KR20040000010A - Passivation structure of organic electroluminescence device - Google Patents
Passivation structure of organic electroluminescence device Download PDFInfo
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- KR20040000010A KR20040000010A KR1020020034377A KR20020034377A KR20040000010A KR 20040000010 A KR20040000010 A KR 20040000010A KR 1020020034377 A KR1020020034377 A KR 1020020034377A KR 20020034377 A KR20020034377 A KR 20020034377A KR 20040000010 A KR20040000010 A KR 20040000010A
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- thin film
- desiccant
- barrier film
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- 238000002161 passivation Methods 0.000 title claims abstract description 6
- 238000005401 electroluminescence Methods 0.000 title abstract 2
- 230000004888 barrier function Effects 0.000 claims abstract description 32
- 239000002274 desiccant Substances 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 18
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 8
- 239000000565 sealant Substances 0.000 claims abstract description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 3
- 239000010408 film Substances 0.000 claims description 41
- 239000010409 thin film Substances 0.000 claims description 25
- 239000003463 adsorbent Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 11
- 239000012528 membrane Substances 0.000 claims description 2
- 239000003566 sealing material Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 description 12
- 238000005538 encapsulation Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000002775 capsule Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000002109 single walled nanotube Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001868 water Inorganic materials 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000011852 carbon nanoparticle Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 239000003230 hygroscopic agent Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
- H05B33/04—Sealing arrangements, e.g. against humidity
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
- G11B7/005—Reproducing
- G11B7/0053—Reproducing non-user data, e.g. wobbled address, prepits, BCA
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/846—Passivation; Containers; Encapsulations comprising getter material or desiccants
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/007—Arrangement of the information on the record carrier, e.g. form of tracks, actual track shape, e.g. wobbled, or cross-section, e.g. v-shaped; Sequential information structures, e.g. sectoring or header formats within a track
- G11B7/00736—Auxiliary data, e.g. lead-in, lead-out, Power Calibration Area [PCA], Burst Cutting Area [BCA], control information
Abstract
Description
본 발명은 유기 EL 소자의 봉지 구조에 관한 것으로, 보다 상세하게는 유기 EL 소자에 베리어 (barrier) 막을 증착하여 봉지함에 있어서, 베리어 막의 상부 또는 하부에 흡착제인 카본 나노튜브 (carbon nano tube) 및 건조제를 삽입함으로써 봉지 특성을 개선시킨 유기 EL 소자에 관한 것이다.The present invention relates to an encapsulation structure of an organic EL device, and more particularly, in depositing and sealing a barrier film on an organic EL device, a carbon nanotube and a desiccant that are adsorbents on or below the barrier film. It relates to an organic EL device having improved sealing properties by inserting.
근래에, 큰 주목을 받고 있는 유기 EL 소자는 서로 다른 밴드 갭 (band gap)을 가지는 두 가지 이상의 유기 발광 물질을 적층 구조로 하여 각각의 물질에서는 나타나지 않는 새로운 영역의 전계 발광 파장을 얻기 위한 소자이다. 이때 새로운 영역의 발광 파장은 발광층이라 불리는 유기층에서 전자 (electron)와 정공 (hole)이 만나서 재결합할 때 방출하는 에너지가 빛으로 변환되는 것이다.In recent years, the organic EL device which has attracted much attention is a device for obtaining an electroluminescent wavelength of a new region which does not appear in each material by stacking two or more organic light emitting materials having different band gaps. . At this time, the emission wavelength of the new region is that the energy emitted when electrons and holes meet and recombine in an organic layer called an emission layer is converted into light.
유기 EL 소자는 1960년대에 연구가 시작되어, 1987년 이스트만 코닥 (Eastman Kodak)사가 발광 유기물 층에 전자와 정공의 주입이 균형을 이루도록 하면서 유기층의 두께를 2000Å 이하로 낮추어서 실용화에 가능한 정도의 10V 이하의 저전압 구동과 고효율, 고휘도를 얻는데 성공한 이후 (Appl. Phys. Lett., 51, 913 (1987), 미합중국 특허 제4,356,429호, 제4,539,507호, 제4,720,432호, 제4,885,211호), 디스플레이 장치에 채용되는 것이 본격적으로 검토되기 시작했다. 이어, 1993년 일본에서 적(R), 녹(G), 청(B) 3색을 동시에 발생시켜서 자연광에 가까운 백색광을 나타내는데 성공한 것을 비롯하여, 고휘도, 저소비 전력, 소자의 장수명화 등이 실현되어 유기 EL 소자는 액정을 대신하는 차세대 평판 디스플레이로서 크게 기대되고 있다.The organic EL device began to be studied in the 1960s, and in 1987, Eastman Kodak, in order to balance the injection of electrons and holes into the light emitting organic material layer, lowering the thickness of the organic layer to 2000 Å or less, which is less than 10 V as practical for practical use. After succeeding in obtaining low voltage driving, high efficiency and high brightness (Appl. Phys. Lett., 51, 913 (1987), US Patent Nos. 4,356,429, 4,539,507, 4,720,432, 4,885,211), It began to be reviewed in earnest. Subsequently, in 1993, Japan produced three colors of red (R), green (G), and blue (B) simultaneously, resulting in white light close to natural light, high brightness, low power consumption, and long life of the device. EL devices are greatly expected as next-generation flat panel displays replacing liquid crystals.
