KR100855814B1 - Scanning apparatus for sequentially scanning light according to a switching signal - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning apparatus that performs sequential scanning according to a switching signal. The present invention relates to a predetermined shape by sequentially applying an on / off driving switching signal of each driving cell constituting an optical modulator positioned in a direction perpendicular to a scanning surface A scanning apparatus for forming a spot trace of a symmetrical shape on a scanning surface having a.

Accordingly, the present invention prevents the occurrence of asymmetrical spot trajectories generated on the scanning surface due to the difference in the optical paths of the respective driving cells constituting the optical modulator, thereby providing a planar or curved surface having a two-dimensional shape. It is possible to prevent distortion of the image information, thereby providing an effect of expressing more accurate image information.

Scanning device, light source, light modulation means, optical scanning means, control unit, sequential scanning, switching signal.

Description

Scanning apparatus for sequentially scanning light according to a switching signal {Scanning apparatus for sequentially scanning light according to a switching signal}

1 is a block diagram of a conventional light beam scanning device.

2 is a block diagram of a scanning device using a conventional optical modulator.

FIG. 3 is a diagram illustrating spot trajectories of an asymmetric shape generated by simultaneous switching of respective drive cells of an optical modulator constituting a conventional scanning apparatus. FIG.

Fig. 4 (Figs. 4A and 4B) shows an asymmetrical spot trajectory generated in a piececanning object having an irradiation surface of a predetermined shape by a conventional scanning device.

5 is a block diagram of a scanning device for performing a sequential scan according to a switching signal according to the present invention.

6 is a cross-sectional view of a light modulator composed of a thick film drive cell according to the present invention;

7 is a cross-sectional view of a light modulator composed of a driving cell having a thin film shape according to the present invention;

8 and 9 are views for explaining the operation of the optical modulator operating in conjunction with whether the drive power is applied according to the present invention.

FIG. 10 is a diagram illustrating a spot trajectory having a symmetrical shape formed on a scanning surface by a switching signal sequentially applied to an optical modulator constituting a scanning apparatus according to the present invention. FIG.

Explanation of symbols on the main parts of the drawings

100: light source 200: optical means

210: balanced light lens 220: beam splitter 220

230: cylinder lens 300: light modulation means

310: light modulator 320: beam splitter

330: cylinder lens 340: first focusing lens

350: Slit 360: Parallel light lens

370: second focusing lens 400: light irradiation means

410: rotation mirror 420: focus lens

500 control unit 600 piece canning device

The present invention relates to a scanning device that performs sequential scanning in association with a switching signal.

More specifically, by sequentially applying a switching signal for each drive cell constituting the optical modulator positioned in the direction perpendicular to the scanning surface, the sequential according to the switching signal to form a spot trace of the symmetrical shape on the scanning surface An injection device for performing an injection.

In general, optical signal processing has advantages of high speed, parallel processing capability, and large-capacity information processing, unlike conventional digital information processing, which cannot process a large amount of data and real-time processing, and design a binary phase filter using spatial light modulation theory. Research on fabrication, optical logic gates, optical amplifiers, image processing techniques, optical devices, optical modulators, etc. The dual optical modulator is used in the fields of optical memory, optical display, printer, optical interconnection, and hologram, and the research and development of the light beam scanning device using the same has been in progress.

Such a light beam scanning device scans a light beam in an image forming apparatus such as a laser printer, an LED printer, an electrophotographic copying machine, a word processor, etc., and spots the light beam onto the photosensitive medium to form an image image.

Recently, with the development of projection television and the like, a light beam scanning device has been used as a means for scanning a beam on an image display.

The optical modulator is not necessarily employed in such a light beam scanning device. For example, the conventional light beam scanning apparatus shown in FIG. 1 does not include an optical modulator. More detailed configuration thereof is as follows.

