KR20050027556A - Ink jet printer head and fabrication method - Google Patents

Abstract

An inkjet printer head and a method for fabricating the same are provided to achieve higher filtering efficiency by fabricating an ink filter on a predetermined path, which connects an ink supplying path to an ink chamber. An inkjet printer includes a substrate, an ink chamber(130), a nozzle plate, a restrictor(140), and an ink filter(150). The substrate has an ink supplying path(110) and at least thin film heater(120). The ink chamber(150) surrounds at least thin film heater and passes through the ink supplying path. The nozzle plate has a nozzle(160) which is an ink discharging path in the ink chamber(130). The restrictor(140) couples the ink chamber with the ink supplying path(110). The restrictor(140) supplies ink introduced into the ink supplying path to the ink chamber.

Description

Ink jet printer head with ink filter and manufacturing method thereof {Ink jet printer head and fabrication method}

The present invention relates to an inkjet printer head and a manufacturing method thereof, and more particularly, to an inkjet printer head having an ink filter for preventing the introduction of impurities from an ink supply passage and a manufacturing method thereof.

Nowadays, computers are spreading much beyond the "one family 1PC" era, so-called "one person 1PC" era. As a result, the spread of computer peripherals such as printers has become almost common, and even modern printers such as digital laser printers have been developed and distributed, but the price is somewhat high, so inkjet printers are still commercially available at home. It is becoming.

An ink-jet printer refers to a printer in which liquid ink is sprayed through a nozzle using a print head to print an image. At this time, there are various methods of spraying ink onto paper, but in general, a heat transfer ink spraying technology is adopted in which a thin film heater (register) is heated to form bubbles in an ink chamber containing ink and spray ink through a nozzle. Doing.

Specifically, the jetting principle will be described. When the thin film heater is heated while ink is supplied to the ink chamber through the ink supply passage, the ink is heated to change the liquid ink into a gaseous state. At this time, since the volume change of the ink occurs, the ink droplet is eventually released from the nozzle (usually 12 meters per second) by the volume of the ink droplet. At the same time as the ink escapes from the nozzle, the nozzle is in a vacuum state, and new ink flows back into the nozzle from the ink supply path by the force of the vacuum.

1 shows a general configuration of an ink jet printer head manufactured by a conventional technique. The figure is a top view of the inkjet printer head. According to the drawing, a relatively wide ink supply path 10 is formed in a predetermined portion of the substrate, and several ink chambers 30 are connected to the ink supply path 10 through a restrictor 40. have.

The ink supply passage 10 means a passage for supplying ink to the ink chamber 30, and the ink chamber 30 is a portion in which ink is collected, and the thin film heater 20 formed therein is heated to When the volume change occurs, the heated ink is sprayed through the nozzle 50 formed on the upper layer.

On the other hand, the restrictor 40 is a relatively small passage that connects the ink supply passage 10 and the ink chamber 30, and the pressure is applied when the ink is ejected through the nozzle 50 in the ink chamber 30. It serves to support, thereby preventing the ink from flowing back toward the ink supply path (10).

On the other hand, the ink supplied through the ink supply path 10 may include some internal impurities when the ink is relatively inexpensive, which has not been sufficiently purified before sale. When the internal impurities enter the ink chamber 30, the nozzle 50 may be blocked, which may cause the printer to fail. Therefore, in order to remove such impurities, an ink filter (not shown) having a mesh shape on an ink cartridge (not shown) may be used. Also used. However, in the case of an inkjet print head for realizing high quality, the filter spacing should be about 10 μm, and it is very difficult to produce such a size with such a network type ink filter, which increases the cost and effort for the filter production. There is a problem. This problem has been a great burden for manufacturers who want to develop a small, high-performance printer in recent years.

The present invention has been made to solve the above problems, an object of the present invention, by manufacturing an ink filter in a simple process in the passage connecting the ink supply passage and the ink chamber, inkjet printer head and its filtering performance is improved It is to provide a manufacturing method.

An inkjet printer head according to the present invention for achieving the above object is a substrate having at least one thin film heater and an ink supply passage penetrating in a direction perpendicular to the thin film heater forming surface, respectively surrounding the thin film heater, the ink At least one ink chamber in communication with a supply path, a nozzle plate having a nozzle which is an ink discharge path in the ink chamber, a restrictor having a cross-sectional area smaller than the ink supply path, connecting the ink chamber and the ink supply path, and the list And at least one ink filter fabricated between the scriber and the ink supply passage to filter out impurities in the ink.

