KR20030026668A - Metal thin-film filter - Google Patents

Metal thin-film filter Download PDF

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Publication number
KR20030026668A
KR20030026668A KR1020010059750A KR20010059750A KR20030026668A KR 20030026668 A KR20030026668 A KR 20030026668A KR 1020010059750 A KR1020010059750 A KR 1020010059750A KR 20010059750 A KR20010059750 A KR 20010059750A KR 20030026668 A KR20030026668 A KR 20030026668A
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South Korea
Prior art keywords
metal thin
thin film
weight
film filter
balance
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KR1020010059750A
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Korean (ko)
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황계순
강신현
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재단법인 포항산업과학연구원
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Priority to KR1020010059750A priority Critical patent/KR20030026668A/en
Publication of KR20030026668A publication Critical patent/KR20030026668A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D39/00Filtering material for liquid or gaseous fluids
    • B01D39/14Other self-supporting filtering material ; Other filtering material
    • B01D39/20Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027Metallic material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/065More than one layer present in the filtering material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/10Filtering material manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/12Special parameters characterising the filtering material
    • B01D2239/1216Pore size

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  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtering Materials (AREA)

Abstract

PURPOSE: Provided is a metal thin film filter having high corrosion resistance at a high temperature. CONSTITUTION: The metal thin film filter essentially comprises 10-40 wt.% of chrome and 1-15 wt.% of aluminium, and includes nickel or iron as a remainder and some contaminants, wherein the metal thin film filter has a thickness less than 500 micrometers and pores less than 100 micrometers in size.

Description

금속박막필터{METAL THIN-FILM FILTER}Metal Thin Film Filter {METAL THIN-FILM FILTER}

본 발명은 금속박막으로 이루어지는 필터에 관한 것으로서, 좀더 상세하게는 금속박막에 포토에칭기술을 이용하여 미세공극이 다수개 타공된 금속박막필터에 관한 것이다.The present invention relates to a filter formed of a metal thin film, and more particularly, to a metal thin film filter having a plurality of micropores perforated using a photoetching technique.

산업현장에서 발생되는 분진은 그대로 대기 중으로 방출되면 환경을 오염시키므로 필터가 장착된 집진장치를 통과하여 정화된 후, 대기 중으로 방출된다.Dust emitted from industrial sites pollutes the environment when it is released into the atmosphere as it is, so it is purified through a dust collector equipped with a filter, and then released into the atmosphere.

일반적으로 분진을 제거하기위하여 사용되는 필터는 섬유상의 물질을 직포 또는 부직포의 형태로 제작하여 사용하여 왔다.In general, filters used to remove dust have been used in the form of woven or nonwoven fabrics of fibrous material.

필터에 사용되는 섬유상의 물질로는 폴리에스테르 섬유가 가장 널리 이용되고, 폴리에틸렌, 폴리프로필렌, 아크릴, 나일론, 노멕스, 유리섬유 등이 사용되어 왔다.As the fibrous material used in the filter, polyester fiber is most widely used, and polyethylene, polypropylene, acrylic, nylon, nomex, glass fiber and the like have been used.

이러한 섬유상의 필터는 주로 여과포의 형태로 이루어지며, 공장에서 발생되는 분진은 여과포 표면에서 대부분의 입자들이 제거되고 일부는 여과포 내부를 통과하면서 제거된다. 또한 집진장치 내부로 유입된 가스는 여과포의 기공을 통하여 정화되어 대기중으로 방출된다.These fibrous filters are mainly in the form of filter cloth, and dust generated in the factory is removed while most particles are removed from the surface of the filter cloth and some are passed through the inside of the filter cloth. In addition, the gas introduced into the dust collector is purified through the pores of the filter cloth and discharged into the atmosphere.

이와 같은 여과포를 사용하여 분진을 제거하는 대표적인 산업공정으로는 철강공정, 소각공정, 시멘트공정, 화학공정, 발전공정, 제지공정, 코크스공정 등의 있다.Representative industrial processes to remove dust using such filter cloth include steel process, incineration process, cement process, chemical process, power generation process, papermaking process, and coke process.