Referring to FIG. 1, a conventional light beam scanning device includes a laser diode (LD) 10 that emits a light beam according to a video signal, and a collimator lens 11 that converts a light beam output from the LD 100 into parallel light. The cylinder lens 12, which makes the parallel light passing through the collimator lens 11 into the linear light in the horizontal direction with respect to the scanning direction, and the horizontal linear light passing through the cylinder lens 12, moves at an isotropic speed. A polygon mirror 13 for scanning, a polygon mirror driving motor 14 for rotating the polygon mirror 13 at a constant speed, and a polygon mirror having a constant refractive index with respect to the optical axis A light beam through the f · θ lens 15 and the f · θ lens 15 for deflecting light at an isometric velocity reflected from the (Polygon Mirror) 13 in the casting yarn direction and correcting aberrations to focus on the irradiation surface Is reflected in a predetermined direction, An imaging mirror 16 for forming an image on the surface of the photosensitive drum 17 in a point shape, a horizontal synchronous mirror 18 for reflecting a laser beam through the f? Lens 15 in a horizontal direction, and a horizontal synchronous mirror And an optical sensor 19 for receiving and synchronizing with the laser beam reflected by 18.

In the conventional laser scanning apparatus, the light beam output from the laser diode 10 passes through the collimator lens 11 and is converted into parallel light, and the light is collected in the rotational axis direction of the polygon mirror 13 by the cylinder lens 12. After that, it is reflected by a polygon mirror 13 rotating at an isometric speed, passes through the f · θ lens 15, and forms a spot on the photosensitive drum 17 with a constant beam diameter. Here, since the resolution of the printer is determined by the beam diameter of the spot formed on the photosensitive drum 17, the workability of the f? Lens should be very excellent.

In general, however, the light beam scanning apparatus should be miniaturized and considered in view of cost. Therefore, the f? Lens is composed of Y-toric, anamorphic, free-form surface, and the like to reduce the number of sheets. Therefore, it is very difficult to process the lens surface of the f · θ lens, resulting in poor workability. As a result, the performance and resolution of the light beam scanning device may be degraded.

In addition, in the conventional scanning apparatus as described above, since the printing speed is proportional to the rotation speed of the polygon mirror and printing is performed one line per side of the polygon mirror, the polygon mirror when performing high speed printing Since the (Polygon Mirror) rotation speed should be faster, the irradiation time of the laser beam is reduced, which causes a problem of using a power laser diode for the same optical scanning effect.

As a technical idea for solving such a problem, as shown in FIG. 2, a scanning apparatus using a diffraction multibeam formed by an optical modulator is disclosed.

Referring to FIG. 2, a conventional scanning device using an optical modulator includes a laser diode (LD) 21 for generating a laser beam, and a laser beam for irradiating the laser beam irradiated from the laser diode 21 into parallel light. A multi-beam control optical modulator 23 which diffracts and modulates a laser beam transformed into parallel light through the first lens 22 and the first lens 22 to output N (N is a natural number) multiple beams, and A diffraction multiplex that is diffracted and modulated by the polygon mirror 24 for scanning the diffraction multibeam output from the beam control optical modulator 23 by moving it at an isotropic speed and the multimodal light control modulator 23. The second lens 25 for focusing the beam in the direction of the rotation axis of the polygon mirror 240, and the diffraction multi-beam of the isometric velocity reflected from the polygon mirror 24 are deflected in the casting yarn direction. The drum and correct the aberration (27) A and a receiving lens (Accepter Lense) (26) for irradiating with a focus on irradiation surface of the object to be scanned.

In the conventional scanning apparatus using the optical modulator 23 as described above, each driving cell constituting the optical modulator 23 which performs diffraction and modulation on laser light incident through the first lens 22 ( When not simultaneously), as shown in FIG. 3, an asymmetrical spot on the irradiated surface of the drum 27, that is, a piececanning object having a predetermined shape due to the optical path difference between the driving cells, is shown. The trajectory 27a is generated.

