KR20050041669A - Lamination apparatus - Google Patents

Abstract

The present invention relates to a lamination apparatus having a structure capable of continuously attaching a lamination sheet on a glass substrate at a predetermined interval when manufacturing a plasma display panel in a multifaceted manner.

Lamination apparatus according to the present invention, the lamination sheet wound feed roller; A cutter assembly for cutting a lamination sheet of a predetermined length supplied from the feed roller; A transfer roller which transfers corona static electricity to a surface of the cut lamination sheet and attaches the upper surface of the glass substrate supplied along the travel path; And a support member for releasing the lamination sheet from the supply roller at a predetermined time and traveling through a traveling path, and supplying the lamination sheet to the transfer roller, wherein the lamination sheet is cut by the support member. Characterized in that the glass substrate is spaced apart at regular intervals.

Description

Lamination Device {LAMINATION APPARATUS}

The present invention relates to a lamination device, and more particularly, to a lamination device having a structure capable of continuously attaching a lamination sheet on a glass substrate at a predetermined interval when manufacturing a plasma display panel in a multi-sided manner. .

In a general semiconductor manufacturing process, a plurality of stacks are sequentially stacked on a substrate to manufacture a semiconductor in order to manufacture layers having different properties by stacking layers having different properties. In the semiconductor manufacturing process, various lamination methods such as photolithography, lift-off, and screen printing are used.

Among these, the photolithographic method which is easy to manufacture especially is widely used. The photolithography method uses photo printing technology to implement components, wirings, and thin films constituting a semiconductor integrated circuit. That is, in the photolithography method, a photoresist (PR) having a photosensitive property is applied thinly on a semiconductor wafer, and then a circuit is constructed in the same manner as taking a photograph by applying a light on a desired mark pattern.

Here, the photoresist is a photosensitive material for an exposure process that allows a fine circuit pattern to be formed by differently responding to irradiation of light when transferring a designed semiconductor circuit to a wafer, and is a material for forming an anticorrosive coating by exposure. It is used for fine processing of semiconductors such as photoetching, integrated circuit (IC), and large scale integration (LSI), which perform precision processing of various metal plates in addition to photolithography for photolithography.

The photoresist is widely used in the form of lamination sheet, and is used in large amounts in liquid crystal display panels (LCDs) and plasma display panels (PDPs) due to the uniformity of thickness and the advantages of process simplification. have. In the case of the plasma display panel, not only the photoresist for electrode formation but also a dielectric and a partition wall are used in the form of the lamination sheet.

However, when manufacturing a plurality of substrates using the lamination sheet as described above there is a problem in the process. For example, in the case of a plasma display panel, when manufacturing a plurality of plasma display panels on one glass substrate, the lamination sheets should be attached to the glass substrate at regular intervals. In the case of mounting each component of the display panel, it is not only impossible to remove the dielectric, but also has a problem of covering an electrode part that must be exposed for connection with a flexible printed circuit (FPC).

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a lamination sheet on a glass substrate so as to be suitable for manufacturing a plurality of semiconductor devices, liquid crystal display panels, or plasma display panels on a single substrate. To provide a lamination device having a structure that can be continuously spaced apart.

Lamination apparatus according to the present invention for achieving the above object is a lamination sheet wound feed roller; A cutter assembly for cutting a lamination sheet of a predetermined length supplied from the feed roller; A transfer roller which transfers corona static electricity to a surface of the cut lamination sheet and attaches the upper surface of the glass substrate supplied along the travel path; And a support member for releasing the lamination sheet from the supply roller at a predetermined time and traveling through a traveling path, and supplying the lamination sheet to the transfer roller, wherein the lamination sheet is cut by the support member. Characterized in that the glass substrate is spaced apart at regular intervals.

In the lamination apparatus according to the present invention, it is preferable that the lamination sheet is supplied in at least two rows or more along the longitudinal direction of the glass substrate.

In the lamination apparatus according to the present invention, the supply roller is preferably freely rotated while the lamination sheet is released by the support member.

In the lamination apparatus according to the present invention, the cutter assembly comprises: a mounting block mounted to be reciprocally movable in a direction perpendicular to the running direction of the lamination sheet; And a cutter installed on the mount block.

The lamination apparatus according to the present invention further includes a recovery roller for recovering the cover film attached to the lamination sheet.

The lamination apparatus according to the present invention further includes a support roller disposed below the transfer roller so that the glass substrate travels along the travel path of the lamination sheet.

