 125000002723 alicyclic group Chemical group 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 125000001424 substituent group Chemical group 0.000 claims description 5
- 125000005843 halogen group Chemical group 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 238000006467 substitution reaction Methods 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 125000004642 (C1-C12) alkoxy group Chemical group 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 23
- 238000000034 method Methods 0.000 abstract description 22
- 238000003860 storage Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 6
- -1 Alkyl methacrylates Chemical class 0.000 description 136
- 229910052757 nitrogen Inorganic materials 0.000 description 62
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 44
- 239000000203 mixture Substances 0.000 description 31
- 239000000243 solution Substances 0.000 description 30
- 239000000178 monomer Substances 0.000 description 20
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 20
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 14
- 238000000576 coating method Methods 0.000 description 13
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 13
- 125000003700 epoxy group Chemical group 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 12
- 239000002904 solvent Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000011161 development Methods 0.000 description 11
- 238000011156 evaluation Methods 0.000 description 11
- 239000004094 surface-active agent Substances 0.000 description 11
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 10
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- AGJAUFUNZWHLKE-UHFFFAOYSA-N (2E,4E)-N-isobutyl-2,4-tetradecadienamide Natural products CCCCCCCCCC=CC=CC(=O)NCC(C)C AGJAUFUNZWHLKE-UHFFFAOYSA-N 0.000 description 7
- 239000003513 alkali Substances 0.000 description 7
- 150000005215 alkyl ethers Chemical class 0.000 description 7
- 230000001588 bifunctional effect Effects 0.000 description 7
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical compound N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 7
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 229940022663 acetate Drugs 0.000 description 5
- 150000008062 acetophenones Chemical class 0.000 description 5
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 5
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 4
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- JKQRNTIBBOTABS-UHFFFAOYSA-N 2-(2,4-dichlorophenyl)-1-[2-(2,4-dichlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC(Cl)=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Cl)=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 JKQRNTIBBOTABS-UHFFFAOYSA-N 0.000 description 4
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 4
- VAJVDSVGBWFCLW-UHFFFAOYSA-N 3-Phenyl-1-propanol Chemical compound OCCCC1=CC=CC=C1 VAJVDSVGBWFCLW-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 4
- 239000002671 adjuvant Substances 0.000 description 4
- 125000004849 alkoxymethyl group Chemical group 0.000 description 4
- 125000004122 cyclic group Chemical group 0.000 description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 125000003709 fluoroalkyl group Chemical group 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 4
- 239000003999 initiator Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 4
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- 239000007870 radical polymerization initiator Substances 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 4
- 150000003573 thiols Chemical class 0.000 description 4
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 3
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 3
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
- YZGQDNOIGFBYKF-UHFFFAOYSA-N Ethoxyacetic acid Chemical compound CCOCC(O)=O YZGQDNOIGFBYKF-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- LCXXNKZQVOXMEH-UHFFFAOYSA-N Tetrahydrofurfuryl methacrylate Chemical compound CC(=C)C(=O)OCC1CCCO1 LCXXNKZQVOXMEH-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 125000005907 alkyl ester group Chemical group 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- OWVMFLLVLFONOO-UHFFFAOYSA-N beta-n-Butoxypropionsaeure Natural products CCCCOCCC(O)=O OWVMFLLVLFONOO-UHFFFAOYSA-N 0.000 description 3
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000007334 copolymerization reaction Methods 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 125000004663 dialkyl amino group Chemical group 0.000 description 3
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 3
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 3
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 3
- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 229940051841 polyoxyethylene ether Drugs 0.000 description 3
- 229920000056 polyoxyethylene ether Polymers 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- SSLASPHAKUVIRG-UHFFFAOYSA-N (2-methylcyclohexyl) prop-2-enoate Chemical compound CC1CCCCC1OC(=O)C=C SSLASPHAKUVIRG-UHFFFAOYSA-N 0.000 description 2
- YSBPNMOAQMQEHE-UHFFFAOYSA-N (2-methyloxiran-2-yl)methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1(C)CO1 YSBPNMOAQMQEHE-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- RWEAGLZFYKQPLZ-UHFFFAOYSA-N 1-[4,5-diphenyl-2-(2,4,6-trichlorophenyl)imidazol-2-yl]-4,5-diphenyl-2-(2,4,6-trichlorophenyl)imidazole Chemical compound ClC1=CC(Cl)=CC(Cl)=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Cl)=CC=2Cl)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 RWEAGLZFYKQPLZ-UHFFFAOYSA-N 0.000 description 2
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 2
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 2
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 2
- MHDULSOPQSUKBQ-UHFFFAOYSA-N 2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 MHDULSOPQSUKBQ-UHFFFAOYSA-N 0.000 description 2
- MIYRHXBYLQWDQS-UHFFFAOYSA-N 2-(2-ethoxypropoxy)-1-methoxypropane Chemical compound CCOC(C)COC(C)COC MIYRHXBYLQWDQS-UHFFFAOYSA-N 0.000 description 2
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 2
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- NQXNYVAALXGLQT-UHFFFAOYSA-N 2-[4-[9-[4-(2-hydroxyethoxy)phenyl]fluoren-9-yl]phenoxy]ethanol Chemical compound C1=CC(OCCO)=CC=C1C1(C=2C=CC(OCCO)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 NQXNYVAALXGLQT-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- ZQAXBTFXHKKQHN-UHFFFAOYSA-N 2-n-(propoxymethyl)-1,3,5-triazine-2,4,6-triamine Chemical compound CCCOCNC1=NC(N)=NC(N)=N1 ZQAXBTFXHKKQHN-UHFFFAOYSA-N 0.000 description 2
- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- 125000006181 4-methyl benzyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1C([H])([H])[H])C([H])([H])* 0.000 description 2
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Natural products CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical class C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-WAYWQWQTSA-N Diethyl maleate Chemical compound CCOC(=O)\C=C/C(=O)OCC IEPRKVQEAMIZSS-WAYWQWQTSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 125000003710 aryl alkyl group Chemical group 0.000 description 2
- 150000007860 aryl ester derivatives Chemical class 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 150000008366 benzophenones Chemical class 0.000 description 2
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 2
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 2
- ALRHLSYJTWAHJZ-UHFFFAOYSA-N beta-hydroxy propionic acid Natural products OCCC(O)=O ALRHLSYJTWAHJZ-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- FYRUCHOYGVFKLZ-UHFFFAOYSA-N butyl 2-ethoxypropanoate Chemical compound CCCCOC(=O)C(C)OCC FYRUCHOYGVFKLZ-UHFFFAOYSA-N 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 238000007607 die coating method Methods 0.000 description 2
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 2
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 125000006606 n-butoxy group Chemical group 0.000 description 2
- 125000003506 n-propoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 2
- RDOWQLZANAYVLL-UHFFFAOYSA-N phenanthridine Chemical compound C1=CC=C2C3=CC=CC=C3C=NC2=C1 RDOWQLZANAYVLL-UHFFFAOYSA-N 0.000 description 2
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 150000004053 quinones Chemical class 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 2
- 125000001412 tetrahydropyranyl group Chemical group 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 125000000335 thiazolyl group Chemical group 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 229940096522 trimethylolpropane triacrylate Drugs 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- JWZZKOKVBUJMES-UHFFFAOYSA-N (+-)-Isoprenaline Chemical compound CC(C)NCC(O)C1=CC=C(O)C(O)=C1 JWZZKOKVBUJMES-UHFFFAOYSA-N 0.000 description 1
- KIJJAQMJSXOBIE-UHFFFAOYSA-N (2-methylcyclohexyl) 2-methylprop-2-enoate Chemical compound CC1CCCCC1OC(=O)C(C)=C KIJJAQMJSXOBIE-UHFFFAOYSA-N 0.000 description 1
- ARYIITVULFDIQB-UHFFFAOYSA-N (2-methyloxiran-2-yl)methyl prop-2-enoate Chemical compound C=CC(=O)OCC1(C)CO1 ARYIITVULFDIQB-UHFFFAOYSA-N 0.000 description 1
- FFJCNSLCJOQHKM-CLFAGFIQSA-N (z)-1-[(z)-octadec-9-enoxy]octadec-9-ene Chemical compound CCCCCCCC\C=C/CCCCCCCCOCCCCCCCC\C=C/CCCCCCCC FFJCNSLCJOQHKM-CLFAGFIQSA-N 0.000 description 1
- 0 *C(c(cc1c2c3)ccc1[n](*)c2ccc3C(c1ccccc1)=O)=NOC(*)=O Chemical compound *C(c(cc1c2c3)ccc1[n](*)c2ccc3C(c1ccccc1)=O)=NOC(*)=O 0.000 description 1
- CFCRODHVHXGTPC-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,12-pentacosafluorododecane-1-sulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F CFCRODHVHXGTPC-UHFFFAOYSA-N 0.000 description 1
- KMMOLDZBACYVIN-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluoro-1-[2-[2-[2-[2-[2-[2-(1,1,2,2,3,3-hexafluoropentoxy)propoxy]propoxy]propoxy]propoxy]propoxy]propoxy]pentane Chemical compound CCC(F)(F)C(F)(F)C(F)(F)OCC(C)OCC(C)OCC(C)OCC(C)OCC(C)OCC(C)OC(F)(F)C(F)(F)C(F)(F)CC KMMOLDZBACYVIN-UHFFFAOYSA-N 0.000 description 1
- FWFUGQANHCJOAR-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluorodecane Chemical compound CCCCCCCC(F)(F)C(F)(F)C(F)F FWFUGQANHCJOAR-UHFFFAOYSA-N 0.000 description 1
- NHMQIIWXKSTTCZ-UHFFFAOYSA-N 1,1,2,2,8,8,9,9,10,10-decafluorododecane Chemical compound CCC(F)(F)C(F)(F)C(F)(F)CCCCCC(F)(F)C(F)F NHMQIIWXKSTTCZ-UHFFFAOYSA-N 0.000 description 1
- IJURQEZAWYGJDB-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-(1,1,2,2-tetrafluorobutoxy)butane Chemical compound CCC(F)(F)C(F)(F)OC(F)(F)C(F)(F)CC IJURQEZAWYGJDB-UHFFFAOYSA-N 0.000 description 1
- MKNKAWHZNOFVLS-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-(1,1,2,2-tetrafluoropropoxy)octane Chemical compound CCCCCCC(F)(F)C(F)(F)OC(F)(F)C(C)(F)F MKNKAWHZNOFVLS-UHFFFAOYSA-N 0.000 description 1
- SJKCQODCCXCOFU-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-[2-(1,1,2,2-tetrafluorobutoxy)ethoxy]butane Chemical compound FC(C(CC)(F)F)(F)OCCOC(C(CC)(F)F)(F)F SJKCQODCCXCOFU-UHFFFAOYSA-N 0.000 description 1
- RIZMPBJZAHNFGY-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-hexoxyoctane Chemical compound CCCCCCOC(F)(F)C(F)(F)CCCCCC RIZMPBJZAHNFGY-UHFFFAOYSA-N 0.000 description 1
- HSLFISVKRDQEBY-UHFFFAOYSA-N 1,1-bis(tert-butylperoxy)cyclohexane Chemical compound CC(C)(C)OOC1(OOC(C)(C)C)CCCCC1 HSLFISVKRDQEBY-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- 150000005208 1,4-dihydroxybenzenes Chemical class 0.000 description 1
- UWFRVQVNYNPBEF-UHFFFAOYSA-N 1-(2,4-dimethylphenyl)propan-1-one Chemical compound CCC(=O)C1=CC=C(C)C=C1C UWFRVQVNYNPBEF-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- YUTHQCGFZNYPIG-UHFFFAOYSA-N 1-[2-(2-methylprop-2-enoyloxy)ethyl]cyclohexane-1,2-dicarboxylic acid Chemical compound CC(=C)C(=O)OCCC1(C(O)=O)CCCCC1C(O)=O YUTHQCGFZNYPIG-UHFFFAOYSA-N 0.000 description 1
- WHVCGSUZBJVDAE-UHFFFAOYSA-N 1-[4,5-diphenyl-2-(2,4,6-tribromophenyl)imidazol-2-yl]-4,5-diphenyl-2-(2,4,6-tribromophenyl)imidazole Chemical compound BrC1=CC(Br)=CC(Br)=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Br)=CC=2Br)Br)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 WHVCGSUZBJVDAE-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 1
- FNBHVKBYRFDOJK-UHFFFAOYSA-N 1-butoxypropan-2-yl propanoate Chemical compound CCCCOCC(C)OC(=O)CC FNBHVKBYRFDOJK-UHFFFAOYSA-N 0.000 description 1
- JZHGRUMIRATHIU-UHFFFAOYSA-N 1-ethenyl-3-methylbenzene Chemical compound CC1=CC=CC(C=C)=C1 JZHGRUMIRATHIU-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- ODDDCGGSPAPBOS-UHFFFAOYSA-N 1-ethoxypropan-2-yl propanoate Chemical compound CCOCC(C)OC(=O)CC ODDDCGGSPAPBOS-UHFFFAOYSA-N 0.000 description 1
- BPIUIOXAFBGMNB-UHFFFAOYSA-N 1-hexoxyhexane Chemical compound CCCCCCOCCCCCC BPIUIOXAFBGMNB-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- DOVZUKKPYKRVIK-UHFFFAOYSA-N 1-methoxypropan-2-yl propanoate Chemical compound CCC(=O)OC(C)COC DOVZUKKPYKRVIK-UHFFFAOYSA-N 0.000 description 1
- FLVFPAIGVBQGET-UHFFFAOYSA-N 1-methylpyrrolidin-3-ol Chemical compound CN1CCC(O)C1 FLVFPAIGVBQGET-UHFFFAOYSA-N 0.000 description 1
- AVFZOVWCLRSYKC-UHFFFAOYSA-N 1-methylpyrrolidine Chemical compound CN1CCCC1 AVFZOVWCLRSYKC-UHFFFAOYSA-N 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- RVNBCIQRFGXLRD-UHFFFAOYSA-N 1-propoxypropan-2-yl propanoate Chemical compound CCCOCC(C)OC(=O)CC RVNBCIQRFGXLRD-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- GZBSIABKXVPBFY-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)CO GZBSIABKXVPBFY-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- LNBMZFHIYRDKNS-UHFFFAOYSA-N 2,2-dimethoxy-1-phenylethanone Chemical compound COC(OC)C(=O)C1=CC=CC=C1 LNBMZFHIYRDKNS-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- LZHUBCULTHIFNO-UHFFFAOYSA-N 2,4-dihydroxy-1,5-bis[4-(2-hydroxyethoxy)phenyl]-2,4-dimethylpentan-3-one Chemical compound C=1C=C(OCCO)C=CC=1CC(C)(O)C(=O)C(O)(C)CC1=CC=C(OCCO)C=C1 LZHUBCULTHIFNO-UHFFFAOYSA-N 0.000 description 1
- IETCLBGYEVVQQL-UHFFFAOYSA-N 2-(2,4-dibromophenyl)-1-[2-(2,4-dibromophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound BrC1=CC(Br)=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Br)=CC=2)Br)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 IETCLBGYEVVQQL-UHFFFAOYSA-N 0.000 description 1
- RXPLWIYPJFSJCC-UHFFFAOYSA-N 2-(2-bromophenyl)-1-[2-(2-bromophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound BrC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Br)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 RXPLWIYPJFSJCC-UHFFFAOYSA-N 0.000 description 1
- WFTWWOCWRSUGAW-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl 2-methylprop-2-enoate Chemical compound CCOCCOCCOC(=O)C(C)=C WFTWWOCWRSUGAW-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- FTALTLPZDVFJSS-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl prop-2-enoate Chemical compound CCOCCOCCOC(=O)C=C FTALTLPZDVFJSS-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- PTBAHIRKWPUZAM-UHFFFAOYSA-N 2-(oxiran-2-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1CO1 PTBAHIRKWPUZAM-UHFFFAOYSA-N 0.000 description 1
- CBKJLMZJKHOGEQ-UHFFFAOYSA-N 2-(oxiran-2-yl)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCC1CO1 CBKJLMZJKHOGEQ-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- HDPLHDGYGLENEI-UHFFFAOYSA-N 2-[1-(oxiran-2-ylmethoxy)propan-2-yloxymethyl]oxirane Chemical compound C1OC1COC(C)COCC1CO1 HDPLHDGYGLENEI-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- LBNDGEZENJUBCO-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethyl]butanedioic acid Chemical compound CC(=C)C(=O)OCCC(C(O)=O)CC(O)=O LBNDGEZENJUBCO-UHFFFAOYSA-N 0.000 description 1
- HCZMHWVFVZAHCR-UHFFFAOYSA-N 2-[2-(2-sulfanylethoxy)ethoxy]ethanethiol Chemical compound SCCOCCOCCS HCZMHWVFVZAHCR-UHFFFAOYSA-N 0.000 description 1
- SEFYJVFBMNOLBK-UHFFFAOYSA-N 2-[2-[2-(oxiran-2-ylmethoxy)ethoxy]ethoxymethyl]oxirane Chemical compound C1OC1COCCOCCOCC1CO1 SEFYJVFBMNOLBK-UHFFFAOYSA-N 0.000 description 1
- LTHJXDSHSVNJKG-UHFFFAOYSA-N 2-[2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOC(=O)C(C)=C LTHJXDSHSVNJKG-UHFFFAOYSA-N 0.000 description 1
- MAUGGXUAHNSMKF-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-(1,1,2,2,3,3-hexafluoropentoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethanol Chemical compound CCC(F)(F)C(F)(F)C(F)(F)OCCOCCOCCOCCOCCOCCO MAUGGXUAHNSMKF-UHFFFAOYSA-N 0.000 description 1
- ZZEANNAZZVVPKU-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-(2-hydroxypropoxy)propoxy]propoxy]propoxy]propoxy]propoxy]propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)COC(C)COC(C)COC(C)COC(C)COC(C)CO ZZEANNAZZVVPKU-UHFFFAOYSA-N 0.000 description 1
- WTYYGFLRBWMFRY-UHFFFAOYSA-N 2-[6-(oxiran-2-ylmethoxy)hexoxymethyl]oxirane Chemical compound C1OC1COCCCCCCOCC1CO1 WTYYGFLRBWMFRY-UHFFFAOYSA-N 0.000 description 1
- KUAUJXBLDYVELT-UHFFFAOYSA-N 2-[[2,2-dimethyl-3-(oxiran-2-ylmethoxy)propoxy]methyl]oxirane Chemical compound C1OC1COCC(C)(C)COCC1CO1 KUAUJXBLDYVELT-UHFFFAOYSA-N 0.000 description 1
- VVPLLZZDAKVSSO-UHFFFAOYSA-N 2-[bis[2-(2-methylprop-2-enoyloxy)ethoxy]phosphoryloxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOP(=O)(OCCOC(=O)C(C)=C)OCCOC(=O)C(C)=C VVPLLZZDAKVSSO-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- RVHOBHMAPRVOLO-UHFFFAOYSA-N 2-ethylbutanedioic acid Chemical compound CCC(C(O)=O)CC(O)=O RVHOBHMAPRVOLO-UHFFFAOYSA-N 0.000 description 1
- VOGSBOVWPQXXAH-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-(4-propylphenyl)propan-1-one Chemical compound CCCC1=CC=C(C(=O)C(C)(C)O)C=C1 VOGSBOVWPQXXAH-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- NGEWQZIDQIYUNV-UHFFFAOYSA-N 2-hydroxy-3-methylbutyric acid Chemical compound CC(C)C(O)C(O)=O NGEWQZIDQIYUNV-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 1
- ICPWFHKNYYRBSZ-UHFFFAOYSA-M 2-methoxypropanoate Chemical compound COC(C)C([O-])=O ICPWFHKNYYRBSZ-UHFFFAOYSA-M 0.000 description 1
- NXKOSHBFVWYVIH-UHFFFAOYSA-N 2-n-(butoxymethyl)-1,3,5-triazine-2,4,6-triamine Chemical compound CCCCOCNC1=NC(N)=NC(N)=N1 NXKOSHBFVWYVIH-UHFFFAOYSA-N 0.000 description 1
- JSQYKOSZQFTNSN-UHFFFAOYSA-N 2-n-[(2-methylpropan-2-yl)oxymethyl]-1,3,5-triazine-2,4,6-triamine Chemical compound CC(C)(C)OCNC1=NC(N)=NC(N)=N1 JSQYKOSZQFTNSN-UHFFFAOYSA-N 0.000 description 1
- NMUIIYJWWOPNIP-UHFFFAOYSA-N 2-pentan-3-ylidenebutanedioic acid Chemical compound CCC(CC)=C(C(O)=O)CC(O)=O NMUIIYJWWOPNIP-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- WYYQKWASBLTRIW-UHFFFAOYSA-N 2-trimethoxysilylbenzoic acid Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1C(O)=O WYYQKWASBLTRIW-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- ALRHLSYJTWAHJZ-UHFFFAOYSA-M 3-hydroxypropionate Chemical compound OCCC([O-])=O ALRHLSYJTWAHJZ-UHFFFAOYSA-M 0.000 description 1
- DKIDEFUBRARXTE-UHFFFAOYSA-N 3-mercaptopropanoic acid Chemical compound OC(=O)CCS DKIDEFUBRARXTE-UHFFFAOYSA-N 0.000 description 1
- NWKKCUWIMOZYOO-UHFFFAOYSA-N 3-methoxybutyl 2-methylprop-2-enoate Chemical compound COC(C)CCOC(=O)C(C)=C NWKKCUWIMOZYOO-UHFFFAOYSA-N 0.000 description 1
