KR20050022635A - The Automatic Guided Vehicle and the method for driving the same - Google Patents

Abstract

PURPOSE: An AGV(Automatic Guided Vehicle) and a method for driving the same are provided to acquire wider space for loading cassettes, thereby transferring more cassettes to respective process chambers in a single movement of the AGV so as to enhance processing yield. CONSTITUTION: An AGV is prepared for respectively transferring cassettes(37a,37b) loading substrates for LCDs(Liquid Crystal Displays) to predetermined process chambers. The first and the second loading parts(35a,35b) respectively load the cassettes. A robot arm(31) is situated under the first and the second loading part, wherein the robot arm transfers the cassettes to the respective process chambers, with moving between the first and the second loading parts. The robot arm transfers the cassette loaded on the first loading part to the first process chamber, and then, transfers the cassette loaded on the second loading part to the second process chamber.

Description

Cassette transfer machine and its driving method {The Automatic Guided Vehicle and the method for driving the same}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette transfer machine, and more particularly, to a cassette transfer machine and a driving method thereof, which can increase a carrying efficiency of a cassette by increasing a loading space of the cassette.

As the information society develops, the demand for display devices is increasing in various forms, and in recent years, liquid crystal displays (LCDs), plasma display panels (PDPs), electro luminescent displays (ELDs), and vacuum fluorescent displays (VFDs) have been developed. Various flat panel display devices have been studied, and some of them are already used as display devices in various devices.

Among them, LCD is the most widely used as a substitute for CRT (Cathode Ray Tube) for the use of mobile image display device because of the excellent image quality, light weight, thinness, and low power consumption, and mobile type such as monitor of notebook computer. In addition, it is being developed in various ways, such as a television for receiving and displaying broadcast signals, and a monitor of a computer.

As described above, although various technical advances have been made in order for the liquid crystal display device to serve as a screen display device in various fields, the task of improving the image quality as the screen display device has many advantages and disadvantages.

Therefore, in order to use a liquid crystal display device in various parts as a general screen display device, the key to development is how much high definition images such as high definition, high brightness, and large area can be realized while maintaining the characteristics of light weight, thinness, and low power consumption. It can be said.

Such a liquid crystal display device may be broadly divided into a liquid crystal display panel displaying an image and a driving unit for applying a driving signal to the liquid crystal panel, wherein the liquid crystal display panel includes a first substrate and a second substrate bonded to each other with a space. And a liquid crystal layer injected between the first and second substrates.

The first substrate (TFT array substrate) may include a plurality of gate lines arranged in one direction at a predetermined interval, a plurality of data lines arranged at regular intervals in a direction perpendicular to the gate lines, and the respective gates. A plurality of thin film transistors which are switched by signals of the gate line and a plurality of pixel electrodes formed in a matrix form in each pixel region defined by crossing a line and a data line, transmit a signal of the data line to each pixel electrode. Formed.

The second substrate (color filter substrate) includes a black matrix layer for blocking light in portions other than the pixel region, R, G, and B color filter layers for expressing color colors, and a common electrode for implementing an image. Is formed.

The first and second substrates have a predetermined space by spacers and are bonded by a sealant to form a liquid crystal between the two substrates.

In order to use the first and second substrates as the components of the liquid crystal display device as described above, a plurality of process steps are used, wherein a cassette transfer machine is used to transfer the respective substrates to the process steps. AGV) is used.

Hereinafter, a detailed description will be given of a conventional cassette transfer machine with reference to the accompanying drawings.

1 is a side view of a conventional cassette transfer machine.

Conventional cassette transfer machine, as shown in Figure 1, and the seating portion 15, the cassette is seated; A robot arm (11) provided at a lower portion of the seating portion (15) to load the cassette (17) seated on the seating portion (15) to process equipment provided in each process step; A body portion 16 for supporting the seating portion 15 and the robot arm 11; Is provided on one side of the body portion 16 for the communication sensor 12 for communicating with the stocker or processing equipment close to the cassette transfer machine and for sensing that the cassette transferr is in proximity to the desired position of the stocker or process equipment A positioning sensor 13; It is configured to include a wheel 14 provided in the lower portion of the body portion 16.

