KR20030080468A - Micro actuating apparatus for controlling fluid and micro fluidic control devices using the same - Google Patents

Abstract

PURPOSE: A micro actuating apparatus for controlling fluid and a micro fluid control apparatus using the same are provided to be capable of optimizing the transfer of a biomass sample having a high viscosity and conductivity, improving response speed, and operating at low temperature. CONSTITUTION: A micro actuating apparatus for controlling fluid is provided with a silicon substrate(100a), an outer wall(101) formed at the upper portion of the silicon substrate by sequentially depositing a silicon oxide layer and a silicon layer, a mobile structure(102) including at least one pair of leaf springs having a restoring force, connected with the outer wall through both ends of the mobile structure, and an actuator formed at the upper portion of the silicon substrate for driving backward or forward the mobile structure by using the expansion of a heating element(106) due to the supply of voltage.

Description

Micro actuating apparatus for controlling fluid and micro fluidic control devices using the same}

The present invention relates to a micro-control device for controlling a fluid and a micro-fluid control device using the same, and more particularly, to a micro-drive including an actuator using a thermal expansion method and displacement amplification for transfer of a medical biomaterial, and a movable structure in the form of a leaf spring. A device and a microfluidic control device using the same.

In the case of biological materials, micro-drives that have high viscosity such as piezoelectric type and thermal drive type have been widely used for their viscous and conductive properties. By using this method, the device is driven in an out-of-plane direction, and its structure is complicated, which leads to many manufacturing difficulties and difficulty in integration. Actuators driving in the in-plane are still in the research stage, and the publication of these papers is rare.

1 is a view for explaining the operation of the conventional foam-driven micro-valve.

The foam-driven microvalve shown in FIG. actuated gate valves ", Digest of Technical Papers, Vol. 2, pp. 940-943, which show a valve capable of planar drive and having a bucking movable part using foam, which drives the valve. In order to achieve this, bubbles are generated and driven in the order of (a), (b) and (c) using the force. However, the valve has a disadvantage that when the drive moves, the time is very slow as about 3 seconds, difficult to control the size of the foam, it can be controlled only in the forward-reverse state. Herein, reference numerals '10', '12', '14', '16' and '18', which are not described, refer to an actuation chamber, a chamber, a beam, a channel, and a opening driver, respectively. (gate).

The popularization of bio devices such as DNA or protein chips, which are recently attracting much attention, requires a new concept of driver that simplifies the manufacturing process while complementing the above functions.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a micro-control device for fluid control that is suitable for transporting a biological sample having high viscosity and conductivity, having a fast response speed, a simple manufacturing process, and operable at low temperature.

Another object of the present invention is to provide microfluidic control devices using the microdrive.

1 is a view showing for explaining the operation of the conventional foam-driven micro-valve.

2 is a view for explaining the principle of operation of the leaf spring-type movable structure.

3 is a view illustrating a connection method of the leaf spring-type movable structure.

4A is a diagram illustrating a structure of a power-off state of the microcontroller for fluid control according to the first embodiment of the present invention, and FIG. 4B is a cross-sectional view taken along line II ′ of FIG. 4A.

FIG. 5 is a diagram illustrating a structure of a power-on state of the microcontroller for fluid control according to the first embodiment of the present invention.

6 is a view showing a micro control device for fluid control according to a second embodiment of the present invention.

7 is a view showing a micro pump using the micro-control device for fluid control of the present invention.

FIG. 8 is a view showing a normally-open microvalve using the microcontroller for fluid control of the present invention.

FIG. 9 shows a normally-closed microvalve using the microcontroller for fluid control of the present invention. FIG.

FIG. 10 is a view illustrating a micro-ejector using the microcontroller for fluid control of the present invention.

FIG. 11 is a view showing a micro-mixer using the micro-control device for fluid control of the present invention.

12 is a view showing a micro cell lysis (micro cell lysis) using the micro-control device for fluid control of the present invention.

<Description of the symbols in the main part of the drawing>

101: outer wall 102: movable structure

104: elastic body 106: heating element

108: first anchor 110: second anchor

112: second electrode 114: first electrode

116, 118, and 119: hinge 120: second displacement expanding portion

122: first displacement expanding unit 124: protrusion

126: shock buffer 128: hole

In order to achieve the above technical problem, the present invention provides a silicon substrate, an outer wall having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate, and both ends of the outer wall are connected to each other, and at least a leaf spring having a restoring force is provided. The movable structure is provided on a pair of the movable structure and the silicon substrate and a voltage is applied to generate heat to the heating element, thereby expanding and amplifying the heating element in the longitudinal direction by the heat using the principle of leverage to advance the movable structure. Or it provides a micro-control device for fluid control comprising an actuator for driving in the reverse direction.

