KR20050114939A - Apparatus and method for scanning constant beam - Google Patents

Abstract

The present invention provides a scanning apparatus and method capable of always maintaining a uniform amount of beams diffracted by a diffractive light modulator composed of a plurality of pixels and irradiated onto a piececanning object such as a drum or an image display of a printer.

Description

Scanning apparatus and method for uniform beam irradiation {Apparatus and method for scanning constant beam}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning apparatus and method for uniform beam irradiation, and in particular, to maintain a uniform amount of beams diffracted by a diffractive light modulator composed of a plurality of pixels and irradiated onto a piececanning object such as a drum or an image display of a printer. A scanning apparatus and method that can be used.

In general, optical signal processing has advantages of high speed, parallel processing capability, and large-capacity information processing, unlike conventional digital information processing, which cannot process a large amount of data and real-time processing, and design a binary phase filter using spatial light modulation theory. Research on fabrication, optical logic gates, optical amplifiers, image processing techniques, optical devices, optical modulators, etc. Dual optical modulators are used in the fields of optical memory, optical display, printer, optical interconnection, hologram, etc., and research and development of light beam scanning apparatus using them have been in progress.

Such a light beam scanning device scans a light beam in an image forming apparatus such as a laser printer, an LED printer, an electrophotographic copying machine, a word processor, etc., and forms an image image by spotting the light beam on a photosensitive medium.

Recently, as projection televisions and the like have been developed, a light beam scanning device has been used as a means for irradiating a beam to an image display.

Then, a scanning apparatus of a conventional printer to which the diffractive optical modulator as described above is applied is illustrated in FIG. 1.

1 is a block diagram of a conventional scanning device for a printer.

Referring to FIG. 1, the conventional scanning apparatus 100 includes a laser diode (LD) 110 for generating a laser beam and a first laser for converting the laser beam emitted from the laser diode 110 into parallel light. A diffraction light modulator 130 diffracting and outputting a laser beam deformed into parallel light through the lens 120, the first lens 120, and a diffraction beam output from the diffraction light modulator 130 isoelectric speed. A rotating mirror 140 for scanning by moving to and a second lens 150 for focusing the diffraction beam diffracted and output by the diffractive optical modulator 130 in the direction of the rotation axis of the rotating mirror 140. And a third lens that deflects the diffraction beam at an isometric velocity reflected from the rotating mirror 140 in the casting yarn direction and corrects aberrations to focus and irradiate the irradiation surface of the drum 170 or the piececanning object ( 160 and a beam diffracted by the diffractive light modulator 130 By selectively passing only the beam of the desired properties in provided with a slit 180 to be delivered to the rotating mirror (140).

Here, the laser diode 110, which is a light source, has a relatively low output because it can allow a long scanning time of the laser diode required for exposure for a single pixel because it scans a plurality of beams at the same time.

The first lens 120 is disposed between the laser diode 110 and the diffractive optical modulator 130. When two or more first lenses 120 are employed, the plurality of first lenses 120 are spaced apart at regular intervals.

The rotating mirror 140 includes a motor (not shown) that can rotate in both directions, and irradiates the diffracted multibeam while rotating by the motor. The rotating mirror 140 may be implemented as a polygon mirror or a galvano mirror.

When the polygon mirror is used as the rotation mirror 140, the polygon mirror is characterized in that the diffraction multi-beams output from the diffractive light modulator 130 is moved at an isotropic speed. In this case, the third lens 160 deflects the diffraction multi-beams at an isometric velocity reflected from the polygon mirror in the casting yarn direction.

When the galvano mirror is employed as the rotating mirror 140, the galvano mirror has a characteristic of moving the diffracted multibeam output from the multi-beam control optical modulator 130 at a specific linear velocity. In this case, the third lens 160 deflects the diffraction multi-beam of the anisotropic velocity reflected from the galvano mirror in the casting yarn direction.

At least one second lens 150 is disposed between the multi-beam control optical modulator 130 and the rotation mirror 140. When two or more second lenses 150 are disposed, the plurality of second lenses 150 are spaced apart at regular intervals.

The slit 180 is mounted between the diffractive light modulator 130 and the rotating mirror 140. When two or more slits 180 are mounted, the plurality of slits 180 are spaced apart at regular intervals.