- NPYMXLXNEYZTMQ-UHFFFAOYSA-N 3-methoxybutyl prop-2-enoate Chemical compound COC(C)CCOC(=O)C=C NPYMXLXNEYZTMQ-UHFFFAOYSA-N 0.000 description 1
- GHVQFNRPRVTBJY-UHFFFAOYSA-N 3-methoxybutyl propanoate Chemical compound CCC(=O)OCCC(C)OC GHVQFNRPRVTBJY-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 1
- VFXXTYGQYWRHJP-UHFFFAOYSA-N 4,4'-azobis(4-cyanopentanoic acid) Chemical compound OC(=O)CCC(C)(C#N)N=NC(C)(CCC(O)=O)C#N VFXXTYGQYWRHJP-UHFFFAOYSA-N 0.000 description 1
- YDIYEOMDOWUDTJ-UHFFFAOYSA-N 4-(dimethylamino)benzoic acid Chemical compound CN(C)C1=CC=C(C(O)=O)C=C1 YDIYEOMDOWUDTJ-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- UNDXPKDBFOOQFC-UHFFFAOYSA-N 4-[2-nitro-4-(trifluoromethyl)phenyl]morpholine Chemical compound [O-][N+](=O)C1=CC(C(F)(F)F)=CC=C1N1CCOCC1 UNDXPKDBFOOQFC-UHFFFAOYSA-N 0.000 description 1
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 description 1
- LXDXJSHQARTINV-UHFFFAOYSA-N 4-bromoquinoline-6-carboxylic acid Chemical compound N1=CC=C(Br)C2=CC(C(=O)O)=CC=C21 LXDXJSHQARTINV-UHFFFAOYSA-N 0.000 description 1
- SSIZVBOERWVGFR-UHFFFAOYSA-N 5-(oxiran-2-yl)pentyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCC1CO1 SSIZVBOERWVGFR-UHFFFAOYSA-N 0.000 description 1
- CYKONRWVCOIAHL-UHFFFAOYSA-N 5-(oxiran-2-yl)pentyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCC1CO1 CYKONRWVCOIAHL-UHFFFAOYSA-N 0.000 description 1
- ULLLJOGNYWAUJL-UHFFFAOYSA-N 5-hydroxy-2-methylhex-2-enoic acid Chemical compound CC(O)CC=C(C)C(O)=O ULLLJOGNYWAUJL-UHFFFAOYSA-N 0.000 description 1
- DWHJJLTXBKSHJG-UHFFFAOYSA-N 5-hydroxy-2-methylpent-2-enoic acid Chemical compound OC(=O)C(C)=CCCO DWHJJLTXBKSHJG-UHFFFAOYSA-N 0.000 description 1
- SAPGBCWOQLHKKZ-UHFFFAOYSA-N 6-(2-methylprop-2-enoyloxy)hexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCOC(=O)C(C)=C SAPGBCWOQLHKKZ-UHFFFAOYSA-N 0.000 description 1
- GDUZPNKSJOOIDA-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-yl 2-methylprop-2-enoate Chemical compound C1C(OC(=O)C(=C)C)CCC2OC21 GDUZPNKSJOOIDA-UHFFFAOYSA-N 0.000 description 1
- VAYCBEIMJNGBGH-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-yl prop-2-enoate Chemical compound C1C(OC(=O)C=C)CCC2OC21 VAYCBEIMJNGBGH-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- YJVIKVWFGPLAFS-UHFFFAOYSA-N 9-(2-methylprop-2-enoyloxy)nonyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCCCCOC(=O)C(C)=C YJVIKVWFGPLAFS-UHFFFAOYSA-N 0.000 description 1
- PGDIJTMOHORACQ-UHFFFAOYSA-N 9-prop-2-enoyloxynonyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCCCCOC(=O)C=C PGDIJTMOHORACQ-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 1
- AJQOASGWDCBKCJ-UHFFFAOYSA-N Butoxyacetic acid Chemical compound CCCCOCC(O)=O AJQOASGWDCBKCJ-UHFFFAOYSA-N 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- WFMAOWCBCZYUAP-UHFFFAOYSA-N C(C)OC(C(=O)OCC)C.C(C)OC(C(=O)OC)C Chemical compound C(C)OC(C(=O)OCC)C.C(C)OC(C(=O)OC)C WFMAOWCBCZYUAP-UHFFFAOYSA-N 0.000 description 1
- FMATUOIOQSQLKJ-UHFFFAOYSA-N C1(=CC=CC=C1)SC1=CC=C(C=C1)C1(C(=O)ON=CC(CC)=O)CC=CC=C1 Chemical compound C1(=CC=CC=C1)SC1=CC=C(C=C1)C1(C(=O)ON=CC(CC)=O)CC=CC=C1 FMATUOIOQSQLKJ-UHFFFAOYSA-N 0.000 description 1
- WMONOXOCMIPNNU-UHFFFAOYSA-N C=CC(=O)OCCCC(O)COC(=O)C1=CC=CC=C1C(O)=O Chemical compound C=CC(=O)OCCCC(O)COC(=O)C1=CC=CC=C1C(O)=O WMONOXOCMIPNNU-UHFFFAOYSA-N 0.000 description 1
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- CJQWLNNCQIHKHP-UHFFFAOYSA-N Ethyl 3-mercaptopropanoic acid Chemical compound CCOC(=O)CCS CJQWLNNCQIHKHP-UHFFFAOYSA-N 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- YIVJZNGAASQVEM-UHFFFAOYSA-N Lauroyl peroxide Chemical compound CCCCCCCCCCCC(=O)OOC(=O)CCCCCCCCCCC YIVJZNGAASQVEM-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 1
- GYCMBHHDWRMZGG-UHFFFAOYSA-N Methylacrylonitrile Chemical compound CC(=C)C#N GYCMBHHDWRMZGG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- AHVYPIQETPWLSZ-UHFFFAOYSA-N N-methyl-pyrrolidine Natural products CN1CC=CC1 AHVYPIQETPWLSZ-UHFFFAOYSA-N 0.000 description 1
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- JOBBTVPTPXRUBP-UHFFFAOYSA-N [3-(3-sulfanylpropanoyloxy)-2,2-bis(3-sulfanylpropanoyloxymethyl)propyl] 3-sulfanylpropanoate Chemical compound SCCC(=O)OCC(COC(=O)CCS)(COC(=O)CCS)COC(=O)CCS JOBBTVPTPXRUBP-UHFFFAOYSA-N 0.000 description 1
- XAKBSHICSHRJCL-UHFFFAOYSA-N [CH2]C(=O)C1=CC=CC=C1 Chemical group [CH2]C(=O)C1=CC=CC=C1 XAKBSHICSHRJCL-UHFFFAOYSA-N 0.000 description 1
- NOZAQBYNLKNDRT-UHFFFAOYSA-N [diacetyloxy(ethenyl)silyl] acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)C=C NOZAQBYNLKNDRT-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000005073 adamantyl group Chemical group C12(CC3CC(CC(C1)C3)C2)* 0.000 description 1
- 150000007824 aliphatic compounds Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000005250 alkyl acrylate group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- HOPRXXXSABQWAV-UHFFFAOYSA-N anhydrous collidine Natural products CC1=CC=NC(C)=C1C HOPRXXXSABQWAV-UHFFFAOYSA-N 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 150000008378 aryl ethers Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 125000002785 azepinyl group Chemical group 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 125000000499 benzofuranyl group Chemical group O1C(=CC2=C1C=CC=C2)* 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000004196 benzothienyl group Chemical group S1C(=CC2=C1C=CC=C2)* 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 229940007550 benzyl acetate Drugs 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- 229960003237 betaine Drugs 0.000 description 1
- 150000001602 bicycloalkyls Chemical group 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 1
- 125000005382 boronyl group Chemical group 0.000 description 1
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 1
- URBZEXMYYYABCQ-UHFFFAOYSA-N butyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCCCC URBZEXMYYYABCQ-UHFFFAOYSA-N 0.000 description 1
- IKRARXXOLDCMCX-UHFFFAOYSA-N butyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCCC IKRARXXOLDCMCX-UHFFFAOYSA-N 0.000 description 1
- VFGRALUHHHDIQI-UHFFFAOYSA-N butyl 2-hydroxyacetate Chemical compound CCCCOC(=O)CO VFGRALUHHHDIQI-UHFFFAOYSA-N 0.000 description 1
- JDJWQETUMXXWPD-UHFFFAOYSA-N butyl 2-methoxypropanoate Chemical compound CCCCOC(=O)C(C)OC JDJWQETUMXXWPD-UHFFFAOYSA-N 0.000 description 1
- WVBJXEYRMVIDFD-UHFFFAOYSA-N butyl 2-propoxyacetate Chemical compound CCCCOC(=O)COCCC WVBJXEYRMVIDFD-UHFFFAOYSA-N 0.000 description 1
- BMOACRKLCOIODC-UHFFFAOYSA-N butyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCCCC BMOACRKLCOIODC-UHFFFAOYSA-N 0.000 description 1
- NPCIWFUNUUCNOM-UHFFFAOYSA-N butyl 3-propoxypropanoate Chemical compound CCCCOC(=O)CCOCCC NPCIWFUNUUCNOM-UHFFFAOYSA-N 0.000 description 1
- 229940043232 butyl acetate Drugs 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 125000004230 chromenyl group Chemical group O1C(C=CC2=CC=CC=C12)* 0.000 description 1
- WCZVZNOTHYJIEI-UHFFFAOYSA-N cinnoline Chemical compound N1=NC=CC2=CC=CC=C21 WCZVZNOTHYJIEI-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- UTBIMNXEDGNJFE-UHFFFAOYSA-N collidine Natural products CC1=CC=C(C)C(C)=N1 UTBIMNXEDGNJFE-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- NHAQFLFLZGBOBG-UHFFFAOYSA-N decan-3-yl prop-2-enoate Chemical compound CCCCCCCC(CC)OC(=O)C=C NHAQFLFLZGBOBG-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- IEPRKVQEAMIZSS-AATRIKPKSA-N diethyl fumarate Chemical compound CCOC(=O)\C=C\C(=O)OCC IEPRKVQEAMIZSS-AATRIKPKSA-N 0.000 description 1
- WYACBZDAHNBPPB-UHFFFAOYSA-N diethyl oxalate Chemical compound CCOC(=O)C(=O)OCC WYACBZDAHNBPPB-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- HPYNZHMRTTWQTB-UHFFFAOYSA-N dimethylpyridine Natural products CC1=CC=CN=C1C HPYNZHMRTTWQTB-UHFFFAOYSA-N 0.000 description 1
- 125000005879 dioxolanyl group Chemical group 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000005745 ethoxymethyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])* 0.000 description 1
- SVBSJWKYFYUHTF-UHFFFAOYSA-N ethyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCC SVBSJWKYFYUHTF-UHFFFAOYSA-N 0.000 description 1
- HMONIZCCNGYDDJ-UHFFFAOYSA-N ethyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCC HMONIZCCNGYDDJ-UHFFFAOYSA-N 0.000 description 1
- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- UHKJHMOIRYZSTH-UHFFFAOYSA-N ethyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OCC UHKJHMOIRYZSTH-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
- JLEKJZUYWFJPMB-UHFFFAOYSA-N ethyl 2-methoxyacetate Chemical compound CCOC(=O)COC JLEKJZUYWFJPMB-UHFFFAOYSA-N 0.000 description 1
- WHRLOJCOIKOQGL-UHFFFAOYSA-N ethyl 2-methoxypropanoate Chemical compound CCOC(=O)C(C)OC WHRLOJCOIKOQGL-UHFFFAOYSA-N 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- ZXONMBCEAFIRDT-UHFFFAOYSA-N ethyl 2-propoxyacetate Chemical compound CCCOCC(=O)OCC ZXONMBCEAFIRDT-UHFFFAOYSA-N 0.000 description 1
- LLACVNYOVGHAKH-UHFFFAOYSA-N ethyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCC LLACVNYOVGHAKH-UHFFFAOYSA-N 0.000 description 1
- NPOWVOHXJFVDTR-UHFFFAOYSA-N ethyl 4-[2-(2-bromophenyl)-1-[2-(2-bromophenyl)-4,5-bis(4-ethoxycarbonylphenyl)imidazol-2-yl]-5-(4-ethoxycarbonylphenyl)imidazol-4-yl]benzoate Chemical compound C1=CC(C(=O)OCC)=CC=C1C1=NC(N2C(=C(N=C2C=2C(=CC=CC=2)Br)C=2C=CC(=CC=2)C(=O)OCC)C=2C=CC(=CC=2)C(=O)OCC)(C=2C(=CC=CC=2)Br)N=C1C1=CC=C(C(=O)OCC)C=C1 NPOWVOHXJFVDTR-UHFFFAOYSA-N 0.000 description 1
- LJUJMKJGPIXNAK-UHFFFAOYSA-N ethyl 4-[2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-bis(4-ethoxycarbonylphenyl)imidazol-2-yl]-5-(4-ethoxycarbonylphenyl)imidazol-4-yl]benzoate Chemical compound C1=CC(C(=O)OCC)=CC=C1C1=NC(N2C(=C(N=C2C=2C(=CC=CC=2)Cl)C=2C=CC(=CC=2)C(=O)OCC)C=2C=CC(=CC=2)C(=O)OCC)(C=2C(=CC=CC=2)Cl)N=C1C1=CC=C(C(=O)OCC)C=C1 LJUJMKJGPIXNAK-UHFFFAOYSA-N 0.000 description 1
- FKIRSCKRJJUCNI-UHFFFAOYSA-N ethyl 7-bromo-1h-indole-2-carboxylate Chemical compound C1=CC(Br)=C2NC(C(=O)OCC)=CC2=C1 FKIRSCKRJJUCNI-UHFFFAOYSA-N 0.000 description 1
- 229940093499 ethyl acetate Drugs 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical class OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 125000002541 furyl group Chemical group 0.000 description 1
- 229960004275 glycolic acid Drugs 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000000852 hydrogen donor Substances 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N hydrogen peroxide Substances OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 125000003387 indolinyl group Chemical group N1(CCC2=CC=CC=C12)* 0.000 description 1
- 125000001041 indolyl group Chemical group 0.000 description 1
- 229940119545 isobornyl methacrylate Drugs 0.000 description 1
- KQNPFQTWMSNSAP-UHFFFAOYSA-M isobutyrate Chemical compound CC(C)C([O-])=O KQNPFQTWMSNSAP-UHFFFAOYSA-M 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 125000000904 isoindolyl group Chemical group C=1(NC=C2C=CC=CC12)* 0.000 description 1
- 125000002183 isoquinolinyl group Chemical group C1(=NC=CC2=CC=CC=C12)* 0.000 description 1
- 125000001786 isothiazolyl group Chemical group 0.000 description 1
- CDOSHBSSFJOMGT-UHFFFAOYSA-N linalool Chemical compound CC(C)=CCCC(C)(O)C=C CDOSHBSSFJOMGT-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- QBVBLLGAMALJGB-UHFFFAOYSA-N methyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OC QBVBLLGAMALJGB-UHFFFAOYSA-N 0.000 description 1
- AVVSSORVCLNBOS-UHFFFAOYSA-N methyl 2-propoxyacetate Chemical compound CCCOCC(=O)OC AVVSSORVCLNBOS-UHFFFAOYSA-N 0.000 description 1
- VBCSBEIIIFLVQV-UHFFFAOYSA-N methyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OC VBCSBEIIIFLVQV-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- DMHHINXESLPPMV-UHFFFAOYSA-N methyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OC DMHHINXESLPPMV-UHFFFAOYSA-N 0.000 description 1
- LDTLDBDUBGAEDT-UHFFFAOYSA-N methyl 3-sulfanylpropanoate Chemical compound COC(=O)CCS LDTLDBDUBGAEDT-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- JIKUXBYRTXDNIY-UHFFFAOYSA-N n-methyl-n-phenylformamide Chemical compound O=CN(C)C1=CC=CC=C1 JIKUXBYRTXDNIY-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- LWNSNYBMYBWJDN-UHFFFAOYSA-N octyl 3-sulfanylpropanoate Chemical compound CCCCCCCCOC(=O)CCS LWNSNYBMYBWJDN-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000002971 oxazolyl group Chemical group 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- CSVRUJBOWHSVMA-UHFFFAOYSA-N oxolan-2-yl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCO1 CSVRUJBOWHSVMA-UHFFFAOYSA-N 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- QIWKUEJZZCOPFV-UHFFFAOYSA-N phenyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=CC=CC=C1 QIWKUEJZZCOPFV-UHFFFAOYSA-N 0.000 description 1
- WRAQQYDMVSCOTE-UHFFFAOYSA-N phenyl prop-2-enoate Chemical compound C=CC(=O)OC1=CC=CC=C1 WRAQQYDMVSCOTE-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 125000004592 phthalazinyl group Chemical group C1(=NN=CC2=CC=CC=C12)* 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- FKRCODPIKNYEAC-UHFFFAOYSA-N propionic acid ethyl ester Natural products CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 1
- LVDAGIFABMFXSJ-UHFFFAOYSA-N propyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCCC LVDAGIFABMFXSJ-UHFFFAOYSA-N 0.000 description 1
- GYOCIFXDRJJHPF-UHFFFAOYSA-N propyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCC GYOCIFXDRJJHPF-UHFFFAOYSA-N 0.000 description 1
- GXKPKHWZTLSCIB-UHFFFAOYSA-N propyl 2-ethoxypropanoate Chemical compound CCCOC(=O)C(C)OCC GXKPKHWZTLSCIB-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- CYIRLFJPTCUCJB-UHFFFAOYSA-N propyl 2-methoxypropanoate Chemical compound CCCOC(=O)C(C)OC CYIRLFJPTCUCJB-UHFFFAOYSA-N 0.000 description 1
- BMVTVMIDGMNRRR-UHFFFAOYSA-N propyl 2-propoxyacetate Chemical compound CCCOCC(=O)OCCC BMVTVMIDGMNRRR-UHFFFAOYSA-N 0.000 description 1
- YTUFRRBSSNRYID-UHFFFAOYSA-N propyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCCC YTUFRRBSSNRYID-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 125000000561 purinyl group Chemical group N1=C(N=C2N=CNC2=C1)* 0.000 description 1
- 125000004309 pyranyl group Chemical group O1C(C=CC=C1)* 0.000 description 1
- 125000003373 pyrazinyl group Chemical group 0.000 description 1
- 125000003226 pyrazolyl group Chemical group 0.000 description 1
- 125000002098 pyridazinyl group Chemical group 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 125000000714 pyrimidinyl group Chemical group 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 125000001422 pyrrolinyl group Chemical group 0.000 description 1
- 125000000168 pyrrolyl group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 125000002294 quinazolinyl group Chemical group N1=C(N=CC2=CC=CC=C12)* 0.000 description 1
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 description 1
- 125000004621 quinuclidinyl group Chemical group N12C(CC(CC1)CC2)* 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- GFYHSKONPJXCDE-UHFFFAOYSA-N sym-collidine Natural products CC1=CN=C(C)C(C)=C1 GFYHSKONPJXCDE-UHFFFAOYSA-N 0.000 description 1
- 150000003505 terpenes Chemical group 0.000 description 1
- OPQYOFWUFGEMRZ-UHFFFAOYSA-N tert-butyl 2,2-dimethylpropaneperoxoate Chemical compound CC(C)(C)OOC(=O)C(C)(C)C OPQYOFWUFGEMRZ-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 125000004306 triazinyl group Chemical group 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/04—Acids; Metal salts or ammonium salts thereof
- C08F220/06—Acrylic acid; Methacrylic acid; Metal salts or ammonium salts thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/32—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
- C08F220/325—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals containing glycidyl radical, e.g. glycidyl (meth)acrylate
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
- G03F7/0295—Photolytic halogen compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
- G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
Abstract
본 발명은 The present invention
〔A〕(a1) 에틸렌성 불포화 카르복실산 및(또는) 에틸렌성 불포화 카르복실산 무수물과 (a2) 다른 에틸렌성 불포화 화합물과의 공중합체, [A] a copolymer of (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic anhydride with (a2) another ethylenically unsaturated compound,
〔B〕에틸렌성 불포화 결합을 갖는 중합성 화합물, 및[B] a polymerizable compound having an ethylenically unsaturated bond, and
〔C〕O-아실옥심형 광 중합 개시제를 함유하는 것을 특징으로 하는 감광성 수지 조성물에 관한 것이다. (C) O-acyl oxime type photoinitiator It is related with the photosensitive resin composition characterized by the above-mentioned.
본 발명은 고감도이고 마스크 패턴의 설계 크기를 충실히 재현할 수 있으며, 기판과의 밀착성이 우수하고, 1,500 J/㎡ 이하의 노광량으로 충분한 스페이서 형상 및 막 두께를 얻는 것을 가능하게 하며, 강도, 내열성 등도 우수하고, 저노광량 영역에서의 스페이서의 형상, 막 두께의 제어성이 우수하며, 보존 기간 중, 사용 중에 이물질이 발생하기 어렵고, 공정 안정성, 경과 시간 안정성이 우수한 표시 패널용 스페이서를 형성할 수 있는 감광성 수지 조성물을 제공한다. The present invention is highly sensitive and faithfully reproduces the design size of the mask pattern, has excellent adhesion with the substrate, makes it possible to obtain a sufficient spacer shape and film thickness at an exposure amount of 1,500 J / m 2 or less, and also has strength, heat resistance, and the like. It is excellent in the shape of the spacer in the low exposure area and the controllability of the film thickness, it is difficult to generate foreign substances during use during the storage period, it is possible to form a spacer for a display panel excellent in process stability and elapsed time stability It provides a photosensitive resin composition.
감광성 수지 조성물, 표시 패널용 스페이서, 표시 패널 Photosensitive resin composition, spacer for display panels, display panel
Description
도 1은 패턴의 단면 형상을 예시하는 도면이다. 1 is a diagram illustrating a cross-sectional shape of a pattern.
본 발명은 감광성 수지 조성물, 표시 패널용 스페이서 및 표시 패널에 관한 것이다. 더욱 자세하게는, 액정 표시 패널이나 터치 패널 등의 표시 패널에 사용되는 스페이서를 형성하기 위한 재료로서 바람직한 감광성 수지 조성물, 상기 조성물로 형성된 표시 패널용 스페이서 및 상기 스페이서를 구비하여 이루어지는 표시 패널에 관한 것이다. The present invention relates to a photosensitive resin composition, a spacer for a display panel, and a display panel. More specifically, the present invention relates to a photosensitive resin composition, a display panel spacer formed from the composition, and a display panel comprising the spacer, which are suitable as a material for forming a spacer used in a display panel such as a liquid crystal display panel or a touch panel.
액정 표시 패널에는, 종래부터 2장의 기판 사이의 간격(셀 간격)을 일정하게 유지하기 위해 소정의 입경을 갖는 유리 비드, 플라스틱 비드 등의 스페이서 입자가 사용되고 있다. 이들 스페이서 입자는, 유리 기판 등의 투명 기판 상에 불규칙하게 산포되기 때문에, 화소 형성 영역에 스페이서 입자가 존재하면, 스페이서 입자가 찍혀 들어가는 현상이 발생하거나, 입사광이 산란을 받아 액정 패널의 콘트라스트가 저하한다는 문제가 있었다. In the liquid crystal display panel, spacer particles such as glass beads and plastic beads having a predetermined particle size have been conventionally used in order to maintain a constant gap (cell spacing) between two substrates. Since these spacer particles are irregularly dispersed on a transparent substrate such as a glass substrate, when the spacer particles are present in the pixel formation region, the phenomenon that the spacer particles are imprinted or the incident light is scattered causes the contrast of the liquid crystal panel to decrease. There was a problem.
