KR20060001933A - Error detecting apparatus for pad conditioner - Google Patents

Abstract

The present invention relates to an error detection device for detecting an error of a pad conditioner.

The present invention includes a down sensor unit for detecting this when the conditioning head of the pad conditioner falls over a predetermined distance toward the polishing pad and generates an error signal; An up sensor unit for detecting when the conditioning head is lifted by a predetermined distance toward the opposite side of the polishing pad and generating an error signal; A rotation speed detection sensor unit detecting a rotation speed of a pulley for driving a rotation shaft for rotating the conditioning head, and generating an error signal when the rotation speed is out of a preset rotation range; Receives an error signal from the down sensor part and up sensor part, and applies the alarm signal corresponding to this error signal to the main device to the main device, displays the speed through the detection signal applied from the speed detection sensor part, And a controller for applying an alarm signal to the main device when the detection is sharply lowered.

Pad Conditioner, Conditioning Head, Error, Error, Alarm

Description

Error detection device for pad conditioner {ERROR DETECTING APPARATUS FOR PAD CONDITIONER}

1 is a schematic block diagram showing an error detection device for a pad conditioner according to the present invention;

2 is a schematic perspective view showing an error detection device for a pad conditioner according to the present invention;

3 is a schematic diagram showing a state in which various sensor units of the error conditioner for pad conditioner according to the present invention are installed in the pad conditioner;

4 is a schematic view showing a state in which the pad conditioner according to the present invention is down into a clean cup;

5 is a flowchart illustrating an error detection process performed through a down sensor unit of an error detection device for a pad conditioner according to the present invention;

6 is a flowchart illustrating an error detection process performed through an up sensor unit of an error detection device for a pad conditioner according to the present invention;

7 is a flowchart illustrating an error detection process performed through a rotation speed detection sensor unit of an error detection device for a pad conditioner according to the present invention;

8 is a flowchart illustrating an error detection process performed through a load cell of an error detection device for a pad conditioner according to the present invention.

* Description of Signs for Main Parts in Drawings *

110: control unit 120: down sensor unit

130: down sensor unit 140: rotation speed detection sensor unit

150: load cell 160: display panel

170: buzzer 180: LED lamp

The present invention relates to an error detection device for a pad conditioner, and more particularly, to detect a falling force during cleaning in up / down, rotation speed and clean cup of a polishing head of a pad conditioner, and to apply an alarm signal to the main equipment when an error occurs. An error detection device for a pad conditioner.

In general, a semiconductor device is formed by depositing a resistive layer, a semiconductor layer, an insulating layer, etc. on a wafer to form an integrated circuit. A planarization process for periodically flattening a wafer substrate is performed after such layers are formed in a semiconductor manufacturing process. .

One of the methods applied to the planarization process is chemical mechanical polishing (hereinafter referred to as 'CMP').

This CMP process causes the wafer transferred by the carrier to rotate on the polishing pad to mechanically planarize the wafer surface, while simultaneously supplying a slurry to carry out chemical reactions onto the polishing pad to chemically planarize.

On the other hand, in order to achieve a more effective polishing rate of the CMP process, the surface roughness of the polishing pad must be kept constant at all times. In other words, due to the continuous driving of the CMP, the polishing pad has a low surface roughness, and the polishing function is gradually lost. To prevent this, a device called a pad conditioner is used.

The pad conditioner is a device for optimizing the state of the pad so that polishing of the wafer is normally performed in the polishing pad. The pad conditioner not only flattens the state of the polishing pad but also deposits particles such as slurry solution or polishing on the pad to blunt the pad. Prevents making, keeps the surface roughness of the pad constant, and evenly distributes the slurry solution.

The pad conditioner that performs this function has a conditioning head with a diamond disk, a rotating drive for rotating the conditioning head, and a lifting drive for raising and lowering the conditioning head, thereby positioning the conditioning head above the polishing pad to rotate and By raising and lowering, the polishing head is conditioned.

However, such a conventional pad conditioner may cause problems such as an up / down position error occurring during the conditioning of the polishing pad rotating on the platen, a short circuit of the belt, and a change in the down force when the conditioning head is down in the clean cup. In this case, there is no alarm system that can notify the user of such an error situation or a separate function that can recognize the error by turning off the main device when an error occurs.

In order to solve the above problems, an object of the present invention is for a pad conditioner for detecting a variety of errors that may occur due to the pad conditioner during the conditioning of the polishing pad to transmit an alarm signal corresponding to the error to the main device To provide a controller.

