KR20040070579A - Slurry filter box - Google Patents
Slurry filter box Download PDFInfo
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- KR20040070579A KR20040070579A KR1020030006752A KR20030006752A KR20040070579A KR 20040070579 A KR20040070579 A KR 20040070579A KR 1020030006752 A KR1020030006752 A KR 1020030006752A KR 20030006752 A KR20030006752 A KR 20030006752A KR 20040070579 A KR20040070579 A KR 20040070579A
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- South Korea
- Prior art keywords
- slurry
- filter
- lower body
- fixing member
- supply port
- Prior art date
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- 239000002002 slurry Substances 0.000 title claims abstract description 140
- 238000007599 discharging Methods 0.000 claims abstract description 5
- 238000001914 filtration Methods 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 abstract description 4
- 238000005192 partition Methods 0.000 abstract description 3
- 238000007517 polishing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/88—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/30—Filter housing constructions
- B01D35/306—Filter mounting adapter
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Filtration Of Liquid (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
본 발명은 슬러리 필터 박스에 관한 것으로서, 보다 상세하게는 내측에 공기가 남아 있지 않도록 함으로써 CMP 장비로 공급되는 슬러리에 공기가 과도하게 포함되지 않도록 하여 안정적인 CMP 공정을 실시토록 하는 슬러리 필터 박스에 관한것이다.The present invention relates to a slurry filter box, and more particularly, to a slurry filter box for performing a stable CMP process by preventing excessive air from being included in a slurry supplied to a CMP apparatus by preventing air from remaining inside. .
최근에는, 웨이퍼가 대구경화됨에 따라 웨이퍼의 넓어진 면을 평탄화하기 위해서 화학적인 제거가공과 기계적인 제거가공을 하나의 가공방법으로 혼합한 화학적 기계적 연마(Chemical-Mechanical Polishing; 이하 "CMP"라 함) 공정이 널리 이용되고 있다.Recently, in order to planarize the widened surface of the wafer as the wafer is large-sized, chemical-mechanical polishing (hereinafter referred to as "CMP") is a combination of chemical removal and mechanical removal in a single processing method. The process is widely used.
CMP 공정이란 단차를 가진 웨이퍼 표면을 폴리싱 패드 위에 밀착시킨 후 연마제와 화학물질이 포함된 슬러리(slurry)를 웨이퍼와 폴리싱 패드 사이에 주입시켜 웨이퍼의 표면을 평탄화시키는 방식이다.In the CMP process, a wafer surface having a step is brought into close contact with a polishing pad, and a slurry containing abrasive and chemical is injected between the wafer and the polishing pad to planarize the surface of the wafer.
CMP 공정을 실시하는 장비로 슬러리를 공급하는 시스템에는 슬러리를 필터링하여 공급하기 위한 슬러리 필터 박스가 구비된다.The system for supplying slurry to equipment for carrying out the CMP process is equipped with a slurry filter box for filtering and supplying the slurry.
종래의 CMP 공정에 사용되는 슬러리를 필터링하는 슬러리 필터 박스를 첨부된 도면을 이용하여 설명하면 다음과 같다.Referring to the slurry filter box for filtering the slurry used in the conventional CMP process using the accompanying drawings as follows.
도 1은 종래의 슬러리 필터 박스를 도시한 단면도이다. 도시된 바와 같이, 종래의 슬러리 필터 박스는 하부몸체(1)와, 하부몸체(1)에 설치되는 필터(2)와, 하부몸체(1)의 상측에 착탈가능하게 결합됨과 아울러 양측에 슬러리공급구(3a) 및 슬러리배출구(3b)가 각각 형성되는 상부몸체(3)로 이루어진다.1 is a cross-sectional view showing a conventional slurry filter box. As shown in the drawing, the conventional slurry filter box is detachably coupled to the lower body 1, the filter 2 installed on the lower body 1, and the upper side of the lower body 1, and the slurry is supplied to both sides. Sphere 3a and slurry discharge port 3b consists of an upper body 3, respectively.