그래서, 이들 문제를 해결하기 위해서, 스페이서를 포토리소그래피에 의해 형성하는 방법이 채용되어 왔다. 이 방법은, 감광성 수지 조성물을 기판 상에 도포하고, 소정의 마스크를 개재시켜 자외선을 노광한 후 현상하여, 도트상이나 줄무늬상의 스페이서를 형성하는 것이고, 화소 형성 영역 이외의 소정의 장소에만 스페이서를 형성할 수 있기 때문에, 상술한 바와 같은 문제는 기본적으로는 해결된다. Thus, in order to solve these problems, a method of forming a spacer by photolithography has been adopted. In this method, the photosensitive resin composition is applied onto a substrate, exposed to ultraviolet rays through a predetermined mask, and then developed to form a dot or stripe-shaped spacer, and the spacer is formed only at a predetermined place other than the pixel formation region. Since it is possible to solve the above problem, the above problem is basically solved.
그런데, 실제 스페이서 형성 공정, 예를 들면 컬러 필터 등에 사용되는 기판 상에 포토리소그래피에 의해 스페이서를 형성하는 경우에는, 근접(proximity) 노광기를 사용하는 경우가 많다. 이 근접 노광의 경우, 마스크와 감광성 수지 조성물을 도포한 기판 사이에 일정한 간격을 두어 노광하고 있고, 마스크 그대로의 패턴으로 노광되는 것이 이상적이다. 그러나, 상기 간격은 공기 또는 질소로 채워져 있고, 마스크의 개구부(투명부)를 통과한 빛이 상기 간격부에서 확산되어 퍼지기 때문에, 마스크 패턴의 설계 크기보다 넓게 노광된다는 문제가 있었다. By the way, when forming a spacer by photolithography on the board | substrate used for a real spacer formation process, for example, a color filter etc., a proximity exposure machine is often used. In this proximity exposure, it exposes at regular intervals between a mask and the board | substrate which apply | coated the photosensitive resin composition, and it is ideal to expose by the pattern of a mask as it is. However, since the gap is filled with air or nitrogen, and light passing through the opening (transparent portion) of the mask diffuses and spreads in the gap, there is a problem that it is exposed to a wider than the design size of the mask pattern.
그래서, 이러한 문제를 해결하기 위해, 본 출원인은 이미 일본 특허 공개 2001-261761호 공보에 감광성 조성물의 광 중합 개시제로서 1,2-옥탄디온-1-〔4-(페닐티오)페닐〕-2-(O-벤조일옥심)을 사용함으로써, 근접 노광에 의해서도 마스크 패턴의 설계 크기를 충실히 재현할 수 있으며, 강도, 내열성 등도 우수한 표시 패널용 스페이서를 형성할 수 있다는 것을 명백히 하고 있다. Thus, in order to solve this problem, the applicant has already disclosed in Japanese Patent Laid-Open No. 2001-261761 as 1,2-octanedione-1- [4- (phenylthio) phenyl] -2- as a photopolymerization initiator of a photosensitive composition. By using (O-benzoyl oxime), it is made clear that the design size of the mask pattern can be faithfully reproduced even by close exposure, and a display panel spacer excellent in strength, heat resistance and the like can be formed.
또한, 액정 표시 패널의 대형화에 따라, 셀 간격을 보다 정확하게 제어할 필요가 있지만, 스페이서용 감광성 조성물로 형성된 피막의 기판과의 밀착성이 불충분하면, 형성된 스페이서가 기판으로부터 어긋나 버리고, 결과적으로 셀 간격을 정 확하게 유지하는 것이 불가능해진다. 액정 표시 패널에서는, 화소의 높은 개구율화가 진행되고 있고, 그 결과 스페이서를 배치할 수 있는 블랙 매트릭스 영역의 면적도 점차 줄어들고 있다. 따라서, 스페이서가 어느 정도 화소 영역에 들어가더라도 화소의 색조를 손상하지 않도록 하기 위해서라도, 스페이서에는 보다 높은 투명성이 요구되고 있다. In addition, as the size of the liquid crystal display panel increases, it is necessary to control the cell spacing more accurately. However, if the adhesion of the film formed of the photosensitive composition for the spacer is insufficient, the formed spacers are deviated from the substrate. It will be impossible to keep accurate. In the liquid crystal display panel, the aperture ratio of the pixel is increasing, and as a result, the area of the black matrix region in which the spacer can be disposed is gradually decreasing. Therefore, even if the spacer enters the pixel region to some extent, higher transparency is required for the spacer, so as not to damage the color tone of the pixel.
그러나, 일본 특허 공개 2001-261761호 공보에 기재된 것도 포함하여, 스페이서의 형성에 사용되는 종래의 감광성 수지 조성물에서는 기판과의 밀착성 및 투명성의 면에서 여전히 충분하다고는 할 수 없고, 이들 특성도 겸비한 감광성 수지 조성물의 개발이 강하게 요망되고 있었다. However, in the conventional photosensitive resin composition used for the formation of a spacer, including the one disclosed in Japanese Unexamined Patent Application Publication No. 2001-261761, it is not always sufficient in terms of adhesiveness and transparency with a substrate, and also has photosensitive properties that combine these characteristics. The development of the resin composition was strongly desired.
또한, 최근 액정 표시 장치의 대면적화나 생산성의 향상 등으로부터 모(母)유리 기판의 대형화가 진행되고 있다. 종래의 기판 크기(680×880 mm 정도)에서는, 마스크 크기보다도 기판 크기가 작기 때문에, 일괄 노광 방식으로 대응이 가능하였다. Moreover, in recent years, enlargement of the mother glass substrate is progressing from the large area of a liquid crystal display device, the improvement of productivity, etc. In the conventional board | substrate size (about 680x880 mm), since a board | substrate size is smaller than a mask size, it was possible to respond by the batch exposure system.
그러나, 대형 기판(예를 들면, 1,500×1,800 mm 정도)에서는, 이 기판 크기와 동일한 정도의 마스크 크기를 제조하는 것은 거의 불가능하고, 일괄 노광 방식으로는 대응이 어렵다. 그래서 대형 기판 대응 노광 방식으로서, 스텝 노광 방식이 제창되고 있다. 그러나, 스텝 노광 방식에서는, 한 장의 기판에서 수회 노광하고, 그 때마다 위치 정렬, 스텝 이동에 요하는 시간이 발생한다. 스텝 노광 방식에서는, 일괄 노광 방식에 비해 작업 처리량 저감이 염려된다. 일괄 노광 방식에서는, 3,000 J/㎡정도의 노광 감도로 허용되고 있지만, 스텝 노광 방식에서는 노광 감도를 1,500 J/㎡ 이하로 하는 것이 요구되고 있다. 그러나, 기존의 재료로는 1,500 J/㎡ 이하의 노광량으로 충분한 스페이서 형상 및 막 두께를 얻는 것은 어렵다. However, in large substrates (e.g., about 1,500 x 1,800 mm), it is almost impossible to manufacture a mask size about the same as this substrate size, and it is difficult to cope with the batch exposure method. Therefore, the step exposure method is proposed as a large format board | substrate-adaptive exposure system. However, in the step exposure system, exposure is performed several times on one substrate, and time required for alignment and step movement occurs each time. In the step exposure method, a reduction in the throughput is feared compared to the batch exposure method. In the batch exposure method, the exposure sensitivity of about 3,000 J / m 2 is allowed, but in the step exposure method, the exposure sensitivity is required to be 1,500 J / m 2 or less. However, with existing materials, it is difficult to obtain a sufficient spacer shape and film thickness with an exposure amount of 1,500 J / m 2 or less.
또한, 스페이서의 형상, 막 두께의 제어성에 관한 요구값은 최근 점점 엄격해지고 있고, 스페이서를 형성할 때의 공정의 변동에 의한 형상, 막 두께의 변동, 조성물 용액의 경시적 변화에 따른 형상, 막 두께의 안정성에 관해서 과제를 남기고 있었다. 특히 1,500 J/㎡ 이하의 노광량 영역에서 노광량에 대한 스페이서의 형상, 막 두께의 제어성에 관해서 과제를 남기고 있었다. In addition, the requirements regarding the shape of the spacer and the controllability of the film thickness have become increasingly stringent in recent years, and the shape caused by the variation of the process when forming the spacer, the variation in the film thickness, the shape due to the change of the composition solution over time, the film The problem remained about the stability of the thickness. In particular, in the exposure range of 1,500 J / m <2> or less, the subject remained about the controllability of the shape of a spacer with respect to an exposure amount, and a film thickness.
또한, 최근 액정 표시 패널 제조에 사용되는 감광성 수지 조성물은 보존 기간, 사용 중에 조성물 중의 성분이 결정화하는 것 등에 의해 이물질이 발생하여 장치를 오염시키는 등 문제가 심각화되고 있어, 이러한 문제가 저감된 감광성 수지 조성물이 요망되고 있었다. In addition, recently, the photosensitive resin composition used in the manufacture of liquid crystal display panels has a serious problem such as contamination of the device due to foreign matters due to the storage period, crystallization of components in the composition during use, and the like. A composition was desired.
그래서, 본 발명의 과제는 고감도이고 마스크 패턴의 설계 크기를 충실히 재현할 수 있으며, 기판과의 밀착성이 우수하고, 1,500 J/㎡ 이하의 노광량으로 충분한 스페이서 형상 및 막 두께를 얻는 것을 가능하게 하며, 강도, 내열성 등도 우수하고, 저노광량 영역에서의 스페이서의 형상, 막 두께의 제어성이 우수하며, 보존 기간 중, 사용 중에 이물질이 발생하기 어렵고, 공정 안정성, 경과 시간 안정성이 우수한 표시 패널용 스페이서를 형성할 수 있는 감광성 수지 조성물, 표시 패널용 스페이서 및 표시 패널을 제공하는 것에 있다. Therefore, the problem of the present invention is that it is highly sensitive and can faithfully reproduce the design size of the mask pattern, has excellent adhesion with the substrate, and makes it possible to obtain a sufficient spacer shape and film thickness with an exposure amount of 1,500 J / m 2 or less, A display panel spacer that is excellent in strength, heat resistance, and the like, and has excellent controllability in the shape and thickness of the spacer in a low exposure area, is unlikely to generate foreign substances during use during storage, and has excellent process stability and elapsed time stability. It is providing the photosensitive resin composition, spacer for display panels, and display panel which can be formed.
본 발명에 의하면, 상기 과제는 첫번째로 According to the present invention, the problem is first
〔A〕(a1) 에틸렌성 불포화 카르복실산 및(또는) 에틸렌성 불포화 카르복실산 무수물과 (a2) 다른 에틸렌성 불포화 화합물과의 공중합체, [A] a copolymer of (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic anhydride with (a2) another ethylenically unsaturated compound,
〔B〕에틸렌성 불포화 결합을 갖는 중합성 화합물, 및[B] a polymerizable compound having an ethylenically unsaturated bond, and
〔C〕하기 화학식 1 또는 2로 표시되는 화합물을 포함하는 광 중합 개시제를 함유하는 것을 특징으로 하는 감광성 수지 조성물 (이하, "감광성 수지 조성물 (가)"라 함)에 의해서 달성된다. (C) It is achieved by the photosensitive resin composition (henceforth "photosensitive resin composition (a)") containing the photoinitiator containing the compound represented by following formula (1) or (2).
식 중, R1은 탄소수 1 내지 20의 알킬기, 탄소수 3 내지 8의 시클로알킬기 또는 페닐기이고, R2와 R3은 각각 수소 원자, 탄소수 1 내지 20의 알킬기, 탄소수 3 내지 8의 시클로알킬기, 치환 또는 미치환된 페닐기 또는 탄소수 7 내지 20의 지환족기(단, 탄소수 7 내지 8의 시클로알킬기는 제외함)이며, 상기 치환 페닐기의 치환기는 탄소수 1 내지 6의 알킬기, 탄소수 1 내지 6의 알콕시기, 페닐기 또는 할로겐 원자이고, R4는 탄소수 4 내지 20의 산소 함유 복소환기, 탄소수 4 내지 20의 질 소 함유 복소환기 또는 탄소수 4 내지 20의 황 함유 복소환기이며, R5는 수소, 탄소수 1 내지 12의 알킬기 또는 탄소수 1 내지 12의 알콕실기이고, n은 1 내지 5의 정수이며, m은 0 내지 5의 정수이고, n+m≤5이다, In formula, R <1> is a C1-C20 alkyl group, a C3-C8 cycloalkyl group, or a phenyl group, R <2> and R <3> is a hydrogen atom, a C1-C20 alkyl group, a C3-C8 cycloalkyl group, substitution Or an unsubstituted phenyl group or an alicyclic group having 7 to 20 carbon atoms (excluding a cycloalkyl group having 7 to 8 carbon atoms), and the substituent of the substituted phenyl group is an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, A phenyl group or a halogen atom, R 4 is an oxygen containing heterocyclic group having 4 to 20 carbon atoms, a nitrogen containing heterocyclic group having 4 to 20 carbon atoms, or a sulfur containing heterocyclic group having 4 to 20 carbon atoms, and R 5 is hydrogen or 1 to 12 carbon atoms; Is an alkyl group or an alkoxyl group having 1 to 12 carbon atoms, n is an integer of 1 to 5, m is an integer of 0 to 5, n + m ≤ 5,
식 중, R1, R2, R3, R4, R5, m 및 n의 정의는 상기와 동일하고, l은 0 내지 6의 정수이다.In formula, the definition of R <1> , R <2> , R <3> , R <4> , R <5> , m, and n is the same as the above, and l is an integer of 0-6.
본 발명에 의하면, 상기 과제는 두번째로 감광성 수지 조성물 (가)로 형성된 표시 패널용 스페이서에 의해서 달성된다. According to this invention, the said subject is achieved by the spacer for display panels formed by the photosensitive resin composition (a) for the second time.
본 발명에 의하면, 상기 과제는 세번째로 상기 표시 패널용 스페이서를 구비하여 이루어지는 표시 패널에 의해서 달성된다. According to the present invention, the above object is thirdly achieved by a display panel including the display panel spacer.
<발명을 실시하기 위한 최선의 형태> Best Mode for Carrying Out the Invention
이하, 본 발명에 대해서 상세히 설명한다. EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail.
감광성 수지 조성물 (가)Photosensitive Resin Composition (A)
-공중합체〔A〕-Copolymer [A]-
감광성 수지 조성물 (가)에서의〔A〕성분은 (a1) 에틸렌성 불포화 카르복실 산 및(또는) 에틸렌성 불포화 카르복실산 무수물과 (a2) 다른 에틸렌성 불포화 화합물과의 공중합체(이하, "공중합체〔A〕"라 함)를 포함한다. Component [A] in the photosensitive resin composition (A) is a copolymer of (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic anhydride with (a2) other ethylenically unsaturated compounds (hereinafter, " Copolymer [A] ").
공중합체〔A〕를 구성하는 각 성분 중, (a1) 에틸렌성 불포화 카르복실산 및(또는) 에틸렌성 불포화 카르복실산 무수물(이하, 이들을 통합하여 "불포화 카르복실산계 단량체 (a1)"이라 함)로는, 예를 들면 아크릴산, 메타크릴산, 크로톤산, 2-메타크릴로일옥시에틸숙신산, 2-메타크릴로일옥시에틸헥사히드로프탈산과 같은 모노카르복실산; 말레산, 푸마르산, 시트라콘산, 메사콘산, 이타콘산과 같은 디카르복실산; 상기 디카르복실산의 무수물류 등을 들 수 있다. Among the components constituting the copolymer [A], (a1) ethylenically unsaturated carboxylic acid and / or ethylenically unsaturated carboxylic anhydride (hereinafter, collectively referred to as "unsaturated carboxylic acid monomer (a1)") )), For example, monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, 2-methacryloyloxyethyl succinic acid, 2-methacryloyloxyethyl hexahydrophthalic acid; Dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid and itaconic acid; Anhydrides of the said dicarboxylic acid, etc. are mentioned.
이들 불포화 카르복실산계 단량체 (a1) 중, 공중합 반응성, 얻어지는 공중합체의 알칼리 수용액에 대한 용해성 및 입수가 용이하다는 점에서, 아크릴산, 메타크릴산, 말레산 무수물 등이 바람직하다. Among these unsaturated carboxylic acid monomers (a1), acrylic acid, methacrylic acid, maleic anhydride and the like are preferred in view of easy copolymerization reactivity and solubility in an aqueous alkali solution of the resulting copolymer.
감광성 수지 조성물 (가)에서, 불포화 카르복실산계 단량체 (a1)은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. In the photosensitive resin composition (A), an unsaturated carboxylic acid monomer (a1) can be used individually or in mixture of 2 or more types.
공중합체〔A〕에서, 불포화 카르복실산계 단량체 (a1)로부터 유래되는 반복 단위의 함유율은 바람직하게는 5 내지 50 중량%, 더욱 바람직하게는 10 내지 40 중량%, 특히 바람직하게는 15 내지 30 중량%이다. 불포화 카르복실산계 단량체 (a1)로부터 유래되는 반복 단위의 함유율이 5 중량% 미만이면, 알칼리 수용액에 대한 용해성이 저하하는 경향이 있고, 한편 50 중량%를 초과하면, 알칼리 수용액에 대한 용해성이 지나치게 커질 우려가 있다.In the copolymer [A], the content of the repeating unit derived from the unsaturated carboxylic acid monomer (a1) is preferably 5 to 50% by weight, more preferably 10 to 40% by weight, particularly preferably 15 to 30% by weight. %to be. When the content rate of the repeating unit derived from an unsaturated carboxylic acid monomer (a1) is less than 5 weight%, there exists a tendency for the solubility to aqueous alkali solution to fall, and when it exceeds 50 weight%, the solubility to aqueous alkali solution will become large too much. There is concern.
또한, (a2) 다른 에틸렌성 불포화 화합물로는, 에폭시기 함유 에틸렌성 불포 화 화합물(이하, "에폭시기 함유 단량체"라 함) 및 그것 이외의 에폭시기를 갖지 않는 다른 에틸렌성 불포화 화합물(이하, 간단히 "다른 단량체"라 함)이 바람직하게 사용된다. 이들은 단독으로 또는 조합하여 사용된다. 에폭시기 함유 단량체로는, 예를 들면 아크릴산글리시딜, 아크릴산 2-메틸글리시딜, 아크릴산 3,4-에폭시부틸, 아크릴산 6,7-에폭시헵틸, 아크릴산 3,4-에폭시시클로헥실과 같은 아크릴산에폭시알킬에스테르; 메타크릴산글리시딜, 메타크릴산 2-메틸글리시딜, 메타크릴산 3,4-에폭시부틸, 메타크릴산 6,7-에폭시헵틸, 메타크릴산 3,4-에폭시시클로헥실과 같은 메타크릴산에폭시알킬에스테르; α-에틸아크릴산글리시딜, α-n-프로필아크릴산글리시딜, α-n-부틸아크릴산글리시딜, α-에틸아크릴산 6,7-에폭시헵틸과 같은 α-알킬아크릴산에폭시알킬에스테르; o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르와 같은 글리시딜에테르류를 들 수 있다. In addition, (a2) as another ethylenically unsaturated compound, an epoxy group containing ethylenically unsaturated compound (henceforth "epoxy group containing monomer"), and another ethylenically unsaturated compound which does not have an epoxy group other than it (henceforth a "other Monomers "are preferably used. These are used alone or in combination. Examples of the epoxy group-containing monomers include epoxy acrylates such as glycidyl acrylate, 2-methylglycidyl acrylate, 3,4-epoxybutyl acrylate, 6,7-epoxyheptyl acrylate, and 3,4-epoxycyclohexyl acrylate. Alkyl esters; Meta such as glycidyl methacrylate, 2-methylglycidyl methacrylate, 3,4-epoxybutyl methacrylate, 6,7-epoxyheptyl methacrylate, 3,4-epoxycyclohexyl methacrylate Crylic acid epoxy alkyl ester; α-alkylacrylic acid epoxyalkyl esters such as α-ethyl acrylate glycidyl, α-n-propyl acrylate glycidyl, α-n-butyl acrylate glycidyl, α-ethyl acrylate 6,7-epoxyheptyl; and glycidyl ethers such as o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether and p-vinyl benzyl glycidyl ether.
이들 에폭시기 함유 단량체 중, 공중합 반응성 및 스페이서 강도의 면에서, 메타크릴산글리시딜, 메타크릴산 2-메틸글리시딜, 메타크릴산 6,7-에폭시헵틸, o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르 등이 바람직하다. Of these epoxy group-containing monomers, in terms of copolymerization reactivity and spacer strength, methacrylic acid glycidyl, methacrylic acid 2-methylglycidyl, methacrylic acid 6,7-epoxyheptyl, o-vinylbenzyl glycidyl ether , m-vinylbenzyl glycidyl ether, p-vinyl benzyl glycidyl ether and the like are preferable.
감광성 수지 조성물 (가)에서, 에폭시기 함유 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. In the photosensitive resin composition (A), an epoxy group containing monomer can be used individually or in mixture of 2 or more types.
공중합체〔A〕에서, 에폭시기 함유 단량체로부터 유래되는 반복 단위의 함유율은, 바람직하게는 10 내지 70 중량%, 더욱 바람직하게는 20 내지 60 중량%, 특히 바람직하게는 30 내지 50 중량%이다. 에폭시기 함유 단량체로부터 유래되는 반복 단위의 함유율이 10 중량% 미만이면, 얻어지는 스페이서의 강도가 저하하는 경향이 있고, 한편 70 중량%를 초과하면, 얻어지는 공중합체의 보존 안정성이 저하하는 경향이 있다. In the copolymer [A], the content rate of the repeating unit derived from an epoxy group containing monomer becomes like this. Preferably it is 10 to 70 weight%, More preferably, it is 20 to 60 weight%, Especially preferably, it is 30 to 50 weight%. When the content rate of the repeating unit derived from an epoxy group containing monomer is less than 10 weight%, the intensity | strength of the spacer obtained tends to fall, and when it exceeds 70 weight%, there exists a tendency for the storage stability of the copolymer obtained to fall.