In this case, the nozzle plate may be manufactured by coating a dry film.

On the other hand, it is preferable that the ink filter is independently manufactured for each of the restrictors so that when ink is discharged from one ink chamber, pressure is applied to the surrounding ink chambers to prevent the ink from being discharged.

On the other hand, the manufacturing method of the inkjet printer head according to the present invention, (a) depositing a metal layer on at least one predetermined area on the substrate surface, (b) to produce a cavity having a predetermined size surrounding the metal layer, Manufacturing a nozzle connecting the cavity and the outside; and (c) manufacturing the ink filter and the ink supply path by etching the substrate to be connected to the cavity by a passage having a predetermined width.

At this time, the step (b), the step of depositing a first photoresist film on a predetermined region on the metal layer and the peripheral substrate, the step of depositing a second photoresist film on the front surface of the first photoresist film and the substrate And forming a nozzle through a predetermined portion of the second photoresist film having the metal layer below, and manufacturing the cavity by etching the first photoresist film. And etching a predetermined portion of the substrate including a portion of the first photoresist film on an upper portion thereof to manufacture an ink filter and an ink supply passage.

On the other hand, when the metal layer is deposited on several regions, it is more preferable to deposit the first photoresist film in a predetermined form on top of each metal layer and the peripheral substrate region so as to be independent for each metal layer.

On the other hand, the step (b), the step of depositing a second photoresist film in a predetermined region except the periphery of the metal layer, the step of filling the first photoresist film on the metal layer and the peripheral substrate on which the second photoresist film is not deposited Depositing a nozzle plate on an entire upper surface of the first photoresist film and the second photoresist film, forming a nozzle through a predetermined portion of the nozzle plate having the metal layer below; and the first And etching the photoresist film to form the cavity, wherein the step (c) includes etching the predetermined portion of the substrate including a portion in which the first photoresist film is present. It may also comprise the step of manufacturing a supply passage.

On the other hand, when the metal layer is deposited on several regions, the second photoresist film is more preferably deposited in a predetermined form except for each metal layer and the peripheral substrate region so as to be independent for each metal layer.

In addition, the step (b), the step of depositing a second photoresist film in a predetermined region except the periphery of the metal layer, by coating a dry film on the second photoresist film to form a cavity surrounding the periphery of the metal layer And forming a nozzle through a predetermined portion of the dry film having the metal layer below.

More preferably, the step (a) may further comprise a step of manufacturing a trench by etching a predetermined region on the surface of the substrate.

At this time, the step (b), the step of depositing a first photoresist film on the surface of the substrate including a predetermined portion of the trench and the metal layer, a second photoresist film on the entire upper surface of the first photoresist film and the substrate The method may include the step of depositing, manufacturing a nozzle through a predetermined portion of the first photoresist film having a metal layer thereunder, and manufacturing the cavity by etching the first photoresist film. Step (c) may include fabricating an ink filter and an ink supply path by etching a predetermined portion of the substrate including a portion of the first photoresist film present thereon.

Alternatively, the step (b) may include depositing a second photoresist film on a portion of the trench and on a portion of the substrate, filling the first photoresist film on a portion where the second photoresist film is not deposited; Depositing a nozzle plate on an entire upper surface of the first photoresist film and the second photoresist film, fabricating a nozzle through a predetermined portion of the nozzle plate having the metal layer thereunder, and the first photoresist Etching the film to produce a cavity, wherein step (c) comprises etching the predetermined portion of the substrate including a portion where the first photoresist film exists on the top to produce an ink filter and an ink supply path. It is also possible to manufacture an inkjet printer head by including the step.

Preferably, the step (b) includes depositing a second photoresist film on a portion of the trench and a portion of the substrate, and coating a dry film on the second photoresist layer to surround the metal layer. Forming a surrounding cavity, and forming a nozzle through a predetermined portion of the dry film in which the metal layer is present.

Accordingly, an inkjet printer head having a narrow ink filter is provided in a passage connecting the ink chamber and the ink supply path, and an inkjet printer head for printing an image transmitted from a computer on a printing paper can be manufactured using the inkjet printer head. .

Hereinafter, with reference to the drawings will be described the present invention in more detail.

2 is a plan view of an inkjet printer head made in accordance with the present invention. According to the drawing, a wide ink supply path 110 is formed across the middle portion of the inkjet printer head, and several ink chambers 130 are connected to the ink supply path 110 through the restrictor 140, respectively. It is.