그러나 이러한 섬유질 여과포는 분진을 포집하거나 제거하는데는 유용하게 사용되나, 열에 약한 섬유로 만들어진다는 재질상의 특징으로 인해 250℃이상에서는 사용할 수 없고, 온도가 올라갈수록 열적, 내화학적 내구성이 급격히 약해지므로 고온에서 사용할 수 없다. 따라서 고온에서 운전을 방지하기 위하여 냉각설비 등의 전처리설비를 설치해야 하므로 이에 따른 설계 및 시공, 유지, 운전비용이 증가되는 문제가 있다.However, these fibrous filter cloths are useful for trapping and removing dust, but they cannot be used above 250 ℃ due to the material characteristics of being made of fibers that are weak against heat. Not available at Therefore, in order to prevent the operation at high temperature, it is necessary to install a pretreatment facility such as a cooling facility, and thus there is a problem in that the design and construction, maintenance, and operation costs increase.

또한 배기가스 중에 수분이 다량 포함되므로 이 수분에 의해 여과포의 눈막힘 현상이 발생되고, 탈진된 공기내에도 수분이 함유된다.In addition, since a large amount of moisture is contained in the exhaust gas, clogging of the filter cloth occurs due to this moisture, and moisture is also contained in the exhausted air.

이와 같은 눈막힘과 탈진공기중의 수분으로 인하여 여과포의 수분응축 및 차압의 증가로 집진효율이 떨어지고 여과포를 담고 있느 백의 수명이 감소되어 교체율이 증가 되며 이로 인하여 전반적인 운전 및 유지비용이 비용이 증가된다.Due to such clogging and moisture in the deaeration air, the water condensation of the filter cloth and the increase in the differential pressure reduce the dust collection efficiency, reduce the life of the bag containing the filter cloth, increase the replacement rate, and increase the overall operating and maintenance costs. .

특히 섬유질 여과포를 사용하는 집진장치는 장기간 운전할 경우 여과포의 기계적, 열적 내구성이 약화되어 순간적인 파열이 발생할 수 있으며, 이 경우 사고가 발생할 위험성이 있다.In particular, the dust collecting device using the fibrous filter cloth may cause instantaneous rupture due to weakening of the mechanical and thermal durability of the filter cloth for a long time, and in this case, there is a risk of an accident.

따라서 고온에서 사용될 수 있는 물성을 지닌 필터 개발의 필요성이 요청되고 있으며, 이러한 필터로는 금속박판을 이용한 필터가 물성측면에서 유리할 것이다.Therefore, there is a need for developing a filter having physical properties that can be used at high temperatures, and such a filter may be advantageous in terms of physical properties.

섬유질 여과포 대신에 금속박막으로 이루어지는 금속박막필터로는 대한민국 특허출원 공개번호 제2000-0072210이 있으나 여기에는 개념적인 사항만 개시되어 있다. 그러나 상기 게시된 바에 의하면 구체적인 실험데이터가 제시되지 못하며, 내구성 및 집진효율이 낮아 실용화되지 못했다.As a metal thin film filter formed of a metal thin film instead of a fibrous filter cloth, there is a Korean Patent Application Publication No. 2000-0072210, but only conceptual information is disclosed. However, according to the above publication, no specific experimental data is presented, and durability and dust collection efficiency are low, and thus cannot be put to practical use.

금속박막필터를 실용화하기 위해서는 배기가스를 만족할 만한 수준까지 정화해야 하므로 일반적인 산업공정에서 요구하는 95%이상의 집진효율이 필요로 하며, 디젤엔진의 경우에는 60%이상의 집진효율을 필요로 한다.In order to realize the practical use of the metal thin film filter, the exhaust gas has to be purified to a satisfactory level. Therefore, dust collection efficiency of 95% or more required in general industrial processes is required, and diesel engines require dust collection efficiency of 60% or more.

또한 금속박막필터는 운전시 압력강하가 낮을수록 성능이 우수한 필터이지만, 사용공정의 조건이 금속박막필터의 허용압력을 초과하지 않아야 한다. 따라서 일반적으로 산업체의 여과집진공정에서 집진기 본체에서의 압력강하는 100-150㎜H2O 이므로 100-150㎜H2O 이하로 운전하는 것이 바람직하며, 디젤엔진 배기가스의 경우에는 30KPa 이하로 유지되는 것이 필요하다.In addition, the metal thin film filter has a higher performance when the pressure drop is lower during operation, but the condition of the process should not exceed the allowable pressure of the metal thin film filter. Therefore, in general, the pressure drop in the dust collector main body is 100-150 mmH2O or less in the industrial dust collecting process. Therefore, it is preferable to operate the gas at 100-150 mmH2O or less. .

