KR20040076490A - Optic cable connect with EDP for manufacturing semiconductor - Google Patents
Optic cable connect with EDP for manufacturing semiconductor Download PDFInfo
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- KR20040076490A KR20040076490A KR1020030011862A KR20030011862A KR20040076490A KR 20040076490 A KR20040076490 A KR 20040076490A KR 1020030011862 A KR1020030011862 A KR 1020030011862A KR 20030011862 A KR20030011862 A KR 20030011862A KR 20040076490 A KR20040076490 A KR 20040076490A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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Abstract
Description
본 발명은 반도체 장치 제조용 반응 종료점 검출기에 연결되는 광 케이블에 관한 것으로서, 보다 상세하게는 광 파장이 인입되는 말단부에 간단히 반사판이 조립되게 함으로써 파장의 손실없이 반응 종료점 검출기(End Point Detector, 이하 EDP라 약침함)로 정확하고 안정되게 파장 전송이 이루어지도록 하는 반도체 장치 제조용 반응 종료점 검출기에 연결되는 광 케이블에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical cable connected to a reaction end point detector for manufacturing a semiconductor device. More specifically, the reflective plate is simply assembled to an end portion into which an optical wavelength is introduced. The present invention relates to an optical cable connected to a reaction endpoint detector for manufacturing a semiconductor device, which enables accurate and stable wavelength transmission.
일반적으로 EDP는 반도체 장치를 제조하는 공정에 사용되는 챔버 장비에 사용된다. 예를 들어, 챔버의 벽면에 석영 재질의 EDP의 윈도우부(window part)가 설치되고, 이러한 윈도우부를 통해서 발광 또는 수광되는 빛을 윈도우부에 설치한 광 포트(optical port)부에 연결되는 광케이블에 의해서 검출 장비로 전송한다. 즉 전송되는 신호광을 분석하여 챔버 내에서 수행되는 반응, 예를 들어 식각 반응 정도를 감지하여 반응 종료점을 제어하게 된다.In general, EDP is used in chamber equipment used in the process of manufacturing semiconductor devices. For example, a window part of a quartz EDP is installed on the wall of the chamber, and an optical cable connected to an optical port part in which light emitted or received through the window part is installed in the window part. To the detection equipment. In other words, by analyzing the transmitted signal light to detect the reaction performed in the chamber, for example, the degree of etching reaction to control the reaction end point.
이와 같이 반응 종료점 검출에 이용되는 빛 또는 파장을 검출하기 위해서 연결되는 광케이블은 광의 정확한 전달을 위해서 심하게 굽혀지거나 꺾여지지 않도록 하고 있다. 이를 위해 본 출원인에 의해 이미 특허공개 제2000-56454호를 통해 해결 방안을 제시한 바 있다.As such, the optical cables connected to detect the light or the wavelength used to detect the end point of the reaction are not bent or bent too much for accurate transmission of the light. To this end, the applicant has already proposed a solution through the Patent Publication No. 2000-56454.
도 1은 종래 및 기제안 발명에서의 반도체 장치 제조용 EDP에 연결되는 광케이블(opti cable)을 개략적으로 나타낸 것으로서, 광케이블은 다수의 광섬유로 이루어지는 광 섬유부재(10)와 이러한 광 섬유부재(10)를 외부에서 감싸는 피복부재(20) 및 말단의 연결부재(30) 등으로 구분된다.Figure 1 schematically shows an optical cable (opti cable) connected to the EDP for manufacturing a semiconductor device in the prior art and the present invention, the optical cable is an optical fiber member 10 consisting of a plurality of optical fibers and such an optical fiber member 10 It is divided into a covering member 20 and the connecting member 30 of the end wrapped in the outside.
다수의 광섬유가 다발(통상 6~7개의 다발)로 묶여 있는 광 섬유부재(10)는코아(core)와 클래딩(cladding)의 경계면에서 빛의 전반사가 계속하여 일어나면서 빛이 전송되는 것이다. 광 섬유부재(10)를 감싸는 피복부재(20)는 빛이 바깥쪽으로 새어 나가지 못하도록 하는 작용을 하는 구성인 바 이러한 피복부재(20)는 PVC(Poly Vinyl Chloride) 등과 같은 고분자 물질로서 이루어지게 된다.The optical fiber member 10, in which a plurality of optical fibers are bundled into bundles (typically 6-7 bundles), transmits light while total reflection of light occurs continuously at the interface between the core and the cladding. The coating member 20 surrounding the optical fiber member 10 is configured to prevent light from leaking outward. The coating member 20 is made of a polymer material such as polyvinyl chloride (PVC).
