KR20040003615A - Surface acoustic wave filter - Google Patents

Surface acoustic wave filter Download PDF

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Publication number
KR20040003615A
KR20040003615A KR1020020038366A KR20020038366A KR20040003615A KR 20040003615 A KR20040003615 A KR 20040003615A KR 1020020038366 A KR1020020038366 A KR 1020020038366A KR 20020038366 A KR20020038366 A KR 20020038366A KR 20040003615 A KR20040003615 A KR 20040003615A
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South Korea
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idts
signal
input
output
surface acoustic
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KR1020020038366A
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Korean (ko)
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김주일
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엘지이노텍 주식회사
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Priority to KR1020020038366A priority Critical patent/KR20040003615A/en
Publication of KR20040003615A publication Critical patent/KR20040003615A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
    • B23Q7/1494Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices using grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06Work-clamping means
    • B23Q3/08Work-clamping means other than mechanically-actuated
    • B23Q3/082Work-clamping means other than mechanically-actuated hydraulically actuated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
    • B23Q7/1431Work holder changers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE: A surface acoustic filter is provided to reduce the size of a device by minimizing volume an area required for a signal electrode and a ground electrode. CONSTITUTION: A package(30) is provided with a plurality of connecting terminals(30a-30f). A piezoelectric substrate(40) is provided within the package(30). A plurality of input IDTs(InterDigital Transducers)(50,60) and output IDTs(70,80) are formed on the piezoelectric substrate(40) in a pattern and filter a signal inputted from an outside to output the filtered signal. A ground unit(90) is provided between the input IDTs(50,60) and the output IDTs(70,80) to eliminate noise of the filtered signal. The input IDTs(50,60), the output IDTs(70,80), and the ground unit(90) are connected to the connecting terminals(30a-30f) through a wire bonding in order to input/output a signal.

Description

밸런스형 표면탄성파 필터{Surface acoustic wave filter}Balanced surface acoustic wave filter

본 발명은 밸런스형 표면탄성파 필터에 관한 것으로서, 특히 점차 소형화되어가는 추세에 부합할 수 있도록 소형화가 용이한 밸런스형 표면탄성파 필터에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a balanced surface acoustic wave filter, and more particularly, to a balanced surface acoustic wave filter that can be easily miniaturized so as to meet the trend of miniaturization.

일반적으로 표면탄성파는 기판의 표면을 따라 전달되는 파동의 상태를 나타내는 것으로 깊이 방향으로 급격히 감쇄되는 특징을 지닌다. SAW 필터는 이러한 특징을 주파수 선택기능 소자로 응용한 것이다.In general, surface acoustic waves represent a state of waves transmitted along the surface of the substrate and have a feature of rapidly attenuating in the depth direction. The SAW filter uses this feature as a frequency selective device.

즉, 표면탄성파 소자는 절연성이 큰 기판의 금속 전극을 형성해 압전을 걸면 일시적으로 기판 표면이 뒤틀리는데, 이 작용을 이용해 물리적인 파를 일으키게 된다. 표면탄성파 소자 표면을 따라 전달되는 표면탄성파는 전자파보다 느리기 때문에 일시적으로 전기 신호를 지연시키거나 특정주파수 신호만을 통과시키는 필터로 이용된다.That is, the surface acoustic wave element forms a metal electrode of a substrate having a large insulating property, and when the piezoelectric is applied, the surface of the substrate is temporarily warped. This action causes a physical wave. Surface acoustic wave Surface acoustic wave transmitted along the surface of the device is slower than electromagnetic waves, so it is used as a filter to temporarily delay an electric signal or pass only a specific frequency signal.

