KR20040026927A - Apparatus and method for a fast capturing a scan image - Google Patents

Abstract

PURPOSE: An apparatus and a method for capturing a photographing image at a high speed are provided to improve productivity by shortening a test process for an object using an optical profile measurement system. CONSTITUTION: An apparatus for capturing a photographing image includes a CCD camera(10), a synchronization signal generating section(56), an illumination controller(30), and an image capturing section(55). The CCD camera(10) photographs a subject positioned in a photographing area. The synchronization signal generating section(56) generates an illumination control signal when the CCD camera(10) outputs a frame enable signal. The illumination controller(30) controls an operation of illumination lamps according to the illumination control signal generated from the synchronization signal generating section(56). The image capturing section(55) captures an image outputted from the CCD camera(10).

Description

High speed capture device and method for captured image {APPARATUS AND METHOD FOR A FAST CAPTURING A SCAN IMAGE}

The present invention relates to an optical shape measurement system, and more particularly, to an apparatus and method for capturing images captured from a CCD camera at high speed.

With the development of electronic engineering and mechanical engineering, miniaturization and precision of electronic and mechanical parts are accelerating.In order to check the processing and manufacturing status of these small electronic and mechanical parts, high accuracy of dimensions, shapes and surface roughness ( High precision should be measured.

For example, the dimensions, shape, laser marking state, and surface roughness of a semiconductor wafer as an electronic component and a micropattern of an integrated circuit processed on the semiconductor wafer cannot be measured using a well-known contact measuring device. In the case of using a contact surface roughness measuring device using a touch surface roughness measuring device, the tip of the stylus not only causes minute scratches on the surface of the object but also has a problem in that it is difficult to obtain information on the area.

In order to measure the size and shape of small electronics, mechanical parts, etc., an optical two-dimensional measuring device which obtains dimensions of a workpiece in a non-contact manner by using light emitted from a light source, and a reference pattern for light emitted from a light source. The optical three-dimensional measuring apparatus has been developed to measure the shape of the workpiece by comparing the light that is projected on the workpiece and the light deformed according to the shape of the workpiece with the reference pattern. Furthermore, such an optical two-dimensional measuring device and three-dimensional measuring device is being developed and spread as a product integrated into one measuring device to be selectively or alternately used.

However, the optical shape measuring apparatuses currently in use have limitations in speeding up the capture of a captured image obtained through a CCD camera, thereby limiting the test time on the line. This will be described in more detail with reference to FIGS. 1 and 2.

1 is a block diagram illustrating a general captured image capturing process in an optical shape measuring system.

The optical shape measuring system is different from the CCD camera 10 for capturing and outputting an image of a subject when inputting a trigger signal from an image capturing unit 25, which will be described later, and a measurement surface roughness for each part of a subject to be tested. It includes a number of lamps 40 mounted in position. For example, in the optical shape measuring system for inspecting a manufactured semiconductor package, a dome-shaped illumination mount is positioned on an imaging area where a subject is placed. The subject is photographed with a structure in which the CCD camera 10 is positioned at the center of the dome-shaped illumination mount, that is, vertically above the subject. In general, in the case of semiconductor packages, laser marking tests, lead tests, and pin 1 tests can be sequentially performed in the programmed order. The lighting should be controlled on / off according to the inspection purpose. The control of the lamp 40 is performed by the lighting controller 30, the lighting controller 30 in accordance with the trigger signal generated from the image capture unit 25 mounted on the computer system 20, the lamp 40 To control. For reference, the CCD camera 10 will be described in detail. The CCD camera 10 is a digital CCD camera (model name CV-M4 +) manufactured by JAI, Japan, and captures and outputs a digital image of 24 frames per second.

Meanwhile, the image capturing unit 25 mounted on the computer system 20 captures an image output from the CCD camera 10 and transmits the captured image to the image signal processing unit 27. 25 generates and outputs a trigger signal for synchronizing the lighting controller 30 with the CCD camera 10 and captures an image output from the CCD camera 10. The lighting of the lamp is made by the trigger signal as described above, and the reason why the image should be taken at that time is that the captured image is captured while the lamp 40 is turned on to obtain the measurement plane image suitable for the inspection purpose.