한편, 유기 EL 소자에 사용되는 유기 물질 대부분이 π-전자를 가지고 있기 때문에 정도에 따라 다르지만 물 분자와 상호작용을 하게 되어, 공기중의 수분 또는 이미 기판 등에 부착된 수분은 소자를 구동하지 않고 단순히 보관만 할 경우에도 서서히 전극 및 유기 박막을 공격하여 흑점 (dark spot)을 생성시킨다. 또한 유기 EL 소자의 패키징 (packaging)이 완벽하지 않아서 산소가 존재할 경우 화학적, 열적, 또는 전기적인 힘에 의해서 산소가 촉매 작용을 하거나 직접 반응에 참여하여 유기 박막을 열화 또는 분해시킨다.On the other hand, most of the organic materials used in organic EL devices have π-electrons, but depending on the degree, they interact with water molecules, and moisture in the air or moisture already attached to the substrate does not drive the device. Even if only storage is slowly attack the electrode and the organic thin film to produce a dark spot (dark spot). In addition, the packaging of the organic EL device is not perfect, and when oxygen is present, oxygen deteriorates or decomposes the organic thin film by catalyzing or participating in a direct reaction by chemical, thermal, or electrical forces.
이와 같이 유기 EL 소자는 수분과 산소에 취약하므로, 수분과 산소를 차단하는 것이 유기 EL 소자 봉지 공정의 핵심이라고 할 수 있다. 현재는 유기물 막과 금속 캡슐을 봉지 캡으로 사용하고, 가스 또는 액체가 봉지 공간에 충진된 구조가 가장 많이 적용되고 있으나 이는 디스플레이 기판의 재질이 유리 (glass)인 경우에만 실질적인 적용이 가능하고 고분자 필름과 같은 유연성 있는 기판에 적용하기에는 문제가 있다. 최근에는 기판 표면에 직접 여러 층의 고분자 막과 무기물 막을 적층하여, 전술한 금속 캡슐 봉지를 효과적으로 대체하기 위한 새로운 시도가 이루어지고 있다. 그러나, 상기와 같이 유기 EL 소자 표면에 직접 베리어 막을 패시베이션 (passivation) 한 경우에도, 베리어 특성은 우수하나 박막의 핀홀 (pinhole)에 의하여 외부의 수분 또는 가스를 흡입하여 전극 및 유기 박막에 흑점을 성장시키는 문제점은 여전히 남아 있다. 또한 기존의 유기 EL 소자의 봉지 구조 내부의 건조제는 수분, 일산화탄소, 이산화탄소 및 메탄 등의 가스를 흡입하지만 그 외의 산소 또는 수소 등의 가스는 흡입하지 못한다는 문제점이 있다.As such, since the organic EL device is vulnerable to moisture and oxygen, blocking the moisture and oxygen can be said to be the core of the organic EL device encapsulation process. Currently, organic membranes and metal capsules are used as encapsulation caps, and gas or liquid-filled encapsulation structures are most frequently used. However, this is practically applicable only when the material of the display substrate is glass. There is a problem to apply to a flexible substrate such as. Recently, new attempts have been made to effectively replace the metal capsule encapsulation described above by stacking multiple layers of polymer and inorganic films directly on the substrate surface. However, even in the case of passivation of the barrier film directly on the surface of the organic EL device as described above, the barrier property is excellent, but black spots are grown on the electrode and the organic thin film by sucking external moisture or gas by the pinhole of the thin film. The problem of letting go remains. In addition, the desiccant inside the encapsulation structure of the conventional organic EL device sucks gas such as water, carbon monoxide, carbon dioxide, and methane, but has a problem in that it does not suck other gases such as oxygen or hydrogen.