하부몸체(1)는 내측에 필터고정부재(1a)가 수직되게 형성되며, 내부에 채워진 슬러리가 필터고정부재(1a)로 유입되어 상측으로 배출되도록 필터고정부재(1a) 내측에 슬러리이동로(1b)가 형성된다.The lower body 1 has a filter fixing member 1a formed vertically on the inside thereof, and a slurry moving path inside the filter fixing member 1a so that the slurry filled therein flows into the filter fixing member 1a and discharges upward. 1b) is formed.
필터(2)는 하부몸체(1)의 필터고정부재(1a)에 고정되어 외측으로부터 내측으로 유입되어 하부몸체(1)의 슬러리이동로(1b)로 이동하는 슬러리를 필터링한다.The filter 2 is fixed to the filter fixing member 1a of the lower body 1 to filter the slurry flowing from the outside into the slurry moving path 1b of the lower body 1.
상부몸체(3)는 양측에 슬러리공급구(3a) 및 슬러리배출구(3b)를 각각 형성하되, 내측에 슬러리가 필터(2)를 거치지 않고 하부몸체(1)의 슬러리이동로(1b)로 이동되는 것을 차단하는 차단부재(3c)가 형성된다.The upper body (3) forms a slurry supply port (3a) and slurry discharge port (3b) on each side, respectively, the slurry moves to the slurry movement path (1b) of the lower body (1) without passing through the filter (2) on the inside Blocking member (3c) is formed to block being.
이와 같은 구조로 이루어진 종래의 슬러리 필터 박스는 슬러리공급구(3a)를 통해 상부몸체(3)로부터 하부몸체(1)로 공급된 슬러리는 필터(2)의 내측으로 이동함으로써 필터링되어 슬러리이동로(1b)를 통해 상부몸체(1)중 차단부재(3c)에 의해 격리된 공간(3d)을 따라 슬러리배출구(3b)로 배출된다.In the conventional slurry filter box having such a structure, the slurry supplied from the upper body 3 to the lower body 1 through the slurry supply port 3a is filtered by moving to the inside of the filter 2 so that the slurry movement path ( It is discharged to the slurry outlet 3b along the space 3d isolated by the blocking member 3c of the upper body 1 through 1b).
그러나, 이와 같은 종래의 슬러리 필터 박스는 상부몸체(3)의 상측에 슬러리공급구(3a) 및 슬러리배출구(3b)를 통해 유입되거나 슬러리에 포함되어 유입되는 공기가 외부로 빠져 나가지 못한 채 남아 있기 때문에 웨이퍼를 폴리싱하기 위해 슬러리를 공급하는 도중에 상부몸체(3) 상측에 남아 있는 공기가 슬러리와 함께 CMP 장비로 공급됨으로써 웨이퍼의 평탄화 비율이 현저하게 저하되는 문제점을 가지고 있었다.However, such a conventional slurry filter box remains on the upper side of the upper body 3 through the slurry supply port 3a and the slurry discharge port 3b or air contained in the slurry does not escape to the outside. Therefore, since the air remaining on the upper body 3 in the middle of supplying the slurry to polish the wafer is supplied to the CMP equipment together with the slurry, the planarization rate of the wafer is significantly reduced.
또한, 하부몸체(1)에 상부몸체(3)가 억지 끼워짐으로써 서로 결합되기 때문에 이들의 결합부위에 슬러리가 경화되거나 이들의 서로 강한 힘에 의해 결합될 경우 하부몸체(1)로부터 상부몸체(3)를 쉽게 분리하기 어려워서 내측에 잔존하는 슬러리가 경화되는 것을 방지하기 위하여 외측으로 배출하거나 필터(2)를 교체하는 작업이 매우 번거롭고 힘들다는 문제점을 가지고 있었다.In addition, since the upper body 3 is coupled to each other by forcibly fitted to the lower body 1, when the slurry is cured at the joining portion thereof or when the slurry is hardened together, the upper body (from the lower body 1) It was difficult to separate 3), so that the slurry remaining on the inside was hard to be discharged to the outside or to replace the filter 2 in order to prevent hardening.