The actuator according to an aspect of the present invention includes a first anchor having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate, a first electrode formed on the first anchor, and the first anchor; A second anchor having a structure spaced apart from each other and having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate, a second electrode formed on the second anchor, and connected to the first anchor and on the silicon substrate A heating element made of silicon formed to be suspended, and a first displacement expanding part of a quadrangular shape formed to be floated on the silicon substrate, one end of which is connected to an end of the heating element, and the other end to push the movable structure; It is formed to float on the substrate and one end is connected to the side of the second anchor and the other end is the first displacement expanding portion A second displacement enlargement part connected to overlap one end of the heating element and an end of the heating element, wherein the ratio of the length of the first displacement enlargement portion and the second displacement enlargement portion to the expanded length of the heating element is obtained using the principle of the lever; Displacement amplification by as much as one end characterized in that the one end driving the movable structure in the forward direction.

According to another aspect of the present invention, an actuator includes a first anchor having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate, a first electrode formed on the first anchor, and an upper portion of the outer wall. A heating element made of silicon connected to a second electrode, the first anchor and floating on the silicon substrate, and floating on the silicon substrate, one end of which is connected to the outer wall and the other end of which is connected to the movable structure. A first displacement enlargement part of a quadrangular shape that is connected to be able to pull the movable structure, and is floated on an upper portion of the silicon substrate, and one end of which is connected to an end of the heating element, and the other end is connected to one end of the first displacement enlargement part. And a second displacement enlargement part connected to the outer wall so as to overlap the outer wall, wherein the expanded length of the heating element is increased. Displacement amplification by the ratio of the length of the first displacement enlargement portion and the second displacement enlargement portion using the principle of the lever, characterized in that one end of the first displacement enlargement portion pulls the movable structure in the reverse direction to drive.

In order to achieve the above technical problem, the present invention provides at least two chambers for inputting or outputting a fluid, a flow path connecting the chambers with each other, and a fluid control microcontroller for controlling a fluid flow in the flow path. Including a drive device, wherein the flow path is opened and closed by the forward or backward of the movable structure of the drive device provides a microfluidic control device, characterized in that the flow of the fluid is controlled.

The microfluidic control device may include: a first valve configured to divide the chamber into an input chamber for injecting a fluid and an output chamber receiving the fluid, and to be provided between the input chamber and the flow path to output fluid to the flow path; It may be a micro pump further comprises a second valve provided between the output chamber and the flow path for outputting a fluid to the output chamber.

The microfluidic control device may further include a microvalve further including a valve unit which is divided into an input chamber for injecting fluid and an output chamber receiving the fluid, and connected to the movable structure to open and close the flow path. Can be.

The microfluidic control device may be a micro ejector provided in the flow path and further including a discharge port for discharging the fluid to the outside.

In addition, the microfluidic control device, the chamber is divided into an input chamber for injecting the fluid and the output chamber receiving the fluid, the first valve provided between the input chamber and the flow path for outputting the fluid to the flow path And a second valve disposed between the output chamber and the flow path and outputting fluid to the output chamber, such that fluids of different laminar flow states by turbulent flow are mixed with the fluid flowing in the laminar flow along the flow path. It may be a micro mixer further comprising a provided column.

In addition, the microfluidic control device, the chamber is divided into an input chamber for injecting the fluid and the output chamber receiving the fluid, the first valve provided between the input chamber and the flow path for outputting the fluid to the flow path And a second valve provided between the output chamber and the flow path for outputting fluid to the output chamber, wherein the arm is sawtooth-shaped in the flow path to fracture cells contained in the fluid flowing along the flow path. The structure may be formed, and the movable structure may be a micro cell crusher having a number of serrated structures formed to engage with the serrated structure of the arm.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is limited to the embodiments described below. It doesn't happen. In the following description, when a layer is described as being on top of another layer, it may be present directly on top of another layer, with a third layer interposed therebetween. Like numbers refer to like elements in the figures.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microcontroller for fluid control, comprising a mobile structure having a restoring force, and including an actuator for displacement amplification using thermal expansion force to move the movable structure. The movable structure has a leaf spring structure in which at least one pair is installed in an 'I' shape.