Here, the robot arm 11 is composed of a plurality of slides (11a) and a drive shaft (11b) for rotating the slide (11a) up and down and 180 ° is connected to the lower portion of the slide (11a).

Referring to the operation of the conventional cassette transfer machine configured as described above in detail as follows.

2 is a plan view of a process line for explaining a cassette conveying process of a conventional cassette transfer machine.

First, the cassette transfer machine moves to a stocker 23 loaded with a cassette containing a plurality of substrates required for each of the process equipments 21a and 21b.

Here, the cassette transfer machine is accurately positioned in front of the stocker 23 by reading the mark plate of the stocker 23 using the positioning sensor 13.

Subsequently, the cassette transfer machine communicates with the stocker 23 by using the communication sensor 12 so that the cassette 17 necessary for the first process equipment 21a of the cassettes loaded on the stocker 23 is loaded. The loaded cassette 17 is loaded into the seating portion 15.

Thereafter, the cassette transfer machine on which the cassette is loaded is moved along the line 22 to the first process equipment 21a in which the cassette 17 is required.

Here, the cassette transfer machine is accurately positioned in front of the first process equipment 21a by reading the mark plate of the first process equipment 21a using the positioning sensor 13.

Then, by using the communication sensor, by communicating with the first process equipment 21a, the cassette 17 loaded on the seating unit 15 is prepared to be loaded into the first process equipment 21a.

That is, by moving the drive shaft 11b of the robot arm 11 upward, the slide 11a located above the drive shaft 11b is moved upward.

At this time, as the slide 11a rises higher than the seating portion 15, the cassette 17 loaded on the seating portion 15 is placed on the slide 11a, and the slide 11a is placed thereon. Got up with).

Thereafter, the movement of the drive shaft 11b is stopped, and the slide 11a extends in a step shape toward the process equipment 21a, and the cassette 17 is loaded into the first process equipment 21a. Done.

Subsequently, the cassette transfer machine moves along the line 22 to the stocker 23 again, and through this process, this time loads the cassette 17 necessary for the second process equipment 21b, and again the line 22. Next, the process moves to the second process equipment 21b to load the cassette 17 into the second process equipment 21b.

The conventional cassette transfer machine repeats this process, thereby transferring the cassette 17 to each of the process equipments 21a and 21b.

However, such a conventional cassette transfer machine had the following problems.

As the working efficiency of the process equipment and the process equipment increase, the cassette transfer machine must load a larger number of cassettes into the process equipment.

However, since the conventional cassette transfer machine has a limitation in loading amount, the process of receiving a cassette from the stocker and transferring the cassette to the process equipment is repeated more.

Of course, the number of cassette transfer machines per line can be increased to overcome the limitation of the loading capacity of the cassette transfer machines. However, when the number of cassette transfer machines is increased, another problem arises.

That is, a bottleneck occurs along with an increase in the cost of the increased cassette transfer machine, and thus there is a problem that the working efficiency decreases.

The present invention has been made to solve the above problems, an object of the present invention is to provide a cassette transfer machine and a driving method thereof capable of loading a larger number of cassettes at a time by increasing the mounting portion on which the cassette is loaded.

Cassette transfer machine according to the present invention for achieving the above object, in the cassette transfer machine for transporting a cassette loaded with a substrate for a liquid crystal display device to the process equipment, and the first and second seating portion on which the cassette is seated; ; And a robot arm provided below the first and second seating parts and moving the first and second seating parts, and loading the cassettes placed on the first and second seating parts into the processing equipment. It is characterized by.

Here, the robot arm is characterized by consisting of a plurality of slides and a drive shaft connected to the lower portion of the slide to move the slide in the vertical direction or rotate 180 °.

And a body part for supporting the first and second seating parts and the robot arm.

One side of the body portion is characterized in that it further comprises a first, second positioning sensor and the first, second communication sensor.

