KR20060001507A - Anode substrate for electron emission display device and manufacturing method of the same - Google Patents

Abstract

The present invention relates to an anode substrate having a predetermined concave-convex shape in order to improve the brightness and color reproducibility of the fluorescent layer. The present invention relates to a substrate, a fluorescent layer formed on one surface of the substrate and emitting light by collision of electrons, and at least a portion of the fluorescent layer. And a metal reflective film covering the surface, wherein the metal reflective film provides an anode substrate for an electron emission display device having a concave-convex shape on a surface thereof.

Emission Display Device, Fluorescent Layer, Interlayer, Metal Reflective Film, Firing

Description

ANODE SUBSTRATE FOR ELECTRON EMISSION DISPLAY DEVICE AND MANUFACTURING METHOD OF THE SAME

1 is a schematic cross-sectional view of a portion of a conventional electron emission display device.

2 is a cross-sectional view of an electron emission display device including an anode substrate having a metal reflective film according to an embodiment of the present invention.

3A to 3G are cross-sectional views illustrating a manufacturing process of the anode substrate for an electron emission display device of FIG. 2.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anode substrate for an electron emission display device and a method for manufacturing the same, and more particularly, to an anode substrate for an electron emission display device having a metal reflective film having a predetermined concavo-convex shape, and a method for manufacturing the same.

In general, an electron emission device has a method using a hot cathode and a cold cathode as an electron source. The electron-emitting devices using the cold cathode are FEA (Field Emitter Array) type, SCE (Surface Conduction Emitter) type, MIM (Metal-Insulator-Metal) type, MIS (Metal-Insulator-Semiconductor) type, BSE (Ballistic) electron surface emitting) and the like are known.

The FEA type electron emitting device uses a low work function or high β function as an electron emission source and uses the principle that electrons are emitted by electric field difference in vacuum. In addition, devices using electron emission sources for nanomaterials have been developed.

The SCE type electron emission device is a device in which an electron emission part is formed by providing a conductive thin film between two electrodes disposed to face each other on a substrate and providing a micro crack in the conductive thin film. The device utilizes a principle that electrons are emitted from the electron emission portion, which is the fine gap, by applying a voltage to an electrode to flow a current to the surface of the conductive thin film.

The MIM and MIS electron-emitting devices each form an electron emission portion formed of a metal-dielectric layer-metal (MIM) and metal-dielectric layer-semiconductor (MIS) structure, and are disposed between two metals or metals and semiconductors having a dielectric layer therebetween. When a voltage is applied to the device, a device using the principle of emitting electrons while moving and accelerating from a metal having a high electron potential or a metal having a low electron potential toward the metal.

The BSE-type electron-emitting device forms an electron supply layer made of a metal or a semiconductor on an ohmic electrode by using the principle that electrons travel without scattering when the size of the semiconductor is reduced to a dimension area smaller than the average free stroke of electrons in the semiconductor. And an insulating layer and a metal thin film formed on the electron supply layer to emit electrons by applying power to the ohmic electrode and the metal thin film.                         

By using such electron emitting devices, an electron emitting display device, various backlights, and an electron beam device for lithography can be implemented. Among these, the electron emission display device includes an electron emission region including an electron emission element and an image expression region for emitting light by colliding the emitted electron with a fluorescent layer. In general, an electron emission display device includes a plurality of electron emission devices and driving electrodes for controlling their electron emission on a first substrate, and electrons emitted from the first substrate are efficiently directed toward a fluorescent layer formed on the second substrate. A fluorescent layer and an electrode connected thereto are provided to be accelerated.

The electron emission display device as described above forms a metal reflective film, such as an aluminum reflective film, in order to improve the luminance of the fluorescent layer. The aluminum reflecting film guides electrons in the direction of the anode substrate, and serves to reflect back the electrons reflected in the direction of the cathode substrate to the fluorescent layer when the fluorescent layer collides with the electrons. In addition, by acting as a path for electrons so that the electrons do not remain in the fluorescent layer, the life of the fluorescent layer is increased and the arcing between the anode substrate and the cathode substrate is prevented.