또한, (a2) 에틸렌성 불포화 화합물인 다른 단량체로는, 예를 들면 아크릴산메틸, 아크릴산 i-프로필 등의 아크릴산알킬에스테르류; 메타크릴산메틸, 메타크릴산에틸, 메타크릴산 n-부틸, 메타크릴산 sec-부틸, 메타크릴산 t-부틸과 같은 메타크릴산알킬에스테르; 아크릴산시클로헥실, 아크릴산 2-메틸시클로헥실, 아크릴산트리시클로[5.2.1.02,6]데칸-8-일, 아크릴산 2-(트리시클로[5.2.1.02,6]데칸-8-일옥시)에틸, 아크릴산이소보로닐과 같은 아크릴산 지환식 에스테르; 메타크릴산시클로헥실, 메타크릴산 2-메틸시클로헥실, 메타크릴산트리시클로[5.2.1.02,6]데칸-8-일, 메타크릴산 2-(트리시클로[5.2.1.02,6]데칸-8-일옥시)에틸, 메타크릴산이소보로닐과 같은 메타크릴산 지환식 에스테르; 아크릴산페닐, 아크릴산벤질과 같은 아크릴산의 아릴에스테르 또는 아랄킬에스테르; 메타크릴산페닐, 메타크릴산벤질과 같은 메타크릴산의 아릴에스테르 또는 아랄킬에스테르; 말레산디에틸, 푸마르산디에틸, 이타콘산디에틸과 같은 디카르복실산디알킬에스테르; 메타크릴산 2-히드록시에틸, 메타크릴산 2-히드록시프로필과 같은 메타크릴산히드록시알킬에스테르; 메타크릴산테트라히드로푸르푸릴, 메타크릴산테트라히드로푸릴, 메타크릴산테트라히드로피란-2-메틸과 같은 산소 한 원자를 포함하는 불포화 복소 오원환 및 육원환 메타크릴산에스테르; 스티렌, α-메틸스티렌, m-메틸스티렌, p-메틸스티렌, p-메톡시스티렌과 같 은 비닐 방향족 화합물; 1,3-부타디엔, 이소프렌, 2,3-디메틸-1,3-부타디엔과 같은 공액 디엔계 화합물 및 아크릴로니트릴, 메타크릴로니트릴, 아크릴아미드, 메타크릴아미드, 염화비닐, 염화비닐리덴, 아세트산비닐 등을 들 수 있다. Moreover, as another monomer which is (a2) ethylenically unsaturated compound, For example, alkyl acrylates, such as methyl acrylate and i-propyl acrylate; Alkyl methacrylates such as methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, sec-butyl methacrylate, and t-butyl methacrylate; Cyclohexyl acrylate, 2-methylcyclohexyl acrylate, tricyclo [5.2.1.0 2,6 ] decane-8-yl acrylate, 2- (tricyclo [5.2.1.0 2,6 ] decane-8-yloxy) ethyl acrylate Acrylic alicyclic esters such as isoboroyl acrylate; Cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, tricyclo methacrylate [5.2.1.0 2,6 ] decane-8-yl, 2- (tricyclo [5.2.1.0 2,6 ] methacrylate Methacrylic acid alicyclic esters such as decan-8-yloxy) ethyl, isobornyl methacrylate; Aryl esters or aralkyl esters of acrylic acid such as phenyl acrylate and benzyl acrylate; Aryl esters or aralkyl esters of methacrylic acid, such as phenyl methacrylate and benzyl methacrylate; Dicarboxylic acid dialkyl esters such as diethyl maleate, diethyl fumarate and diethyl itaconic acid; Methacrylic acid hydroxyalkyl esters such as 2-hydroxyethyl methacrylic acid and 2-hydroxypropyl methacrylic acid; Unsaturated hetero five-membered and six-membered methacrylic acid esters containing one atom of oxygen such as tetrahydrofurfuryl methacrylate, tetrahydrofuryl methacrylate, tetrahydropyran-2-methyl methacrylate; Vinyl aromatic compounds such as styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, p-methoxystyrene; Conjugated diene compounds such as 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene and acrylonitrile, methacrylonitrile, acrylamide, methacrylamide, vinyl chloride, vinylidene chloride, acetic acid Vinyl and the like.
이들 다른 단량체 중, 공중합 반응성 및 얻어지는 공중합체의 알칼리 수용액에 대한 용해성의 면에서, 아크릴산 2-메틸시클로헥실, 메타크릴산 t-부틸, 메타크릴산트리시클로[5.2.1.02,6]데칸-8-일, 스티렌, p-메톡시스티렌, 메타크릴산테트라히드로푸르푸릴, 1,3-부타디엔 등이 바람직하다. Among these other monomers, 2-methylcyclohexyl acrylate, t-butyl methacrylate and tricyclo [5.2.1.0 2,6 ] decane- in terms of copolymerization reactivity and solubility in an aqueous alkali solution of the resulting copolymer. 8-yl, styrene, p-methoxystyrene, tetrahydrofurfuryl methacrylate, 1,3-butadiene and the like are preferred.
감광성 수지 조성물 (가)에서, 다른 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. In the photosensitive resin composition (A), another monomer can be used individually or in mixture of 2 or more types.
공중합체〔A〕에서, 다른 단량체로부터 유래되는 반복 단위의 함유율은 바람직하게는 10 내지 70 중량%, 더욱 바람직하게는 20 내지 50 중량%, 특히 바람직하게는 30 내지 50 중량%이다. 다른 단량체로부터 유래되는 반복 단위의 함유율이 10 중량% 미만이면, 얻어지는 공중합체의 보존 안정성이 저하하는 경향이 있고, 한편 70 중량%를 초과하면, 얻어지는 공중합체의 알칼리 수용액에 대한 용해성이 저하하는 경향이 있다. In copolymer [A], the content rate of the repeating unit derived from another monomer becomes like this. Preferably it is 10-70 weight%, More preferably, it is 20-50 weight%, Especially preferably, it is 30-50 weight%. When the content rate of the repeating unit derived from another monomer is less than 10 weight%, there exists a tendency for the storage stability of the copolymer obtained to fall, and when it exceeds 70 weight%, the solubility with respect to the aqueous alkali solution of the copolymer obtained will fall. There is this.
공중합체〔A〕는, 카르복실기 및(또는) 카르복실산 무수물기와 에폭시기를 갖고 있고, 알칼리 수용액에 대하여 알맞은 용해성을 가짐과 동시에, 특별한 경화제를 병용하지 않아도 가열에 의해 용이하게 경화시킬 수 있는 것이고, 상기 공중합체를 함유하는 감광성 수지 조성물 (가)는, 현상할 때에 현상 잔여물 및 막의 감 소가 일어나지 않아, 소정 패턴의 스페이서를 용이하게 형성할 수 있다. The copolymer [A] has a carboxyl group and / or a carboxylic anhydride group and an epoxy group, has suitable solubility in aqueous alkali solution, and can be easily cured by heating without using a special curing agent in combination. The photosensitive resin composition (a) containing the said copolymer does not produce | generate the residue and film | membrane at the time of image development, and can form a spacer of a predetermined pattern easily.
공중합체〔A〕는, 예를 들면 불포화 카르복실산계 단량체 (a1), 에폭시기 함유 단량체 및(또는) 다른 단량체 (a2)를 적당한 용매 중 라디칼 중합 개시제의 존재하에서 중합함으로써 제조할 수 있다. Copolymer [A] can be produced by, for example, polymerizing an unsaturated carboxylic acid monomer (a1), an epoxy group-containing monomer and / or another monomer (a2) in the presence of a radical polymerization initiator in a suitable solvent.
공중합체 [A]의 제조에 사용되는 용매로는, 예를 들면 알코올, 에테르, 글리콜 에테르, 에틸렌글리콜 알킬에테르아세테이트, 디에틸렌글리콜, 디프로필렌글리콜, 프로필렌글리콜 모노알킬에테르, 프로필렌글리콜 알킬에테르아세테이트, 프로필렌글리콜 알킬에테르프로피오네이트, 방향족 탄화수소, 케톤, 에스테르 등을 들 수 있다. Examples of the solvent used in the preparation of the copolymer [A] include alcohols, ethers, glycol ethers, ethylene glycol alkyl ether acetates, diethylene glycol, dipropylene glycol, propylene glycol monoalkyl ethers, propylene glycol alkyl ether acetates, Propylene glycol alkyl ether propionate, aromatic hydrocarbons, ketones, esters and the like.
이들의 구체예로는, 알코올로서, 예를 들면 메탄올, 에탄올, 벤질알코올, 2-페닐에틸알코올, 3-페닐-1-프로판올 등; As these specific examples, As alcohol, For example, methanol, ethanol, benzyl alcohol, 2-phenylethyl alcohol, 3-phenyl- 1-propanol etc .;
에테르로서, 예를 들면 테트라히드로푸란 등; As the ether, for example, tetrahydrofuran and the like;
글리콜 에테르로서, 예를 들면 에틸렌글리콜 모노메틸에테르, 에틸렌글리콜 모노에틸에테르 등; As glycol ether, For example, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, etc .;
에틸렌글리콜 알킬에테르아세테이트로서, 예를 들면 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트, 에틸렌글리콜 모노부틸에테르아세테이트, 에틸렌글리콜 모노에틸에테르아세테이트 등; As ethylene glycol alkyl ether acetate, For example, methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, ethylene glycol monoethyl ether acetate, etc .;
디에틸렌글리콜로서, 예를 들면 디에틸렌글리콜 모노메틸에테르, 디에틸렌글리콜 모노에틸에테르, 디에틸렌글리콜 디메틸에테르, 디에틸렌글리콜 디에틸에테르, 디에틸렌글리콜 에틸메틸에테르 등; As diethylene glycol, For example, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, etc .;
디프로필렌글리콜로서, 예를 들면 디프로필렌글리콜 모노메틸에테르, 디프로필렌글리콜 모노에틸에테르, 디프로필렌글리콜 디메틸에테르, 디프로필렌글리콜 디에틸에테르, 디프로필렌글리콜 에틸메틸에테르 등; As dipropylene glycol, For example, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, dipropylene glycol ethyl methyl ether, etc .;
프로필렌글리콜 모노알킬에테르로서, 예를 들면 프로필렌글리콜 모노메틸에테르, 프로필렌글리콜 모노에틸에테르, 프로필렌글리콜 모노프로필에테르, 프로필렌글리콜 모노부틸에테르 등; As propylene glycol monoalkyl ether, For example, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, etc .;
프로필렌글리콜 알킬에테르아세테이트로서, 예를 들면 프로필렌글리콜 메틸에테르아세테이트, 프로필렌글리콜 에틸에테르아세테이트, 프로필렌글리콜 프로필에테르아세테이트, 프로필렌글리콜 부틸에테르아세테이트 등; As propylene glycol alkyl ether acetate, For example, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, propylene glycol butyl ether acetate, etc .;
프로필렌글리콜 알킬에테르프로피오네이트로서, 예를 들면 프로필렌글리콜 메틸에테르프로피오네이트, 프로필렌글리콜 에틸에테르프로피오네이트, 프로필렌글리콜 프로필에테르프로피오네이트, 프로필렌글리콜 부틸에테르프로피오네이트 등; As propylene glycol alkyl ether propionate, For example, propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol propyl ether propionate, propylene glycol butyl ether propionate, etc .;
방향족 탄화수소로서, 예를 들면 톨루엔, 크실렌 등; As an aromatic hydrocarbon, For example, toluene, xylene, etc .;
케톤으로서, 예를 들면 메틸에틸케톤, 시클로헥사논, 4-히드록시-4-메틸-2-펜타논 등; As a ketone, For example, methyl ethyl ketone, cyclohexanone, 4-hydroxy-4-methyl- 2-pentanone, etc .;
에스테르로서, 예를 들면 아세트산메틸, 아세트산에틸, 아세트산프로필, 아세트산부틸, 2-히드록시프로피온산에틸, 2-히드록시-2-메틸프로피온산메틸, 2-히드록시-2-메틸프로피온산에틸, 히드록시아세트산메틸, 히드록시아세트산에틸, 히드록시아세트산부틸, 락트산메틸, 락트산에틸, 락트산프로필, 락트산부틸, 3-히드록시프로피온산메틸, 3-히드록시프로피온산에틸, 3-히드록시프로피온산프로필, 3-히드 록시프로피온산부틸, 2-히드록시-3-메틸부탄산메틸, 메톡시아세트산메틸, 메톡시아세트산에틸, 메톡시아세트산프로필, 메톡시아세트산부틸, 에톡시아세트산메틸, 에톡시아세트산에틸, 에톡시아세트산프로필, 에톡시아세트산부틸, 프로폭시아세트산메틸, 프로폭시아세트산에틸, 프로폭시아세트산프로필, 프로폭시아세트산부틸, 부톡시아세트산메틸, 부톡시아세트산에틸, 부톡시아세트산프로필, 부톡시아세트산부틸, 2-메톡시프로피온산메틸, 2-메톡시프로피온산에틸, 2-메톡시프로피온산프로필, 2-메톡시프로피온산부틸, 2-에톡시프로피온산메틸, 2-에톡시프로피온산에틸, 2-에톡시프로피온산프로필, 2-에톡시프로피온산부틸, 2-부톡시프로피온산메틸, 2-부톡시프로피온산에틸, 2-부톡시프로피온산프로필, 2-부톡시프로피온산부틸, 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-메톡시프로피온산프로필, 3-메톡시프로피온산부틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 3-에톡시프로피온산프로필, 3-에톡시프로피온산부틸, 3-프로폭시프로피온산메틸, 3-프로폭시프로피온산에틸, 3-프로폭시프로피온산프로필, 3-프로폭시프로피온산부틸, 3-부톡시프로피온산메틸, 3-부톡시프로피온산에틸, 3-부톡시프로피온산프로필, 3-부톡시프로피온산부틸 등의 에스테르를 각각 들 수 있다. Examples of the esters include methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate and hydroxyacetic acid. Methyl, ethyl hydroxyacetate, butyl hydroxyacetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, 3-hydroxypropionate methyl, 3-hydroxypropionate, 3-hydroxypropionic acid propyl, 3-hydroxypropionic acid Butyl, 2-hydroxy-3-methyl butyrate, methyl methoxyacetate, ethyl methoxyacetate, methoxyacetic acid propyl, butyl acetate, ethoxyacetic acid, ethyl ethoxyacetate, ethoxyacetic acid propyl Butyl oxyacetate, methyl propoxyacetate, ethyl propoxyacetate, propyl propoxyacetate, butyl propoxyacetate, butoxyacetate Ethyl butoxy acetate, propyl butoxy acetate, butyl butoxy acetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate Ethyl 2-ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, ethyl 2-butoxypropionate, propyl 2-butoxypropionate, butyl 2-butoxypropionate, 3-methoxy methyl propionate, 3-methoxy ethylpropionate, 3-methoxy propylpropionate, 3-methoxy butyl propionate, 3-ethoxy propylpropionate, 3-ethoxy propylpropionate, 3-ethoxy propylpropionate, 3 Butyl ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, propyl 3-propoxypropionate, butyl 3-propoxypropionate, methyl 3-butoxypropionate, 3-butoxypropionic acid Butyl, can be given a 3-butoxy-propionic acid propyl, 3-butoxy-propionic acid butyl ester, etc., respectively.
이들 중에서, 에틸렌글리콜 알킬에테르아세테이트, 디에틸렌글리콜, 디프로필렌글리콜, 프로필렌글리콜 모노알킬에테르, 프로필렌글리콜 알킬에테르아세테이트가 바람직하고, 이 중에서, 디에틸렌글리콜 디메틸에테르, 디에틸렌글리콜 에틸메틸에테르, 디프로필렌글리콜 디메틸에테르, 디프로필렌글리콜 에틸메틸에테르, 프로필렌글리콜 메틸에테르, 프로필렌글리콜 메틸에테르아세테이트가 특히 바람직 하다. Among these, ethylene glycol alkyl ether acetate, diethylene glycol, dipropylene glycol, propylene glycol monoalkyl ether and propylene glycol alkyl ether acetate are preferred, and among these, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, and dipropylene. Glycol dimethyl ether, dipropylene glycol ethyl methyl ether, propylene glycol methyl ether and propylene glycol methyl ether acetate are particularly preferred.
상기 용매는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said solvent can be used individually or in mixture of 2 or more types.
또한, 상기 중합에 사용되는 라디칼 중합 개시제로는, 특별히 한정되는 것은 아니고, 예를 들면 2,2'-아조비스이소부티로니트릴, 2,2'-아조비스-(2,4-디메틸발레로니트릴), 2,2'-아조비스-(4-메톡시-2,4-디메틸발레로니트릴), 4,4'-아조비스(4-시아노발레르산), 디메틸2,2'-아조비스(2-메틸프로피오네이트), 2,2'-아조비스(4-메톡시-2,4-디메틸발레로니트릴)과 같은 아조 화합물; 벤조일퍼옥시드, 라우로일퍼옥시드, t-부틸퍼옥시피발레이트, 1,1-비스(t-부틸퍼옥시)시클로헥산과 같은 유기 과산화물; 과산화수소 등을 들 수 있다. 또한, 라디칼 중합 개시제로서 과산화물을 사용하는 경우에는, 그것과 환원제를 병용하여 산화 환원형 개시제로 하여도 좋다. Moreover, as a radical polymerization initiator used for the said superposition | polymerization, it does not specifically limit, For example, 2,2'- azobisisobutyronitrile, 2,2'- azobis- (2, 4- dimethylvalero Nitrile), 2,2'-azobis- (4-methoxy-2,4-dimethylvaleronitrile), 4,4'-azobis (4-cyanovaleric acid), dimethyl2,2'-azo Azo compounds such as bis (2-methylpropionate) and 2,2'-azobis (4-methoxy-2,4-dimethylvaleronitrile); Organic peroxides such as benzoyl peroxide, lauroyl peroxide, t-butylperoxy pivalate, 1,1-bis (t-butylperoxy) cyclohexane; Hydrogen peroxide and the like. In addition, when using a peroxide as a radical polymerization initiator, you may use it and a reducing agent together as a redox type initiator.
이들 라디칼 중합 개시제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These radical polymerization initiators can be used individually or in mixture of 2 or more types.
이와 같이 하여 얻어진 공중합체〔A〕는 용액 그대로 감광성 수지 조성물의 제조에 제공하여도, 또한 용액으로부터 분리하여 감광성 수지 조성물의 제조에 제공하여도 좋다. The copolymer [A] thus obtained may be used as it is for the production of the photosensitive resin composition or may be separated from the solution and used for the production of the photosensitive resin composition.
공중합체〔A〕의 겔 투과 크로마토그래피(GPC)에 의한 폴리스티렌 환산 중량 평균 분자량(이하, "Mw"라 함)은, 바람직하게는 2,000 내지 100,000, 보다 바람직하게는 5,000 내지 50,000이다. Mw가 2,000 미만이면, 얻어지는 피막의 현상성, 잔막율 등이 저하하거나, 패턴 형상, 내열성 등이 손상될 우려가 있고, 한편 100, 000을 초과하면, 해상도가 저하하거나, 패턴 형상이 손상될 우려가 있다. The polystyrene reduced weight average molecular weight (hereinafter referred to as "Mw") by the gel permeation chromatography (GPC) of the copolymer [A] is preferably 2,000 to 100,000, more preferably 5,000 to 50,000. If Mw is less than 2,000, developability, residual film ratio, etc. of the resulting film may be reduced, or pattern shape, heat resistance, etc. may be impaired. On the other hand, if Mw is more than 10,000, resolution may be reduced or pattern shape may be damaged. There is.
-중합성 화합물〔B〕-Polymerizable Compound [B]-
감광성 수지 조성물 (가)에서의〔B〕성분은, 에틸렌성 불포화 결합을 갖는 중합성 화합물(이하, "중합성 화합물〔B〕"라 함)을 포함한다. [B] component in the photosensitive resin composition (a) contains the polymeric compound (henceforth "polymerizable compound [B]") which has an ethylenically unsaturated bond.
중합성 화합물〔B〕로는 특별히 한정되는 것은 아니지만, 단관능, 2관능 또는 3관능 이상의 (메트)아크릴산에스테르가 중합성이 양호하고, 얻어지는 스페이서의 강도를 향상시킨다는 점에서 바람직하다. Although it does not specifically limit as a polymeric compound [B], The monofunctional, bifunctional, or trifunctional or more (meth) acrylic acid ester is preferable at the point which has good polymerizability and improves the intensity | strength of the spacer obtained.
단관능 (메트)아크릴산에스테르로는, 예를 들면 2-히드록시에틸아크릴레이트, 2-히드록시에틸메타크릴레이트, 디에틸렌글리콜 모노에틸에테르아크릴레이트, 디에틸렌글리콜 모노에틸에테르메타크릴레이트, 이소보로닐아크릴레이트, 이소보로닐메타크릴레이트, 3-메톡시부틸아크릴레이트, 3-메톡시부틸메타크릴레이트, 2-아크릴로일옥시에틸-2-히드록시프로필프탈레이트, 2-메타크릴로일옥시에틸-2-히드록시프로필프탈레이트 등을 들 수 있으며, 시판품으로서, 예를 들면 아로닉스 M-101, 동 M-111, 동 M-114(도아 고오세이(주)제); 카야라드(KAYARAD) TC-110S, 동 TC-120S(닛본 가야꾸(주)제); 비스코트 158, 동 2311(오사까 유우끼 가가꾸 고교(주)제) 등을 들 수 있다. As monofunctional (meth) acrylic acid ester, for example, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, diethylene glycol monoethyl ether acrylate, diethylene glycol monoethyl ether methacrylate, iso Boronyl acrylate, Isoboroyl methacrylate, 3-methoxybutyl acrylate, 3-methoxybutyl methacrylate, 2-acryloyloxyethyl-2-hydroxypropyl phthalate, 2-methacryl Royloxyethyl-2-hydroxypropyl phthalate etc. are mentioned, As a commercial item, For example, Aronix M-101, Copper M-111, Copper M-114 (made by Toagosei Co., Ltd.); KAYARAD TC-110S and TC-120S (manufactured by Nippon Kayaku Co., Ltd.); Biscot 158, East 2311 (The Osaka Yuki Kagaku Kogyo KK) etc. are mentioned.