이에, 본 발명자는 상기와 같은 문제점을 해결하기 위하여, 유기 EL 소자에 베리어 막을 증착하여 봉지함에 있어서, 베리어 막의 상부 또는 하부에 뛰어난 외기 (外氣) 차단효과를 가지는 카본 나노튜브 흡착제가 삽입된 유기 EL 소자의 봉지구조를 개발하여 본 발명을 완성하였다.Accordingly, the present inventors, in order to solve the above problems, in depositing and sealing the barrier film on the organic EL device, the organic organic carbon nanotube adsorbent having an excellent air blocking effect is inserted in the upper or lower portion of the barrier film The encapsulation structure of the EL device was developed to complete the present invention.
본 발명의 목적은 유기 EL 소자에 베리어 막을 증착하여 봉지함에 있어서, 베리어 막의 상부 또는 하부에 뛰어난 외기 차단효과를 가지는 카본 나노튜브 흡착제가 건조제와 함께 삽입됨으로써 봉지 특성이 향상된 유기 EL 소자를 제공함에 있다.SUMMARY OF THE INVENTION An object of the present invention is to provide an organic EL device having improved sealing properties by inserting a carbon nanotube adsorbent having an excellent air blocking effect on the upper or lower portion of the barrier film with a desiccant in depositing and depositing a barrier film on the organic EL device. .
도 1a 및 도 1b는 본 발명의 유기 EL 소자의 봉지 캡의 일실시예를 나타낸 단면도.1A and 1B are cross-sectional views showing one embodiment of a sealing cap of the organic EL device of the present invention.
도 2는 도 1a 및 도 1b의 유기 EL 박막 부분을 상세하게 설명하기 위한 개략도.FIG. 2 is a schematic diagram for explaining in detail the organic EL thin film portions of FIGS. 1A and 1B. FIG.
도 3a는 SWNT (single wall nano tube)의 분자 구조.Figure 3a is a molecular structure of a single wall nano tube (SWNT).
도 3b는 MWNT (multi wall nano tube)의 분자 구조.3B is a molecular structure of MWNT (multi wall nano tube).
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
10, 100 : 하부 기판102 : 베리어 막10, 100: lower substrate 102: barrier film
104 : 카본 나노튜브106 : 건조제104: carbon nanotube 106: desiccant
108 : 밀봉재 (sealant)110 : 유기 EL 박막108: sealant 110: organic EL thin film
상기 목적을 달성하기 위한 본 발명의 특징은 베리어 막으로 패시베이션 (passivation)하여 봉지된 유기 EL 소자에 있어서, 상기 베리어 막 상부 또는 하부에 흡착제인 카본 나노튜브 (carbon nano tube)와 건조제가 삽입된 유기 EL 소자를 구비함에 있다.A feature of the present invention for achieving the above object is in an organic EL device encapsulated by passivation (barrier) to a barrier film, an organic carbon nanotube (adsorbent) and a desiccant is inserted in the upper or lower portion of the barrier film It is provided with an EL element.
이하, 본 발명의 실시예에 대해 첨부된 도면을 참조하여 보다 상세히 설명한다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
본 발명은 하부 기판(100) 상에 유기 EL 박막(110)이 형성되어 있는 유기 EL 소자를 다수의 베리어 막(102)으로 패시베이션하는 봉지 구조에 있어서, 베리어 막(102) 상부 또는 하부에 카본 나노튜브 흡착제(104)가 건조제(106)와 함께 삽입된 구조에 관한 것이다 (도 1a 및 도 1b 참조).According to the present invention, in the encapsulation structure in which an organic EL element having the organic EL thin film 110 formed on the lower substrate 100 is passivated with a plurality of barrier films 102, carbon nanoparticles are formed on or under the barrier film 102. A tube adsorbent 104 relates to a structure in which it is inserted with a desiccant 106 (see FIGS. 1A and 1B).
이때 상기 유기 EL 박막(110)은 도 2의 구조를 포함하는데, 구체적으로 유리 (glass), 유연한 (flexible) 플라스틱 또는 필름 중에서 선택되는 투명 기판(100; 10) 상에, 정공 주입전극인 양극(12)과, 정공 주입층(14; Hole Injection Layer)과, 정공 수송층 (16; Hole Transporting Layer)과, 유기발광층 (18; Emitting Material Layer)과, 전자 수송층(20; Electron Transporting Layer)과, 전자 주입층 (22; Electron Injection Layer) 및 전자주입전극인 음극(24)이 순차적으로 적층되어 있는 발광 구조를 갖는다.In this case, the organic EL thin film 110 includes the structure of FIG. 2, specifically, on the transparent substrate 100 (10; 10) selected from glass, flexible plastic, or film, an anode, which is a hole injection electrode, is formed. 12), a hole injection layer (14), a hole transporting layer (16), an organic light emitting layer (18), an electron transporting layer (20), electrons It has a light emitting structure in which an injection layer 22 (electron injection layer) and an electron injection electrode 24 are sequentially stacked.