In addition, another object of the present invention is to provide a controller for a pad conditioner for visually and audibly informing the user when an error occurs in the pad conditioner.

In order to achieve the above object, the present invention provides a conditioning head for contacting and conditioning a polishing pad used in a chemical mechanical polishing process, a rotating shaft for rotating the conditioning head, a support for supporting the rotating shaft, and applying rotational force to the rotating shaft. An error detecting device for detecting an error of a pad conditioner having a driving motor, a pulley, and a belt, wherein the down sensor unit detects when the conditioning head falls over a predetermined distance toward the polishing pad and generates an error signal. ; An up sensor unit configured to detect when the conditioning head is lifted by a predetermined distance toward the opposite side of the polishing pad and to generate an error signal; A rotation speed detection sensor unit detecting a rotation speed of a pulley for driving a rotation shaft for rotating the conditioning head, and generating an error signal when out of a preset rotation speed range; And receiving down and up error signals from the down sensor unit and the up sensor unit, and supplying an alarm signal corresponding to the error signal to the main device to the main device, and receiving a detection signal applied from the rotation speed detection sensor unit. And a controller for displaying the rotation speed and applying an alarm signal to the main device when the rotation speed is rapidly reduced.

The first sensor unit is installed on the rotating shaft; And a first magnetic sensor installed below the support to detect the first magnetic.

The down sensor unit has a second magnetic installed inside the conditioning head; And a second magnetic sensor installed under the support to detect the second magnetic.

A flag installed adjacent to the rotation speed detection sensor unit; And a sensor for sensing the presence / absence of the flag.

The present invention further includes a load cell installed in the clean cup for detecting a pressure of the conditioning head in which the pad conditioner moves to the clean cup for cleaning the conditioner pad and descends into the clean cup, wherein the control unit is configured to perform the control. The analog pressure signal detected from the load cell is applied and converted into a digital pressure signal, which is then displayed and applied to the main equipment.

In this case, the display apparatus may further include a display panel for displaying a signal received from the down sensor part, the up sensor part, the rotation speed detection sensor part, and the load cell.

The apparatus may further include an alarm means for informing the operator according to an error signal received from the down sensor part, the up sensor part, the rotation speed detection sensor part, and the load cell. In this case, the alarm means includes a buzzer and / or an LED lamp.

Therefore, in the present invention described above, the error time can be reduced by detecting various errors generated by the pad conditioner in advance, and the overall work efficiency can be improved.

Hereinafter, a configuration of an error detecting device for a pad conditioner according to the present invention will be described with reference to the accompanying drawings.

1 and 2 are schematic block diagrams and schematic perspective views showing an error detection device for a pad conditioner according to the present invention, and FIG. 3 is a schematic view showing a state in which various sensor units of the error detection device are installed in the pad conditioner. Is a schematic diagram showing a state where the pad conditioner according to the present invention is down to a clean cup.

As shown in FIG. 1, the error detection apparatus of the present invention has a down sensor unit for detecting each of the input terminals when the down / up of the conditioning head 11 of the pad conditioner 10 is down / up more than a predetermined distance. 120, an up sensor unit 130, a rotation speed detection sensor unit 140, a load cell 150, and a control unit 100 receiving detection signals from these sensors. A pressure S / W 190 is also provided for controlling the pressure of the fitting nozzle 15 for supplying air or maintaining the vacuum of the pad conditioner 10.

2 and 3, the down sensor unit 120 is formed by the first magnetic 123 installed on the rotation shaft 13 of the pad conditioner 10 and the air injected into the fitting nozzle 15 during the conditioning operation. It consists of a down sensor 121 for detecting the strength of the magnetic force of the first magnetic 123 descending together with the lowering of the rotating shaft 13 and the conditioning pad (11).

The down sensor unit 120 detects this when the conditioning head 11 falls over a preset distance toward a polishing pad (not shown) disposed under the conditioning head 11, and generates an error signal.

In addition, the up sensor unit 130, as shown in FIGS. 2 and 3, has a second magnetic 133 installed inside the conditioning pad 11 of the pad conditioner 10, and the fitting nozzle 15 is vacuumed during conditioning. The up sensor 131 is configured to detect the strength of the magnetic force of the second magnetic 133 which moves up and down together as the rotary shaft 13 and the conditioning pad 11 move up and down.

The up sensor unit 130 detects this when the conditioning head 11 is elevated above a preset distance toward the opposite side of the polishing pad (not shown) disposed under the conditioning head 11 and generates an error signal.