한편, 밸런스형 입출력 특성을 요구하는 MMIC(Monolithic Microwave Integrated Circuit) 및 믹서(Mixer)등에 상기 표면탄성파 필터를 연결할 경우에는 밸런스형 입출력 특성을 가지도록 다수개의 입력 인터디지털 트랜스듀서(InterDigital Transducer, 이하 IDT라 함)와 출력 IDT로 이루어지는 밸런스형 표면탄성파 필터를 사용하게 된다.On the other hand, when the surface acoustic wave filter is connected to a MMIC (Monolithic Microwave Integrated Circuit) and a mixer (Mixer) requiring balanced input and output characteristics, a plurality of input interdigital transducers (IDTs) to have balanced input and output characteristics. And a balanced surface acoustic wave filter composed of an output IDT).

도 1 은 종래의 기술에 따른 밸런스형 표면탄성파 필터의 구조가 도시된 도면으로써, 내부에 실장되는 전자부품이 외부와 전기적으로 연결될 수 있도록 다수개의 연결단자(10a~10f)가 형성되는 패키지(10)와, 상기 패캐지(10) 내부에 위치되는 압전체 기판(21)과, 상기 압전체 기판(21)에 패턴으로 형성되어 외부의 신호를 필터링하여 출력하는 다수개의 입력 IDT(22, 23) 및 출력 IDT(24, 25)와, 상기 입력 IDT(22, 23)와 출력 IDT(24, 25)사이에 위치되어 필터링되는 신호의 잡음이 제거되도록 하는 그라운드부(26)를 포함하여 구성되고, 상기 다수개의 입력 IDT(22,23), 출력 IDT(24, 25) 및 그라운드부(26)는 와이어본딩을 통해 상기 연결단자(10a~10f)와 연결된다.1 is a view illustrating a structure of a balanced surface acoustic wave filter according to a related art, and includes a package 10 in which a plurality of connection terminals 10a to 10f are formed so that an electronic component mounted therein may be electrically connected to the outside. ), A piezoelectric substrate 21 positioned inside the package 10, and a plurality of input IDTs 22 and 23 and output IDTs formed in a pattern on the piezoelectric substrate 21 to filter and output an external signal. And a ground portion 26 positioned between the input IDTs 22 and 23 and the output IDTs 24 and 25 to remove noise of the filtered signal. The input IDTs 22 and 23, the output IDTs 24 and 25, and the ground portion 26 are connected to the connection terminals 10a to 10f through wire bonding.

여기서, 상기 다수개의 입력 IDT(22, 23)와 출력 IDT(24, 25)는 각각 외부로부터 입력되는 신호가 전달되는 신호전극(22a, 23a, 24a, 25a)과 외부 그라운드와 연결되는 접지전극(22b, 23b, 24b, 25b)과 상기 신호전극(22a, 23a, 24a, 25a)과 접지전극(22b, 23b, 24b, 25b)으로부터 서로를 향해 연장되는 다수개의 핑거(22c, 23c, 24c, 25c)로 이루어지며, 상기 신호전극(22a, 23a, 24a, 25a)과 접지전극(22b,23b, 24b, 25b)와 상기 연결단자(10a~10f)가 와이어본딩을 통해 연결되는 것이다.Here, the plurality of input IDTs 22 and 23 and the output IDTs 24 and 25 are signal electrodes 22a, 23a, 24a and 25a through which signals input from the outside are transmitted, and ground electrodes connected to an external ground ( A plurality of fingers 22c, 23c, 24c, 25c extending toward each other from 22b, 23b, 24b, 25b and the signal electrodes 22a, 23a, 24a, 25a and ground electrodes 22b, 23b, 24b, 25b. The signal electrodes 22a, 23a, 24a, and 25a, the ground electrodes 22b, 23b, 24b, and 25b and the connection terminals 10a to 10f are connected through wire bonding.