That is, in the conventional scanning apparatus, as shown in FIGS. 4 and 5, the piece scanning has a predetermined shape, that is, a planar or curved surface having a predetermined shape, that is, two-dimensional shape, due to the optical path difference between the pixels constituting the optical modulator 23. A symmetrical spot trace 27b, such as a rectangle, is not formed on the scanning surface of the object 27, and a trapezoidal asymmetric spot trace 27a is formed.

Therefore, the image information on the scanning surface having a planar or curved surface having a two-dimensional shape due to the asymmetric spot trace 27a generated on the scanning surface due to the optical path difference between the pixels constituting the optical modulator 22. There was a problem that the distortion of, and thus could not represent accurate image information.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and scan is performed by sequentially applying a switching signal for each driving cell constituting an optical modulator positioned in a direction perpendicular to the scanning surface to form a spot trajectory having a symmetrical shape. The purpose is to provide a device.

According to an aspect of the present invention, there is provided a scanning apparatus for performing a sequential scan according to a switching signal, the light source for generating a laser beam; Optical means for scanning the single beam output from the light source in a balanced manner with respect to the optical path direction; Diffraction of the incident light incident from the optical means is performed to form a plurality of diffraction beams, and is sequentially driven on / off in conjunction with a switching signal applied from the outside to form spot traces of symmetrical shapes on the scanning surface. Light modulation means to perform; Scanning means for scanning by moving a plurality of diffracted beams incident through the light modulation means at a boiling line speed or an isotropic speed on the scanning surface; And control means for sequentially transmitting a switching control signal to the light modulation means in order to form a spot trajectory having a symmetrical shape on the scanning surface.

Hereinafter, a configuration and an operation process of a scanning device for performing sequential scanning according to a switching signal according to the present invention will be described in detail with reference to the accompanying drawings.

First, the configuration and operation process of the injection apparatus according to the present invention will be described in detail with reference to FIG. 5.

5 is a configuration diagram of a scanning device that performs sequential scanning according to a switching signal according to the present invention.

The scanning device 100 performing sequential scanning according to the switching signal according to the present invention sequentially applies a switching signal for a driving cell constituting an optical modulator positioned in a direction perpendicular to the scanning surface, thereby spotting a symmetrical shape on the scanning surface. A spot trajectory is formed, as shown in FIG. 5, including a light source 100, an optical means 200, a light modulating means 300, an optical scanning means 400, and a control means 500. Characterized in that configured.

 Here, the light source 100 forms a single beam having a predetermined wavelength and then emits it to the optical means 200 which will be described later. More specifically, the light source 100 is a laser diode LD.

In this case, the laser diode which is the light source 100 has a relatively low output, because it scans a plurality of beams at the same time can allow a long scan time of the laser diode required for exposure to a single pixel.

The optical means 200 is to inject a single beam incident from the light source 100 into the light modulating means 300 which will be described later. As shown in FIG. 5, a balanced light lens 210 and a beam splitter are shown. And a cylinder lens 230.

Here, the parallel light lens 210 converts a single beam of a rectangular waveform incident from the light source 100 into a single beam of a planar waveform, and then transfers it to the beam splitter 220.

In this case, the balanced light lens 210 is disposed between the light source 100 and the beam splitter 220 to be described later. When two or more balanced light lenses 210 are employed, a plurality of balanced light lenses 210 may be used. They are arranged spaced at regular intervals.

The beam splitter 220 serves to reflect a single beam of planar waveform incident through the parallel light lens 210 in an optical path direction in which a cylinder lens 230 to be described later is installed.

The cylinder lens 230 converts a single beam having a planar waveform reflected and incident through the beam splitter 220 into linear light in a vertical direction, and then includes an optical modulator 310 constituting an optical modulator 300 to be described later. Incident in the vertical direction.