In addition, the error detection device according to the present invention, as shown in Figure 2 and 3, the rotation speed detection sensor unit for detecting the rotation speed of the pulley 14 for driving the rotating shaft 13 by a belt (not shown) 140.

The rotational speed detection sensor unit 140 detects the rotational speed of the pulley 14 through the flag 141 disposed adjacent to the pulley 14, and is out of a preset rotational speed, for example. If the belt breaks and the speed decreases rapidly, a speed error signal is generated.

In addition, as shown in FIG. 4, the load cell 150 is provided with a pad conditioner 10 in a clean cup 30 for cleaning the conditioning head 11.

When the load cell 150 is injected with air to the fitting nozzle 15 and the conditioning head 11 is pressed down into the clean cup 30, the load cell 150 receives a pressure signal detected by the conditioning head 11 at this time. To the control unit 110. In this case, when the load cell 150 applies an analog signal to the control unit 110, the control unit 110 converts the analog signal into a digital signal.

In addition, the error detection apparatus 100 of the present invention, the output terminal, the operator received a signal received from the down sensor unit 120, up sensor unit 130, the rotation speed detection sensor unit 140 and the load cell 150 It includes a display panel 160 to inform. In this case, the display panel 160 preferably applies a touch screen, for example.

In addition, the alarm means for informing the operator in accordance with the error signal received from the down sensor unit 120, up sensor unit 130, the rotation speed detection sensor unit 140 and the load cell 150, for example, Buzzer 170 and LED lamp 180.

Reference numeral 40 denotes a drive motor for rotating the pulley.

Hereinafter, an error detection process of the pad conditioner according to the present invention configured as described above will be described with reference to the accompanying drawings.

5 is a flowchart illustrating an error detection process performed through the down sensor unit of the error detection apparatus for the pad conditioner according to the present invention, and FIG. 6 is an error detection process performed through the up sensor unit of the error detection apparatus for the pad conditioner according to the present invention. 7 is a flowchart illustrating an error detection process performed through the rotation speed detection sensor of the error detection device for pad conditioner according to the present invention, and FIG. 8 is a load cell of the error detection device for pad conditioner according to the present invention. It is a flowchart showing an error detection process performed.

First, as shown in FIG. 5, when the pressure switch (not shown) of the main equipment 20 (see FIG. 1) is turned on, air is injected through the fitting nozzle 15 of the pad conditioner 10. In this case, if no air is injected or the pressure is not set up to a preset value, the pressure S / W (see FIG. 3) is checked.

When the conditioning head 11 moves to the lowered position while the rotary shaft 13 is lowered by the pressure of the air injected into the fitting nozzle 15, the first magnetic 123 also moves to the down position.

Accordingly, the down sensor 121 starts the down position sensing. In this case, when the conditioning head 11 descends below the preset down position, the control unit 110 receives the value applied from the down sensor 121. By checking the error, the alarm signal is transmitted to the main device 20, and the main device 20 can quickly perform an operation for replacing the error such as turning off the operation of the pad conditioner 10. Make sure

On the other hand, the control unit 110 notifies the operator of the error through the buzzer 170 and the LED lamp 180 so that the operator can cope with the error quickly.

In addition, as shown in Figure 6, when the pressure switch (not shown) of the main equipment 20, the air is discharged through the fitting nozzle 15 of the pad conditioner 10 is in a vacuum state. In this case, if the vacuum is not achieved, the pressure S / W (see Fig. 3) is checked.

When the conditioning head 11 moves to the lifting position while the rotating shaft 13 is lifted as the air injected into the fitting nozzle 15 is discharged, the second magnetic 133 also moves to the lifting position as well.

Accordingly, the up sensor 131 starts to detect the up position. In this case, when the conditioning head 11 is elevated above the preset up position, the controller 110 checks the value applied from the up sensor 131. To determine an error, and to transmit an alarm signal to the main device 20 so that the main device 20 can quickly perform an operation for replacing an error such as turning off the operation of the pad conditioner 10. do.

In this case, like the down sensing process, the controller 110 notifies the worker of the error through the buzzer 170 and the LED lamp 180 so that the worker can cope with the error quickly.

As illustrated in FIG. 7, when the rotation speed of the conditioning head 11 of the pad conditioner is detected, the rotation speed detection sensor 130 is operated when the conditioning head 11 is out of the clean cup initialization position of the clean cup 30. do.