또한, 2관능 (메트)아크릴산에스테르로는, 예를 들면 에틸렌글리콜 디아크릴레이트, 에틸렌글리콜 디메타크릴레이트, 디에틸렌글리콜 디아크릴레이트, 디에틸렌글리콜 디메타크릴레이트, 테트라에틸렌글리콜 디아크릴레이트, 테트라에틸렌글리콜 디메타크릴레이트, 1,6-헥산디올디아크릴레이트, 1,6-헥산디올디메타크릴레이 트, 1,9-노난디올디아크릴레이트, 1,9-노난디올디메타크릴레이트, 비스페녹시에탄올플루오렌디아크릴레이트, 비스페녹시에탄올플루오렌디메타크릴레이트 등을 들 수 있으며, 시판품으로서, 예를 들면 아로닉스 M-210, 동 M-240, 동 M-6200(도아 고오세이(주)제), 카야라드 HDDA, 동 HX-220, 동 R-604(닛본 가야꾸(주)제), 비스코트 260, 동 312, 동 335 HP(오사까 유우끼 가가꾸 고교(주)제) 등을 들 수 있다. Moreover, as bifunctional (meth) acrylic acid ester, For example, ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, tetraethylene glycol diacrylate, Tetraethyleneglycol Dimethacrylate, 1,6-hexanedioldiacrylate, 1,6-hexanedioldimethacrylate, 1,9-nonanedioldiacrylate, 1,9-nonanedioldimethacrylate And bisphenoxyethanol fluorene diacrylate, bisphenoxy ethanol fluorene dimethacrylate, and the like. Examples of commercially available products include Aronix M-210, Copper M-240, and Copper M-6200. (Product made in Toa Kosei Co., Ltd.), Kayarad HDDA, east HX-220, east R-604 (made in Nippon Kayaku Co., Ltd.), biscot 260, east 312, east 335HP (Osaka Yuuki Kagaku high school) Ltd.) etc. are mentioned.
또한, 3관능 이상의 (메트)아크릴산에스테르로는, 예를 들면 트리메틸올프로판트리아크릴레이트, 트리메틸올프로판트리메타크릴레이트, 펜타에리트리톨트리아크릴레이트, 펜타에리트리톨트리메타크릴레이트, 펜타에리트리톨테트라아크릴레이트, 펜타에리트리톨테트라메타크릴레이트, 디펜타에리트리톨펜타아크릴레이트, 디펜타에리트리톨펜타메타크릴레이트, 디펜타에리트리톨헥사아크릴레이트, 디펜타에리트리톨헥사메타크릴레이트, 트리(2-아크릴로일옥시에틸)포스페이트, 트리(2-메타크릴로일옥시에틸)포스페이트 등을 들 수 있다. Moreover, as (meth) acrylic acid ester more than trifunctional, for example, trimethylol propane triacrylate, trimethylol propane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetra Acrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, tri (2-acrylic) Royloxyethyl) phosphate, tri (2-methacryloyloxyethyl) phosphate, and the like.
특히 9관능 이상의 (메트)아크릴레이트는, 알킬렌 직쇄 및 지환 구조를 갖고, 2개 이상의 이소시아네이트기를 포함하는 화합물과 분자 내에 1개 이상의 수산기를 함유하는 3관능, 4관능 및 5관능의 (메트)아크릴레이트 화합물을 반응시켜 얻어지는 우레탄아크릴레이트 화합물을 들 수 있다. In particular, the 9- or more functional (meth) acrylate has an alkylene linear chain and an alicyclic structure, and is a trifunctional, tetrafunctional and 5-functional (meth) compound containing two or more isocyanate groups and one or more hydroxyl groups in the molecule. The urethane acrylate compound obtained by making an acrylate compound react is mentioned.
상기 시판품으로서, 예를 들면 아로닉스 M-309, 동 M-400, 동 M-405, 동 M-450, 동 M-7100, 동 M-8030, 동 M-8060, 동 TO-1450(도아 고오세이(주)제), 카야라드 TMPTA, 동 DPHA, 동 DPCA-20, 동 DPCA-30, 동 DPCA-60, 동 DPCA-120(닛본 가야꾸(주)제), 비스코트 295, 동 300, 동 360, 동 GPT, 동 3PA, 동 400(오사까 유우끼 가가꾸 고교(주)제) 등을 들 수 있다. 9관능 이상의 다관능 우레탄아크릴레이트의 시판품은, 예를 들면 뉴 프론티어 R-1150(이상, 다이이찌 고교 세이야꾸(주)제), 카야라드 DPHA-40H(이상, 닛본 가야꾸(주)제) 등을 들 수 있다. As said commercial item, for example, Aronix M-309, M-400, M-405, M-450, M-7100, M-8030, M-8060, TO-1450 (Doago) Ossei Co., Ltd.), Kayarard TMPTA, East DPHA, East DPCA-20, East DPCA-30, East DPCA-60, East DPCA-120 (made by Nippon Kayaku Co., Ltd.), Biscot 295, East 300, East 360, East GPT, East 3PA, East 400 (Osaka Yuuki Kagaku Kogyo Co., Ltd.) etc. are mentioned. Commercially available products of polyfunctional urethane acrylates having 9 or more functionalities include, for example, New Frontier R-1150 (above, Daiichi Kogyo Seiyaku Co., Ltd.), Kayarard DPHA-40H (above, Nippon Kayaku Co., Ltd.) Etc. can be mentioned.
이들 단관능, 2관능 또는 3관능 이상의 (메트)아크릴산에스테르 중, 3관능 이상의 (메트)아크릴산에스테르가 보다 바람직하고, 특히 트리메틸올프로판트리아크릴레이트, 펜타에리트리톨트리아크릴레이트, 펜타에리트리톨테트라아크릴레이트, 디펜타에리트리톨펜타아크릴레이트 및 디펜타에리트리톨헥사아크릴레이트가 바람직하다. Among these monofunctional, bifunctional or trifunctional or higher (meth) acrylic acid esters, trifunctional or higher (meth) acrylic acid esters are more preferable, and trimethylolpropane triacrylate, pentaerythritol triacrylate, and pentaerythritol tetraacrylic acid are particularly preferred. Preference, dipentaerythritol pentaacrylate, and dipentaerythritol hexaacrylate are preferred.
상기 단관능, 2관능 또는 3관능 이상의 (메트)아크릴산에스테르는 단독으로 또는 2종 이상을 조합하여 사용할 수 있다. The said monofunctional, bifunctional, or trifunctional or more than (meth) acrylic acid ester can be used individually or in combination of 2 or more types.
감광성 수지 조성물 (가)에서, 중합성 화합물〔B〕의 사용량은 공중합체〔A〕100 중량부에 대하여 바람직하게는 50 내지 140 중량부, 더욱 바람직하게는 60 내지 120 중량부이다. 중합성 화합물〔B〕의 사용량이 50 중량부 미만이면, 현상시에 현상 잔여물이 발생할 우려가 있고, 한편 140 중량부를 초과하면, 얻어지는 스페이서의 경도가 저하하는 경향이 있다. In the photosensitive resin composition (A), the usage-amount of a polymeric compound [B] becomes like this. Preferably it is 50-140 weight part, More preferably, it is 60-120 weight part with respect to 100 weight part of copolymers [A]. When the usage-amount of polymeric compound [B] is less than 50 weight part, there exists a possibility that image development residue may arise at the time of image development, and when it exceeds 140 weight part, there exists a tendency for the hardness of the spacer obtained to fall.
-광 중합 개시제〔C〕--Photoinitiator [C]-
감광성 수지 조성물 (가)에서의〔C〕성분은, O-아실옥심형 광 중합 개시제를 포함하고, 특히 상기 화학식 1 또는 2로 표시되는 화합물(이하, "광 중합 개시제〔C〕"라 함)이 바람직하다. [C] component in the photosensitive resin composition (A) contains an O-acyl oxime type photoinitiator, Especially the compound represented by the said General formula (1) or 2 (henceforth "photoinitiator [C]") This is preferred.
본 발명에서 말하는 광 중합 개시제란, 가시광선, 자외선, 원자외선, 하전 입자선, X선 등에 의한 노광에 의해 중합성 화합물〔B〕의 중합을 개시할 수 있는 활성종을 발생하는 성분을 의미한다. The photoinitiator as used in this invention means the component which generate | occur | produces the active species which can start superposition | polymerization of a polymeric compound [B] by exposure by visible light, an ultraviolet-ray, an ultraviolet-ray, a charged particle beam, X-rays, etc. .
상기 화학식 1 또는 2로 표시되는 "광 중합 개시제〔C〕"에서는, R1은 탄소수 1 내지 20의 알킬기, 탄소수 3 내지 8의 시클로알킬기 또는 페닐기이다. R2와 R3은 각각 수소 원자, 탄소수 1 내지 20의 알킬기, 탄소수 3 내지 8의 시클로알킬기, 치환 또는 미치환된 페닐기 또는 탄소수 7 내지 20의 지환족기(단 탄소수 7 내지 8의 시클로알킬기는 제외함)이다. 상기 치환 페닐기의 치환기는 탄소수 1 내지 6의 알킬기, 탄소수 1 내지 6의 알콕시기, 페닐기 및 할로겐 원자이다. 이들 치환기는 1 내지 5개일 수 있다. R4는 탄소수 4 내지 20의 산소 함유 복소환기, 탄소수 4 내지 20의 질소 함유 복소환기 또는 탄소수 4 내지 20의 황 함유 복소환기이다. R5는 수소, 탄소수 1 내지 12의 알킬기 또는 탄소수 1 내지 12의 알콕실기이다. n은 1 내지 5의 정수이고, m은 0 내지 5의 정수이며, n+m≤5이고, l은 0 내지 6의 정수이다. In "photoinitiator [C]" represented by the said Formula (1) or (2), R <1> is a C1-C20 alkyl group, a C3-C8 cycloalkyl group, or a phenyl group. R 2 and R 3 each represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, a substituted or unsubstituted phenyl group or an alicyclic group having 7 to 20 carbon atoms (with the exception of a cycloalkyl group having 7 to 8 carbon atoms). Is). The substituent of the substituted phenyl group is an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a phenyl group and a halogen atom. These substituents may be 1-5. R 4 is an oxygen containing heterocyclic group having 4 to 20 carbon atoms, a nitrogen containing heterocyclic group having 4 to 20 carbon atoms, or a sulfur containing heterocyclic group having 4 to 20 carbon atoms. R 5 is hydrogen, an alkyl group having 1 to 12 carbon atoms or an alkoxyl group having 1 to 12 carbon atoms. n is an integer of 1-5, m is an integer of 0-5, n + m <= 5, and l is an integer of 0-6.
화학식 1 또는 2에서 R1의 탄소수 1 내지 20의 알킬기는 직쇄상 또는 분지상의 알킬기일 수 있고, 그 구체예로는 예를 들면 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, sec-부틸기, t-부틸기, n-펜틸기, n-헥실기, n-헵틸기, n-옥틸기, n-노닐기, n-데실기, n-운데실기, n-도데실기를 들 수 있다. 탄소수 3 내지 8의 시클로알킬기로는, 예를 들면 시클로펜틸기, 시클로헥실기 등을 들 수 있다. In Formula 1 or 2, the alkyl group having 1 to 20 carbon atoms of R 1 may be a linear or branched alkyl group, and specific examples thereof include methyl group, ethyl group, n-propyl group, i-propyl group, n- Butyl group, sec-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, n-octyl group, n-nonyl group, n-decyl group, n-undecyl group, n- Dodecyl group is mentioned. As a C3-C8 cycloalkyl group, a cyclopentyl group, a cyclohexyl group, etc. are mentioned, for example.
또한, R2와 R3의 탄소수 1 내지 20의 알킬기는 직쇄상 또는 분지상일 수 있고, 그 구체예로는 예를 들면 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, sec-부틸기, t-부틸기, n-펜틸기, n-헥실기, n-헵틸기, n-옥틸기, n-노닐기, n-데실기, n-운데실기, n-도데실기를 들 수 있다. 탄소수 3 내지 8의 시클로알킬기로는, 예를 들면 시클로펜틸기, 시클로헥실기 등을 들 수 있다. Further, the alkyl group having 1 to 20 carbon atoms of R 2 and R 3 may be linear or branched, and specific examples thereof include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, sec-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, n-octyl group, n-nonyl group, n-decyl group, n-undecyl group, n-dodecyl group Can be mentioned. As a C3-C8 cycloalkyl group, a cyclopentyl group, a cyclohexyl group, etc. are mentioned, for example.
R2와 R3의 치환 페닐기의 치환기인 탄소수 1 내지 6의 알킬기는 직쇄상, 분지상 또는 환상일 수 있고, 그 구체예로는 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, sec-부틸기, t-부틸기, n-펜틸기, n-헥실기, 시클로펜틸기, 시클로헥실기 등을 들 수 있다. The alkyl group having 1 to 6 carbon atoms as a substituent of the substituted phenyl group of R 2 and R 3 may be linear, branched or cyclic, and specific examples thereof include methyl group, ethyl group, n-propyl group, i-propyl group, n- A butyl group, sec-butyl group, t-butyl group, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, etc. are mentioned.
또한, 탄소수 1 내지 6의 알콕시기는 직쇄상, 분지상 또는 환상일 수 있고, 그 구체예로는 메톡시기, 에톡시기, n-프로폭시기, i-프로폭시기, n-부톡시기, t-부톡시기 등을 들 수 있다. 할로겐 원자로는, 예를 들면 불소원자, 염소 원자 등을 들 수 있다. In addition, the alkoxy group having 1 to 6 carbon atoms may be linear, branched or cyclic, and specific examples thereof include methoxy group, ethoxy group, n-propoxy group, i-propoxy group, n-butoxy group, t- Butoxy group etc. are mentioned. As a halogen atom, a fluorine atom, a chlorine atom, etc. are mentioned, for example.
탄소수 7 내지 20의 지환족기(탄소수 7 내지 8의 시클로알킬기는 제외함)로는, 예를 들면 비시클로알킬기, 트리시클로알킬기, 스피로알킬기, tert-시클로알킬기, 테르펜 골격 함유기, 아다만틸 골격 함유기 등을 들 수 있다. Examples of the alicyclic group having 7 to 20 carbon atoms (excluding cycloalkyl groups having 7 to 8 carbon atoms) include bicycloalkyl group, tricycloalkyl group, spiroalkyl group, tert-cycloalkyl group, terpene skeleton-containing group, and adamantyl skeleton. And the like can be mentioned.
R4의 탄소수 4 내지 20의 질소 함유 복소환기, 탄소수 4 내지 20의 산소 함유 복소환기, 탄소수 4 내지 20의 황 함유 복소환기로는, 예를 들면 티오라닐기, 아제피닐기, 디히드로아제피닐기, 디옥솔라닐기, 트리아지닐기, 옥사티아닐기, 티 아졸릴기, 옥사디아지닐기, 디옥사인다닐기, 디티아나프탈레닐기, 푸라닐기, 티오페닐기, 피롤릴기, 옥사졸릴기, 이소옥사졸릴기, 티아졸릴기, 이소티아졸릴기, 피라졸릴기, 프라자닐기, 피라닐기, 피리디닐기, 피리다지닐기, 피리미딜기, 피라지닐기, 피롤리닐기, 모르포닐기, 피페라디닐기, 퀴누클리디닐기, 인돌릴기, 이소인돌릴기, 벤조푸라닐기, 벤조티오페닐기, 인돌리지닐기, 크로메닐기, 퀴놀리닐기, 이소퀴놀리닐기, 퓨리닐기, 퀴나졸리닐기, 신놀리닐기, 프탈라지닐기, 프테리디닐기, 카르바졸릴기, 아크리디닐기, 페난트리디닐기, 티옥산테닐기, 페나지닐기, 페노티아지닐기, 페녹사티닐기, 페녹사디닐기, 티안트레닐기, 테트라히드로푸라닐기, 테트라히드로피라닐기 등을 들 수 있다. 이들 중에서, 특히 테트라히드로푸라닐기, 테트라히드로피라닐기 등이 바람직하다. Examples of the nitrogen-containing heterocyclic group having 4 to 20 carbon atoms for R 4 , the oxygen-containing heterocyclic group having 4 to 20 carbon atoms, and the sulfur-containing heterocyclic group having 4 to 20 carbon atoms include, for example, a thioranyl group, an azepinyl group and a dihydroazinyl group. , Dioxolanyl group, triazinyl group, oxathinyl group, thiazolyl group, oxadiazinyl group, dioxadinyl group, dicianaphthalenyl group, furanyl group, thiophenyl group, pyrrolyl group, oxazolyl group, iso Oxazolyl, thiazolyl, isothiazolyl, pyrazolyl, prazanyl, pyranyl, pyridinyl, pyridazinyl, pyrimidyl, pyrazinyl, pyrrolinyl, morphonyl, piperadi Nilyl group, quinuclidinyl group, indolyl group, isoindolyl group, benzofuranyl group, benzothiophenyl group, indolinyl group, chromenyl group, quinolinyl group, isoquinolinyl group, purinyl group, quinazolinyl group, cinnoline Neyl group, phthalazinyl group, putridinyl group, carbazolyl group, acridi Group, and the like phenanthridine D group, thioxanthone te group, a phenacyl possess group, a group possess phenothiazine, page noksa T group, page noksa di group, Tian tray group, a tetrahydrofuranyl group, a tetrahydropyranyl group. Among these, tetrahydrofuranyl group, tetrahydropyranyl group, etc. are especially preferable.
R5의 탄소수 1 내지 12의 알킬기는 직쇄상, 분지상 또는 환상일 수 있고, 그 구체예로는 예를 들면 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, sec-부틸기, t-부틸기, n-펜틸기, n-헥실기, n-헵틸기, n-옥틸기, n-노닐기, n-데실기, n-운데실기, n-도데실기, 시클로펜틸기, 시클로헥실기 등을 들 수 있다. The alkyl group of 1 to 12 carbon atoms of R 5 may be linear, branched or cyclic, and specific examples thereof include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, sec- Butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, n-octyl group, n-nonyl group, n-decyl group, n-undecyl group, n-dodecyl group, cyclophene Tyl group, cyclohexyl group, etc. are mentioned.
또한, 탄소수 1 내지 12의 알콕시기도 직쇄상, 분지상 또는 환상일 수 있고, 그 구체예로는 메톡시기, 에톡시기, n-프로폭시기, i-프로폭시기, n-부톡시기, t- 부톡시, n-펜틸옥시기 등을 들 수 있다. In addition, alkoxy groups having 1 to 12 carbon atoms may be linear, branched or cyclic, and specific examples thereof include methoxy group, ethoxy group, n-propoxy group, i-propoxy group, n-butoxy group, t- Butoxy, n-pentyloxy group, etc. are mentioned.
R5로는, 이들 중에서 특히, 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, 메톡시기, 에톡시기가 바람직하다. As R <5> , among these, a methyl group, an ethyl group, n-propyl group, i-propyl group, n-butyl group, a methoxy group, and an ethoxy group are preferable especially.
n은 1인 것이 바람직하다. m은 0, 1, 2 중 어느 하나인 것이 바람직하고, 1인 것이 특히 바람직하고, l은 0, 1, 2 중 어느 하나인 것이 바람직하고, 1인 것이 특히 바람직하다. It is preferable that n is 1. It is preferable that m is any one of 0, 1, 2, It is especially preferable that it is 1, It is preferable that l is any of 0, 1, 2, It is especially preferable that it is 1.
이러한 화합물〔C〕의 구체예로는, As a specific example of such a compound [C],
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime);
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-2-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-2-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-3-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-3-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로푸라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydrofuranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-벤조일아세틸옥심); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-benzoylacetyloxime) ;
에타논, 1-[9-에틸-6-[2-메틸-4-(2,2-디메틸-1,3-디옥소라닐)메톡시벤조일]-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심) 등을 들 수 있다. Ethanone, 1- [9-ethyl-6- [2-methyl-4- (2,2-dimethyl-1,3-dioxoranyl) methoxybenzoyl] -9.H.-carbazol-3-yl ]-, 1- (O-acetyloxime), etc. are mentioned.
이들 중에서 특히 에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); 에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); 에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심); 에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심) 및 에타논, 1-[9-에틸-6-[2-메틸-4-(2,2-디메틸-1,3-디옥소라닐)메톡시벤조일]-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심)이 바람직하다. Among these, ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyl Oxime); Ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime); Ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- (O-acetyloxime) and Ethanone, 1- [9-ethyl-6- [2-methyl-4- (2,2-dimethyl-1,3-dioxoranyl) methoxybenzoyl] -9.H.-carbazol-3-yl ]-And 1- (O-acetyloxime) are preferred.
이들 광 중합 개시제〔C〕는 단독으로 또는 2종 이상 함께 사용할 수도 있다. These photoinitiators [C] can also be used individually or in combination of 2 or more types.
광 중합 개시제〔C〕로서 상기 화학식 1 이외의 O-아실옥심형 광 중합 개시제(이하, "광 중합 개시제〔C-2〕"라 함)도 병용할 수 있다. As a photoinitiator [C], O-acyl oxime type photoinitiators other than the said Formula (1) (henceforth "photoinitiator [C-2]") can also be used together.
이들 광 중합 개시제〔C-2〕의 구체예로는 1,2-옥타디온-1-[4-(페닐티오)페닐]-2-(O-벤조일옥심), 1,2-부탄디온-1-[4-(페닐티오)페닐]-2-(O-벤조일옥심), 1,2-부탄디온-1-[4-(페닐티오)페닐]-2-(O-아세틸옥심), 1,2-옥타디온-1-[4-(메틸티오)페닐]-2-(O-벤조일옥심), 1,2-옥타디온-1-[4-(페닐티오)페닐]-2-(O-(4-메틸벤조일옥심)) 등을 들 수 있다. 이들 중에서, 특히 1,2-옥타디온-1-[4-(페닐티오)페닐]-2-(O-벤조일옥심)이 바람직하다. 광 중합 개시제〔C-2〕는, 광 중합 개시제〔C〕의 30 중량% 이하로 사용하는 것이 바람직하다. Specific examples of these photoinitiators [C-2] include 1,2-octadione-1- [4- (phenylthio) phenyl] -2- (O-benzoyloxime) and 1,2-butanedione-1 -[4- (phenylthio) phenyl] -2- (O-benzoyloxime), 1,2-butanedione-1- [4- (phenylthio) phenyl] -2- (O-acetyloxime), 1, 2-octadione-1- [4- (methylthio) phenyl] -2- (O-benzoyloxime), 1,2-octadione-1- [4- (phenylthio) phenyl] -2- (O- (4-methylbenzoyl oxime)) etc. are mentioned. Among them, 1,2-octadione-1- [4- (phenylthio) phenyl] -2- (O-benzoyloxime) is particularly preferable. It is preferable to use photoinitiator [C-2] in 30 weight% or less of photoinitiator [C].