In order to lower the driving power of the microcontroller for fluid control, an 'I' shaped plate spring movable structure that moves with restoring force even when power is turned off and used is used, and the movable structure at both ends connected to the movable structure. Insertion of the elastic body connected to the vertical and to enhance the degree of freedom of movement in the axial direction, the elastic body is a 'I' spring beam connected vertically to the leaf spring-type movable structure, 'S' type spring capable of angular deformation Any one of a beam and a multilayer spring type beam having various bends is used.

2 is a view for explaining the principle of operation of the leaf spring-type movable structure.

Referring to FIG. 2, when the shape of the leaf spring 132 is straight as shown in FIG. 2 (a), when the power is cut off in a state 136 displaced in the forward direction, the leaf spring 132 as shown in FIG. 2 (b). The leaf spring is returned to the central equilibrium position 135 indicated by the dotted line by the restoring force Rf. Even in the displaced state 137 in the reverse direction, as in FIG. 2 (c), the power is returned to the central equilibrium position 135 indicated by the dotted line, so that a separate power supply for moving to the central equilibrium position 135 is unnecessary. There is this. As such, using the 'I' shaped leaf spring as a movable structure (see '102' in FIG. 4) has an advantage of reducing power consumption to less than half.

3 is a view illustrating a connection method of the leaf spring-type movable structure.

Referring to FIG. 3, FIG. 3 (a) shows a state in which a leaf spring (see '132' in FIG. 2) is connected to a point 140 perpendicular to the outer wall 101. In such a case, the displacement is inevitably limited. Therefore, in order to increase the displacement of the leaf spring, by inserting an elastic body in the connecting portion to give an additional degree of freedom, even a leaf spring of the same length can give a larger displacement. 3 (b), 3 (c) and 3 (d) show an example of inserting such an elastic body. 3 (b), 3 (c), and 3 (d) show an 'I' type spring beam 142, an 'S' type spring beam 144, and a multilayer spring type beam 146 having various bends. ) Is shown. For example, when the S-shaped spring 144 is inserted into the connecting portion as shown in FIG. By allowing angle deflection (A) to have as many degrees of freedom as possible, a larger displacement can be achieved at the same power. Thus, using the leaf spring as a movable structure (see '102' of Figure 4), and inserting an elastic body between the movable structure and the outer wall 101 can give additional freedom of movement.

<Example 1>

4A is a diagram illustrating a structure of a power-off state of the microcontroller for fluid control according to the first embodiment of the present invention, and FIG. 4B is a cross-sectional view taken along line II ′ of FIG. 4A.

4A and 4B, the microcontroller for fluid control of the present invention has a structure in which a silicon substrate 100a and a silicon oxide film 100b and silicon 100c are sequentially stacked on the silicon substrate 100a. The silicon substrate 100a is surrounded by the outer wall 101, the movable structure 102 having both ends connected to the outer wall 101, and at least one pair of leaf springs having restoring force, and the outer wall 101 and the movable structure 102. And a voltage is applied to the heat generating element 106 to generate heat to the heat generating element 106 to expand or expand the heat generating element 106 in the longitudinal direction by the heat displacement displacement amplification using the principle of the lever to move forward or backward 102 It includes an actuator for driving in the direction.

