KR20050103385A - Fixing jig for the inner portion of pellicle frame - Google Patents

Fixing jig for the inner portion of pellicle frame Download PDF

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KR20050103385A
KR20050103385A KR1020040028653A KR20040028653A KR20050103385A KR 20050103385 A KR20050103385 A KR 20050103385A KR 1020040028653 A KR1020040028653 A KR 1020040028653A KR 20040028653 A KR20040028653 A KR 20040028653A KR 20050103385 A KR20050103385 A KR 20050103385A
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pellicle frame
fixed
fixing
fixing jig
pressing
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KR1020040028653A
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KR100579802B1 (en
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권선용
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권선용
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
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  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

본 발명은 펠리클 프레임용 박판을 가공하는데 사용하는 펠리클 프레임용 내경 고정 지그에 관한 것으로, 중앙에 받침부(3)가 고정되는 고정부(1)와, 고정부(1)의 상부에 놓여지고 양측모서리에는 누름턱(12)이 형성된 누름막대(10)로 구성되어 고정부(1)의 받침부(3)의 외측에 펠리클 프레임(2)이 위치되면 누름막대(10)를 고정부(1)위에 볼트(5)로 고정하여 펠리클 프레임(2)의 내부모서리는 누름막대(10)의 누름턱(12)에 의해서 고정된다.The present invention relates to an inner diameter fixing jig for a pellicle frame used to process a thin plate for a pellicle frame, and includes a fixing part (1) to which a supporting part (3) is fixed at the center, and placed on an upper part of the fixing part (1). When the pellicle frame (2) is located on the outside of the base 3 of the fixing part 1 is formed of a pressing bar (10) having a pressing jaw (12) at the corners, the pressing bar (10) is fixed to the fixing part (1). The upper edge of the pellicle frame 2 is fixed by the pressing jaw 12 of the pressing bar 10 by fixing the bolt 5 above.

Description

펠리클 프레임용 내경 고정 지그{Fixing jig for the inner portion of pellicle frame}Fixing jig for the inner portion of pellicle frame}

본 발명은 펠리클 프레임용 박판을 가공하는데 사용하는 펠리클 프레임용 내경 고정 지그에 관한 것이다.The present invention relates to an inner diameter fixing jig for a pellicle frame used for processing a thin plate for a pellicle frame.

일반적으로, 펠리클 프레임 박판은 알루미늄 소재의 박판을 3 내지 5 mm 두께로 가공하고 외경을 가공한 후 내경을 가공한다.In general, the pellicle frame thin plate is processed to an aluminum plate of 3 to 5 mm thickness and the outer diameter after processing the inner diameter.

그러나, 경우에 따라서는 펠리클 프레임의 내경을 먼저 가공한 후 외경을 가공해야 할 필요도 있다.However, in some cases, it is necessary to process the inner diameter of the pellicle frame first and then the outer diameter.

내경은 박판을 밀링 머신에서 일정 두께로 가공한 후, 머시닝 센터에서 정밀 가공되어 이루어진다.The inner diameter is made by machining the sheet to a certain thickness in the milling machine and then precision machining in the machining center.

외경은 펠리클프레임을 머시닝 센터의 작업대에 고정하고 펠리클 프레임의 내부모서리를 고정한 후 가공되는데, 이 때 펠리클 프레임을 작업대에 고정하는 지그가 필요하다.The outer diameter is processed after fixing the pellicle frame to the workbench of the machining center and fixing the inner edge of the pellicle frame, which requires a jig for fixing the pellicle frame to the workbench.

본 발명의 목적은 상기와 같은 요구에 부응하여 머시닝 센터의 작업대에 고정되는 고정부와 고정부의 상부에서 받침부 주위에 위치되는 다수개의 누름막대로 구성되는 펠리클 프레임용 내경 고정 지그를 제공하고자 하는 것이다.SUMMARY OF THE INVENTION An object of the present invention is to provide an inner diameter fixing jig for a pellicle frame composed of a plurality of pressing rods positioned around a support portion at a top of a fixing portion and a fixing portion fixed to a workbench of a machining center in response to the above demands. will be.