That is, the rotation speed detection sensor 130 detects the rotation speed of the pulley 14 through the flag 141 disposed adjacent to the pulley 14 and applies the detected rotation speed to the controller 110. The controller 110 determines that an error occurs when the rotation speed of the pulley 14 decreases rapidly due to breaking of a belt (not shown), for example, when the applied rotation speed is out of a preset rotation speed range.

Accordingly, the control unit 110 transmits an alarm signal to the main device 20 to quickly perform an operation for replacing the error such as turning off the operation of the pad conditioner 10 by the main device 20. In this case, the controller 110 also notifies the worker of the error through the buzzer 170 and the LED lamp 180 so that the worker can cope with the error quickly.

Of course, the controller 110 displays the number of revolutions of the conditioning pad 11 in real time on the display panel 160 connected to the output terminal so that an operator can grasp.

In addition, as shown in Figure 8, the error detection process made through the load cell, first, when the conditioning head 11 enters the clean cup initialization position of the clean cup 30, the rotation speed detection sensor unit 140 is turned off, The clean cup 30 initialization sensor (not shown) is turned on.

Subsequently, when pressure is applied to the fitting nozzle 15, the conditioning head 11 is lowered into the clean cup 30 and pressure is applied to the load cell 150 mounted in the clean cup 30 and the pressure of this analogue. The signal is applied to the controller 110.

Accordingly, when it is determined that the pressure signal is out of the pressure range compared with the preset pressure range, the controller 110 transmits an alarm signal to the main equipment 20 to cause the main equipment 20 to operate the pad conditioner 10. It is possible to quickly perform an operation for replacing an error such as turning off.

Of course, even in this case, the control unit 110 notifies the operator of the error through the buzzer 170 and the LED lamp 180 so that the operator can cope with the error quickly, while the load panel through the display panel 160 The down force value applied to 150 is displayed.

In the present invention as described above, the error time can be reduced by detecting various errors generated by the pad conditioner in advance, thereby improving the overall working efficiency.

In the above, the present invention has been illustrated and described with reference to specific preferred embodiments, but the present invention is not limited to the above-described embodiments, and the present invention is not limited to the spirit of the present invention. Various changes and modifications will be possible by those who have the same.

Claims (8)

A conditioning head for contacting and conditioning the polishing pad used in a chemical mechanical polishing process, a rotating shaft for rotating the conditioning head, a support for supporting the rotating shaft, a drive motor, a pulley, and a belt for applying rotational force to the rotating shaft. In the error detection device for detecting an error of one pad conditioner, A down sensor unit configured to detect when the conditioning head descends more than a predetermined distance toward the polishing pad and generate an error signal; An up sensor unit configured to detect when the conditioning head is lifted by a predetermined distance toward the opposite side of the polishing pad and to generate an error signal; A rotation speed detection sensor unit detecting a rotation speed of a pulley for driving a rotation shaft for rotating the conditioning head, and generating an error signal when out of a preset rotation speed range; Receives an error signal from the down sensor unit and the up sensor unit, and applies an alarm signal corresponding to the error signal to the main device to the main device, and displays the rotation speed through the detection signal applied from the rotation speed detection sensor unit. And a controller for applying an alarm signal to the main device when the number of revolutions is suddenly lowered. The apparatus of claim 1, wherein the up sensor unit comprises: a first magnetic unit installed on a rotating shaft; And, And a first magnetic sensor installed below the support to sense the first magnetic. The apparatus of claim 1, wherein the down sensor unit comprises: a second magnetic provided inside the conditioning head; And, And a second magnetic sensor mounted below the support to sense the second magnetic. The apparatus of claim 1, wherein the rotation speed detection sensor comprises: a flag installed adjacent to the pulley; And, Sensor for detecting the presence or absence of the flag; Error detection device of a pad conditioner comprising a. The load conditioner of claim 1, further comprising a load cell installed in the clean cup to detect pressure of the conditioning head that is moved to the clean cup for cleaning the conditioner pad and descends into the clean cup, The control unit receives an analog pressure signal detected from the load cell, converts it into a digital pressure signal, displays the digital pressure signal, and applies it to the main equipment. 6. The error detection apparatus of claim 1, further comprising a display panel for displaying a signal received from the down sensor part, the up sensor part, the rotation speed detection sensor part, and the load cell. Device. The pad according to claim 1, further comprising an alarm means for informing the operator according to an error signal received from the down sensor part, the up sensor part, the rotation speed detection sensor part, and the load cell. Conditioner error detection device. 8. The error detection device of a pad conditioner according to claim 7, wherein the alarm means is a buzzer and / or an LED lamp.

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