The optical modulator 300 diffracts incident light incident from the optical means 200 to form a plurality of diffraction beams, and then sequentially turns on / off the drive according to a switching signal applied through the control means described later. To form a symmetrical spot trace on the scanning surface, as shown in FIG. 5, the optical modulator 310, the beam splitter 320, the cylinder lens 330, and the first focusing lens 340. And a slit 350, a parallel light lens 360, and a second focusing lens 370.

The optical modulator 310 includes a driving cell 312 positioned in a direction perpendicular to the optical path direction and arranged in a one-dimensional shape to diffract a single beam incident through the optical means to form a plurality of diffraction beams. It is composed.

Hereinafter, the structure and operation characteristics of the one-dimensional diffraction type optical modulator applied to the present invention will be described in detail with reference to FIGS. 6 to 9 to assist in understanding the cause of the generation of the plurality of diffraction beams by the optical modulator. Take a look.

6 and 7 are cross-sectional views of an optical modulator composed of a plurality of driving cells having a thick film and a thin film shape arranged in a one-dimensional shape according to the present invention, and FIGS. 8 and 9 are formed by the optical modulator configured as described above. It is sectional drawing for demonstrating the process which a diffraction beam is formed.

The optical modulator 310 diffracts a single beam incident from the optical means 200 via the beam splitter 320 by a step generated between the adjacent driving cells 312 to generate a diffracted beam having a predetermined diffraction coefficient. As shown in FIG. 6 and FIG. 7, a plurality of driving cells 312 having a thin film or a thick film structure are included.

Here, the driving cell 312 is arranged in a one-dimensional shape, it should be noted that it is not limited to this may be arranged in a two-dimensional shape.

That is, as shown in FIG. 6, the optical modulator 310 includes a lower electrode 313 formed on a predetermined silicon substrate 310, a piezoelectric layer 314 formed on the lower electrode 313, and The piezoelectric layer 314 is vertically driven by a driving power applied to the lower electrode 313 and the upper electrode 315 from the outside. And a thick film-shaped driving cell 312 to form a step.

In this case, the optical modulator 310 may further include a micro mirror 316 for maximizing the reflection efficiency of the incident light incident on the upper electrode 315 acting as a reflective surface.

In addition, as shown in FIG. 7, the optical modulator 310 is formed on a substrate 311 having a recessed portion at a central portion thereof, so that the optical modulator 310 has a space for driving up and down of the driving cell 312. A lower support 311 ′ forming a space, a lower electrode 313 formed on the lower support 311 ′, a piezoelectric layer 314 and the piezoelectric layer 314 formed on the lower electrode 313. The upper electrode 315 is formed on the (), the lower electrode 313 is applied from the outside and the driving power applied to the upper electrode 315 is driven in the left and right direction to form a plurality of thin film shape It consists of a drive cell 312.

Here, it should be noted that the lower electrode 313 may be formed directly on the substrate 311 where the depression is formed without interposing the lower support 311 ′.

In this case, the optical modulator 310 may further include a micro mirror 316 for maximizing the reflection efficiency of the incident light incident on the upper electrode 315 acting as a reflective surface.

Here, the lower electrode 313 is formed on a predetermined substrate 311 constituting the driving cell 312 having a thick film structure to provide the piezoelectric layer 314 with a driving voltage applied from the outside. Pt, Ta / It forms on the board | substrate 311 by the sputtering or vapor deposition method for electrode materials, such as Pt, Ni, Au, Al, RuO2.

In addition, the lower electrode 313 is formed on a predetermined substrate 311 or lower support 311 ′ constituting the driving cell 312 having a thin film structure to provide the piezoelectric layer 314 with a driving voltage applied from the outside. It also plays a role.

Here, the lower support 311 ′ is formed by depositing on the silicon substrate 311 to support the piezoelectric layer 314 of the driving cell 312 having a thin film structure, and includes SiO 2, Si 3 N 4, Si, ZrO 2, and Al 2 O 3. It is made of a material such as, the lower support 311 'can be omitted if necessary.