아울러, 금속박막필터는 장시간 사용할 수 있도록 열적, 화학적 내구성이 강해야 한다.In addition, the metal thin film filter must be strong thermal and chemical durability so that it can be used for a long time.

그러나 금속박막필터의 재질로 주로 사용되는 강철박판은 상온에서도 부식가스에 대한 저항성이 낮기 때문에 수명이 짧은 문제점이 있다.However, the steel sheet mainly used as a material of the metal thin film filter has a short lifespan because of low resistance to corrosion gas even at room temperature.

또한 부식을 방지하기 위하여 채택되는 스테인레스강박판도 고온의 부식조건에서는 빠르게 부식하므로 수명이 짧은 문제점이 있다.In addition, the stainless steel sheet adopted to prevent corrosion also has a problem of short life because it corrodes quickly under high temperature corrosion conditions.

이에 본 발명은 종래 기술의 문제점을 해결하기 위해 안출된 것으로, 상온및 고온에서 내식성이 강한 금속박막필터를 제공하는데 그 목적이 있다.Therefore, the present invention has been made to solve the problems of the prior art, and an object thereof is to provide a metal thin film filter having a high corrosion resistance at room temperature and high temperature.

상기 목적을 달성하기 위해서 미세공극이 다수개 형성된 금속박막필터에 있어서, 금속박막필터는 크롬 10중량% 내지 40중량%, 알루미늄 1중량% 내지 15중량%, 잔부는 니켈 또는 철을 하나 이상 포함하는 불가피한 성분으로 조성되는 것을 특징으로 하는 금속박막필터를 제공한다.In the metal thin film filter formed with a plurality of micropores in order to achieve the above object, the metal thin film filter is 10 to 40% by weight of chromium, 1 to 15% by weight of aluminum, the balance comprises one or more nickel or iron Provided is a metal thin film filter, which is composed of an inevitable component.

본 발명의 금속박막필터는 500㎛이하의 금속박판으로서 포토에칭 등의 방법에 의해 100㎛이하의 미세공극이 금속박판을 관통하며 다수개 즉, 17인치 모니터 크기를 예로 든다면, 17인치 평판내에 수십 내지 수백만개의 미세구멍이 형성된다.The metal thin film filter of the present invention is a metal thin plate of 500 μm or less, and micropores of 100 μm or less penetrate the metal plate by a method such as photoetching. Tens to millions of micropores are formed.

이와 같이 미세구멍이 형성된 금속박막필터는 한층으로 사용될 수도 있고 다수의 층으로 적층되어 사용될 수도 있다.As described above, the metal thin film filter in which the micropores are formed may be used as one layer or may be stacked and used in a plurality of layers.

이하 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail.

본 발명에 따른 금속박막필터의 조성은 다음과 같은 세 가지 조성 중 어느 하나의 조성으로 이루어진다.The composition of the metal thin film filter according to the present invention is composed of any one of the following three compositions.

첫째: 니켈; 5-20중량%, 크롬; 10-40중량%, 알루미늄;1-15중량%, 잔부는 철 그리고 불가피한 불순물이 첨가된 합금.First: nickel; 5-20% by weight, chromium; 10-40% by weight, aluminum; 1-15% by weight, balance with iron and inevitable impurities.

둘째: 크롬; 10-40중량%, 알루미늄;1-15중량%, 잔부는 니켈 그리고 불가피한 불순물이 첨가된 합금.Second: chrome; 10-40% by weight, aluminum; 1-15% by weight, balance with nickel and inevitable impurities.

셋째: 크롬; 10-40중량%, 알루미늄;1-15중량%, 잔부는 철 그리고 불가피한 불순물이 첨가된 합금.Third: chromium; 10-40% by weight, aluminum; 1-15% by weight, balance with iron and inevitable impurities.

상기 합금의 조성에서와 같이 본 발명에서는 철-크롬합금, 철-니켈합금 또는 니켈-크롬합금에 알루미늄이 필수적으로 첨가된다. 이와 같이 첨가된 알루미늄은 크롬과 결합하여 안정한 산화물을 형성하게 된다.As in the composition of the alloy, aluminum is essentially added to the iron-chromium alloy, iron-nickel alloy or nickel-chromium alloy. The aluminum added in this way is combined with chromium to form a stable oxide.

