KR20060023342A - Manufacturing method for electrode of humidity sensor - Google Patents

Manufacturing method for electrode of humidity sensor Download PDF

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KR20060023342A
KR20060023342A KR1020040072158A KR20040072158A KR20060023342A KR 20060023342 A KR20060023342 A KR 20060023342A KR 1020040072158 A KR1020040072158 A KR 1020040072158A KR 20040072158 A KR20040072158 A KR 20040072158A KR 20060023342 A KR20060023342 A KR 20060023342A
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electrode
humidity sensor
printing
manufacturing
present
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KR100717442B1 (en
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조순희
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파츠닉(주)
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/301Reference electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/226Non-corrosive coatings; Primers applied before welding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/006Investigating resistance of materials to the weather, to corrosion, or to light of metals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/6447Method of operation or details of the microwave heating apparatus related to the use of detectors or sensors
    • H05B6/6458Method of operation or details of the microwave heating apparatus related to the use of detectors or sensors using humidity or vapor sensors

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  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Ecology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Environmental Sciences (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

본 발명은 습도센서의 전극 제조방법에 관한 것이다. The present invention relates to a method for manufacturing an electrode of a humidity sensor.

본 발명은 습도센서의 전극을 제조함에 있어서, 습도센서의 전극에 도체인쇄(Ag)하고 상기 인쇄된 전극을 소성하며 상기 소성된 전극에 절연체를 인쇄하여 상기 인쇄된 전극을 소성하고 상기 소성된 전극을 Ni도금하며 상기 도금된 습도센서의 전극에 Au도금하게 되는 일련의 관련 공정을 특징으로 한다.In the present invention, in the manufacturing of the electrode of the humidity sensor, conductor printing (Ag) to the electrode of the humidity sensor, firing the printed electrode and printing an insulator on the fired electrode to fire the printed electrode and the fired electrode Ni-plated and Au-plated on the electrode of the plated humidity sensor is characterized by a series of related processes.

본 발명은 습도센서의 전극을 인쇄공법이 아닌 도금공법만으로 습도센서의 전극이 요구하는 내식성 기준을 만족시킬 수 있도록 하여 제조원가 절감은 물론 습도 Cell 간격의 균일화가 가능한 매우 유용한 발명이다.The present invention is a very useful invention that can satisfy the corrosion resistance standards required by the electrode of the humidity sensor by the plating method, not the printing method, so that the manufacturing cost can be reduced and the humidity cell spacing can be uniform.

Description

습도센서의 전극 제조방법{Manufacturing method for electrode of humidity sensor}Manufacturing method for electrode of humidity sensor

본 발명은 습도센서의 전극 제조방법에 관한 것이다. The present invention relates to a method for manufacturing an electrode of a humidity sensor.

본 발명은 습도센서의 전극을 제조함에 있어서, 습도센서의 전극을 인쇄공법이 아닌 도금공법만으로 습도센서의 전극이 요구하는 내식성 기준을 만족시킬 수 있도록 하여 제조원가 절감은 물론 습도 Cell 간격의 균일화가 가능하도록 한 것이다.According to the present invention, in manufacturing the electrode of the humidity sensor, the electrode of the humidity sensor can satisfy the corrosion resistance standard required by the electrode of the humidity sensor only by the plating method, not the printing method, thereby reducing manufacturing costs and uniformizing the humidity cell intervals. I did it.

가전기기나 산업현장에서 습도의 감지에 사용되는 습도센서는 습도변화에 따른 저항이나 캐패시턴스(capacitance) 또는 수정발진기를 이용하여 공진주파수를 검사하거나 유전체를 이용하여 마이크로파의 변화 등을 검출하여 습도를 감지하는 작용하게 되며 반도체나 세라믹스 또는 유기물이나 전해질계의 여러가지 종류가 사용되고 있다.Humidity sensor used to detect humidity in home appliance or industrial site detects humidity by checking resonance frequency using resistance, capacitance or crystal oscillator according to humidity change or microwave change using dielectric. Various kinds of semiconductors, ceramics, organic materials or electrolyte systems are used.

상기 습도센서에 사용되는 전극의 경우 종래에는 다음과 같은 공정을 통해 제조되고 있다. In the case of the electrode used in the humidity sensor is conventionally manufactured through the following process.