그러나, 상기와 같은 종래의 기술에 따른 밸런스형 표면탄성파 필터는 신호전극 및 접지전극이 상기 연결단자와 와이어본딩을 통해 연결되는 부분과 그 이외의 부분이 동일한 두께로 이루어져 있게 때문에 상기 신호전극과 접지전극이 인접하게 위치되는 다수개의 입력 IDT 또는 출력 IDT에서 상기 신호전극과 접지전극에 요구되는 면적이 증가되어 소형화가 어렵다는 문제점이 있다.However, the balanced surface acoustic wave filter according to the related art has a signal thickness and a ground where the signal electrode and the ground electrode are connected to the connection terminal through wire bonding, and the other portions have the same thickness. In a plurality of input IDTs or output IDTs in which electrodes are adjacent to each other, the area required for the signal electrode and the ground electrode is increased, so that miniaturization is difficult.

본 발명은 상기한 종래 기술의 문제점을 해결하기 위하여 안출된 것으로서, 그 목적은 다수개의 입력 IDT 또는 출력 IDT의 인접한 신호전극 또는 접지전극과 패키지에 형성된 연결단자를 와이어본딩을 통해 연결할 경우 상기 신호전극 또는 접지전극에서 상기 와이어가 연결되는 부분을 제외하고 상기 신호전극 또는 접지전극의 두께를 감소시키고 상기 인접한 신호전극 또는 접지전극이 교차되도록 상기 다수개의 입력 IDT 또는 출력 IDT를 위치시킴으로써 소형화가 용이한 밸런스형 표면탄성파 필터를 제공하는데 있다.The present invention has been made to solve the above-mentioned problems of the prior art, the object of which is to connect the adjacent signal electrodes or ground electrodes of a plurality of input IDT or output IDT and the connecting terminal formed in the package through wire bonding the signal electrode Or a balance that can be easily miniaturized by reducing the thickness of the signal electrode or the ground electrode except for the portion where the wire is connected to the ground electrode and placing the plurality of input IDTs or output IDTs so that the adjacent signal or ground electrodes cross each other. It is to provide a type surface acoustic wave filter.

도 1 은 종래의 기술에 따른 밸런스형 표면탄성파 필터의 구조가 도시된 도면,1 is a view showing the structure of a balanced surface acoustic wave filter according to the prior art,

도 2 는 본 발명에 따른 밸런스형 표면탄성파 필터의 구조가 도시된 도면,2 is a view showing a structure of a balanced surface acoustic wave filter according to the present invention;

도 3 는 도 2 의 A 가 확대 도시된 도면이다.3 is an enlarged view of A of FIG. 2.

<도면의 주요 부분에 관한 부호의 설명><Explanation of symbols on main parts of the drawings>

30 : 패키지30a~30f : 연결단자30: Package 30a ~ 30f: Connection terminal

40 : 압전체 기판50, 60 : 입력 IDT40: piezoelectric substrate 50, 60: input IDT

70, 80 : 출력 IDT90 : 그라운드부70, 80: output IDT90: ground part

상기한 과제를 해결하기 위한 본 발명에 따른 밸런스형 표면탄성파 필터의 특징에 따르면, 다수개의 연결단자가 형성된 패키지내에 위치되는 압전체 기판과; 상기 압전체 기판의 일측에 서로 마주보도록 평행하게 배치되는 신호 및 접지전극과 상기 신호 및 접지전극 사이에 형성되는 다수개의 핑거(finger)로 이루어지는 다수개의 입력 IDT 및 출력 IDT 를 포함하여 구성되는 밸런스형 표면탄성파 필터에 있어서, 상기 다수개의 입력 IDT 또는 출력 IDT의 인접한 신호전극 또는 접지전극은 서로 교차되는 요부와 홈부가 형성된다.According to a feature of the balanced surface acoustic wave filter according to the present invention for solving the above problems, the piezoelectric substrate is located in a package formed with a plurality of connection terminals; Balanced surface comprising a plurality of input IDT and output IDT consisting of a signal and a ground electrode disposed in parallel to face each other on one side of the piezoelectric substrate and a plurality of fingers formed between the signal and the ground electrode In the acoustic wave filter, recesses and grooves in which adjacent signal electrodes or ground electrodes of the plurality of input IDTs or output IDTs cross each other are formed.