A thin film heater 120 is formed in each ink chamber 130, and a rounded via hole nozzle 160 is formed on the upper layer of the thin film heater.

On the other hand, between the restrictor 140 and the ink supply passage 110, the ink filter 150 is manufactured with a smaller cross-sectional area than the restrictor 140. Description of the role of each part is omitted because it has been described above, and only the ink filter 150 will be described, the ink filter 150 is perpendicular to the lower ink supply passage 110 and the upper restrictor 140. It is composed of passages with several small cross-sectional areas connected to each other. Since it is connected vertically, the direction in which ink is supplied to the ink chamber 130 is about 90 ° to the direction in which ink flows on the ink supply path 110, and thus, even thin and long impurities are caught at the threshold and thus filter performance. This is improved.

A method of manufacturing an inkjet printer head having such a structure is shown in various embodiments in FIGS. 3 to 8.

First, FIG. 3 illustrates a step-by-step method of using the ink filter 370 and the restrictor 360b by using the first photoresist film 320 as a sacrificial layer. (A)-(e) of FIG. 3 express each process in sectional drawing, and (a) '-(e)' represent the same process in plan view. First, a thin film layer 310 is deposited on a predetermined region on the substrate 300 to form a thin film heater 310 ((a) and (a) 'of FIG. 3). The substrate 300 may typically use silicon, and the thin film heater 310 may include aluminum tantalum (Ta-Al), tantalum nitride (TaN), silicon aluminum tantalum (Ta-Al-Si), and polysilicon (poly-Si). Metallic materials such as) may be used. Meanwhile, the size and shape of the thin film heater 310 may be arbitrarily set in consideration of characteristics of the inkjet printer head to be manufactured.

3B and 3B, a first photoresist layer 320 is deposited on a predetermined region of the substrate including the thin film heater 310. In this case, the first photoresist layer 320 may use any one of a material having a positive characteristic and a material having a negative characteristic, but a photoresist having a positive characteristic may be easily removed when exposed to light. Since it is possible to proceed the process to be described later because it has a characteristic, it is more preferable to use it. Referring to FIG. 3B, a first photoresist film is deposited on a single thin film heater 310 in the form of a comb.

Next, FIGS. 3C and 3C show the deposition of the second photoresist film 330 on the entire surface of the first photoresist film 320 and the substrate 300, and then manufacturing the nozzle 340. The process of doing so is shown. Since the second photoresist film 330 uses a material having properties different from those of the first photoresist film 320, the etching step described later can be more easily performed. Therefore, a negative material is preferably used. On the other hand, the nozzle 340 is a passage through which ink is discharged and can be manufactured by penetrating through the second photoresist film 330 having the thin film heater 310 below. A portion of the second photoresist film 330 in which the nozzle 340 is formed is called a nozzle plate.

Next, FIGS. 3D and 3D show a step of manufacturing the ink supply path 350. The ink supply passage 350 is a passage through which ink is supplied from the ink cartridge and is manufactured in a relatively wide width. That is, with respect to the first photoresist film 320 deposited in the shape of a comb as shown in FIG. 3 (b) ′, a lower substrate of a predetermined portion of the first photoresist film 320 so that the end portion thereof is slightly exposed downward. The portion of the substrate 300 on which the 300 and the first photoresist layer 320 is not deposited is etched. When the first photoresist film is etched in the steps to be described later, the area where the first photoresist film 320 is exposed to the lower portion becomes a small passage, and this portion becomes the ink filter 370 that filters impurities in the ink. As a method of etching the substrate 300, any one of a dry etching method and a wet etching method may be used.

3E and 3E illustrate the steps of fabricating an ink chamber 360a and a restrictor 360b by etching the first photoresist film 320. As described above, the ink chamber 360a refers to a portion containing ink, and the restrictor 360b is a passage having a smaller cross-sectional area than the ink chamber 360a and the ink supply path 350 to prevent backflow of ink. It is a part that plays a role. Through this process, the inkjet printer head having the structure of FIG. 2 is finally completed.

Meanwhile, a second embodiment of the present invention for the method of manufacturing the inkjet printer head of FIG. 2 is shown in FIG. Similarly to Fig. 3, Figs. 4A to 4E are cross-sectional views and Figs. 4A to 3E are plan views. Also in the second embodiment, the thin film heater 410 is deposited on the substrate 400 in a predetermined form (FIGS. 4A and 4A).