The piezoelectric layer 314 is a piezoelectric / electric distortion material whose length is changed in the up / down direction or the left and right directions by a piezoelectric phenomenon generated in conjunction with a driving power source applied from the outside, more specifically, PzT, PNN- PT, ZnO. Piezoelectric / distortion materials such as Pb, Zr or titanium are wetted (screen printing, Sol-Gel coting, etc.) and dry methods (sputtering, evaporation, vapor deposition, etc.) on the lower electrode 313 in the range of 0.01-20.0 μm. Is formed.

The upper electrode 315 is formed on the piezoelectric layer 314 to perform reflection and diffraction for incident light incident from the outside. More specifically, Pt, Ta / Pt, Ni, Au, Al, RuO2, or the like is performed. The electrode material of is formed in the range of 0.01 ~ 3㎛ through sputtering or deposition method.

At this time, the upper electrode 315 operates as a micromirror that performs reflection and diffraction for an optical signal input from the outside, or Al, Au, which is a predetermined light reflection material, to enhance reflection and diffraction for the optical signal. It may be configured to further include a micro mirror 316 consisting of, Ag, Pt, Au / Cr.

In the optical modulator configured as described above, when no driving power is applied from the outside, as shown in FIG. 8 (FIGS. 8A and 8B), no step is formed between the driving cells 312 so that diffraction does not occur. This forms a zero-order diffraction beam that reflects the single beam in the same direction with respect to the incident direction.

In this case, when the driving power is applied from the outside, the optical modulator is driven by the piezoelectric layer 315 driving in the up-down direction or the left-right direction, as shown in FIG. 9 (FIGS. 9A and 9B). Steps are formed between the cells 312, thereby diffraction of a single beam incident from the outside to form a diffraction beam having a predetermined diffraction coefficient, more specifically, ± 1st order diffraction coefficient.

In the optical modulator 310 configured and operated as described above, the diffraction beams formed by the respective driving cells 312 constituting the optical modulator 310 may be a piece canning object, more specifically, a printer, a display. One spot is formed corresponding to each pixel constituting the scanning surface of the device or the like.

In this case, the optical modulator 310 forms a plurality of diffraction beams by a step between the respective driving cells 312, and when the driving cells 312 are driven on / off simultaneously, the target object 600 having a predetermined shape ), More specifically, due to the optical path difference from a spherical scanning surface such as a printer or a flat scanning surface such as a projection display, causes spot spots of asymmetrical shapes on the scanning surface.

In order to prevent the occurrence of spot trajectories of the asymmetric shape as described above, each drive cell 312 constituting the optical modulator 310, as shown in FIG. Turn on sequentially based on a switching signal incident in conjunction with a predetermined time interval (T = 0, T = T0, T = T1, T = T2, ... T = TN) set in the control means 500 to be described later. Perform on / off drive.

Accordingly, the optical modulator, as shown in FIG. 10, instead of generating a spot trajectory 610a having a trapezoidal asymmetric structure as indicated by a solid line on the scanning surface of the piececanning object 600. A spot trace 610b having a rectangular symmetrical structure as indicated by the dotted line is formed, thereby distorting the image information on the scanning surface of the piece scanning object 600 having a planar or curved surface having a two-dimensional shape. This can be prevented.

The beam splitter 320 transmits the incident beam incident from the optical means 200 to the optical modulator 310, and at the same time, the light irradiation means 400 which describes the diffracted beam emitted from the optical modulator 310 is described later. It serves to reflect in the direction of the optical path located.

The cylinder lens 330 serves to irradiate the diffracted beam reflected by the beam splitter 320 in the direction in which the light irradiation means 400 is located.

The first focusing lens 340 focuses the slit 350 that passes only the diffraction beam having a specific diffraction coefficient among the diffraction beams having a zeroth order and a ± first order diffraction coefficient irradiated through the cylinder lens 330. Perform.