본 발명의 내경 고정 지그는 머시닝 센터의 작업대에 고정되는 고정부와, 상기 고정부의 중앙에 일정 간격으로 고정되는 사각 막대형의 다수개의 받침부와, 펠리클 프레임이 받침부의 외측에 위치되면 펠리클 프레임과 받침부사이에는 고정되는 다수개의 누름막대로 구성된다.Inner diameter fixing jig of the present invention is a fixed part fixed to the workbench of the machining center, a plurality of supporting members of the square bar-shaped fixed at regular intervals in the center of the fixing portion, the pellicle frame is located on the outside of the support pellicle frame It is composed of a plurality of pressing rods fixed between the base and the support.

본 발명의 누름막대는 양측모서리에 누름턱이 형성된다.In the push bar of the present invention, pressing jaws are formed at both edges.

본 발명을 첨부된 도면을 참조하여 상세히 설명한다.The present invention will be described in detail with reference to the accompanying drawings.

도1에는 본 발명의 펠리클 프레임용 내경 고정 지그가 분해도로서 도시된다.1 shows an inner diameter fixing jig for a pellicle frame of the present invention as an exploded view.

머시닝 센터의 작업대에 고정되는 고정부(1)는 사각형 몸체를 가지며, 중앙에는 사각 막대형의 다수개의 받침부(3)가 일정 간격으로 고정된다.The fixing part 1 fixed to the worktable of the machining center has a rectangular body, and a plurality of supporting parts 3 of a rectangular bar shape are fixed at regular intervals in the center thereof.

각각의 받침부(3)는 볼트에 의해서 고정부(1)위에 고정된다.Each supporting part 3 is fixed on the fixing part 1 by bolts.

펠리클 프레임(2)은 사각테의 형상을 가지며, 중앙에는 사각형 구멍이 형성된다. 펠리클 프레임(2)은 받침부(3)의 외측에 위치되며 펠리클 프레임(2)과 받침부(3)사이에는 다수개의 누름막대(10)가 볼트(5)에 의해서 고정부(1)에 고정된다.The pellicle frame 2 has a rectangular frame, and a rectangular hole is formed in the center thereof. The pellicle frame 2 is located outside the base 3 and a plurality of push bars 10 are fixed to the fixing part 1 by the bolt 5 between the pellicle frame 2 and the base 3. do.

누름막대(10)를 볼트(5)에 의해서 고정부(1)에 장착될 때 균일한 힘을 가하여 압력 게이지를 사용하면 소재의 잔류응력을 분산시켜 펠리클 프레임(2)의 뒤틀림을 방지할 수 있다.When the pressure bar is applied to the fixing part 1 by the bolts 5, the pressure gauge is applied by applying a uniform force to disperse residual stresses of the material, thereby preventing warping of the pellicle frame 2. .

누름막대(10)의 양측모서리에는 누름턱(12)이 형성된다.The pressing jaw 12 is formed at both edges of the pressing bar 10.

도2는 도1에 도시된 본 발명의 내경 고정 지그의 조립상태가 단면도로서 도시된다.FIG. 2 is a cross-sectional view showing the assembled state of the inner diameter fixing jig of the present invention shown in FIG.

받침부(3)는 고정부(1)의 상면에 형성된 볼트공에 볼트(5)에 의해서 고정되어 있다.The supporting part 3 is fixed to the bolt hole formed in the upper surface of the fixing part 1 by the bolt 5.

본 발명의 펠리클 프레임용 내경 고정 지그를 사용하려면, 펠리클 프레임(2)을 고정부(1)의 받침부(3)주위에 위치시키고 받침부(3)와 펠리클 프레임(2)사이에 누름막대(10)를 볼트(5)로 고정시킨다.In order to use the inner diameter fixing jig for the pellicle frame of the present invention, the pellicle frame 2 is positioned around the supporting part 3 of the fixing part 1 and the pressing rod between the supporting part 3 and the pellicle frame 2 ( 10) secure with bolts (5).