Next, FIGS. 4B and 4B illustrate a process of depositing the second photoresist film 420 on a portion of the thin film heater 410 except for a predetermined region of the substrate 400 around the thin film heater 410. . Then, the portion where the second photoresist film 420 is not deposited is filled with the first photoresist film 430 ((c) and (c) 'of FIG. 4). Since the first photoresist film 430 is difficult to be deposited to a thickness of 10 μm or more, the second photoresist film 420 is first deposited and then the thickness is increased by filling the first photoresist film 430. Can be. Since the first photoresist film 430 is a portion which is removed by etching in the steps to be described later to form the ink chamber 470a and the restrictor 470b, the thickness of the first photoresist film 430 needs to be adjusted. The resist film 430 is not deposited first. Meanwhile, referring to FIG. 4 (b) ′, the second photoresist film 420 is deposited except for a comb-shaped portion centered on the thin film heater 410, thereby forming the first photoresist film 430. You can adjust the shape.

Next, according to FIGS. 4D and 4D, the nozzle plate 420a having the nozzle 440 is deposited on the second photoresist film 420 and the first photoresist film 430. Afterwards, a process of manufacturing the ink supply passage 450 by etching a predetermined region of the lower substrate 400 is illustrated. The nozzle plate 420a may use the same material as the second photoresist film 420 or may use another material. The manufacturing method and manufacturing position of the nozzle 440 and the ink supply passage 450 are the same as in the first embodiment.

Finally, after removing the first photoresist film 430 as shown in FIGS. 4E and 4E, the inkjet printer head of FIG. 2 is completed. As in the first embodiment, the restrictor 470b and the ink supply passage 450 are connected by an ink filter 460 having a small cross-sectional area.

Meanwhile, a third embodiment of implementing a nozzle plate on which a nozzle is formed as a dry film is illustrated in FIG. 5. When the thin film heater 510 is deposited on the substrate 500 as shown in FIGS. 5A and 5A, the second photoresist film 520 is thin film heater 510 and the same as in the second embodiment. Deposited except the peripheral substrate region (FIGS. 5B and 5B ').

Next, according to FIGS. 5C and 5C, the nozzle plate 530 having the nozzle 540 is coated on the upper surface of the second photoresist film 520. As the nozzle plate 530, a photosensitive dry film may be used.

Then, as shown in FIGS. 5D and 5D, when the substrate 500 is etched by a predetermined region, the ink chamber 550a, the restrictor 550b, the ink filter 560, and the ink supply path 570 are etched. ) Is produced, and the inkjet printer head of FIG. 2 is completed.

On the other hand, in the inkjet printer head manufactured according to the first to third embodiments described above, in the process of etching the substrate 300, 400, 500, the etching is not made constant, so that the ink supply passage and the filter Since the size may vary, a trench may be etched by etching a portion of the substrate to keep the size constant at all times.

A fourth embodiment of this invention is presented in FIG. 6. First, according to FIGS. 6A and 6A, trenches are formed on a substrate, and a thin film heater 610 is deposited on the substrates other than the trenches. Subsequent processes are similar to the first embodiment.

That is, the first photoresist film 620 is deposited on the thin film heater 610 and the substrate area around the thin film heater 610. At this time, the first photoresist film 620 is covered up to a predetermined portion of the trench (FIGS. 6B and 6B).

Next, the entire surface of the first photoresist film 620 and the substrate 600 is covered with the second photoresist film 630, and a nozzle 640 is manufactured (FIGS. 6C and 6C ′). ).

Thereafter, as shown in FIGS. 6D and 6D, the substrate 600 is etched to the lower portion of the portion where the first photoresist film 620 is deposited to form an ink supply path 650. When the first photoresist film 620 is etched as shown in FIGS. 6E and 6E, an ink chamber 660a, a restrictor 660b, and an ink filter 670 are formed. At this time, since the first photoresist film 620 is a portion deposited on the trench, the ink filter 670 always has a uniform cross-sectional area irrespective of the influence due to the substrate etching.

7 shows a fifth embodiment of the present invention for fabricating an inkjet printer head in a similar manner to the second embodiment on a substrate on which a trench is fabricated. According to the drawing, on the substrate on which the trench and thin film heater 710 are fabricated (FIGS. 7A and 7A), the second photoresist film 720 is disposed in a predetermined region inside the trench and a predetermined region on the substrate. Is deposited (FIGS. 7B and 7B), and the other portions of the first photoresist film 730 are filled (FIGS. 7C and 7C).