구체적으로, 본 발명에서는 기판(100) 상에 상기와 같은 구조로 이루어진 유기 EL 박막 (110)을 포함하고, 상기 유기 EL 박막 (110) 상부에 도포 및 증착된 건조제(106) 및 카본 나노튜브 흡착제(104) 층과, 상기 흡착제(102) 층 상부에 형성되는 베리어 막(102)과 밀봉재(108; sealant) 막으로 구성되는 유기 EL 소자를 제공한다 (도 1a 참조).Specifically, in the present invention, the organic EL thin film 110 having the structure as described above on the substrate 100, the drying agent 106 and the carbon nanotube adsorbent coated and deposited on the organic EL thin film 110, An organic EL device comprising a (104) layer, a barrier film 102 and a sealant film 108 formed on the adsorbent 102 layer is provided (see FIG. 1A).
또한, 본 발명에서는 기판(100) 상에 상기와 같은 구조로 이루어진 유기 EL 박막 (110)을 포함하고, 상기 유기 EL 박막 (110) 상부에 형성된 베리어 막(102)과, 상기 베리어 막(102) 상부에 도포 및 증착된 카본 나노튜브 흡착제(104) 및 건조제(106) 층과, 상기 건조제(106) 층 상부에 형성되는 밀봉재(108) 막으로 구성되는 유기 EL 소자를 제공한다 (도 1b 참조).In addition, in the present invention, the barrier film 102 and the barrier film 102 including the organic EL thin film 110 having the above structure on the substrate 100, and formed on the organic EL thin film 110. Provided is an organic EL device comprising a carbon nanotube adsorbent 104 and a desiccant 106 layer applied and deposited thereon and a sealant 108 film formed over the desiccant 106 layer (see FIG. 1B). .
본 발명에서는 전술한 바와 같이 종래의 유기 EL 소자 봉지 구조의 단점을 보완하기 위하여, 흡습제로 카본 나노튜브를 사용하였는데, 카본 나노튜브는 탄소 원자들이 결합된 잘 짜여진 육각형의 그물망 구조를 가지고 있으며, 주로 튜브 형태의 다발로 생성된다 (도 3a 및 도 3b 참조). 이 다발을 유기 용매 속에서 초음파 처리하여 다발을 어느 정도 풀어헤쳐 가스를 흡착할 수 있는 표면적을 키우면 수소 등의 가스를 효과적으로 흡착시킬 수 있다. 즉, 카본 나노튜브의 튜브 형태의 다발을 박막 또는 후막 형태로 제조하여 본 발명의 흡착제로서 사용한다.In the present invention, in order to compensate for the shortcomings of the conventional organic EL device encapsulation structure, carbon nanotubes are used as a hygroscopic agent, and carbon nanotubes have a well-woven hexagonal mesh structure in which carbon atoms are bonded. Resulting in bundles in the form of tubes (see FIGS. 3A and 3B). This bundle is sonicated in an organic solvent to loosen the bundle to some extent and increase the surface area to adsorb the gas, thereby effectively adsorbing gases such as hydrogen. That is, a bundle in the form of a tube of carbon nanotubes is prepared in the form of a thin film or a thick film and used as the adsorbent of the present invention.
한편, 상기 베리어 막은 실리콘 산화막 (SiO), 실리콘 질화막 (SiN) 또는 실리콘 산화질화막 (SiOxNy) 등의 무기 박막 또는 절연 박막이 사용되며, 건조제는 건조제 자체를 사용하거나 게터 (getter) 형태의 박막 또는 후막 형태를 사용하기도 한다.The barrier film may be an inorganic thin film or an insulating thin film, such as a silicon oxide film (SiO), a silicon nitride film (SiN), or a silicon oxynitride film (SiO x N y ), and the desiccant may use a desiccant itself or a getter type. Thin film or thick film form may be used.
또한, 밀봉재는 배출 가스 (outgas)가 적은 에폭시 수지를 사용하는 것이 바람직하며, 상기 본 발명의 패시베이션 구조를 이루는 박막을 완전히 덮도록 도포하여 경화시킨다.In addition, it is preferable to use an epoxy resin having less outgas, and the sealant is hardened by coating so as to completely cover the thin film forming the passivation structure of the present invention.