이들 광 중합 개시제〔C〕를 사용함으로써, 1,500 J/㎡ 이하의 노광량으로도 충분한 감도, 밀착성을 가진 스페이서를 얻는 것이 가능하다. By using these photoinitiators [C], it is possible to obtain the spacer which has sufficient sensitivity and adhesiveness with the exposure amount of 1,500 J / m <2> or less.
감광성 수지 조성물 (가)에서의 광 중합 개시제〔C〕의 사용량은, 중합성 화합물〔B〕100 중량부에 대하여 바람직하게는 1 내지 20 중량부, 더욱 바람직하게는 2 내지 15 중량부이다. 광 중합 개시제〔C〕의 사용량이 1 중량부 미만이면, 현상시의 잔막율이 저하하는 경향이 있고, 한편 20 중량부를 초과하면, 현상시에 미노광부의 알칼리성 현상액에 대한 용해성이 저하하는 경향이 있다. The amount of the photopolymerization initiator [C] in the photosensitive resin composition (A) is preferably 1 to 20 parts by weight, more preferably 2 to 15 parts by weight based on 100 parts by weight of the polymerizable compound [B]. If the amount of the photopolymerization initiator [C] is less than 1 part by weight, the remaining film ratio at the time of development tends to be lowered. On the other hand, if it exceeds 20 parts by weight, the solubility in the alkaline developer at the unexposed portion is decreased. have.
또한, 감광성 수지 조성물 (가)에서는, 광 중합 개시제〔C〕와 함께, O-아실옥심형 광 중합 개시제 이외의 다른 광 중합 개시제를 1종 이상 병용할 수 있다. In addition, in photosensitive resin composition (a), 1 or more types of photoinitiators other than O-acyl oxime type photoinitiator can be used together with photoinitiator [C].
상기 다른 광 중합 개시제로는, 예를 들면 비이미다졸계 화합물, 벤조인계 화합물, 아세토페논계 화합물, 벤조페논계 화합물, α-디케톤계 화합물, 다핵 퀴논 계 화합물, 크산톤계 화합물, 포스핀계 화합물, 트리아진계 화합물 등을 들 수 있다. 이들 중에서, 아세토페논계 화합물(이하, "(D) 성분"이라 하는 경우가 있음), 비이미다졸계 화합물(이하, "(E) 성분"이라 하는 경우가 있음)이 바람직하다. As said other photoinitiator, a biimidazole type compound, a benzoin type compound, an acetophenone type compound, a benzophenone type compound, the (alpha)-diketone type compound, a polynuclear quinone type compound, a xanthone type compound, a phosphine type compound, Triazine type compound etc. are mentioned. Among these, acetophenone compounds (hereinafter sometimes referred to as "(D) component") and nonimidazole compound (hereinafter referred to as "(E) component") are preferable.
(D) 성분: 아세토페논계 화합물(D) Component: Acetophenone-Based Compound
또한, 아세토페논계 화합물로는, 예를 들면 α-히드록시케톤계 화합물, α-아미노케톤계 화합물, 이들 이외의 화합물을 들 수 있다. Moreover, as an acetophenone type compound, the (alpha)-hydroxy ketone type compound, the (alpha)-amino ketone type compound, compounds other than these are mentioned, for example.
α-히드록시케톤계 화합물의 구체예로는, 1-페닐-2-히드록시-2-메틸프로판-1-온, 1-(4-i-프로필페닐)-2-히드록시-2-메틸프로판-1-온, 4-(2-히드록시에톡시) 페닐-(2-히드록시-2-프로필)케톤, 1-히드록시시클로헥실페닐케톤 등을 들 수 있다. α-아미노케톤계 화합물의 구체예로는, 2-메틸-1-[4-(메틸티오)페닐]-2-모르폴리노프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논-1,2-(4-메틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논-1 등을 들 수 있다. 이들 이외의 화합물의 구체예로는, 2,2-디메톡시아세토페논, 2,2-디에톡시아세토페논, 2,2-디메톡시-2-페닐아세토페논 등을 들 수 있다. Specific examples of the α-hydroxyketone compound include 1-phenyl-2-hydroxy-2-methylpropan-1-one and 1- (4-i-propylphenyl) -2-hydroxy-2-methyl Propan-1-one, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy-2-propyl) ketone, 1-hydroxycyclohexylphenyl ketone, etc. are mentioned. Specific examples of the α-aminoketone compound include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one and 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2- (4-methylbenzyl) -2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, etc. are mentioned. Specific examples of the compounds other than these include 2,2-dimethoxyacetophenone, 2,2-diethoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, and the like.
이들 아세토페논계 화합물은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These acetophenone type compounds can be used individually or in mixture of 2 or more types.
이들 아세토페논계 화합물을 사용함으로써, 감도, 스페이서 형상 및 압축 강도를 더욱 양호하게 하는 것이 가능하다. By using these acetophenone compounds, it is possible to further improve the sensitivity, the spacer shape and the compressive strength.
(E) 성분: 비이미다졸계 화합물(E) Component: Biimidazole Compound
비이미다졸계 화합물의 구체예로는, As a specific example of a biimidazole type compound,
2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole,
2,2'-비스(2-브로모페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-bis (2-bromophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole,
2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4,6-트리클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2,4,6-trichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2-브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2-bromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4-디브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2,4-dibromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4,6-트리브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 등을 들 수 있다. 2,2'-bis (2,4,6-tribromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole etc. are mentioned.
상기 비이미다졸계 화합물 중, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4,6-트리클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 등이 바람직하고, 특히 바람직하게는 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸이다. 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'- tetraphenyl- 1,2'- biimidazole, 2,2'-bis ( 2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4,6-trichlorophenyl) -4, 4 ', 5,5'-tetraphenyl-1,2'-biimidazole and the like are preferable, and particularly preferably 2,2'-bis (2,4-dichlorophenyl) -4,4', 5, 5'-tetraphenyl-1,2'-biimidazole.
상기 비이미다졸계 화합물은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said biimidazole type compound can be used individually or in mixture of 2 or more types.
이들 비이미다졸계 화합물을 사용함으로써, 감도, 해상도 및 밀착성을 더욱 양호하게 하는 것이 가능하다. By using these biimidazole type compounds, it is possible to further improve sensitivity, resolution, and adhesiveness.
또한, 비이미다졸계 화합물을 증감하기 위해, 디알킬아미노기를 갖는 지방족 또는 방향족계 화합물(이하, "증감제 [E-2]"라 하는 경우가 있음)을 사용할 수 있다. In addition, in order to sensitize the biimidazole compound, an aliphatic or aromatic compound having a dialkylamino group (hereinafter sometimes referred to as "sensitizer [E-2]") can be used.
상기 증감제 [E-2]의 구체예로는, 예를 들면 N-메틸디에탄올아민, 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논, p-디메틸아미노벤조산에틸, p-디메틸아미노벤조산 i-아밀 등을 들 수 있다. 이들 증감제 중, 4,4'-비스(디에틸아미노)벤조페논이 바람직하다. As a specific example of the sensitizer [E-2], for example, N-methyldiethanolamine, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone and p-dimethylaminobenzoic acid ethyl, p-dimethylaminobenzoic acid i-amyl, etc. are mentioned. Among these sensitizers, 4,4'-bis (diethylamino) benzophenone is preferable.
이들 증감제 [E-2]는 단독으로 또는 2종 이상을 사용할 수도 있다. These sensitizers [E-2] can be used individually or in combination of 2 or more types.
증감제 [E-2]의 사용량은 [A] 100 중량부에 대하여 바람직하게는 0.1 내지 50 중량부, 보다 바람직하게는 1 내지 20 중량부의 비율로 함유하고 있다. The amount of the sensitizer [E-2] to be used is preferably 0.1 to 50 parts by weight, more preferably 1 to 20 parts by weight with respect to 100 parts by weight of [A].
증감제 [E-2]의 양이 0.1 중량부 미만인 경우는 얻어지는 스페이서의 막이 감소하거나 패턴 형상 불량이 일어나는 경향이 있으며, 50 중량부를 초과하면, 마찬가지로 패턴 형상 불량이 일어나는 경향이 있다. When the amount of the sensitizer [E-2] is less than 0.1 part by weight, there is a tendency that the film of the spacer obtained is reduced or a pattern shape defect occurs. When the amount of the sensitizer [E-2] is exceeded, a pattern shape defect tends to occur similarly.
비이미다졸계 화합물을 사용하는 경우는, 추가로 수소 공여 화합물로서 티올계 화합물(이하, "티올계 화합물 [E-3]"이라 하는 경우가 있음)을 사용할 수 있다. 비이미다졸계 화합물은 디알킬아미노기를 갖는 벤조페논계 화합물에 의해서 증감되고, 비이미다졸계 화합물이 개열하여 이미다졸 라디칼을 발생한다. 이 경우, 높은 라디칼 중합 개시능은 발현되지 않고, 역테이퍼 형상과 같은 바람직하지 않은 형상이 되는 경우가 많다. 이 문제는, 비이미다졸계 화합물과 디알킬아미노기를 갖는 벤조페논계 화합물이 공존하는 계에 티올계 화합물 [E-3]을 첨가함으로써 완화된 다. 이미다졸 라디칼에 티올계 화합물로부터 수소 라디칼이 공여됨으로써, 중성인 이미다졸과 중합 개시능이 높은 황 라디칼을 가진 화합물이 발생한다. 이에 따라 역테이퍼 형상으로부터 보다 바람직한 순테이퍼 형상이 된다. In the case of using a biimidazole compound, a thiol compound (hereinafter sometimes referred to as "thiol compound [E-3]") can be used as the hydrogen donor compound. A biimidazole type compound is sensitized by the benzophenone type compound which has a dialkylamino group, and a biimidazole type compound cleaves and produces an imidazole radical. In this case, high radical polymerization initiation ability is not expressed, and in many cases, it becomes an undesirable shape like reverse taper shape. This problem is alleviated by adding thiol-based compound [E-3] to the system in which the biimidazole-based compound and the benzophenone-based compound having a dialkylamino group coexist. By donating a hydrogen radical from a thiol type compound to an imidazole radical, a compound having neutral imidazole and a sulfur radical having a high polymerization initiation capacity is generated. Thereby, a more preferable forward taper shape becomes from a reverse taper shape.
상기 티올계 화합물 [E-3]의 사용 비율은 화합물 [C] 100 중량부에 대하여 바람직하게는 0.1 내지 50 중량부, 보다 바람직하게는 1 내지 20 중량부의 비율로 함유하고 있다. 티올계 화합물 [E-3]의 양이 0.1 중량부 미만인 경우는 얻어지는 스페이서의 막이 감소하거나 패턴 형상 불량이 일어나는 경향이 있으며, 50 중량부를 초과하면, 마찬가지로 패턴 형상 불량이 일어나는 경향이 있다. The use ratio of the thiol-based compound [E-3] is preferably 0.1 to 50 parts by weight, more preferably 1 to 20 parts by weight with respect to 100 parts by weight of the compound [C]. When the amount of the thiol-based compound [E-3] is less than 0.1 part by weight, the film of the spacer obtained tends to decrease or a pattern shape defect occurs. When the amount of the thiol compound [E-3] exceeds 50 parts by weight, a pattern shape defect tends to occur.
그 구체예로서, 2-머캅토벤조티아졸, 2-머캅토벤조옥사졸, 2-머캅토벤조이미다졸, 2-머캅토-5-메톡시벤조티아졸, 2-머캅토-5-메톡시벤조이미다졸 등의 방향족계 티올, 3-머캅토프로피온산, 3-머캅토프로피온산메틸, 3-머캅토프로피온산에틸, 3-머캅토프로피온산옥틸 등의 지방족계 모노티올을 들 수 있다. 2관능 이상의 지방족 티올로서, 3,6-디옥사-1,8-옥탄디티올, 펜타에리트리톨테트라(머캅토아세테이트), 펜타에리트리톨테트라(3-머캅토프로피오네이트) 등을 들 수 있다. Specific examples thereof include 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzoimidazole, 2-mercapto-5-methoxybenzothiazole, 2-mercapto-5-meth And aliphatic monothiols such as aromatic thiols such as oxybenzoimidazole, 3-mercaptopropionic acid, methyl 3-mercaptopropionate, ethyl 3-mercaptopropionate and octyl 3-mercaptopropionate. Examples of the bifunctional or higher aliphatic thiol include 3,6-dioxa-1,8-octanedithiol, pentaerythritol tetra (mercaptoacetate), pentaerythritol tetra (3-mercaptopropionate), and the like. .
다른 광 중합 개시제의 사용 비율은 전체 광 중합 개시제 100 중량부에 대하여 바람직하게는 100 중량부 이하, 더욱 바람직하게는 80 중량부 이하, 특히 바람직하게는 60 중량부 이하이다. 이 경우, 다른 광 중합 개시제의 사용 비율이 100 중량부를 초과하면, 본 발명의 소기의 효과가 손상될 우려가 있다. The use ratio of another photoinitiator becomes like this. Preferably it is 100 weight part or less, More preferably, it is 80 weight part or less, Especially preferably, it is 60 weight part or less with respect to 100 weight part of all photoinitiators. In this case, when the use ratio of another photoinitiator exceeds 100 weight part, the desired effect of this invention may be impaired.
-첨가제--additive-
감광성 수지 조성물 (가)에는, 본 발명의 소기의 효과를 손상하지 않는 범위 내에서, 필요에 따라서 상기 성분 이외의 첨가제를 배합할 수도 있다.You may mix | blend additives other than the said component with the photosensitive resin composition (a) as needed in the range which does not impair the desired effect of this invention.
예를 들면, 도포성을 향상하기 위해서, 계면활성제를 배합할 수 있다. 그 계면활성제로는, 불소계 계면활성제 및 실리콘계 계면활성제를 바람직하게 사용할 수 있다. For example, in order to improve applicability | paintability, surfactant can be mix | blended. As the surfactant, fluorine-based surfactants and silicone-based surfactants can be preferably used.
불소계 계면활성제로는, 말단, 주쇄 및 측쇄 중 적어도 어느 하나의 부위에 플루오로알킬 또는 플루오로알킬렌을 갖는 화합물을 바람직하게 사용할 수 있다. 그 구체예로는, 1,1,2,2-테트라플루오로옥틸(1,1,2,2-테트라플루오로프로필)에테르, 1,1,2,2-테트라플루오로옥틸헥실에테르, 옥타에틸렌글리콜 디(1,1,2,2-테트라플루오로부틸)에테르, 헥사에틸렌글리콜(1,1,2,2,3,3-헥사플루오로펜틸)에테르, 옥타프로필렌글리콜 디(1,1,2,2-테트라플루오로부틸)에테르, 헥사프로필렌글리콜 디(1,1,2,2,3,3-헥사플루오로펜틸)에테르, 퍼플루오로도데실술폰산나트륨, 1,1,2,2,8,8,9,9,10,10-데카플루오로도데칸, 1,1,2,2,3,3-헥사플루오로데칸, 플루오로알킬벤젠술폰산나트륨, 플루오로알킬포스폰산나트륨, 플루오로알킬카르복실산나트륨, 플루오로알킬폴리옥시에틸렌에테르, 디글리세린테트라키스(플루오로알킬폴리옥시에틸렌에테르), 플루오로알킬암모늄요오다이도, 플루오로알킬베타인, 플루오로알킬폴리옥시에틸렌에테르, 퍼플루오로알킬폴리옥시에탄올, 퍼플루오로알킬알콕실레이트, 불소계 알킬에스테르 등을 들 수 있다. As the fluorine-based surfactant, a compound having fluoroalkyl or fluoroalkylene in at least one of terminal, main chain and side chain can be preferably used. Specific examples thereof include 1,1,2,2-tetrafluorooctyl (1,1,2,2-tetrafluoropropyl) ether, 1,1,2,2-tetrafluorooctylhexyl ether, and octa. Ethylene glycol di (1,1,2,2-tetrafluorobutyl) ether, hexaethylene glycol (1,1,2,2,3,3-hexafluoropentyl) ether, octapropylene glycol di (1,1 , 2,2-tetrafluorobutyl) ether, hexapropylene glycol di (1,1,2,2,3,3-hexafluoropentyl) ether, sodium perfluorododecyl sulfonate, 1,1,2, 2,8,8,9,9,10,10-decafluorododecane, 1,1,2,2,3,3-hexafluorodecane, sodium fluoroalkylbenzenesulfonate, sodium fluoroalkylphosphonate, Sodium fluoroalkyl carboxylate, fluoroalkyl polyoxyethylene ether, diglycerin tetrakis (fluoroalkyl polyoxyethylene ether), fluoroalkyl ammonium iodido, fluoroalkyl betaine, fluoroalkyl polyoxyethylene ether , Perfluoro Kill poly there may be mentioned oxy ethanol, perfluoroalkyl alkoxylates, fluorinated alkyl esters and the like.
또한, 이들 시판품으로는, 예를 들면 BM-1000, BM-1100(이상, 비엠 케미(BM CHEMIE)사제), 메가팩 F142D, 동 F172, 동 F173, 동 F183, 동 F178, 동 F191, 동 F471, 동 F476(이상, 다이닛본 잉크 가가꾸 고교(주)제), 플로라드 FC 170C, FC- 171, FC-430, FC-431(이상, 스미또모 쓰리엠(주)제), 서플론 S-112, 동 S-113, 동 S-131, 동 S-141, 동 S-145, 동 S-382, 동 SC-101, 동 SC-102, 동 SC-103, 동 SC-104, 동 SC-105, 동 SC-106(이상, 아사히 글래스(주)제), 에프톱 EF 301, 동 303, 동 352 (이상, 신아끼다 가세이(주)제), 부타젠트 FT-100, 동 FT-110, 동 FT-140A, 동 FT-150, 동 FT-250, 동 FT-251, 동 FTX-251, 동 FTX-218, 동 FT-300, 동 FT-310, 동 FT-400S(이상, (주)네오스제) 등을 들 수 있다. In addition, as these commercial items, for example, BM-1000, BM-1100 (above, BM CHEMIE), Megapack F142D, F172, F173, F183, F178, F191, F191, F471 , F476 (above, Dai Nippon Ink Chemical Co., Ltd.), Florard FC 170C, FC-171, FC-430, FC-431 (above, Sumitomo 3M Co., Ltd.), Suplon S- 112, S-113, S-131, S-141, S-145, S-382, SC-101, SC-102, SC-103, SC-104, SC- 105, east SC-106 (above, made by Asahi Glass Co., Ltd.), F-top EF 301, east 303, east 352 (above, made by Shinsei Kasei Co., Ltd.), butagent FT-100, east FT-110, East FT-140A, East FT-150, East FT-250, East FT-251, East FTX-251, East FTX-218, East FT-300, East FT-310, East FT-400S Neo's) etc. are mentioned.
또한, 실리콘계 계면활성제로는, 예를 들면 도레이 실리콘 DC3PA, 동 DC7PA, 동 SH11PA, 동 SH21PA, 동 SH28PA, 동 SH29PA, 동 SH30PA, 동 SH-190, 동 SH-193, 동 SZ-6032, 동 SF-8428, 동 DC-57, 동 DC-190(이상, 도레이·다우코닝·실리콘(주)제), TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, TSF-4452(이상, GE 도시바 실리콘(주)제) 등의 상품명으로 시판되고 있는 것을 들 수 있다. Moreover, as silicone type surfactant, Toray silicon DC3PA, copper DC7PA, copper SH11PA, copper SH21PA, copper SH28PA, copper SH29PA, copper SH30PA, copper SH-190, copper SH-193, copper SZ-6032, copper SF -8428, copper DC-57, copper DC-190 (above, made by Toray Dow Corning Silicon Co., Ltd.), TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, TSF-4452 What is marketed by brand names, such as GE Toshiba Silicone Co., Ltd., are mentioned above.
또한, 상기 이외의 계면활성제로는, 예를 들면 폴리옥시에틸렌라우릴에테르, 폴리옥시에틸렌스테아릴에테르, 폴리옥시에틸렌올레일에테르와 같은 폴리옥시에틸렌알킬에테르; 폴리옥시에틸렌 n-옥틸페닐에테르, 폴리옥시에틸렌 n-노닐페닐에테르와 같은 폴리옥시에틸렌아릴에테르; 폴리옥시에틸렌디라우레이트, 폴리옥시에틸렌디스테아레이트와 같은 폴리옥시에틸렌디알킬에스테르 등의 비이온계 계면활성제나, 시판품으로서, KP341(신에쯔 가가꾸 고(주)제), 폴리플로우 No. 57, 95(교에샤 유지 가가꾸 고교(주)제) 등을 들 수 있다. Moreover, as surfactant other than the above, For example, Polyoxyethylene alkyl ether, such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether; Polyoxyethylene aryl ethers such as polyoxyethylene n-octylphenyl ether and polyoxyethylene n-nonylphenyl ether; As nonionic surfactants, such as polyoxyethylene dialkyl ester, such as polyoxyethylene dilaurate and polyoxyethylene distearate, and a commercial item, KP341 (made by Shin-Etsu Chemical Co., Ltd.), polyflow No. . 57, 95 (manufactured by Kyoeisha Oil Chemical Industries, Ltd.) and the like.
이들 계면활성제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These surfactant can be used individually or in mixture of 2 or more types.
계면활성제의 배합량은, 공중합체〔A〕100 중량부에 대하여 바람직하게는 5 중량부 이하, 더욱 바람직하게는 2 중량부 이하이다. 이 경우, 계면활성제의 배합량이 5 중량부를 초과하면, 도포시에 막이 거칠어지기 쉬워지는 경향이 있다. The blending amount of the surfactant is preferably 5 parts by weight or less, more preferably 2 parts by weight or less based on 100 parts by weight of the copolymer [A]. In this case, when the compounding quantity of surfactant exceeds 5 weight part, it exists in the tendency for a film | membrane to become easy at the time of application | coating.
또한, 기체와의 밀착성을 더욱 향상시키기 위해서, 접착 보조제를 배합할 수 있다. Moreover, in order to further improve adhesiveness with a base | substrate, an adhesion | attachment adjuvant can be mix | blended.