Then, after depositing the nozzle plate 720a on the second photoresist film 720 and the first photoresist film 730, a nozzle 740 is fabricated to remove a predetermined region of the substrate 700. ((D) and (d) 'of FIG. 7).

Next, when the first photoresist film 730 is removed, the ink chamber 760a, the restrictor 760b, and the ink filter 770 are completed (FIGS. 7E and 7E).

8 illustrates a sixth embodiment in which the nozzle plate 820a on which the nozzle 830 is formed is bonded. That is, the thin film heater 810 is deposited on the substrate 800 on which the trench is formed (FIGS. 8A and 8A), and the second photo is formed in a predetermined region inside the trench and a predetermined region on the substrate 800. A resist film 820 is deposited (FIGS. 8B and 8B ').

Next, a nozzle plate 820a having a nozzle formed on the second photoresist film 820 is bonded to each other (FIGS. 8C and 8C). The nozzle plate 820a may use a photosensitive dry film as in the third embodiment.

Finally, when the predetermined region of the substrate is etched, the ink chamber 840a, the restrictor 840b, the ink filter 860, and the ink supply passage 850 are manufactured.

Meanwhile, as another embodiment of the present invention, FIG. 9 illustrates a structure in which a restrictor and an ink filter are manufactured independently for each ink chamber. According to the drawing, a plurality of ink chambers 930 are formed on both sides of the ink supply passage 910, and each ink chamber 930 is independently provided through the restrictor 940. Is connected to. In addition, several ink filters 950 are formed in each of the restrictors 940 to prevent the inflow of impurities. In order to manufacture the inkjet printer head of such a structure, in the above-described first to second embodiments, the first photoresist film is directly deposited to have an independent form (first and fourth embodiments). The second photoresist film can be used to make the first photoresist film have an independent form (second and fifth embodiments). On the other hand, it is also possible to make each ink chamber independent by using the second photoresist film (third and sixth embodiments).

According to the structure of FIG. 9, when the nozzle is clogged or the hydraulic pressure is strong, the restrictor cannot endure the hydraulic pressure so that the ink flows back and the ink can be discharged through the surrounding ink chamber.

As described above, according to the present invention, an ink filter for filtering impurities in the ink can be manufactured through a simple process between the ink supply path and the ink chamber. In addition, the filtering effect can be enhanced by manufacturing the ink filter at an angle of about 90 ° to the ink advancing direction to the ink supply passage.

In addition, although the preferred embodiment of the present invention has been shown and described above, the present invention is not limited to the specific embodiments described above, but the technical field to which the invention belongs without departing from the spirit of the invention claimed in the claims. Of course, various modifications can be made by those skilled in the art, and these modifications should not be individually understood from the technical spirit or the prospect of the present invention.

1 is a structural diagram of a conventional printer head used in an inkjet printer,

2 is a structural diagram of an inkjet printer head manufactured according to the present invention and having an ink filter;

3 is a step-by-step process diagram illustrating a method of manufacturing an inkjet printer head presented as an embodiment of the present invention;

4 is a step-by-step process diagram illustrating a method of manufacturing an inkjet printer head presented as an embodiment of the present invention;

5 is a step-by-step process diagram illustrating a method of manufacturing an inkjet printer head presented as a third embodiment of the present invention;

6 is a step-by-step process diagram illustrating a method of manufacturing an inkjet printer head presented as an embodiment of the present invention;

7 is a step-by-step process diagram illustrating a method of manufacturing an inkjet printer head presented as a fifth embodiment of the present invention;

8 is a step-by-step process diagram illustrating a method of manufacturing an inkjet printer head presented as a sixth embodiment of the present invention, and

9 is a final structural diagram of an ink jet printer head manufactured according to another embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

110,350,450,570,650,750,850,910: ink supply

120,310,410,510,610,710,810,920: thin film heater

130,360a, 470a, 550a, 660a, 760a, 840a, 930: ink chamber

140,360b, 470b, 550b, 660b, 760b, 840b, 940: List

150,370,460,560,670,770,860,950: ink filter

160,340,440,540,640,740,830,960: nozzle

Claims (19)