The lamination apparatus according to the present invention further includes a tension member installed on the travel path to adjust the tension of the lamination sheet.

In the lamination apparatus according to the present invention, the tension member comprises: a guide roller installed on the travel path; A tension roller installed to be spaced apart from the guide roller; A tension bar which is supported by the rotation shaft of the guide roller and the rotation shaft of the tension roller, respectively, and rotates about the rotation shaft of the guide roller; And a tension spring installed at an end of the tension bar to support the tension roller.

In the lamination apparatus according to the present invention, the support member comprises: a first adsorption plate installed to be reciprocally moved along the travel path so as to adsorb the lamination sheet wound on the feed roller at a predetermined time difference and supply it through the travel path; And a second adsorption plate installed to reciprocate along the travel path to absorb the lamination sheet supplied by the first adsorption plate and to supply the lamination sheet to the transfer roller.

In the lamination apparatus according to the present invention, in the case of a plasma display panel (PDP), the lamination sheet is preferably any one of an electrode material, a dielectric material, and a barrier material.

In the lamination apparatus according to the present invention, the interval of the lamination sheet attached to the glass substrate is preferably 10 ~ 40mm.

Hereinafter, a lamination apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a front configuration diagram schematically showing the configuration of a lamination device according to the present invention.

As shown in FIG. 1, the lamination apparatus according to the present invention may apply an electrode, a dielectric, or a partition to a glass substrate 1 as a lamination sheet to form a plurality of plasma display panels on one glass substrate 1. At this time, the lamination sheet 10 has a structure capable of continuously attaching the lamination sheet at a predetermined interval apart.

Lamination apparatus according to the present invention can attach the lamination sheet 10 on the glass substrate 1 spaced apart in two rows at regular intervals, spaced at regular intervals in a row or more matrices according to the size of the glass substrate 1 Can be attached. However, hereinafter, an example in which the lamination sheet 10 is attached to the glass substrate 1 at a predetermined interval apart from each other will be described.

The apparatus is divided into various components as follows. These components may be installed in one frame 20, or each of the divided frames 20 may be combined. In addition, each component is controlled by a control unit (not shown).

The frame 20 is configured to support the device with respect to the ground, and is equipped with various motors for driving the device, a high pressure air system, a vacuum system, an electronic measurement system, and the like.

The components of the present invention described below are all installed in the frame 20, and various brackets, blocks, plates, housings, covers, collars, and the like are attached elements for installing the respective components in the frame 20. Therefore, except for exceptional cases, the frame 20 is generally referred to as a rule.

The lamination apparatus according to the present invention includes a feed roller 30 on which the lamination sheet 10 is wound, a recovery roller 40 for recovering the cover film 11 attached to the lamination sheet 10, and a lamination sheet 10. The tension member 50 for adjusting the tension, the cutter assembly 60 cutting the lamination sheet 10 of a predetermined length supplied from the feed roller 30, and the corona static electricity on the surface of the cut lamination sheet 10. Transfer roller 70 attached to the upper surface of the glass substrate 1 supplied along the traveling path and the glass substrate 1 moves along the traveling path of the lamination sheet 10 of the transfer roller 70. The support roller 80 and the lamination sheet 10 disposed at the lower side are released from the supply roller 30 with a predetermined time difference to be supported to travel through the traveling path, and the lamination sheet 10 is supported by the transfer roller 70. It is provided with a support member 90 to supply.

The lamination sheet 10 described above is composed of a cover film 11 and a transfer material attached to the cover film 11, and in the case of a plasma display panel, the transfer material includes an electrode material, a dielectric material, and The partition material etc. are mentioned as an example. As the electrode material, indium tin oxide (ITO) and SnO ₂ for transparent electrodes, Cr-Cu-Cr or Ag for bus electrodes, and Ag for address electrodes are widely used. In addition, as the dielectric, a paste mainly composed of low melting point glass powder, that is, glass paste is used. As the partition wall, a material in which an organic solution (organic solvent + resin) or various fillers (alumina or various metals) is added to the low melting glass powder is used.

The supply roller 30 is rotatably installed in the frame 20, the lamination sheet 10 as described above is wound in a roll shape, the lamination sheet 10 is released and supplied in a predetermined travel path. Preferably, the feed roller 30 is not driven by a predetermined drive source, and is freely rotated while the lamination sheet 10 is released by the support member 90 described later. In addition, the supply roller 30 may be supported by a separate holder (not shown) to be rotatably mounted to the frame 20.