이하, 본 발명의 바람직한 실시예를 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명에 따른 밸런스형 표면탄성파 필터는 도 2 에 도시된 바와 같이, 다수개의 연결단자(30a~30f)가 형성되는 패키지(30)와, 상기 패키지(30)내에 위치되는 압전체 기판(40)과, 상기 압전체 기판(40)에 패턴으로 형성되어 외부로부터 입력되는 신호를 필터링하여 출력하는 다수개의 입력 IDT(50, 60) 및 출력 IDT(70, 80)와, 상기 다수개의 입력 IDT(50, 60) 및 출력 IDT(70, 80)사이에 위치되어 필터링되는 신호의 잡음을 제거하는 그라운드부(90)를 포함하여 구성된다.As shown in FIG. 2, the balanced surface acoustic wave filter according to the present invention includes a package 30 in which a plurality of connection terminals 30a to 30f are formed, a piezoelectric substrate 40 located in the package 30, and And a plurality of input IDTs 50 and 60 and output IDTs 70 and 80 formed in a pattern on the piezoelectric substrate 40 to filter and output signals input from the outside, and the plurality of input IDTs 50 and 60. And a ground portion 90 positioned between the output IDTs 70 and 80 to remove noise of the filtered signal.

여기서, 상기 다수개의 입력 IDT(50, 60), 출력 IDT(70, 80)와 그라운드부(90)는 외부로 신호의 입출력이 가능하도록 상기 연결단자(30a~30f)와 와이어본딩을 통해 연결된다.Here, the plurality of input IDTs 50 and 60, the output IDTs 70 and 80 and the ground unit 90 are connected to the connection terminals 30a to 30f through wire bonding to enable input and output of signals to the outside. .

여기서, 상기 다수개의 입력 IDT(50, 60)와 출력 IDT(70, 80)는 각각 신호가 전달되는 신호전극(51, 61, 71, 81)과 외부의 그라운드와 연결되는 접지전극(52, 62, 72, 82)와 상기 신호전극(51, 61, 71, 81)와 접지전극(52, 62, 72, 82)로부터 서로를 향해 연장되어 외부로부터 입력되는 신호를 필터링하는 다수개의 핑거(53, 63, 73, 83)로 이루어지고, 상기 연결단자(30a~30f)와 상기 신호전극(51, 61, 71, 81) 및 접지전극(52, 62, 72, 82)이 와이어본딩을 통해 연결된다.Here, the plurality of input IDTs 50 and 60 and the output IDTs 70 and 80 are signal electrodes 51, 61, 71 and 81 through which signals are transmitted, and ground electrodes 52 and 62 connected to an external ground, respectively. 72, 82 and a plurality of fingers 53 extending from each other from the signal electrodes 51, 61, 71, 81 and the ground electrodes 52, 62, 72, 82 to filter signals input from the outside; 63, 73, and 83, and the connection terminals 30a to 30f, the signal electrodes 51, 61, 71, and 81, and the ground electrodes 52, 62, 72, and 82 are connected through wire bonding. .

이때, 상기 다수개의 입력 IDT(50, 60)는 그 위치가 인접한 신호전극(51) 및 접지전극(62)은 상기 연결단자(30a~30f)와 연결되는 부분을 제외하고 그 두께가 얇게 형성되고, 상기 인접하는 신호전극(51)과 접지전극(62)이 교차되도록 상기 다수개의 입력 IDT(50, 60)가 배치된다.In this case, the plurality of input IDTs 50 and 60 are formed to have a thin thickness except for a portion where the signal electrode 51 and the ground electrode 62 adjacent to each other are connected to the connection terminals 30a to 30f. The plurality of input IDTs 50 and 60 are disposed to intersect the adjacent signal electrode 51 and the ground electrode 62.