이러한 광 섬유부재(10)의 말단부는 연결부재(30)에 의해 감싸지는데 이때의 연결부재(30)는 플라스틱(plastic) 등과 같은 경질의 재질로서 이루어지며, 광 섬유부재(10)가 광을 받고자 하는 부분에 다다르도록 이끌어주는 역할을 한다. 예를 들어, 챔버 벽면에 장착되는 EPD의 윈도우부(도시되지 않음)에 형성된 광 포트부(도시되지 않음)에 삽입되어 광케이블이 체결되도록 하고 있다.The distal end of the optical fiber member 10 is wrapped by the connection member 30, the connection member 30 is made of a hard material such as plastic (plastic), the optical fiber member 10 to receive light It leads to the part that does. For example, an optical cable is inserted into an optical port portion (not shown) formed in a window portion (not shown) of an EPD mounted on a chamber wall to fasten an optical cable.
특히 이러한 연결부재(30)의 선단부에는 설비측의 연결 단자(미도시)에 삽입되면서 설비측으로부터 전달되는 광 파장이 EDP측으로 정확하게 전달될 수 있도록 삽입부(31)를 형성하되 삽입부(31)는 외주면이 연결부재(30)측 단부로부터 타단부로 점차 직경이 축소되는 테이퍼진 형상으로서 이루어지도록 하고 있다.In particular, the front end portion of the connection member 30 is inserted into the connection terminal (not shown) of the installation side while forming the insertion portion 31 so that the light wavelength transmitted from the installation side can be accurately transmitted to the EDP side insertion section 31 The outer circumferential surface is formed as a tapered shape in which the diameter gradually decreases from the end of the connecting member 30 to the other end.
하지만 종래의 EPD측의 광 케이블은 파장을 받아들이게 되는 연결부재(30)의 말단에서 설비측 연결 단자와 접속 시 조립 상태가 불량해지게 되면 설비측으로부터의 광 신호를 제대로 받아들이지를 못하므로 검출되는 광 신호의 전송이 불량해지게 되어 반응의 종료점 검출이 불가능해진다. 이에 따라, 챔버 내에서 수행되는 반응 공정, 예컨대, 식각 공정 등에 불량이 발생할 수 있는 문제를 초래한다.However, the conventional optical cable on the EPD side cannot detect the light signal from the installation side if the assembly state is poor when connecting to the installation side connection terminal at the end of the connection member 30 that receives the wavelength. The transmission of the signal becomes poor, making it impossible to detect the end point of the reaction. As a result, a problem may occur in which a defect may occur in a reaction process performed in the chamber, for example, an etching process.
따라서 본 발명은 상술한 종래 기술의 문제점들을 해결하기 위하여 발명된 것으로서, 본 발명은 광 파장이 유도되는 연결부의 선단에 반사판을 구비하여 안정된 광 전송이 이루어지도록 하는데 주된 목적이 있다.Therefore, the present invention has been invented to solve the above-mentioned problems of the prior art, and the present invention has a main object to provide a stable light transmission by having a reflector at the tip of the connection portion where the light wavelength is induced.
또한 본 발명은 광 파장의 손실을 방지함으로써 보다 정확한 종료점 검출을 제공할 수 있도록 하는데 다른 목적이 있다.It is another object of the present invention to provide more accurate endpoint detection by preventing the loss of light wavelength.