Referring to the operation of the scanning device of the present invention having the structure as described above is as follows.

First, when the laser diode 110 generates a laser beam, the first lens 120 transforms the laser beam into parallel light and focuses the diffraction light modulator 130.

The diffractive light modulator 130 diffracts and outputs the laser beam transformed into parallel light, and then the second lens 150 focuses the diffraction beam in the direction of the rotation axis of the rotation mirror 140.

The focused diffracted beam is scanned into the drum 170 or the piececanning object by the polygon mirror moving at an isotropic speed, or by the galvano mirror moving at the boiling line speed to the drum 170 or the piececanning object. Scanned.

At this time, the rotation speed of the rotation mirror 140 may be slowed in proportion to the beam output from the optical modulator 130.

Accordingly, when the rotation mirror 140 is implemented as the polygon mirror, the third lens 160 deflects the diffraction beam of the isotropic velocity reflected from the polygon mirror in the casting yarn direction and corrects the aberration to the drum 170 or the like. Focus on the irradiation surface of the piececanning object.

If the rotating mirror 140 is implemented as the galvano mirror, the third lens 160 deflects the diffraction beam of the anisotropic velocity reflected from the galvano mirror in the casting yarn direction and corrects the aberration for the drum 170. Or focus on the irradiation surface of the piececanning object.

The printing resolution of the printer is changed according to the intensity of the beam irradiated to the drum 170 through the beam scanning process as described above, which is a change in the diffraction beam intensity diffracted and output by the diffraction type optical modulator 130. It is the cause. More specifically, the diffraction optical modulator 130 is applied with a constant voltage as a driving voltage, and the diffraction beam intensity output from the diffraction type optical modulator 130 is converted in proportion to the magnitude of the driving voltage. In addition to these characteristics, the diffraction type optical modulator 130 tends to decrease in performance as the frequency of use increases, thereby decreasing the intensity of the diffraction beam.

Accordingly, in the case of a scanning device having a conventional diffractive optical modulator, since only a predetermined driving voltage is applied to the diffractive optical modulator, the performance of the diffractive optical modulator decreases as the number of times of use increases. Even if the intensity was weakened, it could not be corrected, which caused a problem of deteriorating the print resolution of the printer.

In the case of a projection television equipped with a conventional scanning device implemented using a diffractive optical modulator as described above, even if the performance is degraded due to frequent use of the diffractive optical modulator, the intensity of the diffraction beam is weakened. Since it could not be corrected, there was a problem that the clarity of the video display deteriorated.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a scanning device that can be adjusted by the diffraction type optical modulator composed of a plurality of pixels to be adjusted to the amount of beam irradiated to a piece canning object, such as a drum or an image display of a printer and The purpose is to provide a method.

SUMMARY OF THE INVENTION The present invention provides a scanning apparatus and method capable of always maintaining a uniform amount of beam irradiated on a piececanning object such as a drum or an image display of a printer by adjusting the amount of beam diffracted and output by a diffractive optical modulator composed of a plurality of pixels. The purpose is to provide.

SUMMARY OF THE INVENTION An object of the present invention is to provide a scanning apparatus and method for maintaining a constant printing resolution of a printer by diffracting by a diffraction type optical modulator to always maintain a uniform amount of beam irradiated to a drum of a printer.

SUMMARY OF THE INVENTION An object of the present invention is to provide a scanning apparatus and method capable of keeping the sharpness of an image display constant by always maintaining a uniform amount of beams diffracted by a diffraction type optical modulator and irradiated onto an image display such as a projection television.

In order to achieve the above object, the present invention diffracts a beam generated by generating a beam according to the magnitude of a driving voltage, and emits the beam by reflecting a partial beam in the diffracted beam and transmitting a beam other than the reflected beam to irradiate the piececanning object. Way; And a drive used for beam diffraction of the scanning means according to a comparison result by comparing the intensity of the diffracted beam reflected from the scanning means with a predetermined reference beam intensity to adjust the intensity of the diffracted beam irradiated by the scanning means. Beam intensity control processing means for adjusting the voltage.