The recovery roller 40 is installed in close proximity to the supply roller 30, and is rotatably mounted to the frame 20 so as to wind up the cover film 11 attached to the lamination sheet 10. The recovery roller 40 has a structure in which the rotating shaft is connected to the rotating shaft (not shown) of the feed roller 30 by a belt or a chain and rotated together as the feed roller 30 is rotated. The recovery roller 40 may be supported by a separate holder together with the supply roller 30 to be rotatably mounted to the frame 20.

FIG. 2 is a perspective view illustrating the tension member shown in FIG. 1.

1 and 2, the tension member 50 is to impart a predetermined tensile force to the lamination sheet 10 supplied from the supply roller 30, on the traveling path of the lamination sheet 10 Guide rollers 51 installed on the guide rollers 51, the tension rollers 52 positioned to be spaced apart from the guide rollers 51, and the rotation shafts of the guide rollers 51 and the rotation shafts of the tension rollers 52, respectively. The tension bar 53 which rotates about the rotation axis of the tension bar, and the tension spring 54 provided in the edge part of the tension bar 53 so that the tension roller 52 may be supported.

The transfer roller 70 transfers corona static electricity to the surface of the lamination sheet 10 supplied from the supply roller 30 so that the lamination sheet 10 is easily attached to the upper surface of the glass substrate 1. The transfer roller 70 has its surface charged by a separate corona device (not shown).

On the other hand, the glass substrate 1 is a substrate for manufacturing a plurality of plasma display panel, passing between the transfer roller 70 and the support roller 80 disposed below the transfer roller 70, the transfer roller 70 ) Is supplied in the same direction as the traveling direction of the lamination sheet 10 to be supplied. The support roller 80 supports the lower surface of the glass substrate 1 and is rotated by a separate driving source. Therefore, the lamination sheet 10 as the glass substrate 1 is supplied between the transfer roller 70 and the support roller 80, and at the same time the lamination sheet 10 is supplied between the transfer roller 70 and the glass substrate 1. Is attached to the upper surface of the glass substrate 1 by the complementary pressing force of the transfer roller 70 and the support roller 80, and corona static electricity charged on the surface thereof.

3 is a perspective view illustrating the cutter assembly shown in FIG. 1.

1 and 3, the cutter assembly 60 is a direction in which the lamination sheet 10 is perpendicular to the traveling path while the lamination sheet 10 is supplied from the feed roller 30 by a predetermined length. It has a structure that can be cut by To this end, the cutter assembly 60 is installed at the ends of the lead screw 61 and the lead screw 61 rotatably installed in the frame 20 along a direction perpendicular to the travel path of the lamination sheet 10. A drive motor 62 for forward and reverse rotation of the lead screw 61 by the driving force, a mount block 63 coupled to the lead screw 61 and movable horizontally by rotation of the lead screw 61, and a mount block 63; A pair of guide rods 64 installed in the frame 20 and the mounting block 63 to guide the horizontal movement of the cutting unit 10, and cut the lamination sheet 10 by the horizontal movement of the mount block 63. The cutter 65 is provided.

4 is a cross-sectional configuration view showing a portion of the support member shown in FIG.

1 and 4, the support member 90 according to the embodiment of the present invention is a lamination sheet 10 cut by a predetermined length by the cutter assembly 60, the upper surface of the glass substrate (1) In order to continuously attach to a predetermined interval apart.

The support member 90 for this purpose is the first adsorption plate 91 and the first adsorption plate 91 for adsorbing the lamination sheet 10 wound around the supply roller 30 at a predetermined time and supplying the same through a travel path. And a second adsorption plate 92 for adsorbing the lamination sheet 10 supplied by the < RTI ID = 0.0 >

The first adsorption plate 91 is for unwinding the lamination sheet 10 wound around the supply roller 30 to travel along the travel path. The first suction plate 91 is positioned close to the cutter assembly 60, and is slidably installed in the frame 20 to reciprocate along the travel path of the lamination sheet 10. That is, the first adsorption plate 91 is screwed to a predetermined driving means 93, for example, a ball screw, and the lamination sheet 10 along the guide rail formed on the frame 20 while the ball screw is rotated by a servo motor. ) Sliding in the direction of travel. As an alternative, the drive means 93 is not limited to having a ball screw and a servomotor, and may also include a cylinder which is normally operated by oil or pneumatic pressure. In addition, the first adsorption plate 91 has a structure capable of selectively adsorbing the lamination sheet 10 so as to release the lamination sheet 10 wound around the feed roller 30 to travel along the travel path. To this end, the first suction plate 91 is formed with a suction hole 95 for adsorbing the lamination sheet 10 by the vacuum pressure generated from the vacuum pump 94.