이와 같이 형성된 산화물은 안정한 층으로 작용하기 때문에, 합금재료는 고온 산화분위기 또는 고온 황화분위기에서도 산화한 중량변화가 크게 일어나지 않는다. 따라서 이러한 안정된 산화물 층을 필터에 형성하면 필터의 수명이 크게 연장된다. 본 발명에서 안정된 내산화성은 주로 알루미나 필름에 의해서 제공된다.Since the oxide thus formed acts as a stable layer, the weight change of the alloyed material does not occur significantly even in a high temperature oxidizing atmosphere or a high temperature sulfiding atmosphere. Therefore, the formation of such a stable oxide layer in the filter greatly extends the life of the filter. Stable oxidation resistance in the present invention is mainly provided by an alumina film.

본 발명에서 크롬(Cr)은 내열성과 내산화성을 달성하는데 중요한 기본원소로서 크롬의 함량이 낮으면 알루미나 필름이 접착 및 보호성질이 감소하여 내산화성을 유지하기 어렵고, 크롬의 함량이 과도하면 인성이 감소하게 되므로 금속박막필터의 크롬 함유량은 10중량% 내지 40중량%인 것이 바람직하다.In the present invention, chromium (Cr) is an important element for achieving heat resistance and oxidation resistance, when the content of chromium is low, the alumina film is difficult to maintain oxidation resistance due to the decrease in adhesion and protection properties, and when the chromium content is excessive, toughness Since the chromium content of the metal thin film filter is reduced, it is preferable that the content is 10% by weight to 40% by weight.

본 발명에서 알루미늄은 산소와 결합하여 알루미나 산화층을 형성시켜 내산환성을 개선하는 원소로서 알루미늄의 함량이 낮으면 내산화성이 거의 개선되지 못하고, 알루미늄의 함량이 높으면 가공성 및 인성이 더 나빠지므로 금속박막필터의 알루미늄 함량은 1중량%내지 15중량%인 것이 바람직하다.In the present invention, aluminum is an element that combines with oxygen to form an alumina oxide layer and improves oxidation resistance, so that the oxidation resistance is hardly improved when the aluminum content is low, and the metal thin film filter has a high workability and toughness when the aluminum content is high. The aluminum content of is preferably 1% by weight to 15% by weight.

또한 여기에 사용되는 알루미늄은 알루미늄이 기재금속(Base metal)속으로 확산되는 칼로라이징(Calorizing)공정에 기재금속으로 적용되므로 알루미늄 함량이 금속박막의 표면 가까이에서 상대적으로 높도록 조성을 변화시키는 것이 가능하다.In addition, the aluminum used here is applied as a base metal in a calorizing process in which aluminum is diffused into the base metal, so that the composition of the aluminum can be changed so that the aluminum content is relatively high near the surface of the metal thin film. .

여기서 칼로라이징은 기재금속(Base Metal)을 가열하여 분말 알루미늄을 기재금속의 표면에 확산시켜 알루미나층을 향상시키는 방법이다.Calorizing is a method of heating a base metal to diffuse powder aluminum onto the surface of the base metal to improve the alumina layer.

이와 같이 칼로라이징이 실시된 기재금속은 내산화성 및 내열성이 크게 개선된다.Thus, the base metal subjected to the colorizing is greatly improved in oxidation resistance and heat resistance.

한편 니켈은 함유량이 적게 첨가되면 내산화성 유지가 어렵고 많이 첨가되면 취성으로 인해 가공성이 떨어지므로 5중량% 내지 20중량%를 첨가하는 것이 바람직하다.On the other hand, it is preferable to add 5 wt% to 20 wt% of nickel since it is difficult to maintain oxidation resistance when the content is added and the workability is poor due to brittleness.

또한 잔부는 철 또는 니켈으로 이루어 지고 기타 불가피한 불순물 성분이 포함되어 있다.The balance also consists of iron or nickel and contains other unavoidable impurity components.

실시예Example

본 발명에서는 성분함량에 따른 내구성을 시험하기 위하여 10g의 중량을 가지는 금속박막시편을 제작하였다.In the present invention, a metal thin film specimen having a weight of 10 g was manufactured to test the durability according to the component content.