The present invention includes a first step of diffracting a beam generated by generating a beam according to the magnitude of a driving voltage, and reflecting a partial beam in the diffracted beam and transmitting a beam other than the reflected beam to the piececanning object; Converting the beam reflected in the diffraction beam into an analog electrical signal and converting the analog signal into a digital signal; And a third step of adjusting a driving voltage used for beam diffraction according to a comparison result by comparing the beam intensity of the digital signal with a predetermined reference beam intensity in the beam compensation mode.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

2 is a block diagram of a scanning device for uniform beam irradiation according to an embodiment of the present invention.

Referring to FIG. 2, the scanning apparatus 200 of the present invention diffracts a beam generated by generating a beam according to the magnitude of a driving voltage, and emits the beam by reflecting a part of the beam in the diffracted beam and transmitting a beam other than the reflected beam. The scanning unit 220 irradiates the object 210 and the intensity of the diffracted beam reflected from the scanning unit 220 and a predetermined reference beam intensity are compared and used for beam diffraction of the scanning unit 220 according to a comparison result. And a beam intensity adjusting processor 230 for adjusting the driving voltage.

The scanning unit 220 includes a light source 221 for generating a beam, at least one first lens 222 for converting a beam generated from the light source 221 into parallel light, and at least one first lens. Partial beams are diffracted by the diffraction light modulator 223 and diffracted by the diffraction light modulator 223 and diffracted by the diffracted light modulator 223 in proportion to the magnitude of the driving voltage. A prism 224 that transmits light and reflects a beam other than the transmission beam, and at least one second lens 225 that focuses and irradiates a beam transmitted through the prism 224 on the irradiation surface of the piececanning object 210. ).

The light source 221 may be implemented as a laser or a laser diode LD that generates a laser beam. Here, the laser diode, which is the light source 221, has a relatively low output, because it can allow a long scanning time of the laser diode required for exposure for a single pixel because it scans a plurality of beams at the same time.

At least one first lens 222 is disposed between the light source 221 and the diffractive light modulator 223, when two or more first lenses 222 are employed, a plurality of first lenses 222 They are arranged spaced at regular intervals.

The diffractive light modulator 223 is capable of simultaneous control from at least two pixels to hundreds to thousands of pixels as long as the maximum optics allow. In addition, the diffraction type optical modulator 223 can control the pixel with an analog to allow gray control when applied to a printer and a display product. At this time, the diffraction type optical modulator 223 controls the optical lens and the light projection distance used to control the size of the spot and the distance between the spots.

The beam intensity adjusting unit 230 may include a third lens 231 for focusing a beam reflected from the prism 224 and a light for focusing through the third lens 231 to an analog electrical signal. The light receiving unit 232, an A / D converter 233 for converting an analog electric signal output from the light receiving unit 232 into a digital signal, and the A / D converter 233 in the beam compensation mode set by the user. A control unit 234 for outputting a voltage for adjusting the driving voltage of the diffractive optical modulator 223 according to the comparison result by comparing the beam intensity of the digital signal converted by the < Desc / Clms Page number 9 > And a voltage adder 235 for adding the applied voltage and the voltage output from the controller 234 to output the diffraction optical modulator 223.

The beam intensity adjusting unit 230 further includes a button 236 for inputting a setting command of a "beam correction mode" for correcting the intensity of the diffracted beam output from the diffraction type optical modulator 223.

For example, when the diffraction type optical modulator 223 presses the button 236 in a state where the diffraction type optical modulator 223 is set to the "normal mode" for diffracting and irradiating the incident beam without being controlled by the beam intensity control processor 230, 234 terminates the normal mode and sets the beam correction mode.

The light receiver 232 may be implemented as a photodiode (PD) or a CMOS image sensor that converts and outputs an optical signal into an electrical signal.

The controller 234 may be implemented as an ASIC type circuit, and the reference beam intensity is preset, but is determined experimentally in proportion to the intensity of the beam irradiated to the piececanning object 210. Here, the predetermined reference beam intensity may vary according to the type of the piece scanning object 210. For example, if the scanning object 210 is a drum of a printer, the beam intensity for optimizing the printing resolution of the printer is a reference value. Is set.

The piece canning object 210 may be an object such as a drum and a sheet of a printer or an image display of a projection television, but is not limited thereto, and various optoelectronic devices such as an electrophotographic copy machine and a word processor may be used as the object. Can be.

The operation of the scanning apparatus of the present invention having the configuration as described above will be described in detail as follows.

First, the scanning unit 220 looks at a process of diffracting and irradiating a beam without being controlled by the beam intensity adjusting processor 230.