The second adsorption plate 92 is to adsorb the lamination sheet 10 adsorbed on the first adsorption plate 91 to supply the transfer roller 70. The second suction plate 92 is positioned close to the transfer roller 70 and slidably installed in the frame 20 so as to reciprocate along the travel path of the lamination sheet 10. That is, the second adsorption plate 92 is screwed to a predetermined driving means 93, for example, a ball screw, and the lamination sheet 10 along the guide rail formed on the frame 20 while the ball screw is rotated by the servo motor. ) Sliding in the direction of travel. As an alternative, the drive means 93 is not limited to having a ball screw and a servomotor, and may also include a cylinder which is normally operated by oil or pneumatic pressure. In addition, the second adsorption plate 92 has a structure capable of selectively adsorbing the lamination sheet 10 to receive the lamination sheet 10 adsorbed on the first adsorption plate 91 and to supply the transfer roller 70. Have To this end, a suction hole 95 is formed in the second suction plate 92 to suck the lamination sheet 10 by the vacuum pressure generated from the vacuum pump 94.

Referring to the operation of the lamination device according to an embodiment of the present invention configured as described above in detail as follows.

First, in a state in which the lamination sheet 10 wound around the feed roller 30 is released to the position of the first adsorption plate 91, the first adsorption plate 91 adsorbs the lamination sheet 10 and the lamination sheet ( It moves to the 2nd adsorption plate 92 side along the travel path of 10).

Subsequently, when the first adsorption plate 91 comes close to the second adsorption plate 92, the first adsorption plate 91 stops adsorption of the lamination sheet 10 and returns to the original position.

Next, the second adsorption plate 92 adsorbs the lamination sheet 10 and moves to the transfer roller 70 side along the travel path of the lamination sheet 10.

Subsequently, when the second adsorption plate 92 comes close to the transfer roller 70, the second adsorption plate 92 stops adsorption of the lamination sheet 10 and returns to the original position.

Next, the cutter assembly 60 is started. Then, the lead screw 61 is rotated by the rotation of the drive motor 62, the mount block 63 is guided along the guide rod 64 by the rotation of the lead screw 61 of the lamination sheet 10 It is moved horizontally in the width direction. As a result, the lamination sheet 10 is cut by the cutter 65 installed on the mount block 63.

Subsequently, when the cutting of the lamination sheet 10 is completed, the mount block 63 is returned to its original position by the driving of the driving motor 62. At this time, the first adsorption plate 91 is in a state where the adsorption of the lamination sheet 10 is stopped while the cutter 65 cuts the lamination sheet 10, and the transfer roller 70 and the support roller 80 are While rotating by the drive of the support roller 80, it will be in the state which the glass substrate 1 draws in between them.

As such, when the cutting of the lamination sheet 10 is completed, the second adsorption plate 92 adsorbs the cut lamination sheet 10 and slides the lamination sheet 10 while transferring along the driving path. Supplies). At this time, the transfer roller 70 transfers the corona static electricity to the surface of the lamination sheet 10. Therefore, the lamination sheet 10 is the glass substrate 1 by the complementary pressing force of the transfer roller 70 and the support roller 80 between the transfer roller 70 and the glass substrate 1, and the static electricity charged on the surface. Is attached to the top of the

During this process, the first adsorption plate 91, after the cutting of the lamination sheet 10 is completed, the cut and the remaining lamination sheet 10 is adsorbed, and slides along the travel path. Then, the lamination sheet 10 is driven along the travel path while being released from the supply roller 30.

Subsequently, when the first adsorption plate 91 comes close to the second adsorption plate 92, the first adsorption plate 91 stops suction of the lamination sheet 10 and returns to the original position.

Next, the second adsorption plate 92 adsorbs the lamination sheet 10 and slides toward the transfer roller 70 along the travel path. When the second suction plate 92 comes close to the transfer roller 70, the second suction plate 92 moves the lamination sheet 10 to the transfer roller 70 while the suction of the lamination sheet 10 is stopped. ), Then return to its original position.