본 발명은 상술한 종래의 문제점을 해결하기 위한 것으로서, 본 발명의 목적은 내측에 공기가 남아 있지 않도록 함으로써 CMP 장비로 공급되는 슬러리에 공기가 과도하게 포함되지 않도록 하여 안정적인 CMP 공정을 실시토록 하고, 내측에 잔존하는 슬러리가 경화되는 것을 방지하기 위하여 슬러리를 외측으로 용이하게 배출시킬 수 있으며, 상부몸체와 하부몸체의 분리가 용이하여 필터를 손쉽게 교체할 수 있는 슬러리 필터 박스를 제공하는데 있다.The present invention is to solve the above-mentioned conventional problems, an object of the present invention to ensure that the air is not contained in the slurry supplied to the CMP equipment by not leaving the air inside, so that the stable CMP process, The slurry can be easily discharged to the outside in order to prevent the slurry remaining in the inside is hardened, the separation of the upper body and the lower body is easy to provide a slurry filter box that can easily replace the filter.
이와 같은 목적을 실현하기 위한 본 발명은, CMP 장비에 공급되는 슬러리를 필터링하는 슬러리 필터 박스에 있어서, 하측에 슬러리가 공급되는 슬러리공급구가 형성되고, 내측에 필터고정부재가 수직되게 형성되며, 내부에 채워진 슬러리가 필터고정부재 내측으로 유입되어 상측으로 배출되도록 필터고정부재의 내측에 슬러리이동로가 형성되는 하부몸체와; 필터고정부재에 고정되며, 외측으로부터 내측으로 유입되어 슬러리이동로로 이동하는 슬러리를 필터링하는 필터와; 하부몸체의 상측에 착탈가능하게 결합되고, 하부몸체의 내측에 채워진 슬러리가 필터를 거쳐 슬러리이동로를 통해 공급되도록 하측에 필터고정부재의 상단에 끼워져서 하부몸체의 상단에 밀착되는 격판이 형성되며, 삼각뿔 형상으로 형성되어 상단에 슬러리가 배출되는 슬러리배출구가 형성되는 상부몸체를 포함하는 것을 특징으로 한다.In the present invention for realizing the above object, in the slurry filter box for filtering the slurry supplied to the CMP equipment, the slurry supply port for supplying the slurry is formed on the lower side, the filter fixing member is formed vertically on the inside, A lower body having a slurry moving path formed inside the filter fixing member such that the slurry filled therein is introduced into the filter fixing member and discharged upward; A filter fixed to the filter fixing member and filtering the slurry flowing from the outside to the slurry moving path; Removably coupled to the upper side of the lower body, the slurry filled inside the lower body is inserted into the upper end of the filter fixing member in the lower side so that the slurry is supplied through the slurry movement path through the filter is formed in close contact with the upper end of the lower body Is formed in a triangular pyramid shape characterized in that it comprises an upper body is formed with a slurry discharge port discharged slurry on the top.
도 1은 종래의 슬러리 필터 박스를 도시한 단면도이고,1 is a cross-sectional view showing a conventional slurry filter box,
도 2는 본 발명에 따른 슬러리 필터 박스를 도시한 단면도이다.2 is a cross-sectional view showing a slurry filter box according to the present invention.
< 도면의 주요 부분에 대한 부호의 설명 ><Description of Symbols for Main Parts of Drawings>
10 ; 하부몸체 11 ; 슬러리공급구10; Lower body 11; Slurry Feed Hole
12 ; 필터고정부재 13 ; 슬러리이동로12; Filter fixing member 13; Slurry transfer furnace
14 ; 3방향 밸브 15 ; 클램프14; Three-way valve 15; clamp
15a ; 결합턱 15b ; 노브15a; Engaging jaw 15b; Knob
20 ; 필터 30 ; 상부몸체20; Filter 30; Upper body
31 ; 격벽 32 ; 슬러리배출구31; Bulkhead 32; Slurry outlet
33 ; 결합돌기33; Engaging protrusion
이하, 본 발명의 가장 바람직한 실시예를 첨부한 도면을 참조하여 본 발명의 기술분야에서 통상의 지식을 가진 자가 용이하게 실시할 수 있도록 더욱 상세히 설명하기로 한다.DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.