이 금속박막시편은 두께가 120㎛로, 25℃와 300℃에서 240시간 산성가스에 노출시킨 후 시편의 중량을 측정하여 감소된 중량을 측정하였다.The metal thin film specimens were 120 μm thick and were exposed to acidic gas at 25 ° C. and 300 ° C. for 240 hours, and then the weight of the specimen was measured to determine the reduced weight.

이 때 시편이 노출되는 분위기는 이산화황(SO2)가스가 1500ppm이고, 수분의 함량이 10%이다.At this time, the atmosphere in which the specimen is exposed is 1500 ppm of sulfur dioxide (SO 2 ) gas, the moisture content is 10%.

여기서 중량을 측정하여 감소된 중량은 부식되어 소실된 부분으로 금속박막시편의 내구성을 측정하는데 적절한 방법이다.The reduced weight by measuring the weight is a suitable method for measuring the durability of the metal thin film specimens with the corroded and lost parts.

즉 시편의 중량이 적게 감소할수록 부식되어 소실된 부분이 적으므로 내구성이 강한 것을 나타낸다.In other words, as the weight of the specimen decreases, corrosion resistance decreases, so the durability is high.

표 1은 25℃에서 측정한 금속박막시편의 감소중량을 나타내고, 표 2는 300℃에서 측정한 금속박막시편의 감소중량을 나타낸다.Table 1 shows the reduced weight of the metal thin film specimen measured at 25 ℃, Table 2 shows the reduced weight of the metal thin film specimen measured at 300 ℃.

시편번호Psalm Number 철(중량%)Iron (% by weight) 크롬(중량%)Chromium (% by weight) 니켈(중량%)Nickel (wt%) 알루미늄(중량%)Aluminum (% by weight) 감소중량(g)Reduced weight (g) 비교재1Comparative Material 1 잔부Balance 1717 1414 -- 2.12.1 비교재2Comparative Material 2 -- 2525 잔부Balance -- 1.11.1 비교재3Comparative Material 3 잔부Balance 2020 -- -- 1.41.4 발명재1Invention 1 잔부Balance 1616 1313 66 0.50.5 발명재2Invention 2 잔부Balance 1717 1414 1One 0.90.9 발명재3Invention 3 잔부Balance 1010 1414 66 0.50.5 발명재4Invention 4 잔부Balance 1717 2020 66 0.450.45 발명재5Invention 5 -- 2323 잔부Balance 66 0.330.33 발명재6Invention 6 -- 1010 잔부Balance 66 0.450.45 발명재7Invention 7 잔부Balance 2525 -- 66 0.30.3 발명재8Invention Material 8 잔부Balance 1010 -- 66 0.40.4

시편번호Psalm Number 철(중량%)Iron (% by weight) 크롬(중량%)Chromium (% by weight) 니켈(중량%)Nickel (wt%) 알루미늄(중량%)Aluminum (% by weight) 감소중량(g)Reduced weight (g) 비교재1Comparative Material 1 잔부Balance 1717 1414 -- 2.82.8 비교재2Comparative Material 2 -- 2525 잔부Balance -- 1.61.6 비교재3Comparative Material 3 잔부Balance 2020 -- -- 1.951.95 발명재1Invention 1 잔부Balance 1616 1313 66 0.850.85 발명재2Invention 2 잔부Balance 1717 1414 1One 1.351.35 발명재3Invention 3 잔부Balance 1010 1414 66 0.70.7 발명재4Invention 4 잔부Balance 1717 2020 66 0.60.6 발명재5Invention 5 -- 2323 잔부Balance 66 0.420.42 발명재6Invention 6 -- 1010 잔부Balance 66 0.70.7 발명재7Invention 7 잔부Balance 2525 -- 66 0.40.4 발명재8Invention Material 8 잔부Balance 1010 -- 66 0.50.5

표 1 및 표 2에서 보는 바와 같이 먼저 25℃에서와 300℃에서의 측정된 감소중량을 비교하면 온도가 올라갈수록 금속박막시편의 내구성이 떨어지는 것을 알 수 있다.As shown in Table 1 and Table 2, first, when comparing the reduced weight measured at 25 ℃ and 300 ℃ it can be seen that the durability of the metal thin film specimen is lowered as the temperature increases.

본 발명의 발명재와 비교재를 비교하여 보면 25℃에서 측정한 결과는 발명재의 경우는 모두 감소중량이 1g미만이다.Comparing the inventive material and the comparative material of the present invention, the results measured at 25 ° C. show that the reduced weight of the invention is less than 1 g.