When the user presses the button 236 to instruct the normal mode to be set, the controller 234 sets the normal mode.

When a beam such as a laser is generated by the light source 221, the first lens 222 focuses the beam on the diffractive light modulator 223.

At this time, the diffraction type optical modulator 223 diffracts the incident beam with a predetermined deviation according to a driving voltage applied from an external power source and emits the light. When the beam diffracted by the diffractive light modulator 223 is emitted, the prism 224 transmits some beams in the diffraction beams and reflects the other beams to the beam intensity control unit 230. Here, since it is set to the normal mode, the driving voltage applied to the diffraction type optical modulator 223 is not changed. Therefore, the diffraction type optical modulator 223 diffracts the incident beam with a certain deviation only according to the magnitude of the driving voltage applied from the external power source without being affected by the voltage output from the beam intensity adjusting processor 230.

As such, when the prism 224 transmits a partial beam in the diffraction beam, the second lens 225 focuses and irradiates the beam transmitted through the prism 224 on the irradiation surface of the piececanning object 210.

Next, the scanning unit 220 looks at the process of diffracting and irradiating a beam under the control of the beam intensity control processor 230.

When the user instructs the setting of the beam compensation mode by pressing the button 236, the controller 234 terminates the normal mode and sets the beam compensation mode.

Even in this state in which the beam compensation mode is set, the scanning unit 220 firstly irradiates the diffraction beam to the piece scanning object 210 through the above-described process.

In the process of irradiating the diffraction beams, the prism 224 reflects the diffraction beams other than the beams transmitted in the diffraction beams to the third lens 231, and then the third lens 231 receives the reflected and incident diffraction beams. Focus to (232).

The light receiver 232 converts an optical signal composed of a focused beam into an analog electrical signal and outputs the analog signal to the A / D converter 233. At this time, the A / D converter 233 converts an analog electrical signal into a digital signal and outputs it to the controller 234.

When the beam intensity of the detected digital signal is input, the controller 234 compares the detected beam intensity with a predetermined reference beam intensity, and adjusts the driving voltage of the diffractive optical modulator 223 according to the result. Output voltage of magnitude.

For example, if the beam intensity detected as a result of the comparison by the controller 234 is equal to the predetermined reference beam intensity, the controller 234 outputs a 0V voltage to the voltage adder 235. In this case, since the magnitude of the voltage added and output by the voltage adder 235 is the same as the magnitude of the driving voltage supplied from the external power source, the diffractive optical modulator 223 is eventually applied from the external power source as in the normal mode. It is driven only by the driving voltage.

If the controller 234 compares the detected beam intensity with a predetermined reference beam intensity, and determines that the detected beam intensity is small, the controller 234 determines a difference value between the detected beam intensity and the predetermined reference beam intensity. Determine the magnitude of the output voltage proportional to the determined difference. Here, the controller 234 determines the magnitude of the output voltage corresponding to the difference between the beam intensity detected according to the predetermined program and the predetermined reference beam intensity. That is, the magnitude of the voltage output from the controller 234 is changed in proportion to the difference between the detected beam intensity and the predetermined reference beam intensity.

When the voltage of the predetermined magnitude determined by the controller 234 is output to the voltage adder 235, the voltage adder 235 adds the voltage supplied from an external power source and the voltage output from the controller 234 to form a diffraction type optical modulator. Output to (223).

As the driving voltage applied to the diffractive optical modulator 223 increases through this process, the intensity of the beam diffracted therefrom increases due to the structural characteristics of the diffractive optical modulator 223.

Next, the intensity of the beam diffracted by the diffractive light modulator 223 and outputted according to the magnitude of the voltage output from the beam intensity adjusting processor 230 will be described in more detail with reference to the accompanying drawings.

In general, a piezoelectric / electric distortion diffraction type optical modulator diffracts a single beam type linear light incident from a lens to form a diffraction beam having a predetermined diffraction coefficient, and then scans the diffraction beam horizontally onto the photosensitive surface. It comprises a plurality of actuating cells 320 having a thin film and a thick film structure of a predetermined shape.