In addition, the driving method of the cassette transfer machine according to the present invention configured as described above, in the cassette transfer machine for transporting the cassette on which the substrate for the liquid crystal display device is loaded to the process equipment, moving the robot arm below the first seating portion; ; Moving the robot arm upward to lift a cassette loaded on the first seating part; Loading the cassette loaded on the first seating unit into the process equipment; Moving the robot arm downward, and moving the robot arm downward in a second seating portion; Moving the robot arm upwards to lift a cassette loaded on the second seating part; And loading the cassette loaded on the second seating part into the process equipment.

Hereinafter, a cassette transfer machine according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a side view of a cassette transfer machine according to an embodiment of the present invention, FIG. 4 is a side view of FIG. 3, and FIG. 5 is a top view of FIG. 3.

Cassette transfer machine according to the present invention, as shown in Figs. 3, 4 and 5, the first and second seating portion (35a, 35b) on which the first, second cassettes (37a, 37b) are seated; The first and second seating parts 35a and 35b are provided under the first and second seating parts 35a and 35b while moving between the first seating part 35a and the second seating part 35b. A robot arm (31) for loading the first and second cassettes (37a, 37b) placed in 35b) into process equipment located at each process step; A body portion 36 for supporting the first and second seating portions 35a and 35b and the robot arm 31; The cassette transfer machine is provided at one side of the body portion 36 and communicates with the stocker or the process equipment adjacent to the cassette transfer device and the desired position of the stocker or the process equipment. First and second positioning sensors 33a and 33b for sensing that the proximity is close; It is composed of a wheel 34 provided in the lower portion of the body portion (36).

Here, the robot arm 31 is composed of a plurality of slide 31a and a drive shaft 31b connected to the lower portion of the slide 31a to drive the slide 31a.

That is, as the drive shaft 31a moves in the vertical direction, the slide 31a connected to the drive shaft 31b also moves in the vertical direction. As the drive shaft 31b rotates 180 °, the slide 31a also moves in the The slide is rotated in the same direction as the drive shaft 31b, and the slide also moves left and right as the drive shaft 31b moves left and right between the first seating portion 35a and the second seating portion 35b.

Here, the groove 40 is formed in the lower portion of the drive shaft 31b along the direction of left and right movement of the drive shaft 31b so that the drive shaft 31b can move left and right.

The plurality of slides 31a are stacked in a single shape with each other, and the cassettes 37a and 37b are extended toward the process equipment while being unfolded in a step shape to load the cassettes 37a and 37b into the process equipment.

On the other hand, although not shown in the figure, the robot arm 31 made up of the slide 31a and the drive shaft 31b in the body portion 36, as described above, the vertical movement vertical, horizontal horizontal movement and 180 A moving shaft for driving the robot arm 31 is provided to allow a rotational motion.

Referring to the driving method of the cassette transfer machine according to an embodiment of the present invention configured as described above in detail.

6 is a plan view of a process line for explaining a cassette conveying process of the cassette transfer machine according to the present invention.

First, the cassette transfer machine moves to a stocker 63 loaded with a cassette containing a plurality of substrates required for the process equipment 61a and 61b.

Here, the cassette transfer machine reads the mark plate of the stocker 63 using the first positioning sensor 33a so that the first seating portion 35a of the cassette transfer machine is positioned toward the stocker 33. Do it.

Thereafter, the cassette transfer machine communicates with the stocker by using the first communication sensor 32a, whereby the first and second cassettes required for the respective process equipments 61a and 61b among the cassettes loaded on the stocker 63. Allow 37a, 37b to be loaded from the stocker 63.

That is, the robot arm 31 of the cassette transfer machine extends toward the stocker 63.

As described above, the robot arm 31 is composed of a plurality of slides 31a and a drive shaft 31b connected to the lower portion of the slide 31a to operate the slide 31a.

Here, the process of loading the first and second cassettes 37a and 37b into the cassette transfer machine using the robot arm 31 will be described in detail.

First, as the driving shaft 31b of the robot arm 31 moves upward, the first seating portion 35a having the slide 31a connected to the upper portion of the driving shaft 31b is located above the slide 31a. Will be higher.

