KR20060015436A - Capture method of magnetic nanoparticle using nanoelectromagnet - Google Patents

Abstract

The present invention relates to a method for capturing tens of nanometers of magnetic particles using fine electromagnets of tens to hundreds of nanometers in size. Nanometer-sized electromagnets are fabricated by depositing a metal after forming a defined shape on a semiconductor substrate by photolithography or electron beam lithography. When a current is applied to a nanoelectromagnet made of metal, a magnetic field can be formed around the nanoelectromagnet, and the shape of the nanoelectromagnet can be changed or the shape of the magnetic field formed around the nanoelectromagnet can be changed by controlling the amount of current flowing therein. have. When a solution containing magnetic nanoparticles is dropped on the nanoelectromagnet, or a fine solution passage is made to pass a solution containing magnetic nanoparticles over the nanoelectromagnet, the magnetic nanoparticles are separated from the distribution of the magnetic field formed around the electromagnet. Under force, they can be captured at desired locations around the nanoelectromagnet. In particular, the present invention suggests that only one magnetic nanoparticle can be individually captured at a desired position by using a nanoelectromagnet composed of an uneven current circuit.

Nanoelectromagnets, Magnetic Nanoparticles, Magnetic Fields, Lithography, Capture

Description

Capture method of magnetic nanoparticles using nanoelectromagnets {Capture method of magnetic nanoparticle using nanoelectromagnet}

1 is a conceptual view of the operation of the nano-electromagnet.

2 is a scanning electron microscope photograph showing the capture of magnetic nanoparticles using real nanoelectromagnets.

(Explanation of symbols for the main parts of the drawing)

10: semiconductor substrate

20: insulating thin film

30: nanoelectromagnet

40: solution containing magnetic nanoparticles

50: magnetic nanoparticles

60: direction of current

The present invention is directed to a method of capturing magnetic nanoparticles, ranging in size from several nanometers to several tens of nanometers, at a desired location. The technology of locating nanoparticles in a desired place is important because it can be applied to various fields such as electronics, chemistry, and biotechnology.

An example applied in the field of electronics is to manufacture a single electron device or a molecular device by placing nanoparticles between metal electrodes using an electrical method. In particular, in the medical field, it is possible to apply the labeling substance to magnetic nanoparticles, insert it into an unknown solution, react with the magnetic nanoparticles, and then analyze the magnetic nanoparticles to detect the components in the unknown solution. In addition, the magnetic nanoparticles can also be utilized as a contrast agent of magnetic resonance imaging.

In addition, a quantum device capable of performing quantum computing may be fabricated by regularly arranging nanoparticles having magnetic properties and controlling the energy state of the magnetic nanoparticles with a peripheral circuit.

There are many applications where particles of tens of nanometers can be applied, but there is no clear way to capture and manipulate nanoscale particles individually.

The present invention provides a technique for individually capturing magnetic nanoparticles having magnetic properties among magnetic nanoparticles having numerous electrical, chemical, and medical applications at a desired position by a magnetic method. The capture of only one magnetic nanoparticle at the desired location is the key of this invention.

In order to achieve the above object, a component according to the present invention includes a semiconductor substrate 10, an insulating thin film 20, a nanoelectromagnet 30, a solution including magnetic nanoparticles 40, and magnetic nanoparticles 50. Include.

The basic concept of the invention is well represented in FIG. FIG. 1 illustrates a basic method for capturing the magnetic nanoparticles 50 and follows the alphabetical order (a-e) of FIG. 1 as follows.

(a) An insulating thin film 20 is formed on the semiconductor substrate 10, and a shape is formed on the photosensitive film by photolithography or electron beam etching, followed by deposition of metal to form the nanoelectromagnet 30.

(b)-(c) The solution 40 containing the magnetic nanoparticles is dropped on the nanoelectromagnet.

(d)-(e) Current flows through the nanoelectromagnet 30 in the direction of a large arrow. Due to the flowing current, a strong magnetic field is generated at the bending point of the nanoelectromagnet 30 composed of the uneven current circuit, and the change of the magnetic field strength is made rapidly. The magnetic nanoparticles 50 in the solution 40 containing the magnetic nanoparticles are subjected to a force proportional to such a rapid change in the magnetic field strength, and the magnetic magnetic particles 50 are attracted to the bending point of the nanoelectromagnet 30. Come and take. (E) of FIG. 1 is an enlarged view of (d).