또한 300℃에서 측정한 결과 알루미늄이 1중량% 첨가되었을 경우를 제외하고는 발명재에서는 감소중량이 1g 미만이다.In addition, the reduced weight is less than 1 g in the invention except when 1% by weight of aluminum is added as a result of the measurement at 300 ° C.

물론 알루미늄이 1중량% 첨가되었을 경우에도 비교재와 비교하면 감소중량이 적으므로 알루미늄이 내구성을 향상시킨 것을 알 수 있다.Of course, even when 1% by weight of aluminum is added, since the reduced weight is less than that of the comparative material, it can be seen that aluminum improves durability.

따라서 크롬은 10중량% 내지 40중량%이고, 알루미늄은 1중량% 내지 15중량%이며, 잔분이 철이나 니켈을 포함한 불가피한 성분으로 된 금속박막필터는 고온에서도 내구성이 유지된다.Therefore, chromium is 10% by weight to 40% by weight, aluminum is 1% by weight to 15% by weight, and the metal thin film filter whose residue is made of an unavoidable component including iron or nickel is maintained at high temperatures.

이상에서 살펴본 바와 같이 본 발명에 의하면 금속박막필터는 고온에서도 내구성이 유지되므로 금속박막필터를 교환하는데 소요되는 유지보수비를 절약하여 생산원가가 절감된다.As described above, according to the present invention, since the metal thin film filter is maintained at high temperatures, production costs are reduced by saving maintenance costs required to replace the metal thin film filter.

또한 금속박막필터를 교환하기 위한 별도의 시간이 소요되지 않으므로 생산성이 향상된다.In addition, the productivity is improved because it takes no time to replace the metal thin film filter.

Claims (2)

미세공극이 다수개 형성된 금속박막필터에 있어서,In the metal thin film filter formed with a plurality of micropores, 상기 금속박막필터는 크롬 10중량% 내지 40중량%, 알루미늄 1중량% 내지 15중량%, 잔부는 니켈 또는 철로 이루어지고 기타 불가피한 불순물이 포함되며, 두께가 500㎛ 이하이고, 100㎛이하의 미세구멍이 다수 형성된 것을 특징으로 하는 금속박막필터.The metal thin film filter is 10 to 40% by weight of chromium, 1 to 15% by weight of aluminum, the balance is made of nickel or iron and contains other unavoidable impurities, the thickness is 500㎛ or less, less than 100㎛ micropores Metal thin film filter, characterized in that formed a large number. 제 1 항에 있어서,The method of claim 1, 상기 잔부가 철일 경우 상기 조성에 니켈이 5중량% 내지 20중량%가 더 첨가된 것을 특징으로 하는 금속박막필터.The metal thin film filter, characterized in that 5% by weight to 20% by weight of nickel is further added to the composition when the balance is iron.
KR1020010059750A 2001-09-26 2001-09-26 Metal thin-film filter KR20030026668A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050065763A (en) * 2003-12-23 2005-06-30 재단법인 포항산업과학연구원 Metal filter assembly for turbine oil of an electric power station
KR100605367B1 (en) * 2004-12-20 2006-07-31 재단법인 포항산업과학연구원 Metal thin-film filter
KR101296144B1 (en) * 2005-12-22 2013-08-19 재단법인 포항산업과학연구원 Metal thin film oil filter of air compressor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0751522A (en) * 1993-08-20 1995-02-28 Sumitomo Electric Ind Ltd Metal filter having high corrosion resistance
KR20000072210A (en) * 2000-08-17 2000-12-05 송준구 Filter using a thin metal film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0751522A (en) * 1993-08-20 1995-02-28 Sumitomo Electric Ind Ltd Metal filter having high corrosion resistance
KR20000072210A (en) * 2000-08-17 2000-12-05 송준구 Filter using a thin metal film

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050065763A (en) * 2003-12-23 2005-06-30 재단법인 포항산업과학연구원 Metal filter assembly for turbine oil of an electric power station
KR100605367B1 (en) * 2004-12-20 2006-07-31 재단법인 포항산업과학연구원 Metal thin-film filter
KR101296144B1 (en) * 2005-12-22 2013-08-19 재단법인 포항산업과학연구원 Metal thin film oil filter of air compressor

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