For reference, the image signal processor 27 receives the captured image and processes the captured image into an image signal of a form that can be displayed on the display unit 29. The controller 23 controls the measurer through the data input unit 21. When an image measurement start command is inputted from the controller, the image measurement start command is transmitted to the image capture unit 25.

In the optical shape measuring system having the above-described configuration, the CCD camera 10 captures and outputs an image in response to a trigger signal input from the image capturing unit 25, and the image capturing unit 25 at the rear end generates the CCD after triggering. Since the trigger signal is generated again after capturing and transmitting the image output from the camera 10, the CCD camera 10 can capture only 16 to 17 frames of the image even though it can output the maximum of 24 frames per second. Unavoidable disadvantages arise.

Accordingly, in the conventional optical shape measuring system, since there is a limitation in speeding up the capture of the captured image, there is a problem in that the test time of the subject to be measured cannot be shortened as a result.

Accordingly, an object of the present invention is to provide a captured image high-speed capture device and method for speeding up the capture speed of the captured image in the optical shape measurement system.

Furthermore, the present invention provides a captured image high-speed capture device and method for capturing a captured image at the maximum frame rate that the image pickup apparatus can support.

In addition, the present invention provides a captured image high-speed capture device and method that can reduce the process speed for testing an object using an optical shape measurement system.

1 is a block diagram illustrating a general captured image capture process in an optical shape measurement system.

2 is a block diagram of a captured image high-speed capture device according to an embodiment of the present invention.

3 is a flowchart illustrating an operation of the synchronization signal generator 56 of FIG. 2.

4 is an exemplary signal generation timing of a captured image high speed capture device according to an embodiment of the present invention.

In order to achieve the above object, a captured image high-speed capture device according to an embodiment of the present invention,

A CCD camera for capturing and outputting a subject placed in the imaging area;

A synchronization signal generator for generating an illumination control signal each time a frame enable signal output from the CCD camera is detected;

A lighting controller configured to control lighting of lighting lamps positioned at different positions around the imaging area according to the lighting control signal;

And an image capture unit for capturing an image output from the CCD camera and transmitting the image output to the image signal processor each time the frame enable signal is detected.

Furthermore, the synchronization signal generator of the captured image high-speed capture device;

And a memory to which lighting control data for controlling lighting of lighting at different positions is mapped in accordance with the detection order of the frame enable signal.

In addition, the high-speed image capture method of the optical shape measurement system for capturing the image captured by the CCD camera and displayed on the display unit,

Detecting a frame enable signal output from the CCD camera;

Generating an illumination control signal for lighting the illumination lamps positioned at different positions around the imaging area each time the frame enable signal is detected;

Capturing an image output from the CCD camera in synchronization with the point of time of generating the illumination control signal;

And processing the captured image by signal processing and displaying the captured image on the display unit.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, a detailed description thereof will be omitted.

First, FIG. 2 is a block diagram of a high speed image capture device according to an exemplary embodiment of the present invention. FIG. 3 is a flowchart illustrating an operation of the synchronization signal generator 56 of FIG. 2, and FIG. 4 is an embodiment of the present invention. Signal generation timing diagrams of the captured image high speed capture device according to the example are illustrated respectively.

Referring to Fig. 2, first, the digital CCD camera 10 captures and outputs a subject placed in an image capturing area under a model name CV-M4 + manufactured by JAI as an example. The digital CCD camera 10 may output a scan image at a rate of 24 frames per second. The digital CCD camera 10 generates and outputs a frame enable signal FEN that is enabled every time the subject is photographed in the imaging area. The digital CCD camera 10 communicates with the image capture unit 55 through the LVDS protocol.

On the other hand, the computer system 50 includes a data input unit 51 such as a keyboard and a mouse. Through the data input unit 51, the measurer may issue a shape measurement start command such as an initial semiconductor package. This command is input to the control unit 53.

The controller 53, which controls the overall operation of the computer system 50, transmits a shape measurement start command through the data input unit 51 to the image capture unit 55 and the synchronization signal generator 56. .

