KR20040102538A - Holder for coating white metal-platinum on three dimensions - Google Patents

Abstract

PURPOSE: To provide a holder capable of evenly coating an object, which will be coated, with platinum by moving the object formed in a three dimensional structure during coating of platinum performed to improve adhesion and densification of coating film using an unbalanced magnetron sputtering source. CONSTITUTION: In a holder for fixing an object, which will be coated, to the inner part of a chamber in which vacuum deposition is carried out using a sputtering source in the vacuum state, the holder comprises a motor(11) installed at an outer side of the chamber; the first rotation part for rotating the first rotation plate(12) using driving force transferred from the motor; and the second rotation part engaged with the first rotation part to fix the object(90) to a plurality of second rotation plates(13) rotated along with the first rotation plate according to rotation of the first rotation plate.

Description

HOLDER FOR COATING WHITE METAL-PLATINUM ON THREE DIMENSIONS}

The present invention relates to a holder, and more particularly, to a holder used for coating platinum to a three-dimensional structure of a curved outer peripheral surface.

In general, a medical device is a generic term for devices and tools that normally treat damaged body parts using tools employing mechanical, electrical or chemical methods.

Cancer is a terrible disease that threatens the health of modern people. It is a terrible disease in which normal cells are destroyed by mutations or proliferation of cells.

As a method for treating a tumor of cancer, a surgical method of resecting the tumor, a method of destroying tissue by irradiating the tumor, and a method of necroticting cancer cells by administering an anticancer agent are widely used.

Surgical methods for resecting tumors are a definite treatment for early cancer tumors, but there are risks for malignant tumors. Radiation or chemotherapy is effective for early cancer tumors but does not respond to malignancies. Many, especially because the patient's immunity is weakened because the body is weak, there is a problem that can not be applied to the weak patients.

In order to solve this problem, the present applicant has developed an electrochemical treatment device and has applied for a patent application No. 2001-85992. The previously applied electrochemical treatment device regulates the amount of charge and current intensity of DC current according to the size of the tumor and induces an electrochemical and electro-biological response by inducing the cancer tumor, thereby killing the cancer cells and reducing the size of the tumor. Appliance.

The electrode to be used in the electrochemical treatment device should be a bioelectrode that is stable in electrochemical properties and excellent in durability even at high current density and does not cause corrosion by maintaining components of the electrode without causing corrosion.

The Applicant pays attention to this point and pays attention to platinum which is widely used in the industry. Platinum (Platinum) is a silver-white noble metal having excellent chemical resistance and biocompatibility, and has been widely used for various electrode materials and biomaterials.

On the other hand, among the methods of forming a metal film, generally known methods are the vacuum deposition method, which is one of electroplating methods and physical vapor deposition techniques.

Physical vapor deposition is generally well known that it is easy to manufacture a metal film with high purity and smooth surface. Physical vapor deposition includes vacuum deposition, sputtering and ion plating.

Here, the vacuum deposition method is a method of manufacturing a film on a substrate to be coated by heating the material in a vacuum or plasma atmosphere or by evaporating the coating material by using momentum transfer as a kind of physical vapor deposition technology.

In general, the metal film is manufactured using a vacuum deposition method, but in order to improve the adhesion and the density of the film, sputtering and ion plating are often used. Regarding the production of such a metal coating, it is introduced in detail in Korean Utility Model Application No. 1997-6014 and Korean Patent Application No. 1999-46122.

The sputtering introduced is a method of applying a high voltage to a target in an inert gas atmosphere to generate a glow discharge, and solidifying the target material removed by colliding the inert gas ions present in the generated glow discharge with the target. . Various sources such as direct current dipole sputtering and magnetron sputtering have been developed for sputtering, and the magnetron sputtering method with high evaporation rate is most widely used.

Magnetron sputtering has a much higher evaporation rate of the target, more than 10 times the discharge gas pressure, and a few hundred volts of the target voltage compared to the conventional two-pole DC sputtering. However, the distance between the target and the coated body is limited to within 5 ~ 10cm, and the current flowing through the coated body is low, so there was no great effect in the quality characteristics of the coating layer, such as the density and adhesion of the coating layer.