다수개의 누름막대(10)는 받침부(3)와 펠리클 프레임(2)을 누름턱(12)에 의해서 고정시킨다.The plurality of push bars 10 are fixed to the base 3 and the pellicle frame 2 by the pressing jaw (12).

상기에 언급된 받침부(3)와 누름막대(10)는 펠리클 프레임의 크기에 따라 사용하는 숫자를 조정할 수 있다. The support 3 and the push bar 10 mentioned above can adjust the number used according to the size of the pellicle frame.

상기와 같이 구성된 본 발명의 펠리클 프레임용 내경 고정 지그는 펠리클 프레임의 알루미늄 소재의 형상 가공시 뒤틀림을 방지하고 요구하는 치수의 균일성과 양호한 평행도 및 평판도를 갖게하며 가공시 공구와 소재의 마찰로 인한 진동을 최소화하여 표면 조도 상태를 개선시키는 효과를 제공한다. The internal diameter fixing jig for the pellicle frame of the present invention configured as described above prevents warping during machining of the aluminum material of the pellicle frame, has uniformity and good parallelism and flatness of the required dimensions, and vibrations due to friction between the tool and the material during processing. By minimizing this, it provides the effect of improving the surface roughness state.

도1은 본 발명의 펠리클 프레임의 내경 고정 지그를 도시하는 분해도1 is an exploded view showing an inner diameter fixing jig of a pellicle frame of the present invention;

도2는 도1에 도시된 본 발명의 내경 고정 지그의 조립상태를 도시하는 단면도FIG. 2 is a cross-sectional view showing an assembled state of the inner diameter fixing jig of the present invention shown in FIG.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for main parts of the drawings>

1: 고정부 2: 펠리클 프레임 3: 받침부1: fixing part 2: pellicle frame 3: supporting part

5: 볼트 10: 누름막대 12: 누름턱5: bolt 10: pressing rod 12: pressing jaw

Claims (2)

머시닝 센터의 작업대에 고정되는 고정부(1)와, A fixed part 1 fixed to a work table of the machining center, 상기 고정부(1)의 중앙에 일정 간격으로 고정되는 사각 막대형의 다수개의 받침부(3)와,A plurality of square bar-shaped support parts 3 fixed at regular intervals in the center of the fixing part 1, 펠리클 프레임(2)이 받침부(3)의 외측에 위치되면 펠리클 프레임(2)과 받침부(3)사이에는 고정되는 다수개의 누름막대(10)로 구성되는 펠리클 프레임용 내경 고정 지그.An internal diameter fixing jig for a pellicle frame composed of a plurality of push bars 10 fixed between the pellicle frame 2 and the support part 3 when the pellicle frame 2 is positioned outside the support part 3. 제1항에 있어서,The method of claim 1, 상기 누름막대(10)는 양측모서리에 누름턱(12)이 형성되게 구성된 펠리클 프레임용 내경 고정 지그.The pressing rod 10 is an inner diameter fixing jig for a pellicle frame is formed so that the pressing jaw (12) is formed at both edges.
KR1020040028653A 2004-04-26 2004-04-26 Fixing jig for the inner portion of pellicle frame KR100579802B1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100596025B1 (en) * 2005-12-07 2006-07-03 권선용 Pellicle frame zig assembly
KR100796343B1 (en) * 2006-03-27 2008-01-21 권선용 Inner jig for pellicle frame
KR101672917B1 (en) * 2015-11-13 2016-11-04 서충배 Jig For Piston Mold That containing Hard Material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100596025B1 (en) * 2005-12-07 2006-07-03 권선용 Pellicle frame zig assembly
KR100796343B1 (en) * 2006-03-27 2008-01-21 권선용 Inner jig for pellicle frame
KR101672917B1 (en) * 2015-11-13 2016-11-04 서충배 Jig For Piston Mold That containing Hard Material

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