That is, as illustrated in FIG. 3, the piezoelectric / electric distortion diffraction type optical modulator includes a lower electrode 321 formed on a predetermined substrate 310 and a piezoelectric / distortion layer formed on the lower electrode 321. 322 and the upper electrode 323 formed on the piezoelectric / electric strain layer 322, the vertical film length of the vertical direction is vertically driven by the drive power applied from the outside is longer than the length in the horizontal direction It comprises a gating cell 320.

In this case, the piezoelectric / electric distortion diffraction type optical modulator, as shown in FIG. 4, in consideration of the structural features of the scanning device, the actuating cell 320 having a thick film shape in which the length in the horizontal direction is longer than the length in the vertical direction. It can also be configured to include.

In addition, the piezoelectric / electric distortion diffraction type optical modulator, as shown in FIGS. 5 and 6, the micromirror 324 for maximizing the reflection efficiency of incident light incident on the upper electrode 323 operating as the reflective surface. ) Can be configured to further include.

As shown in FIG. 7, the piezoelectric / electric distortion diffraction type optical modulator includes a lower electrode 321 and a piezoelectric / distortion layer on a silicon substrate 310 having a depression for providing an air space in a central portion thereof. 322 and the upper electrode 323, the length of the vertical direction driven by the drive power applied from the outside is configured to include a thin film-shaped actuating cell 320 longer than the length of the horizontal direction.

At this time, the piezoelectric / electric distortion diffraction type optical modulator, as shown in Figure 8, in consideration of the structural characteristics of the scanning device, the thin film-shaped actuating cell 320 is longer than the length in the longitudinal direction in the longitudinal direction It may be configured to include.

In addition, the piezoelectric / electric distortion diffraction type optical modulator, as shown in FIGS. 9 and 10, the micromirror 324 for maximizing the reflection efficiency of incident light incident on the upper electrode 323 operating as the reflective surface. ) Can be configured to further include.

Here, the lower electrode 321 is formed on a predetermined substrate 310 constituting the actuating cell 320 of the thick film structure to provide a driving voltage applied to the piezoelectric / electric distortion layer 322 from the outside. It is formed on the substrate 310 by sputtering or vapor deposition of electrode materials such as Pt, Ta / Pt, Ni, Au, Al, and RuO2.

In addition, the lower electrode 321 is formed on a predetermined substrate 310 or lower support 310 'constituting the actuating cell 320 of the thin film structure to apply a driving voltage applied from the outside to the piezoelectric / electric strain layer ( 322 also serves.

Here, the lower support layer 310 'is as formed is deposited on the silicon substrate 310 to support the piezoelectric / I waecheung 322 of the actuating cell 320 having a thin film structure, SiO _2, Si ₃ It is composed of materials such as N ₄ , Si, ZrO ₂ , Al ₂ O _3, and the lower support 310 ′ may be omitted as necessary.

The piezoelectric / distortion layer 322 is a predetermined piezoelectric / distortion material whose length is changed in the up / down direction or the left and right directions by a piezoelectric phenomenon generated in conjunction with a driving power source applied from the outside, more specifically, PzT. , PNN-PT, ZnO. The lower electrode 321 in a range of 0.01 to 20.0 μm through piezoelectric / electric warping material such as P _b , Zr or titanium by wet (screen printing, Sol-Gel coting, etc.) and dry methods (sputtering, evaporation, vapor deposition, etc.). Is formed on the phase.

The upper electrode 323 is formed on the piezoelectric / electric distortion layer 322 to perform reflection and diffraction for incident light incident from the lens. More specifically, Pt, Ta / Pt, Ni, Au, Al, An electrode material such as RuO 2 is formed in a range of 0.01 to 3 μm through sputtering or vapor deposition.

At this time, the upper electrode 323 operates as a micro mirror for performing reflection and diffraction for the optical signal input from the outside, or Al, which is a predetermined light reflecting material to further enhance the reflection and diffraction for the optical signal, It may be configured to further include a micro mirror 324 composed of Au, Ag, Pt, Au / Cr.

Here, the piezoelectric / electric distortion diffraction type optical modulator is driven in units of pixels 330 in which the actuating cells 320 are grouped in a predetermined number, and the pixels 330 may be provided with a predetermined photosensitive member 600. It corresponds to one point (DOT) of the photosensitive surface which comprises.