상기 접착 보조제로는 관능성 실란 커플링제가 바람직하고, 그 예로는 카르복실기, 메타크릴로일기, 이소시아네이트기, 에폭시기 등의 반응성 관능기를 갖는 실란 커플링제를 들 수 있다. 보다 구체적으로는, 트리메톡시실릴벤조산, γ-메타크릴로일옥시프로필트리메톡시실란, 비닐트리아세톡시실란, 비닐트리메톡시실란, γ-이소시아네이트프로필트리에톡시실란, γ-글리시독시프로필트리메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란 등을 들 수 있다. As said adhesion | attachment adjuvant, a functional silane coupling agent is preferable, The silane coupling agent which has reactive functional groups, such as a carboxyl group, a methacryloyl group, an isocyanate group, an epoxy group, is mentioned as an example. More specifically, trimethoxysilyl benzoic acid, (gamma) -methacryloyloxypropyl trimethoxysilane, vinyl triacetoxysilane, vinyl trimethoxysilane, (gamma) -isocyanate propyl triethoxysilane, (gamma)-glycidoxy Propyl trimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, and the like.
이들 접착 보조제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These adhesion aids can be used individually or in mixture of 2 or more types.
접착 보조제의 배합량은 공중합체〔A〕100 중량부에 대하여 바람직하게는 20 중량부 이하, 더욱 바람직하게는 10 중량부 이하이다. 접착 보조제의 배합량이 20 중량부를 초과하면, 현상 잔여물이 발생하기 쉬워지는 경향이 있다. The compounding quantity of an adhesion | attachment adjuvant becomes like this. Preferably it is 20 weight part or less, More preferably, it is 10 weight part or less with respect to 100 weight part of copolymers [A]. When the compounding quantity of an adhesion | attachment adjuvant exceeds 20 weight part, there exists a tendency for image development residue to occur easily.
그 밖의 첨가제를 첨가할 수 있다. 이는 보존 안정성의 향상 등을 목적으로 하여 첨가된다. 구체적으로는, 황, 퀴논류, 히드로퀴논류, 폴리옥시 화합물, 아민, 니트로니트로소 화합물을 들 수 있다. 그 예로서, 4-메톡시페놀, N-니트로소-N-페닐히드록실아민알루미늄 등을 들 수 있다. 이들은 공중합체 [A] 100 중량부에 대하여 바람직하게는 3.0 중량부 이하, 보다 바람직하게는 0.001 내지 0.5 중량부로 사용된다. 3.0 중량부를 초과하는 경우는 충분한 감도가 얻어지지 않고, 패턴 형상이 악화한다. Other additives can be added. It is added for the purpose of improvement of storage stability, etc. Specifically, sulfur, quinones, hydroquinones, a polyoxy compound, an amine, a nitronitroso compound are mentioned. As the example, 4-methoxy phenol, N-nitroso-N-phenylhydroxylamine aluminum, etc. are mentioned. These are preferably used in an amount of 3.0 parts by weight or less, more preferably 0.001 to 0.5 parts by weight with respect to 100 parts by weight of the copolymer [A]. When it exceeds 3.0 weight part, sufficient sensitivity will not be acquired and a pattern shape will deteriorate.
또한, 내열성 향상을 위해 N-(알콕시메틸)글리콜 우릴 화합물, N-(알콕시메틸)멜라민 화합물 및 2관능 이상의 에폭시기를 1분자 중에 갖는 화합물을 첨가할 수 있다. 상기 N-(알콕시메틸)글리콜우릴 화합물의 구체예로는, N,N,N,N-테트라(메톡시메틸)글리콜우릴, N,N,N,N-테트라(에톡시메틸)글리콜우릴, N,N,N,N-테트라(n-프로폭시메틸)글리콜우릴, N,N,N,N-테트라(i-프로폭시메틸)글리콜우릴, N,N,N,N-테트라(n-부톡시메틸)글리콜우릴, N,N,N,N-테트라(t-부톡시메틸)글리콜우릴 등을 들 수 있다. 이들 중에서 특히 N,N,N,N-테트라(메톡시메틸)글리콜우릴이 바람직하다. 상기 N-(알콕시메틸)멜라민 화합물의 구체예로는, N,N,N,N,N,N-헥사(메톡시메틸)멜라민, N,N,N,N,N,N-헥사(에톡시메틸)멜라민, N,N,N,N,N,N-헥사(n-프로폭시메틸)멜라민, N,N,N,N,N,N-헥사(i-프로폭시메틸)멜라민, N,N,N,N,N,N-헥사(n-부톡시메틸)멜라민, N,N,N,N,N,N-헥사(t-부톡시메틸)멜라민 등을 들 수 있다. 이들 중에서 특히, N,N,N,N,N,N-헥사(메톡시메틸)멜라민이 바람직하다. 이들 시판품으로는, 니카락 N-2702, MW-30M(이상, 산와케미컬(주)제) 등을 들 수 있다. 2관능 이상의 에폭시기를 1분자 중에 갖는 화합물로는, 에틸렌글리콜 디글리시딜에테르, 디에틸렌글리콜 디글리시딜에테르, 폴리에틸렌글리콜 디글리시딜에테르, 프로필렌글리콜 디글리시딜에테르, 트리프로필렌글리콜 디글리시딜에테르, 폴리프로필렌글리콜 디글리시딜에테르, 네오펜틸글리콜 디글리시딜에테르, 1,6-헥산디올디글리시딜에테르, 글리세린디글리시딜에테르, 트리메틸올프로판트리글리시딜에테르, 수소 첨가 비스페놀 A 디글리시딜에테르, 비스페놀 A 디글리시딜에테르 등을 들 수 있다. 이들 시판품의 구체예로는, 에포라이트 40E, 에포라이트 100E, 에포라이트 200E, 에포라이트 70P, 에포라이트 200P, 에포라이트 400P, 에포라이트 40E, 에포라이트 1500NP, 에포라이트 1600, 에포라이트 80MF, 에포라이트 100MF, 에포라이트 4000, 에포라이트 3002(이상, 교에샤 가가꾸(주)제조) 등을 들 수 있다. 이들은 단독 또는 2종 이상의 조합으로 사용할 수 있다. In addition, a compound having an N- (alkoxymethyl) glycol uril compound, an N- (alkoxymethyl) melamine compound, and a bifunctional or higher epoxy group in one molecule can be added for improving heat resistance. Specific examples of the N- (alkoxymethyl) glycoluril compound include N, N, N, N-tetra (methoxymethyl) glycoluril, N, N, N, N-tetra (ethoxymethyl) glycoluril, N, N, N, N-tetra (n-propoxymethyl) glycoluril, N, N, N, N, N-tetra (i-propoxymethyl) glycoluril, N, N, N, N-tetra (n- Butoxymethyl) glycoluril, N, N, N, N-tetra (t-butoxymethyl) glycoluril, etc. are mentioned. Among them, N, N, N, N-tetra (methoxymethyl) glycoluril is particularly preferable. Specific examples of the N- (alkoxymethyl) melamine compound include N, N, N, N, N, N-hexa (methoxymethyl) melamine, N, N, N, N, N, N-hexa (e) Methoxymethyl) melamine, N, N, N, N, N, N-hexa (n-propoxymethyl) melamine, N, N, N, N, N, N-hexa (i-propoxymethyl) melamine, N , N, N, N, N, N-hexa (n-butoxymethyl) melamine, N, N, N, N, N, N-hexa (t-butoxymethyl) melamine and the like. Among them, N, N, N, N, N, N-hexa (methoxymethyl) melamine is particularly preferable. As these commercial items, Nikarak N-2702, MW-30M (above, Sanwa Chemical Co., Ltd. product), etc. are mentioned. Examples of the compound having a bifunctional or higher functional epoxy group in one molecule include ethylene glycol diglycidyl ether, diethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, and tripropylene glycol di. Glycidyl ether, polypropylene glycol diglycidyl ether, neopentyl glycol diglycidyl ether, 1,6-hexanediol diglycidyl ether, glycerin diglycidyl ether, trimethylol propane triglycidyl ether, Hydrogenated bisphenol A diglycidyl ether, Bisphenol A diglycidyl ether, etc. are mentioned. Specific examples of these commercially available products include epolite 40E, epolite 100E, epolite 200E, epolite 70P, epolite 200P, epolite 400P, epolite 40E, epolite 1500NP, epolite 1600, epolite 80MF, epolite 100MF, epolite 4000, epolite 3002 (above, Kyoesha Chemical Co., Ltd. make), etc. are mentioned. These can be used individually or in combination of 2 or more types.
조성물 용액Composition solution
감광성 수지 조성물 (가)는, 그 사용할 때에 바람직하게는 공중합체〔A〕, 중합성 화합물〔B〕, 광 중합 개시제〔C〕등의 구성 성분을 적당한 용제에 용해하여, 조성물 용액으로서 제조된다. When using the photosensitive resin composition (A), components, such as a copolymer [A], a polymeric compound [B], and a photoinitiator [C], are dissolved in a suitable solvent, and are manufactured as a composition solution.
상기 조성물 용액의 제조에 사용되는 용제로는, 감광성 수지 조성물 (가)를 구성하는 각 성분을 균일하게 용해하며, 각 성분과 반응하지 않는 것이 사용된다. As a solvent used for manufacture of the said composition solution, the thing which melt | dissolves each component which comprises the photosensitive resin composition (a) uniformly, and does not react with each component is used.
이러한 용매로는, 상술한 공중합체 [A]를 제조하기 위해서 사용할 수 있는 용매로서 예시한 것과 마찬가지의 것을 들 수 있다. As such a solvent, the thing similar to what was illustrated as a solvent which can be used in order to manufacture copolymer [A] mentioned above is mentioned.
이러한 용매 중, 각 성분의 용해성, 각 성분과의 반응성, 도막 형성의 용이함 등의 점에서, 예를 들면 알코올, 글리콜에테르, 에틸렌글리콜 알킬에테르아세테이트, 에스테르 및 디에틸렌글리콜이 바람직하게 사용된다. 이들 중에서, 예를 들면 벤질알코올, 2-페닐에틸알코올, 3-페닐-1-프로판올, 에틸렌글리콜 모노부틸에테르아세테이트, 디에틸렌글리콜 모노에틸에테르아세테이트, 디에틸렌글리콜 디에틸에테르, 디에틸렌글리콜 에틸메틸에테르, 디에틸렌글리콜 디메틸에테르, 프로필렌글리콜 모노메틸에테르, 프로필렌글리콜 모노메틸에테르아세테이트, 메톡시프로피 온산메틸, 에톡시프로피온산에틸이 특히 바람직하게 사용될 수 있다. Among these solvents, for example, alcohols, glycol ethers, ethylene glycol alkyl ether acetates, esters, and diethylene glycol are preferably used in view of solubility of each component, reactivity with each component, ease of coating film formation, and the like. Among them, for example, benzyl alcohol, 2-phenylethyl alcohol, 3-phenyl-1-propanol, ethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol diethyl ether, diethylene glycol ethylmethyl Ether, diethylene glycol dimethyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, methyl methoxy propionate, ethyl ethoxypropionate can be particularly preferably used.
또한 상기 용매와 함께 막 두께의 면내 균일성을 높이기 위해, 고비점 용매를 병용할 수도 있다. 병용할 수 있는 고비점 용매로는, 예를 들면 N-메틸포름아미드, N,N-디메틸포름아미드, N-메틸포름아닐리드, N-메틸아세트아미드, N,N-디메틸아세트아미드, N-메틸피롤리돈, 디메틸술폭시드, 벤질에틸에테르, 디헥실에테르, 아세토닐아세톤, 이소포론, 카프로산, 카프릴산, 1-옥탄올, 1-노난올, 아세트산벤질, 벤조산에틸, 옥살산디에틸, 말레산디에틸, γ-부티로락톤, 탄산에틸렌, 탄산프로필렌, 페닐셀로솔브아세테이트 등을 들 수 있다. 이들 중에서, N-메틸피롤리돈, γ-부티로락톤, N,N-디메틸아세트아미드가 바람직하다. Moreover, in order to raise the in-plane uniformity of a film thickness with the said solvent, you may use together a high boiling point solvent. As a high boiling point solvent which can be used together, N-methylformamide, N, N-dimethylformamide, N-methylformanilide, N-methylacetamide, N, N-dimethylacetamide, N-methyl, for example Pyrrolidone, dimethyl sulfoxide, benzyl ethyl ether, dihexyl ether, acetonyl acetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonanol, benzyl acetate, ethyl benzoate, diethyl oxalate, Diethyl maleate, gamma -butyrolactone, ethylene carbonate, propylene carbonate, phenyl cellosolve acetate, and the like. Among these, N-methylpyrrolidone, γ-butyrolactone, and N, N-dimethylacetamide are preferable.
이와 같이 제조된 조성물 용액은, 필요에 따라서 공경이 예를 들면 0.2 내지 0.5 ㎛ 정도인 밀리포어 필터 등에 의해 여과하여, 사용에 제공할 수 있다.The composition solution thus prepared can be filtered for use by a Millipore filter or the like having a pore size of, for example, about 0.2 to 0.5 µm, and used for use.
감광성 수지 조성물 (가)는 특히 액정 패널이나 터치 패널 등의 표시 패널용 스페이서를 형성하기 위한 재료로서 바람직하다. The photosensitive resin composition (A) is particularly suitable as a material for forming spacers for display panels such as liquid crystal panels and touch panels.
표시 패널용 For display panels 스페이서Spacer
감광성 수지 조성물 (가)를 사용하여 표시 패널용 스페이서를 형성할 때에는, 조성물 용액을 기판의 표면에 도포한 후, 예비 베이킹하여 용제를 제거함으로써 도막을 형성한다. When forming the spacer for display panels using the photosensitive resin composition (A), after apply | coating a composition solution to the surface of a board | substrate, it pre-bakes and removes a solvent and forms a coating film.
조성물 용액의 도포 방법으로는, 예를 들면 분무법, 롤 코팅법, 회전 도포법(스핀 코팅법), 슬릿다이 도포법, 바 도포법, 잉크젯 도포법 등의 적절한 방법을 채용할 수 있고, 특히 스핀 코팅법, 슬릿다이 도포법이 바람직하다. As a coating method of the composition solution, for example, a spraying method, a roll coating method, a spin coating method (spin coating method), a slit die coating method, a bar coating method, an inkjet coating method, or the like can be adopted, and in particular, spin The coating method and the slit die coating method are preferable.
또한, 예비 베이킹의 조건은 각 구성 성분의 종류, 배합 비율 등에 따라서도 다르지만, 예를 들면 70 내지 90 ℃에서 1 내지 15 분간 정도이다. In addition, although the conditions of prebaking differ also with kinds, mixing ratio, etc. of each structural component, it is about 1 to 15 minutes at 70-90 degreeC, for example.
계속해서, 예비 베이킹된 도막에 소정 패턴의 마스크를 개재시켜 노광하여 중합시킨 후, 현상액에 의해 현상하고, 불필요한 부분을 제거하여 패턴을 형성한다. Subsequently, it exposes and superpose | polymerizes through the prebaked coating film through the mask of a predetermined pattern, and develops with a developing solution, and removes an unnecessary part and forms a pattern.
노광에 사용되는 방사선으로는, 가시광선, 자외선, 원자외선, 하전 입자선, X선 등을 적당히 선택할 수 있지만, 파장이 190 내지 450 nm의 범위에 있는 방사선이 바람직하다. As radiation used for exposure, visible rays, ultraviolet rays, far ultraviolet rays, charged particle beams, X rays, and the like can be appropriately selected, but radiation having a wavelength in the range of 190 to 450 nm is preferable.
현상 방법으로는, 예를 들면 패들법, 침지법, 샤워법 등 중 어느 것도 좋고, 현상 시간은 통상 30 내지 180 초간이다. As a developing method, any of a paddle method, an immersion method, a shower method, etc. may be used, for example, and developing time is 30 to 180 second normally.
상기 현상액으로는, 예를 들면 수산화나트륨, 수산화칼륨, 탄산나트륨, 규산나트륨, 메타규산나트륨, 암모니아와 같은 무기 알칼리; 에틸아민, n-프로필아민과 같은 1급 아민; 디에틸아민, 디-n-프로필아민과 같은 2급 아민; 트리메틸아민, 메틸디에틸아민, 에틸디메틸아민, 트리에틸아민과 같은 3급 아민; 디메틸에탄올아민, 메틸디에탄올아민, 트리에탄올아민과 같은 3급 알칸올아민; 피롤, 피페리딘, N-메틸피페리딘, N-메틸피롤리딘, 1,8-디아자비시클로[5.4.0]-7-운데센, 1,5-디아자비시클로[4.3.0]-5-노넨과 같은 지환족 3급 아민; 피리딘, 콜리딘, 루티딘, 퀴놀린과 같은 방향족 3급 아민; 테트라메틸암모늄히드록시드, 테트라에틸암모늄히드록시드와 같은 4급 암모늄염 등의 알칼리성 화합물의 수용액을 사용할 수 있다. Examples of the developer include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate and ammonia; Primary amines such as ethylamine, n-propylamine; Secondary amines such as diethylamine, di-n-propylamine; Tertiary amines such as trimethylamine, methyldiethylamine, ethyldimethylamine, triethylamine; Tertiary alkanolamines such as dimethylethanolamine, methyldiethanolamine and triethanolamine; Pyrrole, piperidine, N-methylpiperidine, N-methylpyrrolidine, 1,8-diazabicyclo [5.4.0] -7-undecene, 1,5-diazabicyclo [4.3.0] Alicyclic tertiary amines such as -5-nonene; Aromatic tertiary amines such as pyridine, collidine, lutidine, quinoline; Aqueous solutions of alkaline compounds, such as quaternary ammonium salts, such as tetramethylammonium hydroxide and tetraethylammonium hydroxide, can be used.
또한, 상기 알칼리성 화합물의 수용액에는 메탄올, 에탄올 등의 수용성 유기 용매 및(또는) 계면활성제를 적당량 첨가할 수도 있다.In addition, an appropriate amount of a water-soluble organic solvent such as methanol and ethanol and / or a surfactant may be added to the aqueous solution of the alkaline compound.
현상 후, 예를 들면 유수 세정 등에 의해, 예를 들면 30 내지 90 초간 세정하여 불필요한 부분을 제거한 후, 압축 공기나 압축 질소를 분사시켜 건조시킴으로써 소정의 패턴이 형성된다. After the development, for example, by washing with running water or the like, for example, washing is performed for 30 to 90 seconds to remove unnecessary portions, and then a predetermined pattern is formed by blowing by blowing compressed air or compressed nitrogen.
그 후, 이 패턴을 핫 플레이트, 오븐 등의 가열 장치에 의해 소정 온도, 예를 들면 150 내지 250 ℃에서, 소정 시간, 핫 플레이트 상에서는 예를 들면 5 내지 30 분간, 오븐 중에서는 예를 들면 30 내지 90 분간 가열 처리함으로써, 목적으로 하는 스페이서를 얻을 수 있다. Then, this pattern is heated by a heating device such as a hot plate or an oven at a predetermined temperature, for example, 150 to 250 ° C., for a predetermined time and on the hot plate, for example, for 5 to 30 minutes, in the oven, for example, 30 to The target spacer can be obtained by heat-processing for 90 minutes.
본 발명의 감광성 수지 조성물 (가)는, 고감도이고 마스크 패턴의 설계 크기를 충실히 재현할 수 있으며, 기판과의 밀착성이 우수하고, 1,500 J/㎡ 이하의 노광량으로 충분한 스페이서 형상 및 막 두께를 얻는 것을 가능하게 하며, 강도, 내열성 등도 우수하고, 저노광량 영역에서의 스페이서의 형상, 막 두께의 제어성이 우수하며, 보존 기간 중, 사용 중에 이물질이 발생하기 어렵다. The photosensitive resin composition (a) of the present invention is highly sensitive and can faithfully reproduce the design size of the mask pattern, has excellent adhesion with the substrate, and obtain sufficient spacer shape and film thickness at an exposure amount of 1,500 J / m 2 or less. It is made possible, and also excellent in strength, heat resistance, etc., excellent in controllability of the shape and thickness of the spacer in the low exposure amount region, and foreign matter hardly occurs during use during the storage period.
<실시예> <Example>
이하에, 실시예 및 비교예를 나타내어 본 발명을 더욱 구체적으로 설명하지만, 본 발명이 이들 실시예로 한정되는 것은 아니다. Although an Example and a comparative example are shown to the following and this invention is demonstrated to it further more concretely, this invention is not limited to these Examples.
<합성예 1>Synthesis Example 1
냉각관, 교반기를 구비한 플라스크에 2,2'-아조비스(2,4-디메틸발레로니트릴) 5 중량부, 디에틸렌글리콜 메틸에틸에테르 200 중량부를 넣고, 계속해서 메타크릴산 18 중량부, 메타크릴산글리시딜 40 중량부, 스티렌 5 중량부, 메타크릴산트 리시클로[5.2.1.02,6]데칸-8-일 32 중량부를 넣고, 질소 치환한 후, 추가로 1,3-부타디엔 5 중량부를 넣고, 천천히 교반하면서 용액의 온도를 70 ℃로 상승시키고, 이 온도를 5 시간 동안 유지하며 중합시켜 공중합체〔A-1〕의 용액을 얻었다. 5 parts by weight of 2,2'-azobis (2,4-dimethylvaleronitrile) and 200 parts by weight of diethylene glycol methylethyl ether were added to a flask equipped with a cooling tube and a stirrer, followed by 18 parts by weight of methacrylic acid, 40 parts by weight of glycidyl methacrylate, 5 parts by weight of styrene, and 32 parts by weight of methacrylic acid tricyclo [5.2.1.0 2,6 ] decane-8-yl were substituted with nitrogen, followed by further 1,3-butadiene. 5 parts by weight was added and the temperature of the solution was raised to 70 ° C. while stirring slowly, and the polymerization was carried out while maintaining the temperature for 5 hours to obtain a solution of copolymer [A-1].
이 용액의 고형분 농도는 33.0 중량%이고, 공중합체〔A-1〕의 Mw는 11,000이었다. Solid content concentration of this solution was 33.0 weight%, and Mw of copolymer [A-1] was 11,000.
<합성예 2>Synthesis Example 2
냉각관, 교반기를 구비한 플라스크에 2,2'-아조비스(2,4-디메틸발레로니트릴) 7 중량부, 디에틸렌글리콜 메틸에틸에테르 200 중량부를 넣고, 계속해서 메타크릴산 15 중량부, 메타크릴산글리시딜 20 중량부, 메타크릴산 2-메틸글리시딜 25 중량부, 스티렌 5 중량부, 메타크릴산트리시클로[5.2.1.02,6]데칸-8-일 20 중량부, 메타크릴산테트라히드로푸르푸릴 10 중량부를 넣고, 질소 치환한 후, 추가로 1,3-부타디엔 5 중량부를 넣고, 천천히 교반하면서 용액의 온도를 70 ℃로 상승시키고, 이 온도를 5 시간 동안 유지하며 중합시켜 공중합체〔A-2〕의 용액을 얻었다. In a flask equipped with a cooling tube and a stirrer, 7 parts by weight of 2,2'-azobis (2,4-dimethylvaleronitrile), 200 parts by weight of diethylene glycol methylethyl ether were added, and then 15 parts by weight of methacrylic acid, 20 parts by weight of glycidyl methacrylate, 25 parts by weight of 2-methylglycidyl methacrylate, 5 parts by weight of styrene, 20 parts by weight of tricyclo [5.2.1.0 2,6 ] decane-8-yl, 10 parts by weight of tetrahydrofurfuryl methacrylate was added, followed by nitrogen substitution, and then 5 parts by weight of 1,3-butadiene was added, and the temperature of the solution was raised to 70 ° C. while stirring slowly, and the temperature was maintained for 5 hours. It superposed | polymerized and obtained the solution of copolymer [A-2].