도 2는 본 발명에 따른 슬러리 필터 박스를 도시한 단면도이다. 도시된 바와 같이, 본 발명에 따른 슬러리 필터 박스는 CMP 장비에 공급되는 슬러리를 필터링하는 것으로서, 하측으로부터 슬러리가 공급되는 하부몸체(10)와, 하부몸체(10) 내측에 설치되는 필터(20)와, 하부몸체(10)의 상측에 착탈 가능하게 결합되어 필터(20)를 통과한 슬러리를 상측으로 배출시키는 삼각뿔 형상의 상부몸체(30)를 포함한다.2 is a cross-sectional view showing a slurry filter box according to the present invention. As shown, the slurry filter box according to the present invention is to filter the slurry supplied to the CMP equipment, the lower body 10 is supplied with the slurry from the lower side, and the filter 20 is installed inside the lower body 10 And, the upper body 30 of the triangular pyramid shape is detachably coupled to the upper side of the lower body 10 to discharge the slurry passed through the filter 20 to the upper side.
하부몸체(10)는 하측에 외부의 슬러리공급부(미도시)로부터 슬러리공급라인(4)을 통해 슬러리가 공급되는 슬러리공급구(11)가 형성되고, 내측에 필터고정부재(12)가 수직되게 형성되며, 내부에 채워진 슬러리가 필터고정부재(12) 내측으로 유입되어 상측으로 배출되도록 필터고정부재(12)의 내측에 슬러리이동로(13)가 형성된다.The lower body 10 has a slurry supply port 11 through which a slurry is supplied through a slurry supply line 4 from an external slurry supply unit (not shown) at a lower side thereof, and a filter fixing member 12 is vertically formed at an inner side thereof. The slurry movement path 13 is formed inside the filter fixing member 12 so that the slurry filled therein is introduced into the filter fixing member 12 and discharged upward.
하부몸체(10)는 슬러리공급라인(4)으로부터 슬러리공급구(11)로의 슬러리 공급을 차단함과 아울러 슬러리공급구(11)를 통해 내측에 채워진 슬러리를 슬러리배출라인(5)을 통해 외부로 배출시키는 3방향밸브(14)가 슬러리 공급구(11)에 설치된다.The lower body 10 blocks the supply of slurry from the slurry supply line 4 to the slurry supply port 11, and the slurry filled inwardly through the slurry supply port 11 to the outside through the slurry discharge line 5. A three-way valve 14 for discharging is installed in the slurry supply port 11.
필터(20)는 원통형상을 가지며, 필터고정부재(12)에 끼워져 하부몸체(10) 내측에 설치되어, 필터(20)의 외측에 존재하는 슬러리가 필터(20) 내측으로 유입되면서 필터링되어 슬러리이동로(13)를 통해 상부몸체(30)로 이동한다.The filter 20 has a cylindrical shape, is fitted to the filter fixing member 12, is installed inside the lower body 10, the slurry existing on the outside of the filter 20 is filtered while flowing into the filter 20 inside the slurry It moves to the upper body 30 through the moving path (13).
상부몸체(30)는 하부몸체(10)의 상측에 착탈가능하게 결합되고, 하부몸체(10)의 상단을 차단함으로써 하부몸체(10)의 내측에 채워진 슬러리가 필터(20)를 거쳐 슬러리이동로(13)를 통해 공급되도록 하측에 필터고정부재(12)의상단에 끼워져서 하부몸체(10)의 상단에 밀착되는 격벽(31)이 형성되며, 삼각뿔 형상으로 형성되어 상단에 슬러리가 배출되는 슬러리배출구(32)가 형성된다.The upper body 30 is detachably coupled to the upper side of the lower body 10, by blocking the upper end of the lower body 10, the slurry filled inside the lower body 10 through the filter 20 slurry movement path A partition wall 31 is inserted into the upper end of the filter fixing member 12 to be supplied through the 13 to be in close contact with the upper end of the lower body 10, and is formed in a triangular pyramid shape so that the slurry is discharged at the upper end thereof. An outlet 32 is formed.