Thus, what was devised in a new way is unbalanced magnetron sputtering. In the conventional magnetron method, the magnetic field generated by the permanent magnet is formed only near the target, but in the non-balanced magnetron method, a magnet having a different size of the internal magnet and the magnetic field is also installed outside, so that some magnetic fields also affect the coated body. Ionization also occurs in the vicinity of the coated body, thereby improving the properties of the plating layer.

The present invention has been created in line with the research and development of the previously-applied electrochemical treatment device, when the platinum coating is carried out to improve the adhesion and density of the film by using an unbalanced magnetron sputtering source, consisting of a three-dimensional structure It is to provide a holder to move the coated body to evenly coat the entire coated body.

1 is a view schematically showing a chamber in which a holder according to the present invention is used,

2 is a perspective view of a holder according to the present invention;

3 is a side view showing a holder according to the present invention,

Figure 4 is a side view showing a holder which is another embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

10 ... holder 11 ... motor

12 ... 1st tumbler 13 ... 2nd tumbler

14 ... driven pulley 15 ... driven pulley

16 ... belt 17 ... gear plate

18 ... gear plate 20 ... chamber

30 ... platinum target 50 ... shutter

80 ... sputtering source 90 ... coated body

In order to achieve the above object of the present invention, the holder of the present invention is provided on the outside of the chamber in a holder for fixing a to-be-coated body in a chamber in which vacuum deposition is performed using a sputtering source while maintaining a vacuum. Motor; A first rotating part rotating the first rotating plate by using the driving force transmitted from the motor; And a second rotating part which is engaged with the first rotating part and fixes the to-be-coated body to the plurality of second rotating plates which rotate together with the rotation of the first rotating plate.

Here, it is preferable that a plurality of fixing holes are formed in the second rotating plate to fix the coated body in a vertical direction.

In addition, in order to transmit the driving force of the motor to the first rotating plate, the driving pulley is fixed to the rotating shaft of the motor, the driven pulley is fixed to the fixed shaft fixed to the center of the first rotating plate, the driving pulley and the driven pulley It is preferable to connect with a belt.

In addition, the first rotation plate and the second rotating plate by the driving force of the motor to rotate at the same time to install the air gear plate on the first rotating plate, the small gear plate meshed with the air gear plate is installed on the second rotating plate It is desirable to.

It is preferable that the to-be-coated body used by such a structure is a tungsten wire-shaped electrode cut | disconnected to predetermined length.

A holder according to another embodiment of the present invention is a holder for fixing a to-be-coated body in a chamber for performing vacuum deposition using a sputtering source while maintaining a vacuum, comprising: a motor installed outside the chamber; A third rotating part which rotates a lifting cam having a third rail and a wavy rail formed thereon using a driving force transmitted from the motor; And a fourth rotating part which is engaged with the lifting cam and rotates together with the rotation of the third rotating plate and simultaneously fixes the to-be-coated body to the plurality of fourth rotating plates which are moved up and down along the rail.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1 is a view schematically showing a chamber in which a holder according to the present invention is used, FIG. 2 is a perspective view showing a holder according to the present invention, and FIG. 3 is a side view showing the holder according to the present invention.

Holder 10 of the present invention is to be installed in the interior of the chamber 20, first look at the structure of the chamber 20, the chamber 20 is connected to a vacuum pump (not shown) in the working room to connect the interior of the working room To maintain a vacuum, the platinum target 30, the holder 10, the heater 40, the shutter 50, the gas inlet 60, Then, the vacuum gauge 70 is installed, and the sputtering source 80 is installed outside the work room.

The platinum target 30 causes platinum ions to form when electrons accelerated to the target 30 made of platinum physically collide with the surface.