More specifically, the microcontroller for fluid control according to the first embodiment of the present invention is as follows. There is a leaf spring mobile structure 102 for fluid control, and an elastic body 104 is vertically connected to the leaf spring movable structure 102 on both sides of the leaf spring movable structure 102. The other end of the elastic body 104 is connected to the outer wall (101). By connecting the elastic body between the outer wall 101 and the movable structure 102 as described above, the movable structure 102 is given an additional degree of freedom, so that even if the movable structure 102 of the same length has a larger displacement, Can give As the elastic member 104, any one of an 'I' type spring beam, an 'S' type spring beam capable of angular deformation, and a multilayer spring type beam having various bends may be used. For example, when using the 'S' type spring beam as the elastic body 104, not only the axial freedom of the movable structure 102 but also the spring itself deforms to have the degree of freedom for angle deflection of the connection site. In addition, even the same power can give a larger displacement. The outer wall 101 has a silicon on insulator (SOI) structure in which the silicon oxide film 100b and the silicon 100c are sequentially stacked on the silicon substrate 100a. In order to drive the movable structure 102, an actuator is provided to enable displacement amplification using a thermal expansion method. The actuator includes a first anchor 108 having a structure in which a silicon oxide film 100b and silicon 100c are sequentially stacked on a silicon substrate 100a, and a first electrode 114 formed on the first anchor 108. ), A second anchor 110 spaced apart from the first anchor 108, and having a structure in which the silicon oxide film 100b and the silicon 100c are sequentially stacked on the silicon substrate 100a, and the second anchor ( 110, a heat generating element 106 formed of silicon having a large length and a small cross-sectional area, connected to the second electrode 112 formed on the upper portion, the first anchor 108 and floating on the silicon substrate 100a, and silicon It is formed to float above the substrate (100a), one end is connected to the end of the heating element 106 and the other end is provided with a first-shaped first displacement expanding portion 122 of the rectangular shape and the silicon substrate ( 100a) is formed to float on the top and one end is connected to the side of the second anchor 110, The other end includes a second displacement expanding unit 120 connected to overlap one end of the first displacement expanding unit 122 and an end of the heating element 106. The second displacement expanding unit 120 and the second anchor 110 are connected to each other through a hinge 118. The first displacement expanding part 122 and the heating element 106 are connected to each other through the hinge 116. Moreover, the protrusion 124 which contacts the impact buffer part 126 of the movable structure 102 is formed in the one end of the 1st displacement expansion part 122. As shown in FIG. In addition, holes 128 are formed in the movable structure 102, the heat generating element 106, and the first and second displacement expanding portions 122 and 120. The first electrode 114 and the second electrode 112 are made of a conductive material such as metal such as gold (Au), aluminum (Al), or platinum (Pt). The heating element 106, the hinges 116 and 118, the second displacement expanding unit 120 and the first displacement expanding unit 122 are made of silicon. The first and second anchors 108 and 110 have a silicon on insulator (SOI) structure in which a silicon oxide film 100b and a silicon 100c are sequentially stacked on the silicon substrate 100a.

For displacement amplification, the first and second displacement expanding parts 122 and 120 are implemented with the hinge 116 connected to the heating element 106 as an axis, and the length ratios of the two parts 122 and 120 are equal to each other. Displacement amplification occurs. On the other hand, since the heating element 106 is made of silicon (Si) having a large length and a small cross-sectional area, the resistance to current is large.

FIG. 5 is a diagram illustrating a structure of a power-on state of the microcontroller for fluid control according to the first embodiment of the present invention.

Referring to FIG. 5, a voltage is applied to the first electrode 114 formed on the first anchor 108 and the second electrode 112 formed on the second anchor 110 (eg, 5V to the first electrode 114). When the ground voltage is applied to the second electrode 112, a large voltage is applied to the heating element 106 having a large resistance, thereby generating heat. The heat causes the heating element 106 to expand in the longitudinal direction. The heating element 106 expanded in the longitudinal direction pushes the first displacement expanding part 122 through the hinge 116. On the other hand, the second anchor 110 fixed to the silicon substrate 100a fixes one end of the second displacement expanding portion 120, and accordingly, the first displacement expanding portion 122 moves according to the principle of the lever. The protrusion 124 provided at one end of the first displacement expanding unit 122 by the displacement amplification using the thermal expansion method contacts the shock buffer 126 to move the movable structure 102 in the forward direction, that is, the first anchor ( 108) is pushed in the opposite direction to the side.

Displacement amplification is calculated as follows. For example, when the length of the silicon heating element 106 is 1 mm, when a temperature change of 100 ° C. occurs, the expected displacement is 1 mm × 2.5 × 10 ⁻⁶ (thermal expansion coefficient of silicon) × 100 × displacement amplification ratio The first displacement expanding portion 122 / the second displacement expanding portion 120). If the displacement amplification ratio is 100, a net displacement of about 25 占 퐉 occurs. The displacement amplification ratio refers to a ratio of the lengths of the first displacement expanding unit 122 and the second displacement expanding unit 120.

When the power is turned off, the power is returned to the original state by the restoring force of the leaf spring-type movable structure 102, and thus power consumption can be reduced by more than half.