한편, 상부몸체(30)는 외측면의 양측에 한 쌍의 결합돌기(33)가 각각 형성되며, 하부몸체(10)는 외측면의 양측에 상부몸체(10)와 결합시 결합돌기(33)에 걸림으로써 상부몸체(10)와의 분리를 억제하는 한 쌍의 클램프(15)가 힌지 결합된다.On the other hand, the upper body 30 has a pair of coupling protrusions 33 are formed on both sides of the outer surface, respectively, the lower body 10 is coupled to the coupling protrusion 33 when combined with the upper body 10 on both sides of the outer surface A pair of clamps 15 hinged to suppress the separation from the upper body 10 by engaging in.
클램프(15)는 하부몸체(10)의 외측면에 힌지결합된 부위를 중심으로 양측으로 결합돌기(33)에 걸리는 결합턱(15a)과 가압시 회전을 일으켜 결합턱(15a)이 결합돌기(33)로부터 이탈되도록 하는 노브(15b)가 각각 형성된다.The clamp 15 causes the coupling jaw 15a to be engaged with the engaging projection 33 on both sides of the hinge-bound portion on the outer surface of the lower body 10 and rotates when the engaging projection 15a is coupled to the projection ( Knobs 15b are formed respectively to disengage from 33.
이와 같은 구조로 이루어진 슬러리 필터 박스의 동작은 다음과 같이 이루어진다.The operation of the slurry filter box having such a structure is performed as follows.
슬러리공급구(11)를 통해 하부몸체(10) 내측으로 유입된 슬러리는 상부몸체(30)의 격벽(31)에 의해 필터(20) 외측으로부터 내측으로 통과함으로써 필터링되어 슬러리이동로(13)를 통해 상부몸체(30)의 내측으로 공급된다.The slurry introduced into the lower body 10 through the slurry supply port 11 is filtered by the partition 31 of the upper body 30 from the outside of the filter 20 to the inside to pass through the slurry movement path 13. It is supplied to the inside of the upper body 30 through.
상부몸체(30) 내측으로 공급된 슬러리는 상단에 형성된 슬러리배출구(32)를 통해 배출되어 CMP 장비로 공급된다.The slurry supplied into the upper body 30 is discharged through the slurry outlet 32 formed at the upper end and is supplied to the CMP equipment.
상부몸체(30)는 삼각뿔 형상으로 형성됨과 아울러 그 상단에 슬러리배출구(32)를 형성함으로써 슬러리공급구(11) 또는 슬러리배출구(32)를 통해 유입되거나 슬러리에 포함되어 유입되는 공기가 상부몸체(30)내에 남아 있지 않도록 함으로써 CMP 장비로 공급되는 슬러리에 공기가 과도하게 포함되지 않도록 하여 안정적인 CMP 공정을 실시토록 한다.The upper body 30 is formed in a triangular pyramid shape and by forming a slurry discharge port 32 at the upper end thereof, the air introduced through the slurry supply port 11 or the slurry discharge port 32 or included in the slurry is introduced into the upper body ( 30) do not remain in the slurry supplied to the CMP equipment so as not to contain excessive air to ensure a stable CMP process.