Subsequently, the drive shaft 31b stops moving, the plurality of slides 31a are stepped toward the first cassette 37a loaded on the stocker 63, and the slide 31a is located at the topmost position. The first cassette 37a is mounted.

Subsequently, when the slide 31a on which the first cassette 37a is placed is folded toward the cassette transfer machine to maintain its original state, the first cassette 37a is placed on the slide 31a. It is positioned above the first seating portion 35a.

Next, as the drive shaft 31b moves downward, the slide 31a also moves downward.

Here, the slide 31a is lowered further than the first seating portion 35a, and the first cassette 37a is placed on the first seating portion 35a.

Subsequently, the robot arm 31 including the slide 31a and the drive shaft 31b moves horizontally from the lower portion of the first seating portion 35a to the lower portion of the second seating portion 35b, thereby allowing the second seating portion. The second cassette 37b is prepared to be loaded into 35b.

The process of loading the second cassette 37b on the second seating part 35b is the same as the process of loading the first cassette 37a on the first seating part 35a.

In this case, however, the mark plate of the stocker 63 is read using the second positioning sensor 33b of the cassette transfer machine, so that the second seating portion 35b of the cassette transfer machine faces the stocker 63. The second cassette 37b is loaded into the second seating portion 35b by communicating with the stocker 63 using the second communication sensor 33b.

As such, the cassette transfer machine in which the first and second cassettes 37a and 37b are stacked on the first seating part 35a and the second seating part 35b, respectively, is provided with the first and second process equipments 61a and 61b. Will move along line 62.

Hereinafter, a process in which the first and second cassettes 37a and 37b loaded on the cassette transfer machine are loaded into the respective process equipments 61a and 61b will be described in detail.

In this case, the first and second cassettes 37a and 37b are all conveyed to the first process equipment 61a, and the first and second process equipment 61a and the second process equipment 61b are conveyed separately. When divided into the description as follows.

Here, when both of the first and second cassettes 37a and 37b are conveyed to the first process equipment 61a, the case where the types of the first and second cassettes 37a and 37b are the same is shown. In the case where the first process equipment 61a and the second process equipment 61b are separated and conveyed, the first and second cassettes 37a and 37b may be different types.

First, a case where all of the first and second cassettes 37a and 37b are returned to the first process equipment will be described below.

First, the cassette transfer machine in which the cassettes 37a and 37b are loaded moves to the first process equipment 61a.

Here, the cassette transfer machine reads the mark plate of the first process equipment 61a by using the first positioning sensor 33a, so that the first seating portion 35a of the cassette transfer machine is the first process equipment. The first cassette 37a located at the first seating portion 35a by the first communication device 61a by using the first communication sensor 32a to communicate with the first process equipment 61a. To be loaded into equipment 61a.

Thereafter, the robot arm 31 of the cassette transfer machine is positioned under the first seating part 35a.

Subsequently, the driving shaft 31b of the robot arm 31 moves upward, and the slide 31a positioned above the driving shaft 31b also moves upward.

At this time, as the slide 31a rises higher than the first seating portion 35a, the first cassette 37a loaded on the first seating portion 35a is placed on the slide 31a. Ascends with the slide 31a.

Thereafter, the movement of the drive shaft 31b is stopped, and the slide 31a extends in a step shape toward the first process equipment 61a, thereby moving the first cassette 37a to the first process equipment 61a. Will be loaded).

Subsequently, the slide 31a having loaded the first cassette 37a into the first process equipment 61a is folded back to the cassette transfer machine to maintain its original state.

Thereafter, the cassette transfer machine reads the mark plate of the first process equipment 61a using the second positioning sensor 33b, so that the second seating portion 35b of the cassette transfer machine is the first process equipment. The second cassette 37b located at the second seating portion 35b to communicate with the first process equipment 61a using the second communication sensor 32b. To be loaded into equipment 61a.