도체인쇄(Pt/Ag)⇒소성⇒도체인쇄(Au)⇒소성⇒절연체인쇄⇒소성Conductor printing (Pt / Ag) ⇒ firing ⇒ conductor printing (Au) ⇒ firing ⇒ insulator printing ⇒ firing

상기와 같은 공정으로 제조되는 습도센서 전극의 경우 금속 원소들이 가질수밖에 없는 내식성을 최소화하기 위하여 습도센서의 전극에 Au를 적용하게 되나 상기 Au 인쇄공정중 Paste 유실에 따른 비용손실이 과다한 문제점이 있다. In the case of the humidity sensor electrode manufactured by the above process, Au is applied to the electrode of the humidity sensor in order to minimize the corrosion resistance that the metal elements have but the cost loss due to the loss of the paste during the Au printing process is excessive.

본 발명은 습도센서의 전극을 제조함에 있어서, 습도센서의 전극을 인쇄공법이 아닌 도금공법만으로 습도센서의 전극이 요구하는 내식성 기준을 만족시킬 수 있도록 하여 제조원가 절감은 물론 습도 Cell 간격의 균일화가 가능하도록 함을 목적으로 한다. According to the present invention, in manufacturing the electrode of the humidity sensor, the electrode of the humidity sensor can satisfy the corrosion resistance standard required by the electrode of the humidity sensor only by the plating method, not the printing method, thereby reducing manufacturing costs and uniformizing the humidity cell intervals. For the purpose of doing so.

이를 위해 본 발명은 습도센서의 전극을 제조함에 있어서, 습도센서의 전극에 도체인쇄(Ag)하고 상기 인쇄된 전극을 소성하며 상기 소성된 전극에 절연체를 인쇄하여 상기 인쇄된 전극을 소성하고 상기 소성된 전극을 Ni도금하며 상기 도금된 습도센서의 전극에 Au도금하게 되는 일련의 습도센서의 전극 제조방법을 제공함으로서 상기 목적을 달성하고자 한다.To this end, the present invention in the manufacture of the electrode of the humidity sensor, conductor printing (Ag) to the electrode of the humidity sensor and firing the printed electrode and by printing an insulator on the fired electrode to fire the printed electrode and the firing The purpose of the present invention is to provide a method of manufacturing an electrode of a series of humidity sensors, which is plated Ni and Au is plated on the electrode of the plated humidity sensor.

본 발명은 습도센서의 전극을 제조함에 있어서, 습도센서의 전극에 도체인쇄(Ag)하고 상기 인쇄된 전극을 소성하며 상기 소성된 전극에 절연체를 인쇄하여 상기 인쇄된 전극을 소성하고 상기 소성된 전극을 Ni도금하며 상기 도금된 습도센서의 전극에 Au도금하게 되는 일련의 관련 공정을 특징으로 한다.In the present invention, in the manufacturing of the electrode of the humidity sensor, conductor printing (Ag) to the electrode of the humidity sensor, firing the printed electrode and printing an insulator on the fired electrode to fire the printed electrode and the fired electrode Ni-plated and Au-plated on the electrode of the plated humidity sensor is characterized by a series of related processes.

본 발명은 습도센서의 전극을 Au Printing을 통한 인쇄방법을 이용하여 제작하지 아니하고 이를 Ni 및 Au 도금공정을 통한 Plating 방법을 이용하여 제조함으 로서 제조공정 중 Paste 유실발생 따르는 비용이 적게 발생되어 상기 인쇄방법을 통한 습도센서의 전극 제조비용과 대비하여 약 30%의 절감효과를 가져오게 된다.According to the present invention, the electrode of the humidity sensor is not manufactured using a printing method through Au printing, but is manufactured by using a plating method through Ni and Au plating processes, so that the cost of occurrence of paste loss during the manufacturing process is reduced, resulting in the printing. Compared to the electrode manufacturing cost of the humidity sensor through the method will bring about a 30% savings.

이하 본 발명의 작용을 설명하면 다음과 같다.Hereinafter will be described the operation of the present invention.

본 발명 습도센서에 사용되는 습도센서의 전극은 다음과 같은 공정을 통해 제조되고 있다. Electrode of the humidity sensor used in the humidity sensor of the present invention is manufactured through the following process.