<Example 2>

6 is a view showing a micro control device for fluid control according to a second embodiment of the present invention.

Referring to FIG. 6, the first displacement expanding unit 122 and the second displacement expanding unit 120 are divided based on the hinge 119 connected to the outer wall 101, and one end of the second displacement expanding unit 120 is provided. Is connected to the end of the heating element 106, the second electrode 112 is formed on the outer wall 101, one end of the first displacement expanding portion 122 and the movable structure 102 through the hinge 127 Are connected to each other. In addition, a second anchor (see "110" in FIG. 4) provided in the driving apparatus of the first embodiment is not necessary in this embodiment. Except for the above points, there is almost no difference from the first embodiment, and the operation of the microcontroller for fluid control according to the present embodiment will be described below.

A voltage is applied to the first electrode 114 formed on the first anchor 108 and the second electrode 112 formed on the outer wall 101 (eg, a voltage of 5V to the first electrode 114 and the second electrode 112). ), A large voltage is applied to the heating element 106 having a large resistance, thereby generating heat. The heat causes the heating element 106 to expand in the longitudinal direction. The heating element 106 expanded in the longitudinal direction pushes one end of the second displacement expanding part 120 through the hinge 116. On the other hand, the hinge 119 which is the reference of the first displacement expanding portion 122 and the second displacement expanding portion 120 is fixed to the outer wall 101, and accordingly the first displacement expanding portion 122 is based on the principle of the lever. ) Is moved. By the displacement amplification using the thermal expansion method, the movable structure 102 connected to one end of the first displacement expanding unit 122 is moved in the reverse direction, that is, toward the first anchor 108.

Hereinafter, a method of manufacturing the microcontroller for fluid control according to the first embodiment of the present invention will be described.

4A and 4B, a wafer having a structure in which a silicon substrate 100a, a silicon oxide film 100b, and silicon 100c are sequentially stacked is prepared. It is preferable that the silicon oxide film 100b has a thickness of about 2 to 3 µm, and the silicon 100c has a thickness of about 20 to 150 µm. A heating element connected to the movable structure 102, the outer wall 101, the first anchor 108, the second anchor 110 spaced apart from the first anchor 108, and the first anchor 108 on the wafer ( 106, a second displacement expanding part 120 having one end connected to the second anchor 110, and a first displacement expanding part 122 connected to the heating element 106 and the second displacement expanding part 120. The photoresist pattern is formed by using a mask defining the. The pattern defining the holes 128 formed in the movable structure 102, the heating element 106, and the first and second displacement expanding portions 122 and 120 is also defined by the mask. Subsequently, the silicon 100c and the silicon oxide film 100b are sequentially dry-etched using the photoresist pattern as an etching mask. Dry etching equipment uses ICP (Inductively Coupled Plasma) equipment or Deep Reactive Ion Etching (DRIE) equipment, and SF ₆ , C ₄ F ₈ , Oxygen (O ₂ ) and Argon (Ar) gas are used as etching gases. do. At this time, the etching proceeds by applying an upper power of about 800 W and a lower power of about 20 to 30 W using a gas flow rate of about 10 to 200 sccm at room temperature (20 to 40 ° C.). Next, the movable structure 102, the first displacement expanding unit 122, and the second displacement expanding unit 120 using a wet etchant having an etching rate with respect to the silicon oxide film 100b faster than the etching rate with respect to the silicon 100c. ), The silicon oxide film 100b formed under the heat generating element 106 and the hinges 116 and 118 is removed. Since wet etching is isotropic etching, the silicon oxide film 100b beneath these is also etched to the outer wall 101, the first anchor 108, and the second anchor 110 of the SOI structure, but since the area is large, it is shown in FIG. 4B. As shown, only a predetermined degree is etched laterally. HF solution is used as the etching solution. Holes 128 formed in the movable structure 102, the first displacement expanding portion 122, the second displacement expanding portion 120, and the heating element 106 are used to quickly etch and remove the lower silicon oxide film 100b. To help. By the wet etching, the movable structure 102, the first displacement expanding unit 122, the second displacement expanding unit 120, the heating element 106, and the hinges 116 and 118 are suspended above the silicon substrate 100a. . That is, the silicon oxide film 100b that is present in the lower portion is removed to have a floating shape, as if spaced apart from the upper portion of the silicon substrate 100a. Subsequently, a metal such as gold (Au), aluminum (Al), or platinum (Pt) is deposited to form the first electrode 114 and the second electrode 112.