즉, 상기 다수개의 입력 IDT(50, 60)는 도 3 에 도시된 바와 같이, 그 위치가 인접한 신호전극(51)과 접지전극(62)이 각각 상기 연결단자(30a~30f)와 와이어를 통해 연결되는 부분인 요부(51a, 62a)와, 상기 와이어와 연결되지 않는 부분으로 상기 요부(51a, 62a)에 비하여 그 두께가 얇게 형성되는 홈부(51b, 62b)로 이루어지게 된다.That is, as shown in FIG. 3, the plurality of input IDTs 50 and 60 have the signal electrodes 51 and the ground electrodes 62 adjacent to each other through the connection terminals 30a to 30f and wires, respectively. Concave portions 51a and 62a, which are connected portions, and groove portions 51b and 62b, which are thinner than the recess portions 51a and 62a, are portions which are not connected to the wire.

또한, 상기 인접한 신호전극(51)의 홈부(51b)에 상기 접지전극(62)의요부(62a)가 대응되어 위치되도록 상기 인접한 신호전극(51)과 접지전극(62)가 교차시켜 위치시킴으로써 기존에 비하여 인접한 신호전극(51)과 접지전극(62)에 요구되는 면적이 감소되기 때문에 전체 소자의 레이아웃(layout)이 감소할 수 있게 되는 것이다.In addition, the adjacent signal electrode 51 and the ground electrode 62 cross each other so that the recessed portion 62a of the ground electrode 62 corresponds to the groove 51b of the adjacent signal electrode 51. In comparison, since the area required for the adjacent signal electrode 51 and the ground electrode 62 is reduced, the layout of the entire device can be reduced.

이때, 상기 인접한 신호전극(51) 및 접지전극(62)은 각각 상기 핑거(finger)(53, 63)와 상기 홈부(51b, 62b)의 두께는 신호가 전달될 수 있는 최소 두께인 50㎛ 이상으로 형성하고, 상기 핑거(finger)(53, 63)와 요부(51a, 62a)의 두께는 상기 연결단자(30a~30f)와 와이어본딩을 통해 연결할 경우 요구되는 최소 두께인 150㎛ 이상으로 형성하며, 상기 신호전극(51)의 홈부(51b)에 접지전극(62)의 요부(62a)가 대응되어 위치될 경우 상호간섭을 방지하는 최소거리인 10㎛ 이상을 이격시켜 형성하게 되면, 상기 밸런스형 표면탄성파 필터가 정상적으로 필터링 기능을 수행하는 동시에 인접한 신호전극(51)와 접지전극(62)가 교차되어 위치될 수 있는 요부(51a, 62a) 및 홈부(51b, 62b)로 인해 요구되는 면적이 최소화될 수 있는 것이다.In this case, the thicknesses of the fingers 53 and 63 and the grooves 51b and 62b of the adjacent signal electrode 51 and the ground electrode 62 are 50 µm or more, which is the minimum thickness through which signals can be transmitted. The thickness of the fingers (53, 63) and the recesses (51a, 62a) is formed to be 150㎛ or more, the minimum thickness required when connecting to the connection terminal (30a ~ 30f) through wire bonding, When the recessed portion 62a of the ground electrode 62 corresponds to the groove portion 51b of the signal electrode 51, the balance type is spaced apart by a minimum distance of 10 μm or more to prevent mutual interference. The surface acoustic wave filter performs the filtering function at the same time and minimizes the area required by the recesses 51a and 62a and the grooves 51b and 62b where the adjacent signal electrodes 51 and the ground electrodes 62 may be intersected. It can be.

한편, 상기 다수개의 출력 IDT(70, 80)도 상기 입력 IDT(70, 80)와 마찬가지로 인접하게 위치되는 접지전극(72)과 신호전극(81)에 각각 요부와 홈부를 형성함하고 상기 요부에 홈부가 대응되도록 교차하게 위치시킴으로써, 인접한 접지전극(72)과 신호전극(81)이 차지하는 면적을 최소화할 수 있게 된다.Meanwhile, the plurality of output IDTs 70 and 80 also form recesses and grooves in the ground electrode 72 and the signal electrode 81 which are adjacent to each other like the input IDTs 70 and 80, respectively. By intersecting the grooves so as to correspond, the area occupied by the adjacent ground electrode 72 and the signal electrode 81 can be minimized.