An example of an electron emission display device to which the metal reflective film is applied as described above is disclosed in Korean Laid-Open Patent Publication No. 2001-0075972. Hereinafter, an electron emission display device according to the prior art will be described.

1 is a schematic cross-sectional view of an electron emission display device having a metal reflective film according to the prior art.                         

Referring to FIG. 1, in the electron emission display device according to the related art, a line type cathode electrode 22 is provided on one side of the first substrate 21, and a plane type electron is formed on the cathode electrode 22. The discharge part 23 is provided. The second substrate 11 facing the first substrate 21 is provided with an anode 12 having a line shape perpendicular to the cathode electrode 22, and an electron emitting portion 23 on the anode 12. There is provided a fluorescent layer 14 which emits electrons colliding with each other. The metal reflective film 15 is formed on the fluorescent layer 14 with a predetermined space with the fluorescent layer 14.

Accordingly, electrons are emitted from the electron emission unit 23 by the voltage difference applied to the second substrate 11 and the first substrate 21, and the emitted electrons proceed to the fluorescent layer 14 while the metal reflection film 15 is released. Impinge on the fluorescent layer 14 after passing through. Thereafter, the electrons scattered from the fluorescent layer 14 are re-reflected by the metal reflective film 15 to collide with the fluorescent layer 14 again.

However, when the driving voltage of the electron emission display device is not sufficiently high, electrons do not pass through the metal reflection film 15, which makes it difficult to reach the fluorescent layer 14.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an anode substrate for an electron emission display device having a concave-convex shape to facilitate electron focusing on the fluorescent layer and a method of manufacturing the same.

As a technical means for solving the above problems, the present invention includes a substrate, a fluorescent layer formed on one surface of the substrate and emitting light by collision of electrons, and a metal reflective film covering at least a portion of the fluorescent layer, the metal reflective film is a surface An anode substrate for an electron-emitting display device having a concave-convex shape is provided.

Preferably, the metal reflective film has irregularities such as triangle, semicircle, ellipse, and sawtooth shape.

Preferably, a light shielding film is further included between fluorescent layers.

In addition, the present invention comprises the steps of forming a fluorescent layer on one surface of the substrate, forming an interlayer on top of the fluorescent layer, applying a particulate material on the interlayer, at least depositing a metal on the interlayer and the particulate material, and The present invention provides a method of manufacturing an anode substrate for an electron emitting display device, the method including forming a metal reflective film having a concave-convex shape on a surface thereof by removing the intermediate film and particulate matter.

Preferably, the interlayer film and the particulate matter are decomposed and removed in the process of firing the metal reflective film.

Preferably, the particulate material is composed of resins, carbon powders, alkali metals, carbides, alkaline earth metals, organic peroxides, nitro compounds, sulfur, paraffin, naphthalene and the like.

Hereinafter, an anode substrate and a method of manufacturing the same according to the present invention will be described in detail with reference to the accompanying drawings. 2 is a cross-sectional view of an electron emission display device including an anode substrate having a metal reflective film according to an embodiment of the present invention.

Referring to FIG. 2, the present invention provides a substrate 111, a fluorescent layer 114 formed on one surface of the substrate 111 and covering at least a portion of the fluorescent layer 114, which emits light by collision of electrons ( 115, and the metal reflective film 115 provides an anode substrate 110 for an electron emission display device having a concave-convex shape on a surface thereof.

Here, in the technical concept of the present invention, the substrate 111, the fluorescent layer 114, and the metal reflective film 115 are essential components, but in the description with reference to the drawings, the light shielding film and the upper portion of the anode are formed on one surface of the substrate. A structure in which a fluorescent layer is formed, and a metal reflective film is laminated on at least a portion of the fluorescent layer will be described as an example. In addition, hereinafter, an electron emission display device including an anode substrate is described as an example for convenience of understanding the present invention.