도 1은 종래의 반도체 장치 제조용 EDP에 연결되는 광 케이블의 설비측 연결 단자와 연결되는 구성을 도시한 요부 사시도,1 is a perspective view of a main part showing a configuration connected to the installation-side connection terminal of the optical cable connected to the conventional EDP for manufacturing semiconductor devices;
도 2는 본 발명에 따른 광 케이블의 구성을 도시한 요부 단면 측면도,2 is a sectional side view of the main portion showing the construction of an optical cable according to the present invention;
도 3은 본 발명에 따라 삽입부에 광 섬유부재가 배열되는 구성을 도시한 정면도,Figure 3 is a front view showing a configuration in which the optical fiber member is arranged in the insert portion in accordance with the present invention,
도 4는 본 발명에 따라 광 파장의 전달 상태를 예시한 사용 상태도.4 is a use state diagram illustrating a transmission state of an optical wavelength according to the present invention;
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
10 : 광 섬유부재 20 : 피복부재10: optical fiber member 20: coating member
30 : 연결부재 31 : 삽입부30: connecting member 31: insertion part
40 : 반사판부재40: reflector plate member
이와 같은 목적을 달성하기 위하여 본 발명은 다수의 광섬유가 다발로 묶여 있는 광 섬유부재와; 상기 광 섬유부재로부터 빛이 바깥쪽으로 새어 나가지 못하도록 감싸는 피복부재와; 상기 피복부재의 말단부를 감싸면서 설비측 연결 단자와 연결되는 연결부재와; 상기 연결부재의 선단부로부터 돌출시킨 삽입부를 수용하도록 일단은 상기 연결부재의 선단부에 결합되고, 상기 삽입부의 끝단부보다는 더욱 외측에 위치되도록 하는 타단은 점차 내경이 축소되면서 외주면이 완만하게 경사진 형상으로 구비되도록 하는 반사판부재로서 이루어지도록 하는 구성입니다.In order to achieve the above object, the present invention provides an optical fiber member in which a plurality of optical fibers are bundled together; A covering member encapsulating the light from the optical fiber member to prevent the light from leaking outward; A connecting member connected to the installation side connection terminal while covering the distal end of the covering member; One end is coupled to the front end of the connection member so as to accommodate the insertion portion protruding from the front end of the connection member, and the other end to be located outside the end of the insertion part is gradually reduced in inner diameter while the outer circumferential surface is gently inclined. It is a configuration to be made as a reflecting plate member to be provided.
이하 본 발명의 바람직한 실시예를 첨부된 도면에 의하여 더욱 상세히 설명하면 다음과 같다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 2는 본 발명에 따른 광 케이블의 선단부 구조를 도시한 측단면도로서, 본 발명에서의 가장 두드러진 특징은 광 케이블의 선단부에 반사판부재가 구비되도록 하는 것이다.Figure 2 is a side cross-sectional view showing the structure of the front end portion of the optical cable according to the present invention, the most prominent feature of the present invention is that the reflecting plate member is provided at the front end of the optical cable.
즉 본 발명은 기본적으로 광 섬유부재(10)와 피복부재(20)와 연결부재(30)로서 이루어지는 구성으로서, 이는 종전의 구성과 대동소이하다.That is, the present invention basically consists of the optical fiber member 10, the covering member 20, and the connecting member 30, which is almost the same as the conventional structure.
광 섬유부재(10)는 다수의 광섬유를 다발로 묶은 형상으로서, 이러한 광 섬유부재(10)는 하나의 광 케이블에 통상 6~7개의 다발을 구비한다.The optical fiber member 10 is a bundle of a plurality of optical fibers, the optical fiber member 10 is provided with a bundle of 6 to 7 usually in one optical cable.
피복부재(20)는 복수의 광 섬유부재(10)들이 일정한 간격으로 균일하게 배치되도록 하면서 빛이 바깥쪽으로 새어 나가지 못하도록 이들 광 섬유부재(10)들을 외측에서 감싸는 구성이다.The covering member 20 is configured to surround the optical fiber members 10 from the outside so that the plurality of optical fiber members 10 may be uniformly arranged at regular intervals so that light does not leak outward.
그리고 연결부재(30)는 이러한 복수의 광 섬유부재(10)들을 피복부재(20)에 의해 감싸지도록 한 선단부에 형성되면서 설비측 연결 단자와 연결되도록 하는 구성이다.And the connecting member 30 is configured to be connected to the installation-side connection terminal while being formed in the front end portion to surround the plurality of optical fiber members 10 by the covering member 20.