도체인쇄(Ag)⇒소성⇒절연체인쇄⇒소성⇒Ni도금⇒Au도금 Conductor printing (Ag) ⇒ firing ⇒ insulator printing ⇒ firing ⇒ Ni plating ⇒ Au plating

본 발명은 상기의 공정 순서와 같이 먼저 습도센서의 전극에 도체인쇄(Ag)하고 상기 인쇄된 전극을 소성하며 상기 소성된 전극에 절연체를 인쇄하여 상기 인쇄된 전극을 소성하고 상기 소성된 전극을 Ni도금하며 상기 도금된 습도센서의 전극에 Au도금하게 되는 일련의 관련 공정으로 진행된다.The present invention first conducts conductor printing (Ag) on the electrode of the humidity sensor, calcinates the printed electrode, and prints an insulator on the calcined electrode to sinter the printed electrode and Ni the calcined electrode as in the above process sequence. Plating is followed by a series of related processes in which Au is plated on the electrode of the plated humidity sensor.

이와 같은 공정은 종래 금속 원소들이 가질수밖에 없는 내식성을 최소화 하기 위하여 습도센서의 전극에 적용되는 도체인쇄(Au) 공정이 배제된 상태이나 본 발명은 상기 내식을 최소화 하기 위해 Ni도금 및 Au도금 공정을 추가하여 이를 보완하고 있는 것이다. Such a process is a state in which the conductor printing (Au) process applied to the electrode of the humidity sensor is excluded in order to minimize the corrosion resistance that the metal elements have in the related art, but the present invention uses the Ni plating and Au plating process to minimize the corrosion resistance. It is supplementing this.

따라서 본 발명은 습도센서의 전극을 인쇄공법이 아닌 도금공법만으로 습도센서의 전극이 요구하는 내식성 기준을 만족시킬 수 있도록 하여 제조원가 절감은 물론 습도 Cell 간격의 균일화를 이룰수 있게 되는 것이다. Therefore, the present invention can achieve the corrosion resistance standard required by the electrode of the humidity sensor by the plating method, not the printing method, so that the manufacturing cost can be reduced and the humidity can be uniformized.

이상에서는 본 발명의 바람직한 실시예에 대하여 도시하고 설명하였으나 본 발명은 상기한 실시예에 한정되지 아니하며 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 본 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누 구든지 다양한 변형 실시가 가능한 것은 물론이고 그와 같은 변경은 기재된 청구범위 내에 있게 된다.Although the above has been illustrated and described with respect to the preferred embodiment of the present invention, the present invention is not limited to the above-described embodiment without departing from the gist of the present invention claimed in the claims, having ordinary skill in the art to which the present invention pertains. Any modifications and modifications can be made by anyone, as such modifications are within the scope of the appended claims.

본 발명은 습도센서의 전극을 인쇄공법이 아닌 도금공법만으로 습도센서의 전극이 요구하는 내식성 기준을 만족시킬 수 있도록 하여 제조원가 절감은 물론 습도 Cell 간격의 균일화가 가능한 매우 유용한 발명이다.













The present invention is a very useful invention that can satisfy the corrosion resistance standards required by the electrode of the humidity sensor by the plating method, not the printing method, so that the manufacturing cost can be reduced and the humidity cell spacing can be uniform.













Claims (1)

습도센서의 전극을 제조함에 있어서, 습도센서의 전극에 도체인쇄(Ag)하고 상기 인쇄된 전극을 소성하며 상기 소성된 전극에 절연체를 인쇄하여 상기 인쇄된 전극을 소성하고 상기 소성된 전극을 Ni도금하며 상기 도금된 습도센서의 전극에 Au도금하는 것을 특징으로 하는 습도센서의 전극 제조방법.In manufacturing the electrode of the humidity sensor, conductor printing (Ag) on the electrode of the humidity sensor, firing the printed electrode, printing an insulator on the fired electrode, firing the printed electrode and plating the fired electrode with Ni And Au plating the electrode of the plated humidity sensor.
KR1020040072158A 2004-09-09 2004-09-09 Manufacturing method for electrode of humidity sensor KR100717442B1 (en)

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Publication number Priority date Publication date Assignee Title
KR940004667B1 (en) * 1990-07-27 1994-05-27 한국과학기술연구원 Moisture sensor and manufacturing method thereof
KR100191544B1 (en) * 1995-06-28 1999-06-15 구자홍 Resistance-type humidity sensor and its manufacturing method

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