That is, the piezoelectric / electric distortion diffraction type optical modulator, as shown in FIGS. 11A and 11B, includes a predetermined number of actuating cells 320 and diffraction phenomenon of the pixels 330 arranged in a one-dimensional shape. By scanning the diffraction beam formed on the photosensitive surface, scanning of one-dimensional shape, more specifically, scanning for one line is performed at the same time.

Here, FIG. 11A illustrates a structure in which pixels formed in a longitudinal direction longer than a horizontal direction are arranged in a one-dimensional shape, and FIG. 11B illustrates a structure in which pixels formed in a horizontal direction longer than a vertical direction are arranged in a one-dimensional shape. One drawing.

In addition, the piezoelectric / electric distortion diffraction type optical modulator, as illustrated in FIGS. 12A and 12B, includes a predetermined number of actuating cells 320 and diffraction phenomenon of the pixels 330 arranged in a two-dimensional shape. By scanning the two-dimensional diffraction beam formed on the photosensitive surface, two-dimensional scanning, more specifically, scanning a plurality of lines is simultaneously performed.

Here, FIG. 12A illustrates a structure in which pixels 330 having a longitudinal direction longer than a horizontal direction are arranged in a two-dimensional shape, and FIG. 12B illustrates a pixel having a horizontal direction longer than a vertical direction in a two-dimensional shape. Figure is a diagram showing a structure arranged in.

That is, each pixel 330 constituting the piezoelectric / electric distortion diffraction type optical modulator is arranged in a one-dimensional or two-dimensional shape, as shown in Figs. The scanning of one or more lines is performed by scanning the dimensional shape.

At this time, the actuating cell 320 constituting the pixel 330 is shown only four configurations, but the actuating cell 320 constituting the pixel 330 is not limited to four. It may consist of other numbers.

Although the technical spirit of the present invention has been described in detail according to the above-described preferred embodiment, it should be noted that the above-described embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

As described above, the present invention has the following effects by controlling the amount of beams diffracted by a diffractive light modulator composed of a plurality of pixels and irradiated to a piececanning object such as a drum or an image display of a printer.

First, the amount of beams irradiated onto a piececanning object such as a drum or an image display of a printer can be kept uniform at all times.

Secondly, the amount of beams diffracted by the diffractive light modulator to be irradiated to the drum of the printer is always kept constant so that the printing resolution of the printer is kept constant.

Third, by maintaining a uniform amount of beams diffracted by a diffraction type optical modulator and irradiated onto a video display such as a projection television, the sharpness of the video display can be kept constant.

1 is a block diagram of a conventional scanning device for a printer.

2 is a block diagram of a scanning device for uniform beam irradiation according to an embodiment of the present invention.

3 is a view showing the arrangement of a thick-film actuating cell having a longitudinal direction longer than a horizontal direction constituting a piezoelectric / electric distortion diffraction type optical modulator applied to the present invention.

FIG. 4 is a view showing an arrangement of thick-film actuating cells having a transverse direction longer than the longitudinal direction of the piezoelectric / electric distortion diffraction type optical modulator applied to the present invention. FIG.

5 is a diagram illustrating an arrangement of thick-film actuating cells having a longitudinal direction longer than a horizontal direction in which a micromirror is applied to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4.

FIG. 6 is a view showing an arrangement of thick-film actuating cells having a horizontal direction longer than a vertical direction in which micromirrors are applied to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4.

7 is a view showing an arrangement of a thin-film actuating cell having a longitudinal direction longer than a horizontal direction constituting a piezoelectric / electric distortion diffraction type optical modulator applied to the present invention.

FIG. 8 is a view showing an arrangement of thin-film actuating cells having a transverse direction longer than a longitudinal direction of a piezoelectric / electric distortion diffraction type optical modulator applied to the present invention. FIG.

9 is a view showing an arrangement of thin-film actuating cells having a longitudinal direction longer than a horizontal direction in which micromirrors are applied to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4.

FIG. 10 is a view showing an arrangement of thick-film actuating cells having a transverse direction longer than a longitudinal direction in which micromirrors are applied to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4.

FIG. 11A illustrates a one-dimensional array of pixels including a predetermined number of actuating cells according to the piezoelectric / electric distortion diffraction type optical modulator of FIGS. 3 and 4 and having a longitudinal direction longer than a horizontal direction. FIG.

FIG. 11B illustrates a one-dimensional array of pixels including a predetermined number of actuating cells according to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4, the horizontal direction having a shape longer than the vertical direction.