The image capturing unit 55 captures an output image of the CCD camera 10 in response to detecting a frame enable signal (FEN) signal output from the CCD camera 10, and outputs it to the image signal processing unit 57. The frame enable (FEN) signal is bypassed to the synchronization signal generator 56. The image capture unit 55 is also enabled by the shape measurement start command input from the control unit 53. The image signal processor 57 receives the image captured by the image capturing unit 55 and processes the image signal into an image signal of a form that can be displayed on a display unit 59 such as a monitor.

The synchronization signal generator 56 generates an illumination control signal every time the frame enable signal FEN is output from the CCD camera 10 after inputting a measurement start command and transmits the illumination control signal to the illumination controller 30.

The lighting controller 30 controls lighting of lighting lamps placed at different positions of the lighting mount around the imaging area according to the lighting control signal.

In FIG. 2, the synchronization signal generator 56 and the image capture unit 55 are dualized in different configurations, but a single logic (eg, a single block) may be used to perform a function of the synchronization signal generator 56 in the image capture unit 55. 60).

On the other hand, the image capture device according to an embodiment of the present invention must sequentially control the lighting to take a sequential inspection target such as the inspection target, for example, laser marking of the semiconductor package, lead inspection, pin 1 inspection do. Therefore, lighting control data for lighting control of lighting at different positions according to the detection order of the frame enable signal should be mapped and stored in the memory. Such a memory is provided in the synchronization signal generator 56.

That is, the synchronization signal generator 56 generates an illumination control signal having different illumination control data each time the frame enable signal is detected after being enabled by the shape measurement start command input from the controller 53, thereby generating an illumination controller ( 30 is to be controlled to turn on the lighting of the different positions. In this case, the illumination control signal includes position information of illumination to be turned on, and the position information of the illumination should be varied according to the frame enable signal detection sequence.

As a variation of this embodiment, the synchronization signal generator 56 may generate an illumination control signal every time the frame enable signal is detected, and the illumination controller 30 may control the different illumination lamps to be turned on every time the illumination control signal is input.

In the two embodiments described above, it is important to turn on lighting lamps at different positions every time the frame enable signal is detected.

Hereinafter, the operation of the captured image high speed capture device having the above-described configuration will be described in more detail with reference to FIGS. 3 and 4.

First, a measurer who wants to measure the shape of an object such as a semiconductor package places a plurality of semiconductor package objects on a moving means such as a conveyor, and then issues a shape measurement start command through the data input unit 51. Of course, the measurer must have the CCD camera 10 set to the photographing mode at all times in advance. For reference, the photographing mode is a mode in which the CCD camera 10 captures and outputs an object placed in an image capturing area at the maximum frame rate. The CCD camera 10 according to the embodiment of the present invention may output the captured image at a rate of 24 frames per second. The frame enable signal activated when the captured image is output is also output.

According to the shape measurement start command described above, when one specimen is positioned in the imaging area, the controller 53 transmits the shape measurement start command 1 to the image capture unit 55 and the synchronization signal generator 56. When the shape measurement start command is received (step 70), the synchronization signal generator 56 is enabled to check whether the first (1st) frame enable signal FEN is detected by the image capture unit 55 (step 72). )do.

If the first frame enable signal is detected, the synchronization signal generator 56 generates and outputs the first lighting control signal stored in the memory (step 74). The generated light control signal is input to the light controller 30 will be used to turn on the lamp of the predetermined position. The image capturing unit 55 starts capturing the captured image at the frame rate of the CCD camera 10 in synchronization with the frame enable signal FEN detected after the shape measurement start command is input.

That is, the first image capture is performed in response to the detection of the first frame enable signal FEN. Since the captured image is an image before the programmed lamp is turned on, this becomes an unnecessary capture image. However, the image captured by the detection of the second frame enable signal FEN, which will be described later, becomes a normal image photographed while the lamp is turned on by the first illumination control signal. The reason for this is that the CCD camera is turned on by the second frame enable signal generated when the illumination lamp is turned on by the illumination control signal generated by the detection of the first frame enable signal FEN, and the image of the object is taken at such lighting point. This is because the output image of (10) is captured.