이 용액의 고형분 농도는 33.4 중량%이고, 공중합체〔A-2〕의 Mw는 7,000이었다. Solid content concentration of this solution was 33.4 weight%, and Mw of the copolymer [A-2] was 7,000.
<합성예 3>Synthesis Example 3
냉각관, 교반기를 구비한 플라스크에 2,2'-아조비스(이소부티로니트릴) 5부, 디에틸렌글리콜 메틸에틸에테르 250부를 넣고, 계속해서 메타크릴산 10부, 2-메타크릴로일옥시에틸숙신산 30부, 메타크릴산 n-부틸 25부, 벤질메타크릴레이트 30부 를 넣고, 질소 치환한 후, 추가로 1,3-부타디엔 5 중량부를 넣고, 천천히 교반하면서 용액의 온도를 80 ℃로 상승시키고, 이 온도를 5 시간 동안 유지하며 중합함으로써 고형분 농도 28.0 중량%의 공중합체〔A-3〕의 용액을 얻었다. 얻어진 공중합체〔A-3〕의 Mw는 9,000이었다. 5 parts of 2,2'- azobis (isobutyronitrile) and 250 parts of diethylene glycol methylethyl ether were put into a flask equipped with a cooling tube and a stirrer, and then 10 parts of methacrylic acid and 2-methacryloyloxy 30 parts of ethyl succinic acid, 25 parts of n-butyl methacrylate and 30 parts of benzyl methacrylate were added thereto, and after nitrogen replacement, 5 parts by weight of 1,3-butadiene was further added, and the temperature of the solution was gradually decreased to 80 ° C. The solution was copolymerized while maintaining the temperature for 5 hours to obtain a solution of a copolymer [A-3] having a solid content concentration of 28.0 wt%. Mw of the obtained copolymer [A-3] was 9,000.
<실시예 1><Example 1>
조성물 용액의 제조Preparation of Composition Solution
공중합체〔A〕로서 합성예 1에서 얻은 공중합체〔A-1〕의 용액 100 중량부(고형분), 중합성 화합물〔B〕로서 카야라드 DPHA(닛본 가야꾸(주)제) 80 중량부, 광 중합 개시제〔C〕로서 에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심) 5 중량부를 고형분 농도가 35 중량%가 되도록 프로필렌글리콜 모노메틸에테르아세테이트에 용해한 후, 공경 0.2 ㎛의 밀리포어 필터로 여과하여 조성물 용액 (S-1)을 제조하였다. 100 parts by weight (solid content) of the solution of the copolymer [A-1] obtained in Synthesis Example 1 as the copolymer [A], 80 parts by weight of Kayarad DPHA (manufactured by Nippon Kayaku Co., Ltd.) as the polymerizable compound [B], As photoinitiator [C] ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- 5 parts by weight of (O-acetyl oxime) was dissolved in propylene glycol monomethyl ether acetate so that the solid content concentration was 35% by weight, followed by filtration with a Millipore filter having a pore diameter of 0.2 µm to prepare a composition solution (S-1).
(I) 스페이서의 형성(I) formation of spacer
무알칼리 유리 기판 상에 스피너를 사용하여, 상기 조성물 용액을 도포한 후, 90 ℃에서 3 분간 핫 플레이트 상에서 예비 베이킹하여 막 두께 6.0 ㎛의 도막을 형성하였다. After applying the composition solution using a spinner on an alkali free glass substrate, the composition was prebaked at 90 ° C. for 3 minutes on a hot plate to form a coating film having a thickness of 6.0 μm.
상기에서 얻어진 도막에 10 ㎛ 변의 남은 패턴의 마스크를 개재시켜 노광 간격을 150 ㎛로 하고, 파장 365 nm에서의 노광 강도가 300 W/㎡인 자외선에 의한 노광을 행하였다. 이어서 수산화칼륨 0.05 중량% 수용액에서 25 ℃, 60 초간 현상한 후, 순수한 물로 1 분간 린스하였다. 또한, 오븐 중, 150 ℃에서 120 분간 가 열하여 스페이서를 형성하였다. The exposure film | membrane was made into 150 micrometers through the mask of the remaining pattern of 10 micrometer side to the coating film obtained above, and exposure by the ultraviolet-ray whose exposure intensity in wavelength 365nm is 300 W / m <2> was performed. Subsequently, it developed for 25 second at 60 degreeC in 0.05weight% of potassium hydroxide aqueous solution, and rinsed with pure water for 1 minute. Furthermore, it heated in 150 degreeC for 120 minutes in oven, and formed the spacer.
(II) 해상도의 평가(II) evaluation of resolution
상기 (I)에서 얻어진 패턴에서, 현상 후의 잔막율(현상 후의 막 두께/초기 막 두께×100)이 90 % 이상인 감도에서의 최소 패턴 크기로 평가하였다. 패턴 크기가 작을수록 해상도가 양호하다고 할 수 있다. 결과를 하기 표 2에 나타낸다. In the pattern obtained in the above (I), the residual film ratio after development (film thickness after initial development / initial film thickness × 100) was evaluated by the minimum pattern size at a sensitivity of 90% or more. The smaller the pattern size, the better the resolution. The results are shown in Table 2 below.
(III) 감도 평가(III) sensitivity evaluation
상기 (I)에서 얻어진 패턴에서, 현상 후의 잔막율이 90 % 이상이 되는 감도가 1,500 J/㎡ 이하이면, 감도가 양호하다고 할 수 있다. In the pattern obtained by said (I), if the sensitivity which becomes 90% or more of residual film ratio after image development is 1,500 J / m <2> or less, it can be said that a sensitivity is favorable.
(IV) 패턴 단면 형상의 평가(IV) Evaluation of pattern cross-sectional shape
상기 (I)에서 얻어진 패턴의 단면 형상을 주사형 전자 현미경으로 관찰한 결과, 그 형상이 도 1에 나타낸 A 내지 C 중 어떤 형상에 해당하는 지를 나타내었다. A와 같이 패턴 엣지가 순테이퍼인 경우, 패턴 형상은 양호하다고 할 수 있다. B와 같이 패턴 엣지가 수직상으로 형성된 경우에는, 패턴 형상은 약간 양호하다고 할 수 있다. The cross-sectional shape of the pattern obtained in said (I) was observed with the scanning electron microscope, and it showed which shape among A to C shown in FIG. When the pattern edge is a forward taper as in A, the pattern shape can be said to be good. When the pattern edge is formed vertically like B, it can be said that a pattern shape is slightly favorable.
또한, C에 나타낸 바와 같이, 역테이퍼(단면 형상에서 막 표면의 변이 기판측의 변보다도 긴 것, 역삼각형상)가 되는 형상은 이후의 러빙 공정시에 패턴이 박리될 가능성이 매우 높아지기 때문에 이러한 형상은 불량이라 하였다. In addition, as shown in C, the shape of the reverse taper (the side of the film surface in the cross-sectional shape longer than the side of the substrate side, the inverted triangle shape) has a high possibility that the pattern is peeled off during the subsequent rubbing process. The shape was called defective.
(V) 압축 강도의 평가(V) evaluation of compressive strength
상기 (I)에서 얻어진 스페이서의 압축 강도를 미소 압축 시험기(MCTM-200, (주)시마즈 세이사꾸쇼제)를 사용하여 평가하였다. 직경 50 ㎛의 평면 압자에 의해 10 mN의 하중을 가했을 때의 변형량을 측정하였다 (측정 온도: 23 ℃). 이 값이 0.5 이하일 때, 압축 강도는 양호하다. 결과를 표 2에 나타낸다. The compressive strength of the spacer obtained in said (I) was evaluated using the microcompression tester (MCTM-200, the Shimadzu Corporation make). The amount of deformation when a load of 10 mN was applied by a plane indenter having a diameter of 50 µm was measured (measured temperature: 23 ° C). When this value is 0.5 or less, the compressive strength is good. The results are shown in Table 2.
(VI) 러빙 내성의 평가(VI) evaluation of rubbing resistance
상기 (I)에서 얻어진 기판에 액정 배향제로서 AL3046(JSR(주)제)을 액정 배향막 도포용 인쇄기에 의해 도포하고, 180 ℃에서 1 시간 동안 건조하고, 건조 막 두께 0.05 ㎛인 배향제의 도막을 형성하였다. AL3046 (manufactured by JSR Corporation) was applied as a liquid crystal aligning agent to a substrate obtained in the above (I) by a printing machine for applying a liquid crystal aligning film, dried at 180 ° C. for 1 hour, and a coating film of an aligning agent having a dry film thickness of 0.05 μm. Formed.
이 도막에 나일론제의 천을 감은 롤을 갖는 러빙기에 의해 롤의 회전수 500 rpm, 스테이지의 이동 속도 1 cm/초로 러빙 처리를 행하였다. 이 때의 스페이서 패턴의 깎임이나 박리의 유무를 표 2에 나타낸다. The rubbing process was performed at the rotation speed of a roll of 500 rpm and the moving speed of 1 cm / sec by the rubbing machine which has the roll wound the cloth made of nylon to this coating film. Table 2 shows the presence or absence of chipping or peeling of the spacer pattern at this time.
(VII) 밀착성의 평가 (VII) Evaluation of adhesion
패턴 마스크를 사용하지 않은 것 이외에는 상기 (I)와 동일하게 실시하여, 밀착성 평가용 경화막을 형성하고, 밀착성 시험을 행하였다. 시험법은 JIS K-5400 (1900) 8.5의 부착성 시험 중, 8.5·2의 격자 테이프법에 따랐다. 그 때, 남은 격자의 수를 표 2에 나타낸다. Except not using a pattern mask, it carried out similarly to said (I), the cured film for adhesive evaluation was formed, and the adhesive test was done. The test method followed the lattice tape method of 8.5.2 among the adhesion tests of JISK-5400 (1900) 8.5. At that time, the number of remaining gratings is shown in Table 2.
(VIII) 보존 안정성의 평가(VIII) Evaluation of Preservation Stability
조성물을 제조한 후 -15 ℃에서 보존하고, 상기 (III) 감도 평가와 동일하게 현상 후의 잔막율이 90 % 이상이 될 필요 노광량의 경시 변화를 추적하고, 보존 후 3개월 후의 감도와 제조 직후의 감도에 대한 상대값을 측정하였다. 또한, 3개월 후의 용액 중 0.5 ㎛ 이상의 이물질의 발생 상태를 광 산란식 액중 입자 검출기(KS-28B, 리온 가부시끼가이샤제)에 의해 측정하였다. 결과를 표 2에 나타낸다. After the composition was prepared, it was stored at -15 ° C, and the change over time of the necessary exposure amount such that the residual film ratio after development was 90% or more in the same manner as in the above (III) sensitivity evaluation was traced, and the sensitivity after 3 months after storage and immediately after production Relative values for sensitivity were measured. In addition, the generation | occurrence | production state of the foreign material 0.5 micrometer or more in the solution after 3 months was measured with the light-scattering liquid particle detector (KS-28B, the product made by Leon Co., Ltd.). The results are shown in Table 2.
(IX) 내열성의 평가(IX) Evaluation of heat resistance
마스크를 사용하지 않은 것 이외에는 상기 스페이서의 형성과 동일하게 하여 경화막을 형성한 후, 240 ℃의 오븐 중에서 60 분간 가열하고, 가열 전후의 막 두께를 측정하여 잔막율(가열 후의 막 두께×100/초기 막 두께)에 의해 평가하였다. 결과를 표 2에 나타낸다. Except not using a mask, a cured film was formed in the same manner as the formation of the spacer, and then heated in an oven at 240 ° C. for 60 minutes, and the film thickness before and after heating was measured to determine the remaining film ratio (film thickness after heating × 100 / initial stage). Film thickness). The results are shown in Table 2.
<실시예 2 내지 11, 비교예 1 내지 4><Examples 2 to 11, Comparative Examples 1 to 4>
실시예 1에서,〔A〕성분 내지〔E〕성분으로서 하기 표 1에 기재된 바와 같은 종류, 양을 사용한 것 이외에는 실시예 1과 동일하게 하여 조성물 용액을 제조하고, 스페이서를 형성하여 평가하였다. [B] 내지 [E]의 첨가량은 공중합체 [A] 100 중량부에 대한 중량비이다. In Example 1, the composition solution was produced like Example 1 except having used the kind and quantity as Table 1 below as component [A]-[E], and the spacer was formed and evaluated. The addition amount of [B]-[E] is a weight ratio with respect to 100 weight part of copolymers [A].
표 1 중, 성분의 약칭은 다음 화합물을 나타낸다. In Table 1, the abbreviated-name of a component shows the following compound.
(B-1): 카야라드 DPHA(닛본 가야꾸(주)제) (B-1): Kayarard DPHA (made by Nippon Kayaku Co., Ltd.)
(B-2): 카야라드 DPHA-40H(닛본 가야꾸(주)제) (B-2): Kayarard DPHA-40H (made by Nippon Kayaku Co., Ltd.)
(B-3): 디에틸렌글리콜 디아크릴레이트(B-3): diethylene glycol diacrylate
(C-1): 에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로피라닐옥시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심)(C-1): ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydropyranyloxybenzoyl) -9.H.-carbazol-3-yl]-, 1- ( O-acetyl oxime)
(C-2): 에타논, 1-[9-에틸-6-(2-메틸-4-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심)(C-2): ethanone, 1- [9-ethyl-6- (2-methyl-4-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- ( O-acetyl oxime)
(C-3): 에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로피라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심)(C-3): ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydropyranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- ( O-acetyl oxime)
(C-4): 에타논, 1-[9-에틸-6-(2-메틸-5-테트라히드로푸라닐메톡시벤조일)-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심)(C-4): ethanone, 1- [9-ethyl-6- (2-methyl-5-tetrahydrofuranylmethoxybenzoyl) -9.H.-carbazol-3-yl]-, 1- ( O-acetyl oxime)
(C-5): 에타논, 1-[9-에틸-6-[2-메틸-4-(2,2-디메틸-1,3-디옥소라닐)메톡시벤조일]-9.H.-카르바졸-3-일]-, 1-(O-아세틸옥심) (C-5): ethanone, 1- [9-ethyl-6- [2-methyl-4- (2,2-dimethyl-1,3-dioxoranyl) methoxybenzoyl] -9.H.- Carbazol-3-yl]-, 1- (O-acetyloxime)
(D-1): 2-메틸-1-[4-(메틸티오)페닐]-2-모르폴리노프로판-1-온(시바·스페셜티·케미컬즈사제 이르가큐어 907) (D-1): 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropane-1-one (Irgacure 907 made by Ciba specialty chemicals company)
(D-2): 2-(4-메틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논-1(시바·스페셜티·케미컬즈사제 이르가큐어 369)(D-2): 2- (4-methylbenzyl) -2-dimethylamino-1- (4-morpholinophenyl) -butanone-1 (Irucure 369 by Ciba specialty chemicals company)
(E-1): 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸(E-1): 2,2'-bis (2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole
(E-2): 4,4'-비스(디에틸아미노)벤조페논(E-2): 4,4'-bis (diethylamino) benzophenone
(E-3): 2-머캅토벤조티아졸(E-3): 2-mercaptobenzothiazole
표 1 중, - 표시는 상기 성분이 첨가되어 있지 않은 것을 나타낸다. In Table 1,-shows that the said component is not added.
평가 결과를 표 2에 나타낸다. The evaluation results are shown in Table 2.
본 발명에 의하면, 고감도이고 마스크 패턴의 설계 크기를 충실히 재현할 수 있으며, 기판과의 밀착성이 우수하고, 1,500 J/㎡ 이하의 노광량으로 충분한 스페이서 형상 및 막 두께를 얻는 것을 가능하게 하며, 강도, 내열성 등도 우수하고, 저노광량 영역에서의 스페이서의 형상, 막 두께의 제어성이 우수하며, 보존 기간 중, 사용 중에 이물질이 발생하기 어렵고, 공정 안정성, 경과 시간 안정성이 우수한 표시 패널용 스페이서를 형성할 수 있는 감광성 수지 조성물, 표시 패널용 스페이서 및 표시 패널을 제공한다. According to the present invention, it is possible to faithfully reproduce the design size of the mask pattern with high sensitivity, to be excellent in adhesion to the substrate, to make it possible to obtain a sufficient spacer shape and film thickness at an exposure amount of 1,500 J / m 2 or less, It is excellent in heat resistance and the like, and has excellent controllability of the shape and thickness of the spacer in the low exposure region, and is unlikely to generate foreign substances during use during the storage period, and can form a spacer for a display panel having excellent process stability and elapsed time stability. Provided are a photosensitive resin composition, a spacer for a display panel, and a display panel.
Claims (3)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004332712 | 2004-11-17 | ||
JPJP-P-2004-00332712 | 2004-11-17 | ||
JPJP-P-2005-00224503 | 2005-08-02 | ||
JP2005224503 | 2005-08-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060055385A true KR20060055385A (en) | 2006-05-23 |
KR100796123B1 KR100796123B1 (en) | 2008-01-21 |
Family
ID=37151496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050109734A KR100796123B1 (en) | 2004-11-17 | 2005-11-16 | Photosensitive Resin Composition, Spacer for Display Panel and Display Panel |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100796123B1 (en) |
SG (1) | SG122899A1 (en) |
TW (1) | TWI385485B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190092909A (en) | 2018-01-31 | 2019-08-08 | 김믿음 | Cat sand desert prevention cat toilet |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100528838C (en) * | 2001-06-11 | 2009-08-19 | 西巴特殊化学品控股有限公司 | Oxime ester photoinitiators having composite structures |
TW200714651A (en) * | 2002-10-28 | 2007-04-16 | Mitsubishi Chem Corp | Photopolymerization composition and color filter using the same |
AU2003294034A1 (en) * | 2002-12-03 | 2004-06-23 | Ciba Specialty Chemicals Holding Inc. | Oxime ester photoinitiators with heteroaromatic groups |
KR100888780B1 (en) * | 2002-12-13 | 2009-03-13 | 주식회사 코오롱 | Photo resist composition for column spacer |
JP4437651B2 (en) * | 2003-08-28 | 2010-03-24 | 新日鐵化学株式会社 | Photosensitive resin composition and color filter using the same |
-
2005
- 2005-11-04 TW TW094138879A patent/TWI385485B/en active
- 2005-11-16 KR KR1020050109734A patent/KR100796123B1/en active IP Right Grant
- 2005-11-17 SG SG200507079A patent/SG122899A1/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190092909A (en) | 2018-01-31 | 2019-08-08 | 김믿음 | Cat sand desert prevention cat toilet |
Also Published As
Publication number | Publication date |
---|---|
TWI385485B (en) | 2013-02-11 |
KR100796123B1 (en) | 2008-01-21 |
SG122899A1 (en) | 2006-06-29 |
TW200634433A (en) | 2006-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4631594B2 (en) | Photosensitive resin composition, display panel spacer and display panel | |
KR101067188B1 (en) | Radiation Sensitive Resin Composition, Spacer for Display Panel and Display Panel | |
KR101476441B1 (en) | Radiation resin composition for forming protective film, process for forming protective film from the composition, liquid crystal display device and solid state imaging device | |
JP4678271B2 (en) | Photosensitive resin composition, protective film for liquid crystal display panel and spacer, and liquid crystal display panel comprising them | |
KR101169474B1 (en) | Radiation sensitive resin composition, spacer, and its forming method, and liquid crystal display device | |
JP4766235B2 (en) | Radiation sensitive resin composition and spacer for liquid crystal display element | |
KR100873558B1 (en) | Radiation Sensitive Resin Composition for Forming Spacer, Spacer and Its Forming Method, and Liquid Crystal Display Device | |
JP2006309157A (en) | Radiation-sensitive resin composition, protrusion and spacer formed of the same, and liquid crystal display element equipped with them | |
JP2008077067A (en) | Photosensitive resin composition, spacer for display panel, and the display panel | |
KR100838001B1 (en) | Polymer, Radiation Sensitive Resin Composition and Spacer for Liquid Crystal Display Element | |
KR101329436B1 (en) | Radiation sensitive resin composition, protrusion and spacer made therefrom, and liquid crystal display device comprising them | |
JP4631595B2 (en) | Photosensitive resin composition, display panel spacer and display panel | |
JP2006259454A (en) | Radiation-sensitive resin composition, projection and spacer formed of it, and liquid crystal display element with them | |
JP2006257220A (en) | Copolymer, radiation-sensitive resin composition using this, spacer for liquid crystal display element, and liquid crystal display element | |
KR20060052240A (en) | Photosensitive resin composition, spacer for display panel and display panel | |
JP2006184841A (en) | Photosensitive resin composition, spacer for display panel and display panel | |
JP2006259472A (en) | Radiation-sensitive resin composition, projection and spacer formed of it, and liquid crystal display element with them | |
KR101314033B1 (en) | Photosensitive resin composition, method for forming spacer for display panel | |
JP4666163B2 (en) | Radiation-sensitive resin composition, spacer, and liquid crystal display element | |
KR100796123B1 (en) | Photosensitive Resin Composition, Spacer for Display Panel and Display Panel | |
KR100873268B1 (en) | Photosensitive Resin Composition, Spacer for Display Panel and Display Panel | |
JP4862998B2 (en) | Side chain unsaturated polymer, radiation sensitive resin composition, and spacer for liquid crystal display device | |
JP2007065607A (en) | Photosensitive resin composition, spacer for display panel and the display panel | |
KR20070021057A (en) | Photosensitive resin composition, spacer for display panel and display panel | |
JP2006301148A (en) | Radiation-sensitive resin composition, projection and spacer made of it, and liquid crystal display element using them |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20121227 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20131218 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20141230 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20151217 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20161221 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20171219 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20200106 Year of fee payment: 13 |