결국, 본 발명에 따른 밸런스형 표면탄성파 필터는 다수개의 입력 IDT와 출력 IDT를 형성할 경우 인접한 신호전극 또는 접지전극이 차지하는 면적을 최소화하여 제한된 면적의 효율적인 이용이 가능하게 되는 것이다.As a result, when the balanced surface acoustic wave filter according to the present invention forms a plurality of input IDTs and output IDTs, the balanced surface acoustic wave filter minimizes an area occupied by adjacent signal electrodes or ground electrodes, thereby enabling efficient use of a limited area.

상기와 같이 구성되는 본 발명에 따른 밸런스형 표면탄성파 필터는 밸런스형 입출력특성을 가지며 외부로부터 입력되는 신호를 필터링할 수 있는 다수개의 입력 IDT와 출력 IDT를 포함하여 구성되는 밸런스형 표면탄성파 필터에서 상기 다수개의 입력 IDT 또는 출력IDT에서 인접하게 위치되는 신호전극 또는 접지전극을 와이어본딩에 요구되는 부분과 그 이외의 부분의 두께가 다르게 이루어지는 요부와 홈부를 형성하고 인접하게 위치되는 신호전극 또는 접지전극을 교차하게 위치시켜 상기 요부에 홈부가 대응되도록 함으로써 상기 인접한 신호전극 또는 접지전극에 요구되는 면적을 최소화하여 전체소자의 크기를 소형화할 수 있는 효과가 있다.In the balanced surface acoustic wave filter according to the present invention configured as described above, the balanced surface acoustic wave filter has a balanced input / output characteristic and includes a plurality of input IDTs and output IDTs capable of filtering a signal input from the outside. The signal electrodes or ground electrodes positioned adjacent to each other in the plurality of input IDTs or output IDTs are formed with recesses and grooves having different thicknesses from those required for wire bonding, and the signal electrodes or ground electrodes positioned adjacent to each other. Since the grooves correspond to the recesses so as to cross each other, the area required for the adjacent signal electrodes or the ground electrodes can be minimized to reduce the size of the entire device.

Claims (1)

다수개의 연결단자가 형성된 패키지내에 위치되는 압전체 기판과; 상기 압전체 기판의 일측에 서로 마주보도록 평행하게 배치되는 신호 및 접지전극과 상기 신호 및 접지전극 사이에 형성되는 다수개의 핑거(finger)로 이루어지는 다수개의 입력 인터디지털 트랜스듀서(InterDigital Transducer, 이하 IDT라 함) 및 출력 IDT 를 포함하여 구성되는 밸런스형 표면탄성파 필터에 있어서,A piezoelectric substrate positioned in a package in which a plurality of connection terminals are formed; A plurality of input interdigital transducers (hereinafter referred to as IDTs) comprising a signal and a ground electrode disposed in parallel to face each other on one side of the piezoelectric substrate and a plurality of fingers formed between the signal and the ground electrode. In the balanced surface acoustic wave filter comprising a) and an output IDT, 상기 다수개의 입력 IDT 또는 출력 IDT의 인접한 신호전극 또는 접지전극은 서로 교차되는 요부와 홈부가 형성되는 것을 특징으로 하는 밸런스형 표면탄성파 필터.Balanced surface acoustic wave filter, characterized in that the recessed portion and the groove portion of the adjacent signal electrode or the ground electrode of the plurality of input IDTs or output IDTs are formed to cross each other.
KR1020020038366A 2002-07-03 2002-07-03 Surface acoustic wave filter KR20040003615A (en)

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