The microcontroller for fluid control according to the second embodiment of the present invention can also be manufactured using the above-described manufacturing method.

Hereinafter, application examples using the microcontroller for fluid control will be described with reference to the accompanying drawings.

7 is a view showing a micro pump using the micro-control device for fluid control of the present invention.

Referring to FIG. 7, the fluid flows while the width of the flow path 150 is changed by the driving of the microcontroller for controlling fluid according to the first embodiment of the present invention, wherein the first valve 152 and the second valve are flown. The difference in resistance to fluid flow occurring at 154 causes fluid to flow from the input chamber 156 toward the outlet chamber 158. In order to remove the fluid flow of the flow path 150, one side of the flow path 150 is formed of the movable structure 102 of the fluid control micro-drive device. As the first valve 152 connected to the input chamber 156, a nozzle, a passive valve, or an active valve may be used. As the second valve 154 connected to the flow path 150 to output the fluid, a diffuser, a passive valve, or an active valve may be used. The cover plate of the micropump uses a glass substrate having a similar coefficient of thermal expansion as silicon (for example, Pyrex substrate from Corning, USA) or a transparent polymer. When the cover substrate is a glass substrate, the bonding of the base substrate including the cover substrate and the driving device uses an anodic bonding for bonding by applying a high temperature and a high voltage. In other words, when a glass substrate containing sodium (Na), potassium (K), etc. is heated to a temperature of 200 ° C. or more, the impurities are charged and easily shifted according to the voltage. When a DC voltage of 600V or more is applied, the mobile charges move rapidly and strong charging occurs at the silicon-glass interface, which causes the silicon-glass to bond. If the cover substrate is a transparent polymer, it can be bonded using an adhesive.

FIG. 8 is a view showing a normally-open microvalve using the microcontroller for fluid control of the present invention.

Referring to FIG. 8, the valve portion 162 is attached to the leaf spring-type movable structure 102. Normally-open flow along the flow path 160, but when the fluid control micro-drive device according to the first embodiment of the present invention (i.e., power-on state) valve portion 162 ) Advances to block the flow of fluid across the flow path 160. In this case, the fluid inflow prevention weir 164 may be added to minimize the leakage of the fluid. In addition, when the power is opened and closed (OFF), the valve unit 162 returns to the center position, and the flow path 160 opens to allow fluid to flow. Here, unexplained reference numerals '166' and '168' denote input chambers and output chambers, respectively.

FIG. 9 shows a normally-closed microvalve using the microcontroller for fluid control of the present invention. FIG.

Referring to FIG. 9, the valve portion 172 is attached to the leaf spring-type movable structure 102. Normally along the flow path 170, the fluid flow is normally closed (normally-closed), but when the fluid control micro-drive device according to the second embodiment of the present invention (i.e., power-on state) valve portion 172 moves backward by the movable structure 102 to open the flow path 170 to cause the flow of the fluid. At this time, the fluid inflow prevention weir 174 may also be added to minimize the leakage of the fluid. In addition, when the power is turned on and off (OFF), the valve 172 returns to the center position, and the flow path is closed so that no fluid flows. Here, reference numerals '176' and '178', which are not described, indicate an input chamber and an output chamber, respectively.

FIG. 10 is a view illustrating a micro-ejector using the microcontroller for fluid control of the present invention.

Referring to FIG. 10, a micro ejector injects fluid through at least two input chambers 186 through inlets 182 at both ends of the flow path 180, and according to the first embodiment of the present invention, the micro control fluid according to the first embodiment of the present invention. When the driving device is operated, the fluid is ejected out of the outlet 184 having a low pressure. In order to control the fluid flow of the flow path 180, one side of the flow path 180 is formed of a movable structure of the driving device. The amount of fluid ejected is proportional to its applied power, frequency, and duty cycle (ratio of on and off times for a cycle in a device that periodically turns on and off). At this time, the cover substrate of the micro ejector is made of a glass substrate having a similar coefficient of thermal expansion to silicon (for example, Pyrex substrate from Corning, USA) or a transparent polymer. Alternatively, the laser beam may be used, and the base substrate including the cover substrate and the driving apparatus may be bonded to each other by applying a high temperature and a high voltage when the cover substrate is a glass substrate. If the cover substrate is a transparent polymer, it can be bonded using an adhesive. Here, unexplained reference numeral '186' denotes the input chamber.