The shutter 50 is disposed between the platinum target 30 and the holder 10. The shutter 50 selectively blocks the ionized platinum ions generated from the platinum target 30 from moving toward the holder. .

In the center of the working room is provided with a lid 22 to open and close the working room. The lid 22 is provided with a heater 40 disposed in the interior of the working room, the heater 40 is provided with a temperature control unit to adjust the heat generated from the heater 40.

The gas inlet 60 is an inlet for injecting argon gas, which is an inert gas, into the interior of the working chamber maintained in a vacuum state.

The vacuum gauge 70 is a gauge installed to determine the degree of vacuum in the working room.

As the sputtering source 80 fixed to the outside of the work room, an unbalanced magnetron method was used, and the electromagnet 82 is used as a method for maintaining the non-equilibrium. Here, the non-equilibrium is a deliberately unstable movement of the plasma formed in the work room by forming a fluctuation of the magnetic field using the electromagnet 82 in the work room, and the coated body 90 of the electromagnet 82 is not a flat substrate but is bent. When it is a true shape, it is intended to be able to form a film evenly over the whole surface.

The holder according to the characteristics of the present invention is installed at the lower center of the chamber 20 configured as described above.

The holder 10 has a first rotating part for rotating the first rotating plate 12 by using the driving force transmitted from the motor 11, and is rotated together with the first rotating plate 12 in engagement with the first rotating part to be coated. And a second rotating part for rotating the plurality of second rotating plates 13 capable of fixing the 90.

Here, the motor 11 is provided outside the work room, and the first rotating plate 12 is provided inside the work room.

The motor 11 and the first rotating plate 12 are interconnected through a power transmission member. For example, the driving pulley 14 is fixed to the rotating shaft of the motor 11 as a power transmission member, and the driven pulley 15 is fixed to the fixed shaft fixed to the center of the first rotating plate 12, and the driving pulley ( By connecting the 14 and the driven pulley 15 with the belt 16, the driving force transmitted from the motor 11 is transmitted to the first rotating plate 12.

The second rotating plate 13 is located at the edge of the first rotating plate 12, and the support shaft 13a fixed to the center of the second rotating plate 13 rotates through the first rotating plate 12. Inserted as possible. A plurality of fixing holes 13b are formed in the second rotating plate 13 along the circumferential direction of the second rotating plate 13 to insert and fix the coated body 90 into each of the fixing holes 13b. . The plurality of fixing holes 13b may be formed in a direction perpendicular to the second rotating plate 13 to maintain a posture in a vertical direction in a state where the coated body is inserted.

The small gear plate 17 is fixed to the support shaft 13a of the second rotating plate 13 so that the second rotating plate 13 can be rotated according to the rotation of the first rotating plate 12, and the first rotating plate 12 is fixed. ), The air gear plate 18 meshed with the small gear plate 17 is fixed.

The to-be-coated body 90 inserted into and fixed to the fixing hole 13b of the holder 10 may be evenly coated even when using a three-dimensional structure.

As an example of the to-be-coated body 90 used in the present invention, the electrode used in the electrochemical treatment device is formed in the shape of a wire in the form of a needle.

Such a coating body 90 may be of various materials, but considering that the coating body 90 is coated according to an embodiment of the present invention is used in a living body, breakage or cutting during a medical procedure. Because this should not occur, use a wire made of tungsten, which is a durable material. These tungsten wires are cut to have a diameter of about 0.8 mm and a length of about 15 cm.

The holder according to the present invention configured as described above exhibits the following actions.

First, before fixing the to-be-coated body 90 to the inside of the chamber 20, since the foreign substance should not exist in the surface of the tungsten wire which is the to-be-coated body 90, cleaning is performed.

Washing is soaked in dilute hydrochloric acid solution (hydrochloric acid to water in a ratio of 1 to 9) diluted with hydrochloric acid for 10 minutes, and then ultrasonically cleaned for 15 minutes using acetone and alcohol.

The first to be cleaned 90 to be coated is inserted into all the fixing holes 13b of the second rotating plate 13, and then the lid 22 is closed.