In more detail, the electron emission display device 100 includes an anode substrate 110 and a cathode substrate 120. Referring to the anode substrate 110, the anode substrate 110, the anode electrode 112 formed in a stripe shape to accelerate the electron beam emitted from the electron emission portion 123 on the substrate 111, A fluorescent layer 114a, 114b, 114c formed on the anode electrode 112, and a light shielding film 116 positioned therebetween, and having an uneven shape on the fluorescent layer 114, for example, a triangular shape in the present embodiment. The metal reflective film 115 is formed with the unevenness.

Referring to the cathode substrate 120, a cathode pattern 122 on a predetermined pattern, for example, a stripe, is formed inside the substrate 121, an insulating layer 124 is formed thereon, and then the cathode electrode ( The gate electrode 126 is formed on the stripe in the direction crossing the 122. A hole is formed in the insulating layer 124 on the cathode electrode 122, and an electron emission part 123 for electron emission is formed on the cathode electrode 122 exposed by the hole. An opening corresponding to the hole is formed in the gate electrode 126 so that electrons emitted from the electron emission part 123 can be emitted toward the anode electrode 112.

In addition, as a means for preventing an arc, a conductive mesh 136 having an insulating layer 138 below or above and below is fixed to the gate electrode 126 to be disposed between the gate electrode 126 and the anode electrode 112. The electron beam is effectively focused by controlling the electrons emitted from the electron emission unit 123. The spacer 134 is fixed between the anode substrate 110 and the cathode substrate 120 to maintain a constant gap. On the other hand, the space between the anode substrate 110 and the cathode substrate 120 is limited by applying and firing the frit 132.

As illustrated in FIG. 1, the metal reflective film 115 having a triangular shape on the fluorescent layer 114 may emit electrons emitted from the electron emission part 123 formed on one side of the cathode substrate 120. ) To focus better. In other words, electrons emitted from the electron emission unit 123 are focused toward the triangle vertices of the metal reflective film 115 facing the cathode substrate 120.

In the present embodiment, the shape of the metal reflective film 115 formed on the fluorescent layer 114 has a triangular shape, but is not limited thereto, and provided with a protrusion that can focus electrons more preferably, a semicircle, an ellipse, and a sawtooth shape. Various uneven shapes are possible.

The substrates 111 and 121 may be formed in various forms without particular limitation. For example, the substrates 111 and 121 may be formed of a material such as glass or glass with reduced impurities such as Na, and a silicon substrate having an insulating layer such as SiO ₂ formed thereon. , Ceramic substrates and the like can be used.

The electron emission unit 123 may be formed of a carbon-based material such as carbon nanotubes, graphite, diamond, diamond-like carbon or a combination thereof or other nanotubes or nanowires such as Si and SiC, and preferably carbon nanotubes. Can be used.

Therefore, in the electron emission display device having the anode substrate having the metal reflective film as described above, the electrons emitted from the electron emission portion can be more focused to the fluorescent layer, so that the luminance, color reproducibility and color purity of the fluorescent layer can be improved. Can be improved.

3A to 3G are cross-sectional views illustrating a manufacturing process of the anode substrate for an electron emission display device of FIG. 2.

3A to 3G, the present invention provides a method of forming a fluorescent layer on one surface of a substrate, forming an intermediate film on the fluorescent layer, applying a particle material on the intermediate film, at least the metal on the intermediate film and the particle material. It provides a method of manufacturing an anode substrate for an electron-emitting display device comprising the step of depositing, and removing the intermediate film and the particulate material to form a metal reflective film having a concave-convex shape on the surface. In the technical concept of the present invention, the step of forming the substrate 111, the fluorescent layer 114, and the metal reflective film 115 is an essential component step. Hereinafter, the anode substrate for an electron emission display device illustrated in FIG. The manufacturing step will be described in detail.

In more detail, a transparent electrode 112, for example, an ITO electrode, is formed on the substrate 111 (FIG. 3A). Thereafter, the light shielding film 116 is formed on the electrode 112 (FIG. 3B). The light shielding layer 116 may use a thin film Cr obtained by sputtering Cr and patterning the Cr on the ITO electrode 112 and then oxidizing it with CrOx, or using a black fodel or Ag fodel formed by pattern printing a photosensitive paste. . Thereafter, the fluorescent layer 114 is formed between the light shielding films 116 by using the slurry method (FIG. 3C). In this embodiment, although the slurry method is used, the fluorescent layer may be formed by screen printing, electrophoresis (EL), or transfer (tabel coater).