FIG. 11 is a view showing a micro-mixer using the micro-control device for fluid control of the present invention.

Referring to FIG. 11, the fluid flows while the width of the flow path 190 is changed by the driving of the microcontroller for fluid control according to the first embodiment of the present invention, wherein the first valve 192 and the second valve are flown. The difference in resistance to the fluid flow occurring at 194 causes fluid to flow from the input chamber 196 toward the outlet chamber 198. As the first valve 192 connected to the input chamber 196, a nozzle, a passive valve, or an active valve may be used. As the second valve 194 connected to the flow passage 190 to output the fluid, a diffuser, a passive valve, or an active valve may be used. At this time, the fluid flowing in the laminar flow by the pole (195) is able to mix the fluid in different laminar flow state by the turbulent flow generated by the drive device. For the cover plate of the micro pump for a mixer, a glass substrate having a similar coefficient of thermal expansion to silicon (for example, Pyrex substrate from Corning, USA) or a transparent polymer is used. The bonding of the base substrate including the cover substrate and the driving device using a beam uses an anode bonding in which a high temperature and a high voltage are applied when the cover substrate is a glass substrate. If the cover substrate is a transparent polymer, it can be bonded using an adhesive.

12 is a view showing a micro cell lysis (micro cell lysis) using the micro-control device for fluid control of the present invention.

Referring to FIG. 12, a fluid containing cells flows while the width of the flow path 200 is changed by the driving of the microcontroller for fluid control according to the first embodiment of the present invention, wherein the fluid including the first valve 202 The difference in resistance to the fluid flow occurring in the second valve 204 causes the fluid to flow from the input chamber 206 toward the outlet chamber 208. As the first valve 202 connected to the input chamber 206, a nozzle, a passive valve, or an active valve may be used. As the second valve 204 connected to the flow path 200 to output the fluid, a diffuser, a passive valve, or an active valve may be used. In order to break up the cells contained in the fluid, one side of the flow path 200 is formed with a serrated structure 205 of the arm, and the movable structure 102 can be engaged with the serrated structure 205 of the arm. A sawtooth structure 207 is formed. Therefore, when the movable structure 102 moves, the gap between the two surfaces becomes narrower, and the cells contained in the fluid (for example, red blood cells and leukocytes having a size of 5 to 20 μm) and the nucleus are broken down so that the genes in the cells ( DNA fragments can mix and flow into the fluid. The cover substrate of such a micro-cell crusher uses a glass substrate having a similar coefficient of thermal expansion to silicon (for example, Pyrex substrate from Corning, USA) or a transparent polymer, and sandblasted or laser to make a fluid flowing hole. The bonding of the base substrate including the cover substrate and the driving device using a beam uses an anode bonding in which a high temperature and a high voltage are applied when the cover substrate is a glass substrate. If the cover substrate is a transparent polymer, it can be bonded using an adhesive.

According to the microcontroller for fluid control according to the present invention, it can be used as a microcontroller for fluid control for biological sample transfer, and has a structure that can greatly simplify the process and reproducibly obtain a large displacement even at low temperature within a short time. Low power consumption, miniaturization and batch mass production are possible, and it can be applied to various micro fluid control devices such as micro pump, micro valve, micro ejector and micro mixer.

The micropump of the present invention can be applied to a drug delivery system (DDS) or a micro total analysis system (μ-TAS), which delivers insulin and expensive medical substances in small amounts to the living body. Can be. In particular, it can be applied to a micro-sensor system that can be attached to the human body for continuous use.

As mentioned above, although preferred embodiment of this invention was described in detail, this invention is not limited to the said embodiment, A various deformation | transformation by a person of ordinary skill in the art within the scope of the technical idea of this invention is carried out. This is possible.