(f) If the remaining solution is removed while maintaining the current flowing through the nanoelectromagnet 30, only the captured magnetic nanoparticles 50 remain trapped at a desired position.

In the present invention, the size of the nanoelectromagnet is suitably within several hundred nanometers or several micrometers, and is composed of a conductive material such as a metal capable of carrying a current.

Lithography and etching or deposition methods may be used as a method of forming nanoelectromagnets, and electron beam lithography may be used to form fine electromagnets of several tens of nanometers.

In the present invention, the size of the magnetic nanoparticles used for capture is about several nanometers to several tens of nanometers, and the shape includes spherical, hexahedral, and polyhedral, and the kinds of materials are nickel (Ni), cobalt (Co), and iron. Magnetic metal materials such as (Fe) and biomagnetic materials or similar functional materials.

The magnetic nanoparticles captured by the method according to the present invention are fixed by the substrate and van der Waals forces and thus remain intact after the electrical force is removed.

In the present invention, the principle of generating the magnetic field is based on the Bio-Saba art law in which a magnetic field is formed around the conductive wire by a current flowing through the conductive wire. After finding the strength and direction of the magnetic field for, obtain the total vector sum to find the strength and direction of the total magnetic field.

An example of the magnetic field formed in the present invention will be described. As shown in FIG. 1, an upwardly convex current circuit made of a metal lead is formed by a semiconductor process, and a space surrounded by the metal lead when a current flows from left to right of the current circuit. At the same time, a magnetic field is formed perpendicular to the ground and entering the ground.

The shape of the space in which the magnetic field is formed in the nanoelectromagnet may be manufactured in a circle, a rectangle, and a polygon according to the shape of the metal conductor, and the size of the space may be made from tens to hundreds of nanometers in diameter or one side in length.

The magnetic field formed by the nanoelectromagnet has the greatest intensity at the center of the uneven current circuit and decreases as it moves away from this point. The change in magnetic field strength depending on the position creates a force that pulls the magnetic nanoparticles into the center portion of the uneven current circuit, and can control the position of the magnetic nanoparticles.

In the present invention, a current of 10 mA is applied to a metal wire having a width of 100 nanometers and a height of 30 nanometers, and the size of a space in which a magnetic field is formed by being surrounded by metal wires is 100 nanometers in width and 300 nanometers in length. The strength of the magnetic field formed in the case corresponds to several tens of Gauss.

In particular, as described in FIG. 1, the nano-size electromagnet 30 may capture the magnetic nanoparticles 50 at a desired position because the nanoelectromagnet has a shape consisting of an uneven current circuit.

Figure 2 is a scanning electron microscope (scanning electron microscope) photograph showing an example of capturing magnetic nanoparticles using the actual nanoelectromagnet 30 produced. As shown in the enlarged view of the scanning electron micrograph of FIG. 2, it can be seen that the magnetic nanoparticles 50 are accurately captured at the bending portions of the nanoelectromagnets 30.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. It is intended to be configured to include within the scope of the invention.

As described above, the invention regarding a method of capturing magnetic nanoparticles using nanoelectromagnets has the following effects.

First, nano-sized magnetic nanoparticles can be placed individually on a semiconductor substrate at a desired location.

Second, these technologies can be expected to be used for biological and medical applications in the detection of new substances and in drug analysis.

Third, by arranging the magnetic nanoparticles regularly and constructing a circuit having a function of supplying and detecting electrons around them, the present invention can be applied to the implementation of a device capable of performing quantum calculation using the superposition of energy levels of the magnetic nanoparticles. .

Claims (4)

Nano-sized electromagnets; A solution comprising magnetic nanoparticles; Magnetic nanoparticles; A method for capturing magnetic nanoparticles using nanoelectromagnets, characterized in that it comprises a. The method of claim 1, A method for capturing magnetic nanoparticles using nanoelectromagnets, characterized in that the metal conductors constituting the nanoelectromagnets are made by lithography, metal deposition and etching. The method of claim 1, The shape of the metal constituting the nanoelectromagnet is composed of an uneven current circuit, and when a current flows through the metal wire, a magnetic field is formed in a fine space surrounded by the metal wire. The method of claim 3, A method of capturing magnetic nanoparticles using nanoelectromagnets, wherein capturing magnetic nanoparticles having a size of several tens of nanometers or less occurs due to a magnetic force of a magnetic field formed in a minute space.

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