The slit 350 performs filtering on a diffraction beam having a specific diffraction coefficient among the diffraction beams focused through the first focusing lens 340, thereby equilibrating a diffraction beam having a predetermined diffraction coefficient filtered later. It passes through the optical lens 360.

The balanced light lens 360 transforms a diffracted beam having a predetermined diffraction coefficient filtered through the slit 350 into a balanced light, and then a second focusing lens 370 which describes the diffracted beam transformed into the balanced light. It serves to deliver.

The second focusing lens 370 is a rotation mirror 410 constituting the optical scanning means 400 to describe the diffracted beam converted into the balanced light by the balanced light lens 360, more specifically a polygon mirror (Polygon) Mirror) or focus on the galvano mirror.

The light irradiation means 400 is a piece scanning device 600 having a predetermined shape for a plurality of diffraction beams incident through the light modulation means 300, more specifically, a piece scanning device 600 such as a printer or a display device. The scanning is performed by moving at a boiling line speed or an isoline speed on the scanning surface of, as shown in FIG. 5, and includes a rotating mirror 410 and a focusing lens 420.

The rotating mirror 410 includes a motor (not shown) capable of rotating in both directions, and scans the diffracted multibeam while rotating by the motor. The rotating mirror 410 may be implemented as a polygon mirror or a galvano mirror.

When the polygon mirror is used as the rotation mirror 410, the polygon mirror has a characteristic of shifting the diffracted multibeam output from the multibeam optical modulator 310 at an isotropic speed. At this time, the focus lens 420 focuses the diffraction multi-beams at an isometric velocity reflected by the polygon mirror and deflects them in the main scanning direction.

When the galvano mirror is employed as the rotating mirror 410, the galvano mirror has a characteristic of moving the diffracted multibeam output from the multibeam optical modulator 310 at a specific linear velocity. At this time, the focus lens 420 focuses the diffraction multi-beams having an anisotropic velocity reflected from the galvano mirror and deflects them in the main scanning direction.

In this case, the rotation mirror 410 is driven on / off in conjunction with the control signal input from the control means 500 to be described later, and rotates at a predetermined rotation speed at the time of driving.

The rotating mirror 410 is implemented as a polygon to reflect the beam incident through each surface during rotation. At this time, the beam reflected from one surface of the rotating mirror 410 forms a spot array at a predetermined interval and is scanned in the piece scanning object 600, the spot array (spot) of the piece scanning object 600 It is formed in a row on the cross section. The beam reflected by the next side of the current reflecting surface also forms an evenly spaced spot array on the cross section of the piececanning object 600, with the spot arrangement of the beam reflected by the previous surface. It is located below and spaced apart from the spot array of the beam. Accordingly, a spot array of beams reflected by each surface of the rotating mirror 410 is formed vertically and horizontally on the piececanning object 600.

The focus lens 420 precisely focuses the diffracted beam scanned by the rotation mirror 410 to the pixel having a predetermined address on the irradiation surface constituting the piececanning object 600.

In this case, the focus lens 420 is positioned between the rotating mirror 410 and the irradiation surface of the piece scanning object 600, and when two or more focus lenses 420 are disposed, a plurality of lenses are spaced at a predetermined interval. Are arranged.

The control unit 500 transmits a predetermined speed control signal to the rotation mirror 410 constituting the optical scanning means 400 to allow the rotation mirror 410 to rotate constantly at a preset speed, thereby providing an optical modulator ( A spot array formed on the scanning surface of the piececanning object 600 is arranged at regular intervals by the diffraction beam generated from 310.

In addition, the controller 500 may form a symmetrical spot trace 610b on a spherical or planar scanning surface constituting the piececanning object 600, as shown in FIG. 10, for a predetermined time. It serves to sequentially transmit the on / off switching signal to the drive cell 312 constituting the optical modulator 310 at intervals (T = 0, T = T0, T = T1, T = T2, ... T = TN). Perform.