FIG. 12A illustrates a two-dimensional array of pixels including a predetermined number of actuating cells according to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4 and having a longitudinal direction longer than a horizontal direction. FIG.

FIG. 12B illustrates a two-dimensional array of pixels including a predetermined number of actuating cells according to the piezoelectric / electric distortion diffraction type optical modulators of FIGS. 3 and 4, the horizontal direction having a shape longer than the vertical direction.

Explanation of symbols on the main parts of the drawings

210: piece scanning object 220: scanning unit

230: beam intensity control processing unit 221: light source

222: first lens 223: diffractive optical modulator

224: second lens 231: third lens

232: light receiver 233: A / D converter

234: control unit 235: voltage adder

236: button

Claims (11)

Scanning means for diffracting the generated beam by generating a beam according to the magnitude of the driving voltage, reflecting a part of the beam in the diffracted beam, and transmitting a beam other than the reflected beam to the piececanning object; And In order to adjust the intensity of the diffracted beam irradiated by the scanning means, the driving voltage used for diffraction of the scanning means according to the comparison result by comparing the intensity of the diffracted beam reflected from the scanning means with a predetermined reference beam intensity Beam intensity control processing means for adjusting the Scanning device comprising a. The method of claim 1, The scanning means, A light source for generating a beam; At least one first lens for converting a beam generated from the light source into parallel light; A diffraction type optical modulator for diffracting a beam transformed into parallel light through the at least one first lens in proportion to a magnitude of a driving voltage; A prism that transmits some beams in the diffracted beams diffracted by the diffractive light modulator and reflects other beams than the transmission beams; And At least one second lens for focusing and irradiating a beam transmitted through the prism on an irradiation surface of the piececanning object Scanning device comprising a. The method according to claim 1 or 2, The beam intensity control processing means, A third lens for focusing the beam reflected from the scanning means; A light receiving unit for converting light focused through the third lens into an analog electrical signal; An A / D converter for converting an analog electrical signal output from the light receiver into a digital signal; In the beam compensation mode, for comparing the beam intensity of the digital signal converted by the A / D converter and a predetermined reference beam intensity to adjust the driving voltage of the diffractive optical modulator provided in the scanning means according to the comparison result A controller for outputting a voltage; And A voltage adder that adds a voltage applied to an external power source and a voltage output from the controller to output the diffraction type optical modulator provided in the scanning means. Scanning device comprising a. The method of claim 3, wherein The beam intensity control processing means, Button for inputting a setting command of the beam correction mode for correcting the intensity of the diffracted beam output from the diffraction optical modulator Scanning device further comprising. The method of claim 4, wherein When the button is pressed while the diffraction light modulator is set to the "normal mode" for diffracting and irradiating the incident beam without being controlled by the beam intensity control processing means, the control unit terminates the normal mode and the beam correction is performed. Scanning apparatus, characterized in that for setting the mode. The method of claim 3, wherein And the light receiving unit comprises a photodiode which converts an optical signal into an electrical signal and outputs the electrical signal. The method of claim 3, wherein And the light receiver comprises a CMOS image sensor converting an optical signal into an electrical signal and outputting the electrical signal. Generating a beam and diffracting the generated beam according to the magnitude of the driving voltage, reflecting a part of the beam in the diffracted beam, and transmitting a beam other than the reflected beam to irradiate the piececanning object; Converting the beam reflected in the diffraction beam into an analog electrical signal and converting the analog signal into a digital signal; And In a beam compensation mode, a third step of adjusting the driving voltage used for beam diffraction according to a comparison result by comparing the beam intensity of the digital signal with a predetermined reference beam intensity Scanning method comprising a. The method of claim 8, Scanning method, characterized in that to set the normal mode or the beam correction mode according to the user's instructions. The method of claim 8, In the third step, And a beam diffraction is performed only by a driving voltage supplied from an external power source, when it is determined that the digital signal beam intensity is equal to a predetermined reference beam intensity. The method according to any one of claims 8 to 10, In the third step, When it is determined that the predetermined reference beam intensity is large as a result of comparing the beam intensity of the digital signal with the predetermined reference beam intensity, the beam is diffracted according to the voltage added by adding a driving voltage supplied from an external power source and a predetermined voltage. Scanning method characterized in that.