The to-be-coated body 90 is secondarily cleaned in a state where the lid 22 is closed. Secondary cleaning is performed in the interior of the working chamber, and for cleaning, first, a vacuum pump is operated to vacuum the inside of the chamber 20 to exhaust the vacuum degree inside the chamber 20 to the desired degree of vacuum.

When the vacuum degree is 10 ^-5 Torr or less, argon gas is injected into the interior of the work chamber 1 through the gas inlet 60 and glow discharge is performed.

The glow discharge is applied to the second rotating plate 13 by applying a negative voltage so that the glow discharge occurs in the coated body 90, thereby preventing not only impurities such as organic substances present in the coated body 90 but also naturally occurring oxide films. Will be removed. If these impurities are not sufficiently removed, the adhesiveness is affected. Therefore, the cleaning is sufficiently performed.

When the cleaning of the to-be-coated body 90 is completed, the platinum target 30 is cleaned. The cleaning of the platinum target 30 is performed to remove impurities existing on the surface of the platinum target 30 and is performed just before the sputtering process. In the present invention, when the plasma is generated by applying power to the sputtering source 80 while the shutter 50 is closed, the platinum target 30 is cleaned. At this time, the interior conditions of the working room are kept the same as in the step of carrying out the coating described later.

After the cleaning of the platinum target 30 is finished, the coating process is performed so that a platinum film is formed on the surface of the coated body 90. During this step, the shutter 50, which is closed between the platinum target 30 and the coated body 90, is opened to open the region of the magnetic field formed by the non-equivalent magnetron sputtering source 80 to the coated body 90. Affects, and as a result, the platinum plasma ions formed near the surface of the platinum target 30 move toward the coated body 90 to form a film.

At the same time, the motor 11 is driven to rotate the first rotating plate 12 connected through the power transmission member. Then, the small gear plate 16 meshed with the air gear plate 17 of the first rotating plate 12 also rotates at the same time, and the second rotating plate 13 also rotates together.

As a result, the platinum plasma ions generated from the platinum target 30 form a film on the surface of the to-be-coated body 90 which is continuously rotating in the chamber 20.

At this time, since the first rotating plate 12 and the second rotating plate 13 are being rotated at the same time, the entire coating body 90 is uniformly coated.

On the other hand, another embodiment of the present invention will be described in detail with reference to FIG.

In this embodiment, the holder 100 is configured to move up and down as it is waved in the vertical direction at the same time as the rotation.

In more detail, the holder 100 is engaged with the third rotating part for rotating the third rotating plate 104 and the lifting cam 106 by using the driving force transmitted from the motor 102. And a fourth rotating part for rotating the plurality of fourth rotating plates 108 capable of being rotated together with the third rotating plate 104 and simultaneously lifting and lowering the fixed body 90.

Here, the motor 102 is installed outside the work room, and the third rotating plate 104 is installed inside the work room.

In order to simultaneously rotate the third rotating plate 104 and the elevating cam 106 by using the driving force transmitted from the motor 102, the third rotating plate 104 and the elevating cam 106 are connected to the mutually fixed shaft 110. It is fixed, and the driven pulley 112 is installed at the end of the fixed shaft 110, the driven pulley 112 is mutually through the drive pulley 114 and the belt 116 fixed to the rotating shaft of the motor 102 Connected.

The third rotating plate 104 has a first bevel gear 104a formed on the upper inner circumferential surface thereof and is engaged with the second bevel gear, which will be described later.

The lifting cam 106 is fixed to the upper portion of the fixed shaft 110, and the rail of the wave shape is formed on the raising cam 106.

An insertion hole is formed in the center portion so that the fourth rotating plate 108 that rotates while descending and descending along the wavy rail is supported, and the support shaft 118 is inserted into the insertion hole.

Protruding guide 118a in the axial direction on the side of the support shaft 118 so that the fourth rotating plate 108 also rotates in accordance with the rotation of the support shaft 118 with the support shaft 118 is inserted into the insertion hole It is preferable to form, and to form a corresponding recess groove on the inner peripheral surface of the insertion hole.