이때 연결부재(30)에는 끝단면으로부터 미세한 길이만큼 삽입부(31)가 돌출되도록 하고 있다. 삽입부(31)는 일단이 통상 연결부재(30)의 끝단면보다는 작은 직경이고, 타단은 일단보다도 작은 직경을 갖도록 하여 외주면이 소정의 각도로 경사지게 형성되도록 한 구성이며, 삽입부(31)의 끝단면은 적어도 복수의 광 섬유부재(10)들을 모두 수용하면서 이들의 끝단부가 각각 노출되도록 하는 직경을 갖도록 한다.At this time, the insertion member 31 is projected to the connecting member 30 by a minute length from the end surface. Insertion portion 31 is a configuration in which one end is a diameter smaller than the end surface of the connecting member 30, the other end has a diameter smaller than one end so that the outer circumferential surface is formed to be inclined at a predetermined angle, The end surface has a diameter such that the ends thereof are respectively exposed while accommodating at least the plurality of optical fiber members 10.
이와 같은 구성에서 본 발명은 연결부재(30)의 끝단면에 삽입부(31)를 수용하는 반사판부재(40)가 동시에 구비되도록 하는데 특징이 있다.In this configuration, the present invention is characterized in that the reflector plate member 40 for accommodating the insertion portion 31 is provided at the end surface of the connection member 30 at the same time.
다시 말해 본 발명의 반사판부재(40)는 삽입부(31)와 마찬가지로 연결부재(30)의 끝단면에 일단이 결합되면서 동심원상에서 일단의 외경이 타단의 외경보다는 큰 주면을 갖는 원통형의 광 파장 유도 수단이다.In other words, the reflecting plate member 40 of the present invention, like the insertion portion 31, one end is coupled to the end surface of the connecting member 30, the outer diameter of one end on the concentric circle has a larger main surface than the outer diameter of the other end inducing a cylindrical light wavelength Means.
연결부재(30)에의 결합은 외주면 끝단부에 반사판부재(40)의 일단이 긴밀하게 삽입되도록 하여 맞춤끼움에 의해 연결하거나 탈장착이 가능하게 결합되게 할 수가 있다.Coupling to the connection member 30 may be such that one end of the reflecting plate member 40 is closely inserted into the outer peripheral surface end to be connected by fitting fit or detachable coupling.
이때의 반사판부재(40)의 외측 주면의 경사각은 삽입부(31)의 외주면보다는 완만하게 형성되도록 하는 것이 바람직하며, 길이는 삽입부(31)보다는 외측으로 더욱 연장되도록 한다.At this time, the inclination angle of the outer circumferential surface of the reflecting plate member 40 is preferably formed to be gentler than the outer circumferential surface of the insertion portion 31, the length is further extended to the outside than the insertion portion 31.
또한 반사판부재(40)의 끝단부의 내경은 삽입부(31)의 끝단면 외경보다는 작지 않게 형성하는 것이 가장 바람직하다.In addition, it is most preferable that the inner diameter of the end portion of the reflecting plate member 40 is not smaller than the outer diameter of the end surface of the insertion portion 31.
한편 본 발명은 피복부재(20)내의 광 섬유부재(10)의 수를 도 3에서와 같이 늘려 광 섬유부재(10)간 더욱 조밀하게 형성되도록 하면서 피복부재(20)의 외측으로 더욱 폭넓게 배열되게 하고, 이러한 광 섬유부재(10)들 중 가장 외측에 배열되는 광 섬유부재(10)이 삽입부(31)이 경사지는 외주면으로 위치되면서 이 경사면에 광 섬유가 노출되도록 형성되게 할 수도 있다.Meanwhile, the present invention increases the number of the optical fiber members 10 in the coating member 20 as shown in FIG. 3 so that the optical fiber members 10 are more densely formed so as to be more widely arranged outside the coating member 20. In addition, the optical fiber member 10 arranged at the outermost side of the optical fiber members 10 may be formed to be exposed to the outer peripheral surface of the inclined portion 31 is inclined so that the optical fiber is exposed to this inclined surface.
이와 같이 구성된 본 발명에 의한 작용에 대해서 설명하면 다음과 같다.Referring to the operation of the present invention configured as described above is as follows.
도 4에 도시한 바와 같이 본 발명은 연결부재(30)와 설비측 연결 단자간의 연결이 비록 불량하거나 이 연결 부위가 파손되었더라도 설비로부터 전달되는 광 파장이 삽입부(31)의 각 광 섬유부재(10)에 정확히 전달될 수 있도록 하는 것이다.As shown in FIG. 4, in the present invention, even if the connection between the connection member 30 and the installation-side connection terminal is poor or the connection site is broken, the optical wavelength transmitted from the installation is changed to each optical fiber member of the insertion portion 31 ( To ensure that it is delivered correctly.