이상에서 살펴본 바와 같이, 본 발명에서는 유기 EL 소자에 베리어 막을 증착하여 봉지함에 있어서, 베리어 막의 상부 또는 하부에 뛰어난 외기 차단효과를 가지는 카본 나노튜브 흡착제를 건조제와 함께 삽입시킴으로써 유기 EL 소자 내부에서 발생하는 가스를 제거할 뿐만 아니라, 베리어 막이 차단할 수 없는 외부로부터의 수분 및 가스를 효과적으로 차단 및 제거하여 유기 EL 소자의 봉지 특성을 향상시킬 수 있다.As described above, in the present invention, in depositing and sealing a barrier film on an organic EL device, a carbon nanotube adsorbent having an excellent air blocking effect on the upper or lower portion of the barrier film is inserted together with a desiccant to be generated inside the organic EL device. In addition to removing the gas, the sealing property of the organic EL device can be improved by effectively blocking and removing moisture and gas from the outside which the barrier film cannot block.
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| KR100702620B1 (en) * | 2005-12-28 | 2007-04-02 | 한용규 | A pencil sharpener |
| KR100767573B1 (en) * | 2005-07-25 | 2007-10-17 | 주식회사 엘지화학 | Air purifier |
| EP2082619A1 (en) * | 2006-11-06 | 2009-07-29 | Agency for Science, Technology And Research | Nanoparticulate encapsulation barrier stack |
| US9165996B2 (en) | 2012-10-19 | 2015-10-20 | Samsung Display Co., Ltd. | Organic light emitting display device and manufacturing method thereof |
| CN105047829A (en) * | 2015-09-18 | 2015-11-11 | 京东方科技集团股份有限公司 | Packaging structure and packaging method of organic light emitting device and flexible display device |
| KR20160070225A (en) * | 2014-12-09 | 2016-06-20 | 엘지디스플레이 주식회사 | Opened single-walled nanocarbon, water absorbing agent containing the nanocarbon, and organic light emitting display device including the agent |
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| KR20000038015A (en) * | 1998-12-03 | 2000-07-05 | 김순택 | Organic electric luminescent device |
| JP3817081B2 (en) * | 1999-01-29 | 2006-08-30 | パイオニア株式会社 | Manufacturing method of organic EL element |
| JP4040240B2 (en) * | 2000-07-10 | 2008-01-30 | パナソニック コミュニケーションズ株式会社 | Organic electroluminescence device and method for manufacturing the same |
| JP2001357973A (en) * | 2000-06-15 | 2001-12-26 | Sony Corp | Display device |
| JP4116764B2 (en) * | 2000-10-27 | 2008-07-09 | 松下電工株式会社 | Method for producing organic electroluminescent device |
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| KR100767573B1 (en) * | 2005-07-25 | 2007-10-17 | 주식회사 엘지화학 | Air purifier |
| KR100702620B1 (en) * | 2005-12-28 | 2007-04-02 | 한용규 | A pencil sharpener |
| EP2082619A1 (en) * | 2006-11-06 | 2009-07-29 | Agency for Science, Technology And Research | Nanoparticulate encapsulation barrier stack |
| CN101518151A (en) * | 2006-11-06 | 2009-08-26 | 新加坡科技研究局 | Nano particle encapsulated barrier lamination |
| EP2082619A4 (en) * | 2006-11-06 | 2011-04-06 | Agency Science Tech & Res | Nanoparticulate encapsulation barrier stack |
| AU2006350626B2 (en) * | 2006-11-06 | 2013-09-19 | Agency For Science, Technology And Research | Nanoparticulate encapsulation barrier stack |
| US9493348B2 (en) | 2006-11-06 | 2016-11-15 | Agency For Science, Technology And Research | Nanoparticulate encapsulation barrier stack |
| US9165996B2 (en) | 2012-10-19 | 2015-10-20 | Samsung Display Co., Ltd. | Organic light emitting display device and manufacturing method thereof |
| KR20160070225A (en) * | 2014-12-09 | 2016-06-20 | 엘지디스플레이 주식회사 | Opened single-walled nanocarbon, water absorbing agent containing the nanocarbon, and organic light emitting display device including the agent |
| CN105047829A (en) * | 2015-09-18 | 2015-11-11 | 京东方科技集团股份有限公司 | Packaging structure and packaging method of organic light emitting device and flexible display device |
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