The support shaft 118 penetrating the insertion hole also penetrates the elevating cam 106, and a second bevel gear 118b is installed at the lower end thereof and is engaged with the first bevel gear 104a described above. At this time, the support shaft 118 may rotate in a state passing through the elevating cam 106.

The fourth rotary plate 108 is located at the edge of the third rotary plate 104, and as shown in the above-described embodiment, a plurality of fixing holes are formed along the circumferential direction of the fourth rotary plate 108 to be avoided. The coating body 90 is inserted into each of the fixing holes and fixed.

It is preferable to use the same coating body 90 as that to be inserted and fixed in the fixing hole of the holder 100.

Another embodiment according to the present invention configured as described above exhibits the following actions.

Since the operation of the holder 100 is the same as the above-described embodiment, the description thereof will be omitted and only the operation of the holder will be described.

First, the motor 102 is driven to rotate the third rotating plate 104 and the lifting cam 106 connected through the power transmission member.

Then, as the second bevel gear 118b engaged with the first bevel gear 104a of the third rotating plate 104 rotates, the fourth rotating plate 108 connected to the protruding guide 118a and the inlet groove rotates.

At this time, since the lifting cam 106 fixed to the fixed shaft 110 also rotates along with the third rotating plate 104, the fourth rotating plate 108 moves up and down along the wavy rail.

Therefore, the platinum plasma ions generated from the platinum target 30 move to the coated body 90 under the influence of the magnetic field generated from the sputtering source 80 to form a film on the surface of the coated body 90. At this time, since the fourth rotating plate 108 on which the to-be-coated body 90 is fixed moves up and down at the same time as the rotation, even platinum coating is performed on the entire to-be-coated body 90.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the range of.

As described above, according to the present invention, platinum is coated on the tungsten wire through the holder as described above, so that evenly coated platinum is formed on the entire tungsten wire, thereby forming an electrode having excellent compactness and adhesion.

Claims (7)

A holder for fixing a to-be-coated body in a chamber in which vacuum deposition is performed using a sputtering source while maintaining a vacuum, A motor installed outside the chamber; A first rotating part rotating the first rotating plate by using the driving force transmitted from the motor; And A second rotating part which is engaged with the first rotating part and fixes the to-be-coated body to the plurality of second rotating plates which rotate together with the rotation of the first rotating plate. Holder used to coat the platinum on a three-dimensional structure comprising a. The holder of claim 1, wherein the second rotating plate is provided with a plurality of fixing holes for fixing the coated body in a vertical direction. According to claim 1, In order to transmit the driving force of the motor to the first rotating plate, the driving pulley is fixed to the rotating shaft of the motor, the driven pulley is fixed to the fixed shaft fixed to the center of the first rotating plate, the drive A holder used to coat platinum on a three-dimensional structure, characterized by connecting a pulley and a driven pulley with a belt. The small gear plate of claim 2, wherein a standby gear plate is installed on the first rotary plate so that the first rotary plate and the second rotary plate can rotate at the same time by the driving force of the motor. A holder used for coating platinum on a three-dimensional structure, characterized in that it is installed on the second rotating plate. The holder according to any one of claims 1 to 4, wherein the coated body is an electrode in the form of a wire cut to a predetermined length. 6. The holder of claim 5 wherein the wire is made of tungsten. A holder for fixing a to-be-coated body in a chamber in which vacuum deposition is performed using a sputtering source while maintaining a vacuum, A motor installed outside the chamber; A third rotating part which rotates a lifting cam having a third rail and a wavy rail formed thereon using a driving force transmitted from the motor; And A fourth rotating part which is engaged with the lifting cam and rotates together with the rotation of the third rotating plate and simultaneously fixes the to-be-coated body to the plurality of fourth rotating plates which are moved up and down along the rail; Holder used to coat the platinum on a three-dimensional structure comprising a.