In this case, the driving cell 312 is driven on / off with a time interval corresponding to the optical path difference with the scanning surface in conjunction with the switching signal sequentially input from the control unit 500, as shown in FIG. A spot trace 610b having a symmetrical shape is formed on a scanning surface having a spherical or planar shape.

That is, by forming the spot trajectory 610b of the symmetrical detective on the scanning surface of the piece scanning object 600, on the scanning surface of the piece scanning object 600 due to the conventional asymmetric spot trajectory 610a Distortion of the generated image information can be prevented, whereby more accurate image information can be represented on the scanning surface of the piece scanning object 600.

As described above, the present invention by sequentially applying the on / off switching signal for each drive cell of the optical modulator located in the direction perpendicular to the scanning surface to prevent the spot trajectory of the symmetrical shape on the scanning surface, It is possible to prevent distortion of the image information on the scanning surface having a two-dimensional plane or curved surface, thereby providing an effect of expressing more accurate image information.

Herein, the present invention described above has been described with reference to preferred embodiments, but those skilled in the art can variously modify and modify the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. It will be appreciated that this can be changed.

Claims (7)

A light source for generating a laser beam; Optical means for scanning the single beam output from the light source in a balanced manner with respect to the optical path direction; Diffraction of the incident light incident from the optical means is performed to form a plurality of diffraction beams, and is sequentially driven on / off in conjunction with a switching signal applied from the outside to form spot traces of symmetrical shapes on the scanning surface. Light modulation means to perform; Scanning means for scanning by moving a plurality of diffracted beams incident through the light modulation means at a boiling line speed or an isotropic speed on the scanning surface; And Control unit for transmitting a switching control signal to the optical modulation means at a predetermined time interval to form a spot trace of the symmetrical shape on the scanning surface Injection device characterized in that configured to include. The method of claim 1, wherein the optical means, A balanced light lens for transforming a beam generated from the light source into parallel light with respect to an optical path direction; A beam splitter for reflecting an incident beam transformed into parallel light through the balanced light lens in a direction in which the optical scanning means is located; And A cylinder lens for irradiating the incident beam reflected through the beam splitter to the light modulation means Injection device comprising a. The method of claim 1, wherein the optical modulation means, It consists of a predetermined number of drive cells for diffracting the incident beam incident through the optical means, sequentially driving the diffraction beam formed by sequentially driving the drive cell on / off in accordance with the switching signal applied through the control unit An optical modulator emitting to the outside; A beam splitter for transmitting the incident beam incident from the optical means to the optical modulator and reflecting the diffracted beam emitted from the optical modulator to the outside; A cylinder lens for irradiating a diffracted beam reflected through the beam splitter in a direction in which the light irradiation means is located; A first focusing lens for focusing the diffracted beam irradiated through the cylinder lens; A slit for passing only diffraction signal beams of a predetermined order among diffraction beams focused through the first focusing lens; A balanced light lens for transforming the diffracted beam passed through the slit into balanced light; And A second focusing lens for focusing the diffracted beam transformed into balanced light by the balanced light lens on the optical scanning means Injection device comprising a. The method of claim 3, wherein the optical modulator, And a plurality of driving cells arranged in a direction perpendicular to the light incidence direction and sequentially driven on / off in accordance with the switching signal in a one-dimensional shape. The method of claim 1, wherein the optical scanning means, A rotating mirror which scans the diffracted beam incident through the optical scanning means at a boiling line speed or an isotropic speed; And Focus lens for focusing the diffracted beam reflected by the rotating mirror at each pixel position of the scanning surface having a unique address Injection device characterized in that configured to include. The method of claim 5, wherein the rotating mirror, Scanning apparatus, characterized in that the polygon mirror for rotating in two directions by the bidirectional rotation motor to move the diffracted beam at a boiling line speed on the scanning surface The method of claim 5, wherein the rotating mirror, Scanning apparatus, characterized in that the galvano mirror which rotates bidirectionally by a bidirectional rotating motor to move the diffracted beam at an isotropic speed on the scanning surface

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