하부몸체(10) 등에 잔존하는 슬러리가 경화되는 것을 방지하여 외측으로 배출시 3방향 밸브(14)를 조작하여 슬러리공급라인(4)으로부터 슬러리공급구(11)로의 슬러리 공급을 중단시킴과 아울러 내측의 슬러리를 슬러리공급구(11)를 통해 슬러리배출라인(5)을 따라 배출시킴으로써 내측에 잔존하는 슬러리의 제거작업이 용이하다.The slurry remaining in the lower body 10 is prevented from being hardened, and when discharging outward, the three-way valve 14 is operated to stop the supply of the slurry from the slurry supply line 4 to the slurry supply port 11 and to the inside. By discharging the slurry along the slurry discharge line 5 through the slurry supply port 11, it is easy to remove the slurry remaining inside.
하부몸체(10)로부터 상부몸체(30)를 분리시 클램프(15)의 노브(15b)를 가압하여 클램프(15)가 회전하여 결합턱(15a)이 결합돌기(33)로부터 이탈되어 손쉽게 하부몸체(10)와 상부몸체(30)를 서로 분리시킴으로써 필터(20)의 교체작업이 간편하다.When the upper body 30 is separated from the lower body 10, the clamp 15 is rotated by pressing the knob 15b of the clamp 15 so that the engaging jaw 15a is separated from the engaging protrusion 33, thereby easily lowering the lower body. By separating the 10 and the upper body 30 from each other it is easy to replace the filter 20.
상술한 바와 같이, 본 발명에 따른 슬러리 필터 박스는 내측에 공기가 남아 있지 않도록 함으로써 CMP 장비로 공급되는 슬러리에 공기가 과도하게 포함되지 않도록 하여 안정적인 CMP 공정을 실시토록 하고, 내측에 잔존하는 슬러리가 경화되는 것을 방지하기 위하여 슬러리를 외측으로 용이하게 배출시킬 수 있으며, 상부몸체와 하부몸체의 분리가 용이하여 필터를 손쉽게 교체할 수 있는 효과를 가지고 있다.As described above, in the slurry filter box according to the present invention, air is not contained in the slurry supplied to the CMP equipment by preventing air from remaining inside, so that a stable CMP process may be performed, and the slurry remaining inside The slurry can be easily discharged to the outside in order to prevent the hardening, and the separation of the upper body and the lower body is easy, so that the filter can be easily replaced.
이상에서 설명한 것은 본 발명에 따른 슬러리 필터 박스를 실시하기 위한 하나의 실시예에 불과한 것으로서, 본 발명은 상기한 실시예에 한정되지 않고, 이하의 특허청구범위에서 청구하는 바와 같이 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능한 범위까지 본 발명의 기술적 정신이 있다고 할 것이다.What has been described above is just one embodiment for carrying out the slurry filter box according to the present invention, and the present invention is not limited to the above-described embodiment, and as claimed in the following claims, the gist of the present invention Without departing from the scope of the present invention, any person having ordinary skill in the art will have the technical spirit of the present invention to the extent that various modifications can be made.
Claims (3)
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100888450B1 (en) * | 2007-06-20 | 2009-03-11 | 신광식 | A Filter |
KR101232253B1 (en) * | 2011-11-25 | 2013-02-12 | 신형철 | Point of use filter clamping device |
KR101498139B1 (en) * | 2013-01-16 | 2015-03-09 | 가톨릭대학교 산학협력단 | Low molecular reactor for Sludge Thermal Hydrolysis Equipment |
KR20200049030A (en) * | 2018-10-31 | 2020-05-08 | 곽동찬 | Mesh type replaceable filtering device |
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2003
- 2003-02-04 KR KR10-2003-0006752A patent/KR100532762B1/en not_active IP Right Cessation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100888450B1 (en) * | 2007-06-20 | 2009-03-11 | 신광식 | A Filter |
KR101232253B1 (en) * | 2011-11-25 | 2013-02-12 | 신형철 | Point of use filter clamping device |
KR101498139B1 (en) * | 2013-01-16 | 2015-03-09 | 가톨릭대학교 산학협력단 | Low molecular reactor for Sludge Thermal Hydrolysis Equipment |
KR20200049030A (en) * | 2018-10-31 | 2020-05-08 | 곽동찬 | Mesh type replaceable filtering device |
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