The second cassette 37b loaded on the second seating part 35b may include a process of loading the first cassette 37a loaded on the first seating part 35a into the first process equipment 61a. The same is done.

Then, the cassette transfer machine moves to the stocker 63 along the line 62 to receive another cassette required for the second process equipment 61b, and as described above, to the second process equipment 61b. The cassette will be loaded.

By doing so, a larger number of cassettes can be loaded into each of the process equipments 61a and 61b in one movement.

Second, the case in which the first and second cassettes 37a and 37b are divided and conveyed into the first process equipment 61a and the second process equipment 61b is as follows.

First, the cassette transfer machine moves along the line 62 to the first process equipment 61a.

Thereafter, the cassette transfer machine reads the mark plate of the first process equipment 61a by using the first positioning sensor 33a, so that the first seating portion 35a of the cassette transfer machine is the first process equipment. The first cassette 37a located at the first seating portion 35a by the first communication device 61a by using the first communication sensor 32a to communicate with the first process equipment 61a. To be loaded into equipment 61a.

Here, the process of loading the first cassette 37a loaded on the first seating part 35a into the first process equipment 61a is the same as described above.

The cassette transfer machine then moves along line 62 to the second process equipment 61b.

Thereafter, the cassette transfer machine reads the mark plate of the second process equipment 61b using the second positioning sensor 33b, so that the second seating portion 35b of the cassette transfer machine is the second process equipment. The second cassette 37b located at the second seating part 35b by the second communication device 61b by using the second communication sensor 32b to communicate with the second process equipment 61b. To be loaded into equipment 61b.

Here, the process of loading the second cassette 37b loaded on the second seating part 35b into the second process equipment 61b is the same as described above.

By doing so, it is possible to load the cassettes 37a and 37b necessary for two different process steps with only one movement.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and it is common in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

In the cassette transfer machine and the driving method according to the present invention as described above has the following effects.

Cassette transfer machine according to the present invention, by providing a wider loading space than the conventional, it is possible to transfer a larger number of cassettes to each process equipment in one movement, thereby increasing the process yield accordingly.

1 is a side view of a conventional cassette transfer machine

Figure 2 is a plan view of a process line for explaining the cassette conveying process of the conventional cassette transfer machine

3 is a side view of a cassette transfer machine according to the present invention;

4 is a front view of FIG. 3

5 is a plan view of FIG.

Figure 6 is a plan view of a process line for explaining the cassette conveying process of the cassette transfer machine according to the present invention

* Explanation of symbols on the main parts of the drawings

31: robot arm 31a: slide

31b: drive shaft 32a: first communication sensor

32b: second communication sensor 33a: first positioning sensor

33b: second positioning sensor 34: wheel

35a; 1st seating part 35b: 2nd seating part

37a: first cassette 37b: second cassette

Claims (5)

In a cassette transfer machine for transporting a cassette on which a substrate for a liquid crystal display device is loaded to a process equipment, First and second seating parts on which the cassette is seated; And a robot arm provided below the first or second seating part and moving the first and second seating parts to load the cassettes placed in the first and second seating parts into the process equipment. Cassette transfer machine characterized by. The method of claim 1, The robot arm is a cassette transfer machine, characterized in that consisting of a plurality of slides and a drive shaft connected to the lower portion of the slide to move the slide in the vertical direction or rotate 180 °. The method of claim 1, Cassette transfer machine characterized in that it further comprises a body portion for supporting the first, the second seating portion and the robot arm. The method of claim 3, wherein Cassette transfer machine characterized in that it further comprises a first, second positioning sensor and the first, second communication sensor on one side of the body portion. In a cassette transfer machine for transporting a cassette on which a substrate for a liquid crystal display device is loaded to a process equipment, Moving the robot arm down the first seat; Moving the robot arm upward to lift a cassette loaded on the first seating part; Loading the cassette loaded on the first seating unit into the process equipment; Moving the robot arm downward, and moving the robot arm downward in a second seating portion; Moving the robot arm upwards to lift a cassette loaded on the second seating part; And a step of loading the cassette loaded on the second seating part into the process equipment.