Thereafter, an acrylic emulsion or lacquer solution is applied and dried on the fluorescent layer 114 formed on the anode electrode 112 on the substrate 111 to form an intermediate film 113 (FIG. 3D). .

Thereafter, a particle material 115a is coated on the interlayer 113 to realize a predetermined concave-convex shape (FIG. 3E). Particle material 115a is preferably composed of resins, carbon powders, alkali metals, carbides, alkaline earth metals, organic peroxides, nitro compounds, sulfur, paraffin, naphthalene, etc., and the size and shape of the particle material are easily controlled. One is preferable.

Subsequently, a metal, for example, aluminum is deposited on the concave-convex shape formed by the particle material 115a on the intermediate film 113 to which the particle material 115a is applied (FIG. 3F).

Thereafter, a firing step is performed to form the metal reflective film 115 having an uneven shape. In this firing step, the intermediate film 113 and the particle material 115a are decomposed and removed, whereby the fluorescent layer 114 and the metal reflective film ( 115, a predetermined space is formed (FIG. 3G). Here, the materials constituting the interlayer 113 and the particle material 115a are preferably decomposed and removed during the firing process of the metal reflective film 115 as described above.

On the other hand, in the manufacturing process of the metal reflective film 115, providing the interlayer 113 between the fluorescent layer 114 and the metal reflective film 115, if the metal reflective film 115 is directly deposited on the fluorescent layer 114, the fluorescence This is because the metal reflective film 115 is not deposited uniformly due to the rough surface of the layer 114. In addition, by maintaining the separation distance between the fluorescent layer 114 and the metal reflective film 115 through the intermediate film process it is possible to optimize the electron transmission and reflectance.

In this manner, after the intermediate film 113 is formed, the metal reflective film 115 is deposited, whereby the reflection efficiency of the metal reflective film 115 can be improved uniformly. In addition, the particle material 115a is coated so that the metal reflective film 115 on the fluorescent layer 114 has an uneven shape, which is an uneven portion formed in the metal reflective film 115 acts as a lightning rod. Leads to better focusing of the electrons emitted.

Therefore, the metal reflective film formed by the above-described manufacturing method improves the electron focusing effect, thereby improving the luminance and color purity of the fluorescent layer 114.

Although the technical spirit of the present invention has been described in detail according to the above-described preferred embodiment, it should be noted that the above-described embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

The electron emission display device according to the present invention can improve the brightness, color reproducibility and color purity of the fluorescent layer by forming a metal reflective film having an uneven shape to improve the electron focusing effect.

Claims (6)

Board; A fluorescent layer formed on one surface of the substrate and emitting light by collision of electrons; And A metal reflective film covering at least a portion of the fluorescent layer, The metal reflective film is an anode substrate for an electron emission display device having a concave-convex shape on the surface. The method of claim 1, And the metal reflective film has an uneven shape such as a triangle, a semicircle, an ellipse, and a sawtooth shape. The method of claim 1, An anode substrate for an electron emission display device, further comprising a light shielding layer between the fluorescent layers. Forming a fluorescent layer on one surface of the substrate; Forming an intermediate layer on the fluorescent layer; Applying a particulate material on the interlayer; Depositing a metal on at least the interlayer and the particulate material; And And removing the interlayer and the particulate material to form a metal reflective film having a concave-convex shape on a surface thereof. The method of claim 3, wherein And the interlayer and the particulate material are decomposed and removed during the firing of the metal reflective film. The method of claim 3, wherein The particle material is a method for manufacturing an anode substrate for an electron emission display device, characterized in that the resin, carbon powder, alkali metal, carbide, alkaline earth metal, organic peroxide, nitro compounds, sulfur, paraffin, naphthalene and the like.

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