즉 설비로부터 광 파장이 분산되어 유도되면 이들 분산되던 광 파장들은 본 발명의 반사판부재(40)의 내주면에 부딪치면서 소정의 각도로 굴절되어 삽입부(31)의 끝단면 및 외측의 경사면에 전달이 되면 삽입부(31)에 끝단부가 노출되어 있는광 섬유부재(10)로 원활히 광 파장을 전달하게 된다.That is, when the light wavelengths are dispersed and induced from the facility, these scattered light wavelengths are refracted at a predetermined angle while hitting the inner circumferential surface of the reflector plate member 40 of the present invention, so that the transmission is transmitted to the end surface of the insertion portion 31 and the inclined surface outside. When the end portion is exposed to the insertion portion 31 is to transmit the optical wavelength smoothly.
이렇게 반사판부재(40)에 의해서 설비측으로부터의 광 파장을 거의 손실없이 삽입부(31)의 각 광 섬유부재(10)에 전달하게 됨으로써 EPD에서의 반응의 종료점 검출을 안정되게 수행할 수가 있게 된다.By transmitting the optical wavelength from the installation side to the optical fiber members 10 of the insertion portion 31 with almost no loss by the reflecting plate member 40, the end point detection of the reaction in the EPD can be stably performed. .
한편 상기한 설명에서 많은 사항이 구체적으로 기재되어 있으나, 그들은 발명의 범위를 한정하는 것이라기보다는 바람직한 실시예의 예시로서 해석되어야 한다.On the other hand, while many matters have been described in detail in the above description, they should be construed as illustrative of preferred embodiments rather than to limit the scope of the invention.
따라서 본 발명의 범위는 설명된 실시예에 의하여 정하여 질 것이 아니고 특허 청구범위에 기재된 기술적 사상에 의해 정하여져야 한다.Therefore, the scope of the present invention should not be defined by the described embodiments, but should be determined by the technical spirit described in the claims.
상술한 바와 같이 본 발명에 의하면 간단히 연결부재(30)의 선단에 원통형상의 반사판부재(40)가 결합되도록 하면서 연결부재(30)로부터 돌출되는 삽입부(31)에는 끝단면과 함께 경사진 외주면으로도 동시에 광 섬유부재(10)의 끝단부가 배열되게 함으로써 비록 설비측 연결 단자와의 연결 불량이나 파손 시에도 설비측으로부터의 광 파장을 EPD에 안정되게 전달되도록 하여 EDP에서의 반응의 종료점 검출이 정확히 수행되도록 한다.According to the present invention as described above, the insertion portion 31 protruding from the connecting member 30 to the outer peripheral surface inclined together with the end surface while the cylindrical reflecting plate member 40 is simply coupled to the front end of the connecting member 30. At the same time, the end of the optical fiber member 10 is arranged so that the optical wavelength from the installation side can be stably transmitted to the EPD even when the connection to the installation side connection terminal is broken or broken, so that the end point detection of the reaction in the EDP can be accurately performed. To be performed.
이렇게 EDP에서 종료점 검출이 정확해지면 결국 챔버에서 반도체를 제조하는데 있어서의 공정 수행 효율이 향상되도록 하는 이점을 제공하게 된다.This accurate detection of endpoints in the EDP provides the advantage of improving the efficiency of the process for manufacturing semiconductors in the chamber.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020030011862A KR20040076490A (en) | 2003-02-26 | 2003-02-26 | Optic cable connect with EDP for manufacturing semiconductor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020030011862A KR20040076490A (en) | 2003-02-26 | 2003-02-26 | Optic cable connect with EDP for manufacturing semiconductor |
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| Publication Number | Publication Date |
|---|---|
| KR20040076490A true KR20040076490A (en) | 2004-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020030011862A KR20040076490A (en) | 2003-02-26 | 2003-02-26 | Optic cable connect with EDP for manufacturing semiconductor |
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| Country | Link |
|---|---|
| KR (1) | KR20040076490A (en) |
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2003
- 2003-02-26 KR KR1020030011862A patent/KR20040076490A/en not_active Application Discontinuation
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