A substrate having an ink supply passage and at least one thin film heater; An ink chamber surrounding each of the at least one thin film heater and communicating with the ink supply passage; A nozzle plate having a nozzle which is an ink discharge path in the ink chamber; A restrictor which connects the ink chamber and the ink supply passage, and supplies ink flowing from the ink supply passage to the ink chamber; and And at least one ink filter disposed between the restrictor and the ink supply path in a direction perpendicular to the ink supply path to filter impurities in the ink. The method of claim 1, And the ink filter is formed independently for each of the restrictors. The method according to claim 1 or 2, And the nozzle plate is formed of a photosensitive dry film. (a) depositing a metal layer in at least one predetermined region on the substrate surface; (b) manufacturing a cavity having a predetermined size surrounding the metal layer, and manufacturing a nozzle connecting the cavity and the outside; and (c) manufacturing the ink filter and the ink supply path by etching the substrate so as to be connected to the cavity by a passage having a predetermined width. The method of claim 4, wherein In step (b), Depositing a first photoresist film on an upper portion of the metal layer and on a peripheral substrate; Depositing a second photoresist film on the front surface of the first photoresist film and the substrate; Forming a nozzle through a predetermined portion of a second photoresist film having the metal layer below; and Manufacturing the cavity by etching the first photoresist film. The method of claim 5, Step (c) is, And etching a predetermined portion of the substrate including a portion of the first photoresist film on an upper portion thereof to fabricate an ink filter and an ink supply path. The method of claim 4, wherein In step (b), Depositing a second photoresist film on a predetermined area except the periphery of the metal layer; Filling the first photoresist layer on the metal layer and the peripheral substrate on which the second photoresist layer is not deposited; Depositing a nozzle plate over the entire upper surface of the first photoresist film and the second photoresist film; Forming a nozzle through a predetermined portion of the nozzle plate having the metal layer below; and Manufacturing the cavity by etching the first photoresist film. The method of claim 7, wherein Step (c) is, And etching a predetermined portion of the substrate including a portion of the first photoresist film on an upper portion thereof to fabricate an ink filter and an ink supply path. The method of claim 4, wherein In step (b), Depositing a second photoresist film on a predetermined area except the periphery of the metal layer; Coating a dry film on the second photoresist film to form a cavity surrounding the metal layer; and And forming a nozzle through a predetermined portion of the dry film in which the metal layer is present at a lower portion thereof. The method of claim 4, wherein In step (a), Manufacturing a trench by etching a predetermined region on the surface of the substrate. The method of claim 10, In step (b), Depositing a first photoresist film on a substrate surface including a portion of the trench and on the metal layer; Depositing a second photoresist film on the entire upper surface of the first photoresist film and the substrate; Manufacturing a nozzle through a predetermined portion of the first photoresist film having a metal layer thereunder; and Manufacturing the cavity by etching the first photoresist film. The method of claim 11, Step (c) is, And etching a predetermined portion of the substrate including a portion of the first photoresist film on an upper portion thereof to fabricate an ink filter and an ink supply path. The method of claim 10, In step (b), Depositing a second photoresist film on a portion of the trench and a portion on the substrate; Filling the first photoresist film in a portion where the second photoresist film is not deposited; Depositing a nozzle plate over the entire upper surface of the first photoresist film and the second photoresist film; Manufacturing a nozzle through a predetermined portion of the nozzle plate in which the metal layer is present; and Manufacturing the cavity by etching the first photoresist film. The method of claim 13, Step (c) is, And etching a predetermined portion of the substrate including a portion of the first photoresist film on an upper portion thereof to fabricate an ink filter and an ink supply path. The method of claim 10, In step (b), Depositing a second photoresist film on a portion of the trench and a portion on the substrate; Coating a dry film on the second photoresist film to form a cavity surrounding the metal layer; and And forming a nozzle through a predetermined portion of the dry film in which the metal layer is present at a lower portion thereof. The method according to claim 5 or 11, wherein When the metal layer is deposited on several regions, the first photoresist film is deposited on each metal layer and the peripheral substrate region in a predetermined form so as to be independent for each metal layer. . The method according to claim 7 or 13, When the metal layer is deposited on several regions, the second photoresist film is deposited in a predetermined form except for each metal layer and a peripheral substrate region so as to be independent for each metal layer. . The method according to claim 9 or 15, When the metal layer is deposited on several regions, the second photoresist film is deposited in a predetermined form except for each metal layer and a peripheral substrate region so as to be independent for each metal layer. . An inkjet printer which prints an image transmitted from a computer on printing paper by ejecting ink using the inkjet printer head manufactured by the manufacturing method of claim 4.