Claims (12)

Silicon substrates; An outer wall having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate; A movable structure having both ends of the outer wall connected to each other and having at least one pair of leaf springs having a restoring force; And Is formed on top of the silicon substrate, by applying a voltage to generate heat to the heating element by the displacement amplification of the heating element in the longitudinal direction by the heat using the principle of the lever to drive the movable structure in the forward or backward direction A microcontroller for fluid control, comprising an actuator. The method of claim 1 wherein the actuator is A first anchor having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate; A first electrode formed on the first anchor; A second anchor spaced apart from the first anchor and having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate; A second electrode formed on the second anchor; A heating element made of silicon connected to the first anchor and floating on the silicon substrate; A first displacement enlarged portion formed in an upper portion of the silicon substrate, one end of which is connected to an end of the heating element, and the other end of which is pushed to push the movable structure; And It is formed so as to float on the silicon substrate, one end is connected to the side of the second anchor, the other end includes a second displacement enlarged portion connected to overlap one end of the first displacement expansion portion and the end of the heating element , The expanded length of the heating element is displaced and amplified by a ratio of the lengths of the first displacement expanding portion and the second displacement expanding portion using the principle of the lever, so that one end of the first displacement expanding portion drives the movable structure in the forward direction. Micro-control device for fluid control, characterized in that. The method of claim 1 wherein the actuator is A first anchor having a structure in which a silicon oxide film and silicon are sequentially stacked on the silicon substrate; A first electrode formed on the first anchor; A second electrode formed on the outer wall; A heating element made of silicon connected to the first anchor and floating on the silicon substrate; A first displacement enlargement part formed to be suspended above the silicon substrate, one end of which is connected to the outer wall, and the other end of which is connected to the movable structure to attract the movable structure; And Is formed to be floating on the silicon substrate, one end is connected to the end of the heating element, the other end includes a second displacement enlarged portion overlapping and connected to one end and the outer wall of the first displacement enlargement portion, The expanded length of the heating element is displaced and amplified by a ratio of the lengths of the first displacement expanding portion and the second displacement expanding portion using the principle of the lever, so that one end of the first displacement expanding portion pulls the movable structure in the backward direction. A micro control device for fluid control, characterized in that the drive. 4. The microcontroller for fluid control of claim 2 or 3, wherein the heating element, the movable structure, the first displacement enlargement portion and the second displacement enlargement portion are provided with holes at predetermined intervals. 2. The microcontroller for fluid control of claim 1, further comprising an elastic body inserted between the movable structure and the outer wall and vertically connected to the movable structure. 6. The micro-drive device for fluid control according to claim 5, wherein the elastic body is made of any one of an I-type spring beam vertically connected to the movable structure, an S-type spring beam capable of angular deformation, or a multilayer spring beam having a bend. . At least two chambers for input or output of fluid; A passage through which fluid flows and connects the chambers; And Including the drive device of claim 1 for controlling the flow of fluid in the flow path, The flow path is opened or closed by the forward or backward of the movable structure of the drive device to control the flow of the fluid microfluidic control device using the micro-control device for fluid control of claim 1. The method of claim 7, wherein the chambers are divided into an input chamber for injecting a fluid and an output chamber receiving the fluid, the first valve is provided between the input chamber and the flow path for outputting the fluid to the flow path, And a second valve disposed between the output chamber and the flow path for outputting the fluid to the output chamber. The method of claim 7, wherein the chambers are divided into an input chamber for injecting a fluid and an output chamber for receiving the fluid, and the chamber further includes a valve unit connected to the movable structure to open and close the flow path. Micro fluid control device using a micro-drive device for controlling the fluid of the claim. 8. The microfluidic control device of claim 7, further comprising a discharge port provided in the flow path for discharging the fluid to the outside. The method of claim 7, wherein the chambers are divided into an input chamber for injecting a fluid and an output chamber receiving the fluid, the first valve is provided between the input chamber and the flow path for outputting the fluid to the flow path, A second valve provided between the output chamber and the flow path and outputting the fluid to the output chamber, and a column provided in the flow path such that fluids of different laminar flow states are mixed by turbulent flow with respect to the fluid flowing in the laminar flow along the flow path. Microfluidic control device using a micro-control device for fluid control of claim 1 further comprising a. The method of claim 7, wherein the chambers are divided into an input chamber for injecting a fluid and an output chamber receiving the fluid, the first valve is provided between the input chamber and the flow path for outputting the fluid to the flow path, And a second valve disposed between the output chamber and the flow path to output fluid to the output chamber, wherein a sawtooth-shaped structure of the arm is formed in the flow path in order to fracture the cells contained in the fluid flowing along the flow path. A microfluidic control device using the fluid control microdrive device according to claim 1, wherein the movable structure is provided with a number of serrated structures to mesh with the serrated structures of the arm.