Accordingly, according to the present invention, the CCD camera 10 captures and continuously outputs an object at 24 frames per second. The synchronization signal generator 56 receives the frame enable signal FEN generated at the time of imaging the object. When the detection is performed to control the lighting sequentially at the frame rate, and the image is captured at the output frame rate of the CCD camera 10, the second captured image is received at the frame rate of the CCD camera after receiving the shape measurement start command. The capture image will be obtained.

Therefore, after detecting the first frame enable signal, the synchronization signal detector 56 repeatedly generates an illumination control signal every time the frame enable signal is detected, as in steps 76 to 80. The generation end point of the illumination control signal will be determined according to the number of inspection targets to be tested. That is, if there are five items to be inspected for one semiconductor package, the synchronization signal generator 56 may proceed to step 82 after the six times of the previously programmed illumination control signal generation are completed.

In operation 82, one semiconductor package measurement completion state is reported to the controller 53, so that a new specimen is moved to the image capturing area by the movement control. If no separate end command is received (step 84), the synchronization signal generator 56 proceeds to step 70 again and repeats steps 72 to 82 described above depending on whether the shape measurement start command is received.

For reference, in FIG. 4, FEN denotes a frame enable signal output from the CCD camera 10, and ② and ③ denote illumination control signals and an image capture point, respectively. As shown in FIG. 4, the generation of the lighting control signal ② and the image capturing are performed in synchronization with the detection of the frame enable signal FEN, and the lighting is turned on by the previous lighting control signal ②. It can be seen that the image is captured at the time of detecting the frame enable signal generated immediately after it.

Therefore, the present invention not only turns on the illumination lamp in synchronization with the frame rate of the CCD camera 10 but also captures the captured image in synchronization with the frame rate of the CCD camera 10, thereby generating a synchronization signal to capture the illumination lamp and the image. It can capture images faster than the system that synchronizes them.

As described above, the present invention captures an image by controlling lighting of a lighting lamp in synchronization with the detection of a frame enable signal output from the CCD camera, so that the capture rate of the captured image can be increased at the frame rate of the CCD camera. There is an advantage.

Furthermore, since the present invention can speed up the capture speed of the captured image, there is an advantage that the production test rate can be improved by reducing the test speed of the test object.

On the other hand, the present invention has been described with reference to the embodiments shown in the drawings, which are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be defined only by the appended claims.

Claims (7)

In the captured image high speed capture device, A CCD camera for capturing and outputting a subject placed in the imaging area; A synchronization signal generator for generating an illumination control signal each time a frame enable signal output from the CCD camera is detected; A lighting controller configured to control lighting of lighting lamps positioned at different positions around the imaging area according to the lighting control signal; And an image capture unit for capturing an image output from the CCD camera and transmitting the image output to the image signal processing unit each time the frame enable signal is detected. The method of claim 1, wherein the synchronization signal generator; And a memory in which illumination control data for lighting lighting of different positions are mapped in accordance with the detection order of the frame enable signal is provided therein. The apparatus of claim 1 or 2, wherein the synchronization signal generator and the image capture unit; A captured image high speed capture device, characterized in that enabled by a shape measurement start command input. In the captured image high-speed capture device of the optical shape measurement system, A CCD camera for capturing and outputting a subject placed in the imaging area; An image capturing unit generating an illumination control signal each time a frame enable signal is detected from the CCD camera and capturing an image output from the CCD camera in synchronization with the illumination control signal generation point; A lighting controller configured to control lighting of lighting lamps positioned at different positions around the imaging area according to the lighting control signal; And an image signal processing unit for processing a signal captured by the image capturing unit and outputting the signal to a display unit. The apparatus of claim 4, wherein the image capture unit; And a memory in which illumination control data for controlling lighting of illumination lamps of different positions are mapped therein according to the detection order of the frame enable signal. An optical shape measuring system for capturing an image captured by a CCD camera and displaying it on a display unit, Detecting a frame enable signal output from the CCD camera; Generating an illumination control signal for lighting the illumination lamps positioned at different positions around the imaging area each time the frame enable signal is detected; Capturing an image output from the CCD camera in synchronization with the point of time of generating the illumination control signal; And processing the captured image by signal processing and displaying the captured image on the display unit. The method according to claim 6, wherein the illumination control signal includes position information of illumination to be turned on, and the position information of the illumination is changed according to the frame enable signal detection sequence.