Subsequently, as described above in the state in which the adsorption of the first adsorption plate 91 is stopped, when the lamination sheet 10 is cut and the rest of the operation is performed, each of the cut lamination sheets 10 is first adsorbed plate. It is continuously attached to the upper surface of the glass substrate 1 while being spaced at intervals as long as the adsorption of 91 is stopped. At this time, the interval of each lamination sheet 10 is appropriate 10 ~ 40mm, because if the interval is narrower than 10mm, there is a risk that the electrode portion connected to the FPC is covered when the dielectric is applied, if the interval is wider than 40mm or less This is because the effective screen area of the plasma display panel may be narrowed.

5 is a plan view showing a glass substrate to which the lamination sheet is continuously attached by the lamination apparatus of the present invention.

As shown in FIG. 5, the lamination sheet 10 has a predetermined distance between the first region 1a and the second region 1b divided in the longitudinal direction of the glass substrate 1 by the above-described operation. Attached while holding.

On the other hand, in the lamination apparatus according to the present invention, when adjusting the centering of the glass substrate 1 passing between the transfer roller 70 and the support roller 80, the size of the glass substrate 1 by the operation as described above The lamination sheet 10 forming two or more matrices may be continuously attached to each other at regular intervals.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

As described above, according to the lamination apparatus of the present invention, there is an advantage in that electrodes, dielectrics and partitions can be easily formed in successively forming a plurality of plasma display panels on one glass substrate.

In addition, the present invention can be applied to a semiconductor device and a liquid crystal display panel in addition to the plasma display panel, and the manufacturing process is quick and convenient.

In addition, since it is possible to apply the lamination sheet continuously can greatly reduce the laminating equipment, it is possible to secure a competitive advantage in terms of cost.

1 is a front configuration diagram schematically showing the configuration of a lamination device according to the present invention.

Figure 2 is a perspective view showing a portion of the tension member shown in FIG.

3 is a perspective view showing a cutter assembly shown in FIG.

4 is a cross-sectional configuration view showing a support member shown in FIG.

Figure 5 is a plan view showing a glass substrate to which the lamination sheet is continuously attached by the lamination apparatus of the present invention.

Claims (11)

A feed roller on which a lamination sheet is wound; A cutter assembly for cutting a lamination sheet of a predetermined length supplied from the feed roller; A transfer roller which transfers corona static electricity to a surface of the cut lamination sheet and attaches the upper surface of the glass substrate supplied along the travel path; And And a support member for releasing the lamination sheet from the supply roller at a predetermined time difference to travel through the travel path, and supplying the lamination sheet to the transfer roller. Lamination apparatus characterized in that for attaching the cut lamination sheet by the support member spaced apart at regular intervals on the glass substrate. The method of claim 1, And the lamination sheet is supplied in at least two rows along the longitudinal direction of the glass substrate. The method of claim 1, The supply roller is a lamination device characterized in that the lamination sheet is freely rotated by the support member. The method of claim 1, The cutter assembly is: A mounting block installed to reciprocate in a direction perpendicular to a running direction of the lamination sheet; And Lamination apparatus characterized in that it comprises a cutter installed in the mounting block. The method of claim 1, Lamination apparatus characterized in that it further comprises a recovery roller for recovering the cover film attached to the lamination sheet. The method of claim 1, And a supporting roller disposed below the transfer roller so that the glass substrate travels along the travel path of the lamination sheet. The method of claim 1,  And a tension member installed on the travel path to adjust the tension of the lamination sheet. The method of claim 1, The tension member is: A guide roller installed on the driving path; A tension roller installed to be spaced apart from the guide roller; A tension bar which is supported by the rotation shaft of the guide roller and the rotation shaft of the tension roller, respectively, and rotates about the rotation shaft of the guide roller; And And a tension spring installed at an end of the tension bar to support the tension roller. The method of claim 1, The support member is: A first adsorption plate installed to reciprocate along the travel path such that the lamination sheet wound on the supply roller is adsorbed at a predetermined time interval and supplied through the travel path; And And a second adsorption plate installed to reciprocate along the travel path to absorb the lamination sheet supplied by the first adsorption plate and to supply the lamination sheet to the transfer roller. The method of claim 1, And the lamination sheet is any one of an electrode material, a dielectric material, and a barrier material in the case of a plasma display panel (PDP). The method of claim 1, Lamination apparatus, characterized in that the interval of the lamination sheet attached to the glass substrate is 10 ~ 40mm.